CN102175177A - Five-axis optical aspheric surface detection device driven by linear motor - Google Patents
Five-axis optical aspheric surface detection device driven by linear motor Download PDFInfo
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- CN102175177A CN102175177A CN 201110038753 CN201110038753A CN102175177A CN 102175177 A CN102175177 A CN 102175177A CN 201110038753 CN201110038753 CN 201110038753 CN 201110038753 A CN201110038753 A CN 201110038753A CN 102175177 A CN102175177 A CN 102175177A
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Abstract
The invention relates to a five-axis optical aspheric surface detection device driven by a linear motor, in particular relating to a surface-shaped detection device of an optical aspheric surface component. The five-axis optical aspheric surface detection device provided by the invention comprises X/Y/Z-axis linear motors, X/Y/Z-axis linear guide rails, a base, X/Y/Z-axis workbenches, a strut, a cross beam, A/C-axis workbenches, a measuring head fixed base, a measuring head and A/C-axis DD (direct drive)motors, wherein the X/Y/Z-axis workbenches are driven by the X/Y/Z-axis linear motors; the X-axis workbench is positioned on the base; the A-axis workbench is driven by the A-axis DD motor; the C-axis workbench is driven by the C-axis DD motor; the C-axis DD motor is positioned on the X-axis workbench; the C-axis DD motor can move back and forth along with the X-axis workbench; the Z-axis workbench is positioned on the Y-axis workbench; the A-axis DD motor is positioned on the Z-axis workbench; and the A-axis DD motor can move left and right or up and down along with the Y-axis workbench and the Z-axis workbench. The five-axis optical aspheric surface detection device provided by the invention can adjust the relative position of the measuring head and the surface of a workpiece through the linkage of five axes so as to ensure the measuring head to be perpendicular to the surface of the workpiece.
Description
Technical field
The present invention relates to a kind of optical aspherical surface element surface shape detection apparatus, especially relate to a kind of five optical aspherical surface pick-up units of the linear motor driving at different curvature.
Background technology
Aspherical optical element has plurality of advantages in application facet, the aberration of recoverable high-resolution lens for example, thus optical system imaging quality improved, and also one or several non-spherical element can replace a plurality of sphere elements, thereby the simplification apparatus structure reduces cost and alleviates instrument quality effectively.(referring to document: Zhang Yun's celebrating. growing demand and the technology challenge that faces.The ray machine electrical information, 2005,11:14-21).Particularly in recent years, the development of the appearance of new material and new manufacturing technology makes aspheric process technology that the development of advancing by leaps and bounds arranged, now, can use some new flow processs to make non-spherical element, and such new method can reach very high manufacturing accuracy as ion beam finishing, computer control polishing and magnetorheological shaping.But must combining with the detection technique of accurate non-spherical element, the manufacturing of non-spherical element just can obtain qualified aspheric surface.So the detection of aspherical optical element has become the field, forward position of contemporary optics Research on measuring technique.
At present, what detect the most employing of aspheric method is contact and contactless two kinds of measuring methods, but can run into some troubles usually when non-contact measurement.In non-contact measurement, owing to be not the geometric configuration of directly measuring aspheric surface itself, but with light propagated sensation sensor aspheric reflected light is surveyed, therefore the relative position to gauge head and measured workpiece surface requires very high.When aspherical optical element is detected, if when running into the contour surface of measuring big pitch angle or higher curvature surperficial, then can cause signal distortion and distortion, also have lighting condition and surface state reflection case etc.Therefore require when carrying out non-contact measurement, gauge head will keep vertical substantially with measured surface, perhaps can only have very little inclination angle.This just requires a kind of detection platform that can realize that gauge head and surface of the work relative position are adjusted.
Summary of the invention
The objective of the invention is when aspherical optical element is measured, can't to adjust gauge head and arrive vertical position with surface of the work at existing detection platform, can't realize the accurately problem of measurement to aspherical optical element, a kind of relative position that can adjust gauge head and surface of the work by five interlock is provided, guarantees five optical aspherical surface pick-up units of the linear motor driving that gauge head is vertical with surface of the work.
The present invention is provided with computing machine, motion control card, driver, the X-axis linear electric motors, the X-axis line slideway, base, the X-axis worktable, pillar, crossbeam, the Y-axis linear electric motors, the Y-axis line slideway, the Y-axis worktable, Z axle line slideway, Z axle linear electric motors, Z axle worktable, A axle worktable, the gauge head holder, gauge head, C axle worktable, C axle DD motor (directly CD-ROM drive motor), X-axis line slideway slide block, Y-axis line slideway slide block, Z axle line slideway slide block and A axle DD motor (directly CD-ROM drive motor).
Driver links to each other with motion control card, and driver is subjected to the motion control card control; The X-axis worktable is positioned on the base, is driven by the X-axis flat plate type linear motor, and the Y-axis worktable is by the Y-axis linear motor driving, and Z axle worktable is by Z axle linear motor driving; Rotatablely moving of A axle worktable by A axle DD motor driven, the rotatablely moving of C axle worktable by C axle DD motor driven, C axle DD motor is positioned on the X-axis worktable, and C axle DD motor can be done moving of fore-and-aft direction with the X-axis worktable; Z axle worktable is positioned on the Y-axis worktable, and A axle DD motor is positioned on the Z axle worktable, about A axle DD motor can be done with Y-axis worktable and Z axle worktable and move up and down.
Described X-axis linear electric motors can adopt the X-axis flat plate type linear motor, and described Y-axis linear electric motors can adopt the Y-axis flat plate type linear motor, and described Z axle linear electric motors can adopt Z axle flat plate type linear motor.
In the actual measurement process, at first can adjust workpiece and the relative position of gauge head on 3 directions of X/Y/Z by the motion of 3 directions of X/Y/Z, workpiece is adjusted to the below of gauge head.And then by being positioned at the C axle DD motor on the X-axis worktable, workpiece to survey the position rotate to gauge head under.The curvature of measured position in the model that comes out according to match in advance again, send instruction by control card to driver, drive the interlock of three of Y/Z/A, adjust the position of gauge head, and obtain catoptrical intensity according to gauge head and determine optimal location, the realization gauge head is vertical with tested working surface, to obtain real face graphic data.
The main body of platform can adopt the granite material, has little, the good stability of distortion, big, the hardness advantages of higher of intensity, can keep high precision under heavy load and general temperature.
X/Y/Z axle motion module adopts flat plate type linear motor to drive, have response speed fast, operate steadily, load is big, to characteristics such as the working environment requirement are low.Topmost characteristics are the movement transforming devices in the middle of having saved, and have overcome the problem that there is movement clearance in conventional motors, have satisfied the requirement as a high Precision Detection platform.
What wherein A axle and C axle all adopted is that the DD motor directly drives, and the bindiny mechanism in the middle of having saved has reduced because the positioning error that physical construction produces.And be equipped with the scrambler of high-res, made the DD motor, mixed the magneto-optic grid again, can make bearing accuracy reach the microsecond level as position feedback than a common servo high level accuracy.
Five aspherical optical element detection platform provided by the invention can realize the motion of 5 directions, comprise rotatablely moving on the rectilinear motion of 3 directions of X/Y/Z and the A/C axle both direction.Can realize the adjustment to gauge head and workpiece relative position accurately, the assurance gauge head is vertical with surface of the work, thereby obtains accurate face graphic data.Can also realize the surperficial face shape of various workpiece is detected in conjunction with control system simultaneously.Therefore utilize detection platform of the present invention to have motion steadily, good rigidly, characteristics such as precision height have a extensive future.
Description of drawings
Fig. 1 forms the main synoptic diagram of looking for the structure of the embodiment of the invention.
Fig. 2 is that the structure of the embodiment of the invention is formed schematic side view.
Embodiment
The invention will be further described by the following examples and in conjunction with the accompanying drawings.
Referring to Fig. 1 and 2, the embodiment of the invention is provided with computing machine, motion control card, driver, X-axis flat plate type linear motor 1, X-axis line slideway 2, base 3, X-axis worktable 4, pillar 5, crossbeam 6, Y-axis flat plate type linear motor 7, Y-axis line slideway 8, Y-axis worktable 9, Z axle line slideway 10, Z axle flat plate type linear motor 11, Z axle worktable 12, A axle worktable 13, gauge head holder 14, gauge head 15, workpiece 16, C axle worktable 17, C axle DD motor (directly CD-ROM drive motor) 18, X-axis line slideway slide block 19, Y-axis line slideway slide block 20, Z axle line slideway slide block 21 and A axle DD motor (directly CD-ROM drive motor) 22.
Driver links to each other with motion control card, and driver is subjected to the motion control card control; X-axis worktable 4 is positioned on the base 3, is driven by X-axis flat plate type linear motor 1, and Y-axis worktable 9 is driven by Y-axis flat plate type linear motor 7, and Z axle worktable 12 is driven by Z axle flat plate type linear motor 11; Rotatablely moving of A axle worktable 13 driven by A axle DD motor 22, and rotatablely moving of C axle worktable 17 driven by C axle DD motor 18, and C axle DD motor 18 is positioned on the X-axis worktable 4, and C axle DD motor 18 can be done moving of fore-and-aft direction with X-axis worktable 4; Z axle worktable 12 is positioned on the Y-axis worktable 9, and A axle DD motor 22 is positioned on the Z axle worktable 12, about A axle DD motor 22 can be done with Y-axis worktable 9 and Z axle worktable 12 and move up and down.
The motion that X, Y, Z are three driving of the flat plate type linear motor 1,7,11 by three respectively realizes.It is fast that flat plate type linear motor has response speed, operates steadily, and load is big, do not need the characteristics of intermediary movements conversion equipment, the bearing accuracy height.Mix ruler grating chi again as position feedback, whole bearing accuracy can reach nanoscale.
Wherein C axle DD motor 18 is positioned on the X-axis worktable 4, can realize moving of fore-and-aft direction thereupon, can adjust the relative position of workpiece 16 on fore-and-aft direction.C axle DD motor 18 is positioned on the Z motion, can be implemented in the displacement on Y, the Z both direction.
In the process of measuring, at first pass through the driving workbench separately of the flat plate type linear motor of three of XYZ, adjust gauge head 15 with the displacement of workpiece 16 on three directions of XYZ, make workpiece be positioned at the below of gauge head.And then according to the needs of measuring, utilize the rotation of C axle DD motor driven C axle worktable, with workpiece to survey the position rotate to gauge head under.The curvature of measured position in the model that comes out according to match in advance again, send instruction by control card to driver, drive the interlock of three of Y/Z/A, adjust the position of gauge head, and obtain catoptrical intensity according to gauge head and determine optimal location, the realization gauge head is vertical with tested working surface, to obtain real face graphic data.
Claims (2)
1. five of linear motor driving optical aspherical surface pick-up units is characterized in that being provided with computing machine, motion control card, driver, X-axis linear electric motors, X-axis line slideway, base, X-axis worktable, pillar, crossbeam, Y-axis linear electric motors, Y-axis line slideway, Y-axis worktable, Z axle line slideway, Z axle linear electric motors, Z axle worktable, A axle worktable, gauge head holder, gauge head, C axle worktable, C axle DD motor, X-axis line slideway slide block, Y-axis line slideway slide block, Z axle line slideway slide block and A axle DD motor;
Driver links to each other with motion control card, and driver is subjected to the motion control card control; The X-axis worktable is positioned on the base, is driven by the X-axis flat plate type linear motor, and the Y-axis worktable is by the Y-axis linear motor driving, and Z axle worktable is by Z axle linear motor driving; Rotatablely moving of A axle worktable by A axle DD motor driven, the rotatablely moving of C axle worktable by C axle DD motor driven, C axle DD motor is positioned on the X-axis worktable, and C axle DD motor can be done moving of fore-and-aft direction with the X-axis worktable; Z axle worktable is positioned on the Y-axis worktable, and A axle DD motor is positioned on the Z axle worktable, about A axle DD motor can be done with Y-axis worktable and Z axle worktable and move up and down.
2. five of a kind of linear motor driving as claimed in claim 1 optical aspherical surface pick-up units, it is characterized in that described X-axis linear electric motors are the X-axis flat plate type linear motor, described Y-axis linear electric motors are the Y-axis flat plate type linear motor, and described Z axle linear electric motors are Z axle flat plate type linear motor.
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| CN 201110038753 CN102175177A (en) | 2011-02-16 | 2011-02-16 | Five-axis optical aspheric surface detection device driven by linear motor |
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| CN102527552A (en) * | 2012-01-13 | 2012-07-04 | 东莞市华纬涂装设备有限公司 | Seven-axis automatic reciprocating sprayer |
| CN102589467A (en) * | 2012-01-20 | 2012-07-18 | 厦门大学 | Convex aspheric optical element surface type detection device |
| CN103292729A (en) * | 2013-05-16 | 2013-09-11 | 厦门大学 | Aspheric normal error detecting device |
| CN103322938A (en) * | 2013-06-15 | 2013-09-25 | 厦门大学 | Optical element fixed point etching and observing device |
| CN103433849A (en) * | 2013-08-29 | 2013-12-11 | 厦门大学 | Air bag polishing tool surface detection and finishing composition device |
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| CN106482682A (en) * | 2016-10-17 | 2017-03-08 | 成都精密光学工程研究中心 | Atmosphere plasma processes the tool setting device of aperture aspherical optical elements |
| WO2018201589A1 (en) * | 2017-05-05 | 2018-11-08 | 苏州天准科技股份有限公司 | Five-axis measuring device for 3d curved glass |
| CN109408430A (en) * | 2017-08-16 | 2019-03-01 | 艾罗德克有限公司 | Positioning system, method and platform series interface board |
| CN110057831A (en) * | 2019-06-03 | 2019-07-26 | 东莞金钜金属科技有限公司 | Optical de-tection means |
| CN110370285A (en) * | 2019-08-09 | 2019-10-25 | 蓝思智能机器人(长沙)有限公司 | A kind of robot control method, device and robot and storage medium |
| CN110702709A (en) * | 2019-11-08 | 2020-01-17 | 丹东奥龙射线仪器集团有限公司 | X-ray CT apparatus |
| CN112212798A (en) * | 2020-08-14 | 2021-01-12 | 厦门大学 | Part three-dimensional appearance measuring device |
| CN112797937A (en) * | 2021-03-31 | 2021-05-14 | 苏州天准科技股份有限公司 | Non-contact measuring equipment |
| CN112797938A (en) * | 2021-03-31 | 2021-05-14 | 苏州天准科技股份有限公司 | Multi-axis measuring device |
| CN113251907A (en) * | 2021-05-14 | 2021-08-13 | 哈尔滨工业大学 | Five-degree-of-freedom precision measurement device and control method thereof |
| CN115127477A (en) * | 2022-07-09 | 2022-09-30 | 浙江大学 | Spherical component surface shape profile conformal envelope measurement system and method |
| CN115290385A (en) * | 2022-08-02 | 2022-11-04 | 中国矿业大学 | Microparticle capturing device and microparticle transporting equipment applying same |
| US11644296B1 (en) | 2021-12-17 | 2023-05-09 | Industrial Technology Research Institute | 3D measuring equipment and 3D measuring method |
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| CN102527552A (en) * | 2012-01-13 | 2012-07-04 | 东莞市华纬涂装设备有限公司 | Seven-axis automatic reciprocating sprayer |
| CN102589467A (en) * | 2012-01-20 | 2012-07-18 | 厦门大学 | Convex aspheric optical element surface type detection device |
| CN102589467B (en) * | 2012-01-20 | 2013-11-13 | 厦门大学 | Convex aspheric optical element surface type detection device |
| CN103292729A (en) * | 2013-05-16 | 2013-09-11 | 厦门大学 | Aspheric normal error detecting device |
| CN103322938B (en) * | 2013-06-15 | 2016-08-24 | 厦门大学 | A kind of optical element fixed point etching and observation device |
| CN103322938A (en) * | 2013-06-15 | 2013-09-25 | 厦门大学 | Optical element fixed point etching and observing device |
| CN103433849A (en) * | 2013-08-29 | 2013-12-11 | 厦门大学 | Air bag polishing tool surface detection and finishing composition device |
| CN103433849B (en) * | 2013-08-29 | 2015-12-09 | 厦门大学 | A kind of air bag polishing tool Surface testing and finishing set composite |
| CN105135992A (en) * | 2015-08-11 | 2015-12-09 | 苏州鸿普精密模具有限公司 | Camber detection device for automobile window lifting guide rail testing machine |
| CN105135992B (en) * | 2015-08-11 | 2017-09-12 | 苏州鸿普精密模具有限公司 | Automobile rises the radian detecting device of window guide rail test machine |
| CN106482682A (en) * | 2016-10-17 | 2017-03-08 | 成都精密光学工程研究中心 | Atmosphere plasma processes the tool setting device of aperture aspherical optical elements |
| CN106482682B (en) * | 2016-10-17 | 2019-11-05 | 成都精密光学工程研究中心 | The tool setting device of atmosphere plasma processing aperture aspherical optical elements |
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| CN110702709A (en) * | 2019-11-08 | 2020-01-17 | 丹东奥龙射线仪器集团有限公司 | X-ray CT apparatus |
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| CN112797937A (en) * | 2021-03-31 | 2021-05-14 | 苏州天准科技股份有限公司 | Non-contact measuring equipment |
| CN112797938A (en) * | 2021-03-31 | 2021-05-14 | 苏州天准科技股份有限公司 | Multi-axis measuring device |
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| CN115127477A (en) * | 2022-07-09 | 2022-09-30 | 浙江大学 | Spherical component surface shape profile conformal envelope measurement system and method |
| CN115290385A (en) * | 2022-08-02 | 2022-11-04 | 中国矿业大学 | Microparticle capturing device and microparticle transporting equipment applying same |
| CN115290385B (en) * | 2022-08-02 | 2023-09-08 | 中国矿业大学 | Microparticle transport equipment using microparticle capturing device |
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Application publication date: 20110907 |