CN102607483A - Cylindrical coordinate contact measurement method for large-diameter optical aspheric element - Google Patents

Cylindrical coordinate contact measurement method for large-diameter optical aspheric element Download PDF

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CN102607483A
CN102607483A CN2012100823457A CN201210082345A CN102607483A CN 102607483 A CN102607483 A CN 102607483A CN 2012100823457 A CN2012100823457 A CN 2012100823457A CN 201210082345 A CN201210082345 A CN 201210082345A CN 102607483 A CN102607483 A CN 102607483A
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turntable
leveling
static pressure
measurement
plate
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CN102607483B (en
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赵惠英
席建普
李志强
赵则祥
杨和清
陈伟
娄云鸽
李彬
任东旭
陈健龙
张楚鹏
刘孟奇
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Xian Jiaotong University
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Xian Jiaotong University
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Abstract

The invention discloses a cylindrical coordinate contact measurement method for a large-diameter optical aspheric element by collecting two-dimensional or three-dimensional data by using a measuring machine by adopting the cylindrical coordinate measurement method. The cylindrical coordinate contact measurement method for the large-diameter optical aspheric element comprises the following steps: S1, aligning the center of a rotating platform surface and the center of a length meter by using an inductance micrometer; S2, aligning a workpiece by using the inductance micrometer; S3, determining a reference coordinate, moving the X axis so as to move the length meter to the edge of the workpiece to determine a starting point, and comparing the movement amount with the reference coordinate to determine the measurement stroke L; and S4, establishing a workpiece coordinate system and a measurement coordinate system by using the measuring machine, determining the two-dimensional or three-dimensional measurement, and collecting data to obtain the needed coordinate point. By using the ultraprecise shape measuring machine, the measurement and the assessment after the milling and the grinding of the large-diameter aspheric element can be realized, and the two-dimensional or three-dimensional error assessment of the workpiece can be realized. The measuring process is easy to operate, the cylindrical coordinate contact measurement method has high efficiency, and the measuring path is easy to implement.

Description

大口径光学非球面元件柱坐标接触式测量方法Cylindrical Coordinate Contact Measurement Method for Large Aperture Optical Aspheric Components

【技术领域】 【Technical field】

本发明属于精密测量技术领域,特别涉及一种大口径光学非球面元件的接触式测量方法。The invention belongs to the technical field of precision measurement, in particular to a contact measurement method of a large-caliber optical aspheric element.

【背景技术】 【Background technique】

空间光学中的大型空间望远镜采用二次非球面反射镜,激光核聚变中高功率激光装置采用多片非球面,空间相机、航天遥感、大口径夜视仪等都采用高精度大口径非球面元件,随着空间技术和国防技术的提高,大口径非球面元件需要量越来越大。大批量、高效率,高精度的制造光学非球面元件就需要高精度的测量来指导加工过程,随之而来,测量过程就要效率高、精度高以及误差评定方法可靠快速。非球面的测量技术一直制约非球面应用发展,对于铣磨加工后的非球面元件无法采用非接触式的测量方法,因为面形精度不能满足干涉测量的要求,因此测量都是采用接触式的测量方法。大口径非球面的接触式测量主要有三坐标测量和拼接测量技术,三坐标测量仪的误差源多,测量精度低,高精度的三坐标测量仪价格昂贵,国外对大口径非球面测量主要有德国leitz三坐标测量仪CMM;拼接测量采用增加第三环节进行测量,再对测量数据进行分析处理,这样得到的测量结果精确度不高。Large-scale space telescopes in space optics use secondary aspheric mirrors, high-power laser devices in laser nuclear fusion use multiple aspheric surfaces, and space cameras, aerospace remote sensing, and large-aperture night vision devices all use high-precision large-aperture aspheric elements. With the improvement of space technology and national defense technology, the demand for large-diameter aspheric components is increasing. Large-volume, high-efficiency, and high-precision manufacturing of optical aspheric components requires high-precision measurement to guide the processing process. Subsequently, the measurement process must be high in efficiency, high in precision, and the error evaluation method is reliable and fast. Aspherical surface measurement technology has always restricted the development of aspheric surface applications. Non-contact measurement methods cannot be used for milled aspheric surface components, because the surface shape accuracy cannot meet the requirements of interferometric measurement, so the measurement is all by contact measurement. method. The contact measurement of large-diameter aspheric surfaces mainly includes three-coordinate measurement and splicing measurement technology. Three-coordinate measuring instruments have many error sources, low measurement accuracy, and high-precision three-coordinate measuring instruments are expensive. Foreign countries mainly use Germany for the measurement of large-diameter aspheric surfaces. Leitz three-coordinate measuring instrument CMM; splicing measurement is measured by adding a third link, and then the measurement data is analyzed and processed, so the accuracy of the measurement results obtained is not high.

针对超精度形状测量仪-柱坐标测量仪开发了高效、高精度的测量方法和快速找中方法,实现大口径非球面铣磨加工后的面形测量和评定,旨在解决口径在500-1000mm大口径非球面光学元件的测量。Developed an efficient and high-precision measuring method and a fast centering method for the ultra-precision shape measuring instrument-cylindrical coordinate measuring instrument, to realize the measurement and evaluation of the surface shape after milling and grinding of large-diameter aspheric surfaces, aiming to solve the problem of diameters of 500-1000mm Measurement of large aperture aspheric optical components.

【发明内容】 【Content of invention】

本发明的目的在于提供一种大口径光学非球面元件柱坐标接触式测量方法,用于大口径非球面元件铣磨加工后的面形测量和评定;采用柱坐标坐标系建立工件坐标系和测量坐标系,通过高精度接触式测头进行数据的快速采样。The object of the present invention is to provide a cylindrical coordinate contact measurement method for large-diameter optical aspheric elements, which is used for measuring and evaluating the surface shape of large-diameter aspheric elements after milling; the cylindrical coordinate system is used to establish the workpiece coordinate system and measure Coordinate system, fast sampling of data through high-precision touch probe.

为了实现上述目的,本发明采用如下技术方案:In order to achieve the above object, the present invention adopts the following technical solutions:

一种大口径光学非球面元件柱坐标接触式测量方法,利用测量机通过柱坐标测量方式,采集二维或三维数据;包括以下步骤:A cylindrical coordinate contact measurement method for a large-diameter optical aspheric element, using a measuring machine to collect two-dimensional or three-dimensional data through a cylindrical coordinate measurement method; including the following steps:

步骤S1:利用电感测微仪,找正转台面中心和长度计中心,使上下中心同心,同心精度保证在0.1μm;Step S1: Use an inductance micrometer to align the center of the rotating table and the center of the length gauge so that the upper and lower centers are concentric, and the concentricity accuracy is guaranteed to be 0.1 μm;

步骤S2:通过电感测微仪将工件找正,将长度计伸出,记录长度计伸出量,同时记录X轴坐标值,将这点的坐标作为基准坐标(x0,z0);Step S2: Align the workpiece with an inductance micrometer, extend the length gauge, record the extension of the length gauge, and record the X-axis coordinate value at the same time, and use the coordinate of this point as the reference coordinate (x 0 , z 0 );

步骤S3:确定基准坐标后,移动X轴将长度计移动到工件边缘确定起始点,将移动量和基准坐标比较确定测量行程L;Step S3: After determining the reference coordinates, move the X-axis to move the length gauge to the edge of the workpiece to determine the starting point, and compare the movement amount with the reference coordinates to determine the measurement stroke L;

步骤S4:根据测量机建立工件坐标系和测量坐标系,确定二维测量或三维测量,并进行数据采集,得到所需要的坐标点。Step S4: Establish a workpiece coordinate system and a measurement coordinate system according to the measuring machine, determine two-dimensional measurement or three-dimensional measurement, and perform data collection to obtain required coordinate points.

本发明进一步的改进在于:步骤S1中先找正转台面和长度计中心,再通过电感测微仪将工件调整到中心。The further improvement of the present invention lies in that: in step S1, the center of the rotating table and the length gauge is first found, and then the workpiece is adjusted to the center by an inductance micrometer.

本发明进一步的改进在于:步骤S1具体包括以下步骤:将电感测微仪测头固定到表座上面,并将表座固定到转台面任意可以实现测量的位置,将电感测微仪测头打到长度计端部位置,通过转台面调整旋转工作的调心机构;将电感测微仪调到0.01μm档,将误差调整到0.1微米以内,即为找正。The further improvement of the present invention is that step S1 specifically includes the following steps: fixing the measuring head of the inductance micrometer on the surface of the watch base, fixing the watch base to any position on the turntable surface where measurement can be realized, and turning the measuring head of the inductance micrometer Go to the end of the length gauge, adjust the centering mechanism of the rotating work through the turntable; adjust the inductance micrometer to the 0.01μm range, and adjust the error to within 0.1μm, which is alignment.

本发明进一步的改进在于:二维测量过程中,X轴部件带动长度计沿X轴方向运动,实现测量步距的运动,每走一个步距长度计伸出采集一次数据,得到N个坐标点(xi,zi),i=1…N;在三维测量过程中,每圈的测量步数为n1,测量的步距为n2,从第一点开始,转台面转动一个角度θ=360/n1,长度计伸出采样一次,测完一圈,找到起始位置,转台面沿X轴方向运动一个测量步距,直到完成测量过程,得到n1×n2个坐标点(xij,zij,θij),i=1…n1,j=1…n2。The further improvement of the present invention lies in: during the two-dimensional measurement process, the X-axis component drives the length meter to move along the X-axis direction to realize the movement of measuring the step distance, and the length meter stretches out to collect data every time a step distance is taken, and N coordinate points are obtained (x i , z i ), i=1...N; in the three-dimensional measurement process, the number of measurement steps per circle is n1, and the measurement step distance is n2. Starting from the first point, the turntable rotates an angle θ=360 /n1, the length gauge stretches out to sample once, after measuring a circle, find the starting position, the turntable moves a measurement step along the X-axis direction until the measurement process is completed, and n1×n2 coordinate points (x ij , z ij , θ ij ), i=1...n1, j=1...n2.

本发明进一步的改进在于:测量机包括天然花岗岩床身、X轴部件、Z轴部件和调心调平装置;X轴部件包括辅气体静压导轨、焊接椭圆弧龙门架、主气体静压导轨和第一直线电机;辅气体静压导轨和主气体静压导轨卡设于天然花岗岩床身两侧;焊接椭圆弧龙门架的两个末端,一端固定在辅气体静压导轨上,另一端固定在主气体静压导轨;Z轴部件包括八棱面花岗岩导柱、V型气浮轴承块、长度计和第二直线电机;两个V型气浮轴承块通过螺栓连接在焊接椭圆弧龙门架上,用于调节Z轴的垂直度;八棱面花岗岩导柱7与对称连接的双V型气浮轴承块组成气体静压导轨副,实现Z轴的上下运动;第二直线电机的次级线圈与焊接椭圆弧龙门架固定连接,初级线圈与花岗岩导柱连接;长度计固定在花岗岩导柱的内腔;调心调平装置包括转台面、万向调平板、转台下静压盘和驱动转台下静压盘转动的驱动单元;转台下静压盘与天然花岗岩床身之间通过气体静压轴承支承。The further improvement of the present invention is that: the measuring machine includes natural granite bed, X-axis parts, Z-axis parts and self-aligning and leveling device; and the first linear motor; the auxiliary gas static pressure guide rail and the main gas static pressure guide rail are clamped on both sides of the natural granite bed; the two ends of the elliptical arc gantry are welded, one end is fixed on the auxiliary gas static pressure guide rail, and the other end Fixed on the main gas static pressure guide rail; Z-axis components include octagonal granite guide column, V-shaped air bearing block, length gauge and second linear motor; two V-shaped air bearing blocks are connected by bolts on the welded elliptical arc gantry on the frame, used to adjust the verticality of the Z axis; the octagonal granite guide column 7 and the symmetrically connected double V-shaped air bearing blocks form a gas static pressure guide rail pair, which realizes the up and down movement of the Z axis; the secondary linear motor The primary coil is fixedly connected to the welded elliptical arc gantry frame, and the primary coil is connected to the granite guide column; the length gauge is fixed in the inner cavity of the granite guide column; the centering and leveling device includes the turntable surface, the universal leveling plate, and the static pressure plate under the turntable And the drive unit that drives the static pressure plate under the turntable to rotate; the static pressure plate under the turntable and the natural granite bed are supported by gas static pressure bearings.

本发明进一步的改进在于:辅气体静压导轨和主气体静压导轨上设有充气接口,X轴部件运动时,通过充气接口给辅气体静压导轨和主气体静压导轨充气,使辅气体静压导轨、主气体静压导轨和天然花岗岩床身的顶面和侧面之间均形成气膜。The further improvement of the present invention is that: the auxiliary gas static pressure guide rail and the main gas static pressure guide rail are provided with an inflation interface, and when the X-axis components move, the auxiliary gas static pressure guide rail and the main gas static pressure guide rail are inflated through the inflation interface to make the auxiliary gas static pressure guide rail An air film is formed between the hydrostatic guideway, the main gas hydrostatic guideway and the top and side surfaces of the natural granite bed.

本发明进一步的改进在于:主气体静压导轨由X轴直线电机带动,带动焊接椭圆弧龙门架沿天然花岗岩床身导轨面运动。The further improvement of the present invention is that: the main gas static pressure guide rail is driven by the X-axis linear motor to drive the welded elliptical arc gantry to move along the guide rail surface of the natural granite bed.

本发明进一步的改进在于:调心调平装置还包括若干调平装置和调心装置;转台下静压盘顶部设有凹球面和若干对称排布的凹槽;万向调平板的下部设有凸球面和锥形斜面;万向调平板安装于转台下静压盘顶部,万向调平板的凸球面与转台下静压盘的凹球面相配合;调平装置包括调平定位盘、调平螺杆、调平滑轮、调平滑轮轴和调平支座;调平支座安装在转台下静压盘上对应的凹槽中,可沿着转台下静压盘的凹槽移动;调平滑轮轴将调平滑轮连接到调平支座上;调平螺杆与调平支座螺纹配合;调心装置包括若干调心顶丝和转台面;转台面的下安装面直接安装在万向调平板上;转台面的侧面对称设置有若干螺纹通孔,若干调心顶丝设置于对应的螺纹通孔中并与转台面螺纹连接。The further improvement of the present invention is that: the centering and leveling device also includes several leveling devices and centering devices; the top of the static pressure plate under the turntable is provided with a concave spherical surface and several symmetrically arranged grooves; There is a convex spherical surface and a conical inclined surface; the universal leveling plate is installed on the top of the static pressure plate under the turntable, and the convex spherical surface of the universal leveling plate matches the concave spherical surface of the static pressure plate under the turntable; the leveling device includes a leveling positioning plate , leveling screw, leveling pulley, leveling pulley shaft and leveling support; the leveling support is installed in the corresponding groove on the static pressure plate under the turntable, and can move along the groove of the static pressure plate under the turntable The shaft of the leveling pulley connects the leveling pulley to the leveling support; the leveling screw rod is threadedly matched with the leveling support; On the leveling plate; the side of the turntable surface is symmetrically provided with several threaded through holes, and several self-aligning jackscrews are arranged in the corresponding threaded through holes and threadedly connected with the turntable surface.

本发明进一步的改进在于:调平螺杆的头部截面呈梯形,调平定位盘压住调平螺杆的头部,然后通过螺栓紧固于下静压盘上,使调平螺杆只能转动,而不能轴向移动;万向调平板的侧周设有圆周面,若干调心顶丝的尖端穿过对应的螺纹通孔抵持所述圆周面。The further improvement of the present invention lies in that the cross-section of the head of the leveling screw is trapezoidal, the leveling positioning plate presses the head of the leveling screw, and then is fastened to the lower static pressure plate by bolts, so that the leveling screw can only rotate, It cannot move axially; the side circumference of the universal leveling plate is provided with a circumferential surface, and the tips of several self-aligning jackscrews pass through the corresponding threaded holes to resist the circumferential surface.

本发明进一步的改进在于:天然花岗岩床身中心设有一个安装孔,半球座固定于该安装孔中;半球形石墨瓦固定在半球座上;转台芯轴安装于半球轴中心并连同半球轴固定在转台下静压盘上;半球轴的凸球面与半球形石墨瓦的凹球面相配合;转台下静压盘的底面开设有环形槽,该环形槽内均匀固定有若干块平面支承石墨块;平面支承石墨块与天然花岗岩床身形成气体静压轴承副。The further improvement of the present invention is that: a mounting hole is provided in the center of the natural granite bed, and the hemispherical seat is fixed in the mounting hole; the hemispherical graphite tile is fixed on the hemispherical seat; On the static pressure plate under the turntable; the convex spherical surface of the hemispherical shaft matches the concave spherical surface of the hemispherical graphite tile; the bottom surface of the static pressure plate under the turntable is provided with an annular groove, and several pieces of flat supporting graphite are evenly fixed in the annular groove block; planar support graphite block and natural granite bed form an aerostatic bearing pair.

本发明进一步的改进在于:所述精密大口径非球面形状测量机还包括第一气路和第二气路;第一气路连通半球形石墨瓦,压力气体通入半球形石墨瓦中,在半球形石墨瓦与半球轴之间形成气膜;第二气路连通所述若干平面支承石墨块,压力气体通入平面支承石墨块中,在平面支承石墨块与天然花岗岩床身之间形成气膜。The further improvement of the present invention is that: the precision large-diameter aspheric shape measuring machine also includes a first gas path and a second gas path; the first gas path is connected to the hemispherical graphite tile, and the pressure gas is passed into the hemispherical graphite tile. A gas film is formed between the hemispherical graphite tile and the hemispherical axis; the second gas path is connected to the several plane-supported graphite blocks, and the pressure gas passes into the plane-supported graphite blocks to form a gas film between the plane-supported graphite blocks and the natural granite bed. membrane.

本发明进一步的改进在于:焊接椭圆弧龙门架包括前板和后板;前板和后板之间通过若干块对称排布的加强筋板焊接固定在一起;前板和后板的下侧边沿包括半椭圆弧段。The further improvement of the present invention lies in: the welded elliptical arc gantry includes a front plate and a rear plate; the front plate and the rear plate are welded and fixed together by several symmetrically arranged stiffener plates; the lower edges of the front plate and the rear plate Includes semi-elliptical arc segments.

本发明进一步的改进在于:驱动单元包括皮带轮、减速器和伺服电机;伺服电机通过减速器和皮带轮连接。The further improvement of the present invention is that: the drive unit includes a pulley, a reducer and a servo motor; the servo motor is connected with the pulley through the reducer.

本发明进一步的改进在于:所述气膜的厚度为3~5μm。The further improvement of the present invention is that: the thickness of the gas film is 3-5 μm.

与现有技术相比,本发明的有益效果在于:本发明通过超精密测量机,能够用于大口径非球面元件铣磨加工后的测量评定,可以实现工件二维和三维误差评定。测量过程易操作,测量方法效率高,测量路径易实现。Compared with the prior art, the beneficial effect of the present invention is that: the present invention can be used for measurement and evaluation of large-diameter aspheric elements after milling and grinding through an ultra-precision measuring machine, and can realize two-dimensional and three-dimensional error evaluation of workpieces. The measurement process is easy to operate, the measurement method is efficient, and the measurement path is easy to realize.

【附图说明】 【Description of drawings】

图1为本发明超精密大口径非球面形状测量机的主视图;Fig. 1 is the front view of the ultra-precision large-caliber aspheric shape measuring machine of the present invention;

图2为图1所示超精密大口径非球面形状测量机的侧视图;Fig. 2 is a side view of the ultra-precision large-caliber aspheric shape measuring machine shown in Fig. 1;

图3为本发明的调心调平装置的结构示意图;Fig. 3 is the schematic structural view of the self-aligning and leveling device of the present invention;

图4为图3中A部的局部放大图;Fig. 4 is a partial enlarged view of part A in Fig. 3;

图5为本发明的半球定心平面支承转台结构结构示意图;Fig. 5 is a structural schematic diagram of the hemispherical centering planar support turntable of the present invention;

图6为本发明的焊接椭圆弧龙门架的俯视图;Fig. 6 is the top view of the welded elliptical arc gantry of the present invention;

图7为本发明的焊接椭圆弧龙门架的主视图;Fig. 7 is the front view of the welded elliptical arc gantry of the present invention;

图8为本发明测量机放置待测元件后的示意图;Fig. 8 is a schematic diagram of the measuring machine of the present invention after placing the element to be measured;

图9a和图9b为大口径非球面元件数据采集路径示意图;Figure 9a and Figure 9b are schematic diagrams of the data acquisition path of the large-aperture aspheric element;

图10为找正中心工作原理示意图;Figure 10 is a schematic diagram of the working principle of the alignment center;

图11为确定测量基准坐标值和测量行程示意图。Fig. 11 is a schematic diagram of determining the measurement reference coordinate value and the measurement stroke.

【具体实施方式】 【Detailed ways】

下面结合附图对本发明做进一步详细描述:The present invention is described in further detail below in conjunction with accompanying drawing:

请参阅图1至图7所示,为本发明测量方法所用超精密大口径非球面形状测量机的结构示意图。Please refer to FIG. 1 to FIG. 7 , which are structural schematic diagrams of an ultra-precision large-caliber aspheric shape measuring machine used in the measuring method of the present invention.

请参阅图1及图2所示,本发明一种超精密大口径非球面形状测量机,包括天然花岗岩床身1、辅气体静压导轨2、质量平衡块3、焊接椭圆弧龙门架4、钢带滚轮5、钢带6、花岗岩导柱7、V型气浮轴承块8、长度计9、定位芯轴10、转台面11、万向调平板12、转台下静压盘13、主气体静压导轨14、转台芯轴15、皮带轮16、减速器17、伺服电机18、X轴直线电机19和Z轴直线电机20。Please refer to Fig. 1 and Fig. 2, an ultra-precision large-diameter aspheric shape measuring machine of the present invention includes a natural granite bed 1, an auxiliary gas static pressure guide rail 2, a mass balance block 3, a welded elliptical arc gantry 4, Steel belt roller 5, steel belt 6, granite guide column 7, V-shaped air bearing block 8, length gauge 9, positioning mandrel 10, turntable surface 11, universal leveling plate 12, static pressure plate under turntable 13, main Gas static pressure guide rail 14, turntable mandrel 15, pulley 16, reducer 17, servo motor 18, X-axis linear motor 19 and Z-axis linear motor 20.

本发明超精密大口径非球面形状测量机的X轴部件主要由辅气体静压导轨2、焊接椭圆弧龙门架4、主气体静压导轨14和X轴直线电机19构成。辅气体静压导轨2和主气体静压导轨14的截面呈L形,卡设于天然花岗岩床身1两侧;焊接椭圆弧龙门架4的两个末端,一端固定在辅气体静压导轨2上,另一端固定在主气体静压导轨14;辅气体静压导轨2和主气体静压导轨14上设有充气接口,X轴部件运动时,通过充气接口给辅气体静压导轨2和主气体静压导轨14充气,使辅气体静压导轨2、主气体静压导轨14和天然花岗岩床身1的顶面和侧面之间均形成气膜。主气体静压导轨14由X轴直线电机19带动,带动焊接椭圆弧龙门架4沿天然花岗岩床身1导轨面运动。主、辅气体静压导轨14和2的轴承材料均采用多孔质石墨,其气孔均匀,可以形成厚度均匀的气膜,运动性能平稳。超精密气体静压的气膜厚度为4~5μm,保证气膜的刚度以及导轨的稳定性。X轴驱动单元采用U型X轴直线电机19,闭环测量元件采用高精度光栅线位移传感器,分辨率达0.1μm。The X-axis components of the ultra-precision large-diameter aspheric shape measuring machine of the present invention are mainly composed of auxiliary gas static pressure guide rail 2, welded elliptical arc gantry frame 4, main gas static pressure guide rail 14 and X-axis linear motor 19. The auxiliary gas static pressure guide rail 2 and the main gas static pressure guide rail 14 have an L-shaped cross section, and are clamped on both sides of the natural granite bed 1; the two ends of the elliptical arc gantry 4 are welded, and one end is fixed on the auxiliary gas static pressure guide rail 2 The other end is fixed on the main gas static pressure guide rail 14; the auxiliary gas static pressure guide rail 2 and the main gas static pressure guide rail 14 are provided with an inflation interface, and when the X-axis components move, the auxiliary gas static pressure guide rail 2 and the main gas static pressure guide rail 2 are fed through the inflation interface. The gas static pressure guide rail 14 is inflated, so that an air film is formed between the auxiliary gas static pressure guide rail 2, the main gas static pressure guide rail 14 and the top surface and the side of the natural granite bed 1. The main gas static pressure guide rail 14 is driven by the X-axis linear motor 19, and drives the welded elliptical arc gantry 4 to move along the guide rail surface of the natural granite bed 1. The bearing materials of the main and auxiliary gas static pressure guide rails 14 and 2 are all made of porous graphite, which has uniform pores and can form a gas film with uniform thickness and stable motion performance. The air film thickness of the ultra-precision gas static pressure is 4-5 μm, which ensures the rigidity of the air film and the stability of the guide rail. The X-axis driving unit adopts a U-shaped X-axis linear motor 19, and the closed-loop measuring element adopts a high-precision grating linear displacement sensor with a resolution of 0.1 μm.

本发明超精密大口径非球面形状测量机Z轴部件主要由质量平衡块3、钢带滚轮5、钢带6、花岗岩导柱7、V型气浮轴承块8、长度计9和Z轴直线电机20构成。两个V型气浮轴承块8通过四个螺栓连接在焊接椭圆弧龙门架4上,可以进行水平方向的微小调节,用于调节Z轴的垂直度。八棱面花岗岩导柱7与对称连接的双V型气浮轴承块8组成气体静压导轨副,实现Z轴的上下运动;角形花岗岩导柱7抗扭转稳定性好。Z轴驱动单元采用U型Z轴直线电机20,电机20的次级线圈与焊接椭圆弧龙门架4固定连接,初级线圈与花岗岩导柱7连接,在花岗岩导柱7上贴有高精度直线光栅尺,实现Z轴的高精度位移测量,通过测量反馈,最终实现Z轴高精度进给运动。Z轴测头长度计9固定在花岗岩导柱7的内腔,其直线位移分辨率为0.μm,与Z轴系统配合,综合测量精度为±0.5μm。由于Z轴是竖直安装,采用质量平衡块3来平衡Z轴部件的运动重量,可以减小Z轴直线电机20的负载,提高进给系统的精度。质量平衡块3通过钢带6连接,钢带6的另一端固定在花岗岩导柱7的端部,并绕两个钢带滚轮5运动,最终实现Z轴部件的高精度平稳运动。The Z-axis components of the ultra-precision large-diameter aspheric shape measuring machine of the present invention are mainly composed of a mass balance block 3, a steel belt roller 5, a steel belt 6, a granite guide column 7, a V-shaped air bearing block 8, a length gauge 9 and a Z-axis straight line The motor 20 constitutes. Two V-shaped air bearing blocks 8 are connected to the welded elliptical arc gantry 4 by four bolts, which can be slightly adjusted in the horizontal direction to adjust the verticality of the Z axis. The octagonal granite guide column 7 and the symmetrically connected double V-shaped air bearing blocks 8 form a gas static pressure guide rail pair to realize the up and down movement of the Z axis; the angular granite guide column 7 has good torsional stability. The Z-axis drive unit adopts a U-shaped Z-axis linear motor 20, the secondary coil of the motor 20 is fixedly connected with the welded elliptical arc gantry 4, and the primary coil is connected with the granite guide post 7, and a high-precision linear grating is pasted on the granite guide post 7 ruler to realize high-precision displacement measurement of the Z-axis, and finally realize high-precision feed movement of the Z-axis through measurement feedback. The Z-axis measuring head length meter 9 is fixed in the inner cavity of the granite guide column 7, and its linear displacement resolution is 0.μm. Cooperating with the Z-axis system, the comprehensive measurement accuracy is ±0.5μm. Since the Z-axis is installed vertically, using the mass balance block 3 to balance the moving weight of the Z-axis components can reduce the load of the Z-axis linear motor 20 and improve the accuracy of the feed system. The mass balance block 3 is connected by a steel belt 6, and the other end of the steel belt 6 is fixed on the end of the granite guide column 7, and moves around two steel belt rollers 5, finally realizing the high-precision and smooth movement of the Z-axis components.

本发明超精密大口径非球面形状测量机的天然花岗岩床身1通过三点支承方式安装,X轴部件由主气体静压导轨14和辅气体静压导轨2支承在天然花岗岩床身1上,Z轴部件通过四个可调节螺栓连接在X轴部件的焊接椭圆弧龙门架4上,可以实现在水平方向的微小调节。调心调平转台部件的转台下静压盘13与天然花岗岩床身1之间通过气体静压轴承支承,实现高精度的回转精度。The natural granite bed 1 of the ultra-precision large-diameter aspheric shape measuring machine of the present invention is installed in a three-point support mode, and the X-axis components are supported on the natural granite bed 1 by the main gas static pressure guide rail 14 and the auxiliary gas static pressure guide rail 2, The Z-axis component is connected to the welded elliptical arc gantry 4 of the X-axis component through four adjustable bolts, so that small adjustments in the horizontal direction can be realized. The static pressure plate 13 under the turntable of the self-aligning and leveling turntable component and the natural granite bed 1 are supported by gas static pressure bearings to achieve high-precision rotation accuracy.

本发明超精密大口径非球面形状测量机的调心调平转台的主要特点是承载能力大(零件质量260Kg)、转台精度高、可以实现高精度的转台调心和调平功能。调心调平转台主要由定位芯轴10、转台面11、万向调平板12、转台下静压盘13、转台芯轴15、皮带轮16、减速器17和伺服电机18等构成。转台下静压盘13与天然花岗岩床身1之间通过气体静压轴承支承,实现高精度的回转精度。调心时,定位芯轴10固定在转台的中心孔处,定位芯轴10顶端设有调心孔,用于辅助调节转台中心与长度计9测头的同心,在测量时卸掉定位芯轴10。转台的调心调平功能主要由定位芯轴10、转台面11、万向调平板12、转台下静压盘13实现,能够对用于大口径零件的测量转台(直径900mm)进行精密调心调平,并具有调心调平自锁功能,突破了传统的大口径、重载型转台调心调平功能,能够实现转台三维可倾二维可调的功能,提高了测量精度。转台部件的驱动单元采用伺服电机18、减速器17和皮带轮16的组合方式,带动转台芯轴15旋转,从而带动整个转台实现低速平稳运动。对转台配置高精度圆光栅,进行角度测量反馈,可以实现转台的高精度分度功能。调心调平转台部件是超精密大口径非球面形状测量机的核心部件,具有低速平稳、回转精度高、承载能力大的特点。The main features of the self-aligning and leveling turntable of the ultra-precision large-diameter aspheric shape measuring machine of the present invention are large bearing capacity (parts mass 260Kg), high precision of the turntable, and high-precision centering and leveling functions of the turntable. The centering and leveling turntable is mainly composed of a positioning mandrel 10, a turntable surface 11, a universal leveling plate 12, a static pressure plate under the turntable 13, a turntable mandrel 15, a pulley 16, a reducer 17 and a servo motor 18. The static pressure plate 13 under the turntable and the natural granite bed 1 are supported by gas static pressure bearings to achieve high-precision rotation accuracy. When aligning, the positioning mandrel 10 is fixed at the center hole of the turntable, and the top of the positioning mandrel 10 is provided with a centering hole, which is used to assist in adjusting the concentricity between the center of the turntable and the measuring head of the length meter 9, and the positioning mandrel is removed during measurement 10. The centering and leveling function of the turntable is mainly realized by the positioning mandrel 10, the turntable surface 11, the universal leveling plate 12, and the static pressure plate 13 under the turntable. Centering and leveling, and has self-aligning, leveling and self-locking functions, which break through the traditional centering and leveling functions of large-diameter and heavy-duty turntables, and can realize the three-dimensional tilting and two-dimensional adjustable functions of the turntable, which improves the measurement accuracy. The drive unit of the turntable components adopts the combination of servo motor 18, reducer 17 and belt pulley 16 to drive the turntable mandrel 15 to rotate, thereby driving the whole turntable to realize low-speed and stable movement. The turntable is equipped with a high-precision circular grating for angle measurement feedback, which can realize the high-precision indexing function of the turntable. The self-aligning and leveling turntable part is the core part of the ultra-precision large-caliber aspheric shape measuring machine, which has the characteristics of low-speed stability, high rotation accuracy and large bearing capacity.

请参阅图3及图4所示,本发明的调心调平装置,包括转台下静压盘13,调平定位盘22,调心顶丝23,转台台面11,调平螺杆25,调平滑轮26,调平滑轮轴27,调平支座28,定位芯轴10,万向调平板12。Please refer to Fig. 3 and shown in Fig. 4, the self-aligning and leveling device of the present invention comprises the static pressure plate 13 under the turntable, the leveling positioning plate 22, the self-aligning top screw 23, the turntable table top 11, the leveling screw rod 25, the Smooth wheel 26, leveling smooth wheel shaft 27, leveling support 28, positioning mandrel 10, universal leveling plate 12.

四个调平支座28安装在转台下静压盘13上的四个凹槽中,可沿着转台下静压盘13上的凹槽移动。调平滑轮轴27将调平滑轮26连接到调平支座28上,调平支座28与调平螺杆25螺纹连接,调平螺杆25安装在转台下静压盘13,调平螺杆25可以旋转,并通过调平定位盘22进行调平定位,调平定位盘22通过螺钉固定在转台下静压盘13上。调平螺杆25的头部截面呈梯形,调平定位盘22压住调平螺杆25的头部,然后通过螺栓紧固于下静压盘13上,对调平螺杆25的轴向进行限制,使调平螺杆25只能转动,而不能轴向移动。Four leveling supports 28 are installed in four grooves on the static pressure plate 13 under the turntable, and can move along the grooves on the static pressure plate 13 under the turntable. The leveling pulley shaft 27 connects the leveling pulley 26 to the leveling support 28, and the leveling support 28 is threadedly connected with the leveling screw rod 25, and the leveling screw rod 25 is installed on the static pressure plate 13 under the turntable, and the leveling screw rod 25 can be Rotate, and perform leveling and positioning through the leveling positioning plate 22, and the leveling positioning plate 22 is fixed on the static pressure plate 13 under the turntable by screws. The cross-section of the head of the leveling screw 25 is trapezoidal, and the leveling positioning plate 22 presses the head of the leveling screw 25, and then is fastened to the lower static pressure plate 13 by bolts to restrict the axial direction of the leveling screw 25, so that The leveling screw rod 25 can only rotate, but cannot move axially.

万向调平板12的底部外周为球面101,其安装在转台下静压盘13的凹球面110上;万向调平板12的底部中心处设有锥形斜面102;调平滑轮26可以在万向调平板12的锥形斜面102上进行滑动,通过调节四个调平滑轮26,可以使万向调平板12三维倾斜。转台台面11的下安装面直接安装在万向调平板12上,万向调平板12的凸球面上部设有圆周面103,四个间隔90度设置的调心顶丝23通过螺纹与调节转台台面11连接;调心顶丝23顶住万向调平板12的圆周面103,通过调节四个调心顶丝23,可以使转台台面11产生二维移动,实现转台的调心功能。定位芯轴10与转台台面11的中心孔配合,并通过螺钉固定;定位芯轴10的顶部设有用于调心的定位孔。The bottom periphery of the universal leveling plate 12 is a spherical surface 101, which is installed on the concave spherical surface 110 of the static pressure plate 13 under the turntable; the center of the bottom of the universal leveling plate 12 is provided with a conical slope 102; the leveling pulley 26 can be Sliding on the tapered slope 102 of the universal leveling plate 12 , by adjusting the four leveling pulleys 26 , the universal leveling plate 12 can be tilted three-dimensionally. The lower mounting surface of the turntable table top 11 is directly installed on the universal leveling plate 12. The upper convex spherical surface of the universal leveling plate 12 is provided with a circumferential surface 103, and four self-aligning jackscrews 23 arranged at intervals of 90 degrees are threaded to adjust the turntable table surface. 11 connected; the self-aligning jackscrew 23 withstands the circumferential surface 103 of the universal leveling plate 12, and by adjusting the four self-aligning jacking screws 23, the turntable table top 11 can be moved two-dimensionally to realize the centering function of the turntable. The positioning mandrel 10 is matched with the center hole of the turntable table surface 11 and fixed by screws; the top of the positioning mandrel 10 is provided with a positioning hole for centering.

万向调平板12要承载转台和零件的全部质量,在结构上设计为凸球面101,与转台下静压盘13的凹球面110配合,起主要支承作用。为增大接触面积,在装配时,将万向调平板12的凸球面101和转台下静压盘13的凹球面110进行配研,得到良好的接触面积和面形精度。为实现转台的调平功能,万向调平板12的下端面设计为斜面结构,通过斜面与调平滑轮26的相对运动,实现万向调平板12的倾斜运动。The universal leveling plate 12 will carry all the mass of the turntable and parts, and is structurally designed as a convex spherical surface 101, which cooperates with the concave spherical surface 110 of the static pressure plate 13 under the turntable to play a main supporting role. In order to increase the contact area, during assembly, the convex spherical surface 101 of the universal leveling plate 12 and the concave spherical surface 110 of the static pressure plate 13 under the turntable are matched and ground to obtain good contact area and surface shape accuracy. In order to realize the leveling function of the turntable, the lower end surface of the universal leveling plate 12 is designed as a slope structure, and the tilting motion of the universal leveling plate 12 is realized through the relative movement between the slope and the leveling pulley 26 .

转台下静压盘13是整个调心调平装置的承载部件,其上端面设计有凹球面110,与万向调平板12的凸球面101配合,承受主要质量。在转台下静压盘13上,设有4个互相垂直的凹槽,可以保证调平支座28沿着一定的方向(凹槽方向)进行移动,提高了调平的精度;四个凹槽间隔90度设置。The static pressure plate 13 under the turntable is the bearing part of the whole self-aligning and leveling device, and its upper end surface is designed with a concave spherical surface 110, which cooperates with the convex spherical surface 101 of the universal leveling plate 12 to bear the main mass. On the static pressure plate 13 under the turntable, there are 4 mutually perpendicular grooves, which can ensure that the leveling support 28 moves along a certain direction (the direction of the groove), which improves the leveling accuracy; the four grooves The slots are set at intervals of 90 degrees.

调平装置由调平定位盘22,调平螺杆25,调平滑轮26,调平滑轮轴27和调平支座28组成。调平装置共有四个,均匀分布,相邻间隔90°,调平装置安装在转台下静压盘13上,可沿着转台下静压盘13上的槽移动。通过旋转调节螺杆25,由于调平定位盘22在调节螺杆25轴线方向将其定位,无法移动,从而使调平支座28带着调平滑轮26和调平滑轮轴27沿着槽移动。万向调平板12的凸球面101与转台下静压盘13的凹球面110配合,当调平滑轮26在万向调平板12的斜面上进行前后滑动,通过调节一个调平支座28,其余三个调平支座28静止,万向调平板12可以倾斜运动,实现转台部件的调平功能。Leveling device is made up of leveling positioning plate 22, leveling screw rod 25, leveling pulley 26, leveling pulley axle 27 and leveling bearing 28. There are four leveling devices, which are evenly distributed, and the adjacent intervals are 90°. The leveling devices are installed on the static pressure plate 13 under the turntable and can move along the grooves on the static pressure plate 13 under the turntable. By rotating the adjusting screw rod 25, because the leveling positioning disc 22 is positioned in the axial direction of the adjusting screw rod 25, it cannot move, so that the leveling support 28 moves along the groove with the leveling pulley 26 and the leveling pulley shaft 27. The convex spherical surface 101 of the universal leveling plate 12 cooperates with the concave spherical surface 110 of the static pressure plate 13 under the turntable. When the leveling pulley 26 slides back and forth on the slope of the universal leveling plate 12, by adjusting a leveling support 28, The remaining three leveling supports 28 are stationary, and the universal leveling plate 12 can tilt and move to realize the leveling function of the turntable components.

调心装置由调心顶丝23,转台台面11和定位芯轴10组成。转台台面11的下安装面直接安装在万向调平板12上,四个调心顶丝23通过螺纹与转台台面11连接,定位芯轴10与转台台面11的中心孔配合,并通过螺钉固定,可以得到转台台面11的中心位置。通过调节四个调心顶丝23,可以使转台台面11产生二维移动,当定位芯轴10端部的中心孔与测头的中心轴线重合时,实现转台的调心功能。The centering device is made up of centering jackscrew 23 , turntable table top 11 and positioning mandrel 10 . The lower mounting surface of the turntable table 11 is directly installed on the universal leveling plate 12, the four self-aligning jackscrews 23 are connected with the turntable table 11 through threads, the positioning mandrel 10 is matched with the center hole of the turntable table 11, and fixed by screws, The center position of the turntable table surface 11 can be obtained. By adjusting the four self-aligning jackscrews 23, the turntable surface 11 can be moved two-dimensionally. When the center hole at the end of the positioning mandrel 10 coincides with the central axis of the measuring head, the centering function of the turntable is realized.

请参阅图5所示,本发明的半球定心平面支承转台结构,包括天然花岗岩床身1、平面支承石墨块32、转台下静压盘13、半球座34、半球形石墨瓦35、转台芯轴15和半球轴37。Please refer to shown in Fig. 5, the hemispherical centering planar support turntable structure of the present invention comprises natural granite bed 1, planar support graphite block 32, static pressure plate 13 under the turntable, hemispherical seat 34, hemispherical graphite tile 35, turntable mandrel 15 and hemispherical shaft 37.

半球定心结构由半球座34、半球轴37、转台芯轴15和半球形石墨瓦35组成。天然花岗岩床身1中心设有一个梯形安装孔,半球座34通过螺钉固定在天然花岗岩床身1的梯形安装孔中,半球形石墨瓦35通过环氧树脂胶粘结在半球座34上。半球轴37中心设有一通孔,转台芯轴15安装于该通孔中,半球轴37和转台芯轴15通过螺钉固定到转台下静压盘13上。伺服电机18通过减速器17和皮带轮16与转台芯轴15连接,带动转台芯轴15转动,从而驱动转台下静压盘13一起转动。半球轴37与半球形石墨瓦35进行配研,得到均匀的配合间隙,将压力气体通入半球形石墨瓦35中,使半球形石墨瓦35与半球轴37之间形成3~5μm气膜,起到定心的作用。The hemispherical centering structure is made up of hemispherical seat 34, hemispherical shaft 37, turntable mandrel 15 and hemispherical graphite tile 35. The center of the natural granite bed 1 is provided with a trapezoidal mounting hole, and the hemispherical seat 34 is fixed in the trapezoidal mounting hole of the natural granite bed 1 by screws, and the hemispherical graphite tile 35 is bonded on the hemispherical seat 34 by epoxy resin. A through hole is arranged in the center of the hemispherical shaft 37, and the turntable mandrel 15 is installed in the through hole, and the hemispherical shaft 37 and the turntable mandrel 15 are fixed to the static pressure plate 13 under the turntable by screws. The servo motor 18 is connected to the turntable mandrel 15 through the reducer 17 and the pulley 16, and drives the turntable mandrel 15 to rotate, thereby driving the lower static pressure plate 13 of the turntable to rotate together. The hemispherical shaft 37 and the hemispherical graphite tile 35 are matched and ground to obtain a uniform fit gap, and the pressure gas is passed into the hemispherical graphite tile 35 to form a 3-5 μm gas film between the hemispherical graphite tile 35 and the hemispherical shaft 37. Play a reassuring role.

平面支承结构由天然花岗岩床身1、转台下静压盘13和平面支承石墨块32组成,12块平面支承石墨块32通过环氧树脂粘在转台下静压盘13的环形槽内,均匀分布转台下静压盘13一周,与天然花岗岩床身1形成气体静压轴承副。压缩气体通过转台芯轴15的气孔与转台下静压盘13的轴向气孔相通,将气体送入转台下静压盘13的水平气孔中,再与环槽中心的垂直气孔相同,气体进入环槽以后通过平面支承石墨块32上的气槽进行分配后从石墨的微小气孔中流出。平面支承石墨块32与天然花岗岩床身1结合面之间形成一层3~5μm气膜,实现气体静压转台的平面支承作用。The planar support structure is composed of a natural granite bed 1, a static pressure plate 13 under the turntable and a planar support graphite block 32, and 12 planar support graphite blocks 32 are glued in the annular groove of the static pressure plate 13 under the turntable by epoxy resin. Evenly distribute the static pressure plate 13 under the turntable for a week, and form a gas static pressure bearing pair with the natural granite bed 1. The compressed gas communicates with the axial air hole of the static pressure plate 13 under the turntable through the air hole of the mandrel shaft 15 of the turntable, and sends the gas into the horizontal air hole of the static pressure plate 13 under the turntable, and then is the same as the vertical air hole in the center of the ring groove. After entering the ring groove, it is distributed through the air groove on the planar support graphite block 32 and then flows out from the tiny pores of the graphite. A layer of 3-5 μm gas film is formed between the plane support graphite block 32 and the joint surface of the natural granite bed 1 to realize the plane support function of the gas static pressure turntable.

本发明用于大口径超精密测量机的半球定心平面支承转台结构,其承载力、刚度和精度都与半球轴和平面气体静压轴承的设计和气膜厚度有关,通过调节气体压力和配研气膜间隙,可以得到所要求的承载力、刚度和精度。该发明通过结合具有半球定心和平面支承的转台结构与气体静压轴承支承技术,在装配过程中采用配研技术,最终实现测量机转台的高精度、高刚度和大承载能力的功能。The present invention is used for the hemispherical centering planar support turntable structure of large-diameter ultra-precision measuring machines. The air film gap can get the required bearing capacity, rigidity and precision. This invention combines the turntable structure with hemispherical centering and plane support with gas static pressure bearing support technology, and adopts the research technology in the assembly process, and finally realizes the functions of high precision, high rigidity and large bearing capacity of the turntable of the measuring machine.

本发明转台结构采用小尺寸的半球轴进行定心,大尺寸的平面导轨做为承载平面,并采用气体静压轴承作为半球轴和平面的支承轴承。转台半球轴只起定心的作用,承受载荷小,保证了半球轴对转台的定心精度;大尺寸平面轴承可以承受转台和大尺寸零件的重量,从而保证转台的精度以及承载能力,最终实现超精密测量机高精度和高刚度的测量。The turntable structure of the present invention uses a small-sized hemispherical shaft for centering, a large-sized plane guide rail as a bearing plane, and an aerostatic bearing as a supporting bearing for the hemispherical shaft and the plane. The hemispherical shaft of the turntable only plays the role of centering, and bears a small load, which ensures the centering accuracy of the hemispherical shaft to the turntable; the large-size plane bearing can bear the weight of the turntable and large-sized parts, thereby ensuring the accuracy and carrying capacity of the turntable, and finally realizes Ultra-precision measuring machine for high-precision and high-rigidity measurements.

请参阅图6和图7所示,本发明的焊接椭圆弧龙门架4,包括椭圆弧龙门焊接架底板41、43,加强筋板47、49、412、414,主体结构前板42,外形焊接加强板44、45、415、416,主体结构后板46,连接板410、411,外形防护板48、413。Please refer to Fig. 6 and shown in Fig. 7, welding ellipse arc gantry frame 4 of the present invention comprises ellipse arc gantry welding frame bottom plate 41,43, stiffener plate 47,49,412,414, main structure front plate 42, shape welding Reinforcement plates 44, 45, 415, 416, main structure rear plate 46, connecting plates 410, 411, shape protection plates 48, 413.

主体结构前板42和主体结构后板46对应的两端,分别通过底板41、底板43焊接在一起;主体结构前板42和主体结构后板46中间对称焊接有加强筋板47、49、412、414;主体结构前板42和主体结构后板46对应的两端,还分别焊接有外形焊接加强板44、45和外形焊接加强板415、416;主体结构前板42和主体结构后板46的上侧和下侧分别通过螺钉固定有外形防护板48、413。加强筋板49、412、主体结构前板42和主体结构后板46之间形成一个安装测量机的方孔,该方孔中设有焊接于后板46上用于固定测量机的连接板410、411。主体结构前板42和主体结构后板46的下边沿包括半椭圆弧段和与该半椭圆弧长轴顶点相切的两个直线段,该两个直线段处分别焊接加强板415、416。The two ends corresponding to the front plate 42 of the main structure and the rear plate 46 of the main structure are welded together through the bottom plate 41 and the bottom plate 43 respectively; the front plate 42 of the main structure and the rear plate 46 of the main structure are symmetrically welded with stiffener plates 47, 49, 412 , 414; The two ends corresponding to the main structure front plate 42 and the main structure rear plate 46 are also welded with profile welding reinforcement plates 44, 45 and profile welding reinforcement plates 415, 416 respectively; the main structure front plate 42 and the main structure rear plate 46 The upper side and the lower side of the upper and lower sides are respectively fixed with shape protection plates 48,413 by screws. A square hole for installing the measuring machine is formed between the stiffener plates 49, 412, the main structure front plate 42 and the main structure rear plate 46, and a connecting plate 410 welded on the rear plate 46 for fixing the measuring machine is arranged in the square hole , 411. The lower edges of the main structure front plate 42 and the main structure rear plate 46 include a semi-elliptical arc segment and two straight line segments tangent to the apex of the long axis of the semi-elliptical arc, where reinforcement plates 415 and 416 are respectively welded.

本发明一种用于大口径零件测量机的椭圆弧龙门结构,可用于大口径零件(零件直径小于Φ900mm)的形状精度的测量。其结构通过椭圆弧龙门焊接架底板41、43与测量机的直线运动导轨相连,带动龙门结构移动。测量机的垂直轴安装在该椭圆弧龙门结构的连接板410、411上,并可以实现水平方向的微小调节。The invention relates to an elliptical arc gantry structure used in a measuring machine for large-diameter parts, which can be used for measuring the shape accuracy of large-diameter parts (the diameter of the parts is less than Φ900mm). Its structure is connected with the linear motion guide rail of the measuring machine through the bottom plates 41 and 43 of the elliptical arc gantry welding frame, so as to drive the gantry structure to move. The vertical axis of the measuring machine is installed on the connecting plates 410 and 411 of the elliptical arc gantry structure, and can realize small adjustments in the horizontal direction.

焊接底板41、43板厚10mm,材料采用45钢,对其平面度要求达到5μm,焊接完成经过一定时间时效后要对其底面进行打磨,以保证接触面的面形精度。The thickness of the welded bottom plates 41 and 43 is 10mm, and the material is 45 steel, and the flatness is required to reach 5μm. After a certain period of aging after welding, the bottom surface should be polished to ensure the surface shape accuracy of the contact surface.

加强筋板47、49、412、414板厚10mm,材料采用45钢,钣金中间有空心圆,一方面减轻质量,另一方面便于在钣金中间布置测量机电气线路等。加强筋板采用焊接工艺将其与椭圆弧龙门的主体结构焊接为一体,其主要作用是加强椭圆弧龙门的强度和刚性,以提高椭圆弧龙门结构的精度保持性和稳定性。Rib plates 47, 49, 412, and 414 are 10mm thick, made of 45 steel, and have hollow circles in the middle of the sheet metal. On the one hand, the weight is reduced, and on the other hand, it is convenient to arrange the electrical circuits of the measuring machine in the middle of the sheet metal. The rib plate is welded together with the main structure of the elliptical arc gantry by welding process. Its main function is to strengthen the strength and rigidity of the elliptical arc gantry, so as to improve the precision retention and stability of the elliptical arc gantry structure.

主体结构前板42和主体结构后板46是椭圆弧龙门结构的主体,龙门结构的强度和刚度主要由这两个板的材料、尺寸、焊接工艺等来保证。前板42和后板46板厚10mm,材料采用45钢,焊接完之后进行时效处理。由于测量垂直轴安装在椭圆弧龙门结构上,对龙门结构的整体性能要求很高,就需要较高的尺寸精度和焊接工艺来保证主体结构的强度和刚度。The front plate 42 of the main structure and the rear plate 46 of the main structure are the main body of the elliptical arc gantry structure, and the strength and rigidity of the gantry structure are mainly guaranteed by the materials, dimensions and welding process of the two plates. The thickness of the front plate 42 and the rear plate 46 is 10 mm, the material is 45 steel, and aging treatment is carried out after welding. Since the measuring vertical axis is installed on the elliptical arc gantry structure, the overall performance of the gantry structure is very high, and high dimensional accuracy and welding technology are required to ensure the strength and rigidity of the main structure.

外形焊接加强板44、45、415、416将主体结构的前板42和主体结构的后板46通过焊接工艺连接在一起,起到支承固定的作用。对外形焊接加强板44、45、415、416在完成切割成形以后要对其进行热处理。The shape welding reinforcing plates 44, 45, 415, 416 connect the front plate 42 of the main structure and the rear plate 46 of the main structure together through welding process, and play the role of supporting and fixing. Heat treatment will be carried out to the shape welding reinforcing plates 44, 45, 415, 416 after they are cut and formed.

连接板410、411焊接在主体结构后板46上,用于安装固定垂直轴。两个板(410、411)在垂直方向的平面度为5μm,要保证两个板与垂直轴的接触面在同一平面上,即可保证垂直轴与工作台面的垂直度。The connecting plates 410, 411 are welded on the rear plate 46 of the main structure, and are used for installing and fixing the vertical shaft. The flatness of the two plates (410, 411) in the vertical direction is 5 μm. To ensure that the contact surfaces of the two plates and the vertical axis are on the same plane, the verticality of the vertical axis and the worktable can be ensured.

外形防护板48、413在整个椭圆龙门结构中起到防护作用,保护椭圆龙门结构内部的结构以及管路、电气线路。外形防护板48、413通过小螺钉固定于椭圆弧龙门的主体结构上。The shape protection plates 48 and 413 play a protective role in the entire elliptical gantry structure, and protect the internal structure, pipelines and electrical circuits of the elliptical gantry structure. The shape protection plates 48, 413 are fixed on the main structure of the elliptical arc gantry by small screws.

本发明的椭圆弧龙门结构,通过其半椭圆弧结构,很好地减小了圆弧切入点处的应力集中,提高了龙门结构的稳定性。与相同跨度的花岗岩立柱龙门结构、半圆形结构相比,椭圆弧龙门结构具有占用空间小,质量轻等优点,更适合于高精度测量机的龙门结构。由于椭圆弧龙门结构受力较为均匀,龙门架的具有更长的使用寿命与精度保持性。椭圆弧龙门结构采用焊接技术,使得焊接件的设计更加灵活,可以根据不同的需要焊接成较为复杂的结构,同时还满足人机工程学的要求。The elliptical arc gantry structure of the present invention, through its semi-elliptical arc structure, well reduces the stress concentration at the entry point of the arc and improves the stability of the gantry structure. Compared with the granite column gantry structure and semi-circular structure with the same span, the elliptical arc gantry structure has the advantages of small space occupation and light weight, and is more suitable for the gantry structure of high-precision measuring machines. Because the force of the elliptical arc gantry structure is relatively uniform, the gantry has a longer service life and accuracy retention. The elliptical arc gantry structure adopts welding technology, which makes the design of welded parts more flexible, and can be welded into more complex structures according to different needs, while also meeting the requirements of ergonomics.

本发明的椭圆弧龙门结构,立柱和横梁设计成一体,减少误差的传递,有利于提高测量机的测量精度。该龙门结构具有受力均匀,应力集中小,强度和刚度高,结构稳定性好,运动质量轻,惯量小以及电机低能耗的特点,具有较好的精度保持性。In the ellipse-arc gantry structure of the present invention, the upright column and the cross beam are designed to be integrated, which reduces the transmission of errors and is beneficial to improving the measurement accuracy of the measuring machine. The gantry structure has the characteristics of uniform force, small stress concentration, high strength and rigidity, good structural stability, light moving mass, small inertia and low energy consumption of the motor, and has good precision retention.

本发明的椭圆弧龙门结构,其创新点在于采用焊接龙门结构代替传统的铸铁或者花岗岩立柱和横梁,与此同时在传统焊接结构的基础上采用适合测量机结构的椭圆弧龙门结构,半个椭圆弧形状与半圆弧形状相比更为适合于测量机结构,且在椭圆弧切入点不存在应力集中,很好的保证了龙门结构的寿命和精度。对传统测量机的外观也是一个很好的创新,将测量机的功能与人机工程学很好的结合在一起,使测量机在实现功能的同时满足人的视觉效果与操作的合理性。The innovation of the elliptical arc gantry structure of the present invention is that it adopts a welded gantry structure instead of traditional cast iron or granite columns and beams, and at the same time adopts an elliptical arc gantry structure suitable for the measuring machine structure on the basis of the traditional welded structure. Half an ellipse Compared with the semi-circular arc shape, the arc shape is more suitable for the structure of the measuring machine, and there is no stress concentration at the entry point of the elliptical arc, which ensures the life and precision of the gantry structure well. It is also a good innovation to the appearance of the traditional measuring machine. It combines the function of the measuring machine with ergonomics well, so that the measuring machine can meet the human visual effect and the rationality of operation while realizing the function.

测量机采用椭圆弧龙门结构,根据测量机的尺寸确定椭圆的长轴与短轴,形成半椭圆弧,将钢板用激光切割机完成成形切割,通过焊接工艺将龙门架的主体组成件以及必要的加强筋焊接成形;经过时效处理,释放焊接应力,再对龙门架进行修整,达到测量机所需要的精度,完成龙门架的加工工艺。The measuring machine adopts an elliptical arc gantry structure. The major axis and minor axis of the ellipse are determined according to the size of the measuring machine to form a semi-elliptical arc. The steel plate is shaped and cut with a laser cutting machine. The main components of the gantry frame and the necessary The reinforcing ribs are welded and formed; after aging treatment, the welding stress is released, and then the gantry is trimmed to achieve the accuracy required by the measuring machine, and the processing technology of the gantry is completed.

本发明实现了大口径非球面元件的专业化检测设备,同时对大口径光学元件的检测设备的进一步开发研究起到了巨大的推动和促进作用。The invention realizes the specialized detection equipment of the large-caliber aspheric element, and at the same time plays a huge role in promoting and promoting the further development and research of the detection equipment of the large-diameter optical element.

请参阅图8和图10所示,为测量机机械找正工作原理图,将长度计9中心和转台面11中心找正,关键是为了缩短工件放到转台面11后偏心调整时间,对于柱坐标测量系统,找正是一个比较复杂的实现过程。Please refer to Figure 8 and Figure 10, which are the schematic diagrams of the mechanical alignment of the measuring machine. The center of the length meter 9 and the center of the turntable surface 11 are aligned. The key is to shorten the eccentric adjustment time after the workpiece is placed on the turntable surface 11. For columns Finding a coordinate measurement system is a relatively complicated implementation process.

具体实现如下:将电感测微仪测头100固定到表座200上面,并将表座200固定到转台面11任意可以实现测量的位置,将电感测微仪测头100打到长度计9端部位置,通过转台面11调整旋转工作的调心机构;将电感测微仪调到0.01μm档,将误差调整到0.1微米(满足测量精度要求)以内,即认为找正。The specific implementation is as follows: fix the probe 100 of the inductance micrometer on the table base 200, and fix the base 200 on the turntable surface 11 at any position where measurement can be realized, and place the probe 100 of the inductance micrometer on the 9 end of the length gauge Adjust the centering mechanism of the rotating work through the turntable surface 11; adjust the inductance micrometer to the 0.01 μm range, and adjust the error to within 0.1 μm (meeting the measurement accuracy requirements), that is, it is considered to be aligned.

图9为测量路径示意图,其中图9a为二维测量路径示意图,图9b为三维测量路径示意图,图中所示P为测量步距,θ为测量角度间隔。二维测量过程中,X轴带动长度计9沿X方向运动,实现测量步距的运动,每走一个步距长度计9伸出采集一次数据,可以得到N个坐标点(xi,zi),i=1…N。在三维测量过程中,每圈的测量步数为n1,测量的步距为n2,从第一点开始,转台转动一个角度θ=360/n1,长度计9伸出采样一次,测完一圈,找到起始位置,测头沿X轴方向运动一个测量步距,直到完成测量过程,得到n1×n2个坐标点(xij,zij,θij),i=1…n1,j=1…n2。Fig. 9 is a schematic diagram of a measurement path, wherein Fig. 9a is a schematic diagram of a two-dimensional measurement path, and Fig. 9b is a schematic diagram of a three-dimensional measurement path. P shown in the figure is the measurement step distance, and θ is the measurement angle interval. During the two-dimensional measurement process, the X-axis drives the length meter 9 to move along the X direction to realize the movement of the measurement step. Every time a step is taken, the length meter 9 stretches out to collect data once, and N coordinate points (x i , z i ), i=1...N. In the three-dimensional measurement process, the number of measurement steps per circle is n1, and the measurement step distance is n2. Starting from the first point, the turntable rotates an angle θ=360/n1, and the length meter 9 is stretched out to sample once, and a circle is measured. , to find the starting position, the probe moves along the X-axis direction for a measurement step until the measurement process is completed, and n1×n2 coordinate points (x ij , z ij , θ ij ), i=1...n1, j=1 are obtained ...n2.

图11为测量基准坐标值确定和测量行程确定,图中A点位基准坐标(x0,z0),将工件放到转台面11并找正,将长度计9伸出,确定基准坐标A点,将A点坐标定位Z轴原点位置,在B点X轴坐标为X轴光栅读数x′,相对于A点坐标值为x′-x0,Z轴坐标为测头伸出的读数z′,相对于A点坐标值为z′-z0,所以B点坐标为(x′-x0,z′-z0),以此类推可以得出所有测量点的坐标值。确定测量行程是将顶点坐标值与最边缘坐标值想减的绝对值,测量半径r=|x0-x|,L=2r,确定测量形成后,就可以通过测量步距确定测量点数。Figure 11 shows the determination of the measurement reference coordinate value and the determination of the measurement stroke. In the figure, point A is the reference coordinate (x 0 , z 0 ). point, locate the coordinates of point A at the origin of the Z axis, and at point B, the X-axis coordinate is the X-axis grating reading x′, relative to the coordinate value of point A, the value is x′-x 0 , and the Z-axis coordinate is the reading z of the protruding probe ′, relative to the coordinate value of point A is z′-z 0 , so the coordinate value of point B is (x′-x 0 , z′-z 0 ), and the coordinate values of all measurement points can be obtained by analogy. Determining the measurement stroke is the absolute value subtracted from the vertex coordinate value and the most edge coordinate value. The measurement radius r=|x 0 -x side |, L=2r. After the measurement is confirmed, the number of measurement points can be determined by the measurement step distance.

本发明大口径光学非球面元件柱坐标接触式测量方法,应用本发明超精密测量机进行测量,其包括以下步骤:The cylindrical coordinate contact measurement method of the large-diameter optical aspheric element of the present invention uses the ultra-precision measuring machine of the present invention for measurement, which includes the following steps:

1、通过找正将转台面(11)中心和测量机长度计(9)中心对正,将电感测微仪表针精度等级打到0.01μm档,将电感测微仪测头打到高精度接触长度计(9)端部,进行找正,将误差控制在0.1μm即为找正(满足测量精度要求),并且记录当前的X轴坐标值即为中心值,将这点的坐标作为基准坐标(x0,z0);1. Align the center of the turntable surface (11) with the center of the measuring machine length gauge (9) through alignment, set the precision level of the needle of the inductance micrometer to 0.01 μm, and set the probe of the inductance micrometer to high-precision contact The end of the length meter (9) is aligned, and the error is controlled at 0.1 μm, which is the alignment (meeting the measurement accuracy requirements), and the current X-axis coordinate value is recorded as the center value, and the coordinate of this point is used as the reference coordinate (x 0 , z 0 );

2、将工件放到测量机转台面(11)上,通过电感测微仪将工件放置在工转台面(11)中心位置,将长度计(9)伸出找到工件的最高测量顶点,然后将长度计(9)移动到工件边缘位置,进行起点位置的确定;2. Put the workpiece on the turntable (11) of the measuring machine, place the workpiece at the center of the turntable (11) through the inductance micrometer, extend the length gauge (9) to find the highest measurement vertex of the workpiece, and then insert the The length gauge (9) moves to the workpiece edge position to determine the starting point position;

3、通过X轴坐标值确定测量行程L值;3. Determine the measurement stroke L value through the X-axis coordinate value;

4、进行二维面形测量,确定L值后设置测量步距,根据步距确定步数,同时进行测量点扫描和数据采样;4. Carry out two-dimensional surface shape measurement, set the measurement step distance after determining the L value, determine the number of steps according to the step distance, and perform measurement point scanning and data sampling at the same time;

5、进行三维面形测量,确定测量角度和径向测量步距,根据角度和步距确定采样点数,转台定位转动并进行数据采样;5. Carry out three-dimensional surface shape measurement, determine the measurement angle and radial measurement step distance, determine the number of sampling points according to the angle and step distance, position and rotate the turntable and perform data sampling;

6、建立工件坐标系和测量坐标系,并将测量坐标系转换成工件坐标系数值进行数据拟合处理。6. Establish the workpiece coordinate system and the measurement coordinate system, and convert the measurement coordinate system into workpiece coordinate coefficient values for data fitting processing.

7、将测量结果进行预处理,得到适合工件坐标的评定数据,通过线性最小二乘法得到工件参数的估计值,在通过估计值,用非线性最小二乘法得到工件的拟合参数,进行轮廓度的评定。7. Preprocess the measurement results to obtain the evaluation data suitable for the workpiece coordinates, and obtain the estimated value of the workpiece parameters through the linear least square method. After passing the estimated value, use the nonlinear least square method to obtain the fitting parameters of the workpiece, and perform contour assessment.

Claims (9)

1.一种大口径光学非球面元件柱坐标接触式测量方法,其特征在于,利用测量机通过柱坐标测量方式,采集二维或三维数据;包括以下步骤:1. A large-caliber optical aspheric element cylindrical coordinate contact measurement method is characterized in that, utilizing a measuring machine to collect two-dimensional or three-dimensional data by means of cylindrical coordinate measurement; comprises the following steps: 步骤S1:利用电感测微仪,找正转台面(11)中心和长度计(9)中心,使上下中心同心,同心精度保证在0.1μm;Step S1: Use an inductance micrometer to align the center of the rotating table (11) and the center of the length gauge (9), so that the upper and lower centers are concentric, and the concentricity accuracy is guaranteed to be 0.1 μm; 步骤S2:通过电感测微仪将工件找正,将长度计(9)伸出,记录长度计(9)伸出量,同时记录X轴坐标值,将这点的坐标作为基准坐标(x0,z0);Step S2: Align the workpiece with an inductance micrometer, extend the length gauge (9), record the stretched amount of the length gauge (9), and record the X-axis coordinate value at the same time, and use the coordinate of this point as the reference coordinate (x 0 , z 0 ); 步骤S3:确定基准坐标后,移动X轴将长度计(9)移动到工件边缘确定起始点,将移动量和基准坐标比较确定测量行程L;Step S3: After determining the reference coordinates, move the X-axis to move the length meter (9) to the edge of the workpiece to determine the starting point, and compare the movement amount with the reference coordinates to determine the measurement stroke L; 步骤S4:根据测量机建立工件坐标系和测量坐标系,确定二维测量或三维测量,并进行数据采集,得到所需要的坐标点。Step S4: Establish a workpiece coordinate system and a measurement coordinate system according to the measuring machine, determine two-dimensional measurement or three-dimensional measurement, and perform data collection to obtain required coordinate points. 2.根据权利要求1所述的一种大口径光学非球面元件柱坐标接触式测量方法,其特征在于,步骤S1中先找正转台面(11)和长度计(9)中心,再通过电感测微仪将工件调整到中心。2. A kind of cylindrical coordinate contact measuring method for large-diameter optical aspheric elements according to claim 1, characterized in that, in step S1, first find the center of the positive turn table (11) and the length gauge (9), and then pass the inductance The micrometer adjusts the workpiece to the center. 3.根据权利要求1所述的一种大口径光学非球面元件柱坐标接触式测量方法,其特征在于,步骤S1具体包括以下步骤:将电感测微仪测头(100)固定到表座(200)上面,并将表座(200)固定到转台面(11)任意可以实现测量的位置,将电感测微仪测头(100)打到长度计(9)端部位置,通过转台面(11)调整旋转工作的调心机构;将电感测微仪调到0.01μm档,将误差调整到0.1微米以内,即为找正。3. A kind of large-caliber optical aspheric element cylindrical coordinate contact measurement method according to claim 1, characterized in that, step S1 specifically comprises the following steps: fixing the inductance micrometer probe (100) to the table base ( 200), and fix the meter base (200) to any position on the turntable (11) where measurement can be realized, place the probe of the inductance micrometer (100) on the end of the length gauge (9), and pass the turntable ( 11) Adjust the centering mechanism of the rotating work; adjust the inductance micrometer to the 0.01 μm range, and adjust the error to within 0.1 μm, which is alignment. 4.根据权利要求1所述的一种大口径光学非球面元件柱坐标接触式测量方法,其特征在于,二维测量过程中,X轴部件带动长度计(9)沿X轴方向运动,实现测量步距的运动,每走一个步距长度计(9)伸出采集一次数据,得到N个坐标点(xi,zi),i=1…N;在三维测量过程中,每圈的测量步数为n1,测量的步距为n2,从第一点开始,转台面(11)转动一个角度θ=360/n1,长度计(9)伸出采样一次,测完一圈,找到起始位置,转台面(11)沿X轴方向运动一个测量步距,直到完成测量过程,得到n1×n2个坐标点(xij,zij,θij),i=1…n1,j=1…n2。4. A kind of cylindrical coordinate contact measurement method of large-diameter optical aspheric elements according to claim 1, characterized in that, in the two-dimensional measurement process, the X-axis component drives the length meter (9) to move along the X-axis direction to realize To measure the motion of the step distance, the length meter (9) stretches out to collect data every time a step distance is taken to obtain N coordinate points (xi , z i ), i=1...N; in the three-dimensional measurement process, the The number of measuring steps is n1, and the measuring step distance is n2. From the first point, the turntable surface (11) rotates an angle θ=360/n1, and the length meter (9) stretches out to sample once. start position, the turntable surface (11) moves one measurement step along the X-axis direction until the measurement process is completed, and n1×n2 coordinate points (x ij , z ij , θ ij ), i=1...n1, j=1 are obtained ...n2. 5.根据权利要求1至4中任一项所述的一种大口径光学非球面元件柱坐标接触式测量方法,其特征在于,测量机包括天然花岗岩床身(1)、X轴部件、Z轴部件和调心调平装置;5. A kind of large-diameter optical aspheric element cylindrical coordinate contact measuring method according to any one of claims 1 to 4, characterized in that the measuring machine comprises a natural granite bed (1), an X-axis component, a Z Shaft components and self-aligning and leveling devices; X轴部件包括辅气体静压导轨(2)、焊接椭圆弧龙门架(4)、主气体静压导轨(14)和第一直线电机(19);辅气体静压导轨(2)和主气体静压导轨(14)卡设于天然花岗岩床身(1)两侧;焊接椭圆弧龙门架(4)的两个末端,一端固定在辅气体静压导轨(2)上,另一端固定在主气体静压导轨(14);X-axis components include auxiliary gas static pressure guide rail (2), welded elliptical arc gantry (4), main gas static pressure guide rail (14) and first linear motor (19); auxiliary gas static pressure guide rail (2) and main The gas static pressure guide rail (14) is clamped on both sides of the natural granite bed (1); the two ends of the elliptical arc gantry (4) are welded, one end is fixed on the auxiliary gas static pressure guide rail (2), and the other end is fixed on the Main gas static pressure guide rail (14); Z轴部件包括八棱面花岗岩导柱(7)、V型气浮轴承块(8)、长度计(9)和第二直线电机(20);两个V型气浮轴承块(8)通过螺栓连接在焊接椭圆弧龙门架(4)上,用于调节Z轴的垂直度;八棱面花岗岩导柱7与对称连接的双V型气浮轴承块(8)组成气体静压导轨副,实现Z轴的上下运动;第二直线电机(20)的次级线圈与焊接椭圆弧龙门架(4)固定连接,初级线圈与花岗岩导柱(7)连接;长度计(9)固定在花岗岩导柱(7)的内腔;The Z-axis components include octagonal granite guide columns (7), V-shaped air bearing blocks (8), length gauges (9) and second linear motors (20); two V-shaped air bearing blocks (8) pass through The bolts are connected to the welded elliptical arc gantry (4) to adjust the verticality of the Z axis; the octagonal granite guide column 7 and the symmetrically connected double V-shaped air bearing blocks (8) form a gas static pressure guide rail pair, Realize the up and down movement of the Z axis; the secondary coil of the second linear motor (20) is fixedly connected to the welded elliptical arc gantry (4), and the primary coil is connected to the granite guide post (7); the length gauge (9) is fixed on the granite guide post the inner cavity of the column (7); 调心调平装置包括转台面(11)、万向调平板(12)、转台下静压盘(13)和驱动转台下静压盘(13)转动的驱动单元;转台下静压盘(13)与天然花岗岩床身(1)之间通过气体静压轴承支承。The self-aligning and leveling device includes a turntable surface (11), a universal leveling plate (12), a static pressure plate under the turntable (13) and a drive unit that drives the rotation of the static pressure plate (13) under the turntable; The disc (13) and the natural granite bed (1) are supported by an aerostatic bearing. 6.根据权利要求5所述的一种大口径光学非球面元件柱坐标接触式测量方法,其特征在于,辅气体静压导轨(2)和主气体静压导轨(14)上设有充气接口,X轴部件运动时,通过充气接口给辅气体静压导轨(2)和主气体静压导轨(14)充气,使辅气体静压导轨(2)、主气体静压导轨(14)和天然花岗岩床身(1)的顶面和侧面之间均形成气膜。6. A cylindrical coordinate contact measurement method for large-caliber optical aspheric elements according to claim 5, characterized in that, the auxiliary gas static pressure guide rail (2) and the main gas static pressure guide rail (14) are provided with an inflatable interface , when the X-axis components move, inflate the auxiliary gas static guide rail (2) and the main gas static pressure guide rail (14) through the inflation interface, so that the auxiliary gas static pressure guide rail (2), the main gas static pressure guide rail (14) and the natural An air film is formed between the top surface and the side surface of the granite bed (1). 7.根据权利要求5所述的一种大口径光学非球面元件柱坐标接触式测量方法,其特征在于,调心调平装置还包括若干调平装置和调心装置;7. A cylindrical coordinate contact measurement method for large-diameter optical aspheric elements according to claim 5, wherein the centering and leveling device also includes several leveling devices and centering devices; 转台下静压盘(13)顶部设有凹球面(110)和若干对称排布的凹槽;The top of the static pressure plate (13) under the turntable is provided with a concave spherical surface (110) and several symmetrically arranged grooves; 万向调平板(12)的下部设有凸球面(101)和锥形斜面(102);万向调平板(12)安装于转台下静压盘(13)顶部,万向调平板(12)的凸球面(101)与转台下静压盘(13)的凹球面(110)相配合;The lower part of the universal leveling plate (12) is provided with a convex spherical surface (101) and a conical slope (102); the universal leveling plate (12) is installed on the top of the static pressure plate (13) under the turntable, and the universal leveling plate (12 ) of the convex spherical surface (101) is matched with the concave spherical surface (110) of the static pressure plate (13) under the turntable; 调平装置包括调平定位盘(22)、调平螺杆(25)、调平滑轮(26)、调平滑轮轴(27)和调平支座(28);调平支座(28)安装在转台下静压盘(13)上对应的凹槽中,可沿着转台下静压盘(13)的凹槽移动;调平滑轮轴(27)将调平滑轮(26)连接到调平支座(28)上;调平螺杆(25)与调平支座(28)螺纹配合;The leveling device comprises a leveling positioning plate (22), a leveling screw rod (25), a leveling pulley (26), a leveling pulley shaft (27) and a leveling support (28); the leveling support (28) is installed on In the corresponding groove on the static pressure plate (13) under the turntable, it can move along the groove of the static pressure plate (13) under the turntable; the leveling pulley shaft (27) connects the leveling pulley (26) to the leveling On the support (28); the leveling screw rod (25) is threadedly matched with the leveling support (28); 调心装置包括若干调心顶丝(23)和转台面(11);转台面(11)的下安装面直接安装在万向调平板(12)上;转台面(11)的侧面对称设置有若干螺纹通孔,若干调心顶丝(23)设置于对应的螺纹通孔中并与转台面(11)螺纹连接。The centering device comprises some self-aligning jackscrews (23) and the turntable (11); the lower mounting surface of the turntable (11) is directly installed on the universal leveling plate (12); the side of the turntable (11) is symmetrically provided with A plurality of threaded through holes, a plurality of self-aligning jackscrews (23) are arranged in the corresponding threaded through holes and are threadedly connected with the turntable surface (11). 8.根据权利要求5所述的一种大口径光学非球面元件柱坐标接触式测量方法,其特征在于,天然花岗岩床身(1)中心设有一个安装孔,半球座(34)固定于该安装孔中;半球形石墨瓦(35)固定在半球座(34)上;转台芯轴(15)安装于半球轴(37)中心并连同半球轴(37)固定在转台下静压盘(13)上;半球轴(37)的凸球面与半球形石墨瓦(35)的凹球面相配合;8. A kind of large-caliber optical aspheric element cylindrical coordinate contact type measuring method according to claim 5, it is characterized in that, the center of natural granite bed (1) is provided with an installation hole, and hemispherical seat (34) is fixed on this In the installation hole; the hemispherical graphite tile (35) is fixed on the hemispherical seat (34); the turntable mandrel (15) is installed in the center of the hemispherical shaft (37) and is fixed on the lower static pressure plate ( 13) on; the convex spherical surface of the hemispherical axis (37) matches the concave spherical surface of the hemispherical graphite tile (35); 转台下静压盘(13)的底面开设有环形槽,该环形槽内均匀固定有若干块平面支承石墨块(32);平面支承石墨块(32)与天然花岗岩床身(1)形成气体静压轴承副。The bottom surface of the static pressure plate (13) under the turntable is provided with an annular groove, and several flat supporting graphite blocks (32) are evenly fixed in the annular groove; the flat supporting graphite blocks (32) and the natural granite bed (1) form gas Hydrostatic bearing pair. 9.根据权利要求5所述的一种大口径光学非球面元件柱坐标接触式测量方法,其特征在于,焊接椭圆弧龙门架(4)包括前板(42)和后板(46);前板(42)和后板(46)之间通过若干块对称排布的加强筋板焊接固定在一起;前板(42)和后板(46)的下侧边沿包括半椭圆弧段。9. a kind of large-diameter optical aspheric element cylindrical coordinate contact type measuring method according to claim 5, is characterized in that, welding ellipse arc gantry (4) comprises front plate (42) and rear plate (46); The plate (42) and the back plate (46) are welded and fixed together by several symmetrically arranged stiffener plates; the lower edges of the front plate (42) and the back plate (46) include semi-elliptical arc segments.
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CN113358059A (en) * 2021-06-08 2021-09-07 西安交通大学 Off-axis aspheric surface type error measurement method based on line laser scanning

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CN103363918B (en) * 2013-07-04 2016-01-20 浙江海洋学院 Seabed tunnel deformation monitoring device
CN103822605A (en) * 2014-03-18 2014-05-28 厦门大学 One-time splicing measurement device of large-aperture optical element profile
CN106482682A (en) * 2016-10-17 2017-03-08 成都精密光学工程研究中心 Atmosphere plasma processes the tool setting device of aperture aspherical optical elements
CN106482682B (en) * 2016-10-17 2019-11-05 成都精密光学工程研究中心 The tool setting device of atmosphere plasma processing aperture aspherical optical elements
CN108120390A (en) * 2016-11-30 2018-06-05 财团法人工业技术研究院 Measuring apparatus and measuring method
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CN111716308A (en) * 2019-03-22 2020-09-29 株式会社三丰 Rotary table and roundness measuring machine
CN111716308B (en) * 2019-03-22 2024-05-10 株式会社三丰 Rotary table and roundness measuring machine
CN112372602A (en) * 2020-11-13 2021-02-19 长安大学 Quick and accurate leveling method for three-point support precision measurement rotary table
CN112372602B (en) * 2020-11-13 2021-11-30 长安大学 Quick and accurate leveling method for three-point support precision measurement rotary table
CN113358059A (en) * 2021-06-08 2021-09-07 西安交通大学 Off-axis aspheric surface type error measurement method based on line laser scanning

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