CN1490125A - Non-spherical optical component composite machining and testing machine tools - Google Patents
Non-spherical optical component composite machining and testing machine tools Download PDFInfo
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- CN1490125A CN1490125A CNA031247598A CN03124759A CN1490125A CN 1490125 A CN1490125 A CN 1490125A CN A031247598 A CNA031247598 A CN A031247598A CN 03124759 A CN03124759 A CN 03124759A CN 1490125 A CN1490125 A CN 1490125A
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Abstract
A machine tool for machining and testing the non-spherical optical part features that its main body has the symmetrical gantry frame structure with X, Y, Z and C axises designed modularly, the milling head or polishing mechanism is installed to the Z-axis bench, and the floating platform equipped with the in-line measuring and error-measuring unit for plane and parallel to Y axis is arranged on main body. Its advantage is high machining precision.
Description
Technical field:
The present invention relates to the optical element process technology, be specifically related to carry out aspheric surface optical accessory the lathe of milling, polishing Compound Machining and detection.
Background technology:
The normal spherical optics element that uses owing to inevitably having aberration, aberration, can cause image quality not high in traditional optical instrument.In order to obtain perfectly image quality, people cause traditional high quality optical instrument bulky by increasing element compensation such as various optical lenses and reducing aberration, and cost is very high.If adopt aspheric optical element, then can be directly face shape parameter by design optical element improve image quality.So use aspheric surface optical accessory can significantly reduce the size and the weight of optical instrument, and can significantly improve image quality, obtain near perfect optical effect.Therefore aspherical optical element is applied in the novel optical system just more and more.
Because there is a unlimited symmetry axis in sphere, can be by the method processing of moulding to grinding.But aspheric surface optical accessory is owing to face type complexity, and great majority have only a symmetry axis, and required precision is very high, and surface precision requires to reach part to 1/tens wavelength (wavelength equals 0.6328 μ m) usually.Therefore aspheric processing and detect more difficult, especially high-quality aspheric surface part shows: the 1. radius of curvature difference of aspheric surface each point, sphere then each point is identical, so aspheric surface is difficult for correction; 2. aspheric surface can't solve with the centering edging method that spherical mirror adopted the deflection of part another side, can only guarantee by processing; 3. aspheric surface generally can not be checked aperture and local aperture with testplate, and the method for inspection is complicated and time-consuming.
The higher aspheric surface optical accessory of precision adopts the method processing of grinding and polishing usually at present, promptly grinds to form the aspheric surface blank earlier, and the method by polishing improves surface quality again, reduces roughness, and carries out partial face type error correction.The processing of traditional aspheric surface optical accessory is to rely on the workman that is skilled in technique to repair by part repeatedly and throw and constantly detect and finish.Because process relies on workman's handicraft fully, can't quantitatively control, the finished part rate of processing is very low, and the precision repdocutbility can't guarantee, and the cost height, and the cycle is very long, can not satisfy the application demand of aspheric surface optical accessory basically.Since last century, the quantitative polishing technology of computer control small tool appearred in the seventies, the processing method of optical element had had qualitative leap.This method is based on Princeton (Preston) equation, promptly keeping under the constant situation of other processing conditions (as the concentration of grinding fluid, abrasive grain, processing temperature etc.), the clearance of material is directly proportional with pressure and relative velocity between polishing film and the workpiece.Like this can be by the pressure between control polishing film and the workpiece and the movement velocity of polishing film, remove the residual error of surface of the work quantitatively, reach and substitute the purpose of manually carrying out optical element processing, and then the uncertainty of elimination artificial, the high accuracy aspheric surface optical accessory is produced in batches becomes possibility.
Computer-controlled aspheric surface optical accessory process generally is divided into several stages: corase grind-correct grinding-face type detection-polishing, its mesoprosopy detect and polishing is a process of carrying out repeatedly, till reaching required precision.Grinding process normally adopts the method for milling (with cup wheel or dish-like emery wheel), carries out grinding with Digit Control Machine Tool, makes the precision that the black skin type reaches to be needed.Corase grind mainly is that purpose is different with the difference of correct grinding.Corase grind is used for the workpiece blank moulding, is purpose to reduce allowance.Correct grinding is used to reduce to roughly grind the metamorphic layer of back surface of the work, reduces micro-crack, improves surface precision.Polishing process has two effects: the one, improve surface smoothness, and the one, reduce face type error.For the ease of control, the normal pressure and the movement velocity of polishing head of keeping is constant in polishing process, controls the size of material removal amount by control polishing head time of staying of every on workpiece.After the face type error information after measuring quantification, obtain on the workpiece every process time, i.e. material removal amount by trajectory planning and residence time algorithm.Because polishing is a very complicated process, uncertain influence factor is a lot, the unlikely face type error that makes of polishing processing is reduced to acceptable degree, need process by polishing-the repeatedly cyclic process of face type error measure-reprocessing, face type error is progressively converged in the scope of requirement.
The milling manufacturing tolerance shows as the surplus of polishing processing, the material removal amount the when precision of raising milling processing can significantly reduce polishing, and then greatly reduce the time that polishing is processed, significantly improve working (machining) efficiency.And the machining accuracy of milling processing guarantees owing to lathe, the machining accuracy of lathe be brought up to micron order even higher, will greatly increase the cost of lathe, and is very difficult.
Quantitatively polishing processing be unable to do without and measures, and certainty of measurement has determined the limit of accuracy that polishing processing can reach.Because it is very high that the surface precision of aspheric surface optical accessory requires, the method for quantitative measuring that adopts has wavefront interferometer measurement and superhigh precision measurement of coordinates etc. usually.Wavefront interferometer can only be used for the measurement of optical surface, and precision can reach 1/tens wavelength, and when measuring aspheric surface, needing increases compensating glass, and each compensating glass can only be used for a kind of measurement of workpiece, and it is very high to measure cost.Measurement of coordinates can be used for the measurement of milling surface and optical surface, and it is low to measure cost, can measure the arbitrary face type easily, but certainty of measurement does not have interferometric method certainty of measurement height.
Quantitatively polishing is used to remove the high point tolerance of finished surface, and surface error is gone to zero.Because the polishing film all has the removal effect to the material of institute overlay area, in order to make face type error be tending towards convergence, two guardian techniques are arranged: the one, polishing film path planning and residence time algorithm, the one, stable and controlled removal function be arranged, and the removal function shape should be rendered as the curve that there is peak value dull centre, so more help path planning, make error be tending towards convergence fast.In face type error correction process, often need to change the removal function, and the pressure between forms of motion, polishing film and the workpiece of the shape of removal function and polishing film is closely related according to the characteristics of actual face type error and the needs of processing.So require polishing mechanism that good controllability will be arranged, and the polishing film forms of motion that is provided can satisfy quantitative polishing processing to removing the requirement of function.
Summary of the invention:
Technical problem to be solved by this invention is to overcome above-mentioned existing in prior technology defective, provides a kind of and can realize milling, the polishing Compound Machining of aspheric surface optical accessory simultaneously and detect lathe on a machine tool.
The present invention solves the problems of the technologies described above by following technical scheme.It is characterized in that bed piece adopts the symmetrical expression gantry frame structure, which is provided with X, Y, four reference axis of Z, C, each adopts modularized design, by on Z axle workbench the milling head being installed respectively or polishing mechanism carries out the switching of milling and polishing operation; On bed piece, also be provided with the air floating platform parallel with Y-axis, the face type error measuring means that can carry out face type on-position measure and compensation is housed on this platform.On Z axle workbench, also be provided with the A axle, link with it by connecting plate, the grinding wheel spindle that is used for milling is installed in A axle turntable.Polishing of the present invention mechanism adopts planet gear type birotor polishing mechanism, it comprises hollow shaft, autobiography axle and polishing dish, described hollow shaft and autobiography axle are by driven by servomotor, and the polishing dish is loaded on axis of rotation bottom, connect by eccentric adjustment between hollow shaft and the autobiography axle.Wherein the polishing dish adopts universal coupling to be connected with axis of rotation axle head, and eccentric adjustment comprises dovetail groove slide unit and gyroaxis, and wherein dovetail groove slide unit upper hopper chute partly is loaded on the hollow shaft axle head, and the slide unit part is connected with the axis of rotation by gyroaxis.Also be provided with a flexible axle between the spinning motor and the axis of rotation, this flexible axle one end and spinning motor output shaft are affixed, and the other end is connected with the axis of rotation after passing hollow shaft, dovetail groove slide unit, gyroaxis.Face type error measuring means comprises workbench, autocollimatic instrument and can adjust the displacement transducer of its position, displacement transducer adopts reflective laser displacement transducer or tangent displacement sensor, workbench is loaded on the air floating platform, the autocollimatic instrument is placed on it, displacement transducer places the workbench side, and is corresponding with the location of workpiece.
The present invention adopts modular Machine Tool design thought, machine body structure-X, Y, Z, C axle are formed the planer-type body construction, these combination can be satisfied moulding milling processing and the requirement of quantitative polishing process to machine body, by on machine body, changing milling head and grinding and polishing device, can realize aspheric surface optical accessory moulding milling processing and quantitatively polishing processing respectively.Wherein grinding and polishing device adopts the light and handy planet gear type birotor polishing mechanism of structure, overcome the shortcoming that the revolution rotating speed is difficult to improve, improved the working (machining) efficiency of mechanism on the one hand, on the other hand, in the rotating ratio adjustable range that enlarges, can find the removal function of various needs, make quantitative polishing add the easier convergence of face type error in man-hour.In addition, increased independently face type error measuring means on lathe, be used for the on-position measure and the compensation of face type error, its measurement result can effectively compensate the error of lathe, has significantly improved machining accuracy.
Description of drawings:
Fig. 1 is a stereogram of the present invention;
Fig. 2 is the machine tool structure front view during for milling of the present invention;
Fig. 3 is the machine tool structure right view during for milling of the present invention;
Fig. 4 is machine tool structure figure during for polishing of the present invention;
Fig. 5 is birotor polishing of the present invention mechanism structure chart;
Fig. 6 is a measurement mechanism structural front view of the present invention;
Fig. 7 is a measurement mechanism structure right view of the present invention.
The specific embodiment:
At present, the digital control processing of aspheric surface optical accessory is a very complicated process.Several Key Problems is arranged in this course: the one, the quality of milling processing, the 2nd, the precision problem of measuring, the 3rd, the problem of error convergence speed.These several question synthesis influence machining accuracy and working (machining) efficiency, and high working (machining) efficiency and precision are the basic demands to manufacturing equipment.The process segment that two different in kinds are arranged in the actual processing: milling process and polishing process, this class lathe is the conversion that realizes milling and polishing operation by the mode of conversion Working position usually, machine tool structure complexity, cost height.The present invention is on the basis of summing up previous work, to improve working (machining) efficiency and machining accuracy is target, takes into account the consideration cost, and existing aspheric surface optical accessory machining tool is improved, it is characterized in that bed piece adopts the symmetrical expression gantry frame structure, can obtain bigger processing space; The ability of opposing strain is strong; Can improve integral rigidity, stability and the thermal symmetry of lathe.The lathe bed material is a granite, has good absorbing performance, and structural stability is good.On lathe bed, be provided with X, Y, four reference axis of Z, C, each adopts modularized design, its combination can be satisfied moulding milling processing and the requirement of quantitative polishing process to machine body, by on Z axle workbench, the milling head being installed respectively or polishing mechanism carries out the switching of milling and polishing operation, can collect the milling moulding, polishing is machined in one, realize aspheric surface optical accessory moulding milling processing and quantitatively polishing processing respectively, its configuration structure is simple, and do not influence the working (machining) efficiency of lathe, lathe rigidity height, milling machining accuracy can reach 10 μ m.
For further eliminating systematic error, on bed piece, also be provided with the air floating platform parallel with Y-axis, the face type error measuring means that can carry out face type on-position measure and compensation is housed on this platform, by this device on-line measurement straightness error, and with this error compensation in measurement result, can eliminate the guide rail linearity error, improve machine finish.
Fig. 1～Fig. 7 has showed the concrete Application Example structure of the present invention.
As Fig. 1～shown in Figure 4, the present invention forms gantry frame structure by lathe bed 1, two mutual parallel and upright column 22 and crossbeams 28, Y-axis guide rail 24 is housed on the crossbeam 28, Y-axis workbench 31 is placed on the Y-axis guide rail 24, can be driven by Y-axis leading screw 25 and do the straight line slippage along Y-axis guide rail 24, Y-axis leading screw 25 is driven by y-axis motor 29 and rotates.On Y-axis workbench 31, be fixed with Z axle workbench 30, be equipped with on it and can drive the Z axle 37 that slides up and down by Z spindle motor 26, Z axle 37 directions of motion are vertical with Y-axis guide rail 24 rectilinear directions.On Z axle workbench 30, connect A axle 33 by connecting plate 32, this is turntable type axle commonly used, the grinding wheel spindle that is used for milling is installed in turntable set on the A axle 33.On lathe bed 1, be provided with X-axis guide rail 38, symmetric position between two columns 22, its axis is vertical with Z axle 37 with Y-axis guide rail 24, and X-axis workbench 35 is housed on this guide rail, can be driven by X-axis leading screw 4 and do the straight line slippage along X-axis guide rail 38, X-axis leading screw 4 is driven by X-axis motor 15 and rotates.On X-axis workbench 35, C axle turntable 34 is housed, workpiece 210 places on the C axle turntable 34 by work piece holder 211, like this, realizes complex-curved milling processing by X, Y, Z, A are four-axle linked; Realize turning round symmetrical aspheric milling processing by Y, Z, A, C are four-axle linked, can realize that by control A axle 33 corners emery wheel processes along the surface of the work normal direction.
After the aspheric surface optical accessory milling processing, need carry out quantitative polishing processing, polishing mechanism can guarantee that polishing rim normal direction suits surface of the work.General polishing mechanism mainly comprises the axis of rotation and hollow shaft, discover through us, the rotating ratio of the axis of rotation and hollow shaft is 50: 1～1: all exist between-2 to add needed more satisfactory removal function, this means that the axis of rotation need be than the speed adjustable range of broad, the dual rotor mechanism of prior art does not all possess such requirement at present.Dual rotor mechanism will be realized multinomial contents such as relative hollow shaft eccentricity adjusting of axial float, the axis of rotation of spinning motion, revolution motion, the axis of rotation and the adjusting of polishing film operating pressure, complex structure, eccentric mass is big, if improve the revolution rotating speed, then excessive centrifugal force will be difficult to guarantee mechanism's operate as normal.As shown in Figure 5, meter of the present invention the light and handy planet gear type birotor polishing mechanism of a kind of structure, overcome the shortcoming that the revolution rotating speed is difficult to improve, improved the working (machining) efficiency of mechanism on the one hand, on the other hand, in the rotating ratio adjustable range that enlarges, can find the removal function of various needs, make quantitative polishing add the easier convergence of face type error in man-hour.Its parameter is as follows: rotating ratio is 100: 1～1: adjustable continuously between-2, and maximum rotation rotating speed: 3000rpm, maximum revolution rotating speed: 600rpm, eccentricity: 5～20mm is adjustable continuously, pressure: 0～5Kg LINEAR CONTINUOUS is adjustable.As shown in the figure, polishing of the present invention adds directly installs birotor polishing mechanism 100 man-hour on Z axle workbench 30, it comprises hollow shaft 112, autobiography axle 105 and polishing dish 101, described hollow shaft 112 is arranged on the connecting plate 32 by hollow shaft bearing 113, be hollow-core construction, by being with 109 rotations under revoluting motor 108 drives synchronously, speed reducing ratio is 2: 1.Autobiography axle 105 is driven by spinning motor 1110 and rotates, polishing dish 101 is loaded on the axis of rotation 105 bottoms, adopt universal coupling 102 to connect, polishing dish 101 is freely tilted in 15 ° of scopes, can guarantee that when surface of the work is not orthogonal to the axis of rotation 105 polishing dish 101 is tangent with workpiece 210 surfaces all the time.The permission axis of rotation 105 is around axial rotation and the slip string is moving vertically, and stroke 30mm endwisely slips.Connect by eccentric adjustment between hollow shaft 112 and the autobiography axle 105.Eccentric adjustment comprises dovetail groove slide unit 107 and gyroaxis 106, wherein dovetail groove slide unit 107 upper hopper chutes 114 parts are loaded on hollow shaft 112 axle heads, slide unit partly is connected with the axis of rotation 105 by gyroaxis 106, gyroaxis 106 can make mechanism's free-wheeling system when revolution motion can keep translation, avoids producing the twisted wire phenomenon.Gyroaxis 106 also is a hollow-core construction, has through hole at the dovetail groove place accordingly.In order to reduce eccentric mass, spinning motor 110 is installed on dual rotor mechanism 100 pedestals, be provided with a flexible axle 111 between the spinning motor 110 and the axis of rotation 105, these flexible axle 111 1 ends and spinning motor 110 output shafts are affixed, the other end is connected with the axis of rotation 105 after passing hollow shaft 112, dovetail groove slide unit 107, gyroaxis 106, transmits spinning motions by this flexible axle 111.Adopted a kind of chute structure at flexible axle 111 and the axis of rotation 105 junctions, flexible axle 11 does not break away from the axis of rotation 105 in the time of can guaranteeing that the axis of rotation 105 slides vertically.The operating pressure of polishing film of the present invention is by being provided by the small-sized cylinder 104 of proportional pressure valve automatic pressure regulation.Cylinder 104 is installed on the axis of rotation 105 axle beds, and its piston rod is connected with the axis of rotation 105 by connecting plate 103.The operating pressure of cylinder 104 acts on the polishing dish 101 by cylinder 104 piston rods, connecting plate 103, the axis of rotation 105.This pressure is regulated automatically by a proportional pressure valve, and can guarantee constant pressure in the process.
The structural parameters of birotor polishing of the present invention mechanism are as follows:
Hollow shaft type of drive: MSMA5A2A motor+384-3M15 arc tooth synchronous belt, rotating speed: 0～600rpm;
Axis of rotation type of drive: MSMA5A2A motor+flexible axle, rotating speed: 0～3000rpm;
Pressuring method: the electric proportional pressure-reducing valve of CDU16-15D cylinder+VY1A00-M5, stroke: 15mm, pressure adjustable range: 0～5Kg;
Eccentric adjusting: self-control dovetail mechanism, adjustable extent: 5～20mm.
As Fig. 1, Fig. 6, shown in Figure 7, the present invention has increased independently face type error measuring means on lathe, is used for the on-position measure and the compensation of face type error.If directly with the method tru(e)ing face type error of polishing, it is very long then to add the cycle.General more satisfactory is that precision reaches 1～2 μ m after the milling.This can realize by directly improving machine tool accuracy, but cost will increase exponentially.The present invention installs a measurement mechanism on the machine coordinates axle, be used for the error measure of face type, by the machining accuracy of compensation with the raising lathe.As shown in the figure, on bed piece 1, be provided with an air supporting measuring table, it places by a pair of semi-enclosed aerostatic slide 202 and a T font guide rail 201 forms, and guide rail 201 two ends are supported by column 212, and axis is parallel to Y-axis guide rail 24, and material is granite.Air supporting measuring table axis of movement is called the V axle here, this platform axis is parallel with Y-axis, and its linearity reaches 0.2 μ m.Face type error measuring means is loaded on the air supporting measuring table, it comprises workbench 203, autocollimatic instrument 214 and can adjust the displacement transducer 206 of its position, workbench 203 is fixed on the aerostatic slide 202, autocollimatic instrument 214 is placed on it, displacement transducer 206 places workbench 203 sides by sensor connecting plate 205, corresponding with workpiece 210 positions, 205 of sensor connecting plates are connected with workbench 203 sides to guiding mechanism by Z.Since measuring table along Z to straightness error directly translate into measure error, in order to eliminate this error,, this error compensation to measurement result, is eliminated the influence of guide rail linearity to certainty of measurement by autocollimatic instrument 214 on-line measurement straightness errors.Measuring method is: autocollimator is installed on the air supporting measuring table, the speculum 213 of autocollimator is loaded on an end of air-float guide rail 201, its minute surface center is consistent with autocollimatic instrument 214 axial lines, when measuring table moves, by the deflection angle of autocollimator measuring table in motion process, can obtain the straightness error of air supporting measuring table by a cover algorithm.By compensation, can make the precision of final measurement mechanism reach 0.2 μ m/400mm.Like this, by error compensation, the milling machining accuracy of workpiece can reach 2 μ m, and this measurement mechanism also can be used for the error measure of face type and the correction in the stage of polishing.
The overall structure explanation of the present invention and the course of work:
The lathe overall structure is a planer type structure, and lathe bed 1 is the marble platform, horizontal positioned.Crossbeam 28 is installed in lathe bed 1 top by two columns 22, and Y-axis workbench 31, its axis and lathe bed 1 plane parallel are installed on crossbeam 28.X-axis workbench 35 is directly installed on lathe bed 1 plane, and the X-axis axis becomes the spatial vertical relation with the Y-axis axis.Z axle 37 is installed on Y-axis workbench 31, and Z axle 37 axis normal are in lathe bed 1 plane.X, Y, Z axis become right hand rectangular coordinate system.C axle turntable 34 is installed on X-axis workbench 35, and the C axis is parallel with the Z axle.X, Y, Z, C axle constitute lathe basic exercise axle system, and X-axis is used for the position of travelling workpiece, and Y-axis, Z axle are used for the position of mobile cutter (milling head and polishing mechanism).The C axle is used to install workpiece, when the C axle rotates, is convenient to process the rotary type workpiece.Installation form and the Y-axis of air supporting measuring table on lathe is similar, also is to be supported on lathe bed 1 plane by two columns 212, and its axis is parallel to Y-axis.Air floating platform is installed in an end on lathe bed 1 plane.
Milling adds man-hour, and A axle 33 turntables are installed on Z axle 37 workbench, and A axle 33 axis are parallel to X-axis, milling head (emery wheel) is installed on the A axle 33 turntable table tops, milling head (emery wheel) axis normal is in A axle 33, and parallel with Z axle workbench 30 table tops, and emery wheel is a cup wheel.Usually a milling axis is with respect to C axle turntable 34 planes (workpiece) inclination one angle, adding the one section cylindrical camber line that relies on abrasive wheel end face man-hour contacts with workpiece 210 and carries out grinding, emery wheel can not interfere with workpiece when processing concave surface workpiece like this, can carry out the processing of convex surface workpiece yet.In the man-hour that adds of carrying out rotary part, C axle turntable 34 drives workpiece 210 rotations, can process by the combination of X, Z, C axle, also can process by the combination of Y, Z, C axle.Under a kind of compound mode in back, can make emery wheel all the time along the processing of workpiece 210 normal directions by 33 interlocks of A axle, help guaranteeing machining accuracy.When the processing non-turning symmetroid, can utilize X, Y, Z, A, the interlock of C axle to process.
Polishing adds man-hour, pulls down A axle 33 turntables (containing the milling head) from Z axle workbench 30, loads onto birotor polishing mechanism 100, and the axis of polishing mechanism 100 (axis of rotation) is parallel with Z axle 37 axis.Add man-hour carrying out polishing, adjust Z axle 37 positions, polishing dish 101 and workpiece 210 surfaces contacts, and pass through the axis of rotation 105 precompressed one segment distance.By the operating pressure of cylinder 104 adjustment polishing dishes 101, the rotation and the revolution speed of birotor polishing mechanism 100 is set, and eccentricity, can carry out polishing processing.At this moment the machining area of polishing dish 101 on workpiece 210 surfaces is border circular areas, and zone radius is revolution radius and polishing dish 101 radius sums.The movement locus of the center of polishing dish 101 machining areas can pass through Y, the combination of C axle, and X, the combination of C axle or X, Y-axis aggregate motion realize.In that being carried out quantitative polishing, surface of the work adds man-hour, at first according to the workpiece face type error information that measures, and the removal function of polishing dish 101, calculate polishing dish 101 residence times at the surface of the work each point, movement locus according to these residence time planning polishing dish 101 polishing regional centers, the controller bed motion can be realized quantitative polishing processing then.
When measuring workpieces face type, earlier workpiece 210 is moved to the measurement station, utilize the position of Z to guiding mechanism 204 adjustment sensors 206, workpiece 210 is in the measurement stroke of sensor 206.Workpiece 210 rotations (rotation of C axle) during measurement, sensor 206 is along air floating platform motion scan workpiece 210 surfaces, write down measurement point coordinate (at distance and workpiece 210 rotational angles of air floating platform direction upper sensor 206 measuring points) and measured value, write down the reading of photoelectric auto-collimator 214 simultaneously apart from workpiece 210 centres of gyration.The reading of autocollimator 214 is used to proofread and correct the measure error that causes because of air-float guide rail 201 linearitys.Handle through data, can obtain the face type error of workpiece.
Claims (9)
1, a kind of aspheric surface optical accessory Compound Machining, detection lathe, it is characterized in that bed piece adopts the symmetrical expression gantry frame structure, which is provided with X, Y, four reference axis of Z, C, each adopts modularized design, by on Z axle workbench the milling head being installed respectively or polishing mechanism carries out the switching of milling and polishing operation; On bed piece, also be provided with the air floating platform parallel with Y-axis, the face type error measuring means that can carry out face type on-position measure and compensation is housed on this platform.
2, aspheric surface optical accessory Compound Machining according to claim 1, detection lathe is characterized in that Z axle workbench links by connecting plate and A axle, and the grinding wheel spindle that is used for milling is installed in A axle turntable.
3, aspheric surface optical accessory Compound Machining according to claim 1 and 2, detection lathe, it is characterized in that polishing mechanism adopts planet gear type birotor polishing mechanism, it comprises hollow shaft, autobiography axle and polishing dish, described hollow shaft and autobiography axle are by driven by servomotor, the polishing dish is loaded on axis of rotation bottom, connects by eccentric adjustment between hollow shaft and the autobiography axle.
4, aspheric surface optical accessory Compound Machining according to claim 1 and 2, detection lathe, it is characterized in that face type error measuring means comprises workbench, autocollimatic instrument and can adjust the displacement transducer of its position, workbench is loaded on the air floating platform, the autocollimatic instrument is placed on it, displacement transducer places the workbench side, and is corresponding with the location of workpiece.
5, aspheric surface optical accessory Compound Machining according to claim 3, detection lathe is characterized in that polishing dish and axis of rotation axle head adopt universal coupling to be connected.
6, aspheric surface optical accessory Compound Machining according to claim 3, detection lathe, it is characterized in that eccentric adjustment comprises dovetail groove slide unit and gyroaxis, wherein dovetail groove slide unit upper hopper chute partly is loaded on the hollow shaft axle head, and the slide unit part is connected with the axis of rotation by gyroaxis.
7, aspheric surface optical accessory Compound Machining according to claim 3, detect lathe, it is characterized in that the axis of rotation is provided with can be by the cylinder of proportional pressure valve automatic pressure regulation, this cylinder piston rod is connected with the axis of rotation by connecting plate.
8, aspheric surface optical accessory Compound Machining according to claim 4, detection lathe is characterized in that displacement transducer adopts reflective laser displacement transducer or tangent displacement sensor.
9, aspheric surface optical accessory Compound Machining according to claim 6, detection lathe, it is characterized in that being provided with between the spinning motor and the axis of rotation flexible axle, this flexible axle one end and spinning motor output shaft are affixed, and the other end is connected with the axis of rotation after passing hollow shaft, dovetail groove slide unit, gyroaxis.
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