CN107388985A - The five axle optical measuring devices and method of a kind of revolving parts 3 d surface topography - Google Patents
The five axle optical measuring devices and method of a kind of revolving parts 3 d surface topography Download PDFInfo
- Publication number
- CN107388985A CN107388985A CN201710567977.5A CN201710567977A CN107388985A CN 107388985 A CN107388985 A CN 107388985A CN 201710567977 A CN201710567977 A CN 201710567977A CN 107388985 A CN107388985 A CN 107388985A
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- computer
- clamping device
- revolving parts
- rotating
- servomotor
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Classifications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Length Measuring Devices By Optical Means (AREA)
Abstract
The present invention provides a kind of five axle optical measuring devices and method of revolving parts 3 d surface topography.Device includes charge coupled device ccd, optical microphotograph camera lens, annular holder, embedded toroidal light source, rotating and clamping device, XY mobile platforms, Z axis platform, servomotor, motor driver, motion control card, photoelectric encoder, computer, image pick-up card, computer passes through motion control card controlled motor driver, and then control the rotation of the movement and rotating and clamping device of XYZ platforms on XY directions, the zoom image sequence collected is sent to by computer by charge-coupled device CCD and image pick-up card and carries out image procossing, it can complete once to the IMAQ of revolving parts 3 d surface topography, greatly improve IMAQ speed, just with follow-up image processing work.The present invention can convenient, efficiently carry out the IMAQ of 360 degrees omnidirection to revolving parts, and measurement accuracy is high, and picking rate is fast, and automaticity is high.
Description
Technical field
The present invention relates to a kind of measurement apparatus and method of revolving parts 3 d surface topography, more particularly to a kind of revolution
The five axle optical measuring devices and method of body part 3 d surface topography.
Background technology
The measuring method of object dimensional surface topography is broadly divided into contact and contactless.Contact uses mechanical probes
Body surface is scanned, this method is ripe, and precision is higher, but easy damaged body surface.Non-contact method is a lot, bag
Include：Confocal micro-measurement method, zoom micrometering method, scanning white light interferometric method, laser phase-shifting interferometry etc..Wherein interferometric method pair
Measuring environment requires high, poor robustness, and confocal micro-measurement method has mechanism is complicated, measuring speed is slow, measurement range is small to lack
Point.The optical measuring device of the present invention is to be based on zoom micrometering principle, although this method precision is less than other method, longitudinal direction
Resolution ratio can reach 10 nanometers, and lateral resolution can reach 0.5 micron, but big with measurement range, and speed is fast, can measure
The advantages of high inclination-angle object.Chinese patent CN103267494B discloses a kind of method and device of surface appearance interference measurement,
The patent is using interference micrometering technology, the advantages of without zoom micrometering technology.Chinese patent CN105403170A
Disclose a kind of micro- 3D topography measurements method and device, the patent can realize that object dimensional reconstructs, but the measurement apparatus without
Method carries out comprehensive, multiangular measurement to revolving parts.
At present, most of measurement apparatus based on zoom micrometering principle can only gather the image of object above water
Information, it is impossible to realize, the measurement of multi-angle and 360 degree three-dimensionalreconstructions, especially to revolving parts comprehensive to measured object
Measurement.Five axle optical measuring devices of the invention are simple to operate, can be quick, efficiently, accurately carry out 360 degree to revolving parts
The IMAQ of all-dimensional multi-angle, it is high-precision quick to be carried out to measured object so as to Accurate Reconstruction object dimensional model
Measurement.
The content of the invention
It is an object of the invention to solve the existing deficiency to revolving parts measuring three-dimensional morphology technology, there is provided one kind is returned
The five axle optical measuring devices and method of part 3 d surface topography are turned, can revolving parts be realized with 360 degrees omnidirection is surveyed
Measure and by the integration technology based on zoom micro-image sequence, Three Dimensional Reconfiguration and three-dimensional splicing technology are in a computer
High-resolution two dimension fused images and high-precision three-dimensional model are generated, so as to extract piece surface parameter and accurate dimension, this
The five axle optical measuring devices and method of invention, simple to operate, measurement accuracy is high, and automaticity is high, and measuring speed is fast.
To reach above-mentioned purpose, the present invention uses following technical proposals：
The five axle optical measuring devices and method of a kind of revolving parts 3 d surface topography, it is characterised in that including electricity
Lotus coupled apparatus CCD, optical microphotograph camera lens, embedded toroidal light source, ring gripping device, XY motion platforms, two degrees of freedom
Rotating and clamping device, servomotor, motor driver, motion control card, power module, photoelectric encoder, computer, GPU figures
Shape processor；In the charge coupled device ccd in optical microphotograph camera lens, in the object lens lower section of the optical microphotograph camera lens
Provided with embedded toroidal light source, the microlens are fixed on Z axis platform by ring gripping device and can be with Z axis platforms
Lower movement, the two degrees of freedom rotating and clamping device are fixed on XY motion platforms, and the charge coupled device ccd passes through GPU
Graphics processor is connected with computer, and the computer is connected by motion control card with motor driver, the motor
Driver is connected with servomotor, and the servomotor is connected with XYZ mobile platforms and rotating and clamping device.
The five axle optical measuring devices and method of described revolving parts 3 d surface topography, it is characterised in that described
Servomotor controls the accurate movement of XYZ platforms and the rotation of rotating and clamping device, the ring by ball-screw and gear train
Shape clamping device fixes optical microphotograph camera lens, the photoelectric encoder, servomotor, motor driving by spiral fixator
Device, motion control card, computer collectively constitute reponse system, accurate to control position and angle information, the two degrees of freedom rotation
Clamping device is controlled the rotary module in XY directions by two servomotors respectively, and the X-direction rotary module includes bearing, clamping
Power is transmitted to folder by device, claw, electric rotating machine, gear train, the electric rotating machine on clamping device shell by gear train
Holder, the claw are connected with clamper, clamping revolving parts, and the Y-direction rotary module includes servomotor, gear
Group, supporting plate, the servomotor are connected with electric rotating machine by motor driver with motion control card, then by motion control
Card is connected with computer.
The five axle optical measuring devices and method of a kind of revolving parts 3 d surface topography, it is characterised in that comprising such as
It is lower to use step：
1) revolving parts clamping device and claw are fixed, and optical microphotograph camera lens is fixed by ring gripping device, is passed through
Computer controls XY platforms to move to two degrees of freedom rotating and clamping device fixed on XY platforms below object lens, passes through Z axis platform
Object lens height is adjusted, by the anglec of rotation for adjusting rotating and clamping device XY directions so that measured object is with appropriate position and angle
Degree appears in central region；
2) by adjusting the intensity of illumination of embedded toroidal light source, to obtain optimal illumination condition；
3) computer control Z axis platform moves in the vertical direction, until measured object is close to the depth of field of light microscope, Z axis
Platform stop motion, reference position of the position as measurement, gathers piece image；Since piece image, along Z axis list
Direction controlling Z axis platform moves, and often moves certain step pitch, and computer shoots piece image by charge coupled device ccd, until
The depth of field of the measured object away from light microscope, stop IMAQ, that is, obtain zoom micro-image sequence；
4) repeat 1) to the zoom micro-image sequence that 3) can be obtained under the different visuals field；
5) calculated by the integration technology based on zoom micro-image sequence, Three Dimensional Reconfiguration and three-dimensional splicing technology
High-resolution two dimension fused images and high-precision three-dimensional model are generated in machine, so as to extract piece surface parameter and exact scale
It is very little.
The present invention compared with prior art, has following substantive distinguishing features and advantage：
1) measurement apparatus has five frees degree, and measured object rotates rotating and clamping device by two degrees of freedom and XYZ is moved
Moving platform can realize that XYZ directions move freely and 360 degree rotate and swing up and down, comprehensive so as to realize the big visual field, polygonal
Measurement.
2) image capturing and transmitting can quickly be carried out by CCD, GPU graphics processors and computer, improves measurement effect
Rate.
3) servomotor can accurately be controlled by computer, improves measurement accuracy, and measuring speed is fast, automates journey
Degree is high, can be with the accurate position of the acquisition of convenient and efficient and angle-data.
4) for the device particular for the measurement of revolving parts, suitable drill bit, screw rod etc. has high inclination-angle, spiral
The part on surface.The high-precision three-dimensional model generated by computer is the surface parameter and size of extractable part, is measured
Journey is simple, and cost is low, and automaticity is high.
Brief description of the drawings
Fig. 1 is five axle optical measuring device structural representations of revolving parts 3 d surface topography.
Fig. 2 is two degrees of freedom rotating and clamping device X-direction rotary module structural representation.
Fig. 3 is two degrees of freedom rotating and clamping device Y-direction rotary module structural representation.
Embodiment
Below with reference to a kind of embodiment of the accompanying drawing 1-3 description present invention.
The five axle optical measuring devices and method of a kind of revolving parts 3 d surface topography, including charge coupling device
CCD (14), optical microphotograph camera lens (11), embedded toroidal light source (10), ring gripping device (12), XY motion platforms (8), two
The rotating and clamping device (7,9) of the free degree, servomotor (4,21,27), motor driver (3), motion control card (2), photoelectricity
Encoder (5), computer (1), GPU graphics processors (15)；Light microscope is located in the charge coupled device ccd (14)
In head (11), embedded toroidal light source (10), the microlens are provided with the object lens lower section of the optical microphotograph camera lens (11)
(11) it is fixed on Z axis platform (13) and can be moved up and down with Z axis platform, the two degrees of freedom by ring gripping device (12)
Rotating and clamping device (7,9) is fixed on XY motion platforms (8), and the charge coupled device ccd (14) passes through GPU graphics process
Device (15) is connected with computer (1), and the computer (1) is connected by motion control card (2) with motor driver (3),
The motor driver (3) and servomotor (4,21,27) are connected with electric rotating machine (16), the servomotor (4,21,
27) connected with XYZ mobile platforms (8,13) and rotating and clamping device (7,9).
Wherein, the servomotor (4) controls XYZ platforms (8,13) by ball-screw (6) and gear train (20,26)
Accurate movement and the rotation of rotating and clamping device (7,9), the ring gripping device (12) fix light by spiral fixator
Learn microlens (11), the photoelectric encoder (5), servomotor (4,21,27), motor driver (3), motion control card
(2), computer (1) collectively constitutes reponse system, accurate to control position and angle information, the two degrees of freedom rotating and clamping device
Control the rotary module in XY directions respectively by two servomotors, the X-direction rotary module (7) includes bearing (18), clamping
Device (19), claw (23), electric rotating machine (16), gear train (17,20), the electric rotating machine (16) are located at clamping device shell
(22) on, power is transmitted to by clamper (19) by gear train (17), the claw (23) is connected with clamper (19), clamping
Revolving parts, the servomotor (21) accurately control the anglec of rotation in X-direction, the Y-direction by gear train (20)
Rotary module (9) includes servomotor (27), gear train (26), supporting plate (28), the servomotor (4,21,27) and rotation
Motor (16) is connected by motor driver (3) with motion control card (2), then by motion control card (2) and computer (1) phase
Connection.
A kind of five axle measuring methods of revolving parts 3 d surface topography, are comprised the following steps：
1) revolving parts are fixed by two degrees of freedom rotating and clamping device (7,9), and optical microphotograph camera lens (11) passes through annular
Clamping device (12) is fixed, and XY platforms are controlled by two degrees of freedom rotating and clamping device fixed on XY platforms by computer (1)
(7,9) are moved to below object lens, object lens height are adjusted by Z axis platform (13), by adjusting two degrees of freedom rotating and clamping device XY
The anglec of rotation in direction (7,9) so that measured object appears in central region with appropriate position and angle；
2) by adjusting the intensity of illumination of embedded toroidal light source (10), to obtain optimal illumination condition；
3) computer control Z axis platform (13) moves in the vertical direction, until measured object is close to light microscope (11)
The depth of field, Z axis platform (13) stop motion, reference position of the position as measurement, gather piece image；From piece image
Start, control Z axis platform (13) motion along Z axis one direction, often move certain step pitch, computer passes through charge coupled device ccd
(14) piece image is shot, until the depth of field of the measured object away from light microscope (11), stops IMAQ, that is, obtains zoom and show
Micro- image sequence；
4) repeat 1) to the zoom micro-image sequence that 3) can be obtained under the different visuals field；
5) calculated by the integration technology based on zoom micro-image sequence, Three Dimensional Reconfiguration and three-dimensional splicing technology
High-resolution two dimension fused images and high-precision three-dimensional model are generated in machine, so as to extract piece surface parameter and exact scale
It is very little.
Claims (3)
1. the five axle optical measuring devices and method of a kind of revolving parts 3 d surface topography, it is characterised in that including electric charge
Coupled apparatus CCD, optical microphotograph camera lens, embedded toroidal light source, ring gripping device, XY motion platforms, the rotation of two degrees of freedom
Turn clamping device, servomotor, motor driver, motion control card, power module, photoelectric encoder, computer, IMAQ
Card；It is interior provided with embedding below the object lens of the optical microphotograph camera lens in the charge coupled device ccd in optical microphotograph camera lens
Enter formula annular light source, the microlens are fixed on Z axis platform by ring gripping device and can be with being moved down on Z axis platform
Dynamic, the two degrees of freedom rotating and clamping device is fixed on XY motion platforms, and the charge coupled device ccd passes through IMAQ
Card be connected with computer, the computer is connected by motion control card with motor driver, the motor driver and
Servomotor is connected, and the servomotor is connected with XYZ mobile platforms and rotating and clamping device.
2. the five axle optical measuring devices and method of revolving parts 3 d surface topography according to claim 1, it is special
Sign is, the servomotor controls accurate movement and the rotating and clamping device of XYZ platforms by gear train and ball-screw
Rotate, the ring gripping device fixes optical microphotograph camera lens, the photoelectric encoder, servo electricity by spiral fixator
Machine, motor driver, motion control card, computer collectively constitute reponse system, accurate control position and angle information, and described two
Freedom degree rotating clamping device is controlled the rotary module in XY directions, the X-direction rotary module bag by two servomotors respectively
Include bearing, clamper, claw, electric rotating machine, gear train, the electric rotating machine passes through gear train on clamping device shell
Power is transmitted to clamper, the claw is connected with clamper, clamping revolving parts, and the Y-direction rotary module includes
Servomotor, gear train, supporting plate, the servomotor are connected with electric rotating machine by motor driver with motion control card
Connect, then be connected by motion control card with computer.
3. the five axle optical measuring devices and method of a kind of revolving parts 3 d surface topography, comprising step is used as described below：
1) revolving parts are fixed by two degrees of freedom rotating and clamping device, and optical microphotograph camera lens is fixed by ring gripping device,
Control XY platforms to move to two degrees of freedom rotating and clamping device fixed on XY platforms below object lens by computer, pass through Z axis
Platform regulation object lens height, by the anglec of rotation for adjusting rotating and clamping device XY directions so that measured object is with appropriate position
Central region is appeared in angle；
2) by adjusting the intensity of illumination of embedded toroidal light source, to obtain optimal illumination condition；
3) computer control Z axis platform moves in the vertical direction, until measured object is close to the depth of field of light microscope, Z axis platform
Stop motion, reference position of the position as measurement, gathers piece image；Since piece image, along Z axis one direction
The motion of Z axis platform is controlled, often moves certain step pitch, computer shoots piece image by charge coupled device ccd, until tested
The depth of field of the thing away from light microscope, stop IMAQ, that is, obtain zoom image sequence；
4) repeat 1) to the zoom image sequence that 3) can be obtained under the different visuals field；
5) by the integration technology based on zoom micro-image sequence, Three Dimensional Reconfiguration and three-dimensional splicing technology are in a computer
High-resolution two dimension fused images and high-precision three-dimensional model are generated, so as to extract piece surface parameter and accurate dimension.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710567977.5A CN107388985A (en) | 2017-07-11 | 2017-07-11 | The five axle optical measuring devices and method of a kind of revolving parts 3 d surface topography |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201710567977.5A CN107388985A (en) | 2017-07-11 | 2017-07-11 | The five axle optical measuring devices and method of a kind of revolving parts 3 d surface topography |
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| Publication Number | Publication Date |
|---|---|
| CN107388985A true CN107388985A (en) | 2017-11-24 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN201710567977.5A Pending CN107388985A (en) | 2017-07-11 | 2017-07-11 | The five axle optical measuring devices and method of a kind of revolving parts 3 d surface topography |
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Cited By (12)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109001901A (en) * | 2018-07-13 | 2018-12-14 | 上海大学 | A kind of multi-angle microlens holder device based on industrial machinery arm |
| CN109724989A (en) * | 2019-02-28 | 2019-05-07 | 广东银宝山新科技有限公司 | Full-automatic optical detection device |
| CN110006360A (en) * | 2019-03-08 | 2019-07-12 | 北京理工大学 | Confocal laser nuclear fusion pellet geometric parameter comprehensive measuring method and device |
| CN110044293A (en) * | 2018-01-17 | 2019-07-23 | 深圳中科飞测科技有限公司 | A kind of three-dimensional reconfiguration system and three-dimensional reconstruction method |
| CN110132164A (en) * | 2019-03-25 | 2019-08-16 | 爱维迅自动化科技（昆山）有限公司 | A kind of high-precision 3D laser profile device based on data acquisition |
| CN111141214A (en) * | 2020-01-10 | 2020-05-12 | 福建农林大学 | Hammer detection device and method |
| CN112212798A (en) * | 2020-08-14 | 2021-01-12 | 厦门大学 | Part three-dimensional appearance measuring device |
| CN113432551A (en) * | 2021-06-25 | 2021-09-24 | 哈尔滨工业大学 | Micro part three-dimensional shape measuring method based on multi-axis precision motion mechanism |
| CN113687505A (en) * | 2020-05-18 | 2021-11-23 | 浙江大学 | Self-built zoom microscopic image shooting system and method |
| CN114222044A (en) * | 2021-12-13 | 2022-03-22 | 东北农业大学 | Comprehensive near-ground high-throughput scale type image acquisition platform for complex farmland |
| CN117010427A (en) * | 2023-10-07 | 2023-11-07 | 季华实验室 | Cylindrical revolution body surface identification code acquisition device |
| CN117142046A (en) * | 2023-03-17 | 2023-12-01 | 荣耀终端有限公司 | Control method, overturning station, motion control assembly and track detection system |
-
2017
- 2017-07-11 CN CN201710567977.5A patent/CN107388985A/en active Pending
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN110044293A (en) * | 2018-01-17 | 2019-07-23 | 深圳中科飞测科技有限公司 | A kind of three-dimensional reconfiguration system and three-dimensional reconstruction method |
| US11448498B2 (en) | 2018-01-17 | 2022-09-20 | Skyverse Limited | Three-dimensional reconstruction system and three-dimensional reconstruction method |
| CN109001901A (en) * | 2018-07-13 | 2018-12-14 | 上海大学 | A kind of multi-angle microlens holder device based on industrial machinery arm |
| CN109724989A (en) * | 2019-02-28 | 2019-05-07 | 广东银宝山新科技有限公司 | Full-automatic optical detection device |
| CN110006360A (en) * | 2019-03-08 | 2019-07-12 | 北京理工大学 | Confocal laser nuclear fusion pellet geometric parameter comprehensive measuring method and device |
| CN110132164A (en) * | 2019-03-25 | 2019-08-16 | 爱维迅自动化科技（昆山）有限公司 | A kind of high-precision 3D laser profile device based on data acquisition |
| CN111141214A (en) * | 2020-01-10 | 2020-05-12 | 福建农林大学 | Hammer detection device and method |
| CN113687505A (en) * | 2020-05-18 | 2021-11-23 | 浙江大学 | Self-built zoom microscopic image shooting system and method |
| CN112212798A (en) * | 2020-08-14 | 2021-01-12 | 厦门大学 | Part three-dimensional appearance measuring device |
| CN113432551A (en) * | 2021-06-25 | 2021-09-24 | 哈尔滨工业大学 | Micro part three-dimensional shape measuring method based on multi-axis precision motion mechanism |
| CN114222044A (en) * | 2021-12-13 | 2022-03-22 | 东北农业大学 | Comprehensive near-ground high-throughput scale type image acquisition platform for complex farmland |
| CN117142046A (en) * | 2023-03-17 | 2023-12-01 | 荣耀终端有限公司 | Control method, overturning station, motion control assembly and track detection system |
| CN117010427A (en) * | 2023-10-07 | 2023-11-07 | 季华实验室 | Cylindrical revolution body surface identification code acquisition device |
| CN117010427B (en) * | 2023-10-07 | 2024-03-19 | 季华实验室 | Cylindrical revolution body surface identification code acquisition device |
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