CN207365922U - A kind of fine tuning fixture for sphere laser interferometer measurement sphere deviation from spherical form - Google Patents
A kind of fine tuning fixture for sphere laser interferometer measurement sphere deviation from spherical form Download PDFInfo
- Publication number
- CN207365922U CN207365922U CN201721269514.2U CN201721269514U CN207365922U CN 207365922 U CN207365922 U CN 207365922U CN 201721269514 U CN201721269514 U CN 201721269514U CN 207365922 U CN207365922 U CN 207365922U
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- China
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- sphere
- gear
- outer barrel
- retainer
- inner cylinder
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Abstract
The utility model discloses a kind of fine tuning fixture for sphere laser interferometer measurement sphere deviation from spherical form, including driven roller, driving motor, inner cylinder, pedestal, retainer, gear, turbine, worm screw, servomotor and outer barrel；Servomotor driving worm gear mechanism band moving gear rotates, gear drives the rotation of outer barrel gear ring, since the first guide post of outer barrel and base helical groove coordinate, outer barrel will be along base helical groove spiral, the second guide post of inner cylinder rises with the rotation of helicla flute on the inside of outer barrel, it will rise along retainer straight trough direction, drive the movement of inner cylinder vertical direction, and then realize the vertical shift up and down of tested sphere, the adjusting that three driven rollers pass through rotating speed, it can realize that tested sphere rotates at any angle, so as to fulfill the laser interferometry in sphere different surfaces region.The fixture is controlled using motor, transmission efficiency, and Sphere orientation is stablized, and is adapted to sphere multi-angle laser interference measuring surface form.
Description
Technical field
A kind of fine tuning fixture for sphere laser interferometer measurement sphere deviation from spherical form is the utility model is related to, is specifically related to
And a kind of sphere micro-shifting can be made to move the fixture with rotation.
Background technology
Measured for the deviation from spherical form of sphere, ISO-3290 regulations, mainly in two or three orthogonal equatorial planes
Upper measurement, deviation from spherical form is calculated by using minimum circumscribed circle method.This method be substantially by measure deviation from circular from come
Seek deviation from spherical form.And sphere is a three-dimensional body, it is to calculate deviation from spherical form by the deviation from circular from for measuring one or two of face
It is insecure.
At present, detection method mainly has contact type measurement, sphere vibration detection technology etc..German Mahr companies and Britain
The roughmeter and roundness measuring equipment of Taylor Hobson companies can detect the roughness and circularity of bearing roller respectively, it is former
Reason is to be moved with the contact pilotage of a very little on measured surface, obtains surface roughness, percent ripple, form error and some other
The integrated informations such as shape characteristic, this method can only be detected in contact pilotage footprint every time, can not reflect bearing roller
Total quality, measurement result are easily influenced by probe tip diameter and shape；Sphere vibration detection technology is more commonly used at present
Steel ball quality detection technique, its principle is to drive tested steel ball to rotate using high-precision rotary main shaft, through piezoelectric accelerometer
Its vibration signal is picked up, characterizes the waviness of steel ball surface, concentrated expression simple grain spherome surface quality, it is coarse to include spherome surface
Degree, spherical precision and size phase mutual deviation etc., this method shows accurate main shaft and easily breaks down in the long-term use, inspection
Survey the situation of unstable result.
Laser interferance method has the advantages that high-resolution, high accuracy, high sensitivity and reproducible.Has phase both at home and abroad
Close product to be detected sphere, but in detection process, the sphere centre of sphere is manually focused with beam focus, together
When, sphere manually rotates, and error is larger, less efficient.
The content of the invention
The purpose of this utility model is to provide a kind of simple, efficient, pinpoint to be used to measure for deviation from spherical form measurement
The fine tuning fixture of deviation from spherical form, realizes sphere vertical direction fine motion focusing and the rotation of sphere, meets swashing for sphere different zones
The interference of light quickly measures.
A kind of fine tuning fixture for sphere laser interferometer measurement sphere deviation from spherical form include driven roller, driving motor,
Inner cylinder, pedestal, retainer, gear, turbine, worm screw, servomotor and outer barrel；
The clamp base side is fixed with servomotor, turbine and worm mechanism and gear, servomotor driving turbine
Worm mechanism band moving gear rotates, and pedestal fixed gear side is provided with the straight trough along pedestal cylinder generatrix direction, gear parts tooth
Through straight trough, base inner surface has 3 helicla flutes；Rack gear on the downside of the outer barrel outer surface, the gear ring and pedestal tooth of outer barrel
Wheel engagement, outer surface are along the circumferential direction evenly distributed with 3 the first guide posts, and the first guide post and base helical groove coordinate, and realize the first guide post
In helicla flute slide inside, outer tube inner surface has guide groove；The retainer is sleeved on the inside of outer barrel, and is fixed with pedestal, is kept
Frame is evenly distributed with 4 straight troughs；The inner cylinder is sleeved on the inside of retainer, and being along the circumferential direction evenly distributed with 4 second on the downside of inner cylinder outer surface leads
Column, the guide groove that 4 the second guide posts are each passed through 4 straight troughs and outer tube inner surface on retainer coordinate, and realize that the second guide post is being led
Groove slide inside, when guide groove helical rotation, the second guide post also will be mobile, since retainer straight trough is to the spacing work of the second guide post
With, the second guide post can only vertical direction movement, and then limit inner cylinder vertical direction；The inner cylinder upper surface is with circumference uniform distribution side
Formula is fixed with 3 driven rollers, and respectively by driving motor to drive, tested sphere is placed on the upside of 3 driven rollers driven roller.
First guide post and the second guide post is round end, conehead, any one in tack.
The guide groove busbar is helix, and guide groove section is circular arc type, back taper, any one in plane.
The driven roller is single shaft, and twin shaft or three axis rotate.The driven roller equilateral triangle arrangement
The course of work of the utility model is as follows：Servomotor driving worm gear mechanism band moving gear rotates, gear band
Dynamic outer barrel gear ring rotation, since the first guide post of outer barrel and base helical groove coordinate, outer barrel will along base helical groove spiral,
The second guide post of inner cylinder rises with the rotation of helicla flute on the inside of outer barrel, will rise along retainer straight trough direction, drives inner cylinder to erect
Nogata realizes the vertical shift up and down of tested sphere, the adjusting that three driven rollers pass through rotating speed to movement, it is possible to achieve
Tested sphere rotates at any angle, so as to fulfill the laser interferometry in sphere different surfaces region.
The fine tuning fixture for sphere laser interferometer measurement sphere deviation from spherical form of the utility model design, passes through motor
Driving, realizes that vertical direction fine motion is focused, and the Arbitrary Rotation of sphere, the quick ball for detecting spherome surface diverse location
Surface error.
Brief description of the drawings
Fig. 1 sphere laser interference detection method schematic diagrams；
Fig. 2 fine tuning fixtures are placed on the structure diagram in laser interferometer；
Fig. 3 is used for the explosive view of the fine tuning fixture of sphere laser interferometer measurement sphere deviation from spherical form；
Fig. 4 is used for the fine tuning fixture structure diagram of sphere laser interferometer measurement sphere deviation from spherical form；
Description of reference numerals：1st, driven roller, 2, micro-driving motor, 3, inner cylinder, 4, pedestal, 5, retainer, 6, gear, 7,
Turbine, 8, worm screw, 9, servomotor, 10, outer barrel, 11, Laser, 12, space filtering, 13, spectroscope, 14, CCD, 15, collimation
Object lens, 16, sphere compensating glass, 17, tested sphere, 18, chucking appliance system, 19, laser interferometer host, 20, rack and rinion adjustment, 21,
Sphere fine tuning fixture.
Embodiment
To make the objectives, technical solutions and advantages of the present invention clearer, with reference to embodiment
And referring to the drawings, the utility model is further described.It should be understood that these descriptions are merely illustrative, and do not really want
Limit the scope of the utility model.
Sphere laser interference detection method schematic diagram, as shown in Figure 1, setting sphere between laser interferometer and tested sphere
Lens TS, the test beams changing into spherical surface wave that spherical lens sends interferometer, beam focus are directed at by the tested sphere centre of sphere,
Normal incidence, along backtracking, interferes into interferometer and reference beam to after on tested spherical mirror, passes through laser interference
Principle detection faces type error, by the rotation of sphere, realizes the face type detection of spherome surface different zones.
Fine tuning fixture is placed on the overall structure diagram in sphere laser interferometer, as shown in Fig. 2, light beam is mended by sphere
Repay mirror to go out, the coarse adjustment of ball position realizes that rack and rinion adjustment leads in three directions by parallel three NC axes device (rack and rinion adjustment)
Draw bar is crossed with mobile sliding block to be connected.Three removable movable sliders are separately mounted on the track of three three-dimensional brackets, mobile to slide
Block is driven by belt and moved, and one end of draw bar carries out spherical linkage with mobile sliding block and is connected, and the other end is connected with chucking appliance system,
Its role is to up and down motion of the sliding block on three-dimensional bracket is converted into shifting of the chucking appliance system in X-Y-Z space coordinates
It is dynamic, make centre of sphere optical system for alignment focus, complete coarse adjustment.For the sphere of different-diameter, after fixture XY directions adjust, spherical ball
In same vertical straight line, clamp body only needs vertical shift up and down for the heart and beam focus, for the little sphere of diameter difference,
Need to only be moved up and down by fine motion fixture can be directed at focus.
A kind of fine tuning fixture structural representation for sphere laser interferometer measurement sphere deviation from spherical form of the utility model
Figure, as shown in Figures 3 and 4, including driven roller 1, driving motor 2, inner cylinder 3, pedestal 4, retainer 5, gear 6, turbine 7, worm screw 8,
Servomotor 9 and outer barrel 10；
The clamp base side is fixed with servomotor, turbine and worm mechanism and gear, servomotor driving turbine
Worm mechanism band moving gear rotates, and pedestal fixed gear side is provided with the straight trough along pedestal cylinder generatrix direction, gear parts tooth
Through straight trough, base inner surface has 3 helicla flutes；Rack gear on the downside of the outer barrel outer surface, the gear ring and pedestal tooth of outer barrel
Wheel engagement, outer surface are along the circumferential direction evenly distributed with 3 the first guide posts, and the first guide post and base helical groove coordinate, and realize the first guide post
In helicla flute slide inside, outer tube inner surface has guide groove；The retainer is sleeved on the inside of outer barrel, and is fixed with pedestal, is kept
Frame is evenly distributed with 4 straight troughs；The inner cylinder is sleeved on the inside of retainer, and being along the circumferential direction evenly distributed with 4 second on the downside of inner cylinder outer surface leads
Column, the guide groove that 4 the second guide posts are each passed through 4 straight troughs and outer tube inner surface on retainer coordinate, and realize that the second guide post is being led
Groove slide inside, when guide groove helical rotation, the second guide post also will be mobile, since retainer straight trough is to the spacing work of the second guide post
With, the second guide post can only vertical direction movement, and then limit inner cylinder vertical direction；The inner cylinder upper surface is with circumference uniform distribution side
Formula is fixed with 3 driven rollers, and respectively by driving motor to drive, tested sphere is placed on the upside of 3 driven rollers driven roller.
Operational process is as follows：Servomotor driving worm gear mechanism band moving gear rotates, and gear drives the rotation of outer barrel gear ring
Turn, since outer barrel guide post 1 and base helical groove coordinate, outer barrel will be along base helical groove spiral, and inner cylinder guide post 2 is with outer
The rotation of cylinder inner side helicla flute rises, and will rise along retainer straight trough direction, drives the movement of inner cylinder vertical direction, and then realize
The vertical shift up and down of tested sphere, the adjusting that three driven rollers pass through rotating speed, it is possible to achieve tested sphere is at any angle
Rotation, so as to fulfill the laser interferometry in sphere different surfaces region.
Claims (4)
1. a kind of fine tuning fixture for sphere laser interferometer measurement sphere deviation from spherical form, it is characterised in that including driven roller
（1）, driving motor（2）, inner cylinder（3）, pedestal（4）, retainer（5）, gear（6）, turbine（7）, worm screw（8）, servomotor（9）
And outer barrel（10）；
The clamp base side is fixed with servomotor, turbine and worm mechanism and gear, servomotor driving turbine and worm
Mechanism band moving gear rotates, and pedestal fixed gear side is provided with the straight trough along pedestal cylinder generatrix direction, and gear parts tooth passes through
Straight trough, base inner surface have 3 helicla flutes；Rack gear on the downside of the outer barrel outer surface, the gear ring and pedestal gear of outer barrel are nibbled
Close, outer surface is along the circumferential direction evenly distributed with 3 the first guide posts, and the first guide post and base helical groove coordinate, and realize the first guide post in spiral shell
Spin slot slide inside, outer tube inner surface have guide groove；The retainer is sleeved on the inside of outer barrel, and is fixed with pedestal, and retainer is equal
4 straight troughs of cloth；The inner cylinder is sleeved on the inside of retainer, is along the circumferential direction evenly distributed with 4 the second guide posts on the downside of inner cylinder outer surface, and 4
The guide groove that a second guide post is each passed through 4 straight troughs and outer tube inner surface on retainer coordinates, and the inner cylinder upper surface is with circle
All mode for cloth are fixed with 3 driven rollers, and for driven roller respectively by driving motor to drive, tested sphere is placed on 3 driven rollers
Upside.
2. a kind of fine tuning fixture for sphere laser interferometer measurement sphere deviation from spherical form according to claim 1, its
It is characterized in that first guide post and the second guide post is round end, conehead, any one in tack.
3. a kind of fine tuning fixture for sphere laser interferometer measurement sphere deviation from spherical form according to claim 1, its
It is characterized in that the guide groove busbar is helix, guide groove section is circular arc type, back taper, any one in plane.
4. a kind of fine tuning fixture for sphere laser interferometer measurement sphere deviation from spherical form according to claim 1, its
It is single shaft to be characterized in that the driven roller, and twin shaft or three axis rotate.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721269514.2U CN207365922U (en) | 2017-09-29 | 2017-09-29 | A kind of fine tuning fixture for sphere laser interferometer measurement sphere deviation from spherical form |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201721269514.2U CN207365922U (en) | 2017-09-29 | 2017-09-29 | A kind of fine tuning fixture for sphere laser interferometer measurement sphere deviation from spherical form |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN207365922U true CN207365922U (en) | 2018-05-15 |
Family
ID=62346404
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201721269514.2U Expired - Fee Related CN207365922U (en) | 2017-09-29 | 2017-09-29 | A kind of fine tuning fixture for sphere laser interferometer measurement sphere deviation from spherical form |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN207365922U (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109141298A (en) * | 2018-09-05 | 2019-01-04 | 广州达欧技术检测有限公司 | A kind of ball-type piece surface curve detection system |
| CN110091621A (en) * | 2019-06-04 | 2019-08-06 | 广东工业大学 | A kind of spheriodal typewriter and its fixture |
| CN110501214A (en) * | 2019-07-03 | 2019-11-26 | 同济大学 | A kind of spheric granules Multi-contact experimental rig and its loading method |
-
2017
- 2017-09-29 CN CN201721269514.2U patent/CN207365922U/en not_active Expired - Fee Related
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109141298A (en) * | 2018-09-05 | 2019-01-04 | 广州达欧技术检测有限公司 | A kind of ball-type piece surface curve detection system |
| CN110091621A (en) * | 2019-06-04 | 2019-08-06 | 广东工业大学 | A kind of spheriodal typewriter and its fixture |
| CN110501214A (en) * | 2019-07-03 | 2019-11-26 | 同济大学 | A kind of spheric granules Multi-contact experimental rig and its loading method |
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|---|---|---|---|
| GR01 | Patent grant | ||
| GR01 | Patent grant | ||
| CF01 | Termination of patent right due to non-payment of annual fee |
Granted publication date: 20180515 Termination date: 20190929 |
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| CF01 | Termination of patent right due to non-payment of annual fee |