CN105444673A - Device and method for determining center of optical element according to rotating translation absolute detection method - Google Patents
Device and method for determining center of optical element according to rotating translation absolute detection method Download PDFInfo
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- CN105444673A CN105444673A CN201510962258.4A CN201510962258A CN105444673A CN 105444673 A CN105444673 A CN 105444673A CN 201510962258 A CN201510962258 A CN 201510962258A CN 105444673 A CN105444673 A CN 105444673A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
Abstract
The invention discloses a device and a method for determining a center of an optical element according to the rotating translation absolute detection method, and relates to the high precision spherical surface shape detection processing field. The above mentioned method is characterized in that four mark points are provided by taking an optical element excircle as a center; stripes of an interferometer can be adjusted to be zero stripes by adjusting the optical element; the optical element can be detected, when a rotating bench is arranged on the 0-degree position, the pixel position coordinates of four mark points can be recorded to acquire the pixel position coordinate (X1,Y1) of the pixel position of the center of the optical element; when the rotating bench is arranged on the 0-degree position, the 90-degree position, the 180-degree position, and the 270-degree position, the optical element can be detected, and the pixel position coordinate of any mark point can be recorded, and then the pixel position coordinate (X2,Y2) of the center of the detected area of the optical element can be acquired; the pixel of the excircle center of the optical element deviated from the center of the detected area is (X1-X2,Y1-Y2), and the adjusting mechanism can be used to translate the optical element concentrically in the X direction and the Y direction, and then the center of the detected area of the optical element can be superposed with the center of the optical element. The use is fast, the structure and the process are simple, the costs are low, and the precision is high.
Description
Technical field
The invention belongs to high precision sphere surface testing processing technique field, be specifically related to a kind ofly rotate the device and method determining center of optical element in translation absolute sense method.
Background technology
At present, the requirement of various optical system to optical component surface shape precision is more and more higher, and precision and the efficiency of Optical element manufacturing depend on detection technique to a great extent, and therefore high precision test has great meaning for Optical element manufacturing.
Rotating translation absolute sense method is improve a kind of conventional method of optical component surface shape accuracy of detection.1999, the Nikon company of Japan reports optical spherical surface absolute sense know-why and experimental provision based on rotating translation, calendar year 2001, the CarlZeiss company of Germany uses this technology to achieve the absolute sense of optical spherical surface on homemade striking rope type interferometer, accuracy of detection reaches 0.15nmRMS (BerndD, GuntherS.Interferometrictestingofopticalsurfacesatitscur rentlimit [J], Optik, 2001,112 (9): 392-398).Compared to existing pair of sphere absolute sense method, rotate the accurate judgement of translation absolute sense method without the need to opal position, and the advantage of short interference cavity measurement can be embodied when detecting convex spherical, and this rotation translation absolute sense method can be used for the absolute sense of optical flat, versatility is stronger.
When utilizing rotation translation absolute sense method detecting optical element, because tested optical element is sphere, the center of sphere is not unique, therefore the region generally detected not is the central area of optical element, the region of such processing is also inevitable is not the central area of optical element, and this is that optical element is below debug and created many adverse influences.
Summary of the invention
In order to solve the central area that the region detected existed when utilizing and rotating translation absolute sense method detecting optical element is not optical element, thus optical element is debug to the problem producing many adverse effects, the invention provides and a kind ofly rotate the device and method determining center of optical element in translation absolute sense method.
The technical scheme that the present invention adopts for technical solution problem is as follows:
Determine the device of center of optical element in rotation translation absolute sense method of the present invention, comprising: interferometer, the transmission sphere wave system system being arranged on interferometer lower end, adjusting mechanism, the turntable be arranged on adjusting mechanism, the detection support platform be arranged on turntable, the tested optical element be arranged in detection support platform; Make tested optical element be positioned at the detection position of different angles by revolving-turret, adjust the inclination of tested optical element, bias and out of focus by adjusting mechanism, thus make tested optical element interference fringe under the detection position of different angles be zero striped.
Further, the light that described interferometer sends forms desirable spherical wave and incides tested optical element surface after transmission sphere wave system system, and this desirable spherical wave is reflected back in interferometer by tested optical element, and forms interference fringe on the CCD of interferometer.
Further, described adjusting mechanism is electronic or manual five degree of freedom adjusting mechanism.
Further, described tested optical element is convex spherical mirror or concave spherical mirror.
Present invention also offers and a kind ofly rotate the method determining center of optical element in translation absolute sense method, comprise the following steps:
Step one, centered by tested optical element cylindrical, be 4 gauge points A, B, C, D at tested optical element surface;
Step 2, to be arranged on by tested optical element and to detect in support platform, by the locus regulating adjusting mechanism to adjust tested optical element, make turntable in rotary course, the interference fringe on the CCD of interferometer is zero striped;
Step 3, detect tested optical element when turntable is in 0 degree of position, record now 4 gauge point A, B, C, D location of pixels coordinate (X on the CCD of interferometer
a, Y
a), (X
b, Y
b), (X
c, Y
c), (X
d, Y
d), obtain the location of pixels coordinate (X1, Y1) of tested optical element cylindrical center on the CCD of interferometer, X1=(X
a+ X
b+ X
c+ X
d)/4, X2=(Y
a+ Y
b+ Y
c+ Y
d)/4;
Step 4, revolving-turret, detect tested optical element 0 degree, 90 degree, 180 degree, 270 degree 4 angular position respectively, records the location of pixels coordinate (X of 4 arbitrary gauge points of angular position on the CCD of interferometer
a1, Y
a1), (X
a2, Y
a2), (X
a3, Y
a3), (X
a4, Y
a4), obtain the location of pixels coordinate (X2, Y2) of the tested regional center of tested optical element on the CCD of interferometer, X2=(X
a1+ X
a2+ X
a3+ X
a4)/4, X2=(Y
a1+ Y
a2+ Y
a3+ Y
a4)/4;
The pixel count that the regional center that is detected step 5, tested optical element cylindrical center and tested optical element departs from is (X1-X2, Y1-Y2), adjusting mechanism is utilized to distinguish the tested optical element of homocentric translation in the x-direction and the z-direction, make the location of pixels coordinate (X2 of the tested regional center of tested optical element on the CCD of interferometer, Y2) with the location of pixels coordinate (X1 of tested optical element cylindrical center on the CCD of interferometer, Y1) overlap, now the tested regional center of tested optical element is the central area of tested optical element.
Further, in step one, three coordinate machines are utilized centered by tested optical element cylindrical, to be 4 gauge points A, B, C, D at tested optical element surface.
The invention has the beneficial effects as follows: the present invention proposes and a kind ofly rotate the apparatus and method determining tested center of optical element region in translation absolute sense process.The principle of the invention is as follows: utilize three coordinate machines centered by element cylindrical, to do 4 gauge points at tested optical element surface; Be arranged on by tested optical element and rotate on translation absolute sense device, regulate the locus of tested optical element, make to rotate in translation absolute sense device intermediate station rotary course, the interferometer striped on interferometer CCD remains zero striped; Detect tested optical element when turntable is in 0 degree of position, record the location of pixels coordinate of 4 gauge points now on interferometer CCD, the location of pixels coordinate (X1, Y1) of tested optical element cylindrical center on interferometer CCD; Revolving-turret, tested optical element is detected in 4 angular position such as 0 degree, 90 degree, 180 degree and 270 degree, record the location of pixels coordinate of arbitrary gauge point on interferometer CCD under 4 angle positions, utilize these 4 location of pixels coordinates can obtain the location of pixels coordinate (X2, Y2) of the tested regional center of tested optical element on interferometer CCD; The pixel count that the regional center that is detected tested optical element cylindrical center and tested optical element departs from is (X1-X2, Y1-Y2), utilize adjusting mechanism at X, the tested optical element of the homocentric translation of difference in Y-direction, tested optical element is made to be detected regional center (X2, Y2) overlap with tested center of optical element (X1, Y1), now the surveyed area of tested optical element is the central area of tested optical element.
The method of center of optical element is determined, tested center of optical element region can be determined that while absolute sense optical component surface shape there is quick, simple, precision advantages of higher in rotation translation absolute sense method of the present invention.
Determine the device of center of optical element in rotation translation absolute sense method of the present invention, structure is simple, cost is low, accuracy of detection is high.
Determine that the device and method of center of optical element is for determining the central area of tested optical element in rotation translation absolute sense method of the present invention, the processing of guiding optics element.
Accompanying drawing explanation
Fig. 1 is the apparatus structure schematic diagram determining center of optical element in rotation translation absolute sense method of the present invention.
Fig. 2 is tested optical element surface gauge point position view.
In figure: 1, interferometer, 2, transmission sphere wave system system, 3, tested optical element, 4, detect support platform, 5, turntable, 6, adjusting mechanism.
Embodiment
Below in conjunction with accompanying drawing, the present invention is described in further detail.
As shown in Figure 1, in rotation translation absolute sense method of the present invention, determine the device of center of optical element, mainly comprise interferometer 1, transmission sphere wave system system 2, tested optical element 3, detect support platform 4, turntable 5 and adjusting mechanism 6.Transmission sphere wave system system 2 belongs to a part for interferometer 1, be installed on the lower end of interferometer 1, tested optical element 3 is arranged on and detects in support platform 4, detecting support platform 4 is arranged on turntable 5 together with tested optical element 3, turntable 5 is arranged on adjusting mechanism 6, adjusting mechanism 6 is electronic or manual five degree of freedom adjusting mechanism, turntable 5 makes it to be positioned at the detection position of different angles for rotating tested optical element 3, adjusting mechanism 6 is for adjusting the inclination of tested optical element 3, bias and out of focus, make tested optical element 3 under the angle position of different turntables 5, interference fringe is zero striped.
The light that interferometer 1 sends forms the surface that desirable spherical wave incides tested optical element 3 after transmission sphere wave system system 2, and this desirable spherical wave is reflected back in interferometer 1 by tested optical element 3, and forms interference fringe on the CCD of interferometer 1.
Determine the method for center of optical element in rotation translation absolute sense method of the present invention, concrete steps are as follows:
Step one, three coordinate machines are utilized centered by tested optical element 3 cylindrical, to do 4 gauge points on tested optical element 3 surface, as shown in Figure 2,4 gauge points are respectively A, B, C, D, these 4 gauge points are positioned at XOY plane, some C be positioned at 0 °, some D be positioned at 90 °, some A be positioned at 180 °, some D be positioned at 270 °.
Step 2, tested optical element 3 is arranged on rotates on translation absolute sense device, being arranged on by tested optical element 3 detects in support platform 4, the locus of tested optical element 3 is regulated by adjustment adjusting mechanism 6, make to rotate in translation absolute sense device intermediate station 5 rotary course, the interference fringe on the CCD of interferometer 1 remains zero striped.
Step 3, detect tested optical element 3 when turntable 5 is in 0 degree of position, record 4 gauge points A, B, C, D location of pixels coordinate (X now on the CCD of interferometer 1
a, Y
a), (X
b, Y
b), (X
c, Y
c), (X
d, Y
d), location of pixels coordinate (X1, Y1) of tested optical element 3 cylindrical center on the CCD of interferometer 1 can be obtained, wherein X1=(X
a+ X
b+ X
c+ X
d)/4, X2=(Y
a+ Y
b+ Y
c+ Y
d)/4.
Step 4, revolving-turret 5, detect tested optical element 3 at 0 degree, 90 degree, 180 degree and 270 degree of 4 angular position respectively, record the location of pixels coordinate (X of 4 arbitrary gauge points of angular position (such as gauge point A) on the CCD of interferometer 1
a1, Y
a1), (X
a2, Y
a2), (X
a3, Y
a3), (X
a4, Y
a4), utilize these 4 location of pixels coordinates can obtain location of pixels coordinate (X2, Y2) of the tested regional center of tested optical element 3 on the CCD of interferometer 1, wherein X2=(X
a1+ X
a2+ X
a3+ X
a4)/4, X2=(Y
a1+ Y
a2+ Y
a3+ Y
a4)/4.
Step 5, the pixel count that the regional center that is detected tested optical element 3 cylindrical center and tested optical element 3 departs from is (X1-X2, Y1-Y2), adjusting mechanism 6 is utilized to distinguish the tested optical element 3 of homocentric translation in the x-direction and the z-direction, make the location of pixels coordinate (X2 of the tested regional center of tested optical element 3 on the CCD of interferometer 1, Y2) with the location of pixels coordinate (X1 of tested optical element 3 cylindrical center on the CCD of interferometer 1, Y1) overlap, now the tested regional center of tested optical element 3 is the central area of tested optical element 3.
In the present invention, tested optical element 3 is convex spherical mirror or concave spherical mirror, can have center pit or not have center pit.
Claims (6)
1. rotate the device determining center of optical element in translation absolute sense method, it is characterized in that, comprising: interferometer (1), be arranged on interferometer (1) lower end transmission sphere wave system system (2), adjusting mechanism (6), the turntable (5) be arranged on adjusting mechanism (6), the detection support platform (4) be arranged on turntable (5), be arranged on the tested optical element (3) detected on support platform (4); Tested optical element (3) is made to be positioned at the detection position of different angles by revolving-turret (5), adjust the inclination of tested optical element (3), bias and out of focus by adjusting mechanism (6), thus make tested optical element (3) interference fringe under the detection position of different angles be zero striped.
2. in rotation translation absolute sense method according to claim 1, determine the device of center of optical element, it is characterized in that, the light that described interferometer (1) sends forms desirable spherical wave and incides tested optical element (3) surface after transmission sphere wave system system (2), this desirable spherical wave is reflected back in interferometer (1) by tested optical element (3), and forms interference fringe on the CCD of interferometer (1).
3. determine the device of center of optical element in rotation translation absolute sense method according to claim 1, it is characterized in that, described adjusting mechanism (6) is electronic or manual five degree of freedom adjusting mechanism.
4. determine the device of center of optical element in rotation translation absolute sense method according to claim 1, it is characterized in that, described tested optical element (3) is convex spherical mirror or concave spherical mirror.
5. determine the method for center of optical element in rotation translation absolute sense method as claimed in claim 1, it is characterized in that, comprise the following steps:
Step one, tested optical element (3) surface centered by tested optical element (3) cylindrical, be 4 gauge points A, B, C, D;
Step 2, tested optical element (3) is arranged on and detects in support platform (4), by the locus regulating adjusting mechanism (6) to adjust tested optical element (3), make turntable (5) in rotary course, the interference fringe on the CCD of interferometer (1) is zero striped;
Step 3, detect tested optical element (3) when turntable (5) is in 0 degree of position, record now 4 gauge point A, B, C, D location of pixels coordinate (X on the CCD of interferometer (1)
a, Y
a), (X
b, Y
b), (X
c, Y
c), (X
d, Y
d), obtain location of pixels coordinate (X1, Y1) of tested optical element (3) cylindrical center on the CCD of interferometer (1), X1=(X
a+ X
b+ X
c+ X
d)/4, X2=(Y
a+ Y
b+ Y
c+ Y
d)/4;
Step 4, revolving-turret (5), detect tested optical element (3) 0 degree, 90 degree, 180 degree, 270 degree 4 angular position respectively, record the location of pixels coordinate (X of 4 arbitrary gauge points of angular position on the CCD of interferometer (1)
a1, Y
a1), (X
a2, Y
a2), (X
a3, Y
a3), (X
a4, Y
a4), obtain location of pixels coordinate (X2, Y2) of tested optical element (3) tested regional center on the CCD of interferometer (1), X2=(X
a1+ X
a2+ X
a3+ X
a4)/4, X2=(Y
a1+ Y
a2+ Y
a3+ Y
a4)/4;
Step 5, the pixel count that tested optical element (3) cylindrical center and the detected regional center of tested optical element (3) depart from is (X1-X2, Y1-Y2), adjusting mechanism (6) is utilized to distinguish the tested optical element of homocentric translation (3) in the x-direction and the z-direction, make the location of pixels coordinate (X2 of tested optical element (3) tested regional center on the CCD of interferometer (1), Y2) with the location of pixels coordinate (X1 of tested optical element (3) cylindrical center on the CCD of interferometer (1), Y1) overlap, now the tested regional center of tested optical element (3) is the central area of tested optical element (3).
6. in rotation translation absolute sense method according to claim 5, determine the method for center of optical element, it is characterized in that, in step one, three coordinate machines are utilized centered by tested optical element (3) cylindrical, to be 4 gauge points A, B, C, D on tested optical element (3) surface.
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| CN108801178A (en) * | 2017-05-04 | 2018-11-13 | 北京理工大学 | Differential confocal auto-collimation center is partially and curvature radius measurement method and device |
| CN110045477A (en) * | 2019-04-16 | 2019-07-23 | 中国科学院光电技术研究所 | A kind of optical element automatic centering method based on Phase-Resolved Analysis |
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