CN102607483A - Cylindrical coordinate contact measurement method for large-diameter optical aspheric element - Google Patents
Cylindrical coordinate contact measurement method for large-diameter optical aspheric element Download PDFInfo
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- CN102607483A CN102607483A CN2012100823457A CN201210082345A CN102607483A CN 102607483 A CN102607483 A CN 102607483A CN 2012100823457 A CN2012100823457 A CN 2012100823457A CN 201210082345 A CN201210082345 A CN 201210082345A CN 102607483 A CN102607483 A CN 102607483A
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Abstract
The invention discloses a cylindrical coordinate contact measurement method for a large-diameter optical aspheric element by collecting two-dimensional or three-dimensional data by using a measuring machine by adopting the cylindrical coordinate measurement method. The cylindrical coordinate contact measurement method for the large-diameter optical aspheric element comprises the following steps: S1, aligning the center of a rotating platform surface and the center of a length meter by using an inductance micrometer; S2, aligning a workpiece by using the inductance micrometer; S3, determining a reference coordinate, moving the X axis so as to move the length meter to the edge of the workpiece to determine a starting point, and comparing the movement amount with the reference coordinate to determine the measurement stroke L; and S4, establishing a workpiece coordinate system and a measurement coordinate system by using the measuring machine, determining the two-dimensional or three-dimensional measurement, and collecting data to obtain the needed coordinate point. By using the ultraprecise shape measuring machine, the measurement and the assessment after the milling and the grinding of the large-diameter aspheric element can be realized, and the two-dimensional or three-dimensional error assessment of the workpiece can be realized. The measuring process is easy to operate, the cylindrical coordinate contact measurement method has high efficiency, and the measuring path is easy to implement.
Description
[technical field]
The invention belongs to the Technology of Precision Measurement field, particularly a kind of contact measurement method of large-aperture optical non-spherical element.
[background technology]
Large space telescope in the space optics adopts the secondary aspherical catoptron; Device of high power laser adopts the multi-disc aspheric surface in the laser fusion; Space camera, spacer remote sensing, heavy caliber night vision device etc. all adopt the high-precision heavy-caliber non-spherical element; Along with the raising of space technology and defense technology, aperture aspherical element requirement is increasing.In enormous quantities, high-level efficiency, high-precision manufacturing optical aspherical surface element just needs high-precision measurement instruct process, and is following, measuring process is will efficient high, precision is high and the error evaluation method is reliably quick.Aspheric measuring technique restricts the aspheric surface application development always; Non-spherical element for after the milling processing can't adopt contactless measuring method; Because surface figure accuracy can not satisfy the requirement of interferometry, therefore measuring all is the measuring method that adopts contact.The contact type measurement of aperture aspherical mainly contains three-dimensional coordinates measurement and splicing measuring technique; The error source of three-coordinates measuring machine is many; Measuring accuracy is low, and high-precision three-coordinates measuring machine costs an arm and a leg, and abroad measurement mainly contains German leitz three-coordinates measuring machine CMM to aperture aspherical; Splicing is measured and is adopted increase the 3rd link to measure, and again measurement data is carried out analyzing and processing, and the measurement result degree of accuracy that obtains like this is not high.
Developed efficient, high-precision measuring method and looked for middle method fast to extra accuracy shape measuring instrument-cylindrical coordinates measuring instrument; Realize surface shape measurement and evaluation after the aperture aspherical milling is processed, be intended to solve the measurement of bore at the 500-1000mm aperture aspherical optical elements.
[summary of the invention]
The object of the present invention is to provide a kind of large-aperture optical non-spherical element cylindrical coordinates contact measurement method, be used for surface shape measurement and evaluation after the milling of aperture aspherical element is processed; Adopt the cylindrical coordinates coordinate system to set up workpiece coordinate system and measurement coordinate system, carry out the quick sampling of data through the high precision contact measuring head.
To achieve these goals, the present invention adopts following technical scheme:
A kind of large-aperture optical non-spherical element cylindrical coordinates contact measurement method utilizes measuring machine to pass through the cylindrical coordinates metering system, gathers two dimension or three-dimensional data; May further comprise the steps:
Step S1: utilize inductance amesdial, centering turntable face center and length gauge center make centres up and down, and concentricity precision guarantees at 0.1 μ m;
Step S2:, with the workpiece centering length gauge is stretched out through inductance amesdial, record length meter overhang writes down X axial coordinate value simultaneously, with the coordinate of this point as reference coordinate (x
0, z
0);
Step S3: after confirming reference coordinate, mobile X axle moves to the edge of work with length gauge and confirms starting point, and amount of movement and reference coordinate are relatively confirmed to measure stroke L;
Step S4: set up workpiece coordinate system and measurement coordinate system according to measuring machine, confirm two-dimensional measurement or three-dimensional measurement, the line data collection of going forward side by side obtains needed coordinate points.
The present invention further improves and is: first centering turntable face and length gauge center among the step S1, through inductance amesdial workpiece is adjusted to the center again.
The present invention further improves and is: step S1 specifically may further comprise the steps: the inductance amesdial gauge head is fixed to above the gauge stand; And gauge stand is fixed to the turntable face can realizes the position measured arbitrarily; The inductance amesdial gauge head is got to the length gauge end position, through the core-regulating mechanism of turntable face adjustment rotary work; Inductance amesdial is transferred to 0.01 μ m shelves, error is adjusted in 0.1 micron, be centering.
The further improvement of the present invention is: in the two-dimensional measurement process, the X spindle unit drives length gauge and moves in the X-axis direction, and realizes measuring the motion of step pitch, whenever walks a step pitch length gauge and stretches out collection one secondary data, obtains N coordinate points (x
i, z
i), i=1 ... N; In the three-dimensional measurement process, the measurement step number of every circle is n1, and the step pitch of measurement is n2; Since first, the turntable face rotates an angle θ=360/n1, and length gauge stretches out once sampling; Surveyed a circle, found reference position, the turntable face moves in the X-axis direction one and measures step pitch; Up to accomplishing measuring process, obtain n1 * n2 coordinate points (x
Ij, z
Ij, θ
Ij), i=1 ... N1, j=1 ... N2.
The present invention further improves and is: measuring machine comprises natural granite lathe bed, X spindle unit, Z spindle unit and aligning and leveling device; The X spindle unit comprises auxilliary pneumato-static slideway, welding elliptic arc portal frame, main pneumato-static slideway and first linear electric motors; Auxilliary pneumato-static slideway and main pneumato-static slideway are arranged in natural granite lathe bed both sides; Two ends of welding elliptic arc portal frame, an end is fixed on the auxilliary pneumato-static slideway, and the other end is fixed on main pneumato-static slideway; The Z spindle unit comprises eight faceted pebble grouan guide pillars, V-type air-bearing piece, length gauge and second linear electric motors; Two V-type air-bearing pieces are connected on the welding elliptic arc portal frame verticality that is used to regulate the Z axle through bolt; It is secondary that the double V-shaped air-bearing piece that eight faceted pebble grouan guide pillars 7 are connected with symmetry is formed pneumato-static slideway, realizes moving up and down of Z axle; The secondary coil of second linear electric motors is fixedly connected with welding elliptic arc portal frame, and primary coil is connected with the grouan guide pillar; Length gauge is fixed on the inner chamber of grouan guide pillar; The aligning and leveling device comprises static pressure dish under turntable face, universal leveling board, the turntable and drives the driver element that the static pressure dish rotates under the turntable; Support through aerostatic bearing between static pressure dish and the natural granite lathe bed under the turntable.
The present invention further improves and is: auxilliary pneumato-static slideway and main pneumato-static slideway are provided with the inflation interface; During the motion of X spindle unit; Give auxilliary pneumato-static slideway and the inflation of main pneumato-static slideway through the inflation interface, make between end face and the side of auxilliary pneumato-static slideway, main pneumato-static slideway and natural granite lathe bed and all form air film.
The present invention further improves and is: main pneumato-static slideway is driven by X axle linear electric motors, drives welding elliptic arc portal frame and moves along natural granite bed ways face.
The present invention further improves and is: the aligning and leveling device also comprises some levelling devices and aligning device; Static pressure dish top is provided with the groove of concave spherical surface and some symmetry arrangement under the turntable; The bottom of universal leveling board is provided with protruding sphere and tapered slope; Universal leveling board is installed on static pressure dish top under the turntable, and the concave spherical surface of static pressure dish matches under the protruding sphere of universal leveling board and the turntable; Levelling device comprises leveling positioning disk, linkage levelling screw, leveling pulley, leveling pulley spindle and leveling bearing; The leveling bearing is installed under the turntable on the static pressure dish in the corresponding groove, can move along the groove of static pressure dish under the turntable; The leveling pulley spindle is connected to the leveling pulley on the leveling bearing; Linkage levelling screw and leveling bearing threaded engagement; Aligning device comprises some aligning jackscrews and turntable face; The following installed surface of turntable face is directly installed on the universal leveling board; The side of turntable face is symmetrically arranged with some tapped through holes, and some aligning jackscrews are arranged in the corresponding tapped through hole and with the turntable face and are threaded.
The present invention further improves and is: the head cross section of linkage levelling screw is trapezoidal, and the leveling positioning disk is pushed down the head of linkage levelling screw, passes through bolted then on following static pressure dish, linkage levelling screw can only be rotated, and can not move axially; The side week of universal leveling board is provided with periphery, and the tip of some aligning jackscrews is passed corresponding tapped through hole and supported said periphery.
The present invention further improves and is: natural granite lathe bed center is provided with a mounting hole, and the hemisphere seat is fixed in this mounting hole; The semisphere graphite tile is fixed on the hemisphere seat; The turntable mandrel is installed on hemisphere axle center and is fixed under the turntable on the static pressure dish together with the hemisphere axle; The protruding sphere of hemisphere axle matches with the concave spherical surface of semisphere graphite tile; The bottom surface of static pressure dish offers ring groove under the turntable, evenly is fixed with some flat bearing graphite blocks in this ring groove; It is secondary that flat bearing graphite block and natural granite lathe bed form aerostatic bearing.
The present invention further improves and is: said accurate aperture aspherical shape measure machine also comprises first gas circuit and second gas circuit; First gas circuit is communicated with the semisphere graphite tile, and pressed gas feeds in the semisphere graphite tile, between semisphere graphite tile and hemisphere axle, forms air film; Second gas circuit is communicated with said some flat bearing graphite blocks, and pressed gas feeds in the flat bearing graphite block, between flat bearing graphite block and natural granite lathe bed, forms air film.
The present invention further improves and is: welding elliptic arc portal frame comprises header board and back plate; Reinforcement gusset through some symmetry arrangement between header board and the back plate is weldingly fixed on together; The lower side of header board and back plate is along comprising the semiellipse segmental arc.
The present invention further improves and is: driver element comprises belt pulley, speed reduction unit and servomotor; Servomotor is connected with belt pulley through speed reduction unit.
The present invention further improves and is: the thickness of said air film is 3～5 μ m.
Compared with prior art, beneficial effect of the present invention is: the present invention can be used in the measurement evaluation after the milling of aperture aspherical element is processed through the ultra precise measurement machine, can realize workpiece two and three dimensions error evaluation.Measuring process is easy to operate, and measuring method efficient is high, and measuring route is prone to realize.
[description of drawings]
Fig. 1 is the front view of ultraprecise aperture aspherical shape measure machine of the present invention;
Fig. 2 is the side view of ultraprecise aperture aspherical shape measure machine shown in Figure 1;
Fig. 3 is the structural representation of aligning and leveling device of the present invention;
Fig. 4 is the partial enlarged drawing of A portion among Fig. 3;
Fig. 5 is a hemisphere centering flat bearing turntable structure structural representation of the present invention;
Fig. 6 is the vertical view of welding elliptic arc portal frame of the present invention;
Fig. 7 is the front view of welding elliptic arc portal frame of the present invention;
Fig. 8 places the synoptic diagram behind the element under test for measuring machine of the present invention;
Fig. 9 a and Fig. 9 b gather the path synoptic diagram for the aperture aspherical component data;
Figure 10 is a centering central task principle schematic;
Figure 11 is for confirming the measuring basis coordinate figure and measuring the stroke synoptic diagram.
[embodiment]
Below in conjunction with accompanying drawing the present invention is done and to describe in further detail:
See also Fig. 1 to shown in Figure 7, be the structural representation of the used ultraprecise aperture aspherical of measuring method of the present invention shape measure machine.
See also Fig. 1 and shown in Figure 2; A kind of ultraprecise aperture aspherical of the present invention shape measure machine comprises static pressure dish 13, main pneumato-static slideway 14, turntable mandrel 15, belt pulley 16, speed reduction unit 17, servomotor 18, X axle linear electric motors 19 and Z axle linear electric motors 20 under natural granite lathe bed 1, auxilliary pneumato-static slideway 2, mass balance piece 3, welding elliptic arc portal frame 4, steel band roller 5, steel band 6, grouan guide pillar 7, V-type air-bearing piece 8, length gauge 9, positioning core axle 10, turntable face 11, universal leveling board 12, the turntable.
The X spindle unit of ultraprecise aperture aspherical shape measure machine of the present invention mainly is made up of auxilliary pneumato-static slideway 2, welding elliptic arc portal frame 4, main pneumato-static slideway 14 and X axle linear electric motors 19.The cross section of auxilliary pneumato-static slideway 2 and main pneumato-static slideway 14 is L-shaped, is arranged in natural granite lathe bed 1 both sides; Two ends of welding elliptic arc portal frame 4, an end is fixed on the auxilliary pneumato-static slideway 2, and the other end is fixed on main pneumato-static slideway 14; Auxilliary pneumato-static slideway 2 is provided with the inflation interface with main pneumato-static slideway 14; During the motion of X spindle unit; Give auxilliary pneumato-static slideway 2 and main pneumato-static slideway 14 inflations through the inflation interface, make between end face and the side of auxilliary pneumato-static slideway 2, main pneumato-static slideway 14 and natural granite lathe bed 1 and all form air film.Main pneumato-static slideway 14 is driven by X axle linear electric motors 19, drives welding elliptic arc portal frame 4 and moves along natural granite lathe bed 1 guide pass.Main and auxiliary pneumato-static slideway 14 and 2 bearing material all adopt Porous Graphite, and its pore is even, can form the uniform air film of thickness, and exercise performance is steady.The air-film thickness of ultra-precise gas static-pressure is 4～5 μ m, guarantees the rigidity of air film and the stability of guide rail.X axle driver element adopts U type X axle linear electric motors 19, and the closed-loop measuring element adopts the high precision optical grid line displacement sensor, and resolution reaches 0.1 μ m.
Ultraprecise aperture aspherical shape measure machine Z spindle unit of the present invention mainly is made up of mass balance piece 3, steel band roller 5, steel band 6, grouan guide pillar 7, V-type air-bearing piece 8, length gauge 9 and Z axle linear electric motors 20.Two V-type air-bearing pieces 8 are connected on the welding elliptic arc portal frame 4 through four bolts, can carry out the minor adjustments of horizontal direction, the verticality that is used to regulate the Z axle.It is secondary that the double V-shaped air-bearing piece 8 that eight faceted pebble grouan guide pillars 7 are connected with symmetry is formed pneumato-static slideway, realizes moving up and down of Z axle; Dihedral grouan guide pillar 7 antitorque commentaries on classics good stabilities.Z axle driver element adopts U type Z axle linear electric motors 20; The secondary coil of motor 20 is fixedly connected with welding elliptic arc portal frame 4; Primary coil is connected with grouan guide pillar 7, on grouan guide pillar 7, posts high precision linear grating chi, realizes the high precision position shift measurement of Z axle; Through measuring feedback, finally realize the motion of Z axle feeding with high precision.Z axle gauge head length gauge 9 is fixed on the inner chamber of grouan guide pillar 7, and its straight-line displacement resolution is 0. μ m, cooperates with the Z axle system, and integrated measurement accuracy is ± 0.5 μ m.Because the Z axle is vertical installation, the motion weight that adopts mass balance piece 3 to come balance Z spindle unit can reduce the load of Z axle linear electric motors 20, improves the precision of feed system.Mass balance piece 3 connects through steel band 6, and the other end of steel band 6 is fixed on the end of grouan guide pillar 7, and around 5 motions of two steel band rollers, finally realizes the high-precision and stable motion of Z spindle unit.
The natural granite lathe bed 1 of ultraprecise aperture aspherical shape measure machine of the present invention is installed through the three-point support mode; The X spindle unit is bearing on the natural granite lathe bed 1 with auxilliary pneumato-static slideway 2 by main pneumato-static slideway 14; The Z spindle unit is connected on the welding elliptic arc portal frame 4 of X spindle unit through four adjustable bolts, can be implemented in the minor adjustments of horizontal direction.Support through aerostatic bearing between static pressure dish 13 and the natural granite lathe bed 1 under the turntable of aligning and leveling turntable parts, realize high-precision rotating accuracy.
The principal feature of the aligning and leveling turntable of ultraprecise aperture aspherical shape measure machine of the present invention is load-bearing capacity big (part quality 260Kg), turntable precision height, can realizes high-precision turntable aligning and levelling function.The aligning and leveling turntable mainly is made up of static pressure dish 13, turntable mandrel 15, belt pulley 16, speed reduction unit 17 and servomotor 18 etc. under positioning core axle 10, turntable face 11, universal leveling board 12, the turntable.Support through aerostatic bearing between static pressure dish 13 and the natural granite lathe bed 1 under the turntable, realize high-precision rotating accuracy.During aligning, positioning core axle 10 is fixed on the central hole of turntable, and positioning core axle 10 tops are provided with the aligning hole, is used for the concentric of auxiliary adjustment turntable center and length gauge 9 gauge heads, when measuring, lays down positioning core axle 10.The aligning and leveling function of turntable is mainly realized by static pressure dish under positioning core axle 10, turntable face 11, universal leveling board 12, the turntable 13; Can carry out accurate aligning and leveling to the measurement turntable (diameter 900mm) that is used for the heavy caliber part; And has an aligning and leveling auto-lock function; Break through traditional heavy caliber, heavy-load type turntable aligning and leveling function, can realize can the incline function of two-dimensional adjustable of turntable three-dimensional, improved measuring accuracy.The driver element of turntable parts adopts the array mode of servomotor 18, speed reduction unit 17 and belt pulley 16, drives 15 rotations of turntable mandrel, realizes the low speed easy motion thereby drive whole turntable.To turntable configuration high accuracy circular grating, carry out the measurement of angle feedback, can realize the precision round subsection function of turntable.Aligning and leveling turntable parts are core components of ultraprecise aperture aspherical shape measure machine, have the advantages that low speed is steady, rotating accuracy is high, load-bearing capacity is big.
See also Fig. 3 and shown in Figure 4, aligning and leveling device of the present invention comprises static pressure dish 13 under the turntable, leveling positioning disk 22; Aligning jackscrew 23, turntable table top 11, linkage levelling screw 25, leveling pulley 26; Leveling pulley spindle 27, leveling bearing 28, positioning core axle 10, universal leveling board 12.
Four leveling bearings 28 are installed under the turntable in four grooves on the static pressure dish 13, can move along the groove on the static pressure dish 13 under the turntable.Leveling pulley spindle 27 is connected to leveling pulley 26 on the leveling bearing 28; Leveling bearing 28 is threaded with linkage levelling screw 25; Linkage levelling screw 25 is installed in static pressure dish 13 under the turntable; Linkage levelling screw 25 can rotate, and carries out leveling location through leveling positioning disk 22, leveling positioning disk 22 through screw retention under turntable on the static pressure dish 13.The head cross section of linkage levelling screw 25 is trapezoidal, and leveling positioning disk 22 is pushed down the head of linkage levelling screw 25, passes through bolted then on following static pressure dish 13, to axially limiting of linkage levelling screw 25, linkage levelling screw 25 can only be rotated, and can not move axially.
The bottom periphery of universal leveling board 12 is a sphere 101, and it is installed on the concave spherical surface 110 of static pressure dish 13 under the turntable; The bottom centre place of universal leveling board 12 is provided with tapered slope 102; Leveling pulley 26 can through regulating four leveling pulleys 26, can make universal leveling board 12 three-dimensional tilts in the tapered slope 102 enterprising line slips of universal leveling board 12.The following installed surface of turntable table top 11 is directly installed on the universal leveling board 12, and the aligning jackscrew 23 that the protruding sphere top of universal leveling board 12 is provided with the 90 degree settings of 103, four intervals of periphery is connected with adjusting turntable table top 11 through screw thread; Aligning jackscrew 23 withstands the periphery 103 of universal leveling board 12, through regulating four aligning jackscrews 23, can make turntable table top 11 produce two dimension and move, and realizes the aligning function of turntable.Positioning core axle 10 cooperates with the center pit of turntable table top 11, and passes through screw retention; The top of positioning core axle 10 is provided with the pilot hole that is used for aligning.
Levelling device is by leveling positioning disk 22, linkage levelling screw 25, and leveling pulley 26, leveling pulley spindle 27 is formed with leveling bearing 28.Levelling device has four, evenly distributes, and 90 ° of adjacent spaces, levelling device is installed under the turntable on the static pressure dish 13, can move along the groove on the static pressure dish 13 under the turntable.Through rotation adjusting screw rod 25, because leveling positioning disk 22 is located at adjusting screw(rod) 25 axis directions, can't move, thereby make leveling bearing 28 be with leveling pulley 26 and leveling pulley spindle 27 to move along groove.The concave spherical surface 110 of static pressure dish 13 cooperates under the protruding sphere 101 of universal leveling board 12 and the turntable; When carrying out front and back on the inclined-plane of universal leveling board 12, leveling pulley 26 slides; Through regulating a leveling bearing 28; Its excess-three leveling bearing 28 is static, and universal leveling board 12 can banking motion, realizes the levelling function of turntable parts.
Aligning device is by aligning jackscrew 23, and turntable table top 11 is formed with positioning core axle 10.The following installed surface of turntable table top 11 is directly installed on the universal leveling board 12; Four aligning jackscrews 23 are connected with turntable table top 11 through screw thread; Positioning core axle 10 cooperates with the center pit of turntable table top 11, and through screw retention, can obtain the center of turntable table top 11.Through regulating four aligning jackscrews 23, can make turntable table top 11 produce two dimension and move, when the central axes of the center pit of positioning core axle 10 ends and gauge head, the aligning function of realization turntable.
See also shown in Figure 5ly, hemisphere of the present invention centering flat bearing turntable structure comprises static pressure dish 13, hemisphere seat 34, semisphere graphite tile 35, turntable mandrel 15 and hemisphere axle 37 under natural granite lathe bed 1, flat bearing graphite block 32, the turntable.
The hemisphere adjective-centre structure is made up of hemisphere seat 34, hemisphere axle 37, turntable mandrel 15 and semisphere graphite tile 35.Natural granite lathe bed 1 center is provided with a trapezoidal mounting hole, and in the trapezoidal mounting hole of natural granite lathe bed 1, semisphere graphite tile 35 is bonded on the hemisphere seat 34 through epoxide-resin glue hemisphere seat 34 through screw retention.Hemisphere axle 37 centers are provided with a through hole, and turntable mandrel 15 is installed in this through hole, hemisphere axle 37 and turntable mandrel 15 through screw retention under the turntable on the static pressure dish 13.Servomotor 18 is connected with turntable mandrel 15 with belt pulley 16 through speed reduction unit 17, drives turntable mandrel 15 and rotates, and static pressure dish 13 rotates together under the turntable thereby drive.Hemisphere axle 37 carries out facing-up with semisphere graphite tile 35, obtains uniform tolerance clearance, and pressed gas is fed in the semisphere graphite tile 35, makes to form 3～5 μ m air films between semisphere graphite tile 35 and the hemisphere axle 37, plays the effect of centering.
Planar supporting structure is made up of static pressure dish 13 under natural granite lathe bed 1, the turntable and flat bearing graphite block 32; 12 flat bearing graphite blocks 32 are bonded in the ring groove of static pressure dish 13 under the turntable through epoxy resin; Evenly 13 1 weeks of static pressure dish under the distribution turntable, form the aerostatic bearing pair with natural granite lathe bed 1.The axial pore of static pressure dish 13 communicates under the pore of pressure gas through turntable mandrel 15 and the turntable; Gas is sent in the horizontal pore of static pressure dish 13 under the turntable; Vertical pore with the annular groove center is identical again, and gas distributes the back from the small pore of graphite, to flow out through the air drain on the flat bearing graphite block 32 after getting into annular groove.Form one deck 3～5 μ m air films between flat bearing graphite block 32 and natural granite lathe bed 1 faying face, realize the flat bearing effect of gas-static turntable.
The present invention is used for the hemisphere centering flat bearing turntable structure of heavy caliber ultra precise measurement machine; Its bearing capacity, rigidity and precision are all relevant with the design and the air-film thickness of hemisphere axle and plane aerostatic bearing; Through adjustments of gas pressure and facing-up air film gap, can obtain desired bearing capacity, rigidity and precision.This invention is adopted the facing-up technology through combining to have the turntable structure and the aerostatic bearing supporting technology of hemisphere centering and flat bearing in assembling process, finally realize the function of the high precision of measuring machine turntable, high rigidity and big load-bearing capacity.
Turntable structure of the present invention adopts undersized hemisphere axle to feel relieved, and large-sized flat guide is as load plane, and the employing aerostatic bearing is as the block bearing on hemisphere axle and plane.Turntable hemisphere axle only plays centering, and bearing load is little, has guaranteed the centering precision of hemisphere axle to turntable; The large scale surface bearing can bear the weight of turntable and large-scale part, thereby guarantees the precision and the load-bearing capacity of turntable, finally realizes the measurement of ultra precise measurement machine high precision and high rigidity.
See also Fig. 6 and shown in Figure 7, welding elliptic arc portal frame 4 of the present invention comprises elliptic arc gantry weld holder base plate 41,43; Strengthen gusset 47,49,412,414; Agent structure header board 42, profile welding stiffening plate 44,45,415,416, plate 46 after the agent structure; Web joint 410,411, profile protective shield 48,413.
The two ends of plate 46 correspondences weld together through base plate 41, base plate 43 respectively after agent structure header board 42 and the agent structure; Are symmetrically welded with in the middle of the plate 46 after agent structure header board 42 and the agent structure and strengthen gussets 47,49,412,414; The two ends of plate 46 correspondences after agent structure header board 42 and the agent structure also are welded with profile welding stiffening plate 44,45 and profile welding stiffening plate 415,416 respectively; The upside and the downside of plate 46 have profile protective shield 48,413 through screw retention respectively after agent structure header board 42 and the agent structure.Form a square hole that installs and measures machine between the plate 46 after reinforcement gusset 49,412, agent structure header board 42 and the agent structure, be provided with in this square hole and be welded in the web joint 410,411 that is used for fixing measuring machine on the plate 46 of back.The lower edge of plate 46 comprises semiellipse segmental arc and two straight-line segments tangent with this semiellipse arc length axle summit after agent structure header board 42 and the agent structure, and stiffening plate 415,416 is welded at these two straight-line segment places respectively.
A kind of elliptic arc gantry structure that is used for heavy caliber parts measurement machine of the present invention can be used for the measurement of the form accuracy of heavy caliber part (diameter of part is less than Φ 900mm).Its structure links to each other with the linear motion guide rail of measuring machine through elliptic arc gantry weld holder base plate 41,43, drives gantry structure and moves.The Z-axis of measuring machine is installed on the web joint 410,411 of this elliptic arc gantry structure, and can realize the minor adjustments of horizontal direction.
Welding base plate 41,43 thickness of slab 10mm, material adopts 45 steel, and its flatness is required to reach 5 μ m, and welding is accomplished through polishing to its bottom surface after the certain hour timeliness, to guarantee the surface figure accuracy of surface of contact.
Strengthen gusset 47,49,412,414 thickness of slab 10mm, material adopts 45 steel, and open circles is arranged in the middle of the panel beating, alleviates quality on the one hand, is convenient at panel beating intermediate arrangement measuring machine electric wiring on the other hand etc.Strengthen gusset and adopt welding technology that its agent structure with elliptic arc gantry is welded as a whole, it mainly acts on is intensity and the rigidity of strengthening elliptic arc gantry, with the precision stability and the stability of raising elliptic arc gantry structure.
Profile welding stiffening plate 44,45,415,416 links together the back plate of the header board 42 of agent structure and agent structure 46 through welding technology, play the fixing effect of supporting.To heat-treat it after accomplishing cutting forming profile welding stiffening plate 44,45,415,416.
Web joint 410,411 is welded on after the agent structure on the plate 46, is used to install and fix Z-axis.Two plates (410,411) are 5 μ m in the flatness of vertical direction, and the surface of contact that guarantee two plates and Z-axis can guarantee the verticality of Z-axis and work top at grade.
Profile protective shield 48,413 plays protective action in whole oval gantry structure, protect inner structure of oval gantry structure and pipeline, electric wiring.Profile protective shield 48,413 is fixed on the agent structure at elliptic arc gantry through Screw.
Elliptic arc gantry structure of the present invention, through its semiellipse arc structure, the stress that has reduced circular arc point of penetration place is well concentrated, and has improved the stability of gantry structure.Compare with grouan column gantry structure, the semicircular structure of identical span, the elliptic arc gantry structure has the advantages such as little, light weight that take up room, and is more suitable in the gantry structure of high-acruracy survey machine.Because the elliptic arc gantry structure is stressed comparatively even, portal frame have longer serviceable life and a precision stability.The elliptic arc gantry structure adopts solder technology, makes that the design of weldment is more flexible, can be welded into comparatively complicated structure according to different needs, also satisfies the requirement of ergonomics simultaneously.
Elliptic arc gantry structure of the present invention, column and beam design are integral, and reduce error transfer, help improving the measuring accuracy of measuring machine.This gantry structure has that stressed evenly stress is concentrated little, and strength and stiffness are high, and structural stability is good, and moving-mass is light, and the characteristics of the little and motor low energy consumption of inertia have precision stability preferably.
Elliptic arc gantry structure of the present invention; Its innovative point is to adopt the welding gantry structure to replace traditional cast iron or grouan column and crossbeam; Meanwhile on the basis of traditional welding structure, adopt the elliptic arc gantry structure that is fit to the measuring machine structure; Half elliptic arc shape is compared with half-circle-arc shape and more is suitable for the measuring machine structure, and does not exist stress to concentrate in the elliptic arc point of penetration, has well guaranteed the life-span and the precision of gantry structure.To the outward appearance of traditional measurement machine also is a well innovation, and function and the ergonomics of measuring machine well combined, and makes measuring machine in the realization function, satisfy people's the visual effect and the rationality of operation.
Measuring machine adopts the elliptic arc gantry structure; Confirm long axis of ellipse and minor axis according to the size of measuring machine; Form the semiellipse arc, steel plate is accomplished the cutting that is shaped with laser cutting machine, through main body component parts and the necessary reinforcement welding forming of welding technology portal frame; Through Ageing Treatment, discharge welding stress, again portal frame is repaired, reach the needed precision of measuring machine, accomplish the processing technology of portal frame.
The present invention has realized the specialized checkout equipment of aperture aspherical element, simultaneously huge promotion and facilitation has been played in the further development research of the checkout equipment of optical elements of large caliber.
See also Fig. 8 and shown in Figure 10; Be measuring machine mechanical line-up fundamental diagram, with length gauge 9 centers and turntable face 11 center centerings, key is to be put into the 11 back eccentric adjustment times of turntable face in order to shorten workpiece; For the cylindrical coordinates measuring system, centering is the implementation procedure of a more complicated.
The concrete realization as follows: inductance amesdial gauge head 100 is fixed to above the gauge stand 200; And gauge stand 200 is fixed to turntable face 11 can realizes the position measured arbitrarily; Inductance amesdial gauge head 100 is got to length gauge 9 end positions, through the core-regulating mechanism of turntable face 11 adjustment rotary works; Inductance amesdial is transferred to 0.01 μ m shelves, error is adjusted in 0.1 micron (satisfy measuring accuracy require), promptly think centering.
Fig. 9 is the measuring route synoptic diagram, and wherein Fig. 9 a is a two-dimensional measurement path synoptic diagram, and Fig. 9 b is a three-dimensional measurement path synoptic diagram, and P shown in the figure is for measuring step pitch, and θ is for taking measurement of an angle at interval.In the two-dimensional measurement process, the X axle drives length gauge 9 and moves along directions X, realizes measuring the motion of step pitch, whenever walks a step pitch length gauge 9 and stretches out and gather a secondary data, can obtain N coordinate points (x
i, z
i), i=1 ... N.In the three-dimensional measurement process, the measurement step number of every circle is n1, and the step pitch of measurement is n2; Since first, turntable rotates an angle θ=360/n1, and length gauge 9 stretches out once sampling; Surveyed a circle, found reference position, gauge head moves in the X-axis direction one and measures step pitch; Up to accomplishing measuring process, obtain n1 * n2 coordinate points (x
Ij, z
Ij, θ
Ij), i=1 ... N1, j=1 ... N2.
Figure 11 confirms for the measuring basis coordinate figure and measures stroke and confirm, A point position reference coordinate (x among the figure
0, z
0), workpiece is put into turntable face 11 and centering, length gauge 9 is stretched out, confirm reference coordinate A point, with A point coordinate location Z axle origin position, be X axle grating reading x ' at B point X axial coordinate, be x '-x with respect to A point coordinate value
0, the Z axial coordinate is the reading z ' that gauge head stretches out, and is z '-z with respect to A point coordinate value
0So, the B point coordinate be (x '-x
0, z '-z
0), can draw the coordinate figure of all measurement points by that analogy.Confirm to measure stroke and be apex coordinate value and edge coordinate value are wanted the absolute value that subtracts, measure radius r=| x
0-x
The limit|, L=2r after confirming to measure formation, just can confirm measure dot number through measuring step pitch.
Large-aperture optical non-spherical element cylindrical coordinates contact measurement method of the present invention is used ultra precise measurement machine of the present invention and is measured, and it may further comprise the steps:
1, through centering turntable face (11) center and measuring machine length gauge (9) center are aligned; Inductance amesdial indicator accuracy class is got to 0.01 μ m shelves; The inductance amesdial gauge head is got to high precision contact length meter (9) end, carry out centering, error control is centering (satisfying measuring accuracy requires) at 0.1 μ m; And write down current X axial coordinate value and be central value, with the coordinate of this point as reference coordinate (x
0, z
0);
2, workpiece is put on the measuring machine turntable face (11); Through inductance amesdial workpiece is placed on worker's turntable face (11) center; Length gauge (9) is stretched out the highest measurement summit of finding workpiece, then length gauge (9) is moved to edge of work position, carry out confirming of start position;
3, confirm to measure stroke L value through X axial coordinate value;
4, carry out two-dimentional surface shape measurement, confirm after the L value measurement step pitch to be set, confirm step number, carry out measurement point scanning and data sampling simultaneously according to step pitch;
5, carry out 3 d shape and measure, confirm to take measurement of an angle and the radial measurement step pitch, confirm sampling number according to angle and step pitch, the line data sampling of going forward side by side is rotated in the turntable location;
6, set up workpiece coordinate system and measurement coordinate system, and convert measurement coordinate system to the workpiece coordinate coefficient value and carry out data fitting and handle.
7, measurement result is carried out pre-service, obtain being fit to the assessment of data of workpiece coordinate, obtain the estimated value of workpiece parameter, through estimated value, obtain the fitting parameter of workpiece, carry out the evaluation of profile tolerance with nonlinear least square method through linear least square.
Claims (9)
1. a large-aperture optical non-spherical element cylindrical coordinates contact measurement method is characterized in that, utilizes measuring machine to pass through the cylindrical coordinates metering system, gathers two dimension or three-dimensional data; May further comprise the steps:
Step S1: utilize inductance amesdial, centering turntable face (11) center and length gauge (9) center make centres up and down, and concentricity precision guarantees at 0.1 μ m;
Step S2:, with the workpiece centering length gauge (9) is stretched out through inductance amesdial, record length meter (9) overhang writes down X axial coordinate value simultaneously, with the coordinate of this point as reference coordinate (x
0, z
0);
Step S3: after confirming reference coordinate, mobile X axle moves to the edge of work with length gauge (9) and confirms starting point, and amount of movement and reference coordinate are relatively confirmed to measure stroke L;
Step S4: set up workpiece coordinate system and measurement coordinate system according to measuring machine, confirm two-dimensional measurement or three-dimensional measurement, the line data collection of going forward side by side obtains needed coordinate points.
2. a kind of large-aperture optical non-spherical element cylindrical coordinates contact measurement method according to claim 1 is characterized in that first centering turntable face (11) and length gauge (9) center are adjusted to the center through inductance amesdial with workpiece again among the step S1.
3. a kind of large-aperture optical non-spherical element cylindrical coordinates contact measurement method according to claim 1; It is characterized in that; Step S1 specifically may further comprise the steps: inductance amesdial gauge head (100) is fixed to above the gauge stand (200); And gauge stand (200) is fixed to turntable face (11) can realizes arbitrarily the position measured inductance amesdial gauge head (100) being got to length gauge (9) end position, through the core-regulating mechanism of turntable face (11) adjustment rotary work; Inductance amesdial is transferred to 0.01 μ m shelves, error is adjusted in 0.1 micron, be centering.
4. a kind of large-aperture optical non-spherical element cylindrical coordinates contact measurement method according to claim 1; It is characterized in that; In the two-dimensional measurement process, the X spindle unit drives length gauge (9) and moves in the X-axis direction, and realizes measuring the motion of step pitch; Whenever walk a step pitch length gauge (9) and stretch out collection one secondary data, obtain N coordinate points (x
i, z
i), i=1 ... N; In the three-dimensional measurement process, the measurement step number of every circle is n1, and the step pitch of measurement is n2; Since first, turntable face (11) rotates an angle θ=360/n1, and length gauge (9) stretches out once sampling; Surveyed a circle, found reference position, turntable face (11) moves in the X-axis direction one and measures step pitch; Up to accomplishing measuring process, obtain n1 * n2 coordinate points (x
Ij, z
Ij, θ
Ij), i=1 ... N1, j=1 ... N2.
5. according to each described a kind of large-aperture optical non-spherical element cylindrical coordinates contact measurement method in the claim 1 to 4, it is characterized in that measuring machine comprises natural granite lathe bed (1), X spindle unit, Z spindle unit and aligning and leveling device;
The X spindle unit comprises auxilliary pneumato-static slideway (2), welding elliptic arc portal frame (4), main pneumato-static slideway (14) and first linear electric motors (19); Auxilliary pneumato-static slideway (2) and main pneumato-static slideway (14) are arranged in natural granite lathe bed (1) both sides; Two ends of welding elliptic arc portal frame (4), an end is fixed on the auxilliary pneumato-static slideway (2), and the other end is fixed on main pneumato-static slideway (14);
The Z spindle unit comprises eight faceted pebble grouan guide pillars (7), V-type air-bearing piece (8), length gauge (9) and second linear electric motors (20); Two V-type air-bearing pieces (8) are connected on the welding elliptic arc portal frame (4) through bolt, the verticality that is used to regulate the Z axle; It is secondary that the double V-shaped air-bearing piece (8) that eight faceted pebble grouan guide pillars 7 are connected with symmetry is formed pneumato-static slideway, realizes moving up and down of Z axle; The secondary coil of second linear electric motors (20) is fixedly connected with welding elliptic arc portal frame (4), and primary coil is connected with grouan guide pillar (7); Length gauge (9) is fixed on the inner chamber of grouan guide pillar (7);
The aligning and leveling device comprises static pressure dish (13) under turntable face (11), universal leveling board (12), the turntable and drives the driver element that static pressure dish (13) rotates under the turntable; Support through aerostatic bearing between static pressure dish (13) and the natural granite lathe bed (1) under the turntable.
6. a kind of large-aperture optical non-spherical element cylindrical coordinates contact measurement method according to claim 5; It is characterized in that; Auxilliary pneumato-static slideway (2) and main pneumato-static slideway (14) are provided with the inflation interface; X spindle unit when motion, inflate for auxilliary pneumato-static slideway (2) and main pneumato-static slideway (14) through the inflation interface, make between end face and the side of auxilliary pneumato-static slideway (2), main pneumato-static slideway (14) and natural granite lathe bed (1) and all form air film.
7. a kind of large-aperture optical non-spherical element cylindrical coordinates contact measurement method according to claim 5 is characterized in that the aligning and leveling device also comprises some levelling devices and aligning device;
Static pressure dish (13) top is provided with the groove of concave spherical surface (110) and some symmetry arrangement under the turntable;
The bottom of universal leveling board (12) is provided with protruding sphere (101) and tapered slope (102); Universal leveling board (12) is installed on static pressure dish (13) top under the turntable, and the concave spherical surface (110) of static pressure dish (13) matches under the protruding sphere (101) of universal leveling board (12) and the turntable;
Levelling device comprises leveling positioning disk (22), linkage levelling screw (25), leveling pulley (26), leveling pulley spindle (27) and leveling bearing (28); Leveling bearing (28) is installed under the turntable static pressure dish (13) and goes up in the corresponding groove, can move along the groove of static pressure dish (13) under the turntable; Leveling pulley spindle (27) is connected to leveling pulley (26) on the leveling bearing (28); Linkage levelling screw (25) and leveling bearing (28) threaded engagement;
Aligning device comprises some aligning jackscrews (23) and turntable face (11); The following installed surface of turntable face (11) is directly installed on the universal leveling board (12); The side of turntable face (11) is symmetrically arranged with some tapped through holes, and some aligning jackscrews (23) are arranged in the corresponding tapped through hole and with turntable face (11) and are threaded.
8. a kind of large-aperture optical non-spherical element cylindrical coordinates contact measurement method according to claim 5 is characterized in that natural granite lathe bed (1) center is provided with a mounting hole, and hemisphere seat (34) is fixed in this mounting hole; Semisphere graphite tile (35) is fixed on the hemisphere seat (34); Turntable mandrel (15) is installed on hemisphere axle (37) center and is fixed under the turntable on the static pressure dish (13) together with hemisphere axle (37); The protruding sphere of hemisphere axle (37) matches with the concave spherical surface of semisphere graphite tile (35);
The bottom surface of static pressure dish (13) offers ring groove under the turntable, evenly is fixed with some flat bearing graphite blocks (32) in this ring groove; Flat bearing graphite block (32) forms the aerostatic bearing pair with natural granite lathe bed (1).
9. a kind of large-aperture optical non-spherical element cylindrical coordinates contact measurement method according to claim 5 is characterized in that, welding elliptic arc portal frame (4) comprises header board (42) and back plate (46); Reinforcement gusset through some symmetry arrangement between header board (42) and the back plate (46) is weldingly fixed on together; The lower side of header board (42) and back plate (46) is along comprising the semiellipse segmental arc.
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| CN112372602B (en) * | 2020-11-13 | 2021-11-30 | 长安大学 | Quick and accurate leveling method for three-point support precision measurement rotary table |
| CN113358059A (en) * | 2021-06-08 | 2021-09-07 | 西安交通大学 | Off-axis aspheric surface type error measurement method based on line laser scanning |
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