CN109520973A - Postposition is divided pupil laser differential confocal microscopic detection method and device - Google Patents
Postposition is divided pupil laser differential confocal microscopic detection method and device Download PDFInfo
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- CN109520973A CN109520973A CN201811344018.8A CN201811344018A CN109520973A CN 109520973 A CN109520973 A CN 109520973A CN 201811344018 A CN201811344018 A CN 201811344018A CN 109520973 A CN109520973 A CN 109520973A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
Abstract
The present invention relates to postposition light splitting pupil laser differential confocal microscopic detection method and devices, belong to surface fine structure field of measuring technique, this method is scanned measurement to sample using the light path arrangement of postposition light splitting pupil confocal microscopy, incident beam converges to sample surface through measurement object lens, the reflected light for being loaded with sample surface geometry topographical information is collected by measurement object lens enters postposition light splitting pupil laser differential confocal detection system, after by the first convergent lens and collecting pupil, it converges on test surface, two regions of located off-axis on detection focal plane, it measures the response in the two regions and obtains detector response characteristic equation, according to intensity size of the curve in linearly interval, or the position that intensity is zero, reconstruct the surface topography of sample.This method structure is simple, can effectively take into account the spatial resolving power and range ability of system, realizes the optical high resolution absolute measurement of object surface appearance and three-dimensional microstructure etc..
Description
Technical field
The present invention relates to postposition light splitting pupil laser differential confocal microscopic detection method and device, in particular to a kind of segmentation Chinese mugwort
In spot region detect high axial resolution postposition be divided the micro- scanning detection method of pupil laser differential confocal, belong to microcosmic
Field of measuring technique, especially providing one kind can be used for detecting surface three dimension fine structure, micro- step, integrated circuit line width and microcell
The method of the high-resolution surveys such as surface topography.
Background technique
Confocal microscopy is measured in high-resolution and is led with its exclusive three-dimensional chromatography imaging capability and high-resolution detectivity
Domain is widely used, such as Chau-Hwang Lee proposes the micro- sensing technology of interference confocal, is used for body surface
The accurate measurement of pattern；Zhi Li et al. proposes a kind of transversal scanning confocal microscopy, surveys for MEMS device in displacement of the lines
Amount；Ganesha Udupa etc. has developed confocal scanning optical microscope, is used for 3D topography measurement；Seokhan Kim etc. will be confocal
Microtechnic combines the thickness and refractive index for measuring transparent sample with Low coherence technology.On the whole, existing confocal biography
Sensor measuring principle is generally divided into two classes: one kind is directly measured to sample using the bevel edge of confocal intensity response,
Another kind of is to carry out Focus tracking to sample using the maximum value of confocal intensity response to realize measurement.But existing confocal sensor
It has the disadvantage that when being measured using confocal intensity response bevel edge, cannot achieve absolute displacement measurement, and measurement accuracy
It is special to be limited to the non-linear of confocal intensity response curve bevel edge surveying range, intensity of light source fluctuation, measured surface scattering and reflection
The factors such as property；When being measured using Focus tracking, since to correspond to confocal intensity response sensitivity worst for confocal sensor focus
Vertex, thus constrain further increasing for such confocal sensor Focus tracking precision.
In order to overcome confocal sensor above shortcomings, Zhao Weiqian of Harbin Institute of Technology et al. is it is proposed that one
The differential confocal measurement technology of the achievable bipolarity super-resolution measurement of kind, is divided into two parts for confocal detection light path system, and
The point detector of the two detection systems is respectively placed in front of coke and defocused position carries out differential detection, then realizes that bipolarity is exhausted
To Zero-tracking measurement etc..But due to using two sets of independent detection light path systems, cause differential confocal sensor measurement
The deficiencies of system structure is relative complex, and two point detector defocus symmetric position adjustment requirements are stringent.
In order to simplify the structure of differential confocal measurement system, Beijing Institute of Technology Zhao Weiqian et al., which is proposed, can take into account resolution
The laser differential confocal theta scanning detection method (patent No.: ZL 201010541404.3) of power and range, this method use
The light path arrangement of confocal theta microscopy, its principle is as shown in Figure 2, and the pupil plane of object lens is divided into illumination iris and collection
Pupil, and two regions of located off-axis on detection focal plane, measure the response in the two regions and obtain detector response characteristic
Equation reconstructs sample three-dimensional appearance according to intensity size of the curve in linearly interval.This method is effectively simplified differential
The structure of confocal system, but the light path system because using oblique incidence sample in sample incident face, this swashs it in microcell
Send out the deficiencies of there are spatial resolution reductions when the scattering spectrums microcells such as Raman spectrum, the Brillouin spectrum of detection are imaged.
For this purpose, the present invention proposes that the postposition of non-inclined light beam incidence is divided pupil laser differential confocal microscopic detection method, come
Bring spatial resolution decline when overcoming light splitting pupil laser differential confocal imaging system and exciting the combination of scattering spectrum system
Deficiency etc..
Summary of the invention
The purpose of the invention is to overcome the shortcomings of above-mentioned prior art, it is total to provide a kind of postposition light splitting pupil laser differential
Burnt microscopic detection method and device are realized to three-dimensional microstructure, micro- step, integrated circuit line width, object surface appearance etc.
High resolution optical detection.
The present invention is achieved by the following technical solutions.
The present invention can take into account the postposition light splitting micro- scanning detection method of pupil laser differential confocal of resolving power and range, use
The light path arrangement of postposition light splitting pupil confocal microscopy is scanned measurement to sample, and incident beam is assembled through measurement object lens
To measured surface, the reflected light of sample information is loaded with after measuring object lens, is divided pupil laser differential confocal into postposition
Micro detection system, the specific steps are as follows:
Postposition is placed first on the first convergent lens pupil plane and collects pupil, and the excitation beam of light-source system outgoing passes through
After Amici prism and measurement object lens, it is focused on sample, reflects the reflected light for being loaded with sample microcell geometrical morphology information；
Reflected light is collected by measurement object lens, and postposition is entered after Amici prism reflects and is divided pupil laser differential confocal detection system,
After first assembles and collects pupil, focal spot segmentation detection is carried out by intensity collection system, is realized to sample microcell
The detection of geometric position.Detailed process are as follows:
(1) the opposite x on detection focal planedAxle offset vMTwo tiny areas of place's setting, measure the response point in the two regions
It Wei not IA(u,-vM) and IB(u,vM), wherein u is the axial displacement of sample, vMIt is small search coverage center with respect to ydAxis
Offset；
(2) it is divided pupil detection system axial response according to postposition, obtains sensing technology characteristic equation: I (u, vM)=IA(u,-
vM)-IB(u,vM)；
(3) according to curve I (u, vM) signal magnitude in linearly interval, or according to curve I (u, vM) zero point position,
Reconstruct the surface topography of sample.
It wherein, can also be by optimizing vMValue meets range or resolution capability or takes into account the difference of range and resolution capability
It is required that.
When the laser facula that postposition light splitting pupil laser differential confocal detection system obtains is handled, it is able to carry out high spatial
Differentiate three-dimensional chromatography detection；
Particularly, in the methods of the invention, postposition, which collects pupil, can be round, D-shaped or other shapes.
In the methods of the invention, excitation beam includes light beams such as line polarisation, rotatory polarization, radial polarisation light and by pupil
Thus the structure light beam that the technologies such as filtering generate improves system transverse resolution.
In the methods of the invention, that the object lens of the measurement to different NA can be realized only is handled by computer system software
Match, without carrying out any hardware adjustment to system.
The present invention provides postpositions to be divided pupil laser differential confocal microscopic detection device, the light source including generating excitation beam
System, measurement object lens, 3 D scanning system, postposition light splitting pupil laser differential confocal detection system and computer processing system.
Wherein, postposition is collected pupil and is placed on the pupil plane of the first convergent mirror, and sample is fixed on 3-D scanning system
On the objective table of system.Postposition light splitting pupil laser differential confocal detection system is placed on the reflection direction of Amici prism, computer
Processing system is used to carry out data processing to 3 D scanning system and light splitting pupil laser differential confocal detection system and coordinates to control
System.
In apparatus of the present invention, intensity collection system can use method of the pin hole in conjunction with light intensity point detector, realize
Segmentation detection to Airy.
In apparatus of the present invention, intensity collection system can use ccd detector, be detected by being arranged in CCD detection face
The position in region and size realize that the segmentation to Airy detects.
In apparatus of the present invention, intensity collection system can pass through the focal plane in the first convergent lens using conduction optical fiber
On, about the symmetrically placed two conduction optical axis of optical axis, realizes that the segmentation to Airy is detected and place conduction optical fiber on optical axis, it is real
Now the segmentation of Airy is detected.
In apparatus of the present invention, magnifying glass can be relayed by increasing, the Aili spot that amplification intensity collection system detects, with
Improve the acquisition precision for dividing postposition light splitting pupil laser differential confocal measuring system.
Beneficial effect
Detection technique of the present invention has the characteristics that and good result:
1. having actual zero point, bipolarity absolute measurement can be carried out, and actual zero point is located at characteristic curve sensitivity maximum
Locate and corresponding with measuring system " focal position ", pole is convenient for Focus tracking measurement；
2. the slope of characteristic curve linear zone is about 2 times of the common confocal characteristic curve linear zone of equivalent parameters, point
The ability of distinguishing is significantly improved；
3. the range of characteristic curve linear zone is common confocal characteristic bigger than equivalent parameters, range ability is obtained
It expands；
4. it is differential subtract each other detection and anti-interference process mode can be effectively suppressed light source intensity fluctuation, the drift of detector electronics,
The common-mode noise of the generations such as ambient condition difference；
Multi_region detection is carried out to Airy with same detector 5. can realize, detection optical path system can be significantly simplified
System, eliminate because two detectors asymmetry placed off-axis, detector response characteristic it is inconsistent etc. caused by error；
6. can realize that range ability and the effective of resolution capability are taken into account, by the way that the spacing of two dummy pinholes is arranged, can facilitate
Selection different range abilities and resolving power operating mode；
7. being compared to existing light splitting pupil confocal microscopy, debugging simple with structure is easy and has high spatial
Resolution characteristic etc..
Detailed description of the invention
Fig. 1 is conventional confocal micro imaging method schematic diagram；
Fig. 2 is existing laser differential confocal theta microscopic detection method schematic diagram；
Fig. 3 is that postposition of the present invention is divided pupil laser differential confocal microscopic detection method schematic diagram；
Fig. 4 is that round postposition is divided pupil laser differential confocal microscopic detection method schematic diagram；
Fig. 5 is the postposition light splitting pupil laser differential confocal microscopic detection method schematic diagram in conjunction with iris filter；
Fig. 6 is that the postposition with beam modulation system is divided pupil laser differential confocal microscopic detection method schematic diagram；
Fig. 7 is that the postposition with detection focal spot amplification system is divided pupil laser differential confocal microscopic detection method schematic diagram；
Fig. 8 is that the signal of pupil laser differential confocal microscopic detection method is divided using the postposition of pin hole and light intensity point detector
Figure；
Fig. 9 is to be divided pupil laser differential confocal microscopic detection method schematic diagram using the postposition of ccd detector；
Figure 10 is to be divided pupil laser differential confocal microscopic detection method schematic diagram using the postposition of fiber-optic probe；
Figure 11 is that high-space resolution postposition is divided pupil laser differential confocal microscopic detection method and schematic device；
Figure 12 is that postposition is divided pupil laser differential confocal axial direction measured curve.
Wherein, after 1- light-source system, 2- Amici prism, 3- measurement object lens, 4- sample, 5- 3 D scanning system, 6-
It sets light splitting pupil laser differential confocal detection system, the first convergent lens of 7-, 8- postposition and collects pupil, the first pin hole of 9-, 10- light intensity
Before acquisition system, 11- search coverage A, 12- search coverage B, 13- postposition light splitting pupil after burnt light intensity curve, 14- postposition light splitting pupil
Burnt light intensity curve, 15- postposition light splitting pupil differential confocal light intensity curve, 16- radial polarisation converting system, 17- iris filter,
18- beam modulation system, the second convergent lens of 19-, the second pin hole of 20-, 21- third convergent lens, 22- relay magnifying glass, 23-
Third pin hole, 24- light intensity point detector, 25-CCD detector, 26- first conduct optical fiber, 27- second conducts optical fiber, 28- is calculated
Machine processing system, the 4th convergent lens of 29-, 30- illumination iris, 31- collect pupil, 32- laser spot detection region A, 33- hot spot is visited
Burnt axial response curve, 35- are divided burnt axial response curve, the 36- light splitting differential axial direction of pupil after pupil before survey region B, 34- light splitting pupil
Focal axis is to focal axis before measured curve, 38- postposition light splitting pupil to measured curve, 39- postposition before response curve, 37- postposition light splitting pupil
It is divided the differential axial measured curve of pupil.
Specific embodiment
Invention is further described in detail with reference to the accompanying drawings and examples.
Embodiment 1
As shown in figure 3, placing postposition on 7 pupil plane of the first convergent lens collects pupil 8, what light-source system 1 was emitted swashs
Beam shine after through Amici prism 2 and measurement object lens 3, is focused on sample 4, reflects and be loaded with sample geometrical morphology
The reflected light of information, reflected light enter postposition light splitting pupil laser differential confocal detection system 6, by the first convergent lens 7 and
After postposition collects pupil 8, focal spot segmentation detection is carried out by intensity collection system 10, is realized to 4 microcell geometrical morphology of sample
Detection.
Particularly, postposition can be collected to pupil 8 and replaces other shapes, such as round, i.e. composition postposition circular beam splitter pupil swashs
The equation of light moves confocal microscopy detection method, as shown in Figure 4.
Particularly, by addition radial polarisation converting system 16 and iris filter 17, to further increase the cross of system
To resolving power, that is, the postposition for constituting addition iris filter is divided pupil confocal laser microscopic detection method, as shown in Figure 5.
Particularly, have by adding beam modulation system 18 between light-source system 1 and Amici prism 2, and then constituting
The postposition of beam modulation system is divided pupil laser differential confocal microscopic detection device.As shown in fig. 6, beam modulation system 18 includes
The second convergent lens 19, the second pin hole 20, third convergent lens 21 being sequentially placed along optical path.
Particularly, increase relaying magnifying glass 22 in postposition light splitting pupil laser differential confocal detection system 6, to improve postposition
It is divided the acquisition precision of pupil laser differential confocal detection system 6, as shown in Figure 7.
Particularly, the method combined using third pin hole 23 with light intensity point detector 24 realizes that the segmentation to Airy is visited
It surveys, as shown in Figure 8.
Particularly, intensity collection system 10 can use ccd detector 25, set micro- on detection focal plane by changing
The parameter of zonule is realized that the segmentation to Airy detects, is answered so as to extend it to match the reflectivity of different samples
With field, as shown in Figure 9.
Particularly, intensity collection system 10 can use fiber optic conduction, by closing at the focal plane of the first convergent lens 7
In the symmetrically placed first conduction optical fiber 26 of optical axis and the second conduction optical fiber 27, realize that the segmentation to Airy detects, such as Figure 10 institute
Show.
Embodiment 2
As shown in figure 11, postposition light splitting pupil laser differential confocal microscopic detection device includes the light source system for generating excitation beam
System 1, beam modulation system 20, radial polarisation converting system 18, Amici prism 2, iris filter 19, measurement object lens 3, detected sample
Product 4,3 D scanning system 5, postposition are divided pupil laser differential confocal detection system 6.
More than, along the laser emitting direction of light-source system 1, it is sequentially placed the second convergent mirror 19, the second pin hole 20, third meeting
Poly- lens 21, radial polarisation converting system 16, Amici prism 2, iris filter 17, measurement object lens 3, sample 4 and three
Scanning system 5 is tieed up, is sequentially placed the first convergent lens 7, postposition collection pupil 8, relaying magnifying glass in 2 reflection direction of Amici prism
22, ccd detector 25；In the entire system, continuous wave laser 1,3 D scanning system 5, ccd detector 25 are by computer
Reason system 28 controls, and carrying out data processing by computer processing system 28 can be obtained the three-dimensional appearance information of sample 4.
In the present embodiment, light-source system 1 uses 532nm continuous wave laser.
As shown in figure 11, postposition light splitting pupil laser differential confocal microscope equipment detection process is as follows:
Firstly, the laser that the light-source system 1 being made of laser is emitted is assembled by the second convergent lens 19 and enters second
After pin hole 20, parallel excitation beam is formed by 21 collimator and extender of third convergent lens.Excitation beam is converted by radial polarisation
After system 16, Amici prism 2 and iris filter 17, be measured object lens 3 be focused on sample 4, reflect be loaded with by
The reflected light of 4 geometrical morphology information of sample.
Then the mobile sample 4 of 3 D scanning system 5 is controlled by computer processing system 28, made on sample 4
The reflected lights of different zones is measured object lens 3 and collects, after iris filter 17 and Amici prism 2 reflect, reflected light into
Enter in postposition light splitting pupil laser differential confocal detection system 6, enters after the first convergent lens 7 and postposition collect pupil 8
Magnifying glass 22 is relayed, the hot spot being amplified is received by ccd detector 25, passes through the x in detection focal spotdAbout y on axisdAxis pair
Claim that two small search coverage A11 and search coverage B12 are arranged, relative to ydAxis deviates vM, the light intensity of two search coverages
Response is respectively IA(u,-vM) and IB(u,+vM), computer processing system 28 is differential to obtained light intensity signal progress to be subtracted each other, and is obtained
Pupil differential confocal light intensity curve 15 is divided to postposition:
I(u,vM)=IA(u,-vM)-IB(u,+vM)
Wherein, I (u, vM) it is that postposition is divided pupil differential confocal light intensity curve, u is axial normalized coordinate, vMFor pin hole cross
To normalized offset.In conjunction with the location information of the 3 D scanning system 5 obtained by computer processing system 28, postposition is obtained
It is divided the position of pupil differential confocal light intensity curve 15 and its " zero crossing "；" the mistake of postposition light splitting pupil differential confocal light intensity curve 15
Zero point " and the focal beam spot of excitation beam are accurately corresponding, therefore " the zero passage of pupil differential confocal light intensity curve 15 is divided by postposition
The elevation information of sample 4 can be obtained in point ", and then reconstructs the three-dimensional appearance of sample 4.It, can by above-mentioned measurement process
Measurement obtains the light splitting pupil differential confocal axial direction measured curve 39 of postposition shown in Figure 12.Postposition light splitting pupil laser differential confocal is visited
When the laser facula that examining system 6 obtains is handled, the chromatography detection of high-space resolution three-dimensional can be carried out to sample 4；
A specific embodiment of the invention is described in conjunction with attached drawing above, but these explanations cannot be understood to limit
The scope of the present invention, protection scope of the present invention are limited by appended claims, any in the claims in the present invention base
The change carried out on plinth is all protection scope of the present invention.
Claims (9)
1. postposition is divided pupil laser differential confocal microscopic detection method, it is characterised in that:
Postposition is placed on the first convergent lens (7) pupil plane collects pupil (8)；The excitation beam of light-source system (1) outgoing is logical
After crossing Amici prism (2) and measurement object lens (3), it is focused on sample (4), reflects and be loaded with sample (4) microcell table
The reflected light of face topographical information, reflected light are collected by measurement object lens (3), after Amici prism (2) reflection, into postposition point
Pupil laser differential confocal detection system (6), after the first convergent lens (7) and postposition collect pupil (8), focal beam spot quilt
Intensity collection system (10) acquisition, and focal spot segmentation detection is carried out, realize the detection to sample (4) microcell geometrical morphology；
The method of the above-mentioned detection to sample (4) microcell geometrical morphology are as follows:
The focal beam spot obtained to intensity collection system (10) is split processing, respectively obtains search coverage A (11) and detection
The corresponding light intensity signal of region B (12), it is differential to two signals progress to subtract each other processing, obtain postposition light splitting pupil differential confocal light intensity
Curve (15)；It is accurately right using " zero crossing " and measurement object lens (3) focus of postposition light splitting pupil differential confocal light intensity curve (15)
Characteristic is answered, is triggered by " zero crossing " accurately to capture excitation hot spot focal position, and then reconstruct the surface shape of sample
Looks.
2. a kind of postposition according to claim 1 is divided pupil laser differential confocal microscopic detection method, it is characterised in that: institute
Stating postposition and collecting the shape of pupil (8) includes round or D-shaped.
3. a kind of postposition according to claim 1 is divided pupil laser differential confocal microscopic detection method, it is characterised in that: institute
Stating excitation beam includes light beam and structure light beam, thus improves microscopic system transverse resolution.
4. a kind of postposition according to claim 1 is divided pupil laser differential confocal microscopic detection method, it is characterised in that: also
Including radial polarisation converting system (16) and iris filter (17)；The radial polarisation converting system (16) is placed in light-source system
(1) between Amici prism (2)；The iris filter (17) is placed between Amici prism (2) and measurement object lens (3).
5. a kind of postposition is divided pupil laser differential confocal microscopic detection device, it is characterised in that: including light-source system (1), light splitting
Prism (2), measurement object lens (3), sample (4), 3 D scanning system (5), postposition light splitting pupil laser differential confocal detection system
It unites (6)；After the excitation beam of light-source system (1) outgoing is by Amici prism (2) and measurement object lens (3), it is focused at sample
(4) on, the reflected light for being loaded with sample (4) microcell surface topography information is reflected, reflected light is received by measurement object lens (3)
Collection is divided pupil laser differential confocal detection system (6) into postposition, realizes to sample after Amici prism (2) reflection
(4) detection of microcell geometrical morphology；
Postposition light splitting pupil laser differential confocal detection system (6) includes: the first convergent lens (7), collects pupil (8) and light
Strong acquisition system (10).
6. a kind of postposition according to claim 5 is divided pupil laser differential confocal microscopic detection device, it is characterised in that: institute
Stating intensity collection system (10) includes: relaying magnifying glass (22) and ccd detector (25), third pin hole (23) and light intensity detector
(24), ccd detector (25) or the first conduction optical fiber (26) and the second conduction optical fiber (27).
7. a kind of postposition according to claim 5 is divided pupil laser differential confocal microscopic detection device, it is characterised in that: also
Including beam modulation system (18), the second convergent lens (19), the second pin hole (20) and third convergent lens (21)；Light-source system
(1) excitation beam being emitted passes sequentially through beam modulation system (18), the second convergent lens (19), the second pin hole (20) and third
Using Amici prism (2) after convergent lens (21).
8. a kind of postposition light splitting pupil laser differential confocal microscopic detection device according to right 5, it is characterised in that: further include
Radial polarisation converting system (16) and iris filter (17)；The radial polarisation converting system (16) is placed in light-source system (1)
Between Amici prism (2)；The iris filter (17) is placed between Amici prism (2) and measurement object lens (3).
9. a kind of postposition light splitting pupil laser differential confocal microscopic detection device according to right 5, it is characterised in that: further include
Beam modulation system (18), the second convergent lens (19), the second pin hole (20) and third convergent lens (21)；Light-source system (1)
The excitation beam of outgoing passes sequentially through beam modulation system (18), the second convergent lens (19), the second pin hole (20) and third meeting
Using radial polarisation converting system (16) after poly- lens (21).
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| CN109883342A (en) * | 2019-04-19 | 2019-06-14 | 北京理工大学 | Laterally subtract each other differential confocal microscope group gap measuring method |
| CN113048895A (en) * | 2021-03-04 | 2021-06-29 | 上海精测半导体技术有限公司 | Apparatus and method for detecting change of reflected light, and film thickness measuring apparatus |
| WO2024000749A1 (en) * | 2022-06-30 | 2024-01-04 | 南京理工大学 | High-aspect-ratio micro-structured transmissive interference-microscopic nondestructive measurement apparatus and method |
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| WO2024000749A1 (en) * | 2022-06-30 | 2024-01-04 | 南京理工大学 | High-aspect-ratio micro-structured transmissive interference-microscopic nondestructive measurement apparatus and method |
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