CN103017690A - Method for measuring straightness of super-long guide rail - Google Patents
Method for measuring straightness of super-long guide rail Download PDFInfo
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Abstract
Description
技术领域 technical field
本发明涉及一种测量导轨尤其是超长导轨直线度的方法。The invention relates to a method for measuring the straightness of a guide rail, especially an extra-long guide rail.
背景技术 Background technique
随着工业技术的不断发展,超长度导轨正越来越多的在多个领域被应用,如机床设备、传送装置、铁路轨道等。而直线度是导轨最重要的技术指标,其精度的高低直接关系着设备的准确性、可靠性和稳定性。With the continuous development of industrial technology, super-length guide rails are being used in more and more fields, such as machine tools, transmission devices, railway tracks, etc. The straightness is the most important technical index of the guide rail, and its precision is directly related to the accuracy, reliability and stability of the equipment.
目前,测试导轨直线度的方法很多,一般有三种方法,分别为水平仪测量法、自准直仪测量法和激光干涉仪测量法。At present, there are many methods for testing the straightness of guide rails. Generally, there are three methods, namely level measurement method, autocollimator measurement method and laser interferometer measurement method.
水平仪测量法是一种传统的直线度测量手段,它操作简单、使用方便、成本较低。但是其测量精度较低,一般只能达到20μm/m。用水平仪测量法,需要图解法求解导轨直线度误差,数据的采集和分析很容易出错, 该方法需要手动采集导轨上某些固定采样点坐标, 因此对于超长导轨直线度的测量实现起来非常困难。The level meter measurement method is a traditional straightness measurement method, which is simple to operate, convenient to use, and low in cost. But its measurement accuracy is low, generally only up to 20μm/m. Using the level meter measurement method requires a graphical method to solve the straightness error of the guide rail. Data collection and analysis are prone to errors. This method needs to manually collect the coordinates of some fixed sampling points on the guide rail, so it is very difficult to measure the straightness of the ultra-long guide rail. .
自准直仪测量法的精度相对水平仪测量法有所提高, 一般为5μm/m,但是还难于满足高精度导轨直线度的测试要求。此外,由于测试光线在空气中并非绝对准直, 测量范围越大, 其偏差就越大,因此对于超长导轨的测量,其测量误差就很大。The accuracy of the autocollimator measurement method has been improved compared with the level measurement method, generally 5 μm/m, but it is still difficult to meet the test requirements for the straightness of high-precision guide rails. In addition, since the test light is not absolutely collimated in the air, the larger the measurement range, the greater the deviation. Therefore, for the measurement of the ultra-long guide rail, the measurement error is very large.
激光干涉仪测量法测量距离大、测试精度较高,测量精度一般可到达0.4μm/m。但是对于超长导轨的测量,由于光路过长,空气扰动、振动等一系列因素将会对测量产生很大的影响,且该方法的数据处理和运算等比较复杂,因此很难高精度的完成对超长导轨直线度的测量。The laser interferometer measurement method has a large measurement distance and high measurement accuracy, and the measurement accuracy can generally reach 0.4 μm/m. However, for the measurement of ultra-long guide rails, due to the long optical path, a series of factors such as air disturbance and vibration will have a great impact on the measurement, and the data processing and calculation of this method are relatively complicated, so it is difficult to complete with high precision. Measurement of the straightness of extra-long guide rails.
发明内容 Contents of the invention
本发明为解决现有测量方法测量精度低、误差大,并且存在数据处理和运算比较复杂的问题,提供一种测量超长导轨直线度的方法。The invention provides a method for measuring the straightness of an ultra-long guide rail in order to solve the problems of low measurement accuracy, large error, and complex data processing and calculation in the existing measurement method.
一种测量超长导轨直线度的方法,该方法由以下步骤实现:A method for measuring the straightness of an ultra-long guide rail, the method is realized by the following steps:
步骤一、在超长导轨上规划N个测试采样点,所述N个测试采样点的间距相等,所述N为正整数;Step 1, planning N test sampling points on the super-long guide rail, the intervals of the N test sampling points are equal, and the N is a positive integer;
步骤二、将球形固定反射器吸附在反射器基座上,反射器基座吸附在导轨滑座上,所述导轨滑座沿超长导轨的长度方向放置在步骤一所述的超长导轨的第一个测试采样点处;
步骤三、调整激光跟踪仪,使激光跟踪仪出射的光束经球形固定反射器后返回激光跟踪仪,所述激光跟踪仪获得第一个测试采样点的数据信息;Step 3, adjust the laser tracker so that the light beam emitted by the laser tracker returns to the laser tracker after passing through the spherical fixed reflector, and the laser tracker obtains the data information of the first test sampling point;
步骤四、移动导轨滑座至下一个测试采样点,激光跟踪仪依次采集每个测试采样点的数据信息;实现对N个测试采样点的数据采集;Step 4. Move the guide rail slide to the next test sampling point, and the laser tracker collects the data information of each test sampling point in turn; realize the data collection of N test sampling points;
步骤五、采用最小二乘拟合算法对步骤四采集的N个测试采样点的数据信息进行直线度计算,获得超长导轨的直线度。Step 5, using the least squares fitting algorithm to calculate the straightness of the data information of the N test sampling points collected in step 4, to obtain the straightness of the super-long guide rail.
本发明的有益效果:本发明通过扩充激光干涉仪的现有功能,能够准确的实现对超长导轨直线度的测量;本发明所述的方法数据分析和实验操作简便、测试时间短、数据处理简单、测试成本低以及测试效率很高。Beneficial effects of the present invention: the present invention can accurately realize the measurement of the straightness of the ultra-long guide rail by expanding the existing functions of the laser interferometer; the method described in the present invention is simple and convenient in data analysis and experimental operation, short in test time and fast in data processing. Simple, low test cost and high test efficiency.
附图说明 Description of drawings
图1为本发明所述的一种测量超长导轨直线度方法中装置的结构示意图;Fig. 1 is a structural representation of the device in a method for measuring the straightness of a superlong guide rail according to the present invention;
图2为本发明所述的一种测量超长导轨直线度方法的流程图;Fig. 2 is a flow chart of a method for measuring the straightness of a superlong guide rail according to the present invention;
图3为本发明所述的一种测量超长导轨直线度方法的效果图。Fig. 3 is an effect diagram of a method for measuring the straightness of an ultra-long guide rail according to the present invention.
图中,1、激光跟踪仪,2、超长导轨,3、球形固定反射器,4、反射器基座,5、导轨滑座。In the figure, 1. Laser tracker, 2. Super long guide rail, 3. Spherical fixed reflector, 4. Reflector base, 5. Guide rail sliding seat.
具体实施方式 Detailed ways
具体实施方式一、结合图1至图3说明本实施方式,一种测量超长导轨直线度方法,其中,该方法涉及的装置主要包括激光跟踪仪1、超长导轨2、球形固定反射器3、反射器基座4和导轨滑座5;该方法的具体过程为:DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS 1. This embodiment is described in conjunction with FIGS. 1 to 3 , a method for measuring the straightness of an ultra-long guide rail, wherein the device involved in the method mainly includes a laser tracker 1 , an
一、规划测试点;按照等间隔,在超长导轨2上规划若干测试采样点;1. Plan test points; plan several test sampling points on the super-long
二、调节光路;将反射器基座4(有磁性)吸附在导轨滑座5上,将球形固定反射器3吸附在反射器基座4上,由于是磁性吸附,三者之间的连接非常平稳,连接完毕后,调节光路,使激光跟踪仪1对准第一个测试点,由于导轨滑座5与超长导轨面是平行的,因此,测量不同位置导轨滑座面上的点的起伏就反映导轨的直线度。2. Adjust the optical path; attach the reflector base 4 (magnetic) to the guide rail slide seat 5, and attach the spherical fixed reflector 3 to the reflector base 4. Due to the magnetic adsorption, the connection between the three is very After the connection is complete, adjust the optical path so that the laser tracker 1 is aligned with the first test point. Since the guide rail slide 5 is parallel to the super-long guide rail surface, measure the fluctuation of points on the guide rail slide surface at different positions It reflects the straightness of the guide rail.
三、测试点测量;用激光跟踪仪1对准测试第一个测试点,记录并采集到第一个测试点的空间位置坐标(X1,Y1,Z1),通过数控机构等间隔调整移动导轨滑座5,激光跟踪仪1将会一直跟踪球形固定反射器3,从而可以测定并采集到其它测试点的空间位置坐标(X2,Y2,Z2)、(X3,Y3,Z3)…(XN,YN,ZN)(假设共有N个测试点)。3. Test point measurement: Align and test the first test point with the laser tracker 1, record and collect the spatial position coordinates (X 1 , Y 1 , Z 1 ) of the first test point, and adjust them at equal intervals through the numerical control mechanism Move the guide rail slide 5, the laser tracker 1 will always track the spherical fixed reflector 3, so that the spatial position coordinates (X 2 , Y 2 , Z 2 ), (X 3 , Y 3 ) of other test points can be measured and collected ,Z 3 )…(X N ,Y N ,Z N ) (assuming there are N test points in total).
四、数据判定;判定数据是否准确可靠,若测量数据坏点较多,则重新调节光路,对测试点进行再次测量和数据采集;如数据准确可靠,则进行直线度计算。其中,所述的数据坏点具体指,设定阈值,由于阈值与所测量的超长导轨2本身的精度有关,对于高精度超长导轨的测量,阈值一般为10μm,对于中低精度超长导轨的测量,阈值一般为50μm。4. Data judgment: judge whether the data is accurate and reliable, if there are many bad points in the measurement data, re-adjust the optical path, re-measure the test points and collect data; if the data is accurate and reliable, calculate the straightness. Wherein, the data bad point specifically refers to setting a threshold value. Since the threshold value is related to the accuracy of the measured
五、直线度计算;N个测试点是空间直线上的多个离散点,对这些点进行最小二乘拟合即可得到一条空间直线,结合图3,这是一条包容实际线的最小圆柱面的直线,圆柱的直径值D即为空间直线的直线度,即为导轨的直线度,这是导轨沿两个方向综合的直线度。5. Calculation of straightness; N test points are multiple discrete points on the spatial straight line, and a spatial straight line can be obtained by performing least square fitting on these points. Combined with Figure 3, this is a minimum cylindrical surface containing the actual line The straight line, the diameter value D of the cylinder is the straightness of the space straight line, that is, the straightness of the guide rail, which is the comprehensive straightness of the guide rail along two directions.
六、直线度分离;将测量得到的离散数据点分别投影到导轨的两个基面上结合图1中,可以选择导轨滑座5表面(基面1)和与其相互垂直的另一个平面(基面2),在两个基面上即可得到一系列离散点,在各自基面上分别对这些离散点进行直线拟合,即可得到两条直线的直线度,即为导轨分别沿两个方向上的直线度。6. Separation of straightness; project the discrete data points obtained from the measurement onto the two base surfaces of the guide rail respectively. Combined with Figure 1, you can choose the surface of the guide rail slide 5 (base surface 1) and another plane (base surface 1) perpendicular to it. Surface 2), a series of discrete points can be obtained on the two base surfaces, and the straight line fitting of these discrete points on the respective base surfaces can be obtained to obtain the straightness of the two straight lines, that is, the guide rails along the two Straightness in direction.
本实施方式所述的激光跟踪仪1是一种高精度、大容量的便携式三维坐标测量设备,激光跟踪仪1发射出激光束,光束经球形固定反射器3回到激光跟踪仪1。通过水平和垂直两个旋转角编码器和一个基于激光的距离测量系统,激光跟踪仪1能够确定球形固定反射器3目标的位置。球形固定反射器3(SMR)是激光跟踪仪1的目标,所述球形固定反射器3包含三个相互垂直的、定位到SMR中心点的反射镜。激光跟踪仪1实时的跟踪、定位SMR的位置,所有打入到SMR的光束与入射光平行偏移的方式返回。激光跟踪仪1内位置传感器探测到反射的光束的位置并驱动伺服马达使跟踪仪始终瞄准SMR的中心位置。这个闭环系统每秒更新1000次,并使得跟踪头跟踪靶标进行移动。激光跟踪仪1通两个高精度的旋转角编码器测量水平转角和垂直转角,水平的或方位角编码器位于柱型激光跟踪仪的底部,它的分辨率为0.02弧度·秒(5.5×10-6度)。垂直的或顶点轴编码器定位于激光跟踪仪1的跟踪头的垂直顶部(跟踪头内部),且具有相同的分辨率。位置感应探测器(PSD)同样部分的测量目标的角度位置。激光跟踪仪1从角度编码器和PSD上取得信息后通过运动模式传递信息出去。这个模式包含两个转动的和两个平移的参数,这可以消除激光跟踪仪1的系统误差。The laser tracker 1 described in this embodiment is a high-precision, large-capacity portable three-dimensional coordinate measuring device. The laser tracker 1 emits a laser beam, and the beam returns to the laser tracker 1 through a spherical fixed reflector 3 . With two rotary encoders, horizontal and vertical, and a laser-based distance measurement system, the laser tracker 1 is able to determine the position of the spherical fixed reflector 3 target. The spherical fixed reflector 3 (SMR) is the target of the laser tracker 1, said spherical fixed reflector 3 comprising three mutually perpendicular mirrors positioned to the center point of the SMR. The laser tracker 1 tracks and locates the position of the SMR in real time, and all the light beams entering the SMR return in a parallel offset manner with the incident light. The position sensor in the laser tracker 1 detects the position of the reflected light beam and drives the servo motor so that the tracker is always aimed at the center of the SMR. This closed-loop system updates 1,000 times per second and allows the tracking head to track the target as it moves. The laser tracker uses two high-precision rotary encoders to measure the horizontal and vertical angles. The horizontal or azimuth encoder is located at the bottom of the cylindrical laser tracker. Its resolution is 0.02 arc seconds (5.5×10 -6 degrees). The vertical or apex axis encoders are positioned on the vertical top of the tracking head (inside the tracking head) of the laser tracker 1 and have the same resolution. The Position Sensitive Detector (PSD) also measures the angular position of the part of the target. The laser tracker 1 obtains information from the angle encoder and PSD and transmits the information through the motion mode. This model contains two rotational and two translational parameters, which can eliminate the systematic error of the laser tracker 1 .
本实施方式所述的激光跟踪仪1一般用来测量物体之间的相对位置关系,但是可以拓宽其功能,实现对超长导轨直线度的测量。由于使用激光技术,其测量范围可达 230 英尺(70 米),激光跟踪仪1的高精度选项-干涉仪(IFM)的最大允许误差为2μm+L·0.4μm/m,其中L为激光跟踪仪与超长导轨之间的距离。因此,本实施方式利用激光跟踪仪1测量超长导轨2的长度将可以达到70m,检测精度为0.4μm/m。The laser tracker 1 described in this embodiment is generally used to measure the relative positional relationship between objects, but its function can be broadened to realize the measurement of the straightness of super-long guide rails. Due to the use of laser technology, its measurement range can reach 230 feet (70 meters), and the high-precision option of laser tracker 1 - interferometer (IFM) has a maximum allowable error of 2μm+L 0.4μm/m, where L is laser tracking The distance between the instrument and the super long guide rail. Therefore, in this embodiment, the length of the
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