CN103615971B - For detecting the optical interdferometer of cylindrical outer surface - Google Patents

For detecting the optical interdferometer of cylindrical outer surface Download PDF

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Publication number
CN103615971B
CN103615971B CN201310585580.0A CN201310585580A CN103615971B CN 103615971 B CN103615971 B CN 103615971B CN 201310585580 A CN201310585580 A CN 201310585580A CN 103615971 B CN103615971 B CN 103615971B
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convex lens
cylinder
reflecting mirror
annular slope
slope reflecting
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CN103615971A (en
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韩森
李雪园
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SUZHOU H&L INSTRUMENTS LLC
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SUZHOU H&L INSTRUMENTS LLC
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Abstract

A kind of optical interdferometer for detecting cartridge outer surface of disclosure, optically focused convex lens laser instrument and collimation convex lens between and optically focused convex lens focus with collimate convex lens focus overlap;Described beam splitter is between optically focused convex lens and collimation convex lens, and the light for auto-collimation convex lens in the future is divided into the first light beam and the second light beam;The surface that described standard optic plane glass crystal is positioned at the side that collimation convex lens is opposing with beam splitter, this standard optic plane glass crystal and collimation convex lens opposing is standard flat;The annular reflection inclined-plane being positioned at annular slope reflecting mirror central authorities along its circumference and is positioned at inner side, described described cylinder to be detected is positioned at annular slope reflecting mirror, and the rotating shaft of annular slope reflecting mirror and cylinder and the respective dead in line of standard optic plane glass crystal, the annular reflection inclined-plane of described annular slope reflecting mirror and the outer surface of cylinder are placed face-to-face.Present invention achieves the whole stereoscopic column external surface topographical information of disposable acquisition, also substantially increase testing efficiency, precision and reliability simultaneously.

Description

For detecting the optical interdferometer of cylindrical outer surface
Technical field
The present invention relates to optical detection apparatus, particularly relate to a kind of optical interdferometer for detecting cartridge outer surface.
Background technology
Optical interference techniques is one of modern times the most accurate effective measuring technology, it integrates state-of-the-art technology in the present age, the newest fruits in the fields such as widely used computer technology, laser technology, electronic technology, semiconductor technology, can be completed rapidly and accurately the inspection to optical element Yu system.At optical workshops of today, from the Design and Machining of optical element and inspection debuging, correct and testing to optical system, interferometer have become as a kind of easily operated, reliable, in high precision, intelligentized requisite test verification device, it has immeasurable effect in the production in enormous quantities and inspection of optical element and system.
But, existing interferometer is often for surface testing pattern deviation, for instance bending or local buckling or embossed area, and the Shape measure for three-dimensional surface shape needs repeatedly repeatedly to detect, it is impossible to once obtain whole three-dimensional surface shape pattern;Secondly, existing interferometer accuracy of detection and reliability are easily by extraneous vibration and the such environmental effects such as temperature, air-flow.Therefore, how to design the optical interdferometer of the high accuracy of the whole stereoscopic column external surface topographical information of a kind of disposable acquisition, reliability, become the direction that those skilled in the art make great efforts.
Summary of the invention
The present invention provides a kind of optical interdferometer for detecting cartridge outer surface, and this optical interdferometer achieves the whole stereoscopic column external surface topographical information of disposable acquisition, also substantially increases testing efficiency, precision and reliability simultaneously.
For reaching above-mentioned purpose, the technical solution used in the present invention is: a kind of optical interdferometer for detecting cartridge outer surface, described outer surface is along cylinder circumference and is positioned at inner side or outside, including laser instrument, optically focused convex lens, beam splitter, as the collimation convex lens of object lens, standard optic plane glass crystal and annular slope reflecting mirror, described optically focused convex lens between laser instrument and collimation convex lens and the focus of optically focused convex lens overlap with the focus collimating convex lens;Described beam splitter is between optically focused convex lens and collimation convex lens, and the light for auto-collimation convex lens in the future is divided into the first light beam and the second light beam;The surface that described standard optic plane glass crystal is positioned at the side that collimation convex lens is opposing with beam splitter, this standard optic plane glass crystal and collimation convex lens opposing is standard flat;
The annular reflection inclined-plane being positioned at annular slope reflecting mirror central authorities along its circumference and is positioned at inner side, described described cylinder to be detected is positioned at annular slope reflecting mirror, and the rotating shaft of annular slope reflecting mirror and cylinder and the respective dead in line of standard optic plane glass crystal, the annular reflection inclined-plane of described annular slope reflecting mirror and the outer surface of cylinder are placed face-to-face, and this annular slope reflecting mirror moves along axis thus realizing the outer surface to cylinder and scanning;
Interference pattern receives parts and is positioned at described beam splitter side, for receiving the second light beam from beam splitter.
Technique scheme further improvement opportunity scheme is as follows:
1., in such scheme, when the outer surface of cylinder is parallel with column axis, the cone angle of described annular slope reflecting mirror is right angle;When the outer surface of cylinder and the angle theta of column axis are acute angle, the cone angle of described annular slope reflecting mirror is obtuse angle;When the outer surface of cylinder and the angle theta of column axis are obtuse angle, the cone angle of described annular slope reflecting mirror is acute angle.
2., in such scheme, described optically focused convex lens and the focus overlapping position collimating convex lens are provided with one first aperture.
3., in such scheme, described beam splitter and interference pattern receive and are provided with a second orifice diaphragm between parts.
4., in such scheme, it is CCD camera or imaging screen that described interference pattern receives parts.
Owing to technique scheme is used, the present invention compared with prior art has the advantage that
1. the present invention is for detecting the optical interdferometer of cartridge outer surface, its optically focused convex lens between laser instrument and collimation convex lens and the focus of optically focused convex lens overlap with the focus collimating convex lens;Described beam splitter is between optically focused convex lens and collimation convex lens, and the light for auto-collimation convex lens in the future is divided into the first light beam and the second light beam;Described standard optic plane glass crystal is positioned at the side that collimation convex lens is opposing with beam splitter, this standard optic plane glass crystal and the surface collimating convex lens opposing are standard flat, the annular reflection inclined-plane being positioned at annular slope reflecting mirror central authorities along its circumference and is positioned at inner side, described described cylinder to be detected is positioned at annular slope reflecting mirror, and the rotating shaft of annular slope reflecting mirror and cylinder and the respective dead in line of standard optic plane glass crystal, the annular reflection inclined-plane of described annular slope reflecting mirror and the outer surface of cylinder are placed face-to-face, the energy whole stereoscopic column external surface topographical information of real-time disposable acquisition, improve testing efficiency and precision.
2. the present invention is for detecting the optical interdferometer of cartridge outer surface, its reference beam and measuring beam are through same light path, the change of vibration and the environmental factors such as temperature, air-flow can produce common mode inhibition each other to external world, generally also can obtain stable interference fringe without shock insulation and constant temperature, anti seismic efficiency is good, environmental requirement is low to external world, substantially increases precision and reliability.
Accompanying drawing explanation
Accompanying drawing 1 is cylinder one structural representation of the present invention;
Accompanying drawing 2 is the optical interdferometer structural representation for detecting accompanying drawing 1 cartridge outer surface;
Accompanying drawing 3 is cylinder two structural representation of the present invention;
Accompanying drawing 4 is the optical interdferometer structural representation for detecting accompanying drawing 3 cartridge outer surface;
Accompanying drawing 5 is the structural representation after accompanying drawing 3 cylinder overturns 180 °;
Accompanying drawing 6 is the optical interdferometer structural representation for detecting accompanying drawing 5 open tubular column outer surface;
Accompanying drawing 7 is Perfect Interferometry schematic diagram of the present invention.
In the figures above: 1, outer surface;2, cylinder;3, laser instrument;4, optically focused convex lens;5, beam splitter;6, collimation convex lens;7, standard optic plane glass crystal;71, standard flat;8, annular slope reflecting mirror;81, annular reflection inclined-plane;9, interference pattern receives parts;10, the first aperture;11, second orifice diaphragm.
Detailed description of the invention
Below in conjunction with drawings and Examples, the invention will be further described:
Embodiment 1: a kind of optical interdferometer for detecting cartridge outer surface, described outer surface 1 is along cylinder 2 circumference and is positioned at outside, including laser instrument 3, optically focused convex lens 4, beam splitter 5, as the collimation convex lens 6 of object lens, standard optic plane glass crystal 7 and annular slope reflecting mirror 8, described optically focused convex lens 4 between laser instrument 3 and collimation convex lens 6 and the focus of optically focused convex lens 4 overlap with the focus collimating convex lens 6;Described beam splitter 5 is between optically focused convex lens 4 and collimation convex lens 6, and the light for auto-collimation convex lens 6 in the future is divided into the first light beam and the second light beam;Described standard optic plane glass crystal 7 is positioned at the side that collimation convex lens 6 is opposing with beam splitter 5, and this standard optic plane glass crystal 7 and the surface collimating convex lens 6 opposing are standard flat 71;
The annular reflection inclined-plane 81 being positioned at annular slope reflecting mirror 8 central authorities along its circumference and is positioned at inner side, described described cylinder 2 to be detected is positioned at annular slope reflecting mirror 8, and the rotating shaft of annular slope reflecting mirror 8 and cylinder 2 and the respective dead in line of standard optic plane glass crystal 7, the annular reflection inclined-plane 81 of described annular slope reflecting mirror 8 is placed face-to-face with the outer surface 1 of cylinder 2, and this annular slope reflecting mirror 8 moves thus realizing the outer surface 1 of cylinder 2 is scanned along axis;
Interference pattern receives parts 9 and is positioned at described beam splitter 5 side, for receiving the second light beam from beam splitter 5.
Above-mentioned optically focused convex lens 4 and the focus overlapping position collimating convex lens 6 are provided with one first aperture 10.
Above-mentioned beam splitter 5 and interference pattern receive and are provided with a second orifice diaphragm 11 between parts 9.
It is CCD camera or imaging screen that above-mentioned interference pattern receives parts 9.
When the outer surface 1 of above-mentioned cylinder 2 is parallel with cylinder 2 axis, as shown in accompanying drawing 1,2, the cone angle of described annular slope reflecting mirror 8 is right angle, can pass through to move up and down annular slope reflecting mirror 8 and realize the vertical scanning detection of whole cylinder 2 outer surface.
Embodiment 2: a kind of optical interdferometer for detecting cartridge outer surface, described outer surface 1 is along cylinder 2 circumference and is positioned at outside, including laser instrument 3, optically focused convex lens 4, beam splitter 5, as the collimation convex lens 6 of object lens, standard optic plane glass crystal 7 and annular slope reflecting mirror 8, described optically focused convex lens 4 between laser instrument 3 and collimation convex lens 6 and the focus of optically focused convex lens 4 overlap with the focus collimating convex lens 6;Described beam splitter 5 is between optically focused convex lens 4 and collimation convex lens 6, and the light for auto-collimation convex lens 6 in the future is divided into the first light beam and the second light beam;Described standard optic plane glass crystal 7 is positioned at the side that collimation convex lens 6 is opposing with beam splitter 5, and this standard optic plane glass crystal 7 and the surface collimating convex lens 6 opposing are standard flat 71;
The annular reflection inclined-plane 81 being positioned at annular slope reflecting mirror 8 central authorities along its circumference and is positioned at inner side, described described cylinder 2 to be detected is positioned at annular slope reflecting mirror 8, and the rotating shaft of annular slope reflecting mirror 8 and cylinder 2 and the respective dead in line of standard optic plane glass crystal 7, the annular reflection inclined-plane 81 of described annular slope reflecting mirror 8 is placed face-to-face with the outer surface 1 of cylinder 2, and this annular slope reflecting mirror 8 moves thus realizing the outer surface 1 of cylinder 2 is scanned along axis;
Interference pattern receives parts 9 and is positioned at described beam splitter 5 side, for receiving the second light beam from beam splitter 5.
Above-mentioned optically focused convex lens 4 and the focus overlapping position collimating convex lens 6 are provided with one first aperture 10.
Above-mentioned beam splitter 5 and interference pattern receive and are provided with a second orifice diaphragm 11 between parts 9.
It is CCD camera or imaging screen that above-mentioned interference pattern receives parts 9.
When the outer surface 1 of above-mentioned cylinder 2 is acute angle with the angle theta of cylinder 2 axis, the cone angle of described annular slope reflecting mirror 8 is obtuse angle, can pass through to move up and down annular slope reflecting mirror 8 and realize the vertical scanning detection of whole cylinder 2 outer surface;
When the outer surface 1 of above-mentioned cylinder 2 is obtuse angle with the angle theta of cylinder 2 axis, the cone angle of described annular slope reflecting mirror 8 is acute angle, can pass through to move up and down annular slope reflecting mirror 8 and realize the vertical scanning detection of whole cylinder 2 outer surface.
The present embodiment is for detecting the optical interdferometer of cartridge outer surface, and work process is as follows.
Described by the light beam of laser instrument 3 outgoing by optically focused convex lens 4 converge at collimation convex lens 6 focus on aperture 10, light beam passes through to collimate convex lens 6 with exiting parallel through beam splitter 5, through standard optic plane glass crystal 7, reflex on tested cylinder 2 outer surface 1 then through annular slope reflecting mirror 8.The lower surface of quasi-optical flat 7 is standard flat 71, and coaxially and the vertical lower section being put in standard optic plane glass crystal 7,1 i.e. tested surface is put down in the outside outside the cylinder 2 corresponding to annular reflection inclined-plane 81 of annular slope reflecting mirror 8 for annular slope reflecting mirror 8 and tested cylinder 2.A part of light reflects from standard flat 71, and another part light therethrough standard flat 71 is mapped on tested outer surface 1, tested outer surface 1 be reflected back a part of light.This two parts light all reflects through beam splitter 5, forms two bright little aperture aberrations at emergent pupil 11 place.Again interference pattern is received on parts 9 i.e. CCD camera focusing interference fringe localization face between standard flat 71 and tested outer surface 1, just can absorb on localization face by the interference pattern formed between standard flat 71 and tested outer surface 1, then carried out wavefront restroration and information processing by the professional software in computer.Ibid, the latter half of measured piece during one-time detection, can only be detected, so after one-time detection, measured piece will be revolved turnback, detect the first half.
Above-described embodiment only for technology design and the feature of the present invention are described, its object is to allow person skilled in the art will appreciate that present disclosure and to implement according to this, can not limit the scope of the invention with this.All equivalences made according to spirit of the invention change or modify, and all should be encompassed within protection scope of the present invention.

Claims (3)

1. the optical interdferometer being used for detecting cartridge outer surface, described outer surface (1) is along cylinder (2) circumference and is positioned at outside, it is characterized in that: include laser instrument (3), optically focused convex lens (4), beam splitter (5), as the collimation convex lens (6) of object lens, standard optic plane glass crystal (7) and annular slope reflecting mirror (8), described optically focused convex lens (4) is positioned between laser instrument (3) and collimation convex lens (6) and the focus of optically focused convex lens (4) overlaps with the focus collimating convex lens (6);Described beam splitter (5) is positioned between optically focused convex lens (4) and collimation convex lens (6), and the light for auto-collimation convex lens (6) in the future is divided into the first light beam and the second light beam;The surface that described standard optic plane glass crystal (7) is positioned at the side that collimation convex lens (6) is opposing with beam splitter (5), this standard optic plane glass crystal (7) and collimation convex lens (6) opposing is standard flat (71);
The annular reflection inclined-plane (81) being positioned at annular slope reflecting mirror (8) central authorities along its circumference and is positioned at inner side, described cylinder (2) to be detected is positioned at annular slope reflecting mirror (8), and the rotating shaft of annular slope reflecting mirror (8) and cylinder (2) and standard optic plane glass crystal (7) respective dead in line, the annular reflection inclined-plane (81) of described annular slope reflecting mirror (8) and the outer surface (1) of cylinder (2) are placed face-to-face, and this annular slope reflecting mirror (8) moves along axis thus realizing outer surface (1) scanning to cylinder (2);
Interference pattern receives parts (9) and is positioned at described beam splitter (5) side, for receiving the second light beam from beam splitter (5);When the outer surface (1) of cylinder (2) is parallel with cylinder (2) axis, the cone angle of described annular slope reflecting mirror (8) is right angle;When the outer surface (1) of cylinder (2) and the angle theta of cylinder (2) axis are acute angle, the cone angle of described annular slope reflecting mirror (8) is obtuse angle;When the outer surface (1) of cylinder (2) and the angle theta of cylinder (2) axis are obtuse angle, the cone angle of described annular slope reflecting mirror (8) is acute angle;Described optically focused convex lens (4) and the focus overlapping position collimating convex lens (6) are provided with one first aperture (10).
2. optical interdferometer according to claim 1, it is characterised in that: described beam splitter (5) and interference pattern receive and are provided with a second orifice diaphragm (11) between parts (9).
3. optical interdferometer according to claim 1, it is characterised in that: it is CCD camera that described interference pattern receives parts (9).
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CN103913134B (en) * 2014-04-30 2016-06-01 陈姚佳 The device for fast detecting of thin cylindrical workpiece surfaceness and detection method thereof
CN108534712A (en) * 2018-06-16 2018-09-14 复旦大学 A kind of cylinder face shape interference checking device
CN111238392B (en) * 2018-11-28 2021-11-02 Oppo(重庆)智能科技有限公司 Carrier and detection device of electronic equipment
CN110030949B (en) * 2019-05-06 2020-12-01 苏州慧利仪器有限责任公司 Air isolation device and laser interference detection equipment
CN110954007B (en) * 2019-11-27 2022-06-07 长江存储科技有限责任公司 Wafer detection system and detection method
CN112817117B (en) * 2020-12-28 2022-10-21 西南技术物理研究所 Parabolic reflector auxiliary device with auto-collimation adjusting function

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