CN115854908A - Non-contact ultra-precise contour scanning detection device - Google Patents

Non-contact ultra-precise contour scanning detection device Download PDF

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CN115854908A
CN115854908A CN202211441504.8A CN202211441504A CN115854908A CN 115854908 A CN115854908 A CN 115854908A CN 202211441504 A CN202211441504 A CN 202211441504A CN 115854908 A CN115854908 A CN 115854908A
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measuring head
rotary table
linear motion
displacement
axis
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王刚
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Chengdu Temisi Technology Co ltd
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Chengdu Temisi Technology Co ltd
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Abstract

The invention discloses a non-contact ultra-precise contour scanning detection device, and belongs to the technical field of precise measurement. The device comprises a vibration isolation platform, a marble base, a precise air floatation rotary table, a workpiece adjusting table, a rotary shaft datum, an X-axis linear motion platform, a Z-axis linear motion platform, a measuring head rotary table, a compensation standard ball, a non-contact optical displacement measuring head, an X-axis displacement reference datum, a Z-axis displacement reference datum, a Fabry-Perot interference displacement sensor, a main controller and an isolation cover. The device has the advantages that the dynamic following alignment of the measuring head along the normal direction of a measured profile is realized by using two linear shafts and a rotating shaft, the non-contact detection of the surface profile of a part is carried out by using a non-contact optical displacement sensing measuring head, the high-precision measurement of large-range displacement and micro-displacement is carried out by using a multi-channel Fabry-Perot interference displacement sensor, the rapid rotary scanning of the profile is realized by combining a precise air floatation rotary table, the structure is simple, and the rapid and efficient detection of the surface shape of the precise part including the profile with a large slope is realized.

Description

Non-contact ultra-precise contour scanning detection device
Technical Field
The invention relates to the technical field of precision measurement, in particular to a non-contact ultra-precision profile scanning detection device.
Background
The application of precise optical and mechanical parts in the fields of national defense, security protection, astronomy, civil consumption and the like is continuously expanded. For precision parts, geometric profiles are often the core parameters, and therefore their manufacture places extremely high demands on ultra-precision profilometry. The high-precision measurement of the part outline is the key for improving the manufacturing process and improving the manufacturing precision. In the field of high-precision surface profile detection, an optical detection method is greatly limited in use due to low universality, high detection cost and low efficiency. The contour measurement method has the characteristics of strong universality and high automation degree, becomes the key point of research and development in recent years, and is gradually applied to some high-technology fields.
The current mainstream ultra-precise contourgraph realizes three methods, one representative technology is UA3P of Japan Panasonic company, the structure of the equipment is similar to that of a three-coordinate measuring machine and is an orthogonal structure, an atomic force composite measuring head is adopted to carry out contact type measurement on the surface of a measured part, and a dual-frequency laser interferometer is used to carry out displacement measurement of an X axis, a Y axis and a Z axis. The main disadvantages of this measurement are: the contact type measuring efficiency is low, the integral structure of the instrument is complex, and the high-precision profile measurement of a large-curvature part is difficult to realize. The second representative technology is a Nanomefos series contourgraph of the netherlands TNO company, the instrument is of a five-axis structure, a differential confocal non-contact displacement sensing probe is adopted for surface detection, and a dual-frequency laser interferometry technology is also used for measuring errors of the probe in the X direction, the Z direction, the motion direction and the rotating shaft of the probe. The third representative technology is Luphoscan series contourgraph of Taylor company in America, the instrument is of a four-axis structure, the principle of measurement is similar to that of Nanomefos, measurement is carried out along the normal direction of the outline of a measured piece, a multi-wavelength interference displacement sensor of a special patent is adopted as a displacement and outline detection unit, the instrument has the advantage of compact structure, but the instrument also has the defects of complex structure and difficulty in meeting high-precision measurement. Therefore, it is very important to design an ultra-precise profiler with simple structure, small volume and high-precision measurement.
Disclosure of Invention
The invention aims to overcome the defects of the prior art and provide a non-contact ultra-precise contour scanning detection device which is used for measuring the contour of an ultra-precise optical-mechanical part with high speed, high efficiency and high precision and can realize the precise measurement of the surface contour of the optical-mechanical part of the types such as plane, spherical surface, aspheric surface and the like.
The purpose of the invention is realized by the following technical scheme: a non-contact ultra-precise contour scanning detection device comprises a vibration isolation platform and an isolation cover arranged on the vibration isolation platform, wherein a marble base is arranged in the isolation cover and is placed on the vibration isolation platform, and the marble base comprises a base and a side seat fixed on one side of the base;
the base of the marble base is provided with a precise air-floating rotary table, a rotary shaft reference is fixed on the table top of the precise air-floating rotary table and is of a circular ring structure, the rotary shaft reference and the precise air-floating rotary table are coaxially arranged, the outer diameter of the rotary shaft reference is larger than the diameter of the table top of the precise air-floating rotary table, a workpiece adjusting table is arranged above the rotary shaft reference, the bottom of the workpiece adjusting table penetrates through an inner ring of the rotary shaft reference to be connected with the precise air-floating rotary table, and the workpiece adjusting table has a two-dimensional translation adjusting freedom degree and a two-dimensional pitching adjusting freedom degree in the horizontal direction;
an X-axis linear motion platform is arranged on a side seat of the marble base, the moving direction of the X-axis linear motion platform is perpendicular to the moving direction of the precise air floatation rotary table, a Z-axis linear motion platform is arranged on the X-axis linear motion platform, the moving direction of the Z-axis linear motion platform is perpendicular to the moving direction of the X-axis linear motion platform, the moving direction of the Z-axis linear motion platform is parallel to the rotary shaft of the precise air floatation rotary table, a measuring head rotary table is fixed on the Z-axis linear motion platform, the rotary shaft of the measuring head rotary table is perpendicular to the moving plane of the X-axis linear motion platform and the moving plane of the Z-axis linear motion platform, a non-contact optical displacement sensing measuring head is mounted on the measuring head rotary table, the reverse extension line of the measuring range direction of the non-contact optical displacement sensing measuring head passes through the center of the measuring head rotary table, and when the measuring head rotary table and the X-axis linear motion platform are both located at zero positions, the measuring range of the non-contact optical displacement sensing measuring head passes through the center of the precise air floatation rotary table;
a compensation standard ball is fixed on the Z-axis linear motion platform, the center of the compensation standard ball is positioned on the rotating shaft of the measuring head rotary table, and the compensation standard ball and the non-contact optical displacement sensing measuring head have equal height in measuring range;
an X-axis displacement reference datum is fixed on a base of the marble base and is positioned on one side of the precise air-floatation rotary table, a reference datum plane of the X-axis displacement reference datum passes through a plane formed by a rotary shaft of the precise air-floatation rotary table and the motion linear direction of the X-axis linear motion platform, and the normal direction of the datum plane of the X-axis displacement reference datum is perpendicular to the normal direction of the plane;
a Z-axis displacement reference datum is fixed at the top of the side seat, a reference datum surface of the Z-axis displacement reference datum is perpendicular to a rotating shaft of the precise air-floating rotary table, and the reference datum surface of the Z-axis displacement reference datum is arranged on a plane formed by the rotating shaft of the precise air-floating rotary table and the linear motion direction of the X-axis linear motion platform;
the measuring device comprises a Z-axis linear motion platform, a measuring head rotating shaft, a measuring head rotating platform rotating shaft, a Fabry-Perot interference displacement sensor and a control system, wherein the Fabry-Perot interference displacement sensor is provided with a measuring head A, a measuring head B, a measuring head C, a measuring head D, a measuring head E and a measuring head F;
the measuring head B is arranged on the Z-axis linear motion platform and is positioned above the measuring head rotary table, the measuring direction of the measuring head B is parallel to the running direction of the Z-axis linear motion platform and passes through a rotating shaft of the measuring head rotary table, the measuring head B is positioned in a plane formed by the rotating shaft of the precise air floatation rotary table and the motion linear direction of the X-axis linear motion platform, and the measuring head B and the Z-axis displacement reference standard form an interference cavity for carrying out high-precision measurement on the displacement of the non-contact optical displacement sensing measuring head in the vertical direction;
the C measuring head and the D measuring head are arranged below the rotating shaft reference, the C measuring head and the D measuring head are arranged along the X-axis direction in a centering mode, the measuring direction is vertical upwards, and the C measuring head and the D measuring head are used for measuring a reference circular ring surface at the bottom of the rotating shaft reference so as to monitor the axial runout and the shaking error of the precise air floatation rotating table in real time;
the measuring direction of the E measuring head is arranged along the X-axis direction and passes through the center of the rotary shaft of the precise air-floating rotary table, and the E measuring head is used for measuring the reference excircle of the rotary shaft so as to monitor the radial run-out error of the precise air-floating rotary table in real time;
the F measuring head is arranged on the measuring head rotary table, the F measuring head and the non-contact type optical displacement sensing measuring head are collinear and are arranged in a diameter-aligning mode, and the F measuring head is used for measuring the compensation standard ball so as to monitor and measure the run-out and shaking errors introduced when the measuring head rotary table rotates;
and an environment sensor is arranged at the top of the side seat and used for precisely measuring air environment parameters before measurement so as to compensate air refractive index errors of the Fabry-Perot interference displacement sensor.
In some embodiments, the plane precision of the bottom torus of the rotating shaft reference is processed to a submicron level, and the outer side surface of the rotating shaft reference is processed to a submicron level.
In some embodiments, the X-axis displacement reference datum is made of optical material polishing and the surface shape error is controlled to be on the order of 20 nm.
In some embodiments, the Z-axis displacement reference datum is made of optical material polishing and the surface shape error is controlled to be on the order of 20 nm.
In some embodiments, the non-contact optical displacement sensing probe is a spectral confocal displacement sensing probe or a white light interference displacement sensing probe.
In some embodiments, the fabry-perot interferometric displacement sensor adopts optical fibers for guiding light, and adopts a two-channel measuring head for precisely measuring the large-stroke displacement of the X-axis linear motion platform and the Z-axis linear motion platform.
The invention has the beneficial effects that:
1. the device has the advantages of simple structure, small volume, easy realization and low cost, and can realize high-speed, high-efficiency and high-precision measurement.
2. The device adopts the optical fiber Fabry-Perot interferometric displacement measurement technology to realize the large-range and micro-displacement high-precision measurement, can realize the multichannel synchronous measurement, has simple structure of a measurement light path, is easy to adjust, has the absolute distance measurement function, and simplifies the instrument calibration steps.
3. The device adopts the spectrum confocal displacement sensing probe or the white light interference displacement sensing probe to perform non-contact detection on the surface of the part to be detected, has small diameter of a measuring spot, large range and large detection slope range, is not influenced by scanning light failure and the material and the roughness of the part to be detected, and has the function of measuring the thickness of a thin plate and a thin film.
4. The invention adopts three measuring heads of the Fabry-Perot interference displacement sensor to realize comprehensive real-time monitoring and compensation of typical motion errors of the precise air-floating rotary table by combining error calibration data, has comprehensive compensation and simple structural principle, and improves the stability of the measuring precision of an instrument.
5. The device of the invention adopts the compensation standard ball to compensate the motion error of the measuring head rotary table, is easy to realize in structure and reduces the installation and adjustment freedom degree of a compensation element.
Drawings
FIG. 1 is a schematic diagram of the overall structure of a non-contact ultra-precise profile scanning and detecting device according to the present invention;
in the figure, 1-vibration isolation platform, 2-marble base, 3-precise air-floating rotary table, 4-rotating shaft reference, 5-workpiece adjusting table, 6-X axis linear motion platform, 7-Z axis linear motion platform, 8-measuring head rotary table, 9-non-contact optical displacement sensing measuring head, 10-compensation standard ball, 11-Z axis displacement reference base, 12-environment sensor, 13-X axis displacement reference base, 14-isolation cover, 15-measured part, 16-Fabry-Perot interference displacement sensor, 17-main controller, 18-A measuring head, 19-B measuring head, 20-C measuring head, 21-D measuring head, 22-E measuring head and 23-F measuring head.
Detailed Description
The technical solutions of the present invention are further described in detail below with reference to the accompanying drawings, but the scope of the present invention is not limited to the following.
As shown in fig. 1, a non-contact ultra-precise contour scanning detection device comprises a vibration isolation platform 1 and an isolation cover 14 arranged on the vibration isolation platform 1, wherein a marble base 2 is arranged in the isolation cover 14, the marble base 2 is placed on the vibration isolation platform 1, and the marble base 2 comprises a base and a side seat fixed on one side of the base; the vibration isolation platform 1 is placed on a vibration isolation foundation, the equipment adopts a rigid vibration isolation platform, mechanical vibration introduced by the external environment is attenuated and isolated, the marble base 2 adopts natural marble, and the flatness and the parallelism of the installation surfaces of the base and the side base of the marble base 2 are ground to 3-5 microns; the precise air-floating rotary table 3 is arranged on the base of the marble base 2, a rotating shaft of the precise air-floating rotary table 3 is used as a Z-axis reference of a measuring coordinate system, the axial jumping repeatability of the precise air-floating rotary table 3 is better than 30nm, the radial jumping error repeatability is better than 30nm, the shaking repeatability is better than 0.04 ', the precise air-floating rotary table 3 is fixed on the base table surface of the marble base 2, an angle encoder is arranged on the precise air-floating rotary table, the measurement resolution of the sub-angle second level can be realized, and the angle measurement error is in the order of 1'; a rotary shaft reference 4 is fixed on the table top of the precise air-floating rotary table 3, the rotary shaft reference 4 is of a circular ring structure, the rotary shaft reference 4 and the precise air-floating rotary table 3 are coaxially arranged, the outer diameter of the rotary shaft reference 4 is larger than the diameter of the table top of the precise air-floating rotary table 3, a workpiece adjusting table 5 is arranged above the rotary shaft reference 4, the bottom of the workpiece adjusting table 5 penetrates through the inner ring of the rotary shaft reference 4 to be connected with the precise air-floating rotary table 3, and the workpiece adjusting table 5 has two-dimensional translation adjusting freedom degree and two-dimensional pitching adjusting freedom degree in the horizontal direction; the rotary shaft reference 4 is made of INVAR alloy or low-expansion stable optical materials and is of an annular structure, an inner ring is fixed on the table top of the precise air-floatation rotary table 3 through threaded connection, the plane precision of a circular ring surface at the bottom of the rotary shaft reference 4 is processed to a submicron order, the precision of the outer side surface of the rotary shaft reference 4 is processed to the submicron order, the workpiece adjusting table 5 is fixed on the precise air-floatation rotary table 3 and has two-dimensional translation and two-dimensional pitching adjusting functions, and a bidirectional interlocking structure is adopted to ensure that enough rigidity is kept in the rotation process of the precise air-floatation rotary table 3;
secondly, an X-axis linear motion platform 6 is arranged on a side seat of the marble base 2, the moving direction of the X-axis linear motion platform 6 is perpendicular to the moving direction of the precise air floatation rotary table 3, a Z-axis linear motion platform 7 is arranged on the X-axis linear motion platform 6, the moving direction of the Z-axis linear motion platform 7 is perpendicular to the moving direction of the X-axis linear motion platform 6, the moving direction of the Z-axis linear motion platform 7 is parallel to a rotary shaft of the precise air floatation rotary table 3, a measuring head rotary table 8 is fixed on the Z-axis linear motion platform 7, the rotary shaft of the measuring head rotary table 8 is perpendicular to the moving plane of the X-axis linear motion platform 6 and the moving plane of the Z-axis linear motion platform 7, a non-contact optical displacement sensing measuring head 9 is arranged on the measuring head rotary table 8, the reverse extension line of the measuring range direction of the non-contact optical displacement sensing measuring head 9 passes through the center of the measuring head rotary table 8, and when the measuring head rotary table 8 and the X-axis linear motion platform 6 are both located at zero position, the measuring range of the non-contact optical displacement sensing measuring head 9 passes through the center of the precise air floatation rotary table 3; the X-axis linear motion platform 6 is defined as the X-axis of a measurement coordinate system along the motion direction, the X-axis linear motion platform 6 adopts a direct-drive mode, the effective stroke completely covers the radius of a measured part 15 and has a certain over-center (the rotary axis of the precision air-floating rotary table 3) redundancy amount so as to be beneficial to the rapid calibration of the parallelism error of the rotary axis of the precision air-floating rotary table 3 and a Z-axis displacement reference datum 11, the X-axis linear motion platform 6 is provided with a linear grating and has good dynamic performance and positioning precision, the typical shaking amount of the motion of the X-axis linear motion platform is 5' magnitude, the positioning precision and the straightness are 1 mu m magnitude, the repeated positioning precision is 0.1 mu m magnitude, and when the X-axis linear motion platform 6 drives a non-contact optical displacement measuring head 9 to perform linear motion, the position of the X-axis linear motion platform 6 is set to zero when the optical axis of the non-contact optical displacement measuring head 9 passes through the rotary center of the precision air-floating rotary table 3; a compensation standard ball 10 is fixed on the Z-axis linear motion platform 7, the center of the compensation standard ball 10 is positioned on a rotating shaft of the measuring head rotary table 8, the compensation standard ball 10 has the same height with the measuring range of the non-contact optical displacement sensing measuring head 9, the Z-axis linear motion platform 7 adopts a direct drive structure, the effective stroke at least covers the rise of a measured part 15, the Z-axis linear motion platform 7 is provided with a linear grating and has good dynamic performance and positioning precision, the typical movement shaking amount of the Z-axis linear motion platform is in the order of 5', and the positioning precision and the straightness are in the order of 1 micrometer; secondly, the probe revolving platform 8 adopts a direct-drive structure and can perform the whole-period revolving motion, the probe revolving platform 8 is provided with an angle circular grating and has good dynamic performance and positioning precision, the typical positioning precision is 2' magnitude, and the axial and radial typical motion errors are better than 2 μm. When the measuring head rotary table 8 drives the non-contact type optical displacement measuring head 9 to perform rotary motion, the position of the measuring head rotary table 8 is set to be zero when the optical axis of the non-contact type optical displacement measuring head 9 is parallel to the rotary axis of the precise air floatation rotary table 3; the compensation standard ball 10 is fixed on the Z-axis linear motion platform 7 through a support frame, the diameter of the compensation standard ball can be generally 25mm-40mm, the compensation standard ball can be made of metal or ceramic materials, and the typical error of any 180-degree over-center section circle of the compensation standard ball is better than 40nm.
Furthermore, an X-axis displacement reference datum 13 is fixed on the base of the marble base 2, the X-axis displacement reference datum 13 is located on one side of the precise air-floatation rotary table 3, a reference datum plane of the X-axis displacement reference datum 13 passes through a plane formed by a rotary shaft of the precise air-floatation rotary table 3 and the movement linear direction of the X-axis linear motion platform 6, and the normal direction of a datum plane of the X-axis displacement reference datum 13 is perpendicular to the normal direction of the plane; the X-axis displacement reference datum 13 can be made of low-expansion stable optical materials such as quartz, microcrystal or silicon carbide, the flatness is 20nm after polishing treatment, and the effective area is larger than the measurement use area of the Z-axis linear motion platform 7. The X-axis displacement reference datum 13 can be fixed on the marble base 2 at one side of the precise air floatation rotary table 3 through an independent upright column or a portal frame bracket made of a low thermal expansion coefficient material (such as INVAR alloy or silicon carbide); a Z-axis displacement reference datum 11 is fixed at the top of the side seat, a reference datum plane of the Z-axis displacement reference datum 11 is vertical to a rotating shaft of the precise air-floating rotary table 3, and a reference datum plane of the Z-axis displacement reference datum 11 is arranged on a plane formed by the rotating shaft of the precise air-floating rotary table 3 and the linear motion direction of the X-axis linear motion platform 6; the Z-axis displacement reference datum 11 can be made of low-expansion stable optical materials such as quartz, microcrystal or silicon carbide, the flatness is 20nm after polishing treatment, the effective area is larger than the measuring use area of the X-axis linear motion platform 6, and the Z-axis displacement reference datum 11 is fixed above the precise air floatation rotary table 3 through a beam or a portal frame truss made of low-thermal expansion coefficient materials (such as INVAR alloy or silicon carbide).
The measuring device further comprises a Fabry-Perot interference displacement sensor 16, wherein the Fabry-Perot interference displacement sensor 16 is provided with an A measuring head 18, a B measuring head 19, a C measuring head 20, a D measuring head 21, an E measuring head 22 and an F measuring head 23, the A measuring head 18 is arranged on the Z-axis linear motion platform 7, the measuring direction of the A measuring head 18 is parallel to the moving direction of the X-axis linear motion platform 6 and passes through a rotating shaft of the precise air floatation rotating platform rotating shaft 3 and a rotating shaft of the measuring head rotating platform 8, the A measuring head 18 adopts parallel light measurement, the diameter of a light spot is in the level of 2mm, and the A measuring head and an X-axis displacement reference datum 13 form an interference cavity for carrying out high-precision measurement on the displacement of the non-contact optical displacement sensing measuring head 9 in the horizontal direction; the B measuring head 19 is arranged on the Z-axis linear motion platform 7 and is positioned above the measuring head rotary table 8, the measuring direction of the B measuring head 19 is parallel to the running direction of the Z-axis linear motion platform 7 and passes through the rotary shaft of the measuring head rotary table 8, the B measuring head 19 is positioned in a plane formed by the rotary shaft of the precise air floatation rotary table 3 and the motion linear direction of the X-axis linear motion platform 6, the B measuring head 19 adopts parallel light measurement, the diameter of a light spot is in the order of 2mm, and the B measuring head 19 and the Z-axis displacement reference 11 form an interference cavity for carrying out high-precision measurement on the displacement of the non-contact optical displacement sensing measuring head 9 in the vertical direction; the C measuring head 20 and the D measuring head 21 are both arranged below the rotating shaft reference 4, the C measuring head 20 and the D measuring head 21 are both arranged along the X-axis direction in a centering manner, the measuring direction is vertically upward, and the C measuring head 20 and the D measuring head 21 are used for measuring a reference circular ring surface at the bottom of the rotating shaft reference 4 so as to monitor the axial runout and the shaking error of the precision air-floatation rotary table 3 in real time; the E measuring head 22 is arranged on the base and located on one side of the rotating shaft reference 4, the measuring direction of the E measuring head 22 is arranged along the X-axis direction and passes through the center of the rotating shaft 3 of the precise air-floating rotary table, and the E measuring head 22 is used for measuring the outer circle of the rotating shaft reference 4 so as to monitor the radial runout error of the precise air-floating rotary table 3 in real time; the F measuring head 23 is arranged on the measuring head rotary table 8, a focusing measuring head is used, the F measuring head 23 is collinear with the non-contact type optical displacement sensing measuring head 9 and is arranged in a diameter-aligning mode, and the F measuring head 23 is used for measuring and compensating the standard ball 10 to monitor jumping and shaking errors introduced when the measuring head rotary table 8 rotates; an environment sensor 12 is arranged at the top of the side seat, and the environment sensor 12 is used for precisely measuring air environment parameters before measurement so as to compensate air refractive index errors of a Fabry-Perot interference displacement sensor 16; the non-contact optical displacement sensing probe 9 is a spectrum confocal displacement sensing probe or a white light interference displacement sensing probe, if the spectrum confocal displacement sensing probe is adopted, the typical measuring range is less than 400 microns, the measuring light spot is less than 10 microns, the displacement measuring resolution is better than 10nm, and the sampling rate is more than 5k. If a white light interference measuring head is adopted, the typical displacement resolution is better than 1nm, the measuring light spot is better than 10 mu m, the sampling rate is higher than 5k, and the environmental parameters comprise a temperature parameter, a humidity parameter and an air pressure parameter.
In some embodiments, the fabry-perot interference displacement sensor 16 guides light by using an optical fiber, and precisely measures the large-stroke displacement of the X-axis linear motion platform 6 and the Z-axis linear motion platform 7 by using a two-channel measuring head, a main controller 17 is arranged on one side of the vibration isolation platform 1, and the main controller 17 is used for realizing precise air floating turntable 3, the X-axis linear motion platform 6, the Z-axis linear motion platform 7 and the measuring head revolving platform 8 to perform precise motion control according to specified parameters and paths, perform path planning according to a mathematical model of the profile of the measured part 15, and control the X-axis linear motion platform 6, the Z-axis linear motion platform 7 and the measuring head revolving platform 8 to move simultaneously, so that the surface distance between the non-contact optical displacement sensing measuring head 9 and the measured part 15 is constant. Meanwhile, the main controller 17 synchronously samples output signals of the precise air-flotation rotary table 3, the X-axis linear motion platform 6, the Z-axis linear motion platform 7, the non-contact optical displacement sensing measuring head 9, the measuring head rotary table 8, the environment sensor 12, the Fabry-Perot interference displacement sensor 16 and the like.
The measurement mode can be set as spiral line measurement mode, concentric circle measurement mode or radial line measurement mode according to the requirement.
In a spiral line measurement mode, the precise air-floating rotary table 3 always keeps constant-speed motion, the rotating speed can be generally set to be 90-360 degrees/s, and the X-axis linear motion platform 6, the Z-axis linear motion platform 7 and the measuring head rotary table 8 are subjected to motion programming, so that the non-contact optical displacement sensing measuring head 9 performs contour line scanning according to specified parameters and paths.
In a concentric circle measurement mode, the precise air-floatation rotary table 3 always keeps constant-speed motion, and the X-axis linear motion platform 6, the Z-axis linear motion platform 7 and the measuring head rotary table 8 are subjected to motion programming, so that the non-contact optical displacement sensing measuring head 9 runs to different radial positions according to specified parameters, and circular sampling is performed after the non-contact optical displacement sensing measuring head is stabilized;
in a radial line measurement mode, the precise air floatation rotary table 3 is sequentially rotated at required angle intervals, and at each angle position, the X-axis linear motion platform 6, the Z-axis linear motion platform 7 and the measuring head rotary table 8 are subjected to motion programming, so that the non-contact optical displacement sensing measuring head 9 is subjected to contour line scanning according to specified parameters and paths;
the specific measurement steps are as follows (taking a spiral scanning measurement mode as an example):
(1) Programming the motion tracks of the X-axis linear motion platform 6, the Z-axis linear motion platform 7 and the measuring head rotary table 8 according to the profile equation of the measured part 15 to ensure that the motion tracks are consistent with the profile line of the measured part 15;
(2) The measured part 15 is placed on a workpiece adjusting table 5 of the precise air-floating rotary table 3, and the workpiece adjusting table 5 is used for aligning and leveling the measured part 15 (the deviation after adjustment is generally better than 10 μm). The aligning and leveling operation can be completed by measuring the reading change of the outer circle of the measured part 15 by the aid of the rotary measuring head rotary table 8, the precise air-floating rotary table 3 and the non-contact optical displacement sensing measuring head 9; the leveling operation can move the non-contact optical displacement sensing measuring head 9 to the edge surface of the measured part 15, and the measurement of the reading change of the contour line is completed by combining the rotation of the precise air-floatation rotary table 3;
(3) Returning the X-axis linear motion platform 6 and the measuring head rotary table 8 to zero, wherein the zero position of the X-axis linear motion platform 6 is superposed with the rotating shaft of the precise air floatation rotary table 3 after the zero return;
(4) The main controller 17 sends a moving instruction to the Z-axis linear motion platform 7, so that the measured part 15 is positioned at the optimal measuring stroke of the non-contact optical displacement sensing measuring head 9;
(5) According to the characteristics of the part 15 to be detected, a main controller 17 is used for setting the rotation speed of the precise air-floating rotary table 3 and enabling the precise air-floating rotary table 3 to be in uniform rotation motion;
(6) Recording the temperature, humidity and air pressure values measured by the environment sensor 12 to calculate the air refractive index;
(7) The main controller 17 runs a programmed motion instruction, and synchronously records the rotation angle of the precise air flotation turntable 3, the rotation angle of the measuring head turntable 8, the displacement of the non-contact optical displacement sensing measuring head 9 and the displacement of the six channels of the Fabry-Perot interference displacement sensor 16;
(8) Correcting the air refractive index of the collected Fabry-Perot interference displacement sensor 16 displacement data; performing system error compensation, including a 3-axis system error and an angle system error of the precise air-floating rotary table, an 8-axis system error of the measuring head rotary table, a 11-system error of the Z-axis displacement reference datum, a 13-system error of the X-axis displacement reference datum and a 9-system error of the non-contact optical displacement sensor;
(9) Calculating coordinates of sampling points, fitting a contour error by combining a measured mathematical model according to the coordinate values of the points, and carrying out numerical statistics and visualization of results;
in the description of the present invention, it is to be understood that the terms "coaxial", "bottom", "one end", "top", "middle", "other end", "upper", "one side", "top", "inner", "front", "center", "two ends", etc., indicate orientations or positional relationships based on those shown in the drawings, and are only for convenience of description and simplicity of description, and do not indicate or imply that the referenced device or element must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention; and those skilled in the art will appreciate that the benefits to be achieved by the present invention are only better than those achieved by current embodiments of the prior art under certain circumstances, rather than the best use directly in the industry.
The foregoing is illustrative of the preferred embodiments of the present invention, and it is to be understood that the invention is not limited to the precise form disclosed herein and is not to be construed as limited to the exclusion of other embodiments, and that various other combinations, modifications, and environments may be used and modifications may be made within the scope of the concepts described herein, either by the above teachings or the skill or knowledge of the relevant art. And that modifications and variations may be effected by those skilled in the art without departing from the spirit and scope of the invention as defined by the appended claims.

Claims (6)

1. A non-contact ultra-precise contour scanning detection device is characterized by comprising a vibration isolation platform (1) and an isolation cover (14) arranged on the vibration isolation platform (1), wherein a marble base (2) is arranged in the isolation cover (14), the marble base (2) is placed on the vibration isolation platform (1), and the marble base (2) comprises a base and a side seat fixed on one side of the base;
a precise air-floating rotary table (3) is arranged on a base of the marble base (2), a rotary shaft reference (4) is fixed on a table top of the precise air-floating rotary table (3), the rotary shaft reference (4) is of a circular ring structure, the rotary shaft reference (4) and the precise air-floating rotary table (3) are coaxially arranged, the outer diameter of the rotary shaft reference (4) is larger than the diameter of the table top of the precise air-floating rotary table (3), a workpiece adjusting table (5) is arranged above the rotary shaft reference (4), the bottom of the workpiece adjusting table (5) penetrates through an inner ring of the rotary shaft reference (4) to be connected to the precise air-floating rotary table (3), and the workpiece adjusting table (5) has a two-dimensional translation adjusting degree of freedom and a two-dimensional pitching adjusting degree of freedom in the horizontal direction;
an X-axis linear motion platform (6) is arranged on a side seat of the marble base (2), the moving direction of the X-axis linear motion platform (6) is perpendicular to the rotating shaft of the precise air floatation rotary table (3), a Z-axis linear motion platform (7) is arranged on the X-axis linear motion platform (6), the moving direction of the Z-axis linear motion platform (7) is perpendicular to the moving direction of the X-axis linear motion platform (6), the moving direction of the Z-axis linear motion platform (7) is parallel to the rotating shaft of the precise air floatation rotary table (3), a measuring head rotary table (8) is fixed on the Z-axis linear motion platform (7), the rotating shaft of the measuring head rotary table (8) is perpendicular to the moving plane of the X-axis linear motion platform (6) and the moving plane of the Z-axis linear motion platform (7), a non-contact optical displacement sensing measuring head (9) is installed on the measuring head rotary table (8), the reverse extension line of the measuring range direction of the non-contact optical displacement sensing measuring head (9) passes through the center of the measuring head rotary table (8), and when the measuring head (6) and the non-contact optical displacement sensing rotary table (8) pass through the center of the precise air floatation rotary table (3), and the measuring head (8);
a compensation standard ball (10) is fixed on the Z-axis linear motion platform (7), the center of the compensation standard ball (10) is positioned on a rotating shaft of the measuring head rotary table (8), and the measurement ranges of the compensation standard ball (10) and the non-contact optical displacement sensing measuring head (9) are equal in height;
an X-axis displacement reference datum (13) is fixed on the base of the marble base (2), the X-axis displacement reference datum (13) is located on one side of the precise air-floating rotary table (3), a reference datum plane of the X-axis displacement reference datum (13) passes through a plane formed by a rotary shaft of the precise air-floating rotary table (3) and the linear motion direction of the X-axis linear motion platform (6), and the normal direction of a datum plane of the X-axis displacement reference datum (13) is perpendicular to the normal direction of the plane;
a Z-axis displacement reference datum (11) is fixed at the top of the side seat, a reference datum surface of the Z-axis displacement reference datum (11) is perpendicular to a rotating shaft of the precise air-floatation rotary table (3), and a reference datum surface of the Z-axis displacement reference datum (11) is arranged on a plane formed by the rotating shaft of the precise air-floatation rotary table (3) and the movement linear direction of the X-axis linear movement platform (6);
the measurement device is characterized by further comprising a Fabry-Perot interference displacement sensor (16), wherein the Fabry-Perot interference displacement sensor (16) is provided with an A measuring head (18), a B measuring head (19), a C measuring head (20), a D measuring head (21), an E measuring head (22) and an F measuring head (23), the A measuring head (18) is arranged on the Z-axis linear motion platform (7), the measurement direction of the A measuring head (18) is parallel to the motion direction of the X-axis linear motion platform (6) and passes through a rotating shaft of the precise air floatation rotating platform rotating shaft (3) and a rotating shaft of a measuring head rotating platform (8), and the A measuring head and the X-axis displacement reference datum (13) form an interference cavity for performing high-precision measurement on the displacement of the non-contact optical displacement sensing measuring head (9) in the horizontal direction;
the B measuring head (19) is arranged on the Z-axis linear motion platform (7) and is positioned above the measuring head rotary table (8), the measuring direction of the B measuring head (19) is parallel to the running direction of the Z-axis linear motion platform (7) and passes through the rotating shaft of the measuring head rotary table (8), the B measuring head (19) is positioned in a plane formed by the rotating shaft of the precise air floatation rotary table (3) and the moving linear direction of the X-axis linear motion platform (6), and the B measuring head (19) and the Z-axis displacement reference datum (11) form an interference cavity for carrying out high-precision measurement on the displacement of the non-contact optical displacement sensing measuring head (9) in the vertical direction;
the C measuring head (20) and the D measuring head (21) are both arranged below the rotating shaft reference (4), the C measuring head (20) and the D measuring head (21) are both arranged along the X-axis direction in a centering manner, the measuring direction is vertical and upward, and the C measuring head (20) and the D measuring head (21) are used for measuring a reference circular ring surface at the bottom of the rotating shaft reference (4) so as to monitor the axial runout and the shaking error of the precise air floatation rotary table (3) in real time;
the E measuring head (22) is arranged on the base and located on one side of the rotating shaft reference (4), the measuring direction of the E measuring head (22) is arranged along the X-axis direction and passes through the center of the precise air-floatation rotary table rotating shaft (3), and the E measuring head (22) is used for measuring the outer circle of the rotating shaft reference (4) so as to monitor the radial runout error of the precise air-floatation rotary table (3) in real time;
the F measuring head (23) is arranged on the measuring head rotary table (8), the F measuring head (23) and the non-contact type optical displacement sensing measuring head (9) are collinear and are arranged in a diameter-aligning mode, and the F measuring head (23) is used for measuring the compensation standard ball (10) so as to monitor and measure the jumping and shaking errors introduced when the measuring head rotary table (8) rotates;
an environment sensor (12) is arranged at the top of the side seat, and the environment sensor (12) is used for precisely measuring air environment parameters before measurement so as to compensate air refractive index errors of the Fabry-Perot interference displacement sensor (16).
2. The non-contact ultra-precise profile scanning detection device according to claim 1, wherein the plane precision of the bottom torus of the rotating shaft reference (4) is processed to a submicron level, and the outer side surface of the rotating shaft reference (4) is processed to a submicron level.
3. A non-contact ultra-precise profile scanning detection device according to claim 2, wherein the X-axis displacement reference datum (13) is made of optical material polishing and the surface shape error is controlled to be in the order of 20 nm.
4. A non-contact ultra-precise profile scanning detection device according to claim 3, characterized in that the Z-axis displacement reference datum (11) is made of optical material polishing and the surface shape error is controlled to be in the order of 20 nm.
5. A non-contact ultra-precise profile scanning detection apparatus according to claim 1, wherein the non-contact optical displacement sensing probe (9) is selected from a spectral confocal displacement sensing probe or a white light interference displacement sensing probe.
6. The non-contact ultra-precise profile scanning detection device according to claim 1, wherein the fabry-perot interference displacement sensor (16) adopts an optical fiber to guide light, and adopts a two-channel measuring head to perform precise measurement on the large-stroke displacement of the X-axis linear motion platform (6) and the Z-axis linear motion platform (7).
CN202211441504.8A 2022-11-17 2022-11-17 Non-contact ultra-precise contour scanning detection device Pending CN115854908A (en)

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Application Number Priority Date Filing Date Title
CN202211441504.8A CN115854908A (en) 2022-11-17 2022-11-17 Non-contact ultra-precise contour scanning detection device

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Application Number Priority Date Filing Date Title
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116295212A (en) * 2023-05-17 2023-06-23 中国科学院长春光学精密机械与物理研究所 Contour detection device and method for assisting in-situ integrated processing

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN116295212A (en) * 2023-05-17 2023-06-23 中国科学院长春光学精密机械与物理研究所 Contour detection device and method for assisting in-situ integrated processing
CN116295212B (en) * 2023-05-17 2023-08-11 中国科学院长春光学精密机械与物理研究所 Contour detection device and method for assisting in-situ integrated processing

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