CN104140077A - Atomic force microscope based five-axis machining device and method for machining micro-nano structure on micro thin-wall spherical surface - Google Patents
Atomic force microscope based five-axis machining device and method for machining micro-nano structure on micro thin-wall spherical surface Download PDFInfo
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- CN104140077A CN104140077A CN201410385541.0A CN201410385541A CN104140077A CN 104140077 A CN104140077 A CN 104140077A CN 201410385541 A CN201410385541 A CN 201410385541A CN 104140077 A CN104140077 A CN 104140077A
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Abstract
The invention discloses an atomic force microscope based five-axis machining device and a method for machining a micro-nano structure on a micro thin-wall spherical surface. The device comprises an AFM (atomic force microscope), a two-dimensional micro-aligning mechanism, a precise air floatation shaft system, a two-dimensional high-precision locating platform and an electric rotating table for driving the AFM to rotate, wherein the two-dimensional micro-aligning mechanism is connected with the upper end of the precise air floatation shaft system, the lower end of the precise air floatation shaft system is connected with the two-dimensional high-precision locating platform, a two-dimensional high-precision locating platform base is fixedly connected on a sample table of the AFM, and the electric rotating table is connected with the AFM. The device and the method adopt the machining advantage of the AFM to solve the problem that the machining range on the surface of the micro thin-wall microsphere is limited and achieve the micro-nano structure machined on the micro thin-wall spherical surface on the basis of the AFM; the machining method is simple without complex machining systems and is simple to operate, and the micro-nano structure with the precision reaching the nanometer magnitude on the surface of the micro thin-wall microsphere can be obtained.
Description
Technical field
The invention belongs to micro nano structure manufacture field, relate to a kind of device and method that is inscribed in thin-walled tiny spherical surface processing micro nano structure based on AFM probe machinery.
Background technology
Along with quick progress and the development of nanometer technology, micro-nano process technology application is more and more extensive, and its main purpose is the micro-structure of processing micro-nano-scale, and these special micro-structures are applied in various kinds of equipment and system.As receive micro-continuous-flow biochip and make biomolecule be carried out biological transmission, bio-separation and biological detection; The sensor of nanoscale can detect the weight of single biomolecule; An elastomer nanochannel equipment can be controlled DNA shifting process; A nanochannel equipment can transmit medicine.AFM (AFM) is as a branch of scanning probe microscopy, be used as at first the scanning testing tool of nanoscale scientific research, along with it develops gradually, develop into the processing of nanometer scale structure from initial measuring surface form, to change material surface pattern.Compared with additive method based on AFM processing micro nano structure, mechanical scratching method due to its engineering reliability by force, low, the machining accuracy of environmental requirement, compared with advantages of higher, has obtained application more widely to external world.
Laser fusion (ICF) has become one of great advanced subject in the current whole world.The microballoon adopting in ICF is the container of thermonuclear reaction fuel and the center that all energy beams converge, and is the hollow ball of diameter between 0.2mm is to several millimeters.In blast process, be subject to a great extent the impact of how much status flags of microsphere surface, so the microstructure features on microballoon plays an important role to the success or not of laser-produced fusion igniting.For the research in small ball Surface Machining micro-structural, still less so far, and the whole bag of tricks all exists certain shortcoming.
Summary of the invention
In order to solve in prior art in problems such as the thin-walled tiny spherical surface processing micro nano structure range of work are limited, the invention provides a kind of based on AFM five-axis machining apparatus and the method at thin-walled tiny spherical surface processing micro nano structure.
The object of the invention is to be achieved through the following technical solutions:
A kind of device that is inscribed in thin-walled tiny spherical surface processing micro nano structure based on AFM probe machinery, comprise AFM (AFM), two dimension fine setting concentric mechanism, accurate air floating shaft system, two-dimension high-precision locating platform and the electric rotary table that drives AFM to rotate, two dimension fine setting concentric mechanism is connected with the upper end of accurate air floating shaft system, the lower end of accurate air floating shaft system is connected with two-dimension high-precision locating platform, two-dimension high-precision locating platform base is connected on the sample stage of AFM, and electric rotary table is connected with AFM.
The method at thin-walled tiny spherical surface processing micro nano structure based on AFM realizing based on above-mentioned processing unit (plant), comprises the following steps:
One, processed microballoon is fixed on two dimension fine setting concentric mechanism, processed microballoon and accurate air floating shaft system are carried out to aligning, determine accurate air floating shaft system axis of rotation and the processed microballoon centre of sphere;
Two, find machining angle, determine the relative Working position of AFM probe and the accurate air floating shaft system centre of gyration;
Three, AFM probe contacts processed microballoon under contact mode, and accurate air floating shaft system is rotated, and on appointment endless belt, processes;
Four, machine the micro nano structure of this endless belt, make AFM probe retraction certain distance by controlling electric rotary table, change AFM and turn to another angle, control two-dimension high-precision locating platform to respective distance, repeating step three, carries out the processing of next endless belt.
Five, repeating step four, until complete girdled processing.
Tool of the present invention has the following advantages:
1, the present invention utilizes the advantage of the processing of atomic force microscope, and has improved in the limited problem of the thin-walled microsphere surface range of work, has realized based on AFM at thin-walled tiny spherical surface processing micro nano structure.
2, processing method of the present invention is simple, without complicated system of processing, simple to operate, and can on thin-walled microsphere surface, obtain precision and reach the micro nano structure of nanometer scale.
3, the present invention is based on the operation principle of AFM constant force mode, so both can ensure the high conformity of institute's processing structure, can process again the micro-structural of nanoscale high efficiency, low cost, and can also on-line measurement after processing.
4, the method has the advantages such as the range of work is not limited, processing effect good, efficiency is high.
Brief description of the drawings
Fig. 1 is a kind of structural representation of processing micro nano structure device based on AFM at thin-walled tiny spherical surface of the present invention;
Fig. 2 is a kind of flow chart of processing micro nano structure method based on AFM at thin-walled tiny spherical surface of the present invention.
Detailed description of the invention
Below in conjunction with accompanying drawing, technical scheme of the present invention is further described; but be not limited to this; every technical solution of the present invention is modified or is equal to replacement, and not departing from the spirit and scope of technical solution of the present invention, all should be encompassed in protection scope of the present invention.
Detailed description of the invention one: as shown in Figure 1, a kind of five-axis machining apparatus of processing micro nano structure based on AFM at thin-walled tiny spherical surface that present embodiment provides, comprising: AFM (Q-Scope 250; Ambios Company; USA) 1, processed microballoon 2, two dimension fine setting concentric mechanism (LA1V-XY, NEWPORT, USA) 3, accurate air floating shaft system (ABRS-150MP; Aerotech, USA) 4, two-dimension high-precision locating platform 5 (M511.HD; PI Company, Germany) 5 and electric rotary table (WN03RA200H, micro-nano Lightology LLC, China) 6, wherein, AFM1 and processed microballoon 2 are used in conjunction with and obtain delineation shape appearance figure, processed microballoon 2 is connected with two dimension fine setting concentric mechanism 3 by ball holder, the bottom of two dimension fine setting concentric mechanism 3 is connected with the upper end of accurate air floating shaft system 4, the lower end of accurate air floating shaft system 4 is connected with two-dimension high-precision locating platform 5, and two-dimension high-precision locating platform 5 bases are connected on the sample stage of AFM1.Electric rotary table 6 is connected with AFM1 and drives its rotation.Two dimension fine setting concentric mechanism 3 is adjusted the degree that overlaps in processed microballoon 2 centre ofs sphere and accurate air floating shaft system 4 rotating shaft axle center; Accurate air floating shaft system 4, electric rotary table 6 and two-dimension high-precision locating platform 5 are all controlled at the Working position on processed microballoon 2 surfaces AFM1 probe, two-dimension high-precision locating platform 5 is realized two axial straight-line displacement controls in two dimensional surface, accurate air floating shaft system 4 is realized the rotation control that is vertically to two dimensional surface direction, and electric rotary table 6 is realized the control of the AFM1 anglec of rotation.
Described two-dimension high-precision locating platform 5 is by directions X precision stage and Y-direction precision stage is stacked forms, the lower end of accurate air floating shaft system 4 is connected with the slide block of directions X precision stage, the slide block of directions X positioning table carries out directions X motion, Y-direction precision stage base is connected on the sample stage of AFM1, and the slide block of Y-direction positioning table carries out Y-direction motion.
Described directions X precision stage and Y-direction precision stage are all the displacement platforms of mm-scale, nano grade positioning precision.
Detailed description of the invention two: as shown in Figure 2, present embodiment provides a kind of method of processing micro nano structure based on AFM at thin-walled tiny spherical surface, first accurate air floating shaft system axis of rotation and the processed microballoon centre of sphere are carried out to location positioning, again the relative position of AFM probe and the accurate air floating shaft system centre of gyration is accurately located, complete the preparation of processing.Control the electric rotary table anglec of rotation and machined parameters is set, coordinating sweep speed and the scope of accurate air floating shaft system speed of gyration and AFM probe, specifying endless belt to process; After this endless belt machines, change the anglec of rotation of electric rotary table, repeat above-mentioned steps, process at another endless belt.Concrete steps are as follows:
Step 1, utilization two dimension fine setting concentric mechanism carry out aligning, are divided into two kinds of modes of the coarse adjustment heart and the accurate adjustment heart.
(1) the coarse adjustment heart
The process of the coarse adjustment heart is to coordinate aligning by program window with optical CCD.First CCD is connected with computer, by adjusting CCD, in the time of processed microballoon rotation complete cycle, can be clearly sees that at screen processed microballoon is within sweep of the eye.A selected position, chooses the profile of processed microballoon to choose some (at least 3 points) with mouse after entering interface, and now program can be calculated the outline line that generates processed microballoon automatically; Then rotate accurate air floating shaft system angle to 180 °, utilize the same processed microballoon outline line of several dot generation that extracts of said method; Utilize the accurate centre of gyration of air floating shaft system of rotation front and back profile and location positioning and the radius of processed microballoon, while generating accurate air floating shaft system rotation and processed microballoon central axes, the profile of ball is also determined centre of gyration position.Finally, by regulating two dimension fine setting concentric mechanism that processed microballoon is moved to the position that overlaps with the outline line generating, coarse adjustment heart process completes.
(2) the accurate adjustment heart
The process of the accurate adjustment heart is first will to be placed in AFM control parts of motion below through the accurate air floating shaft system of the coarse adjustment heart, make AFM probe adjust with two dimension fine setting concentric mechanism the direction that knob is identical at four and approach respectively surface, vertical coordinate when the AFM probe showing by system arrives processed microsphere surface, and the size of four vertical coordinates of comparison, regulate by two dimension fine setting concentric mechanism respective knob respectively in this two direction, repeatedly regulate the difference of the vertical coordinate that makes correspondence position to diminish.Be less than after certain limit (3-4 micron) when adjusting coordinate difference, accurate adjustment heart process finishes.
The impact that aligning process is brought whole processing method is huge, so guarantee accurate aligning, to guarantee to be no more than in AFM probe scanning process the flexible scope of scanning earthen-ware pipe, to realize in the better crudy of processed microsphere surface processing structure and the uniformity of working depth.After thick accurate adjustment heart step completes, the knob of two dimension fine setting concentric mechanism just does not allow to rotate again, treats that eccentric error adjusts in certain limit, can carry out subsequent experimental work.
Step 2, determine the position of machining angle, AFM probe and the accurate air floating shaft system centre of gyration.
According to the latitude of required processing endless belt and position, control electric rotary table and drive AFM to turn over corresponding angle.Because AFM detecting head has now rotated certain angle, we need to control directions X locating platform and Y-direction locating platform moves processed microballoon to position to be processed.By twice known angle of rotation AFM detecting head to two, and regulate directions X locating platform and Y-direction locating platform to make AFM probe just at the summit of processed microballoon Working position, according to the elongated distance of AFM axis direction and directions X locating platform and geometrical relationship corresponding to Y-direction locating platform displacement, can obtain the distance of electrical turntable center of rotation and the processed microballoon centre of sphere, rotate by calculating the distance that the corresponding processed microballoon of any given angle need to move by directions X locating platform and Y-direction locating platform like this, therefore we just accurately determine the position of AFM probe and the accurate air floating shaft system centre of gyration.
Step 3, specify endless belt process.
AFM is operated in contact mode, make AFM probe contact processed microsphere surface, set corresponding load, by controlling the sweep limits of AFM probe, accurate air floating shaft system rotational angle, coordinating the processing conditions such as air floating shaft system velocity of rotation and AFM probe translational speed, can on thin-walled microsphere surface, obtain the micro nano structures such as corresponding line, square, endless belt.
Step 4, change AFM probe rotational angle carry out the processing of next zonary structure.
Process the micro nano structure of this endless belt, control AFM probe retraction certain distance, change AFM and turn to another angle, control two-dimension high-precision locating platform to respective distance, make AFM probe contact microsphere surface, set required processing conditions and carry out the processing of next endless belt.
Step 5, complete after the processing of all endless belt, can detect institute's processing structure.
Complete after all zonary structure processing, can utilize the same method of determining the AFM anglec of rotation and definite AFM probe and the accurate air floating shaft system centre of gyration, make probe contact processed microsphere surface, utilize the pattern of rapping of AFM system, set sweep parameter, detect.
Claims (6)
1. process the five-axis machining apparatus of micro nano structure at thin-walled tiny spherical surface based on AFM for one kind, it is characterized in that described device comprises AFM, two dimension fine setting concentric mechanism, accurate air floating shaft system, two-dimension high-precision locating platform and the electric rotary table that drives AFM to rotate, two dimension fine setting concentric mechanism is connected with the upper end of accurate air floating shaft system, the lower end of accurate air floating shaft system is connected with two-dimension high-precision locating platform, two-dimension high-precision locating platform base is connected on the sample stage of AFM, and electric rotary table is connected with AFM.
2. the five-axis machining apparatus of processing micro nano structure based on AFM at thin-walled tiny spherical surface according to claim 1, it is characterized in that described two-dimension high-precision locating platform by directions X precision stage and Y-direction precision stage is stacked forms, the lower end of accurate air floating shaft system is connected with the slide block of directions X precision stage, and Y-direction precision stage base is connected on the sample stage of AFM.
3. the five-axis machining apparatus of processing micro nano structure based on AFM at thin-walled tiny spherical surface according to claim 2, is characterized in that described directions X precision stage and Y-direction precision stage are all the displacement platforms of mm-scale, nano grade positioning precision.
4. five axle processing methods at thin-walled tiny spherical surface processing micro nano structure based on AFM, is characterized in that described method step is as follows:
One, processed microballoon is fixed on two dimension fine setting concentric mechanism, processed microballoon and accurate air floating shaft system are carried out to aligning, determine accurate air floating shaft system axis of rotation and the processed microballoon centre of sphere;
Two, find machining angle, determine the relative Working position of AFM probe and the accurate air floating shaft system centre of gyration;
Three, AFM probe contacts processed microballoon under contact mode, and accurate air floating shaft system is rotated, and on appointment endless belt, processes, and completes the micro nano structure of this endless belt;
Four, make AFM probe retraction certain distance by controlling electric rotary table, change AFM and turn to another angle, control two-dimension high-precision locating platform to respective distance, repeating step three, carries out the processing of next endless belt;
Five, repeating step four, until complete girdled processing.
5. five axle processing methods of processing micro nano structure based on AFM at thin-walled tiny spherical surface according to claim 4, is characterized in that, in described step 1, aligning method is as follows:
(1) the coarse adjustment heart: first CCD is connected with computer, by adjusting CCD, in the time of processed microballoon rotation complete cycle, can be clearly sees that at screen processed microballoon is within sweep of the eye; A selected position, enters at least 3 points of profile of choosing processed microballoon behind interface, generates the outline line of processed microballoon; Then rotate accurate air floating shaft system angle to 180 °, utilize the same processed microballoon outline line of several dot generation that extracts of said method; Utilize the accurate centre of gyration of air floating shaft system of rotation front and back profile and location positioning and the radius of processed microballoon, while generating accurate air floating shaft system rotation and processed microballoon central axes, the profile of ball is also determined centre of gyration position; Finally, by regulating two dimension fine setting concentric mechanism that processed microballoon is moved to the position that overlaps with the outline line generating, coarse adjustment heart process completes;
(2) the accurate adjustment heart: first will be placed in AFM control parts of motion below through the accurate air floating shaft system of the coarse adjustment heart, make AFM probe adjust with two dimension fine setting concentric mechanism the direction that knob is identical at four and approach respectively surface, vertical coordinate when the AFM probe showing by system arrives processed microsphere surface, and the size of four vertical coordinates of comparison, regulate by respective knob respectively in this two direction, after repeatedly adjusting makes the difference of the vertical coordinate of correspondence position be 5-6 micron, accurate adjustment heart process finishes.
6. five axle processing methods of processing micro nano structure based on AFM at thin-walled tiny spherical surface according to claim 4, it is characterized in that in described step 1, the method of determining accurate air floating shaft system axis of rotation and the processed microballoon centre of sphere is: according to the latitude of required processing endless belt and position, control electric rotary table and drive AFM to turn over corresponding angle, control two-dimension high-precision locating platform and move processed microballoon to position to be processed; By twice known angle of rotation AFM detecting head to two, according to the elongated distance of AFM axis direction and relational expression, obtain level and the vertical distance of electrical turntable center of rotation and the processed microballoon centre of sphere, calculate by calculation relational expression the distance that the corresponding processed microballoon of rotation given angle need to move, thereby accurately determine the position of AFM probe and the accurate air floating shaft system centre of gyration.
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Application publication date: 20141112 |