CN106737194B - A kind of air bag profile detection method and device in place - Google Patents
A kind of air bag profile detection method and device in place Download PDFInfo
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- CN106737194B CN106737194B CN201710201757.0A CN201710201757A CN106737194B CN 106737194 B CN106737194 B CN 106737194B CN 201710201757 A CN201710201757 A CN 201710201757A CN 106737194 B CN106737194 B CN 106737194B
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B49/00—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation
- B24B49/12—Measuring or gauging equipment for controlling the feed movement of the grinding tool or work; Arrangements of indicating or measuring equipment, e.g. for indicating the start of the grinding operation involving optical means
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B29/00—Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
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- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Constituent Portions Of Griding Lathes, Driving, Sensing And Control (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
A kind of air bag profile detection method and device in place provided in an embodiment of the present invention, the contour feature of air bag to be measured is detected by air bag polishing lathe, laser micrometer and calculating equipment for carrying out data processing, to judge whether the air bag to be measured meets actual operation requirements.Compared with prior art, method and device provided in an embodiment of the present invention, it can effectively ensure that the consistency of air bag profile quality, improve the stability and process controllability of air bag polishing removal, and practical removal function can be speculated based on detected air bag contour feature, improve the removal effect of optical element so as to adjust polishing process parameter.
Description
Technical field
The present invention relates to advanced optical manufacture technology fields, in particular to a kind of air bag profile in position detecting method
And device.
Background technique
With the continuous development of modern science and technology, especially aerospace, defence and military, information, microelectronics and photoelectricity
The advanced science technologies such as son are advanced by leaps and bounds, and propose increasingly higher demands to optical manufacturing field.Wherein aperture aspherical
Element has many advantages, such as that non-stop layer blocks, can improve image quality and simplied system structure, it has also become space camera, extreme ultraviolet photolithographic
The key element of machine, ultra high power laser aid, Ultra-precision Turning are one of the forward position research directions in optical manufacturing field.
Air bag polishing is one of the research hotspot of aperture aspherical element Ultraprecision Machining in recent years.The technology is
Using flexible air-bag as polishing tool, it is ensured that it rubbing head and is polished workpiece surface and preferably coincide property, and adjustable air bag
The blowing pressure and the higher speed of mainshaft can realize that polishing efficiency is promoted and quality control on the surface gets both, and be a kind of great development
The high-efficiency polishing method of potentiality.
So far, certain development is achieved in terms of air bag flexible polishing technical research both at home and abroad, constantly carried out each
The high-efficiency high-accuracy of class workpiece polishes application.But although domestic obtain certain achievement in terms of air bag polishing equipment development,
It is also not up to the degree of engineer application, while air bag polishing technique is also limited by air bag polishing hardware, such as air bag tool.Air bag work
Tool directly affects machining accuracy as the component directly contacted with workpiece, dimensional accuracy and form accuracy, how to guarantee its ruler
Very little and shape precision is always industry urgent problem to be solved.
Summary of the invention
In view of this, the purpose of the present invention is to provide a kind of air bag profile detection method and device in place, on improving
State problem.
Present pre-ferred embodiments provide a kind of air bag profile in position detecting method, this method comprises: passing through laser micrometer
Instrument determines that air bag to be measured along the minimum point in rotating shaft axis direction, enables the laser feeler of the laser micrometer in the initial state
It is directed at the minimum point, the position coordinates of the minimum point are the origin under preset coordinate system；Drive the air bag to be measured into
The movement of row spherical surface track, the motion profile of the air bag to be measured are the spherical surface track comprising the minimum point, the spherical surface track
Radius be the preset radius with reference to air bag；During the air pocket motion to be measured, by the laser micrometer to this
The outline data of air bag to be measured is acquired；It is acquired according to the spherical surface track data with reference to air bag and above-mentioned laser micrometer
To data calculate the radius of the air bag to be measured；Spherical surface track detection Programmable detection is worked out according to above-mentioned calculated radius
The profile errors of the air bag to be measured out.
Another preferred embodiment of the present invention provides a kind of air bag profile in level detecting apparatus, which includes air bag polishing machine
Bed, laser micrometer and data processing terminal, wherein the laser micrometer is installed on the air bag polishing lathe, to be measured
Air bag is installed in the rotary shaft of the air bag polishing lathe；The laser micrometer is for determining air bag to be measured in original state
When along rotating shaft axis direction minimum point so that the laser feeler of the laser micrometer is directed at the minimum point, this is minimum
The position coordinates of point are the origin under preset coordinate system；The air bag polishing lathe is for driving the air bag to be measured to carry out
The movement of spherical surface track, the motion profile of the air bag to be measured are the spherical surface track comprising the minimum point, the spherical surface track
Radius is the preset radius with reference to air bag；The laser micrometer is also used to wait for this during the air pocket motion to be measured
The outline data for surveying air bag is acquired；The data processing terminal be used for according to the spherical surface track data with reference to air bag and
Above-mentioned collected data calculate the radius of the air bag to be measured, and then by working out spherical surface according to above-mentioned calculated radius
Track detection Programmable detection goes out the profile errors of the air bag to be measured.
Air bag profile detection method and device in place provided in an embodiment of the present invention, by laser micrometer to air bag to be measured
Carry out the spherical surface for then driving the air bag progress to be measured spherical surface track movement to make the excessively described minimum point of its motion profile to knife
The radius of track, spherical surface track is the preset radius with reference to air bag, and during the air pocket motion to be measured, passes through Laser Measuring
Micro- instrument is acquired the outline data of the air bag to be measured, and then according to above-mentioned spherical surface track data and Laser Measuring with reference to air bag
Micro- collected data of instrument calculate the radius of air bag to be measured, finally work out spherical surface track detection journey further according to calculated radius
Sequence detects the profile errors of the air bag to be measured.Compared with prior art, method and device provided in an embodiment of the present invention, can
The consistency of air bag profile quality is effectively ensured, improves the stability and process controllability of air bag polishing removal, and can be with base
Practical removal function is speculated in detected air bag contour feature, so as to adjust polishing process parameter to improve optical element
Removal effect.
Detailed description of the invention
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be to needed in the embodiment attached
Figure is briefly described, it should be understood that the following drawings illustrates only certain embodiments of the present invention, therefore is not construed as pair
The restriction of range for those of ordinary skill in the art without creative efforts, can also be according to this
A little attached drawings obtain other relevant attached drawings.
Fig. 1 is a kind of block diagram of the air bag profile provided in an embodiment of the present invention in level detecting apparatus；
Fig. 2 is a kind of air bag profile applied to device shown in FIG. 1 provided in an embodiment of the present invention in position detecting method
Flow chart；
Fig. 2A is status diagram of the laser micrometer provided in an embodiment of the present invention to knife air bag to be measured；
Fig. 3 is the realization of minimum point when laser micrometer provided in an embodiment of the present invention determines air bag original state to be measured
Process schematic；
Fig. 4 is that a kind of air bag real radius to be measured provided in an embodiment of the present invention solves schematic diagram；
Fig. 5 is another air bag profile provided in an embodiment of the present invention detection method flow chart in place；
Fig. 6 is that air bag to be measured provided in an embodiment of the present invention uses annulus runout error detection schematic diagram；
Fig. 7 illustrates for air bag to be measured in an example provided in an embodiment of the present invention and with reference to air bag profile errors detection data
Figure；
Fig. 8 is the profile errors testing number of the spherical surface track detection program provided in an embodiment of the present invention based on real radius
According to schematic diagram；
Fig. 9 is shown for air bag to be measured in the example provided in an embodiment of the present invention using annulus runout error detection data
It is intended to.
Icon: 100- air bag profile is in level detecting apparatus；110- air bag polishing lathe；120- laser micrometer；130- number
According to processing terminal；200- air bag to be measured；400- angle；The endless belt-shaped region 500-.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.The present invention being usually described and illustrated herein in the accompanying drawings is implemented
The component of example can be arranged and be designed with a variety of different configurations.Therefore, below to the reality of the invention provided in the accompanying drawings
The detailed description for applying example is not intended to limit the range of claimed invention, but is merely representative of selected implementation of the invention
Example.Based on the embodiments of the present invention, obtained by those of ordinary skill in the art without making creative efforts
Every other embodiment, shall fall within the protection scope of the present invention.
It should also be noted that similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined in a attached drawing, does not then need that it is further defined and explained in subsequent attached drawing.
Referring to Fig. 1, being that a kind of air bag profile provided in an embodiment of the present invention is illustrated in the box of level detecting apparatus 100
Figure.The device includes air bag polishing lathe 110, laser micrometer 120 and data processing terminal 130.Wherein, the Laser Measuring
Micro- instrument 120 is installed on the air bag polishing lathe 110, and 200 (not shown) of air bag to be measured is installed on the air bag polishing
In the rotary shaft of lathe 110.
As an implementation, the air bag polishing lathe 110 can be 6 Shaft and NC Machining Test lathes, and wherein H axis is the rotation
Shaft.
As an implementation, the laser micrometer 120 can be Keyemce laser micrometer 120.
As an implementation, the data processing terminal 130 can be computer.
Referring to Fig. 2, being that a kind of air bag profile that can be applied to Fig. 1 shown device provided in an embodiment of the present invention is in place
Detection method flow chart.It should be noted that the method in the present embodiment is not limited with Fig. 2 and specific order as described below
System.Each step shown in Figure 2 is described in detail below.
Step S201 determines air bag 200 to be measured in the initial state along rotating shaft axis direction by laser micrometer 120
Minimum point, enable the laser feeler of the laser micrometer 120 be directed at the minimum point.
In the present embodiment, the original state can refer to the pivot center and rotary shaft (H axis) axis of air bag 200 to be measured
In parallel, state when and air bag to be measured 200 does not rotate.
In the present embodiment, the position coordinates of the minimum point are the origin under preset coordinate system.The preset coordinate system
It can be XYZ three-dimensional system of coordinate shown in Fig. 2A.Origin under the coordinate system is (0,0,0).
As an implementation, when 200 original state of air bag to be measured determining by the laser micrometer 120
The realization process of minimum point is as shown in Figure 3.Firstly, determining an initial point a0, while laser feeler zero setting；Then, mobile air bag
The X-axis of burnishing machine 110 is, at a distance of the left and right of L two point b0, c0, and to record the height of two o'clock by laser feeler detection and a0
Detected value, and find out the difference in height Δ H0 of two o'clock；Subsequently, selection height detection is worth biggish point c0 to air bag pivot center
Direction, which moves a certain distance point c1, makes difference in height reduce 1/2 Δ H0, and records the height detection value of point c1；Again from c1 to air bag
2L to b1 is moved in pivot center direction, and records the height detection value of point b1；Find out the difference in height Δ H1 of c1, b1 two o'clock；It connects down
Aforesaid operations are repeated, until difference in height Δ Hn≤50 μm of cn, bn two o'clock until.At this point, cn, bn two o'clock central point be to
Air bag 200 is surveyed in the origin of X-direction.It can similarly determine the origin of air bag 200 to be measured in the Y direction.Laser feeler alignment is to be measured
Air bag 200 X, Y-direction origin after zero setting.
Step S203 drives the air bag 200 to be measured to carry out the movement of spherical surface track.
In the present embodiment, the preset ball with reference to air bag can be worked out on the data processing terminal 130 in advance
Face track program, then will be in the digital control system of the program input air bag polishing lathe 110 of establishment.Described in digital control system operation
Program, to control the X-axis of the air bag polishing lathe 110, Z axis joint drives the air bag 200 to be measured, so that air bag to be measured
200 carry out the movement of spherical surface track.
The motion profile of the air bag to be measured 200 was the spherical surface track of the minimum point.The radius of the spherical surface track is
Preset value.The preset value is the above-mentioned preset radius with reference to air bag.
Step S205, in 200 motion process of air bag to be measured, by the laser micrometer 120 to the gas to be measured
The outline data of capsule 200 is acquired.
Laser micrometer 120 has light-emitting window and beam reception mouth, and laser micrometer 120 receives the change of light beam by analysis
Change the height change for calculating measured point.
Step S207, according to the spherical surface track data with reference to air bag and the collected number of above-mentioned laser micrometer 120
According to the radius for calculating the air bag to be measured 200.
As an implementation, the solution formula of the radius of air bag 200 to be measured can obtain as follows.Without loss of generality
Ground, as shown in figure 4, setting the radius with reference to air bag as R, the radius of air bag to be measured 200 to be solved is r.With the radius R
Spherical surface track program is worked out, by air bag to be measured 200 described in the driven by program towards mobile 2 times of X-direction of A1B1.At this point, laser
Micrometer 120 detects the height tolerance Δ h that the data obtained is air bag 200 to be measured with reference air bag.Following relationship available from figure 4
Group:
From above-mentioned relation group:
Wherein, (Δ h) is the B1B2 in above-mentioned relation formula to max, indicates the air bag 200 to be measured and with reference to the wheel between spherical surface
Profile maximum deviation.Angle, θ indicates that the edge detection point with reference to air bag deviates the angle of air bag pivot center.
In addition, since the surface of the polishing pad on air bag 200 to be measured usually has a large amount of micropores, laser micrometer
The data that 120 detections obtain, which are generally required, carries out data fitting by data processing terminal 130, obtains corresponding matched curve.
In the present embodiment, as an implementation, fitting of a polynomial can be carried out to collected data, as quadratic polynomial is quasi-
It closes, obtains corresponding quadratic fit curve.
After obtaining matched curve, the air bag to be measured 200 is calculated according to the matched curve and refers to the contour line of air bag most
Large deviation max (Δ h).Then, radius solution formula, the spherical surface with reference to air bag of the air bag to be measured 200 gone out based on above-mentioned analysis
Track data and contour line maximum deviation obtained above calculate the radius of the air bag to be measured 200.
Step S209 goes out the air bag 200 to be measured according to above-mentioned calculated radius establishment spherical surface track detection Programmable detection
Profile errors.
In the present embodiment, after the real radius r for calculating air bag 200 to be measured, corresponding spherical surface track testing journey is worked out
Sequence, and by the program input air bag polishing lathe 110 digital control system in so that the X of air bag polishing lathe 110, Z axis are in the journey
Air bag 200 to be measured is driven to carry out the movement of spherical surface track under the control of sequence.This moment, it is r that the motion profile of air bag 200 to be measured, which is radius,
And the spherical surface track of the excessively described minimum point.
In 200 motion process of air bag to be measured, data acquisition is carried out by laser micrometer 120, to obtain air bag to be measured
200 with radius be r ideal spherical face track profile variation.
Referring to Fig. 5, being flow chart of another air bag profile provided in an embodiment of the present invention in position detecting method.With it is upper
It states unlike method, other than step S201- step S209, this method further includes detecting air bag 200 to be measured to use annulus
The step of runout error.
Step S301 controls the air bag 200 to be measured and deflects default angle of precession.
As shown in fig. 6, the angle of precession refers to the pivot center and work pieces process point of air bag 200 to be measured in the present embodiment
Angle 400 between normal.
The detection light beam of the laser micrometer 120 is irradiated in the use annulus of the air bag 200 to be measured by step S303
On.Wherein, it is described contacted with workpiece when referring to that air bag to be measured 200 shown in Fig. 6 polishes workpiece using annulus it is endless belt-shaped
Region 500.
Step S305 drives the air bag 200 to be measured to be rotated.
Step S307, in 200 rotary course of air bag to be measured, by the laser micrometer 120 to the use
Annulus carries out data acquisition, and obtains the runout error using annulus.
Air bag profile detection method and device in place provided in an embodiment of the present invention, can examine air bag contour feature
It surveys to judge whether air bag 200 to be measured meets requirement, and then guarantees the consistency of air bag profile quality, thrown to air bag is improved
Light removes stability and process controllability important in inhibiting.
A specific example is enumerated below, and provided air bag profile is provided so that the embodiment of the present invention will be further explained and is examined in place
The advantages of surveying method and device.It is known that the radius of air bag to be measured 200 is 80 millimeters or so in the example.
Air bag 200 to be measured is carried out to knife using laser micrometer 120, to determine the air bag to be measured 200 in original state
When minimum point, and the gauge head of laser micrometer 120 is enabled to be directed at the minimum point.The minimum point is set as XYZ three-dimensional system of coordinate
In origin.
The reference air bag central axes spherical surface track program that radius is 80mm is worked out on data processing terminal 130.The program
Parameter is to move total distance 80mm, movement speed 200mm/min in X direction.X, the Z axis of driven by program air bag polishing lathe 110
It drives air bag 200 to be measured to carry out the movement of spherical surface track, while data acquisition is carried out using laser micrometer 120.Laser micrometer
120 outline datas detected are the profile variation of practical air bag and the spherical surface track with reference to air bag.
As shown in fig. 7, carrying out quadratic polynomial fitting to detection data, quadratic fit curve is obtained.As shown in Figure 7, it examines
There are spherical aberrations for measured data, this illustrates that the real radius of air bag 200 to be measured is not 80mm.In addition, in detection data two sides data
Value is positive (being positive value when laser feeler and measured surface relative distance reduce), this illustrates that the real radius of air bag 200 to be measured is big
In 80mm.The quadratic polynomial fitting formula of initial data is y=0.126x2-10.2x+249.5.By matched curve it is found that working as
When x=0, x=40, y is respectively 249.5 μm, 43.1 μm.So the profile maximum deviation of air bag 200 to be measured and reference air bag
Max (- 43.1 μm of Δ h)=249.5 μm=206.4 μm, i.e., it is B1B2=206.4 μm above-mentioned.In addition, A1O1=O1O3=80mm, θ
=30 °.R=81.3mm can be obtained by substituting into the calculating formula of radius r.Therefore, the real radius of air bag 200 to be measured is in this example
81.3mm。
Then, establishment radius is that the spherical surface track testing Programmable detection of 81.3mm can obtain the profile errors of air bag 200 to be measured,
As shown in Figure 8.The quadratic polynomial fitting formula that measurement obtains initial data is y=0.009x2-0.795x+10.93.By intending
Curve is closed it is found that as x=0, x=40, y is respectively 10.93 μm, -6.47 μm, i.e., the profile errors of air bag 200 to be measured are
17.4μm。
When air bag 200 to be measured is detected using the runout error of annulus, air bag 200 to be measured is deflected 22.5 ° around the air bag centre of sphere,
22.5 ° of precession foot is formed, so that laser micrometer 120 detects light beam and is radiated on the use annulus of air bag 200 to be measured.So
After rotate air bag 200 to be measured, carry out the acquisition of 120 data of laser micrometer.The rotation speed of air bag 200 to be measured is 10rpm, laser
The sample frequency of micrometer 120 is 25.At this point, the annulus runout error using annulus for measuring air bag 200 to be measured is about 450 μ
M, referring specifically to Fig. 9.
In conclusion compared with prior art, method and device provided in an embodiment of the present invention can effectively ensure that air bag
The consistency of profile quality, improves the stability and process controllability of air bag polishing removal, and can be based on detected
Air bag contour feature speculates practical removal function, improves the removal effect of optical element so as to adjust polishing process parameter.
In the description of the present invention, it should be noted that the orientation or position of the instructions such as term " on ", "vertical", "horizontal"
Set relationship be based on the orientation or positional relationship shown in the drawings or the invention product using when the orientation or position usually put
Relationship is set, is merely for convenience of description of the present invention and simplification of the description, rather than the device or element of indication or suggestion meaning are necessary
It with specific orientation, is constructed and operated in a specific orientation, therefore is not considered as limiting the invention.
In the present invention unless specifically defined or limited otherwise, fisrt feature second feature "upper" or "lower"
It may include that the first and second features directly contact, also may include that the first and second features are not direct contacts but pass through it
Between other characterisation contact.Moreover, fisrt feature includes the first spy above the second feature " above ", " above " and " above "
Sign is right above second feature and oblique upper, or is merely representative of first feature horizontal height higher than second feature.Fisrt feature exists
Second feature " under ", " lower section " and " following " include that fisrt feature is directly below and diagonally below the second feature, or is merely representative of
First feature horizontal height is less than second feature.
The above description is merely a specific embodiment, but scope of protection of the present invention is not limited thereto, any
Those familiar with the art in the technical scope disclosed by the present invention, can easily think of the change or the replacement, and should all contain
Lid is within protection scope of the present invention.Therefore, protection scope of the present invention should be based on the protection scope of the described claims.
Claims (8)
1. a kind of air bag profile is in position detecting method, which is characterized in that this method comprises:
Determine that air bag to be measured along the minimum point in rotating shaft axis direction, enables the laser in the initial state by laser micrometer
The laser feeler of micrometer is directed at the minimum point, and the position coordinates of the minimum point are the origin under preset coordinate system；
The air bag to be measured is driven to carry out the movement of spherical surface track, the motion profile of the air bag to be measured is to include the minimum point
Spherical surface track, the radius of the spherical surface track are the preset radius with reference to air bag；
During the air pocket motion to be measured, adopted by outline data of the laser micrometer to the air bag to be measured
Collection；
The collected data of the laser micrometer are subjected to data fitting, obtain matched curve；
The air bag to be measured is calculated by the matched curve and with reference to the contour line maximum deviation of air bag；
The gas to be measured is calculated according to the spherical surface track data with reference to air bag and contour line maximum deviation obtained above
The radius of capsule；
Go out the profile errors of the air bag to be measured according to above-mentioned calculated radius establishment spherical surface track detection Programmable detection.
2. the method according to claim 1, wherein according to the spherical surface track data with reference to air bag and above-mentioned
Obtained contour line maximum deviation calculates the step of radius of the air bag to be measured and includes:
According to calculating formula:
Calculate the radius of the air bag to be measured, wherein R indicates that the radius with reference to air bag, θ indicate the side with reference to air bag
Edge test point deviates the angle of air bag rotation axis, and (Δ h) indicates the contour line between the air bag to be measured and reference spherical surface most to max
Large deviation.
3. the method according to claim 1, wherein the collected data of the laser micrometer are carried out data
Fitting, the step of obtaining matched curve include；
Quadratic polynomial fitting is carried out to the collected data of the laser micrometer, obtains quadratic fit curve.
4. the method according to claim 1, wherein this method further include:
It controls the air bag to be measured and deflects default angle of precession；
The detection light beam of the laser micrometer is irradiated on the use annulus of the air bag to be measured, wherein described to use annulus
Refer to the endless belt-shaped region contacted when air bag polishing workpiece to be measured with workpiece；
The air bag to be measured is driven to be rotated；
In the air bag rotary course to be measured, data acquisition is carried out using annulus to described by the laser micrometer, and
Obtain the runout error using annulus.
5. a kind of air bag profile is in level detecting apparatus, which is characterized in that the device include air bag polishing lathe, laser micrometer and
Data processing terminal, wherein the laser micrometer is installed on the air bag polishing lathe, and air bag to be measured is installed on the gas
In the rotary shaft of capsule burnishing machine；
The laser micrometer is for determining air bag to be measured in the initial state along the minimum point in rotating shaft axis direction, so that institute
The laser feeler for stating laser micrometer is directed at the minimum point, and the position coordinates of the minimum point are that the origin under preset coordinate system is sat
Mark；
The air bag polishing lathe is for driving the air bag to be measured to carry out the movement of spherical surface track, the movement rail of the air bag to be measured
Mark is the spherical surface track comprising the minimum point, and the radius of the spherical surface track is the preset radius with reference to air bag；
The laser micrometer is also used to adopt the outline data of the air bag to be measured during the air pocket motion to be measured
Collection；
The data processing terminal is used to be calculated according to the spherical surface track data with reference to air bag and above-mentioned collected data
The radius of the air bag to be measured out, and then go out to be somebody's turn to do by working out spherical surface track detection Programmable detection according to above-mentioned calculated radius
The profile errors of air bag to be measured；
And wherein, the data processing terminal is according to the spherical surface track data with reference to air bag and above-mentioned collected data
The mode for calculating the radius of the air bag to be measured includes:
The collected data of the laser micrometer are subjected to data fitting, obtain matched curve；
The air bag to be measured is calculated by the matched curve and with reference to the contour line maximum deviation of air bag；
The gas to be measured is calculated according to the spherical surface track data with reference to air bag and contour line maximum deviation obtained above
The radius of capsule.
6. device according to claim 5, which is characterized in that the data processing terminal is according to the ball with reference to air bag
The mode for the radius that face track data and contour line maximum deviation obtained above calculate the air bag to be measured includes:
According to calculating formula:
Calculate the radius of the air bag to be measured, wherein R indicates that the radius with reference to air bag, θ indicate the side with reference to air bag
Edge test point deviates the angle of air bag rotation axis, and (Δ h) indicates the contour line between the air bag to be measured and reference spherical surface most to max
Large deviation.
7. device according to claim 5, which is characterized in that the data processing terminal acquires the laser micrometer
The data arrived carry out data fitting, and the mode for obtaining matched curve includes；
Quadratic polynomial fitting is carried out to the collected data of the laser micrometer, obtains quadratic fit curve.
8. device according to claim 5, which is characterized in that the air bag polishing lathe is also used to control the gas to be measured
Capsule deflects default angle of precession and the air bag to be measured is driven to be rotated；
The laser micrometer is also used in the air bag rotary course to be measured, to being counted using annulus for the air bag to be measured
According to acquisition, the runout error using annulus is obtained, wherein described to refer to air bag polishing workpiece Shi Yugong to be measured using annulus
The endless belt-shaped region of part contact.
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| CN110039448B (en) * | 2019-04-26 | 2021-02-02 | 中国工程物理研究院激光聚变研究中心 | Airbag wear monitoring method and apparatus |
| CN111223176B (en) * | 2019-11-15 | 2022-07-12 | 航天科工空间工程发展有限公司 | High-precision engineering implementation method for spherical air bag with position marker |
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