CN106482682B - The tool setting device of atmosphere plasma processing aperture aspherical optical elements - Google Patents
The tool setting device of atmosphere plasma processing aperture aspherical optical elements Download PDFInfo
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- CN106482682B CN106482682B CN201610903856.9A CN201610903856A CN106482682B CN 106482682 B CN106482682 B CN 106482682B CN 201610903856 A CN201610903856 A CN 201610903856A CN 106482682 B CN106482682 B CN 106482682B
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- triggering gauge
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
Abstract
The present invention provides a kind of tool setting device of high-precision atmosphere plasma processing aperture aspherical optical elements, air compressor, air accumulator, filter, solenoid valve, tracheae connection is passed sequentially through between speed governing valve and Pneumatic slid platform, the Pneumatic slid platform installation is on the support frame, the Pneumatic slid platform end connection triggering gauge head, the up and down motion of the triggering gauge head is driven by Pneumatic slid platform, the triggering gauge head setting is on the support frame, one end of the pinboard is connected by the end of bearing and Z axis guide rail, and the motor driven by being mounted on pinboard can rotate about the z axis, the other end of the pinboard is connect by bearing with support frame, the fixture is placed on two-dimensional adjustment platform and is located at below triggering gauge head.Present invention greatly enhances optical elements to knife precision and adjustment quality, is conducive to improve processing quality and technology stability.
Description
Technical field
The invention belongs to optical manufacturing fields, and in particular to a kind of atmosphere plasma processing aperture aspherical optics member
The tool setting device of part.
Background technique
With the progress and development of Modern Optics Technology, to the form accuracy of optical element, processing efficiency and production cost
Equal index requests have sizable promotion relative to traditional optical elements.Atmosphere plasma processing technology develops in recent years
One innovative technology, particular for the optical element new method for processing of the hard brittle materials such as fused quartz.Atmosphere plasma processes skill
Art is to be excited using radio-frequency power supply based on contactless chemical processes and generated plasma, and then ionized excitation and be passed through
Fluorine-containing reaction gas generates high reaction activity neutral atom and chemically reacts with workpiece surface material, and generating has volatilization
Property reaction product realize the efficient removal of material, in optical element processing there is unique advantage.
In atmosphere plasma processing aperture aspherical element process, due to being non-contact processing method, member
Part directly affects plasma process surface figure accuracy and production efficiency to the precision and efficiency of knife.Currently, plasma process mistake
Element uses traditional thimble adjustment mode to knife in journey, and workpiece adjustment process is mainly by operator's mobile work platform, eyes
The position of thimble and workpiece, manually recorded edge of work position coordinates are observed, and calculate workpiece centre coordinate.The operation seriously according to
Rely the experience and qualification of operator, it is larger by man's activity, and exist and knife precision and quality is difficult to ensure, it operates
The problems such as taking a long time.Therefore, it is necessary to a kind of more convenient operations, to knife precision and more efficient tool setting device.
Summary of the invention
Technical problem to be solved by the invention is to provide a kind of high-precision atmosphere plasmas to process heavy caliber aspheric
The tool setting device of face optical element.
The technical proposal for solving the technical problem of the invention is: atmosphere plasma processes aperture aspherical optics
The tool setting device of element, including air compressor, air accumulator, filter, solenoid valve, speed governing valve, triggering gauge head, Pneumatic slid platform,
Support frame, pinboard, Z axis guide rail, fixture and two-dimensional adjustment platform, the air compressor, air accumulator, filter, solenoid valve,
Tracheae connection is passed sequentially through between speed governing valve and Pneumatic slid platform, the Pneumatic slid platform is installed on the support frame, the Pneumatic slid platform
End connection triggering gauge head, the up and down motion of the triggering gauge head are driven by Pneumatic slid platform, and the triggering gauge head setting is supporting
On frame, one end of the pinboard is connected by the end of bearing and Z axis guide rail, and the motor driven by being mounted on pinboard
It can rotate about the z axis, the other end of the pinboard is connect by bearing with support frame, and the fixture is placed in two-dimensional adjustment platform
It goes up and is located at below triggering gauge head.
Further, the air accumulator carries out energy storage to the gas that air compressor generates and stablizes air pressure, described
Filter filters off endotracheal microparticle impurity.
Further, the direction of motion of the triggering gauge head and movement rate pass through solenoid valve and speed regulation valve regulation.
Further, the other end of the pinboard is connect by bearing with support frame, is mounted on another on pinboard
Motor driven support frame can turn about the X axis.
Further, the triggering gauge head uses the high-precision triggering gauge head of three-dimensional.
Further, the triggering gauge head is connect by data line with data collecting card, and data collecting card passes through data line
It is connect with computer.
The beneficial effects of the present invention are: the present invention comprehensively considers to knife efficiency and to the factor of two aspects of knife precision, adopt
Conventional fixed-type thimble head is substituted with high-precision triggering gauge head, according to the opposite position of triggering gauge head and the calibration of plasma torch pipe
It sets, the automatic compensation calculation of computer goes out the relative position coordinates of plasma torch pipe and optical element.Present invention decreases operations
The influence of the human factors such as experience, the viewing angle of personnel, greatly improve optical element to knife precision and adjustment quality,
It improves the convenience of operation and to knife efficiency, is conducive to improve processing quality and technology stability.
Detailed description of the invention
Fig. 1 is structural schematic diagram of the invention.
Fig. 2 is operation schematic diagram of the invention.
Specific embodiment
As shown in Figs. 1-2, the present invention is by air compressor 1, air accumulator 2, filter 3, solenoid valve 4, speed governing valve 5, triggering
Gauge head 6, Pneumatic slid platform 7, support frame 10, pinboard 11, Z axis guide rail 8, fixture 13 and two-dimensional adjustment platform 14 are constituted.Air pressure
Tracheae connection, air accumulator 2 are passed sequentially through between contracting machine 1, air accumulator 2, filter 3, solenoid valve 4, speed governing valve 5 and Pneumatic slid platform 7
Energy storage is carried out to the gas that air compressor 1 generates and stablizes air pressure, the microparticle that filter 3 filters off in gas pipeline is miscellaneous
Matter, Pneumatic slid platform 7 are mounted on support frame 10, and 7 end of Pneumatic slid platform connects the high-precision triggering gauge head 6 of three-dimensional, trigger gauge head 6
Up and down motion driven by Pneumatic slid platform 7, and the direction of motion and movement rate can pass through solenoid valve 4 and speed governing valve 5 is adjusted.
Plasma process lathe 17 includes plasma torch pipe 9, workbench 15 and computer 16.Plasma torch pipe 9
It is the device for generating plasma jet.
Triggering gauge head 6 and plasma torch pipe 9 are all disposed on support frame 10, and triggering gauge head 6 is arranged in plasma torch
The side of pipe 9, and the direction of motion is identical as plasma torch pipe 9.One end of L shape pinboard 11 passes through bearing and Z axis guide rail 8
End connection, and the motor driven by being mounted on pinboard 11 can rotate about the z axis, make plasma torch pipe 9 and triggering gauge head 6
It can also rotate about the z axis.The other end of L shape pinboard 11 is connect also by bearing with support frame 10, and by being mounted on pinboard 11
On another motor driven can turn about the X axis, turn about the X axis plasma torch pipe 9 and triggering gauge head 6 can also, for it is equal from
Daughter torch pipe 9 is vertical with the normal of optical element 12 when processing.Wherein, Z axis of the present invention refers to that vertical axes, X-axis are vertical
In the axis of paper, Y-axis is trunnion axis, as shown in Figure 1, the same below.
Optical element 12 is clamped by the positioning of fixture 13, is placed on two-dimensional adjustment platform 14 together, and is located at triggering and is surveyed
First 6 lower section, two-dimensional adjustment platform 14 are placed on the workbench 15 of plasma process lathe 17.The movement of optical element 12 by
Computer 16 controls, and movement rate is continuously adjustable.Triggering gauge head 6 is connect by data line with data collecting card, and data are adopted
Truck is connect further through data line with computer 16.After optical element 12 is contacted with triggering gauge head 6, triggering gauge head 6 can generate touching
On-off signal is sent out, triggering on-off signal is sent to computer 16 after data collecting card is handled, and the control in computer 16 is soft
Part read trigger signal.
The present invention is using the high-precision triggering gauge head 6 of three-dimensional and combining with digital control program carries out pose adjustment to optical element 12
It is determined with spatial value.When to knife, the levelling that 12 side of optical element is parallel to horizontal axis is first carried out, then to optics
Z-direction of 12 surface of element along central axis symmetric coordinates position is leveled, and finally determines optical element to knife by both sides again
The position at 12 12 center of centre coordinate and 9 center of plasma torch pipe and optical element, to complete aperture aspherical
The high-precision quick tool setting of optical element 12.
Using the device of the invention carry out automatic tool preset method the following steps are included:
1) computer 16 of open plasma machining tool 17, make plasma process lathe 17 each motor be in
Working condition opens air compressor 1, so that outlet gas pressure is maintained 0.5~2Mpa, compressed gas enters storage by tracheae
Gas tank 2 carries out pressure stabilizing, keeps outlet pressure in 0.7~1Mpa；
2) clamping is carried out to optical element 12 by fixture 13, the non-spherical surface of the optical element 12 after making clamping is in
Mandrel line is in symmetry status；
3) two-dimensional adjustment platform 14 is placed on the workbench 15 of plasma process lathe 17, by the optics after clamping
Element 12 is placed on two-dimensional adjustment platform 14, and estimating makes the center of optical element 12 trigger 0~50mm model below gauge head 6
In enclosing；
4) it is moved downward by the control triggering gauge head 6 of computer 16, and successively touching optical element 12 is in X direction or the side Y
Two points on side, by comparing the X or Y-coordinate value of two points, the corresponding position for adjusting optical element 12, then secondary control
Triggering gauge head 6 moves downward, and finally ensures to trigger the X or Y-coordinate value of two points that gauge head 6 touches in 12 same edge of optical element
Error is less than 10 μm；
5) 8 vertical motion of Z axis guide rail is controlled by computer 16, triggering gauge head 6 is driven to move up to optical element 12
Then top is moved downward with the speed of 2~5mm/s and successively touches optical element 12 along the position of symmetrical four points in boundary,
By comparing the Z-direction coordinate value of four points, then the posture of optical element 12 is adjusted by two-dimensional adjustment platform 14, then again
Operation is tested, and is finally ensured triggering gauge head 6 to touch on the surface of optical element 12 and is sat along the Z-direction of symmetrical four points in boundary
Scale value error is less than 10 μm；
6) two pairs of parallel sides of optical element 12, fortune are quickly touched for the first time by the control triggering gauge head 6 of computer 16
Dynamic speed is 10~20mm/s, and basic (substantially) determines X-coordinate value X1 ', the X2 ' for being parallel to two sides of Y-axis, and parallel
Y-coordinate value Y1 ', Y2 ' in two sides of X-axis；Then two pairs of parallel sides of optical element 12 are touched (again) for the second time at a slow speed
Side, movement velocity is 1~5mm/s, and is accurately obtained X-coordinate value X1, X2 for being parallel to two sides of Y-axis, and be parallel to X-axis
Y-coordinate value Y1, Y2 of two sides, computer 16 obtain 12 center of optical element by operation (X1-X2)/2 and (Y1-Y2)/2
Accurate X, Y coordinates value；
7) computer 16 is according to relative position the Δ X and Δ Y between the plasma torch pipe 9 and triggering gauge head 6 of calibration, meter
The coordinate position (X+ Δ X, Y+ Δ Y) between the center of optical element 12 and the center of plasma torch pipe 9 is calculated, and passes through meter
Calculation machine 16, which controls the movement of workbench 15, to be made optical element 12 move to its center to be overlapped with 9 center of plasma torch pipe, complete to knife
At.
After the completion of knife, triggering gauge head 6 is moved upwards and is packed up by the drive of Pneumatic slid platform 7.The present invention is surveyed using trigger-type
Head binding plasma lathe and its movement numerical control program realize automatic tool preset operation to aspherical optical element, to knife precision
It is high.
Claims (6)
1. the tool setting device of atmosphere plasma processing aperture aspherical optical elements, it is characterised in that: compressed including air
Machine (1), air accumulator (2), filter (3), solenoid valve (4), speed governing valve (5), triggering gauge head (6), Pneumatic slid platform (7), support frame
(10), pinboard (11), Z axis guide rail (8), fixture (13) and two-dimensional adjustment platform (14), the air compressor (1), gas storage
Tracheae connection is passed sequentially through between tank (2), filter (3), solenoid valve (4), speed governing valve (5) and Pneumatic slid platform (7), it is described pneumatic
Slide unit (7) is mounted on support frame (10), Pneumatic slid platform (7) end connection triggering gauge head (6), the triggering gauge head (6)
Up and down motion driven by Pneumatic slid platform (7), the triggering gauge head (6) setting is on support frame (10), the pinboard (11)
One end connect with the end of Z axis guide rail (8) by bearing, and the motor driven by being mounted on pinboard (11) can be about the z axis
The other end of rotation, the pinboard (11) is connect by bearing with support frame (10), is mounted on another on pinboard (11)
Motor driven support frame (10) can turn about the X axis, and the fixture (13) is placed on two-dimensional adjustment platform (14) and is located at triggering
Below gauge head (6), the tool setting device of the atmosphere plasma processing aperture aspherical optical elements carries out automatic tool preset
Method the following steps are included:
1) computer (16) of open plasma machining tool (17), is in each motor of plasma process lathe (17)
To working condition, open air compressor (1), outlet gas pressure made to maintain 0.5~2Mpa, compressed gas by tracheae into
Enter air accumulator (2) and carry out pressure stabilizing, keeps outlet pressure in 0.7~1Mpa；
2) clamping, the non-spherical surface edge of the optical element (12) after making clamping are carried out to optical element (12) by fixture (13)
Central axis is in symmetry status；
3) two-dimensional adjustment platform (14) is placed on the workbench (15) of plasma process lathe (17), by the light after clamping
It learns element (12) to be placed on two-dimensional adjustment platform (14), and estimating makes the center of optical element (12) in the case where triggering gauge head (6)
Within the scope of 0~50mm of side；
4) it is moved downward by computer (16) control triggering gauge head (6), and successively touching optical element (12) is in X direction or Y
Two points on the side of direction accordingly adjust the position of optical element (12), again by comparing the X or Y-coordinate value of two points
Control triggering gauge head (6) moves downward, and finally ensures to trigger two points that gauge head (6) are touched in optical element (12) same edge
X or Y-coordinate value error are less than 10 μm；
5) Z axis guide rail (8) vertical motion is controlled by computer (16), triggering gauge head (6) is driven to move up to optical element
(12) top, is then moved downward with the speed of 2~5mm/s and successively touches optical element (12) along symmetrical four points in boundary
Position by comparing the Z-direction coordinate value of four points, then adjusts by two-dimensional adjustment platform (14) appearance of optical element (12)
State, then operation is tested again, and it is symmetrical along boundary on the surface of optical element (12) finally to ensure that triggering gauge head (6) is touched
Four points Z-direction coordinate value error less than 10 μm；
6) two pairs of parallel sides of optical element (12) are quickly touched for the first time by computer (16) control triggering gauge head (6),
Movement velocity is 10~20mm/s, and determines X-coordinate value X1 ', the X2 ' for being parallel to two sides of Y-axis substantially, and be parallel to X
The Y-coordinate value Y1 ', Y2 ' of two sides of axis；Then two pairs of parallel sides of optical element (12) are touched for the second time at a slow speed, are moved
Speed is 1~5mm/s, and is accurately obtained X-coordinate value X1, X2 for being parallel to two sides of Y-axis, and be parallel to two sides of X-axis
Y-coordinate value Y1, Y2 on side, computer (16) obtain optical element (12) center by operation (X1-X2)/2 and (Y1-Y2)/2
Accurate X, Y coordinates value；
7) computer (16) is according to relative position the Δ X and Δ Y between the plasma torch pipe (9) of calibration and triggering gauge head (6),
The coordinate position (X+ Δ X, Y+ Δ Y) between the center of optical element (12) and the center of plasma torch pipe (9) is calculated, and
Optical element (12) is moved in its center and plasma torch pipe (9) by computer (16) control workbench (15) movement
The heart is overlapped, and is completed to knife.
2. the tool setting device of atmosphere plasma processing aperture aspherical optical elements as described in claim 1, feature
Be: the air accumulator (2) carries out energy storage to the gas that air compressor (1) generates and stablizes air pressure, the filter
(3) endotracheal microparticle impurity is filtered off.
3. the tool setting device of atmosphere plasma processing aperture aspherical optical elements as described in claim 1, feature
Be: the direction of motion and movement rate of triggering gauge head (6) are adjusted by solenoid valve (4) and speed governing valve (5).
4. the tool setting device of atmosphere plasma processing aperture aspherical optical elements as described in claim 1, feature
Be: the triggering gauge head (6) uses the high-precision triggering gauge head of three-dimensional.
5. the tool setting device of atmosphere plasma processing aperture aspherical optical elements as described in claim 1, feature
Be: the triggering gauge head (6) is connect by data line with data collecting card, and data collecting card passes through data line and computer
(16) it connects.
6. the tool setting device of atmosphere plasma processing aperture aspherical optical elements as described in claim 1, feature
Be: the motion path of triggering gauge head (6) is realized automatic control by computer (16).
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| CN201610903856.9A CN106482682B (en) | 2016-10-17 | 2016-10-17 | The tool setting device of atmosphere plasma processing aperture aspherical optical elements |
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| Application Number | Priority Date | Filing Date | Title |
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| CN201610903856.9A CN106482682B (en) | 2016-10-17 | 2016-10-17 | The tool setting device of atmosphere plasma processing aperture aspherical optical elements |
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| CN106482682A CN106482682A (en) | 2017-03-08 |
| CN106482682B true CN106482682B (en) | 2019-11-05 |
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| CN102950501A (en) * | 2011-08-18 | 2013-03-06 | 发那科株式会社 | Positioning device that performs retracting action using air balance |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| JP3768918B2 (en) * | 2002-05-17 | 2006-04-19 | キヤノン株式会社 | 3D shape measurement method |
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2016
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| CN101898316A (en) * | 2010-06-01 | 2010-12-01 | 陕西汉江机床有限公司 | Automatic tool setting device for numerical control external thread grinder |
| CN102175177A (en) * | 2011-02-16 | 2011-09-07 | 厦门大学 | Five-axis optical aspheric surface detection device driven by linear motor |
| CN102950501A (en) * | 2011-08-18 | 2013-03-06 | 发那科株式会社 | Positioning device that performs retracting action using air balance |
| CN102607483A (en) * | 2012-03-26 | 2012-07-25 | 西安交通大学 | Cylindrical coordinate contact measurement method for large-diameter optical aspheric element |
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