CN112212798A - Part three-dimensional appearance measuring device - Google Patents

Part three-dimensional appearance measuring device Download PDF

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Publication number
CN112212798A
CN112212798A CN202010818945.XA CN202010818945A CN112212798A CN 112212798 A CN112212798 A CN 112212798A CN 202010818945 A CN202010818945 A CN 202010818945A CN 112212798 A CN112212798 A CN 112212798A
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China
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axis
rotating platform
fixed
clamp
light source
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CN202010818945.XA
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Chinese (zh)
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侯亮
李叶妮
陈云
叶超
徐杨
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Xiamen University
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Xiamen University
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Priority to CN202010818945.XA priority Critical patent/CN112212798A/en
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/24Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/002Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01BMEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00Measuring arrangements characterised by the use of optical techniques
    • G01B11/30Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Length Measuring Devices By Optical Means (AREA)

Abstract

The invention provides a part three-dimensional shape detection device, which comprises: the device comprises a base, an XY linear motion device, a Z-axis motion device, a microscopic vision detection device, an A-axis rotating platform, a C-axis rotating platform, a top light source, a backlight source and a side surface light source; the XY linear motion device and the Z-axis motion device are fixed above the base; the sample is placed on the upper surface of the detection cover of the backlight source; the A-axis rotating platform and the C-axis rotating platform are fixed above the XY linear motion device through connecting pieces; the Z-axis movement device is connected with the microscopic visual detection device in a linkage manner along the Z axis; the A-axis rotating platform is in linkage connection with the XY linear motion device along an X axis and a Y axis, the C-axis rotating platform is in linkage connection with the A-axis rotating platform along the A axis, the backlight source detecting cover is fixed above the C-axis rotating platform in a locking mode through a fastening screw, and the backlight source is placed inside the backlight source detecting cover to provide backlight illumination; the microscopic visual inspection device was oriented toward the sample.

Description

Part three-dimensional appearance measuring device
Technical Field
The invention relates to the technical field of mechanical and electronic manufacturing and measurement, in particular to a three-dimensional shape detection device.
Background
The part surface morphology recovery technology comprises a contact mode and a non-contact mode, and the non-contact measurement technology comprises a scanning tunnel microscope, an atomic force microscope, a confocal microscope, a structured light triangulation method, focusing morphology recovery and the like. The focusing morphology recovery technology adopts a method for extracting the definition of each pixel of a sequence image to realize the extraction of the depth of each pixel point, realizes the reconstruction of the point cloud of an object to be measured by a global three-dimensional point cloud reconstruction method, extracts characteristic points, lines and surfaces and realizes the measurement of three-dimensional geometric dimensions. And (3) recovering the three-dimensional surface appearance through local image acquisition and point cloud extraction, and calculating to obtain the roughness of the surface of the part.
Disclosure of Invention
The invention aims to provide a detection device which is relatively simple in structure, relatively low in price and capable of realizing the recovery of the three-dimensional shape of a part.
In order to solve the technical problems, the technical scheme adopted by the invention is as follows: a three-dimensional appearance detection device for a part comprises: the device comprises a base, an XY linear motion device, a Z-axis motion device, a microscopic vision detection device, an A-axis rotating platform, a C-axis rotating platform, a top light source, a backlight source and a side surface light source;
the XY linear motion device and the Z-axis motion device are fixed above the base; the sample is placed on the upper surface of the detection cover of the backlight source; the A-axis rotating platform and the C-axis rotating platform are fixed above the XY linear motion device through connecting pieces;
the Z-axis movement device is in linkage connection with the microscopic visual detection device along the Z axis; the A-axis rotating platform is in linkage connection with the XY linear motion device along an X axis and a Y axis, the C-axis rotating platform is in linkage connection with the A-axis rotating platform along the A axis, the backlight source detecting cover is fixed above the C-axis rotating platform in a locking mode through a fastening screw, and the backlight source is placed inside the backlight source detecting cover to provide backlight illumination; the micro-vision inspection device is oriented toward the sample.
In a preferred embodiment: the microscopic vision detection device is fixed on a Z-axis object carrying table of the Z-axis movement device through a Z-axis clamp fixing plate;
a Z-axis grating ruler of the Z-axis movement device is arranged between the Z-axis linear motor and the Z-axis guide rail, a first Z-axis limit switch is arranged on the left side of the Z-axis motor, and a buffer block connecting plate is arranged at the top of the Z-axis linear motor;
the top of the gravity balance cylinder is connected with a cylinder top connecting block through a cylinder floating joint, and the cylinder top connecting block is connected to the Z-axis object carrying table; the bottom of the gravity balance cylinder is fixed on the Z-axis bottom plate through a cylinder bottom connecting block.
The cylinder trigeminy piece is fixed on the portal frame.
In a preferred embodiment: the microscopic vision detection device comprises a high-resolution industrial camera and a microscope lens;
the industrial camera with high resolution and the microscope lens are clamped and fixed through a camera clamp, and a fixing plate of the camera clamp is locked on the Z-axis object carrying table through a fastening screw.
In a preferred embodiment: the camera clamp adjusts the distance between the right clamp and the left clamp through the clamp tightness adjusting bolt.
In a preferred embodiment: the A-axis rotating platform is fixed on the X-axis moving unit through the X-axis object carrying platform, the A-axis rotating motor is fixed on the A-axis rotating motor fixing large support through the A-axis rotating motor base, and then the A-axis rotating motor fixing large support is fixed on the X-axis object carrying platform 65 through 4 fastening screws.
In a preferred embodiment: the C-axis rotating platform is fixed on the A-axis rotating motor through a connecting seat at the bottom of the C-axis rotating platform, and the other side of the C-axis rotating platform is connected with a small fixing support through the A-axis rotating motor and locked on the X-axis carrying platform through 4 fastening screws.
In a preferred embodiment: the top light source is a bowl-shaped shadowless light source and is clamped and fixed by a light source clamp;
the connecting frame of the light source clamp is fixed on the light source clamp fixing block through a fastening screw; and an L-shaped left clamp and an L-shaped right clamp of the light source clamp are fixed on the connecting frame.
In a preferred embodiment: the side surface light source wire is fixed on one side surface of the L-shaped connecting plate of the surface light source, and the other side surface of the L-shaped connecting plate of the surface light source wire is fixed on the X-axis object carrying platform.
In a preferred embodiment: the XY linear motion platform comprises an X-axis motion unit and a Y-axis motion unit;
the X-axis movement unit comprises an X-axis motor rotor and an X-axis motor stator, and the feedback of the X-axis position is realized through an X-axis grating ruler reading head and an X-axis grating ruler;
two guide rails of the X-axis movement unit are respectively provided with 2X-axis guide rail sliding blocks; two ends of the two guide rails are respectively provided with a first X-axis side end cover 2111 and a second X-axis side end cover 2112; four limit switches are fixedly arranged on the outer side of one guide rail.
In a preferred embodiment: the Y-axis motion unit comprises a Y-axis motor rotor and a Y-axis motor stator, and the feedback of the Y-axis position is realized through a Y grating ruler reading head and a Y-axis grating ruler;
two guide rails of the Y-axis movement unit are respectively provided with 2Y-axis guide rail sliding blocks; two ends of the two guide rails are respectively provided with a Y-axis side end cover I and a Y-axis side end cover II; three limit switches are fixedly arranged on the outer side of one guide rail
After the technical scheme is adopted, the invention has the following beneficial effects:
the invention designs a three-dimensional shape detection device by taking small parts as research objects, has a simple structure and mainly comprises a microscopic vision three-dimensional shape detection device, a multi-light source device, a sample placing disc, a precise motion control system, a five-axis motion unit and a base. After the control cabinet is started, the X/Y/Z/Z/C motion unit restores to the original position, and the original position is the X/Y axis center, the Z axis top, the A axis origin (the rotating platform of the C axis motion unit is enabled to be parallel to the XY axis) and the C axis origin. The piece to be detected is placed on a sample detection plate, taking an engine fuel nozzle as an example, and the inlet is placed upwards. The method comprises the steps of automatically selecting a corresponding light source on a software interface, taking the conical surface and the depth detection of an inlet of a fuel nozzle of an engine as an example, opening a top bowl-shaped light source, observing a focusing image of the inlet through an image acquisition interface of a software system, recording the position of the starting point of the fuel nozzle by taking an outlet at the bottom of the fuel nozzle as a starting point through a grating ruler, adjusting the aperture and the magnification factor of a microscopic image by 1.5 times, controlling a Z-axis movement unit to find the clearest point at the bottom of the fuel nozzle downwards, and controlling the Z-axis movement unit to move upwards step by step according to. And taking an image every time the fuel nozzle moves for one frame, recording the position coordinates of the three X/Y/Z axes of the point, and storing the position coordinates until the position of the inlet of the top fuel nozzle. Taking an engine fuel nozzle as an example, 86 frame sequence images are shot in total. And obtaining and storing the coordinate values of the point cloud data of 204X 136X, Y and Z three-axis by the image definition of 24X 24 window size of the software. And processing and fitting point cloud data, and identifying and extracting a characteristic curve and a curved surface through a series of image processing algorithms. And finally obtaining the accurate geometric dimension of the fuel nozzle. Similarly, according to the method, the feature extraction of the inlet and the outlet can be obtained by selecting the bottom backlight source, and the feature extraction of the side surface can be obtained by selecting the surface light source of the side surface. Similarly, according to the method and the light source selection, the magnification of the microscope can be increased, the local sequence image acquisition is carried out on the object to be measured, the point cloud data of the surface roughness of the inlet conical surface can be obtained by taking the engine fuel nozzle as an example, and the roughness data of the surface of the object to be measured is obtained through the point cloud data processing and the evaluation standard of the surface roughness. The method is suitable for detecting parts with Ra ranging from 0.5 to 10 um.
Drawings
FIG. 1 is a schematic structural diagram of a three-dimensional shape detection device for a complex micro part according to the present invention;
FIG. 2 is a schematic structural diagram of another view angle of the three-dimensional shape detection device for complex micro parts according to the present invention;
FIG. 3 is a schematic diagram of the lifting device of the Z-axis micro-optical system of FIG. 1;
FIG. 4 is a schematic view of the Z-axis motion device of FIG. 1;
FIG. 5 is a schematic view of the camera fixture of FIG. 3;
FIG. 6 is a schematic view of the A-axis turntable and the C-axis turntable of FIG. 1;
FIG. 7 is a schematic view of the light source and fixture of FIG. 1;
FIG. 8 is a schematic view of the XY linear motion device of FIG. 1;
FIG. 9 is a schematic view of the structure of the X-ray moving device in FIG. 8;
FIG. 10 is a schematic view showing the structure of the Y linear motion device of FIG. 8;
FIG. 11 is a fully focused view of an engine fuel nozzle obtained using the apparatus;
FIG. 12 is a three-dimensional cloud of dots of an engine fuel nozzle obtained using the apparatus;
fig. 13 is a three-dimensional curved view of an engine fuel nozzle obtained by using the device.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings and examples.
The embodiment provides a three-dimensional surface morphology detection method based on a focusing morphology recovery technology and a detection device for the three-dimensional surface morphology of the engine fuel nozzle, aiming at solving the problems that the depth information of an inner hole of the engine fuel nozzle cannot be directly measured or the information of the three-dimensional surface morphology of the inner hole of the fuel nozzle cannot be given in the prior art, and can realize the detection of micro three-dimensional morphology and macro three-dimensional morphology. It should be noted that the present embodiment is exemplified by a fuel nozzle of an engine, and actually, the three-dimensional shape detection device can be used for detecting various parts, and is not limited to the fuel nozzle.
As shown in fig. 1 and 2, the device for detecting the three-dimensional shape of a part comprises a marble base 1, an XY linear motion device 2, a Z-axis motion device 3, a micro-vision detection device 4, an a-axis rotating platform 6, a C-axis rotating platform 7, a top light source 5, a backlight source 8 and a side surface light source 9.
Wherein: the XY linear motion device 2 and the Z-axis motion device 3 are fixed above the marble base 1; the sample is placed on the upper surface of the backlight source detection cover 81 of the backlight source 8, and different light sources are selected according to different detection requirements; the A-axis rotating platform 6 and the C-axis rotating platform 7 are fixed above the XY linear motion device 2 through connecting pieces;
the Z-axis movement device 3 is connected with the microscopic vision detection device 4 in a linkage manner along the Z axis; the A-axis rotating platform 6 is in linkage connection with the XY linear motion device 2 along an X axis and a Y axis, the C-axis rotating platform 7 is in linkage connection with the A-axis rotating platform 6 along the A axis, the backlight source detecting cover 81 is fixed above the C-axis rotating platform in a locking mode through a fastening screw, and the backlight source 8 is placed inside the backlight source detecting cover to provide backlight illumination; the micro-vision inspection device 4 is directed towards the sample.
As shown in fig. 3 to 5, the microscopic visual inspection apparatus 4 is fixed to a Z-axis stage 311 by a fastening screw via a Z-axis clamp fixing plate 42. As shown in fig. 4, which is a key part of the Z-axis moving device 3, the Z-axis grating ruler 31 is installed between the Z-axis linear motor 32 and the Z-axis guide rail 33, the first Z-axis limit switch 36 is installed on the left side of the Z-axis motor 32, and the buffer block connecting plate 37 is installed on the top of the Z-axis linear motor to protect the linear motor. The gravity balance cylinder and the bracket 34 are mainly used for balancing the Z-axis counterweight and preventing the Z-axis from falling down when the power is off, the top of the gravity balance cylinder 343 is connected with a cylinder top connecting block 342 through a cylinder floating joint 341, and the cylinder top connecting block 342 is connected to the Z-axis carrying table 311. The cylinder bottom is fixed on the Z-axis bottom plate through a cylinder bottom connecting block 344. The cylinder gravity balance 343 is connected and fixed to the Z-axis stage 311 by the floating joint 341. The cylinder triple piece 35 of the Z-axis movement device 3 is fixed on a portal frame 54, the first Z-axis limit switch 36 ensures that the Z-axis movement cannot overrun, and a buffer block is arranged on the buffer block connecting plate 37 and can protect the Z-axis movement device.
The micro-vision inspection device 4 comprises a high resolution industrial camera 41 in conjunction with a micro-lens 42. The high-resolution industrial camera 41 and the microscope lens 42 are held and fixed by the camera holder 51, and the fixing plate 512 of the camera holder 51 is fastened to the Z-axis stage 311 by a fastening screw. The camera clamp 51 can adjust the distance between the clamp right clamp 516 and the clamp left clamp 518 by adjusting the clamp slack adjustment bolt 514. An adjusting clamp tightness adjusting bolt 514 is fixed by a clamp bolt support 515, a clamp gasket 517 is fixed on an adjusting clamp right clamp 516 and a clamp left clamp 518 by screws, and a clamp middle connecting block 519 transversely passes through the adjusting clamp right clamp 516 and the clamp left clamp 518 and is clamped on the clamp left side plate 511 and the clamp right side plate 513. The camera holder 51 can hold a camera in the size range of 15mm-45mm with the total height of the camera and lens within 250 mm. The part mainly realizes the accurate control of the camera to carry out equidistant sequence image acquisition.
As shown in fig. 6, the top light source 5 includes a bowl-shaped shadowless light source 525, which is clamped and fixed by the light source clamp 52, the light source clamp connecting frame 522 is fixed on the light source clamp fixing block 521 by a fastening screw, and the L-shaped left clamp 523 and the L-shaped right clamp 524 of the light source clamp are fixed on the light source clamp connecting frame 522. The side surface light source 9 is fixed on the surface light source L-shaped connecting plate 91 through 4 fastening screws, and the backlight source 8 is placed in the backlight source acrylic detection cover 81. The surface light source L-shaped connecting plate 91 is fixed to the X-axis stage 65.
As shown in fig. 7, the a-axis rotating platform 6 is fixed on the X-axis moving unit 21 through the X-axis loading table 65, the a-axis rotating motor 61 is fixed on the a-axis rotating motor fixing large support 63 through the a-axis rotating motor base 62, and then the a-axis rotating motor fixing large support 63 is fixed on the X-axis loading table 65 by 4 fastening screws; the C-axis rotating platform 7 is fixed on the A-axis rotating motor 61 through a C-axis rotating platform bottom connecting seat 71, and the other side is connected with a small fixing bracket 64 through the A-axis rotating motor 61 and is locked on the X-axis carrying platform 65 through 4 fastening screws. The backlight acrylic detection cover 81 is locked and fixed above the C-axis rotating platform 7 through a fastening screw, and the backlight 8 is placed inside the backlight detection cover to provide backlight illumination.
As shown in fig. 8 to 10, the XY linear motion stage includes an X-axis motion unit 21 and a Y-axis motion unit 22, where the X-axis motion unit 21 is a coreless linear motor, and the Y-axis motion unit 22 is a cored linear motor, and has a large attraction force and a large load capacity.
The X-axis movement unit 21 includes an X-axis motor mover 218 and an X-axis motor stator 219, the feedback of the X-axis position is realized through the axis ruler reading head 211 and the X-axis grating ruler 212, and two guide rails 217 of the X-axis movement unit 21 are respectively provided with 2X-axis guide rail sliders 2110. Two ends of the two guide rails 217 are respectively provided with a first X-axis side end cover 2111 and a second X-axis side end cover 2112. And four limit switches are fixedly mounted on the outer side of one guide rail 217, namely a first X-axis limit switch 213, a second X-axis limit switch 214, a third X-axis limit switch 215 and a fourth X-axis limit switch 216, and the limit switches and the gratings realize accurate control of the X-axis position together.
The Y-axis motion unit 22 comprises a Y-axis motor mover 226 and a Y-axis motor stator 2210, and the feedback of the Y-axis position is realized through the Y-axis grating scale 221 and the Y-grating scale reading head. Two guide rails 225 of the Y-axis moving unit 22 are respectively provided with 2Y-axis guide rail sliders 229, and two ends of the two guide rails 225 are respectively provided with a first Y-axis end cap 2211 and a second Y-axis end cap 2212. 3 limit switches are fixedly mounted on the outer side of one guide rail 225, namely a first Y-axis limit switch 222, a second Y-axis limit switch 223 and a third Y-axis limit switch 224, so that planar accurate positioning is achieved together. Four crash cushions 228 are distributed on the side surfaces of the two ends of the guide rail 225, and four Y-axis crash blocks 2210 are distributed in the middle of the side surfaces of the guide rail.
Taking an engine fuel nozzle as an example, the working process of obtaining the three-dimensional shape of the part by using the three-dimensional shape detection device of the part is described as follows:
1) and powering on the control cabinet, opening the software platform, and starting the motion unit to restore each shaft to the initial position. And placing a sample to be detected in the middle of the sample placing disc, controlling a Z-axis linear motor to slowly descend until the bottom of the sample is clearly focused, setting the Z-axis movement distance to be generally between 2 and 10 microns, reading the movement position coordinate by a grating ruler, and recording and storing the position coordinate.
2) And controlling the Z-axis linear motor to move upwards at equal intervals until the top clear focusing position of the sample is reached, stopping the Z-axis movement, storing the equidistant shot image set, and fusing the acquired sequence images to obtain a full focusing image as shown in FIG. 11.
3) The obtained sequence images are partitioned according to 24 × 24 windows, 86 frame sequence images are obtained in total by taking an engine fuel nozzle as an example, the definition of each window position is evaluated on the sequence images, a frame with the best definition is taken as the depth data of the window, 35037 data points can be obtained in total according to the resolution of a camera of 5496 × 3672, and the data points are stored as the original coordinates of the Z axis of the object to be measured, as shown in fig. 12, the extracted three-dimensional depth point cloud graph is obtained.
4) Calibrating the obtained original point cloud data of the X/Y/Z three-axis coordinates to obtain the physical coordinates of an actual detection sample, wherein the number of the collected point cloud data is 153-229 and belongs to dense point clouds, carrying out data preprocessing, simplification and reconstruction on the dense point clouds, and extracting characteristic points, lines and surfaces of the point clouds to obtain accurate geometric dimensions, wherein the three-dimensional point cloud curved surface diagram is shown in figure 13. The size detection of the fuel nozzle of the engine is realized. When the local measurement mode is adopted, the obtained point cloud data can be used for extracting roughness data of the surface topography of the sample.
In conclusion, the three-dimensional shape measuring device for the complex micro part is low in cost and high in measuring precision; one three-dimensional shape detection head (an optical probe and a measuring needle) can be singly selected, and two three-dimensional shape detection heads can also be combined. The three-dimensional shape detection can be carried out on other complex micro parts with cross-scale characteristics, and three-dimensional size information and roughness data are obtained, so that specific data reference is provided for optimization and improvement of a processing method and a process.
The embodiments of the present invention have been described in detail with reference to the accompanying drawings, but the present invention is not limited to the above embodiments, and changes and modifications to the above embodiments are within the scope of the claims of the present invention as long as they are in accordance with the technical spirit of the present invention.

Claims (10)

1. A three-dimensional appearance detection device of a part is characterized by comprising: the device comprises a base, an XY linear motion device, a Z-axis motion device, a microscopic vision detection device, an A-axis rotating platform, a C-axis rotating platform, a top light source, a backlight source and a side surface light source;
the XY linear motion device and the Z-axis motion device are fixed above the base; the sample is placed on the upper surface of the detection cover of the backlight source; the A-axis rotating platform and the C-axis rotating platform are fixed above the XY linear motion device through connecting pieces;
the Z-axis movement device is in linkage connection with the microscopic visual detection device along the Z axis; the A-axis rotating platform is in linkage connection with the XY linear motion device along an X axis and a Y axis, the C-axis rotating platform is in linkage connection with the A-axis rotating platform along the A axis, the backlight source detecting cover is fixed above the C-axis rotating platform in a locking mode through a fastening screw, and the backlight source is placed inside the backlight source detecting cover to provide backlight illumination; the micro-vision inspection device is oriented toward the sample.
2. The apparatus for detecting the three-dimensional shape of a part according to claim 1, wherein: the microscopic vision detection device is fixed on a Z-axis object carrying table of the Z-axis movement device through a Z-axis clamp fixing plate;
a Z-axis grating ruler of the Z-axis movement device is arranged between the Z-axis linear motor and the Z-axis guide rail, a first Z-axis limit switch is arranged on the left side of the Z-axis motor, and a buffer block connecting plate is arranged at the top of the Z-axis linear motor;
the top of the gravity balance cylinder is connected with a cylinder top connecting block through a cylinder floating joint, and the cylinder top connecting block is connected to the Z-axis object carrying table; the bottom of the gravity balance cylinder is fixed on the Z-axis bottom plate through a cylinder bottom connecting block.
The cylinder trigeminy piece is fixed on the portal frame.
3. The apparatus for detecting the three-dimensional shape of a part according to claim 2, wherein: the microscopic vision detection device comprises a high-resolution industrial camera and a microscope lens;
the industrial camera with high resolution and the microscope lens are clamped and fixed through a camera clamp, and a fixing plate of the camera clamp is locked on the Z-axis object carrying table through a fastening screw.
4. The apparatus for detecting the three-dimensional shape of the part according to claim 3, wherein: the camera clamp adjusts the distance between the right clamp and the left clamp through the clamp tightness adjusting bolt.
5. The apparatus for detecting the three-dimensional shape of the part according to claim 4, wherein: the A-axis rotating platform is fixed on the X-axis moving unit through the X-axis object carrying platform, the A-axis rotating motor is fixed on the A-axis rotating motor fixing large support through the A-axis rotating motor base, and then the A-axis rotating motor fixing large support is fixed on the X-axis object carrying platform 65 through 4 fastening screws.
6. The apparatus for detecting the three-dimensional shape of the part according to claim 5, wherein: the C-axis rotating platform is fixed on the A-axis rotating motor through a connecting seat at the bottom of the C-axis rotating platform, and the other side of the C-axis rotating platform is connected with a small fixing support through the A-axis rotating motor and locked on the X-axis carrying platform through 4 fastening screws.
7. The apparatus for detecting the three-dimensional shape of the part according to claim 6, wherein: the top light source is a bowl-shaped shadowless light source and is clamped and fixed by a light source clamp;
the connecting frame of the light source clamp is fixed on the light source clamp fixing block through a fastening screw; and an L-shaped left clamp and an L-shaped right clamp of the light source clamp are fixed on the connecting frame.
8. The apparatus for detecting the three-dimensional shape of a part according to claim 7, wherein: the side surface light source wire is fixed on one side surface of the L-shaped connecting plate of the surface light source, and the other side surface of the L-shaped connecting plate of the surface light source wire is fixed on the X-axis object carrying platform.
9. The apparatus for detecting the three-dimensional shape of the part according to claim 8, wherein: the XY linear motion platform comprises an X-axis motion unit and a Y-axis motion unit;
the X-axis movement unit comprises an X-axis motor rotor and an X-axis motor stator, and the feedback of the X-axis position is realized through an X-axis grating ruler reading head and an X-axis grating ruler;
two guide rails of the X-axis movement unit are respectively provided with 2X-axis guide rail sliding blocks; two ends of the two guide rails are respectively provided with a first X-axis side end cover 2111 and a second X-axis side end cover 2112; four limit switches are fixedly arranged on the outer side of one guide rail.
10. The apparatus for detecting the three-dimensional shape of the part according to claim 9, wherein: the Y-axis motion unit comprises a Y-axis motor rotor and a Y-axis motor stator, and the feedback of the Y-axis position is realized through a Y grating ruler reading head and a Y-axis grating ruler;
two guide rails of the Y-axis movement unit are respectively provided with 2Y-axis guide rail sliding blocks; two ends of the two guide rails are respectively provided with a Y-axis side end cover I and a Y-axis side end cover II; and three limit switches are fixedly arranged on the outer side of one guide rail.
CN202010818945.XA 2020-08-14 2020-08-14 Part three-dimensional appearance measuring device Pending CN112212798A (en)

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CN117310964A (en) * 2023-11-27 2023-12-29 上海隶创科技有限公司 Microscope objective table with built-in adjusting device

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