CN105347298B - A kind of method using AFM probe nanometer delineation processed complex three-dimensional micro-nano structure - Google Patents
A kind of method using AFM probe nanometer delineation processed complex three-dimensional micro-nano structure Download PDFInfo
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Abstract
A kind of method using AFM probe nanometer delineation processed complex three-dimensional micro-nano structure, belongs to micro nano structure manufacture field.In order to solve complex three-dimensional micro nano structure processing problems, described device includes AFM, X-direction precision stage, Y-direction precision stage, X-direction precision stage base is connected on the slide block of Y-direction precision stage, the slide block of X-direction positioning table carries out X-direction motion, Y-direction precision stage base is connected on AFM sample stage, and the slide block of Y-direction positioning table carries out Y-direction motion.Three kinds of methods that the present invention proposes respectively by same set of commercial AFM and high-precision system need not control and parameter is arranged, it is achieved use the processing of AFM probe nanometer scribing technique processed complex three-dimensional micro-nano structure.The present invention can solve the processing problems of complex three-dimensional micro nano structure at lower cost, and method is simple, and device and processing realize advantage of lower cost.
Description
The application is on 08 07th, 2014 applying date, application number 201410385711.5, " employing AFM visits denomination of invention
Pin nanometer delineation processed complex three-dimensional micro-nano structure device and method " divisional application.
Technical field
The invention belongs to micro nano structure manufacture field, relate to a kind of complexity three based on the delineation processing of AFM probe nanometer
The method of dimension micro nano structure processing.
Background technology
The complex micro structure with nano-precision has demand widely in many fields, such as high dencity grating structure, again
Miscellaneous three-dimensional micro-nano structure etc. have been widely used in binary micro-optic, X-ray astronomical telescope, extreme UV lithography, have swashed
The numerous areas such as light inertial confinement fusion diagnostic system, Experimental Mechanics, Surface Engineering.For this above-mentioned class formation, at present
The manufacturing process used is mainly the Conventional nano manufacturing process such as electron beam process, focused ion bundle, Laser Processing, but expensive
Process equipment, the shortcoming such as harsh processing conditions, the range of work of micro-meter scale and low working (machining) efficiency constrain above-mentioned
The making of complicated nanostructured.
Along with the development of nanotechnology, by controlling the atomic force microscope (AFM) physics between probe and surface, chemistry
Effect, it is possible to achieve on nanoscale even atom and molecule, atomic scale, change the microscopic appearance of body surface, thus will
It expands to nanometer processing field from fields of measurement, and has carried out extensively in-depth study.Numerous based on AFM probe
Nanometer processing method in, nano-machine based on AFM probe delineation processing as a kind of tradition Ultra-precision Turning to nanometer chi
The elongation technology of degree, has been proved to it and has had the energy of the three-dimensional micro-nano structure of processed complex nano-precision on micro-meter scale
Power.Meanwhile, the micro-turning system of traditional precision is owing to the yardstick of employing cutter and the precision of moving component are all in micron amount
Level, causes the processing yardstick of the method and precision to be extremely difficult to nanometer scale, only exists in micron dimension at present.Therefore it is attempted to
The equipment that the transformation of AFM probe nano-machine system of processing is processed as following processed complex three-dimensional micro-nano structure.
Summary of the invention
In order to solve complex three-dimensional micro nano structure processing problems, the invention provides a kind of employing AFM probe nanometer and carve
The method drawing processed complex three-dimensional micro-nano structure.
What the present invention provided uses the device of AFM probe nanometer delineation processed complex three-dimensional micro-nano structure, including AFM, X
Direction precision stage, Y-direction precision stage, two-dimension high-precision locating platform controller, control computer, AFM controller
With control computer, X-direction precision stage base is connected on the slide block of precision stage in the Y direction, Y-direction precision stage
Base is connected on AFM sample stage；Two-dimension high-precision locating platform controller and X-direction precision stage and Y-direction precision work
Station is connected, and controls computer and is connected with two-dimension high-precision locating platform controller, atomic force microscope and AFM controller and control
Computer processed is sequentially connected with；Described X-direction precision stage and Y-direction precision stage are all mm-scale, nanoscale positioning accurate
The displacement platform of degree.
What the present invention provided uses AFM probe nanometer to delineate the method processing nano-precision complex three-dimensional micro nano structure,
Including following three kinds of methods:
The translational speed of method 1, coupling AFM probe feed speed and high-precision realizes bottom surface hierarchic structure
The processing of nanochannel:
AFM probe is at the continuous scanning machining of square area set, and single pass returns to initial position after terminating continues
Repeating last scanning, X-direction precision stage moves with same speed at machine direction simultaneously, so by visiting AFM
The setting of pin direction of feed scanning speed and X-direction precision stage movement velocity and mating, the nanochannel of different structure is just
Can effectively process and obtain.
Method 2, by the programming Control of AFM probe being realized the nanochannel of complex three-dimensional geometric figure superposition:
The method is being pushed further into of being operated on the basis of method 1.By AFM probe is scanned earthen-ware pipe
Programming Control, it is achieved to scanning earthen-ware pipe shift position and the control of translational speed, can process arbitrarily required for obtain several
What pattern, carry out the coupling of speed just can to realize the nanometer of different geometrical pattern superposition logical simultaneously from X-direction precision stage
The processing in road.
Method 3, the three-dimensional sine of amount of feeding realization changing AFM probe machine direction and the processing of climb and fall structure:
The power being applied on sample surfaces due to AFM probe is remained necessarily by micro-cantilever, PZT, AFM control system
Value, so changing the size of the AFM probe amount of feeding, i.e. changing the spacing between adjacent twice processing scanning, just can change processing
The working depth of structure.Depth gauge according to micro nano structure diverse location to be processed calculates the size of the corresponding amount of feeding.
Utilize commercial AFM device to mate with the parameter of nano-precision locating platform and just can process the three-dimensional sinusoidal and climb and fall knot wanted
Structure.
Above-mentioned three kinds of processing methods all remove material by the way of AFM mechanical scratching, it is achieved processing purpose.AFM is visited
Pin drives probe to move up and down as the small cutter of processing, the motion of Z-direction scanning earthen-ware pipe, it is achieved course of processing middle probe
The power being applied on surface is a steady state value.AFM system original manual work platform is by new two-dimension high-precision locating platform
Replaced, drive sample to be processed to realize high-precision two-dimensional movement.
Present invention have the advantage that
1, three kinds of methods that the present invention proposes are respectively by same set of commercial AFM and high-precision system
Need not control to arrange with parameter, it is achieved use the processing of AFM probe nanometer scribing technique processed complex three-dimensional micro-nano structure.
2, the present invention can solve the processing problems of complex three-dimensional micro nano structure at lower cost, and method is simple,
Device and processing realize advantage of lower cost.
Accompanying drawing explanation
Fig. 1 is AFM processed complex three-dimensional micro-nano structure processing unit (plant) figure of the present invention.
Fig. 2 is the further concrete structure schematic diagram of AFM processed complex three-dimensional micro-nano structure device of the present invention.
Detailed description of the invention
Below in conjunction with the accompanying drawings technical scheme is further described, but is not limited thereto, every to this
Inventive technique scheme is modified or equivalent, without deviating from the spirit and scope of technical solution of the present invention, all should contain
In protection scope of the present invention.
Detailed description of the invention one: as it is shown in figure 1, present embodiments provide for a kind of AFM processed complex three-dimensional micro-nano knot
Structure processing unit (plant), by AFM 1 (Q-Scope 250;Ambios Company, USA), processed sample 2, X-direction precision work
Station 3 and Y-direction precision stage 4 (M511.HD;PI Company, Germany) composition, wherein: X-direction fine-limit work
Platform 3 and Y-direction precision stage 4 are all the displacement platforms of mm-scale, nano grade positioning precision, and the two stacking is installed, it may be assumed that added
Work sample 2 is fixed on the slide block of X-direction precision stage 3, and X-direction precision stage 3 base is connected in Y-direction fine-limit work
On the slide block of platform 4, the slide block of X-direction positioning table 3 carries out X-direction motion, and Y-direction precision stage 4 base is connected in
On AFM1 sample stage, the slide block of Y-direction positioning table 4 carries out Y-direction motion.
Detailed description of the invention two: as in figure 2 it is shown, present embodiment is unlike detailed description of the invention one, described processing
Device can also include two-dimension high-precision locating platform controller 5, controls computer 6, AFM controller 7 and control computer 8, and two
Dimension high-precision controller 5 is connected with X-direction precision stage 3 and Y-direction precision stage 4, control computer 6 and
Two-dimension high-precision locating platform controller 5 is connected, and atomic force microscope 1 is sequentially connected with AFM controller 7 and control computer 8.
Detailed description of the invention three: present embodiments provide for a kind of AFM probe nanometer delineation processing bottom surface hierarchic structure
The method of nanochannel, its process is: first according to the length of nanochannel of required processing, width, the number of times of overlap-add region,
The machined parameters such as overlap-add region size preset the sweep limits of AFM probe, rate of scanning and X-direction precision stage
Process velocity and processing length；Finally complete processing.Details are provided below:
(1) AFM system is disposed in contact with pattern, and diamond AFM probe comes into contact with sample surfaces with a fixed load and makes
Needle point press-in sample surfaces, the load applying needle point has been indirectly controlled working depth.
(2) AFM probe is scanned in the sector scanning scope set, and it is complete that AFM probe moves to terminal from initial point
Become a scan cycle.After completing a scan cycle, AFM probe returns initial point and starts a new scan cycle behaviour
Make.This process is persistently repeated up to the course of processing and completes.While scanning, X-direction precision stage is with the most relatively low
Initial velocity continue along X-direction motion, direction is as shown in Figure 1.Two kinds of situations can produce: the fortune of X-direction precision stage
Dynamic direction is identical with the direction of feed motion of AFM probe；The direction of motion of X-direction precision stage and the feeding fortune of AFM probe
Dynamic in opposite direction.The sweep limits of AFM probe and the moving displacement of X-direction precision stage control processed nanometer respectively and lead to
The width in road and length.Meanwhile, the speed of the direction of feed of AFM probe and the movement velocity of X-direction precision stage are determined
Size and the structure of hierarchic structure bottom nanochannel are determined.
(3) after processing obtains a nanochannel, AFM probe lifts, and controls Y-direction precision stage and moves to next
Individual position to be processed.Repeat step (1) and (2), another nanochannel can be processed.
(4) repeating step (3), nanochannel arrays structure can be obtained by the processing of such form.
Detailed description of the invention four: present embodiments provide for a kind of AFM probe nanometer delineation processed complex three-dimensional geometry figure
The method of the nanochannel of shape superposition, its process is: first utilize visual basic couple according to the geometrical pattern of required processing
The scanning earthen-ware pipe of AFM is programmed, and uses the SlewScanOffsetsXY_ and_ that Ambios company provides
SetScanDacGains(nmX#,nmY#,Optional um_sRate!) function carries out AFM probe position and scanning speed
Control, owing to now AFM probe moves with X-direction precision stage simultaneously, so machining shape to be controlled does not deforms, root
Set the scanning speed of AFM probe in the course of processing and shift position according to required shape and size size and X-direction is accurate
The process velocity of workbench and length, and it is identical, the most just to control the time of AFM probe motion in each fabrication cycles
The geometry that the superimposed motion of the course of processing can be made to produce does not deforms.Details are provided below:
(1) AFM system is operated under contact mode, according to processing request arrange the amount of feeding, angle, process time,
The sweep parameters such as cycle-index.Turning point and terminal point coordinate in scanning pattern can be by being calculated.Then AFM probe with
Certain load set in advance approaches sample surfaces, and the load being applied to AFM probe by controlling scanning earthen-ware pipe keeps perseverance
Fixed.The movement locus of AFM probe is controlled by arranging sweep parameter.When AFM probe arrives the terminal of a complete machining structure
Time, AFM probe can return coordinate origin from terminal immediately.
(2) X-direction precision stage is with a constant relatively low speed motion.AFM probe is same with X-direction precision stage
Shi Yundong.Persistently scanned the associated movement effect with X-direction precision stage by AFM probe, different geometric form can be processed
The complicated overlaying structure of shape.
(3) after all shuttling movements complete, X-direction precision stage stop motion.Mobile Y-direction precision stage arrives
Specify Working position, the processing of next complex three-dimensional structure can be carried out by repeating step (1) and (2).
(4) step (3) is repeated, until completing the processing of the nanochannel of all complex three-dimensional geometric figure superpositions.
Detailed description of the invention five: present embodiments provide for a kind of AFM probe nanometer delineation processed complex three-dimensional sinusoidal or
The method of climb and fall structure, its process is: the sweep limits arranging AFM probe is zero, concurrently sets processing length, adds break
Away from, the parameter such as machine direction, vertical load, speed, then by VC to X-direction precision stage and Y-direction precision stage
It is programmed controlling, and drives two-dimension high-precision locating platform to be processed.Details are provided below:
(1) AFM system works under contact mode, and AFM probe is with certain load contact sample surfaces.In the course of processing
In, the load being applied to AFM probe controls to keep constant by AFM closed loop system.
(2) it is determined by experiment in certain load AFM probe amount of feeding and the functional relationship of working depth, adds according to required
The sinusoidal section depth figure with climb and fall structure of work, obtains corresponding AFM probe corresponding amount of feeding in the course of processing
Numerical value.Control to process the length of nanostructured with the numerical value summation of the amount of feeding.In the course of processing, hang down in the delineation direction of AFM probe
Directly in AFM probe cantilevered orientation, and delineate speed and be maintained at about the scope of several millimeters per second.By changing probe delineation road
The length in footpath controls the width of processed nanostructured.The amount of feeding during nanostructured and structure during controlling
Width is converted into voltage control signal and is controlled X-direction precision stage and Y-direction precision stage.
(3) after processing obtains a nanostructured, AFM probe lifts, and controls X-direction precision stage and moves to next
Individual Working position.Repeat step (1) and (2), another nanostructured can be processed.
(4) step (3) is repeated, until completing all processing.
Claims (1)
1. the method using AFM probe nanometer delineation processed complex three-dimensional micro-nano structure, described method uses AFM probe
The device of nanometer delineation processed complex three-dimensional micro-nano structure realizes, and described device includes AFM, X-direction precision stage, Y
Direction precision stage, two-dimension high-precision locating platform controller, control computer, AFM controller and control computer, X-direction
Precision stage base is connected on the slide block of precision stage in the Y direction, and Y-direction precision stage base is connected in AFM sample
In sample platform；Two-dimension high-precision locating platform controller is connected with X-direction precision stage and Y-direction precision stage, controls meter
Calculation machine is connected with two-dimension high-precision locating platform controller, and atomic force microscope is sequentially connected with AFM controller and control computer；
Described X-direction precision stage and Y-direction precision stage are all the displacement platforms of mm-scale, nano grade positioning precision；It is special
Levy and be that described method step is as follows:
Change the size of the AFM probe amount of feeding, i.e. change the spacing between adjacent twice processing scanning, change adding of processing structure
The work degree of depth, calculates the size of the corresponding amount of feeding according to the depth gauge of micro nano structure diverse location to be processed, utilize AFM with
The parameter coupling of X-direction precision stage realizes the three-dimensional sinusoidal and processing of climb and fall structure；
(1) AFM system works under contact mode, and AFM probe is with certain load contact sample surfaces；
(2) it is determined by experiment in certain load AFM probe amount of feeding and the functional relationship of working depth, according to required processing just
The section depth figure of string and climb and fall structure, obtains corresponding AFM probe numerical value of the corresponding amount of feeding in the course of processing,
Control to process the length of nanostructured with the numerical value summation of the amount of feeding；In the course of processing, the delineation direction of AFM probe is perpendicular to
AFM probe cantilevered orientation, controls the width of processed nanostructured by the length changing probe delineation path；
(3) after processing obtains a nanostructured, AFM probe lifts, and control Y-direction precision stage moves to the next one and adds
Station is put, and repeats step (1) and (2), processes another nanostructured；
(4) step (3) is repeated, until completing all processing；
In the described course of processing, the load being applied to AFM probe is constant.
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| CN104495743B (en) * | 2014-12-26 | 2016-02-24 | 天津大学 | For equipment and the using method thereof of micro-nano technology and measuring surface form |
| EP3364444A1 (en) | 2017-02-21 | 2018-08-22 | IMEC vzw | A method and apparatus for transmission electron microscopy |
| CN107589104B (en) * | 2017-08-08 | 2020-12-18 | 哈尔滨工业大学 | Experimental device and method for preparing array micro-nano structure on Raman-enhanced substrate based on force modulation micro-scribing/micro-indentation process |
| CN108168932A (en) * | 2017-12-15 | 2018-06-15 | 江苏鲁汶仪器有限公司 | Pinpoint slice systems and method |
| CN108548943B (en) * | 2018-03-07 | 2021-04-06 | 华南理工大学 | Method for converting coordinates of A-S universal sample stage into coordinates of AFM sample stage |
| CN109103129A (en) * | 2018-08-21 | 2018-12-28 | 中国科学院微电子研究所 | Patterning device and its application method |
| CN109179313B (en) * | 2018-08-30 | 2020-08-28 | 哈尔滨工业大学 | Preparation method of micro-nanofluidic chip based on AFM |
| CN109782534B (en) * | 2019-01-03 | 2020-08-28 | 西安交通大学 | Local magnetic field driven nanometer pattern direct writing device and preparation method thereof |
| CN113140613B (en) * | 2020-01-20 | 2024-04-16 | 西安电子科技大学 | Two-dimensional electron gas material nano channel and preparation method thereof |
| CN112279215A (en) * | 2020-10-16 | 2021-01-29 | 南京大学 | Micro-nano manufacturing device |
| CN112345320A (en) * | 2020-10-20 | 2021-02-09 | 江南大学 | Method for micro-controlling two-dimensional material based on semi-automatic probe station |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101003356A (en) * | 2007-01-12 | 2007-07-25 | 哈尔滨工业大学 | Method for making Nano microstructure based on constant height mode of atomic force microscope |
| CN101003357A (en) * | 2007-01-12 | 2007-07-25 | 哈尔滨工业大学 | Method for making Nano microstructure based on constant force mode of atomic force microscope |
| CN102530850A (en) * | 2012-03-14 | 2012-07-04 | 哈尔滨工业大学 | Method for millimeter-sized micro nanostructure nano carving and processing through adopting antifrictional metal (AFM) needle |
| CN102583229A (en) * | 2012-03-14 | 2012-07-18 | 哈尔滨工业大学 | Microprobe scratching machining method with force feedback control function for manufacturing microstructure |
Family Cites Families (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09171027A (en) * | 1995-12-19 | 1997-06-30 | Olympus Optical Co Ltd | Scanning probe microscope |
| JP2006125910A (en) * | 2004-10-27 | 2006-05-18 | Olympus Corp | Scanning type probe microscope |
| CN101665238B (en) * | 2009-09-15 | 2012-02-15 | 天津大学 | Method and system of micro three-dimensional structure by micro-nano electric discharge machining |
| CN203269552U (en) * | 2013-03-01 | 2013-11-06 | 广东工业大学 | High-speed high-accuracy macro-micro platform based on piezoelectric ceramics |
| CN103759941B (en) * | 2014-01-29 | 2015-12-02 | 哈尔滨工业大学 | A kind of Measuring of Axis Rotating Accuracy detection method |
-
2014
- 2014-08-07 CN CN201410385711.5A patent/CN104150433B/en active Active
- 2014-08-07 CN CN201510877418.5A patent/CN105347298B/en active Active
- 2014-08-07 CN CN201510877456.0A patent/CN105347299B/en active Active
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN101003356A (en) * | 2007-01-12 | 2007-07-25 | 哈尔滨工业大学 | Method for making Nano microstructure based on constant height mode of atomic force microscope |
| CN101003357A (en) * | 2007-01-12 | 2007-07-25 | 哈尔滨工业大学 | Method for making Nano microstructure based on constant force mode of atomic force microscope |
| CN102530850A (en) * | 2012-03-14 | 2012-07-04 | 哈尔滨工业大学 | Method for millimeter-sized micro nanostructure nano carving and processing through adopting antifrictional metal (AFM) needle |
| CN102583229A (en) * | 2012-03-14 | 2012-07-18 | 哈尔滨工业大学 | Microprobe scratching machining method with force feedback control function for manufacturing microstructure |
Non-Patent Citations (3)
| Title |
|---|
| AFM纳米刻划加工方法的加工深度模型建立及实验研究.;邢洋铭.;《中国优秀硕士学位论文全文数据库工程科技I辑》;20140315(第3期);第15-19、37-41、46-50页，图3-1至图3-2、图4-1至4-2、图4-5、图4-10、图4-14至图4-15 * |
| Top-Down Nanomechanical Machining of Three-Dimensional Nanostructures by Atomic Force Microscropy.;Yongda Yan, Zhenjiang Hu, Xueshen Zhao, et al.;《Small》;20100217;第6卷(第6期);全文 * |
| 基于AFM探针刻划可控三维微结构加工技术研究.;胡振江.;《中国优秀硕士学位论文全文数据库工程科技I辑》;20090115(第1期);全文 * |
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| CN104150433A (en) | 2014-11-19 |
| CN104150433B (en) | 2016-03-02 |
| CN105347299B (en) | 2016-10-26 |
| CN105347298A (en) | 2016-02-24 |
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