CN103471524A - Vertex curvature radius measurement method for confocal paraboloid - Google Patents
Vertex curvature radius measurement method for confocal paraboloid Download PDFInfo
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Abstract
The invention belongs to the technical field of optical precision measurement, and relates to a vertex curvature radius measurement method for a confocal paraboloid. According to the method, the paraboloid can be utilized to enable light beams to be focused to the focal point of the paraboloid to be collimated into characteristics of parallel beams without aberration, a part of a planar mirror is combined to form a self-reflection light path, positions of the vertex and the focal point of the paraboloid are accurately positioned by means of the maximum value point of a confocal response curve, and thus the focal length and vertex curvature radius values of the paraboloid are precisely measured. The differential confocal measuring technique is expanded to the field of paraboloid vertex curvature radius measurement for the first time, and the vertex curvature radius measurement method has the advantages of being high in measurement accuracy and high in ability to resist environmental interference and can be used for high-accuracy detection of paraboloid vertex curvature radii.
Description
Technical field
The invention belongs to technical field of optical precision measurement, can be used for detection and the high precision parabola focal length in the optical system assembling process and the vertex curvature radius measurement of parabola focal length and vertex curvature radius.
Technical background
Parabola due to can by the parallel beam aberrationless focus on focus, thereby be used in widely in the optical systems such as reflective astronomical telescope, space optical communication, earth observation camera as a kind of important aspheric surface.Paraboloidal vertex curvature radius has determined focal length and the picture element of optical system, thereby the measurement of relevant parabola vertex curvature radius has great importance.
At present, the method that can be used for measuring the parabola vertex curvature radius mainly comprises contact type measurement method and the large class of non-contact type measuring method two.The contact type measurement method is utilized the coordinate points information of the surveying instrument sampling parabolic surface such as three coordinate machine, laser tracker, and then tries to achieve its surperficial radius-of-curvature value by the method for matching.The Point-positioning Precision of these methods is usually very high, but is subject to gather the restriction of counting with fitting precision, and especially for the parabola of large vertex curvature radius, measuring accuracy is difficult to reach desirable.And contact type measurement method measuring speed slowly, easily scratches the measured optical unit surface.The problem measure existed in order to solve the contact vertex curvature radius, scholars have done a lot of valuable research, and proposed multiple can be for the method for parabola vertex curvature radius non-cpntact measurement.The axial aberration mensuration that is published in " the Conic constant and paraxial radius of curvature measurements for conic surfaces " proposition on Applied Optics in 1986 is used optical bench to record axial normal aberration and its corresponding normal angle on aspheric surface, and then solves its vertex curvature radius by the quadric surface expression formula.Be subject to the impact of axial normal aberration and angle measuring accuracy, the vertex curvature radius measuring accuracy of the method only can reach 3%.Within 1994, be published in " the Fabrication and testing of the3.5m on SPIE, f/1.75WIYN primary mirror " interferometry that proposes utilizes interferogram to measure the relative departure distance between each endless belt center of curvature of quadric surface, and then adopts least square method to record vertex curvature radius.Because its positioning precision of interferometry is high, so the vertex curvature radius measuring accuracy of the method can reach 0.02%.The ray tracing mensuration that is published in " the A simple ray tracing method for measuring the vertex radius of curvature of an aspheric mirror " proposition on Optics Communication in 2004 obtains the normal equation of non-spherical surface each point by the equation of measuring incident ray equation and reflection ray, and then processing obtains its vertex curvature radius value.The vertex curvature radius measuring accuracy of the method can reach 0.5%.
In order further to improve the measuring accuracy of parabola vertex curvature radius, the present invention utilizes confocal technology, has proposed a kind of contactless high-precision parabola vertex curvature radius new method of measuring that is different from said method fully.It is the relation of its focal length twice that the method is utilized tested parabola vertex curvature radius, form the self-reflection light path by the part plane mirror, utilize confocal technology accurately tested paraboloidal focal position, location and vertex position, and then high precision records paraboloidal focal length and vertex curvature radius value.
The present invention uses confocal technology the parameter measurement field of aspherical optical element first, this technology has than measuring method in the past that measuring accuracy is high, optical path succinctly reaches the plurality of advantages such as intelligent degree height, for parabola vertex curvature radius high precision non-contact measurement provides an effective approach.
Summary of the invention
In order to solve the high precision non-contact measurement difficult problem of parabola vertex curvature radius, the present invention proposes a kind of confocal paraboloids vertex curvature radius measuring method.The core concept of the method is, utilize parabola can by focus on its focus the light beam aberrationless be collimated into the characteristic of parallel beam, the bound fraction plane mirror builds the self-reflection light path, utilize the maximum of points of confocal response curve accurately to locate paraboloidal summit and focal position, and then accurately record paraboloidal focal length and vertex curvature radius value.
The objective of the invention is to be achieved through the following technical solutions.
The confocal paraboloids vertex curvature radius measuring method that the present invention proposes is based on confocal component parameters measurement mechanism and realizes, this device comprises pointolite, spectroscope, collimation lens, object lens, confocal measuring system; Wherein, spectroscope, collimation lens, object lens are placed on the exit direction of light, and confocal measuring system is placed on spectroscopical reflection direction; The optical alignment that collimation lens sends pointolite becomes directional light, and directional light forms measuring beam for measuring after object lens are assembled; In measuring process, the light beam reflected enters confocal measuring system for generation of confocal response curve after being reflected by spectroscope.
A kind of confocal paraboloids vertex curvature radius measuring method of the present invention comprises the following steps:
(a) open pointolite, its light sent permeation parts plane mirror after spectroscope, collimation lens and object lens is radiated on tested parabola, and by tested paraboloidal surface reflection, the light reflected enters confocal measuring system by the spectroscope reflection;
(b) adjustment member plane mirror and tested parabola, make its all with the object lens common optical axis, the optical alignment that collimation lens produces pointolite becomes directional light, and directional light forms measuring beam permeation parts plane mirror and is radiated on tested parabola after object lens are assembled;
(c) move tested parabola along optical axis direction, the focusing focus of measuring beam and tested parabolic surface are approached, the light beam of being returned by tested parabolic reflector enters confocal measuring system after the spectroscope reflection; Near the tested parabola of scanning this position, record confocal response curve by confocal measuring system, determine that by the maximum of points of confocal response curve the focus of measuring beam and tested paraboloidal surface coincide, and then accurately determine tested paraboloidal vertex position, record is tested paraboloidal position z now
1;
(d) continue tested parabola is moved along optical axis direction, focusing focus and the tested paraboloidal focal position of measuring beam are approached, now measuring beam forms parallel beam and is radiated on the part plane mirror after tested parabolic reflector, by returning along original optical path after the reflection of part plane mirror, the light beam reflected enters confocal measuring system after the spectroscope reflection; Near the tested parabola of scanning this position, record confocal response curve by confocal measuring system, determine that by the maximum of points of confocal response curve the focus of measuring beam and tested paraboloidal focus coincide, and then accurately determine tested paraboloidal focal position, record is tested paraboloidal position z now
2;
(e) focus according to above-mentioned twice the tested parabola position z obtained
1, z
2between apart from d, can record tested paraboloidal focal distance f '=d=z
1-z
2, tested paraboloidal vertex curvature radius r=2f '=2 (z
1-z
2).
Confocal paraboloids vertex curvature radius measuring method of the present invention can also increase annular pupil measuring beam is modulated in light path, forms annular beam, reduces ripple while focusing and differs the impact on measuring beam, improves Focus accuracy.
Confocal paraboloids vertex curvature radius measuring method of the present invention can also increase depth of focus compression optical system in measuring beam, makes itself and confocal measuring system cooperating, and raising focuses sensitivity.
Confocal paraboloids vertex curvature radius measuring method of the present invention, the light that can also send pointolite carries out intensity modulation, light intensity sensor in confocal measuring system is surveyed the confocal response signal that obtains modulated system, to after this modulation signal demodulation, obtain confocal response curve, improve the sensitivity that focuses of system.
Beneficial effect:
The present invention contrasts prior art and has following innovative point:
1. propose first confocal measurement method is applied to the fields of measurement of parabola focal length and vertex curvature radius, utilize parabola can by focus on its focus the light beam aberrationless be collimated into the characteristic of parallel beam, the bound fraction plane mirror builds the self-reflection light path, utilize the maximum of points of confocal response curve accurately to locate paraboloidal summit and focal position, and then accurately record paraboloidal focal length and vertex curvature radius value;
2. in this measuring method, confocal principle is usingd the Intensity response curve as focusing criterion, and coordinates confocal system to carry out intensity modulation and filtering, can effectively cut down the impact of the environmental interference such as air turbulence on measuring accuracy;
3. introduce annular pupil in light path, block paraxial rays, form hollow measurement light cone, cut down the impact on measurement result of aberration.
The present invention contrasts prior art and has following remarkable advantage:
1. confocal technology is usingd axial Intensity response curve as opinion scale, due to the object distance of optical system change the logitudinal magnification caused change be hang down the axle magnification change square, so the present invention compares other optical non-contact measurement method Focus accuracy, significantly improve;
2. the confocal measuring system light path is simple, is easy to realize, can effectively reduce the system research and development cost;
3. the method is the non-cpntact measurement method, in measuring process, can not contact tested parabolic surface, and therefore than the contact type measurement method, the method has the advantage that can not scratch tested parabolic surface in measuring process.
The accompanying drawing explanation
The schematic diagram that Fig. 1 is confocal paraboloids vertex curvature radius measuring method of the present invention;
Fig. 2 is the schematic diagram that confocal paraboloids vertex curvature radius of the present invention is measured embodiment;
Fig. 3 is that the present invention is surveyed the confocal response curve obtained by confocal measuring system;
Wherein: 1-pointolite, 2-spectroscope, 3-collimation lens, 4-object lens, 5-part plane mirror, the tested parabola of 6-, 7-confocal measuring system, 8-pin hole, 9-light intensity sensor, 10-microcobjective, 11-CCD detector, 12-image pick-up card, 13-main control computer, 14-electromechanical controlling device, 15-rectilinear translation guide rail, the four-dimensional adjustment rack of 16-, 17-laser instrument, 18-optical fiber, 19-pointolite generating means.
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described.
The present invention uses a kind of parabola focal length and vertex curvature radius measuring method based on confocal measuring technique, has significantly improved the positioning precision to tested parabola summit and focus.Its core concept is, utilize parabola can by focus on its focus the light beam aberrationless be collimated into the characteristic of parallel beam, the bound fraction plane mirror builds the self-reflection light path, utilize the maximum of points of confocal response curve accurately to locate paraboloidal summit and focal position, and then accurately record paraboloidal focal length and vertex curvature radius value.
In embodiment, tested parabola 6 bores are 30mm, the vertex curvature radius of design is 48mm, through China National Measuring Science Research Inst., use the UA3P three-coordinates measuring machine to demarcate by the contact type measurement method, its vertex curvature radius is 47.976mm, to the measuring process of its vertex curvature radius, is:
(a) start the Survey Software in main control computer 13, open laser instrument 17, the light that laser instrument 17 sends forms pointolite 1 after optical fiber 18 transmission.The light that pointolite 1 sends permeation parts plane mirror 5 after spectroscope 2, collimation lens 3 and object lens 4 forms measuring beams, and adjustment member plane mirror 5 makes itself and object lens 4 common optical axis;
(b) tested parabola 6 is positioned on four-dimensional adjustment rack 16, by four-dimensional adjustment rack 16, adjusts tested parabola 6, make itself and object lens 4 common optical axis;
(c) Survey Software in main control computer 13 is controlled rectilinear translation guide rail 15 axial translations by electromechanical controlling device 14, and then drives tested parabola 6 and move along optical axis direction.Tested parabola 6 is moved to its surface to be close with the focusing focus of measuring beam, then scan tested parabola 6 near this position, Survey Software collects the focus spot data and processes out confocal response curve as shown in Figure 3 by image pick-up card 12.Determine that by the maximum of points of confocal response curve the focusing focus of measuring beam and the surface of tested parabola 6 coincide, and then accurately determine the vertex position of tested parabola 6, now the position z of tested parabola 6
1=23.99474mm;
(d) tested parabola 6 is moved along optical axis direction, the focusing focus of measuring beam and the focal position of tested parabola 6 are approached, now measuring beam formation parallel beam after tested parabola 6 reflections is radiated on part plane mirror 5, by returning along original optical path after 5 reflections of part plane mirror, the light beam reflected enters confocal measuring system after spectroscope 2 reflections.Near the tested parabola 6 of scanning this position, Survey Software again collects the focus spot data and processes out confocal response curve as shown in Figure 3 by image pick-up card 12.Determine that by the maximum of points of confocal response curve the focusing focus of measuring beam and the focus of tested parabola 6 coincide, and then accurately determine the focal position of tested parabola 6, now the position of tested parabola 6 is z
2=0.00686mm;
(e) according to the position z that focuses the tested parabola 6 obtained for above-mentioned twice
1, z
2, can obtain z
1, z
2between apart from d=23.99474-0.00686mm=23.98788mm, and then can obtain the focal distance f of tested parabola 6 '=d=23.98788mm, vertex curvature radius r=2f '=47.9758mm.Measurement result is consistent with the UA3P calibration result.
(f) vertex curvature radius of tested parabola 6 carried out to 10 duplicate measurementss, and it is carried out to analysis on Uncertainty, the expanded uncertainty that obtains measurement result is 0.63 μ m, and measuring accuracy is better than 0.003%.
Than the measuring accuracy 3% of axial aberration mensuration, the measuring accuracy 0.02% of interferometry, the measuring accuracy 0.5% of ray tracing mensuration, the confocal paraboloids vertex curvature radius measuring method measurement parabola vertex curvature radius measuring accuracy that adopts the present invention to propose significantly improves.
As shown in Figure 1, the confocal measuring system 7 in this confocal paraboloids vertex curvature radius measuring method comprises pin hole 8 and light intensity sensor 9.The light reflected by spectroscope 2 is radiated on light intensity sensor 9 by pin hole 8 after entering confocal measuring system 7.In actual system design, usually adopt confocal measuring system 7 as shown in Figure 2 to reduce the system resetting difficulty.This confocal measuring system 7 comprises microcobjective 10 and ccd detector 11.Wherein the object plane of microcobjective 10 is positioned at the focusing surface of folded light beam, at it, as plane, places ccd detector 11.The light reflected by spectroscope 2 is imaged on ccd detector 11 by microcobjective 10 after entering confocal measuring system 7.
This embodiment has realized the measurement to focal length and the vertex curvature radius of tested parabola 6 by a series of measure.In measuring process, adopt confocal measurement method accurately to focus focus and the summit of tested parabola 6, measuring accuracy is high, and anti-environmental interference ability is strong.
Below by reference to the accompanying drawings the specific embodiment of the present invention is described; but these explanations can not be understood to limit scope of the present invention; protection scope of the present invention is limited by the claims of enclosing, and any change on the claims in the present invention basis is all protection scope of the present invention.
Claims (4)
1. confocal paraboloids vertex curvature radius measuring method is characterized in that:
(a) open pointolite, its light sent permeation parts plane mirror after spectroscope, collimation lens and object lens is radiated on tested parabola, and by tested paraboloidal surface reflection, the light reflected enters confocal measuring system by the spectroscope reflection;
(b) adjustment member plane mirror and tested parabola, make its all with the object lens common optical axis, the optical alignment that collimation lens produces pointolite becomes directional light, and directional light forms measuring beam permeation parts plane mirror and is radiated on tested parabola after object lens are assembled;
(c) move tested parabola along optical axis direction, the focusing focus of measuring beam and tested parabolic surface are approached, the light beam of being returned by tested parabolic reflector enters confocal measuring system after the spectroscope reflection; Near the tested parabola of scanning this position, record confocal response curve by confocal measuring system, determine that by the maximum of points of confocal response curve the focus of measuring beam and tested paraboloidal surface coincide, and then accurately determine tested paraboloidal vertex position, record is tested paraboloidal position z now
1;
(d) continue tested parabola is moved along optical axis direction, focusing focus and the tested paraboloidal focal position of measuring beam are approached, now measuring beam forms parallel beam and is radiated on the part plane mirror after tested parabolic reflector, by returning along original optical path after the reflection of part plane mirror, the light beam reflected enters confocal measuring system after the spectroscope reflection; Near the tested parabola of scanning this position, record confocal response curve by confocal measuring system, determine that by the maximum of points of confocal response curve the focus of measuring beam and tested paraboloidal focus coincide, and then accurately determine tested paraboloidal focal position, record is tested paraboloidal position z now
2;
(e) focus according to above-mentioned twice the tested parabola position z obtained
1, z
2between apart from d, can record tested paraboloidal focal distance f '=d=z
1-z
2, tested paraboloidal vertex curvature radius r=2f '=2 (z
1-z
2).
2. confocal paraboloids vertex curvature radius measuring method according to claim 1, it is characterized in that: increase annular pupil in light path measuring beam is modulated, form annular beam, reduce ripple while focusing and differ the impact on measuring beam, improve Focus accuracy.
3. confocal paraboloids vertex curvature radius measuring method according to claim 1 is characterized in that: increase depth of focus compression optical system in measuring beam, make itself and confocal measuring system cooperating, raising focuses sensitivity.
4. confocal paraboloids vertex curvature radius measuring method according to claim 1, it is characterized in that: the light that pointolite is sent carries out intensity modulation, light intensity sensor in confocal measuring system is surveyed the confocal response signal that obtains modulated system, to after this modulation signal demodulation, obtain confocal response curve, thereby improve the sensitivity that focuses of system.
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Cited By (7)
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| CN104374548A (en) * | 2014-11-17 | 2015-02-25 | 中国科学院光电技术研究所 | Interferometric method for measuring refractive index of lens |
| CN109307481A (en) * | 2018-11-13 | 2019-02-05 | 北京理工大学 | High-speed sensor confocal micro-measurement method |
| CN109931874A (en) * | 2019-04-04 | 2019-06-25 | 北京理工大学 | Ball-type inertance element fit clearance laser differential confocal precision measurement method |
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| CN110044414A (en) * | 2019-04-19 | 2019-07-23 | 北京理工大学 | Laterally subtract each other differential confocal interference element Multi-parameter Measurement Method and device |
| CN110044415A (en) * | 2019-04-19 | 2019-07-23 | 北京理工大学 | Misplace differential confocal interference element Multi-parameter Measurement Method and device |
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Cited By (9)
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| CN104374548A (en) * | 2014-11-17 | 2015-02-25 | 中国科学院光电技术研究所 | Interferometric method for measuring refractive index of lens |
| CN104374548B (en) * | 2014-11-17 | 2017-02-22 | 中国科学院光电技术研究所 | Interferometric method for measuring refractive index of lens |
| CN111512148A (en) * | 2017-12-19 | 2020-08-07 | 皇家飞利浦有限公司 | Testing of arc-shaped X-ray gratings |
| CN109307481A (en) * | 2018-11-13 | 2019-02-05 | 北京理工大学 | High-speed sensor confocal micro-measurement method |
| CN109307481B (en) * | 2018-11-13 | 2020-02-04 | 北京理工大学 | High-speed sensing confocal microscopic measurement method |
| CN110006360A (en) * | 2019-03-08 | 2019-07-12 | 北京理工大学 | Confocal laser nuclear fusion pellet geometric parameter comprehensive measuring method and device |
| CN109931874A (en) * | 2019-04-04 | 2019-06-25 | 北京理工大学 | Ball-type inertance element fit clearance laser differential confocal precision measurement method |
| CN110044414A (en) * | 2019-04-19 | 2019-07-23 | 北京理工大学 | Laterally subtract each other differential confocal interference element Multi-parameter Measurement Method and device |
| CN110044415A (en) * | 2019-04-19 | 2019-07-23 | 北京理工大学 | Misplace differential confocal interference element Multi-parameter Measurement Method and device |
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