CN102944194B - High-accuracy high-order aspherical lens eccentricity measuring system and method - Google Patents
High-accuracy high-order aspherical lens eccentricity measuring system and method Download PDFInfo
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- CN102944194B CN102944194B CN201210475654.0A CN201210475654A CN102944194B CN 102944194 B CN102944194 B CN 102944194B CN 201210475654 A CN201210475654 A CN 201210475654A CN 102944194 B CN102944194 B CN 102944194B
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Abstract
The invention provides a high-accuracy high-order aspherical lens eccentricity measuring system and method. The measuring system comprises a phase shift interferometer, an interferometer adjusting support, a measured aspherical lens, a lens support, a lens adjusting support, a centering device, a precision rotating shaft system, a centering device adjusting support, a linear guide way and a computer system. The measured aspherical lens is fixed on the lens support which is fixed on the lens adjusting support, and the lens adjusting support is placed on the linear guide way. The centering device is fixed on the precision rotating shaft system which is installed on the centering device adjusting support and placed on the linear guide way. The phase shift interferometer is placed on the interferometer adjusting support and fixed in the middle of the linear guide way, aspheric facial contour data on the measured aspherical lens are measured by using the phase shift interferometer, data on a plurality of concentric and circular ring bands are extracted from the facial contour data, aspheric peak positions are calculated according to a maximum value, a minimum value and corresponding phase information of facial contour data of each ring band, and according eccentricity of the aspherical lens can be calculated.
Description
Technical field
The invention belongs to advanced optics manufacture and detection field, relate to Systems for optical inspection, particularly a kind of high precision high order aspheric surface lens eccentricity Analytical system and method.
Background technology
High order aspheric surface lens obtain in fields such as imaging system, optical projection system, space cameras and apply more and more widely.Compare traditional spherical lens, the bias of non-spherical lens just immobilizes after lens machine, and do not eliminate by the process of debuging in later stage, therefore detect the high-precision quantitative of non-spherical lens bias and just seem particularly important, it is constant non-spherical lens whether one of important parameter reaching design objective.
Existing non-spherical lens misalignment measurement method is mainly divided into contact type measurement and non-contact measurement two class.Wherein contact type measurement has the measurement of uniform thickness instrument, tangent displacement sensor measurement etc., can only be used for the measurement in lens processing early stage, have the danger destroying minute surface, and measuring accuracy is low in the lens processing later stage; Non-contact measurement has the measurement of light beam transmission measurement, beam reflection, non-contact displacement sensor measurement etc., and it can be used for the misalignment measurement in lens processing later stage.
Light beam transmissometry (Hank H.Karow.Fabrication Methods for Precision Optics [M], Wiley, 540, 2004.) and beam reflection mensuration (Hang Lingxia, Chinese patent " CN 201096611Y ") measuring accuracy be all limited to the spot size of light beam and the spatial resolution of detector, non-contact displacement sensor mensuration (spring Tian Feng, Chinese patent " CN1420339A ") measuring accuracy be mainly limited to the measuring accuracy of displacement transducer, current full accuracy be TRIOPTICS company adopt Spectral Confocal displacement transducer, its displacement measurement precision is 50nm, its precision the high order aspheric surface that aspherical degree is smaller is met the demands not enough.
Summary of the invention
The technical problem to be solved in the present invention: the deficiency overcoming existing non-spherical lens misalignment measurement technology, propose a kind of based on interferometer with to the eccentric Analytical system of the high precision high order aspheric surface of heart device and method, this system is used and is found out reference axis to heart device, and the advantage utilizing interferometer high-precision surface shape to measure is to measure the bias of non-spherical lens.This system can solve the misalignment measurement problem of the smaller high order aspheric surface lens of aspherical degree effectively.Present system structure is simple, testing cost is low.
The technical solution adopted for the present invention to solve the technical problems: a kind of high precision high order aspheric surface lens eccentricity Analytical system, this Analytical system comprise phase shifting interferometer, interferometer adjustment rack, tested non-spherical lens, lens carrier, lens adjustment rack, to heart device, precision rotation axle system, to heart device adjustment rack, line slideway and computer system.Wherein computer system is connected with to heart device with phase shifting interferometer, phase shifting interferometer to be placed on interferometer adjustment rack and is fixed in the middle of line slideway, be arranged on precision rotation axle to heart device to fasten, precision rotation axle system is fixed on heart device adjustment rack, is placed on line slideway also can be free to slide heart device adjustment rack.First by observing the image of spherical center of phase shifting interferometer first lens to heart device, and by regulating interferometer adjustment rack and making the optical axis of phase shifting interferometer to heart device adjustment rack and be parallel to line slideway to the light shaft coaxle of heart device.Then tested non-spherical lens is arranged on lens carrier, lens carrier is fixed on lens adjustment rack, lens adjustment rack is placed on line slideway and also can be free to slide, when ensure phase shifting interferometer and motionless to the optical axis of the heart device, by observing the paraxial image of spherical center of two optical surfaces of tested non-spherical lens to heart device, and by the paraxial image of spherical center of two optical surfaces that regulates lens adjustment racks to make tested non-spherical lens all on the optical axis to heart device.Finally utilize phase shifting interferometer to measure the aspheric surface data of tested non-spherical lens, by the data processing software installed on the computer systems, measured data are processed, obtain the eccentricity information of tested non-spherical lens.
Wherein, adopt phase shifting interferometer and heart device completed jointly to the measurement of aspheric surface bias.
Wherein, tested non-spherical lens and heart device is all placed on two line slideways and can move freely.
Wherein, can be connected with computing machine to heart device to show in real time hearty cord fruit, also can not be connected direct eye-observation with computing machine to heart device.
If the aspherical degree of tested non-spherical lens is excessive in this detection system, the face shape information of multiple endless belt can not can be measured when obtaining whole graphic data by one-shot measurement.
This detection system can not only survey one side for aspheric lens, also can survey two sides and be aspheric lens.When measuring two sides and being aspheric lens, upset lens are needed to measure.
This detection system is in measuring process, and when interferometer is when measuring aspheric shape, measured lens can only, along slide, can not regulate translation or inclination in order to avoid reference axis departs from.
A kind of high precision high order aspheric surface lens eccentricity Analytical system
High precision high order aspheric surface lens eccentricity method for measuring according to above-mentioned high precision high order aspheric surface lens eccentricity Analytical system is provided in addition, comprises the steps:
Step 1, adjusts heart device and interferometer, make both optical axis coincidence and parallel with two line slideways;
Step 2, puts into tested non-spherical lens, and adjusts on the optical axis to heart device by the image of spherical center of non-spherical lens two optical surface;
Step 3, by aspheric graphic data on the tested non-spherical lens of interferometer measurement;
Step 4, the face graphic data using the eccentric data processing software process of aspheric surface to record, obtains tested aspheric eccentricity information.
The present invention's advantage is compared with prior art:
(1), use interferometer to measure aspheric shape information in system of the present invention, instead of traditional displacement transducer, the precision of interferometer measurement face shape information is higher.
(2), use interferometer one-shot measurement to obtain in system of the present invention face shape information that whole aspheric shape information or repetitive measurement obtain multiple endless belt, and the not just face shape information of a certain endless belt in aspheric surface, its quantity of information measuring gained is larger, and result of calculation is more reliable.
(3), system of the present invention measure aspheric shape information time measured lens keep motionless, do not need rotate, therefore can avoid the measuring error that rotating mechanism causes.
Accompanying drawing explanation
Fig. 1 is System's composition schematic diagram;
Fig. 2 is to the schematic diagram of the heart to heart device and interferometer;
Fig. 3 is measuring system flow chart of data processing figure.
In figure: 1-phase shifting interferometer, 2-interferometer adjustment rack, 3-tested non-spherical lens, 4-lens carrier, 5-lens adjustment rack, 6-to heart device, 7-precision rotation axle system, 8-to heart device adjustment rack, 9 and 10-line slideway, 11-computer system.
Embodiment
The present invention is introduced in detail below in conjunction with accompanying drawing and specific implementation method.
See Fig. 1, be a kind of high precision high order aspheric surface lens eccentricity Analytical system shown in figure, this system comprise phase shifting interferometer 1, interferometer adjustment rack 2, tested non-spherical lens 3, lens carrier 4, lens adjustment rack 5, to heart device 6, precision rotation axle system 7, to heart device adjustment rack 8, line slideway 9 and 10 and computer system 11.Wherein computer system 11 is connected with to heart device 6 with phase shifting interferometer 1, phase shifting interferometer 1 to be placed on interferometer adjustment rack 2 and is fixed on the centre of line slideway 9 and 10, be arranged in precision rotation axle system 7 to heart device 6, precision rotation axle system 7 is fixed on heart device adjustment rack 8 is placed on line slideway 9 and 10.Tested non-spherical lens 3 is arranged on lens carrier 4, lens carrier 4 is fixed on lens adjustment rack 5 and be placed on line slideway 9 and 10.By being adjusted to coaxially the two optical surface images of spherical center of heart device 6 by the optical axis of phase shifting interferometer 1 and tested non-spherical lens 3, phase shifting interferometer 1 is utilized to measure the aspheric surface data of tested non-spherical lens 3, by the data processing software be arranged in computer system 11, measured data are processed, obtain the eccentricity information of tested non-spherical lens 3.Lens adjustment rack 5 can be four-dimensional lens adjustment rack.Two dimension be can be to heart device adjustment rack to heart device adjustment rack 8.
The course of work and the detecting step of present system are as follows:
The first step: as shown in Figure 2, first interferometer 1 is placed on interferometer adjustment rack 2, and be placed on the centre of guide rail 9 and 10, then will be arranged in precision rotation axle system 7 heart device 6 and be fixed on adjustment rack 8, place it on guide rail 9 and 10 again, finally will be connected with computer system 11 to heart device 6.Moving adjustment rack 8 along guide rail, by observing the image of spherical center on the forward and backward surface of interferometer 1 lens to heart device 6, making two images of spherical center all on the revolving shaft to heart device 6 by repeatedly regulating adjustment rack 2 and adjustment rack 8.
Second step: as shown in Figure 1, is fixed on lens carrier 4 upward by the aspheric surface of tested non-spherical lens 3, to be then installed to by lens carrier 4 on lens adjustment rack 5 and to be placed on guide rail 9 and 10.Moving adjustment rack 8 or adjustment rack 5 along guide rail, by observing the image of spherical center of two optical surfaces of tested non-spherical lens 3 to heart device 6, making two images of spherical center all on the revolving shaft to heart device 6 by repeatedly regulating adjustment rack 5.
3rd step: move adjustment rack 5 along guide rail, makes tested non-spherical lens 3 be positioned at the confocal position of its aspheric surface closest to ball, utilize computer system 11 to control aspheric surface data that interferometer 1 gathers tested non-spherical lens 3.
4th step: as shown in Figure 3, extracting the face graphic data on the annulus of the heart in the picture of the center of circle in the graphic data of face, calculating the maximal value of anchor ring graphic data, minimum value and phase value by being arranged on data processing software in computer system 11.The size that reference axis is departed from aspheric surface summit can be calculated by maximum, minimum value; The direction of departing from reference axis in aspheric surface summit can be calculated by phase value.The size departing from reference axis with aspheric surface summit divided by aspheric vertex curvature radius aspheric eccentric angle.The result of measurement of eccentricity of last display translation non-spherical lens.
Claims (8)
1. a high precision high order aspheric surface lens eccentricity Analytical system, it is characterized in that: this Analytical system comprises phase shifting interferometer (1), interferometer adjustment rack (2), tested non-spherical lens (3), lens carrier (4), lens adjustment rack (5), to heart device (6), precision rotation axle system (7), to heart device adjustment rack (8), two line slideways (9, 10), and computer system (11), wherein computer system (11) is connected with to heart device (6) with phase shifting interferometer (1), phase shifting interferometer (1) is placed interferometer adjustment rack (2) and is gone up and be fixed on two line slideways (9, 10) centre, be arranged in precision rotation axle system (7) to heart device (6), precision rotation axle system (7) is fixed on heart device adjustment rack (8), two line slideways (9 are placed on to heart device adjustment rack (8), 10) above also can be free to slide, first by observing the image of spherical center of phase shifting interferometer first lens to heart device (5), and by regulating interferometer adjustment rack (2) and making the optical axis of phase shifting interferometer (1) to heart device adjustment rack (8) and be parallel to two line slideways to the light shaft coaxle of heart device (6), then tested non-spherical lens (3) is arranged on lens carrier (4), lens carrier (4) is fixed on lens adjustment rack (5), lens adjustment rack (5) is placed on two line slideways (9, 10) above also can be free to slide, when ensure phase shifting interferometer (1) and motionless to the optical axis of heart device (6), by observing the paraxial image of spherical center of two optical surfaces of tested non-spherical lens (3) to heart device (6), and by the paraxial image of spherical center of two optical surfaces that regulates lens adjustment rack (5) to make tested non-spherical lens (3) all on the optical axis to heart device (6), phase shifting interferometer (1) is finally utilized to measure the aspheric surface data of tested non-spherical lens (3), by the data processing software be arranged in computer system (11), measured data are processed, obtain the eccentricity information of tested non-spherical lens (3).
2. a kind of high precision high order aspheric surface lens eccentricity Analytical system according to claim 1, is characterized in that: adopt phase shifting interferometer and heart device completed jointly to the measurement of aspheric surface bias.
3. a kind of high precision high order aspheric surface lens eccentricity Analytical system according to claim 1, is characterized in that: tested non-spherical lens and to be all placed on two line slideways heart device and to can move freely.
4. a kind of high precision high order aspheric surface lens eccentricity Analytical system according to claim 1, is characterized in that: can be connected with computing machine to heart device to show in real time hearty cord fruit, also can not be connected direct eye-observation with computing machine to heart device.
5. a kind of high precision high order aspheric surface lens eccentricity Analytical system according to claim 1, it is characterized in that: if the aspherical degree of tested non-spherical lens is excessive in this Analytical system, can not can measure the face shape information of multiple endless belt when obtaining whole graphic data by one-shot measurement.
6. a kind of high precision high order aspheric surface lens eccentricity Analytical system according to claim 1, it is characterized in that: this Analytical system can not only survey one side for aspheric lens, also can survey two sides and be aspheric lens, when measuring two sides and being aspheric lens, upset lens are needed to measure.
7. a kind of high precision high order aspheric surface lens eccentricity Analytical system according to claim 1, it is characterized in that: this Analytical system is in measuring process, when interferometer is when measuring aspheric shape, measured lens can only, along slide, can not regulate translation or inclination in order to avoid reference axis departs from.
8. a high precision high order aspheric surface lens eccentricity assay method, this assay method uses a kind of high precision high order aspheric surface lens eccentricity Analytical system described in claim 1, it is characterized in that: comprise the steps:
Step 1, adjusts heart device and interferometer, make both optical axis coincidence and parallel with two line slideways;
Step 2, puts into tested non-spherical lens, and adjusts on the optical axis to heart device by the image of spherical center of non-spherical lens two optical surface;
Step 3, by aspheric graphic data on the tested non-spherical lens of interferometer measurement;
Step 4, the face graphic data using the eccentric data processing software process of aspheric surface to record, obtains tested aspheric eccentricity information.
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN105108186A (en) * | 2015-06-25 | 2015-12-02 | 中国科学院西安光学精密机械研究所 | Error separation method of lens based on centering machining |
| CN105403151B (en) * | 2015-12-11 | 2018-06-19 | 杭州志达光电有限公司 | Interference and the aspherical eccentricity detecting instrument of projection integration and its detection method |
| CN106441154A (en) * | 2016-11-10 | 2017-02-22 | 中国科学院长春光学精密机械与物理研究所 | Surface form detection apparatus and detection method for aspheric-surface element |
| CN109580179B (en) * | 2018-11-22 | 2021-01-08 | 中国科学院苏州生物医学工程技术研究所 | Aspheric lens eccentricity detection device based on wavefront technology and detection method thereof |
| CN113305305B (en) * | 2021-04-08 | 2022-03-25 | 超丰微纳科技(宁波)有限公司 | Method for reducing eccentricity of turning double-sided mirror |
| CN117168310B (en) * | 2023-11-02 | 2024-02-09 | 南京英田光学工程股份有限公司 | Eccentric measuring method for aspheric reflecting mirror |
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