CN103245293B - Adopt the device and method of laser rotary mirror scanning survey annular wheel pattern - Google Patents
Adopt the device and method of laser rotary mirror scanning survey annular wheel pattern Download PDFInfo
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- CN103245293B CN103245293B CN201310173261.9A CN201310173261A CN103245293B CN 103245293 B CN103245293 B CN 103245293B CN 201310173261 A CN201310173261 A CN 201310173261A CN 103245293 B CN103245293 B CN 103245293B
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- governor motion
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Abstract
The device and method of laser rotary mirror scanning survey annular wheel pattern is adopted to belong to technical field of laser detection.There is coordinates coupling error in prior art, reduces gear measurement precision.In the device of the present invention, the rotating shaft upper end in angular displacement rotary system is connected with mirror back surface, at rotating shaft lower end established angle displacement transducer; Z-direction governor motion one side joint angular displacement rotary system, another side joint Z-direction grating scale; Coaxial governor motion one side joint axis light grid chi, another side joint displacement governor motion; Displacement governor motion one side joint displacement grating scale, another side joint laser displacement sensor; Measure optical axis parallel with Z-direction; Angular displacement sensor, Z-direction grating scale, laser displacement sensor are connected with Data collection and precessing system respectively.The method of the present invention reads the annular peak of spot motion track and the difference in height h of minimum point from the circular scale line ring chi inwall, the deviation δ measuring optical axis and shaft axis is obtained by formula δ=h/ (2tan α), regulates coaxial governor motion until eliminate deviation δ.
Description
Technical field
The present invention relates to a kind of device and method adopting laser rotary mirror scanning survey annular wheel pattern, the high-acruracy survey of different-diameter annular wheel can be realized, belong to technical field of laser detection.
Background technology
A kind of Gear by Laser measuring technique relevant with the present invention adopts noncontact point reflection formula laser measuring head to realize gear measurement by scanning gear measured surface, and measuring speed is fast, precision is high.Such as, the patent No. is that one section of Chinese patent literature of ZL201120255971.2 discloses one " laser detection device for gear parameters ".The program adopts laser displacement sensor as noncontact point reflection formula laser measuring head, measure the shape data in the multiple cross section of tested gear, angular displacement data together with correspondence are transferred to Data collection and precessing system in the lump, this system by the tested gear pattern of these data reconstructions, and then completes gear measurement according to coordinate method.Because measuring laser beam is by the tested gear of scanning after catoptron reflection in this scenario, therefore, the program can measure annular wheel.But the program does not guarantee the rotation of measuring laser beam through angular displacement rotary system, as after laser displacement sensor moves along slide unit, the rotation of measuring laser beam possibility fleet angle displacement rotating system.Therefore, there will be coordinates coupling error, thus reduce gear measurement precision.
Summary of the invention
In order to ensure the measuring laser beam accurate rotation through angular displacement rotary system all the time, avoid occurring coordinates coupling error, improve gear measurement precision, we have invented a kind of device and method adopting laser rotary mirror scanning survey annular wheel pattern, the program can make the deviation between the rotation of measuring laser beam and angular displacement rotary system be controlled in tolerance interval, thus effectively avoids occurring coordinates coupling error.
The device of the employing laser rotary mirror scanning survey annular wheel pattern of the present invention is characterized in that, catoptron 1 is supported by angular displacement rotary system 2, as shown in Figure 1, rotating shaft 3 upper end in angular displacement rotary system 2 is connected with catoptron 1 back side, at rotating shaft 3 lower end established angle displacement transducer 4, rotating shaft 3 axis is parallel with Z-direction, and described Z-direction is surving coordinate system Z-direction; Z-direction governor motion 5 one side joint angular displacement rotary system 2, another side joint Z-direction grating scale 6; The adjustment direction of coaxial governor motion 7 is vertical with Z-direction, coaxial governor motion 7 one side joint axis light grid chi 8, another side joint displacement governor motion 9; Displacement governor motion 9 one side joint displacement grating scale 10, another side joint laser displacement sensor 11; Laser displacement sensor 11 measures light exit towards catoptron 1 front, measures optical axis parallel with Z-direction; Angular displacement sensor 4, Z-direction grating scale 6, laser displacement sensor 11 are connected with Data collection and precessing system respectively.
The method of the employing laser rotary mirror scanning survey annular wheel pattern of the present invention is characterized in that, measure station reference field vertical with Z-direction, described Z-direction is surving coordinate system Z-direction, ring chi 12 is placed in measurement station, and as shown in Figure 2, ring chi 12 axis is parallel with Z-direction, catoptron 1 is arranged in be measured station and is in ring chi 12, the front of catoptron 1 is reflecting surface, and reflecting surface is known with the angle α measuring station reference field, as shown in Figure 3, catoptron 1 rotating 360 degrees angle is driven by angular displacement rotary system 2, the measurement light sent by laser displacement sensor 11 is reflected by catoptron 1, ring chi 12 inwall forms ring-shaped light spot movement locus, the described peak of ring-shaped light spot movement locus and the difference in height h of minimum point is read from the circular scale line ring chi 12 inwall, the deviation δ measuring optical axis and rotating shaft 3 axis is obtained by formula δ=h/ (2tan α), by coaxial governor motion 7 by the adjustment direction adjustment laser displacement sensor 11 of displacement governor motion 9 along coaxial governor motion 7, observe coaxial grating scale 8 simultaneously, until eliminate deviation δ, by annular wheel 13 original position Exchange ring chi 12 to be measured, as shown in Figure 1, drive catoptron 1 to rotate by angular displacement rotary system 2, regulate angular displacement rotary system 2 by Z-direction governor motion 5 along Z-direction, convert the scanning survey sectional position of annular wheel 13 to be measured, the scanning survey to each cross section of annular wheel 13 to be measured is realized by laser displacement sensor 11 and catoptron 1, respectively by angular displacement sensor 4, Z-direction grating scale 6, laser displacement sensor 11 scanning survey angular displacement bearing data, scanning survey sectional position data, scanning survey displacement of the lines radius data are transferred to Data collection and precessing system, and then complete measurement.
Its technique effect of the present invention is, catoptron 1 is placed in the middle of annular wheel 13 to be measured, drive it to rotate by angular displacement rotary system 2, reflection measurement light also scans each cross section of annular wheel 13 to be measured, and this feature makes checking measurements optical axis and rotating shaft 3 axis whether coaxially become possibility.Before measuring, adopt ring chi 12 and be placed in measurement station, catoptron 1 reflects the measurement light from laser displacement sensor 11 and rotates, the deviation δ measuring optical axis and rotating shaft 3 axis can be detected easily, make laser displacement sensor 11 along the adjustment direction translation of coaxial governor motion 7 by coaxial governor motion 7 via displacement governor motion 9, observe coaxial grating scale 8, until translational movement equals described deviation δ, realization measurement optical axis is coaxial with rotating shaft 3 axis, namely measures optical axis coaxial with the rotation of angular displacement rotary system.In the topography measurement of annular wheel to be measured 13 afterwards, there will not be coordinates coupling error, thus improve gear measurement precision.
In addition, when α value is determined, δ and h is proportional, scale-up factor is 1/ (2tan α), make 2tan α >1, thus having 90 ° of > α >26.57 °, the deviation δ measuring optical axis and rotating shaft 3 axis is exaggerated, and this contributes to improving measuring accuracy.
Accompanying drawing explanation
Fig. 1 is its structure of device and the Test Cycle schematic diagram of the employing laser rotary mirror scanning survey annular wheel pattern of the present invention.Fig. 2 is the method employing ring chi checking measurements optical axis of the employing laser rotary mirror scanning survey annular wheel pattern of the present invention and the deviation δ operating mode schematic diagram of shaft axis, and this figure is simultaneously as Figure of abstract.Fig. 3 measures the deviation δ forming process of optical axis and shaft axis and each meaning of parameters schematic diagram.
Embodiment
Its embodiment of device of the employing laser rotary mirror scanning survey annular wheel pattern of the present invention is as follows.
Catoptron 1 is supported by angular displacement rotary system 2, and as shown in Figure 1, rotating shaft 3 upper end in angular displacement rotary system 2 is connected with catoptron 1 back side, at rotating shaft 3 lower end established angle displacement transducer 4, rotating shaft 3 axis is parallel with Z-direction, and described Z-direction is surving coordinate system Z-direction, as vertical direction.Z-direction governor motion 5 one side joint angular displacement rotary system 2, another side joint Z-direction grating scale 6.The adjustment direction of coaxial governor motion 7 is vertical with Z-direction, as horizontal direction, and coaxial governor motion 7 one side joint axis light grid chi 8, another side joint displacement governor motion 9.Displacement governor motion 9 one side joint displacement grating scale 10, another side joint laser displacement sensor 11, the adjustment direction of displacement governor motion 9 is parallel with Z-direction, as vertical direction; Displacement governor motion 9 has two effects, one is regulate the position of laser displacement sensor 11 in Z-direction before measuring, with the measurement of applicable different-diameter gear, two is in measuring process, make that laser displacement sensor 11 is synchronous with catoptron 1 to be moved along Z-direction, completes the scanning survey to each cross section of annular wheel 13 to be measured.In the device adopting laser rotary mirror scanning survey annular wheel pattern, also have a Workpiece carrier platform 14, as shown in Figure 1 and Figure 2, the table top of Workpiece carrier platform 14 is plane, and this plane is vertical with Z-direction; Have circular hole at Workpiece carrier platform 14 center, rotating shaft 3 is passed from this circular hole; The radius of this circular hole is greater than catoptron 1 radius of gyration.Laser displacement sensor 11 measures light exit towards catoptron 1 front, measures optical axis parallel with Z-direction.Described Z-direction governor motion 5, coaxial governor motion 7, displacement governor motion 9 are screw-nut body.Angular displacement sensor 4, Z-direction grating scale 6, laser displacement sensor 11 are connected with Data collection and precessing system respectively.
Its embodiment of method of the employing laser rotary mirror scanning survey annular wheel pattern of the present invention is as follows.
Measure station reference field vertical with Z-direction, described Z-direction is surving coordinate system Z-direction.Using Workpiece carrier platform 14 table top as measurement station reference field.Ring chi 12 is placed in measurement station, as being placed on Workpiece carrier platform 14 table top, as shown in Figure 2, ring chi 12 axis is parallel with Z-direction, catoptron 1 is arranged in be measured station and is in ring chi 12, the front of catoptron 1 is reflecting surface, and reflecting surface is known with the angle α measuring station reference field, as shown in Figure 3.Catoptron 1 rotating 360 degrees angle is driven by angular displacement rotary system 2, the measurement light sent by laser displacement sensor 11 is reflected by catoptron 1, ring chi 12 inwall forms ring-shaped light spot movement locus, the described peak of ring-shaped light spot movement locus and the difference in height h of minimum point is read from the circular scale line ring chi 10 inwall, the deviation δ measuring optical axis and rotating shaft 3 axis is obtained by formula δ=h/ (2tan α), by coaxial governor motion 7 by the adjustment direction adjustment laser displacement sensor 11 of displacement governor motion 9 along coaxial governor motion 7, observe coaxial grating scale 8 simultaneously, until eliminate deviation δ.By annular wheel 13 original position Exchange ring chi 12 to be measured, as shown in Figure 1, the distance of laser displacement sensor 11 and catoptron 1 is adjusted by displacement governor motion 9, to adapt to the measurement of different-diameter annular wheel 13 to be measured.Drive catoptron 1 to rotate by angular displacement rotary system 2, regulate angular displacement rotary system 2 by Z-direction governor motion 5 along Z-direction, convert the scanning survey sectional position of annular wheel 13 to be measured; Meanwhile, displacement governor motion 9 and Z-direction governor motion 5 adjusted in concert, make that laser displacement sensor 11 is synchronous with catoptron 1 to be moved along Z-direction, realizes the scanning survey to each cross section of annular wheel 13 to be measured.Respectively by angular displacement sensor 4, Z-direction grating scale 6, laser displacement sensor 11 scanning survey angular displacement bearing data, scanning survey sectional position data, scanning survey displacement of the lines radius data are transferred to Data collection and precessing system, and then complete measurement.
Claims (8)
1. one kind adopts the device of laser rotary mirror scanning survey annular wheel pattern, it is characterized in that, catoptron (1) is supported by angular displacement rotary system (2), rotating shaft (3) upper end in angular displacement rotary system (2) is connected with catoptron (1) back side, in rotating shaft (3) lower end established angle displacement transducer (4), rotating shaft (3) axis is parallel with Z-direction, and described Z-direction is surving coordinate system Z-direction; Z-direction governor motion (5) one side joint angular displacement rotary system (2), another side joint Z-direction grating scale (6); The adjustment direction of coaxial governor motion (7) is vertical with Z-direction, coaxial governor motion (7) side joint axis light grid chi (8), another side joint displacement governor motion (9); Displacement governor motion (9) one side joint displacement grating scale (10), another side joint laser displacement sensor (11); Laser displacement sensor (11) measures light exit towards catoptron (1) front, measures optical axis parallel with Z-direction; Angular displacement sensor (4), Z-direction grating scale (6), laser displacement sensor (11) are connected with Data collection and precessing system respectively.
2. the device of employing laser rotary mirror scanning survey annular wheel pattern according to claim 1, it is characterized in that, displacement governor motion (9) has two effects, one is regulate laser displacement sensor (11) position in Z-direction before measuring, with the measurement of applicable different-diameter gear, two is in measuring process, make that laser displacement sensor (11) is synchronous with catoptron 1 to be moved along Z-direction, completes the scanning survey to annular wheel to be measured (13) each cross section.
3. the device of employing laser rotary mirror scanning survey annular wheel pattern according to claim 1, it is characterized in that, a Workpiece carrier platform (14) is also had in the device adopting laser rotary mirror scanning survey annular wheel pattern, the table top of Workpiece carrier platform (14) is plane, and this plane is vertical with Z-direction; Have circular hole at Workpiece carrier platform (14) center, rotating shaft (3) is passed from this circular hole; The radius of this circular hole is greater than catoptron (1) radius of gyration.
4. the device of employing laser rotary mirror scanning survey annular wheel pattern according to claim 1, it is characterized in that, described Z-direction governor motion (5), coaxial governor motion (7), displacement governor motion (9) are screw-nut body.
5. one kind with the method for the employing laser rotary mirror scanning survey annular wheel pattern adopting the matched with devices of laser rotary mirror scanning survey annular wheel pattern to implement described in claim 1, it is characterized in that, measure station reference field vertical with Z-direction, described Z-direction is surving coordinate system Z-direction, ring chi (12) is placed in measurement station, ring chi (12) axis is parallel with Z-direction, catoptron (1) is arranged in be measured station and is in ring chi (12), the front of catoptron (1) is reflecting surface, and reflecting surface is known with the angle α measuring station reference field, catoptron (1) rotating 360 degrees angle is driven by angular displacement rotary system (2), the measurement light sent by laser displacement sensor (11) is reflected by catoptron (1), ring chi (12) inwall forms ring-shaped light spot movement locus, the described peak of ring-shaped light spot movement locus and the difference in height h of minimum point is read from the circular scale line ring chi (12) inwall, the deviation δ measuring optical axis and rotating shaft (3) axis is obtained by formula δ=h/ (2tan α), by coaxial governor motion (7) by adjustment direction adjustment laser displacement sensor (11) of displacement governor motion (9) along coaxial governor motion (7), observe coaxial grating scale (8) simultaneously, until eliminate deviation δ, by annular wheel to be measured (13) original position Exchange ring chi (12), catoptron (1) is driven to rotate by angular displacement rotary system (2), regulate angular displacement rotary system (2) by Z-direction governor motion (5) along Z-direction, convert the scanning survey sectional position of annular wheel to be measured (13), the scanning survey to annular wheel to be measured (13) each cross section is realized by laser displacement sensor (11) and catoptron (1), respectively by angular displacement sensor (4), Z-direction grating scale (6), laser displacement sensor (11) scanning survey angular displacement bearing data, scanning survey sectional position data, scanning survey displacement of the lines radius data are transferred to Data collection and precessing system, and then complete measurement.
6. the method for employing laser rotary mirror scanning survey annular wheel pattern according to claim 5, is characterized in that, using Workpiece carrier platform (14) table top as measurement station reference field; Ring chi (12) is placed on described Workpiece carrier platform (14) table top.
7. the method for employing laser rotary mirror scanning survey annular wheel pattern according to claim 5, it is characterized in that, by the distance of displacement governor motion (9) adjustment laser displacement sensor (11) with catoptron (1), to adapt to the measurement of different-diameter annular wheel to be measured (13).
8. the method for employing laser rotary mirror scanning survey annular wheel pattern according to claim 5, it is characterized in that, displacement governor motion (9) and Z-direction governor motion (5) adjusted in concert, make that laser displacement sensor (11) is synchronous with catoptron (1) to be moved along Z-direction, realize the scanning survey to annular wheel to be measured (13) each cross section.
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| CN201310173261.9A CN103245293B (en) | 2013-05-13 | 2013-05-13 | Adopt the device and method of laser rotary mirror scanning survey annular wheel pattern |
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| CN201310173261.9A CN103245293B (en) | 2013-05-13 | 2013-05-13 | Adopt the device and method of laser rotary mirror scanning survey annular wheel pattern |
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| CN103245293B true CN103245293B (en) | 2015-09-30 |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN107036538B (en) * | 2015-01-16 | 2019-03-15 | 江苏泰克曼传动设备有限公司 | A kind of offset monitoring method for transmission gear |
| CN105043288A (en) * | 2015-05-04 | 2015-11-11 | 天津科技大学 | Machine vision-guided laser gear chamfering contour measurement apparatus and measurement method thereof |
| WO2021051488A1 (en) * | 2019-11-01 | 2021-03-25 | 深圳市速腾聚创科技有限公司 | Angular displacement measurement apparatus, lidar, and angle adjustment method |
| CN114383540A (en) * | 2022-01-04 | 2022-04-22 | 成都汇蓉国科微系统技术有限公司 | Rotary table measuring device and rotary table measuring method |
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| CN201897470U (en) * | 2010-11-16 | 2011-07-13 | 陕西秦川机械发展股份有限公司 | Large gear measuring instrument |
| CN202149755U (en) * | 2011-07-20 | 2012-02-22 | 唐大春 | Laser detection device for gear parameters |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| JP2003148932A (en) * | 2001-11-19 | 2003-05-21 | Dainippon Printing Co Ltd | Non-contact two-dimensional shape measuring method and web wrinkle shape measuring apparatus |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN201897470U (en) * | 2010-11-16 | 2011-07-13 | 陕西秦川机械发展股份有限公司 | Large gear measuring instrument |
| CN202149755U (en) * | 2011-07-20 | 2012-02-22 | 唐大春 | Laser detection device for gear parameters |
Non-Patent Citations (1)
| Title |
|---|
| 用于齿轮齿面形状误差测量的光学系统设计与仿真;王磊杰 方素平;《东莞理工学院学报》;20130228;第20卷(第1期);79-82 * |
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