CN102944194A - High-accuracy high-order aspherical lens eccentricity measuring system and method - Google Patents
High-accuracy high-order aspherical lens eccentricity measuring system and method Download PDFInfo
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- CN102944194A CN102944194A CN2012104756540A CN201210475654A CN102944194A CN 102944194 A CN102944194 A CN 102944194A CN 2012104756540 A CN2012104756540 A CN 2012104756540A CN 201210475654 A CN201210475654 A CN 201210475654A CN 102944194 A CN102944194 A CN 102944194A
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Abstract
The invention provides a high-accuracy high-order aspherical lens eccentricity measuring system and method. The measuring system comprises a phase shift interferometer, an interferometer adjusting support, a measured aspherical lens, a lens support, a lens adjusting support, a centering device, a precision rotating shaft system, a centering device adjusting support, a linear guide way and a computer system. The measured aspherical lens is fixed on the lens support which is fixed on the lens adjusting support, and the lens adjusting support is placed on the linear guide way. The centering device is fixed on the precision rotating shaft system which is installed on the centering device adjusting support and placed on the linear guide way. The phase shift interferometer is placed on the interferometer adjusting support and fixed in the middle of the linear guide way, aspheric facial contour data on the measured aspherical lens are measured by using the phase shift interferometer, data on a plurality of concentric and circular ring bands are extracted from the facial contour data, aspheric peak positions are calculated according to a maximum value, a minimum value and corresponding phase information of facial contour data of each ring band, and according eccentricity of the aspherical lens can be calculated.
Description
Technical field
The invention belongs to the advanced optical length of schooling and make and detection field, relate to Systems for optical inspection, particularly the eccentric system and method for measuring of a kind of high precision high order aspheric surface lens.
Background technology
The high order aspheric surface lens have obtained in fields such as imaging system, optical projection system, space cameras using more and more widely.Compare traditional spherical lens, the off-centre of non-spherical lens just immobilizes after lens machine, and can not eliminate by the process of debuging in later stage, therefore the high-precision quantitative detection of non-spherical lens off-centre just seemed particularly important, it is whether non-spherical lens of constant reaches one of important parameter of design objective.
Existing non-spherical lens misalignment measurement method mainly is divided into contact type measurement and non-contact measurement two classes.Wherein contact type measurement has the measurement of uniform thickness instrument, tangent displacement sensor measurement etc., can only be used for the lens processing measurement in early stage, in the lens processing later stage danger that destroys minute surface is arranged, and measuring accuracy is low; Non-contact measurement has light beam transmission measurement, beam reflection measurement, non-contact displacement sensor measurement etc., and it can be used for the lens misalignment measurement in processing later stage.
The light beam transmissometry (Hank H.Karow.Fabrication Methods for Precision Optics[M], Wiley, 540,2004.) and beam reflection mensuration (Hang Lingxia, Chinese patent " CN 201096611Y ") measuring accuracy all is subject to the spot size of light beam and the spatial resolution of detector, non-contact displacement sensor mensuration (spring Tian Feng, Chinese patent " CN1420339A ") measuring accuracy mainly is subject to the measuring accuracy of displacement transducer, full accuracy is the confocal displacement transducer of spectrum that TRIOPTICS company adopts at present, its displacement measurement precision is 50nm, and its precision meets the demands not enough for the smaller high order aspheric surface of aspherical degree.
Summary of the invention
The technical problem to be solved in the present invention: the deficiency that overcomes existing non-spherical lens misalignment measurement technology, propose a kind of based on interferometer with to the eccentric system and method for measuring of the high precision high order aspheric surface of heart device, this system employs is found out reference axis to heart device, and the advantage of utilizing the interferometer high-precision surface shape to measure is measured the off-centre of non-spherical lens.This system can solve the misalignment measurement problem of the smaller high order aspheric surface lens of aspherical degree effectively.System architecture of the present invention is simple, testing cost is low.
The technical solution adopted for the present invention to solve the technical problems: the eccentric mensuration of a kind of high precision high order aspheric surface lens system, this mensuration system comprise phase shifting interferometer, interferometer adjustment rack, tested non-spherical lens, lens carrier, lens adjustment rack, to heart device, precision rotation axle system, to heart device adjustment rack, line slideway and computer system.Wherein computer system and phase shifting interferometer with heart device is linked to each other, phase shifting interferometer is placed on the interferometer adjustment rack and is fixed in the middle of the line slideway, heart device is installed in the precision rotation axle to be fastened, precision rotation axle system is fixed on the heart device adjustment rack, heart device adjustment rack is placed on the line slideway also can be free to slide.First by heart device being observed the image of spherical center of phase shifting interferometer first lens, and by the optical axis regulating the interferometer adjustment rack and heart device adjustment rack is made phase shifting interferometer with to the light shaft coaxle of heart device and be parallel to line slideway.Then be installed in tested non-spherical lens on the lens carrier, lens carrier is fixed on the lens adjustment rack, the lens adjustment rack is placed on the line slideway and can be free to slide, guaranteeing phase shifting interferometer and to the optical axis of heart device in the motionless situation, by heart device being observed the paraxial image of spherical center of two optical surfaces of tested non-spherical lens, and by regulating the paraxial image of spherical center of two optical surfaces that the lens adjustment rack makes tested non-spherical lens all on to the optical axis to heart device.Utilize at last phase shifting interferometer to measure the aspheric surface data of tested non-spherical lens, by the data processing software that is installed on the computer system measured data are processed, obtain the eccentric information of tested non-spherical lens.
Wherein, adopt phase shifting interferometer and heart device is finished jointly the measurement of aspheric surface off-centre.
Wherein, tested non-spherical lens and heart device all is placed on two line slideways and can move freely.
Wherein, can link to each other with computing machine in order to show in real time the hearty cord fruit to heart device, also can not link to each other with computing machine directly with eye-observation to heart device.
If the aspherical degree of tested non-spherical lens is excessive in this detection system, can measure the face shape information of a plurality of endless belt when can not one-shot measurement getting whole graphic data.
This detection system can not only be surveyed one side for aspheric lens, also can survey the two sides and be aspheric lens.When the measurement two sides is aspheric lens, need the upset lens to measure.
This detection system in measuring process, when interferometer when measuring aspheric shape, measured lens can only slide along guide rail, can not regulate translation or inclination in order to avoid reference axis departs from.
The eccentric mensuration of a kind of high precision high order aspheric surface lens system
The eccentric method for measuring of high precision high order aspheric surface lens according to the eccentric mensuration of above-mentioned high precision high order aspheric surface lens system is provided in addition, comprises the steps:
Step 1 is adjusted to heart device and interferometer, so that both optical axis coincidences and parallel with two line slideways;
The present invention's advantage compared with prior art is:
(1), measure aspheric shape information with interferometer in the system of the present invention, replaced traditional displacement transducer, the precision of interferometer measurement face shape information is higher.
(2), use interferometer one-shot measurement can obtain whole aspheric shape information or repeatedly measure the face shape information that obtains a plurality of endless belt in the system of the present invention, and the face shape information of a certain endless belt on the aspheric surface not just, its quantity of information of measuring gained is larger, and result of calculation is more reliable.
(3), system of the present invention measured lens when measuring aspheric shape information keeps motionless, do not need rotation, the measuring error that therefore can avoid rotating mechanism to cause.
Description of drawings
Fig. 1 is that system consists of schematic diagram;
Fig. 2 is to heart device and the interferometer schematic diagram to the heart;
Fig. 3 is measuring system flow chart of data processing figure.
Among the figure: 1-phase shifting interferometer, 2-interferometer adjustment rack, 3-tested non-spherical lens, 4-lens carrier, 5-lens adjustment rack, 6-to heart device, 7-precision rotation axle system, 8-to heart device adjustment rack, 9 and 10-line slideway, 11-computer system.
Embodiment
Introduce in detail the present invention below in conjunction with accompanying drawing and specific implementation method.
Referring to Fig. 1, be the eccentric mensuration of a kind of high precision high order aspheric surface lens system shown in the figure, this system comprise phase shifting interferometer 1, interferometer adjustment rack 2, tested non-spherical lens 3, lens carrier 4, lens adjustment rack 5, to heart device 6, precision rotation axle be 7, to heart device adjustment rack 8, line slideway 9 and 10 and computer system 11.Wherein computer system 11 and phase shifting interferometer 1 with heart device 6 is linked to each other, phase shifting interferometer 1 is placed on the interferometer adjustment rack 2 and is fixed on the centre of line slideway 9 and 10, it is on 7 that heart device 6 is installed in the precision rotation axle, and the precision rotation axle is 7 to be fixed on the heart device adjustment rack 8 and be placed on line slideway 9 and 10.Tested non-spherical lens 3 is installed on the lens carrier 4, lens carrier 4 is fixed on the lens adjustment rack 5 and be placed on line slideway 9 and 10.By to heart device 6 with two optical surface images of spherical center of the optical axis of phase shifting interferometer 1 and tested non-spherical lens 3 be adjusted to coaxial after, utilize phase shifting interferometer 1 to measure the aspheric surface data of tested non-spherical lens 3, by the data processing software that is installed on the computer system 11 measured data are processed, obtained the eccentric information of tested non-spherical lens 3.Lens adjustment rack 5 can be four-dimensional lens adjustment rack.Heart device adjustment rack 8 be can be two dimension to heart device adjustment rack.
The course of work and the detecting step of system of the present invention are as follows:
The first step: as shown in Figure 2, first interferometer 1 is placed on the interferometer adjustment rack 2, and be placed on the centre of guide rail 9 and 10, then will to be installed in the precision rotation axle be on 7 and be fixed on the adjustment rack 8 to heart device 6, place it in again on guide rail 9 and 10, will link to each other with computer system 11 to heart device 6 at last.Move adjustment rack 8 along guide rail, by heart device 6 being observed the image of spherical center on the forward and backward surface of interferometer 1 lens, make two images of spherical center all on the revolving shaft to heart device 6 by repeatedly regulating adjustment rack 2 and adjustment rack 8.
Second step: as shown in Figure 1, the aspheric surface of tested non-spherical lens 3 is fixed on the lens carrier 4 up, then is installed to lens carrier 4 on the lens adjustment rack 5 and is placed on guide rail 9 and 10.Move adjustment rack 8 or adjustment rack 5 along guide rail, by heart device 6 being observed the image of spherical center of two optical surfaces of tested non-spherical lens 3, make two images of spherical center all on the revolving shaft to heart device 6 by repeatedly regulating adjustment rack 5.
The 3rd step: move adjustment rack 5 along guide rail, make tested non-spherical lens 3 be positioned at its aspheric surface near the confocal position of ball, utilize computer system 11 control interferometers 1 to gather the aspheric surface data of tested non-spherical lens 3.
The 4th step: as shown in Figure 3, extract the face graphic data of the center of circle on the annulus of picture centre in the face graphic data by the data processing software that is installed on the computer system 11, calculate maximal value, minimum value and the phase value of anchor ring graphic data.Can calculate the size that reference axis is departed from the aspheric surface summit by maximum, minimum value; Can calculate the direction that reference axis is departed from the aspheric surface summit by phase value.The size that departs from reference axis with the aspheric surface summit gets final product to get aspheric eccentric angle divided by aspheric vertex curvature radius.The result of measurement of eccentricity that shows at last the output non-spherical lens.
Claims (8)
1. the eccentric mensuration of high precision high order aspheric surface lens system, it is characterized in that: this mensuration system comprises phase shifting interferometer (1), interferometer adjustment rack (2), tested non-spherical lens (3), lens carrier (4), lens adjustment rack (5), to heart device (6), precision rotation axle system (7), to heart device adjustment rack (8), two line slideways (9,10), and computer system (11), wherein computer system (11) and phase shifting interferometer (1) with heart device (6) is linked to each other, phase shifting interferometer (1) is placed interferometer adjustment rack (2) upward and is fixed on two line slideways (9,10) centre, heart device (6) is installed in the precision rotation axle system (7), precision rotation axle system (7) is fixed on the heart device adjustment rack (8), heart device adjustment rack (8) is placed on two line slideways (9,10) upward also can be free to slide, first by heart device (5) being observed the image of spherical center of phase shifting interferometer first lens, and by the optical axis regulating interferometer adjustment rack (2) and heart device adjustment rack (8) is made phase shifting interferometer (1) with to the light shaft coaxle of heart device (6) and be parallel to two line slideways, then tested non-spherical lens (3) is installed on the lens carrier (4), lens carrier (4) is fixed on the lens adjustment rack (5), lens adjustment rack (5) is placed on two line slideways (9,10) upward also can be free to slide, guaranteeing phase shifting interferometer (1) and to the optical axis of heart device (6) in the motionless situation, by heart device (6) being observed the paraxial image of spherical center of two optical surfaces of tested non-spherical lens (3), and by regulating the paraxial image of spherical center of two optical surfaces that lens adjustment racks (5) make tested non-spherical lens (3) all on to the optical axis to heart device (6), utilize at last phase shifting interferometer (1) to measure the aspheric surface data of tested non-spherical lens (3), by the data processing software that is installed on the computer system (11) measured data are processed, obtained the eccentric information of tested non-spherical lens (3).
2. the eccentric mensuration of a kind of high precision high order aspheric surface lens according to claim 1 system is characterized in that: adopt phase shifting interferometer and heart device is finished jointly the measurement of aspheric surface off-centre.
3. the eccentric mensuration of a kind of high precision high order aspheric surface lens according to claim 1 system is characterized in that: tested non-spherical lens and heart device all is placed on two line slideways and can move freely.
4. the eccentric mensuration of a kind of high precision high order aspheric surface lens according to claim 1 system is characterized in that: can link to each other with computing machine in order to show to hearty cord really in real time to heart device, also can not link to each other with computing machine directly with eye-observation to heart device.
5. the eccentric mensuration of a kind of high precision high order aspheric surface lens according to claim 1 system, it is characterized in that: if the aspherical degree of tested non-spherical lens is excessive in this detection system, can measure the face shape information of a plurality of endless belt when can not one-shot measurement getting whole graphic data.
6. the eccentric mensuration of a kind of high precision high order aspheric surface lens according to claim 1 system, it is characterized in that: this detection system can not only be surveyed one side and be aspheric lens, also can survey the two sides and be aspheric lens, when the measurement two sides is aspheric lens, need the upset lens to measure.
7. the eccentric mensuration of a kind of high precision high order aspheric surface lens according to claim 1 system, it is characterized in that: this detection system is in measuring process, when interferometer when measuring aspheric shape, measured lens can only slide along guide rail, can not regulate translation or inclination in order to avoid reference axis departs from.
8. the eccentric assay method of high precision high order aspheric surface lens is characterized in that: comprise the steps:
Step 1 is adjusted to heart device and interferometer, so that both optical axis coincidences and parallel with two line slideways;
Step 2 is put into tested non-spherical lens, and the image of spherical center of non-spherical lens two optical surfaces is adjusted on the optical axis to heart device;
Step 3 is by aspheric graphic data on the tested non-spherical lens of interferometer measurement;
Step 4 uses the eccentric data processing software of aspheric surface to process the face graphic data that records, and obtains tested aspheric eccentric information.
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Cited By (6)
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| CN105108186A (en) * | 2015-06-25 | 2015-12-02 | 中国科学院西安光学精密机械研究所 | Error separation method of lens based on centering machining |
| CN105403151A (en) * | 2015-12-11 | 2016-03-16 | 杭州志达光电有限公司 | Interferometry and projection integration aspheric eccentric detector and detection method thereof |
| CN106441154A (en) * | 2016-11-10 | 2017-02-22 | 中国科学院长春光学精密机械与物理研究所 | Surface form detection apparatus and detection method for aspheric-surface element |
| CN109580179A (en) * | 2018-11-22 | 2019-04-05 | 中国科学院苏州生物医学工程技术研究所 | Non-spherical lens Accentric detector and its detection method based on wave front technology |
| CN113305305A (en) * | 2021-04-08 | 2021-08-27 | 超丰微纳科技(宁波)有限公司 | Method for reducing eccentricity of turning double-sided mirror |
| CN117168310A (en) * | 2023-11-02 | 2023-12-05 | 南京英田光学工程股份有限公司 | Eccentric measuring method for aspheric reflecting mirror |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN105108186A (en) * | 2015-06-25 | 2015-12-02 | 中国科学院西安光学精密机械研究所 | Error separation method of lens based on centering machining |
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| CN109580179A (en) * | 2018-11-22 | 2019-04-05 | 中国科学院苏州生物医学工程技术研究所 | Non-spherical lens Accentric detector and its detection method based on wave front technology |
| WO2020103221A1 (en) | 2018-11-22 | 2020-05-28 | 中国科学院苏州生物医学工程技术研究所 | Aspheric lens eccentricity detection apparatus and detection method based on wavefront technology |
| US11506567B2 (en) | 2018-11-22 | 2022-11-22 | Suzhou Institute Of Biomedical Engineering And Technology, Chinese Academy Of Sciences | Aspheric lens eccentricity detecting device based on wavefront technology and detecting method thereof |
| CN113305305A (en) * | 2021-04-08 | 2021-08-27 | 超丰微纳科技(宁波)有限公司 | Method for reducing eccentricity of turning double-sided mirror |
| CN117168310A (en) * | 2023-11-02 | 2023-12-05 | 南京英田光学工程股份有限公司 | Eccentric measuring method for aspheric reflecting mirror |
| CN117168310B (en) * | 2023-11-02 | 2024-02-09 | 南京英田光学工程股份有限公司 | Eccentric measuring method for aspheric reflecting mirror |
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