CN104075667B - A kind of based on circular scanning slope extraction aspheric surface measurement system and method - Google Patents
A kind of based on circular scanning slope extraction aspheric surface measurement system and method Download PDFInfo
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- CN104075667B CN104075667B CN201410294133.4A CN201410294133A CN104075667B CN 104075667 B CN104075667 B CN 104075667B CN 201410294133 A CN201410294133 A CN 201410294133A CN 104075667 B CN104075667 B CN 104075667B
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Abstract
The present invention relates to a kind of based on circular scanning slope extraction aspheric surface measurement system and method, belonging to photoelectric technology detection field, described measurement system includes that laser instrument, beam-expanding system battery of lens, the etching planar lens of opaque point, imaging CCD and one-dimensional automatically controlled mobile station are constituted；The aspheric surface measurement that the present invention extracts based on circular scanning slope, it is not necessary to compensator, dynamic range is big, and precision is high, and its achievement in research can be used for throwing at the beginning of primary mirror the detection in stage, solves correlation technique bottleneck, has important engineer applied and is worth and realistic meaning.
Description
Technical field
The invention belongs to advanced optics manufacture and detection field, relate to a kind of optical detection apparatus, big particularly to one
Bore aspheric surface primary mirror detecting system and method.
Background technology
Heavy caliber highly steep asphere has shortening system length, alleviates the weight of system, improves the image quality of system
Etc. advantage, therefore it has a wide range of applications in the field such as heavy caliber astronomical telescope, Space Optical System.The nearlyest 30
Nian Lai, along with a collection of advanced processing and manufacturing technology such as computer control small abrasive nose polishing, can polish by movable grinding disc, ion beam polishing
Occur and application, the most greatly promoted this kind of system answering in fields such as space communication, light beam orientation, target observation identifications
With.In view of the situation, many countries are numerous and confused is considered as many big science project weights by heavy caliber highly steep asphere manufacturing technology
One of unit supports technology wanted.The reliable detection of heavy caliber highly steep asphere primary mirror is then to ensure that its precondition processed
And basis.Due to the particularity of heavy caliber highly steep asphere itself, cause corresponding detection method and measuring instrument still
There is lot of challenges, mainly show themselves in that
(1) easily there is precision linking space in optical elements of large caliber stage surface testing.General point of optical element face shape processing
For molding, grinding, polish three phases, research shows that each stage process precision is as shown in table 1.
The surface figure accuracy of table 1 Large aperture optical components different processing stages
| Process segment | Surface figure accuracy RMS value/μm |
| Molding | 8～20 |
| Grind | 0.3～1.5 |
| Polishing | 0.01～0.03 |
As shown in Table 1, from being molded into polishing, optical element face shape error reduces by two orders of magnitude, for the biggest span,
It is difficult to application same detecting instrument or method guarantees to accurately measure face shape error in each stage of optical element processing
Situation.At optical element fine grinding and just polishing the stage, face shape error value is relatively large, it is seen that optical interferometer dynamic range is not enough,
This stage would generally use consistency profiles to carry out surface testing.Connecing with contourograph, three coordinate measuring machine, laser tracker as representative
During touch contour measurement can effectively solve, the surface shape measurement in small-bore this stage of optical element, but along with optical element mouth
The increase in footpath, the certainty of measurement of contour measurement will decline, it is impossible to the shape correction of accurate instruction optical element face is to optical measuring method
Dynamic detection range within.This problem is more and more prominent along with the increase of primary mirror bore, and the bottleneck become in primary mirror processing is asked
Topic.
(2) the optical element bore constantly increased is beyond the measurement scope of traditional detection instrument.Such as traditional profile measurement
Method requires that instrument range have to be larger than the bore of optical element, and autocollimation method detection aspheric surface needs equal with tested optical element bore
Reference plane reflecting mirror, Hartmann's measurement method needs to make the diaphragm etc. equal with optical element bore, and the measurement of wide range
Equipment and heavy caliber reference element itself are developed the most extremely complex, and precision should not be guaranteed, and with high costs.
(3) quality of Large aperture optical components is often beyond several tons and bulky (such as VLT telescope only primary mirror mirror base just weight
Reaching 23 tons, add and support, total quality and size increase further), adjusting or handling process exists greater risk, because of
This often can only use the mode of detection in place, this just further limit Large aperture optical components surface testing can method.
(4) the tested region area of optical element is directly proportional to 2 powers of bore, therefore surveys for traditional contact profile
Metering method, how by improving metering system, raising measurement efficiency is one of difficult problem faced by Large aperture optical components surface testing.
In sum, demand and the Large aperture optical components surface testing faced at present are developed for heavy-caliber optical system
A difficult problem, the research carrying out surface testing method and key technology has particularly important realistic meaning and practical value.
Summary of the invention
The technology of the present invention solves problem: overcome the deficiencies in the prior art, it is provided that a kind of non-based on the extraction of circular scanning slope
Spherical surface shape measures system and method, solves the aperture aspherical test problems in the just throwing stage, it is not necessary to compensator, has
Dynamic range is big, and precision is high, can be used for throwing at the beginning of primary mirror the detection in stage, and has and effectively instruct aperture aspherical to grind the later stage
The surface testing at polishing initial stage, has important engineer applied and is worth and realistic meaning.
The technology of the present invention solution: the present invention utilizes point source that aspheric surface is carried out longitudinal scanning, by returning light
Processing thus obtaining the slope of each point in aspheric surface of line, then obtains face shape profile errors by certain algorithm.Concrete principle
As follows:
As it is shown in figure 1, A is any point in aspheric surface, H be one hang down axle place glass plate, S is an aberrationless thereon
Point source, the position at S place is just the normal direction of A point and the intersection point of optical axis in aspheric surface.The illumination that this point source sends
Bright aspheric surface, so for A point, SA is normal incidence, and the light of A point reflection will be along backtracking, i.e. reflection light is
AS.In aspheric surface with an A on same normal annulus institute flat board of the most all handing over by backtracking and S point at, if now S point
Be the impermeable luminous point of an etching, then their reflection light all will be blocked.For other points in aspheric surface, such as B point and C
Point, owing to SB and SC is not normal incidence, so their reflection light BB ', CC ' will hand over flat board in point the most respectively
D and some F, with the flat board DD ' scope that will illuminate a little of a B place same normal annulus in such aspheric surface, with a C place together
One normal annulus will illuminate a little flat board FF ' scope, say, that their reflection light can pass through flat board.The most such as
Fruit places a CCD camera on the left of flat board, then can collect plot of light intensity as shown in Figure 2.It will be seen that plot of light intensity has one
Circle Crape ring, if the pixel of CCD and aspheric surface one_to_one corresponding, it is known that A point just falls on Crape ring, Crape ring radius
Equal to the A point wheelbase that hangs down from AA ' i.e. r, if so can obtain the distance i.e. size of d of S to A ', then the slope of A point just can be by
Formula:
As follows relative to solving of distance d of A point:
If flat board is moved to right to the c of position, as shown in Figure 3.At this moment the light sent from Sc point illuminates aspheric surface, and aspheric
At face A point, the light of reflection will be with AS as normal direction, it then follows at reflection law to flat board D, same with A point place in aspheric surface
Point on normal annulus will reflex to flat board DD ' region, say, that the light of they reflections will transmit through flat board.At this moment remember with CCD
Record will still have a circle Crape ring in discovery plot of light intensity, but Crape ring radius diminish (the impermeable luminous point of etching block for other annulus
The light returned), A point is then at bright areas, as shown in Figure 4.With should be after flat board moves to left to a of position, it is found that aspheric
The most still having a circle Crape ring on face, but Crape ring radius becomes big, A point is also at bright areas, as shown in Figure 5.By analysis may be used
To know aspheric surface A point light intensity IAIt is the function of d, i.e. IA=IA(d) its Strength Changes schematic diagram such as Fig. 6. work as IAMinimize value
Time, if the distance that light source and A ' put is d0, i.e. d0Meet:
So can obtain the size of d, so just can calculate the slope at aspheric surface A point:
Wherein d0(r, θ) is the light intensity minimum range at A point, and r is the radius of A point on minute surface.To each point on minute surface
All it is integrated algorithm, it is possible to obtain the face shape of whole.
According to above-mentioned surface shape measurement principle, examining based on circular scanning slope extraction aspheric surface optics of present invention design
Examining system is as shown in Figure 7.Optical system is by laser instrument 1, beam-expanding system battery of lens 2, the planar lens 3 of etching opaque point, one-tenth
As CCD4 and one-dimensional automatically controlled mobile station 5 are constituted.Measurement system is placed near the center of curvature of tested aspherical mirror, and laser instrument is sent out
The light gone out converges to the outer surface of planar lens 3 after expanding through battery of lens 2, owing to planar lens can introduce certain ball
Difference, therefore when designing battery of lens 2, needs to produce the spherical aberration that a certain amount of reverse spherical aberration introduces with planar lens and offsets,
So, light beam converges to form aberrationless point during the outer surface of planar lens, has etched the least one on the side of convergent point
Point, deviates millimeter magnitude, etching point micron size with light beam focus.The light that point source sends, is irradiated to tested aspherical mirror 6
Can reflect, the light along minute surface normal incidence can return along original optical path, makes point source small deviation optical axis, minute surface normal
The light of annulus can converge on the point that is etched.Owing to the light of minute surface normal annulus is blocked, and the light of other annulus does not has
It is blocked, is then a circle Crape ring at normal on imaging CCD4 it can be seen that on minute surface.Light intensity by analyser surface imaging
Figure, reads corresponding annulus one-dimensional electric controlled sliding moving platform and moves the distance of 5, calculate the slope of annulus, then by slope integration
Obtain tested aspheric shape.Whole system has the following characteristics that laser forms aberrationless point source, and institute through lens combination
The convergent point formed is just on the front end face of planar lens；The aberrationless point that on planar lens, the dim spot of etching is formed with system
Distance between light source is in 8 millimeters；During circular scanning minute surface, one-dimensional electric controlled sliding moving platform is along tested aspheric surface primary mirror optical axis
Mobile；The point source that optical system produces, light intensity uniformity is good, can meet the Uniform Illumination of tested minute surface.
It is embodied as step as follows:
(1) measurement system is placed in tested aspherical mirror vertex curvature immediate vicinity, adjusts one-dimensional electric controlled sliding moving platform and make
It moves along optical axis.
(2) with laser tracker orient tested aspherical mirror and measure system initial position between distance, this away from
From as the distance corresponding to initial loop Crape ring on minute surface.
(3) one-dimensional electric controlled sliding moving platform is moved according to a fixed step size along optical axis, by the most mobile Crape ring of CCD record at mirror
Position corresponding on face, and record the one-dimensional corresponding displacement of electric controlled sliding moving platform.Whole along optical axis scanning
Minute surface, records all of Crape ring and corresponding displacement.
(4) extracting the barycenter radius of Crape ring, calculate the slope that each Crape ring is corresponding, integration recovers to obtain the face of whole
Shape.
Present invention advantage compared with prior art is:
(1) the aspheric surface measurement method extracted based on circular scanning slope need not use compensator, thus avoids
Aspheric surface compensates error source maximum in detection and measuring uncertainty.
(2) experimental system simple in construction proposed by the invention, it is easy to operation, cost is suitable.Preferably reach to measure
The requirement of degree of accuracy, may be implemented in line simultaneously and measures.
(3) experimental system proposed by the invention is non-interference system, insensitive to vibration and air-flow in measurement.
In sum, new detection method proposed by the invention compared with existing just throwing phase measuring mode need not mend
Repaying device, cost is relatively low, and not by ambient vibration and airflow influence, may be implemented in line and measure.Succeeding in developing of the present invention will be big
The aspheric development of bore provides a kind of effective low cost detection means, has significant realistic meaning and application prospect.
Accompanying drawing explanation
Fig. 1 is light source light schematic diagram of A point at b；
Fig. 2 be light source at b time CCD on A point light intensity schematic diagram；
Fig. 3 is light source light schematic diagram at a and c；
Fig. 4 be light source at c time CCD on the light intensity schematic diagram of A point；
Fig. 5 be light source at a time CCD on the light intensity schematic diagram of A point；
Fig. 6 is the schematic diagram of A point light intensity distance d change；
Fig. 7 is Systems for optical inspection schematic diagram of the present invention.
Detailed description of the invention
For making the object, technical solutions and advantages of the present invention clearer, below in conjunction with specific embodiment, and reference
Accompanying drawing, the present invention is described in more detail.
It is illustrated in figure 7 a kind of based on circular scanning slope extraction aspheric surface detecting system schematic diagram, described device
Including: laser instrument 1, beam-expanding system battery of lens 2, planar lens 3, imaging CCD4, one-dimensional electric controlled sliding moving platform 5 and tested aspheric
Face mirror 6 is constituted.Concrete enforcement step is as follows:
(1) measurement system is placed in tested aspherical mirror 6 vertex curvature immediate vicinity, adjusts one-dimensional electric controlled sliding moving platform 5
It is made to move along optical axis.
(2) with laser tracker orient tested aspherical mirror 6 and measure system initial position between distance, this away from
From as the distance corresponding to initial loop Crape ring on minute surface.Concrete location mode is as follows:
A () makees three labelling points on tested aspherical mirror 6, orient the phase between three labelling points with laser tracker
To position relationship, set up the coordinate system with aspheric surface summit as zero.
B () makees three labelling points on planar lens 3, orient the phase para-position between three labelling points with laser tracker
Put relation, set up a coordinate system.
C (), by unified under the coordinate system that tested aspherical mirror 6 summit is zero for two coordinate systems set up, obtains
The location matrix relation of two coordinate systems.Tested aspherical mirror 6 just can be calculated to flat by this location matrix relation
Distance Z of face lens 3.
(3) set step-length and move one-dimensional movement platform 5 along optical axis, by the most mobile Crape ring of CCD4 record tested non-
Position corresponding on coquille 6, and record corresponding displacement Z of one-dimensional movement platformi.Whole along optical axis scanning
Individual tested aspherical mirror 6, records all of Crape ring and corresponding displacement.
(4) image of the Crape ring collected is imported matlab and carry out barycenter radius extraction, obtain the pixel of each width figure
Radius.Coordinate A (the x of labelling on minute surfacen, yn) pixel coordinate on corresponding CCD is B (pn, qn) this can obtain minute surface coordinate
System and the matrix relationship of CCD pixel coordinate system:
A=TB (4)
The coordinate corresponding relation of image planes and minute surface is demarcated it is known that the pixel coordinate of any just can calculate according to above formula (4)
Go out real radius r on minute surface.
(5) calculating the slope that each Crape ring is corresponding, integration recovers to obtain the face shape of whole.Computing formula is as follows:
Wherein δ θ is the deviation of tested aspherical mirror slope and theoretical face shape, and Δ Z is the Z recordedRecordValue and theoretical equation meter
Calculation obtains ZTheoreticalDeviation, i.e. Δ Z=ZRecord-ZTheoretical, sag is the rise of tested aspherical mirror, for parabola
Then it is integrated just obtaining the face shape error of tested aspherical mirror with p-δ θ (r) of Simpson's rule.
Claims (3)
1. one kind is extracted aspheric surface measurement system based on circular scanning slope, it is characterised in that: described measurement system includes
Laser instrument, beam-expanding system battery of lens, the etching planar lens of opaque point, imaging CCD and one-dimensional automatically controlled mobile station are constituted；Measure
System is placed near the center of curvature of tested aspherical mirror, and the light that laser instrument sends converges to put down through battery of lens after expanding
The outer surface of face lens, light beam converges to form aberrationless point during the outer surface of planar lens, etches on the side of convergent point
A least point, deviates millimeter magnitude, etching point micron size with light beam focus；The light that point source sends, be irradiated to by
Surveying aspherical mirror can reflect, the light along minute surface normal incidence can return along original optical path, makes point source small deviation light
Axle, the light of minute surface normal annulus can converge on the point that is etched；The light of minute surface normal annulus is blocked, other annulus
Light is not blocked, then be a circle Crape ring at normal on imaging CCD it can be seen that on minute surface；Light by analyser surface imaging
Qiang Tu, reads the distance that corresponding annulus one-dimensional electric controlled sliding moving platform moves, calculates the slope of annulus, then by slope integration
Obtain tested aspheric shape；
Distance 8 between the aberrationless point source that the dim spot etched on the planar lens of described etching opaque point and system are formed
Within Hao meter.
2. extract aspheric surface measurement system based on circular scanning slope as claimed in claim 1, it is characterised in that: described
The point source that laser instrument produces, light intensity uniformity is good, can meet tested aspheric Uniform Illumination.
3. extracting an aspheric surface measurement method based on circular scanning slope, implementation step is as follows:
(1) the measurement system described in claim 1 is placed in tested aspherical mirror vertex curvature immediate vicinity, adjusts one-dimensional automatically controlled
Mobile platform makes it move along optical axis；
(2) orient the distance between the initial position of tested aspherical mirror and the system of measurement with laser tracker, this distance is made
For the distance corresponding to initial loop Crape ring on minute surface, concrete location mode is as follows:
A () makees three labelling points on tested aspherical mirror, orient the phase para-position between three labelling points with laser tracker
Put relation, set up the coordinate system with aspheric surface summit as zero；
B () makees three labelling points on planar lens, orient the relative position between three labelling points with laser tracker and close
System, sets up a coordinate system；
C (), by same under the coordinate system that tested aspherical mirror summit is zero for two coordinate systems set up, obtains two
The location matrix relation of coordinate system, by this location matrix relation just can be calculated tested minute surface to planar lens away from
From；
(3) moving one-dimensional movement platform according to a fixed step size along optical axis, by the most mobile Crape ring of CCD record, institute on minute surface is right
The position answered, and record the corresponding displacement of one-dimensional movement platform, scan whole tested aspherical mirror along optical axis,
Record all of Crape ring and corresponding displacement；
(4) extracting the barycenter radius of Crape ring, calculate the slope that each Crape ring is corresponding, integration recovers to obtain whole tested aspheric surface
Mirror.
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| CN108375351A (en) * | 2015-08-24 | 2018-08-07 | 江苏理工学院 | High-temperature forging twin-laser measuring apparatus |
| CN110017792A (en) * | 2019-04-10 | 2019-07-16 | 中山大学 | A kind of novel optical curved surface two-dimensional measurement method and its measuring system |
| CN112857221B (en) * | 2021-01-15 | 2023-02-24 | 海伯森技术（深圳）有限公司 | Scanning method and device for quickly positioning spherical extreme point |
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| JPH0989535A (en) * | 1995-09-19 | 1997-04-04 | Canon Inc | Surface configuration measuring method |
| JP2003050109A (en) * | 2001-08-07 | 2003-02-21 | Nikon Corp | Surface shape measuring device and measuring method |
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| CN1746648A (en) * | 2005-10-31 | 2006-03-15 | 中国科学院光电技术研究所 | A kind of deep aspherical mirror detection system with big bore |
| CN1995943A (en) * | 2007-01-04 | 2007-07-11 | 四川大学 | Omnibearing detection method for large-diameter aspherical mirror |
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