CN109307481A - High-speed sensor confocal micro-measurement method - Google Patents
High-speed sensor confocal micro-measurement method Download PDFInfo
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Abstract
The present invention relates to a kind of high-speed sensor confocal micro-measurement methods, belong to optical imagery and detection technique field.The present invention, which subtracts each other the dislocation of confocal axial characteristic curve itself two sides data group, obtains sensing characteristics curve divided by addition, axial scan interval is set to magnitude of misalignment when to sample axial scan, light intensity maximum value in axial scan data and light intensity second largest value are subtracted each other after the completion of scanning and handled divided by being added, then goes out confocal axial characteristic Curve Maximization point position using the accurate inverse of sensing characteristics curve.Using the present invention between magnitude of misalignment size is divided into axial scan set when Sample Scan, axial scan interval of the present invention is big, therefore is remarkably improved the imaging efficiency of existing confocal measurement method；The sensing characteristics curve of this method is very sensitive to the variation of sample axial position simultaneously, therefore the existing confocal measurement method of ratio of precision that should calculate confocal axial characteristic Curve Maximization point position by this method is high.The present invention will provide a kind of new technological approaches for confocal imaging/detection field.
Description
Technical field
The present invention relates to a kind of high-speed sensor confocal micro-measurement methods.It can be used for three-dimensional microstructure, micro- step, Wei Gou
Slot, integrated circuit line width, surface topography and surface measurement positioning etc..Belong to optical imagery and detection technique field.
Background technique
The thought of confocal microscope is put forward for the first time by American scholar M.Minsky in nineteen fifty-seven earliest, and is obtained in 1961
United States Patent (USP), Patent No. US3013467.Point light source, point object and point detector three are placed in and are corresponded to each other by confocal microscope
Conjugate position, constitute unique chromatography ability in optical microscopy imaging point illumination and point detection micro imaging system.
The basic principle of confocal microscope is as shown in Figure 1, the light that light source issues passes through space filtering pin hole and spectroscope quilt
Object lens focus on the surface of sample, by the measurement light for carrying sample message of sample reflection along backtracking, lead to
Spectroscope reflection is crossed finally to focus on the measurement light from sample in the pin hole before being placed in photodetector.Photodetector is
Point detects, measurement light of the primary recipient at object focal point, and the return light other than focus is blocked by pin hole.When object is located at coke
When plane F, light intensity that photodetector receives is maximum, when object deviates focal plane F, reflected light be focused on before pin hole or
A certain position afterwards, photodetector only receives sub-fraction light energy at this time, that is to say, that object was detected in defocus
Light intensity is weaker than at focal plane, and confocal axial response curve shown in Fig. 2 can be thus detected by photodetector,
The height and position of sample is measured by obtaining the extreme point position of confocal axial response curve.
The method for commonly obtaining the extreme point position of confocal axial response curve has maximum value process, centroid method, Gaussian function
Number fitting process, polynomial fitting method.These methods obtain the precision of the extreme point position of curve all by axial characteristic curve
The influence of significant figure strong point number on main lobe (Main lobe), significant figure strong point number can seriously affect extreme value point very little
Set acquisition precision.The available point number increased on axial characteristic curve Main lobe in order to improve precision will cause scanning
The decline of efficiency.Therefore, existing method cannot be considered in terms of accuracy and speed.
Summary of the invention
The problem of cannot be considered in terms of accuracy and speed the purpose of the present invention is to solve the prior art provides a kind of high speed biography
Feel confocal micro-measurement method, set axial scan interval is compared with existing confocal measurement method when this method is to Sample Scan
Axial scan larger interval, therefore it is remarkably improved the imaging efficiency of existing confocal measurement method；The biography that this method obtains simultaneously
It is very sensitive to the variation of sample axial position to feel characteristic curve, therefore confocal characteristic curve extreme value point should be calculated by this method
The existing confocal measurement method of the sensitivity and ratio of precision set is high, and this method can improve extreme point position acquisition precision simultaneously and sweep
Retouch efficiency.
The purpose of the present invention is what is be achieved through the following technical solutions.
A kind of high-speed sensor confocal micro-measurement method passes high speed since the approach for obtaining sensing characteristics curve is different
Sense confocal micro-measurement method is divided into two kinds of situations, is introduced respectively the step of two kinds of situations below.
Situation one the following steps are included:
Step 1: determining the maximum value M of confocal axial strength response numerical value, and confocal axial strength is responded using M as boundary
Numerical value is divided into left side data group and right edge data group；
Step 2: keeping right edge data group motionless, making left side data group, transversely coordinate translation S obtains the left side right side
Data group is moved, left side moves to right data group and right edge data group crosses；
It is carried out at the interpolation of identical abscissa point respectively Step 3: moving to right data group to right edge data group and left side
Reason, identical two data point of abscissa in two groups of data after interpolation processing is subtracted each other again divided by its additive value, to obtain a left side
Side, which moves to right, subtracts each other divided by summarized information group；
Step 4: take left side move to right subtract each other it is sensitive divided by changing in summarized information group near zero and to axial displacement
Data segment carries out fitting of a polynomial, obtains that left side moves to right sensing characteristics curve and left side moves to right sensing characteristics equation zL(I)
=amIm+am-1Im-1+…+a2I2+a1I+a0, by equation zL(I) constant term a0S/2 is replaced with, left side is finally obtained and moves to right biography
Sense characteristic equation is zL(I)=amIm+am-1Im-1+…+a2I2+a1I+S/2；
Step 5: being axial scan interval to sample axial scan using translational movement S, light in axial scan data is obtained
Strong maximum of points I23With light intensity second largest value point I in axial scan data24；
Step 6: comparing light intensity maximum of points I in axial scan data23With light intensity second largest value point in axial scan data
I24Corresponding axial position, works as I24Corresponding axial position is greater than I23When corresponding axial position, by I25=(I23-
I24)/(I23+I24) substitute into left side move to right sensing characteristics equation, h=z is calculatedL(I25)；Work as I23Corresponding axial position is big
In I24When corresponding axial position, by I25=(I24-I23)/(I24+I23) substitute into left side move to right sensing characteristics equation, calculate
To h=zL(I25)；
Step 7: comparing light intensity maximum of points I in axial scan data23With light intensity second largest value point in axial scan data
I24It is confocal to obtain to subtract the h that step 6 obtains using biggish position in two axial positions for corresponding axial position
The exact position f of measuring system focus.
Situation two the following steps are included:
Step 1: determining the maximum value M of confocal axial strength response numerical value, and confocal axial strength is responded using M as boundary
Numerical value is divided into left side data group and right edge data group；
Step 2: keeping left side data group motionless, making right edge data group, transversely coordinate translation-S obtains right edge
Left shift date group, right edge left shift date group and left side data group cross；
Step 3: being carried out respectively to left side data group and right edge left shift date group at the interpolation of identical abscissa point
Reason, identical two data point of abscissa in two groups of data after interpolation processing is subtracted each other again divided by its additive value, to obtain the right side
Side, which moves to left, subtracts each other divided by summarized information group；
Step 4: take right edge move to left subtract each other it is sensitive divided by changing in summarized information group near zero and to axial displacement
Data segment carries out fitting of a polynomial, obtains that right edge moves to left sensing characteristics curve and right edge moves to left sensing characteristics equation zR(I)
=amIm+am-1Im-1+…+a2I2+a1I+a0, by equation zR(I) constant term a0- S/2 is replaced with, right edge is finally obtained and moves to left
Sensing characteristics equation is zR(I)=amIm+am-1Im-1+…+a2I2+a1I-S/2；
Step 5: being axial scan interval to sample axial scan using translational movement S, light in axial scan data is obtained
Strong maximum of points I23With light intensity second largest value point I in axial scan data24；
Step 6: comparing light intensity maximum of points I in axial scan data23With light intensity second largest value point in axial scan data
I24Corresponding axial position, works as I24Corresponding axial position is greater than I23When corresponding axial position, by I25=(I23-
I24)/(I23+I24) substitute into right edge move to left sensing characteristics equation, h=z is calculatedR(I25)；Work as I23Corresponding axial position is big
In I24When corresponding axial position, by I25=(I24-I23)/(I24+I23) substitute into right edge move to left sensing characteristics equation, calculate
To h=zR(I25)；
Step 7: comparing light intensity maximum of points I in axial scan data23With light intensity second largest value point in axial scan data
I24It is confocal to obtain to subtract the h that step 6 obtains using lesser position in two axial positions for corresponding axial position
The exact position f of measuring system focus.
Situation one of the present invention and two the step of situation two in data group transversely coordinate translational movement S by measurement accuracy and survey
Amount efficiency requires to codetermine.
Situation one of the present invention and four the step of situation two in accelerate to handle by directly carrying out data segment straight line fitting
Process.
Beneficial effect
1, a set of equipment need to only be made primary by the operation that fitting obtains sensing characteristics equation and saves, to sample reality
The sensing characteristics equation saved is called when scanning；
2, the present invention in sample actual scanning using translational movement S as axial scan interval, since S is compared with conventional confocal measurement side
The axial scan interval of method is big, thus the invention is higher than conventional confocal measurement method scan efficiency；,
3, the present invention translates and subtracts each other using the data point of confocal axial strength response maximum value two sides and handles divided by addition
Sensing characteristics curve is obtained, sensing characteristics curve is very sensitive to the variation of sample axial position, thus special using the sensing
The extreme point position precision sensitiveer than common method for the confocal axial response that linearity curve inverse goes out is higher.Therefore the present invention is simultaneously
Improve measurement efficiency and measurement accuracy.
Detailed description of the invention
Fig. 1 is confocal microscope schematic diagram；
Fig. 2 is confocal microscope axial response theory curve；
Fig. 3 is that high-speed sensor confocal micro-measurement method of the present invention shows left side data shift right acquisition sensing characteristics equation
It is intended to；
Right edge data are moved to left acquisition sensing characteristics equation for high-speed sensor confocal micro-measurement method of the present invention and shown by Fig. 4
It is intended to；
Fig. 5 is the sensing characteristics side that high-speed sensor confocal micro-measurement method of the present invention is obtained using left side data shift right
Journey is in light intensity maximum of points I23Axial position data are less than light intensity second largest value point I24Confocal axial sound is calculated when axial position data
Answer the schematic diagram of extreme point position；
Fig. 6 is the sensing characteristics side that high-speed sensor confocal micro-measurement method of the present invention is obtained using left side data shift right
Journey is in light intensity maximum of points I23Axial position data are greater than light intensity second largest value point I24Confocal axial sound is calculated when axial position data
Answer the schematic diagram of extreme point position；
Fig. 7 is the sensing characteristics side that high-speed sensor confocal micro-measurement method of the present invention is moved to left using right edge data
Journey is in light intensity maximum of points I23Axial position data are less than light intensity second largest value point I24Confocal axial sound is calculated when axial position data
Answer the schematic diagram of extreme point position；
Fig. 8 is the sensing characteristics side that high-speed sensor confocal micro-measurement method of the present invention is moved to left using right edge data
Journey is in light intensity maximum of points I23Axial position data are greater than light intensity second largest value point I24Confocal axial sound is calculated when axial position data
Answer the schematic diagram of extreme point position；
Fig. 9 is high-speed sensor confocal micro-measurement method confocal microscopic imaging implementation example figure of the present invention；
Figure 10 is the confocal light beam scanning imagery implementation example figure of high-speed sensor confocal micro-measurement method of the present invention.
Wherein, 1- laser, 2- lens, 3- space filtering pin hole, 4- collimating mirror, 5- spectroscope, 6- object lens, 7- sample,
The confocal axial response of 8- workbench, 9- condenser, 10- pin hole, 11- photodetector, 12- computer measurement and control system, 13- is bent
The confocal axial strength response numerical value of line, 14-, 15- left side data group, 16- right edge data group, 17- left side move to right data
Group, 18- left side move to right subtract each other move to right sensing characteristics curve divided by summarized information group, 19- left side, 20- right edge moves to left number
It moves to left to subtract each other according to group, 21- right edge and moves to left sensing characteristics curve, 23- axial scan number divided by summarized information group, 22- right edge
According to middle light intensity maximum of points I23, light intensity second largest value point I in 24- axial scan data24、25-I23And I24Subtract each other divided by addition number
According to, 26- two-dimentional light beam scanner.
Specific embodiment
Invention is further described in detail with reference to the accompanying drawings and examples.
Embodiment 1
The embodiment of the present invention realized based on confocal microscopic imaging device shown in Fig. 9, the course of work are as follows: laser 1 goes out
The laser penetrated successively passes through lens 2, space filtering pin hole 3, collimating mirror 4, spectroscope 5, then focuses on 7 table of sample by object lens 6
On face, the mirror 5 that is split after object lens 6 is again passed by by the reflected light of 7 surface reflection of sample and is reflected into condenser 9, condenser 9 should
Reflected light focuses on the pin hole 10 positioned at its focal position, and the photodetector 11 after being placed in pin hole 10 penetrates pin hole for detecting
Corresponding confocal axial position strength information, when sample 7 near 6 focal plane of object lens along optical axis direction is micro move when, light
Electric explorer 11 may detect confocal axial strength response numerical value 14.Wherein workbench 8 drives sample x-y-z three-dimensional in Fig. 9
Mobile, computer measurement and control system 12 handles photo detector signal.
As shown in figure 3, obtaining sensing characteristics equation z to high-speed sensor confocal micro-measurement method left side data shift rightL
(I) process are as follows:
Step 1: as shown in figure 9, certain measurement point N (x, y) on sampling product 7, clicks through 6 focal beam spot of object lens to the measurement
Row axial scan, while photodetector 11 detects the confocal axial strength response numerical value 14 of sample axial position, is denoted as I
(z), as shown in figure 3, wherein x, y and z are respectively the coordinate of sample measurement point horizontal position and axial height position；
Step 2: as shown in figure 3, determine the maximum value M of confocal axial strength response numerical value 14, and will be confocal by boundary of M
Axial strength response numerical value is divided into left side data group 15 and right edge data group 16；
Step 3: making left side data group 15, transversely coordinate is flat as shown in figure 3, keeping right edge data group 16 motionless
Shifting S obtains left side and moves to right data group 17, and left side moves to right data group 17 and right edge data group 16 crosses；
Step 4: as shown in figure 3, move to right data group 17 with left side to right edge data group 16 carries out identical horizontal seat respectively
Punctuate interpolation processing subtracts each other identical two data point of abscissa in two groups of data after interpolation processing again divided by its additive value,
It obtains left side and moves to right to subtract each other divided by summarized information group 18；
Step 5: take left side move to right subtract each other it is sensitive divided by changing near 18 zero of summarized information group and to axial displacement
Data segment (AB range as shown in Figure 3) carries out cubic polynomial fitting, obtains left side and moves to right sensing characteristics curve 19 and sensing
Characteristic equation zL(I)=a3I3+a2I2+a1I+a0, by equation zL(I) constant term replaces with S/2, finally obtains sensing characteristics side
Journey zL(I)=a3I3+a2I2+a1I+S/2。
Sensing characteristics equation z is obtained as shown in figure 4, moving to left to high-speed sensor confocal micro-measurement method right edge dataR
(I) process are as follows:
Step 1: as shown in figure 9, certain measurement point N (x, y) on sampling product 7, clicks through 6 focal beam spot of object lens to the measurement
Row axial scan, while photodetector 11 detects the confocal axial strength response numerical value 14 of sample axial position, is denoted as I
(z), as shown in figure 4, wherein x, y and z are respectively the coordinate of sample measurement point horizontal position and axial height position；
Step 2: as shown in figure 4, determine the maximum value M of confocal axial strength response numerical value 14, and will be confocal by boundary of M
Axial strength response numerical value is divided into left side data group 15 and right edge data group 16；
Step 3: making right edge data group 16, transversely coordinate is flat as shown in figure 4, keeping left side data group 15 motionless
Shifting-S obtains right edge left shift date group 20, and right edge left shift date group 20 and left side data group 15 cross；
Step 4: as shown in figure 4, carrying out identical horizontal seat respectively to left side data group 15 and right edge left shift date group 20
Punctuate interpolation processing subtracts each other identical two data point of abscissa in two groups of data after interpolation processing again divided by its additive value,
It obtains right edge and moves to left to subtract each other divided by summarized information group 21；
Step 5: take right edge move to left subtract each other it is sensitive divided by changing near 21 zero of summarized information group and to axial displacement
Data segment (AB range as shown in Figure 4) carries out cubic polynomial fitting, obtains right edge and moves to left sensing characteristics curve 22 and sensing
Characteristic equation zR(I)=a3I3+a2I2+a1I+a0, by equation zR(I) constant term replaces with-S/2, finally obtains sensing characteristics side
Journey zR(I)=a3I3+a2I2+a1I-S/2。
Embodiment 2
The sensing characteristics equation z obtained using the left side data shift right of the method for the present inventionL(I) survey of single-point height value is carried out
Specific steps combination Fig. 9 of amount is described as follows:
Step 1: certain measurement point N (x, y) on sampling product 7, makes 6 focal beam spot of object lens to the measurement point with axially spaced-apart S
Axial scan is carried out, while photodetector 11 detects the confocal axial strength response numerical value of each axial position of sample, such as schemes
5, shown in Fig. 6, wherein x, y, z is respectively sample measurement point three-dimensional location coordinates；
Step 2: as shown in Figure 5, Figure 6, it is maximum to find light intensity in the axial scan data of confocal axial strength response numerical value
It is worth point I23With light intensity second largest value point I in axial scan data24；
Step 3: comparing light intensity maximum of points I in axial scan data23With light intensity second largest value point in axial scan data
I24Corresponding axial position size, works as I24Corresponding axial position is greater than I23When corresponding axial position, as shown in figure 5,
It will subtract each other divided by summarized information I25=(I23-I24)/(I23+I24) substitute into zL(I)=a3I3+a2I2+a1H=is calculated in I+S/2
zL(I25), use I24Corresponding axial position subtracts h to accurately obtain the height and position f of measured point N (x, y)；Work as I23Corresponding axis
It is greater than I to position24When corresponding axial position, as shown in fig. 6, will subtract each other divided by summarized information I25=(I24-I23)/(I24+
I23) substitute into zL(I)=a3I3+a2I2+a1H=z is calculated in I+S/2L(I25), use I23Corresponding axial position subtracts h to essence
Really obtain the height and position f of measured point N (x, y).
Embodiment 3
Under the scanning of sample workbench, using the sensing characteristics equation z of the left side data shift right acquisition of the method for the present inventionL
(I) the measuring process combination Fig. 9 for carrying out point by point scanning imaging is described as follows:
Step 1: mobile work platform 8, writes down the horizontal position coordinate N (x, y) of 7 measured point of sample；
Step 2: object lens 6 is made to carry out axial feed, while photodetection along optical axis direction with axially spaced-apart S relative sample 7
Device 11 measures the confocal axial strength response numerical value of each axial feed position；
Step 3: the axial direction of the confocal axial strength response numerical value measured using 12 extraction step two of computer measurement and control system
Light intensity maximum of points I in scan data23With light intensity second largest value point I in axial scan data24；
Step 4: comparing light intensity maximum of points I in axial scan data23With light intensity second largest value point in axial scan data
I24Corresponding axial position size, works as I24Corresponding axial position is greater than I23When corresponding axial position, as shown in figure 5,
It will subtract each other divided by summarized information I25=(I23-I24)/(I23+I24) substitute into zL(I)=a3I3+a2I2+a1H=is calculated in I+S/2
zL(I25), use I24Corresponding axial position subtracts h to accurately obtain the height and position f of measured point N (x, y)；Work as I23Corresponding axis
It is greater than I to position24When corresponding axial position, as shown in fig. 6, will subtract each other divided by summarized information I25=(I24-I23)/(I24+
I23) substitute into zL(I)=a3I3+a2I2+a1H=z is calculated in I+S/2L(I25), use I23Corresponding axial position subtracts h to essence
Really obtain the height and position f of measured point N (x, y)；
Step 5: mobile work platform in the horizontal direction, makes sample 7 be in the tested point position of next known location, weight
Multiple two~four steps, until the height and position measurement of all tested point positions finishes；
Step 6: several using the three-dimensional of the corresponding height position information building sample to be tested 7 of all horizontal position points of sample 7
What structure.
Embodiment 3
Under the scanning of sample workbench, using the sensing characteristics equation z of the left side data shift right acquisition of the method for the present inventionL
(I) the measuring process combination Fig. 9 for carrying out layer-by-layer scanning imagery is described as follows:
Step 1: object lens 6 are focused on (low) leafing coke interface more slightly higher than sample to be tested 7, mobile work platform 8,
Photodetector 11 measures all tested points and measures photosignal numerical value in the interface, while writing down 7 measured point of all samples
Horizontal position coordinate N (x, y)；
Step 2: making object lens 6 carry out axial feed relative to sample 7 with axially spaced-apart S along optical axis direction, then according to step
The point coordinate accurate movement workbench of horizontal position recorded in rapid one 8, makes object lens focal beam spot be respectively aligned to each horizontal position
It sets a little, and measures the photosignal numerical value of the serial position point using photodetector 11 simultaneously；
Step 3: repeating step 2, it is completely covered sample in axial depth direction；
Step 4: extracting the corresponding photodetector of each supplying position point in each measurement point counter sample axial depth direction
The 11 photosignal numerical value measured just obtain the confocal axial strength response numerical value of each measurement point；
Step 5: extracting the axial scan number of the confocal axial strength response numerical value of measurement point using computer measurement and control system 12
According to middle light intensity maximum of points I23With light intensity second largest value point I in axial scan data24；
Step 6: comparing intensity response maximum value I23With intensity response second largest value I24Corresponding axial position size,
Work as I24Corresponding axial position is greater than I23When corresponding axial position, as shown in figure 5, will subtract each other divided by summarized information I25=
(I23-I24)/(I23+I24) substitute into zL(I)=a3I3+a2I2+a1H=z is calculated in I+S/2L(I25), use I24Corresponding axial direction
Position subtracts h to accurately obtain the height and position f of measured point N (x, y)；Work as I23Corresponding axial position is greater than I24Corresponding axis
When to position, as shown in fig. 6, will subtract each other divided by summarized information I25=(I24-I23)/(I24+I23) substitute into zL(I)=a3I3+a2I2+
a1H=z is calculated in I+S/2L(I25), use I23Corresponding axial position subtracts h to accurately obtain the height of measured point N (x, y)
Position f；
Step 7: five~six steps are repeated, until all tested points are disposed；
Step 8: several using the three-dimensional of the corresponding height position information building sample to be tested 7 of all horizontal position points of sample 7
What structure.
Embodiment 5
Under confocal light beam scanning, the sensing characteristics equation z of acquisition is moved to left using the right edge data of the method for the present inventionR(I)
The measuring process combination Figure 10 for carrying out layer-by-layer scanning imagery is described as follows:
Step 1: focusing on object lens 6 on (low) leafing coke interface more slightly higher than sample to be tested 7, pass through two-dimentional light beam
Scanner 26 carries out two-dimensional scanning to sample in the horizontal plane, and photodetector 11 measures all tested points and measures in the interface
Photosignal numerical value, while writing down the horizontal position coordinate N (x, y) of all measured points；
Step 2: object lens 6 is made to carry out axial feed relative to sample 7 with axially spaced-apart S along optical axis direction, two are then utilized
It ties up optical beam scanner 26 and two-dimensional scanning is carried out with the point coordinate pair sample of horizontal position recorded in step 1 in the horizontal plane, together
Shi Liyong photodetector 11 measures the photosignal numerical value of the serial position point；
Step 3: repeating step 2, it is completely covered sample in axial depth direction；
Step 4: extracting the corresponding photodetector of each supplying position point in each measurement point counter sample axial depth direction
The 11 photosignal numerical value measured just obtain the confocal axial strength response numerical value of each measurement point；
Step 5: extracting the axial scan number of the confocal axial strength response numerical value of measurement point using computer measurement and control system 12
According to middle light intensity maximum of points I23With light intensity second largest value point I in axial scan data24；
Step 6: comparing intensity response maximum value I23With intensity response second largest value I24Corresponding axial position size,
Work as I24Corresponding axial position is greater than I23When corresponding axial position, as shown in fig. 7, will subtract each other divided by summarized information I25=
(I23-I24)/(I23+I24) substitute into zR(I)=a3I3+a2I2+a1H=z is calculated in I-S/2R(I25), use I23Corresponding axial direction
Position subtracts h to accurately obtain the height and position f of measured point N (x, y)；Work as I23Corresponding axial position is greater than I24Corresponding axis
When to position, as shown in figure 8, will subtract each other divided by summarized information I25=(I24-I23)/(I24+I23) substitute into zR(I)=a3I3+a2I2+
a1H=z is calculated in I-S/2R(I25), use I24Corresponding axial position subtracts h to accurately obtain the height of measured point N (x, y)
Position f；
Step 7: five~six steps are repeated, until all tested points are disposed；
Step 8: several using the three-dimensional of the corresponding height position information building sample to be tested 7 of all horizontal position points of sample 7
What structure.
A specific embodiment of the invention is described in conjunction with attached drawing above, but these explanations cannot be understood to limit
The scope of the present invention, protection scope of the present invention are limited by appended claims, any in the claims in the present invention base
The change carried out on plinth is all protection scope of the present invention.
Claims (6)
1. high-speed sensor confocal micro-measurement method, it is characterised in that: the following steps are included:
Step 1: determining the maximum value M of confocal axial strength response numerical value (14), and confocal axial strength is responded using M as boundary
Numerical value (14) is divided into left side data group (15) and right edge data group (16)；
Step 2: keeping right edge data group (16) motionless, making left side data group (15), transversely coordinate translation S obtains left side
While moving to right data group (17), left side moves to right data group (17) and right edge data group (16) crosses；
Step 3: moving to right the interpolation that data group (17) carries out identical abscissa point respectively to right edge data group (16) and left side
Processing, identical two data point of abscissa in two groups of data after interpolation processing is subtracted each other again divided by its additive value, to obtain
Left side, which moves to right, to be subtracted each other divided by summarized information group (18)；
Subtract each other neighbouring divided by zero in summarized information group (18) and axial displacement is changed sensitive Step 4: left side is taken to move to right
Data segment carries out fitting of a polynomial, obtains that left side moves to right sensing characteristics curve (19) and left side moves to right sensing characteristics equation zL
(I)=amIm+am-1Im-1+…+a2I2+a1I+a0, by equation zL(I) constant term a0S/2 is replaced with, z is finally obtainedL(I)=
amIm+am-1Im-1+…+a2I2+a1I+S/2；
Step 5: be axial scan interval to sample axial scan using translational movement S, light intensity is obtained in axial scan data most
Big value point I23(23) light intensity second largest value point I and in axial scan data24(24)；
Step 6: comparing light intensity maximum of points I in axial scan data23(23) light intensity second largest value point I and in axial scan data24
(24) corresponding axial position, works as I24Corresponding axial position is greater than I23When corresponding axial position, by I25=(I23-
I24)/(I23+I24) substitute into left side move to right sensing characteristics equation, h=z is calculatedL(I25)；Work as I23Corresponding axial position is big
In I24When corresponding axial position, by I25=(I24-I23)/(I24+I23) substitute into left side move to right sensing characteristics equation, calculate
To h=zL(I25)；
Step 7: comparing light intensity maximum of points I in axial scan data23(23) light intensity second largest value point I and in axial scan data24
(24) corresponding axial position subtracts the h that step 6 obtains using biggish position in two axial positions to be total to
The exact position f of burnt measuring system focus.
2. high-speed sensor confocal micro-measurement method, it is characterised in that: the following steps are included:
Step 1: determining the maximum value M of confocal axial strength response numerical value (14), and confocal axial strength is responded using M as boundary
Numerical value (14) is divided into left side data group (15) and right edge data group (16)；
Step 2: keeping left side data group (15) motionless, making right edge data group (16), transversely coordinate translation-S obtains the right side
Side left shift date group (20), right edge left shift date group (20) and left side data group (15) cross；
Step 3: carrying out the interpolation of identical abscissa point respectively to left side data group (15) and right edge left shift date group (20)
Processing, identical two data point of abscissa in two groups of data after interpolation processing is subtracted each other again divided by its additive value, to obtain
Right edge, which moves to left, subtracts each other divided by summarized information group (21)；
Subtract each other neighbouring divided by zero in summarized information group (21) and axial displacement is changed sensitive Step 4: right edge is taken to move to left
Data segment carries out fitting of a polynomial, obtains that right edge moves to left sensing characteristics curve (22) and right edge moves to left sensing characteristics equation zR
(I)=amIm+am-1Im-1+…+a2I2+a1I+a0, by equation zR(I) constant term a0- S/2 is replaced with, right edge is finally obtained
Moving to left sensing characteristics equation is zR(I)=amIm+am-1Im-1+…+a2I2+a1I-S/2；
Step 5: be axial scan interval to sample axial scan using translational movement S, light intensity is obtained in axial scan data most
Big value point I23(23) light intensity second largest value point I and in axial scan data24(24)；
Step 6: comparing light intensity maximum of points I in axial scan data23(23) light intensity second largest value point I and in axial scan data24
(24) corresponding axial position, works as I24Corresponding axial position is greater than I23When corresponding axial position, by I25=(I23-
I24)/(I23+I24) substitute into right edge move to left sensing characteristics equation, h=z is calculatedR(I25)；Work as I23Corresponding axial position is big
In I24When corresponding axial position, by I25=(I24-I23)/(I24+I23) substitute into right edge move to left sensing characteristics equation, calculate
To h=zR(I25)；
Step 7: comparing light intensity maximum of points I in axial scan data23(23) light intensity second largest value point I and in axial scan data24
(24) corresponding axial position subtracts the h that step 6 obtains using lesser position in two axial positions to be total to
The exact position f of burnt measuring system focus.
3. high-speed sensor confocal micro-measurement method as claimed in claim 1 or 2, it is characterised in that: number in the step 2
It requires to codetermine by measurement accuracy and measurement efficiency according to the translational movement S for organizing transversely coordinate.
4. high-speed sensor confocal micro-measurement method as claimed in claim 1 or 2, it is characterised in that: lead in the step 4
It crosses and carries out straight line fitting directly to data segment to accelerate treatment process.
5. realizing the device of high-speed sensor confocal micro-measurement method as claimed in claim 1 or 2, it is characterised in that: include:
Laser (1), lens (2), space filtering pin hole (3), collimating mirror (4), spectroscope (5), object lens (6), sample (7), workbench
(8), condenser (9), pin hole (10), photodetector (11) and computer measurement and control system (12)；The laser of laser (1) outgoing
Successively pass through lens (2), space filtering pin hole (3), collimating mirror (4), spectroscope (5), then focuses on sample by object lens (6)
(7) on surface, the mirror (5) that is split after object lens (6) is again passed by by the reflected light of sample (7) surface reflection and is reflected into condenser
(9), which is focused on the pin hole (10) positioned at its focal position by condenser (9), and the photoelectricity after being placed in pin hole (10) is visited
The strength information that device (11) are used to detect the corresponding confocal axial position through pin hole (10) is surveyed, when sample (7) is in object lens coke
Face nearby along optical axis direction is micro move when, photodetector (11) may detect confocal axial strength and respond numerical value (14)；
Workbench drives sample x-y-z three-dimensional mobile, and computer measurement and control system (12) handles photo detector signal.
6. device as claimed in claim 5, it is characterised in that: further include two-dimentional light beam scanner (26)；The two-dimentional light beam is swept
Device (26) is retouched to be placed between spectroscope (5) and object lens (6).
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