CN203069151U - Three-dimensional hole form detection system based on optical coherence tomography scanning - Google Patents
Three-dimensional hole form detection system based on optical coherence tomography scanning Download PDFInfo
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Abstract
The utility model discloses a three-dimensional hole form detection system based on optical coherence tomography scanning. The three-dimensional hole form detection system is mainly composed of an optical coherence tomography imaging device, a system optical fiber collimator, a two-dimensional scanning vibration mirror, a scanning object lens, a longitudinally-moving platform, a horizontally-moving platform and a computer. The three-dimensional hole form detection system uses a method of the optical coherence tomography scanning, so that a three-dimensional structural image of a blind hole or a via hole of a circuit board is directly obtained and information of the depth of a hole and especially the blind hole, upper and lower hole diameters, adhesive residue, base copper damage and the like is obtained after image processing; and the three-dimensional hole form detection system can perform automatic detection and assessment on the quality of the blind hole or the via hole and has the characteristics of high measurement precision, high reliability in measurement results, low cost, rapid speed and the like.
Description
Technical field
The utility model relates to a kind of based on optical coherence tomography scanning field, is specifically related to a kind of three-dimensional hole shape detection system based on optical coherence tomography scanning.
Background technology
At present, for the quality of printed circuit board (PCB), most productions commercial city adopts artificial visual to detect, defective that has but manual detection exists it, and production efficiency is low, poor stability.Detect the deficiency that exists in order to overcome artificial visual, people have designed a kind of automated optical imaging (Auto Optics Imaging, AOI), the automated optical imaging is by utilizing ordinary ray and laser matching computer program, obtain the image of measurand, through particular procedure algorithm process and analysis, compare with standard picture, obtain the defective of measured object, thereby realize the wiring board of different phase in the circuit board manufacturing is carried out planarity outward appearance vision-based detection.This method has easy, characteristics fast, but it can only detect a plane, can not effectively measure the degree of depth of blind hole.And in order to obtain the more accurate depth information of blind hole, can adopt the optical 3-dimensional microscope that blind hole is detected, but the detection speed of this method can not reach the needs of real-time detection, has greatly limited its application in blind hole detects.
(Optical Coherence Tomography OCT) is a kind of high speed, high precision, contactless optical three-dimensional scanning imaging technique to optical coherence tomography.It is the coherent tomographic performance by optics, realizes the contactless tomography to sample, the final three-dimensional imaging that realizes sample.At present, optical coherent chromatographic imaging has been widely used in biomedical sector, particularly in human eye ophthalmology imaging field.But optical coherence tomography is because the restriction of sweep limit can not be carried out large-scale scanning imagery.
The utility model content
Technical problem to be solved in the utility model provides a kind of three-dimensional hole shape detection system based on optical coherence tomography scanning, and it can detect blind hole or through hole quality on the circuit board rapidly, and the tin cream detection to circuit-board industry simultaneously also has equivalent effect.
For addressing the above problem, the utility model is achieved through the following technical solutions:
A kind of three-dimensional hole shape detection system based on optical coherence tomography scanning mainly is made up of optical coherent chromatographic imaging device, system's optical fiber collimator, two-dimensional scan galvanometer, scanning objective, vertical shift platform, translate stage and computing machine.The vertical shift platform all links to each other with computing machine with translate stage, the motion of computer control vertical shift platform and translate stage.System's optical fiber collimator, two-dimensional scan galvanometer, scanning objective are fixed on the vertical shift platform, and follow the motion of vertical shift platform.Circuit board to be measured is placed on the translate stage, and follows the translate stage motion.The vertical shift platform vertically be positioned at translate stage directly over.The optical coherent chromatographic imaging device links to each other with computing machine.The detection light that the optical coherent chromatographic imaging device sends enters system's optical fiber collimator by optical fiber, system's optical fiber collimator will be surveyed and enter into the two-dimensional scan galvanometer behind the optical alignment and carry out two-dimensional scan, the light of two-dimensional scan galvanometer output enters the circuit board that is placed on the translate stage after scanning objective focuses on, the reflected light that circuit board produces namely is back to the optical coherent chromatographic imaging device successively through former road behind scanning objective, two-dimensional scan galvanometer and system's optical fiber collimator, obtained to send into computing machine behind the interference signal by the optical coherent chromatographic imaging device.
In the such scheme, being combined as of vertical shift platform and translate stage is one of following 3 kinds, that is: a kind of is vertical shift platform when only being made of Z axle motion motor, and translate stage is made up of X-axis motor and Y-axis motion motor.A kind of is that vertical shift platform when being made up of Z axle motion motor and X-axis motion motor, translate stage only are made of the Y-axis motion motor.A kind of is that vertical shift platform when being made up of Z axle motion motor and Y-axis motion motor, translate stage only are made of the X-axis motion motor.
In the such scheme, described optical coherent chromatographic imaging device can be the domain optical coherence tomography device, and this moment, this optical coherent chromatographic imaging device was mainly become by swept light source, fiber annular, fiber coupler, 2 Polarization Controllers, optical fiber collimator, catoptron and balance detector set.Swept light source is sent broadband frequency sweep light, enter into fiber annular, enter into fiber coupler then, be divided into two-beam by fiber coupler, wherein a branch ofly enter catoptron by first Polarization Controller and optical fiber collimator and reflect by former road and get back to fiber coupler.Another bundle outputs to system's optical fiber collimator by second Polarization Controller and the two-dimensional scan galvanometer enters into scanning objective, is focused in circuit board by scanning objective.The reflected light of circuit board is got back to fiber coupler through former road.The two-way reflected light forms interference in fiber coupler.The balance detection device is sent into computing machine after receiving the interference signal that fiber annular and detection optical fiber coupling mechanism return simultaneously.
In the such scheme, described optical coherent chromatographic imaging device also can be spectral domain optical coherent chromatographic imaging device, and this moment, this optical coherent chromatographic imaging device mainly was made up of broadband continuous light source, optoisolator, fiber coupler, 3 Polarization Controllers, 2 optical fiber collimators, catoptron, grating, spectrum object lens and line scan cameras.The broadband continuous light source sends broadband spectral, enter into fiber coupler through optoisolator, be divided into two bundles by fiber coupler, wherein a branch ofly enter catoptron through first Polarization Controller and first optical fiber collimator, get back to fiber coupler by mirror reflects by former road.Another bundle outputs to system's optical fiber collimator and the two-dimensional scan galvanometer enters into scanning objective through second Polarization Controller, focuses on circuit board by scanning objective, and the reflected light of circuit board is got back to fiber coupler through former road.The two-way reflected light forms interference in fiber coupler.Interference light is divided into each quasi-monochromatic light after the 3rd Polarization Controller, second optical fiber collimator enter into grating, focus on line scan camera through the spectrum object lens, and the output of line scan camera connects computing machine.
Compared with prior art, the utility model utilizes motor platform and two-dimensional scan galvanometer, circuit board is carried out two-dimensional scan, and utilize the chromatography ability of optical coherence tomography to obtain blind hole on the circuit board or through hole in the structural information of longitudinal direction, the 3-D scanning imaging in realizing on a large scale; Utilize three-dimensional structure data to calculate to portal the degree of depth of blind hole especially, information such as aperture, cull, the damaged situation of end copper up and down, can the quality of circuit board blind hole or through hole be estimated, the tin cream of circuit-board industry is detected also has equivalent effect simultaneously.
Description of drawings
Fig. 1 is based on the three-dimensional hole shape detection system principle schematic of optical coherence tomography scanning.
Fig. 2 is the domain optical coherence tomography schematic diagram of device.
Fig. 3 is spectral domain optical coherent chromatographic imaging schematic diagram of device.
Embodiment
Real-time example 1:
A kind of three-dimensional hole shape detection system based on optical coherence tomography scanning, as shown in Figure 1, it mainly is made up of optical coherent chromatographic imaging device 1, system's optical fiber collimator 4, two-dimensional scan galvanometer 5, scanning objective 6, vertical shift platform 3, translate stage 8 and computing machine 9.Vertical shift platform 3 all links to each other with computing machine 9 with translate stage 8, the motion of computing machine 9 control vertical shift platforms 3 and translate stage 8.System's optical fiber collimator 4, two-dimensional scan galvanometer 5, scanning objective 6 are fixed on vertical shift platform 3, and follow 3 motions of vertical shift platform.Circuit board 7 to be measured is placed on the translate stage 8, and follows translate stage 8 motions.Vertical shift platform 3 vertically be positioned at translate stage 8 directly over.Optical coherent chromatographic imaging device 1 links to each other with computing machine 9.The detection light that optical coherent chromatographic imaging device 1 sends enters system's optical fiber collimator 4 by optical fiber 2, system's optical fiber collimator 4 will be surveyed and enter into two-dimensional scan galvanometer 5 behind the optical alignment and carry out two-dimensional scan, the light of two-dimensional scan galvanometer 5 outputs enters the circuit board 7 that is placed on the translate stage 8 after scanning objective 6 focuses on, the reflected light that circuit board 7 produces through former road namely successively through scanning objective 6, be back to optical coherent chromatographic imaging device 1 behind two-dimensional scan galvanometer 5 and the system's optical fiber collimator 4, obtained to send into computing machine 9 behind the interference signal by optical coherent chromatographic imaging device 1.
In the present embodiment, described optical coherent chromatographic imaging device 1 is the domain optical coherence tomography device, referring to Fig. 2.This moment, this optical coherent chromatographic imaging device 1 mainly was made up of swept light source 10, fiber annular 11, fiber coupler 12,2 Polarization Controllers 13,17, optical fiber collimator 14, catoptron 15 and balance detector 16.Swept light source 10 is sent broadband frequency sweep light, enter into fiber annular 11, enter into fiber coupler 12 then, be divided into two-beam by fiber coupler 12, wherein a branch ofly enter catoptron 15 by first Polarization Controller 13 and optical fiber collimator 14 and reflect by former road and get back to fiber coupler 12.Another bundle outputs to system's optical fiber collimator 4 by second Polarization Controller 17 and two-dimensional scan galvanometer 5 enters into scanning objective 6, is focused in circuit board 7 by scanning objective 6.The reflected light of circuit board 7 is got back to fiber coupler 12 through former road.The two-way reflected light forms interference in fiber coupler 20.Balance detection device 16 is sent into computing machine 9 after receiving the interference signal that fiber annular 11 and detection optical fiber coupling mechanism 12 return simultaneously.
Swept light source adopts the swept light source ESS-840nm-100KHz of Exalos, and its centre wavelength is 840nm, and the scanning optical spectrum scope is 60nm, and sweep velocity is 100KHz.In the lateral resolution computing formula according to optical coherence tomography:
The lateral resolution that can calculate system is 5.124um.Longitudinal frame computing formula according to the optical coherence tomography device:
The longitudinal frame that can calculate system is 5.189um.Therefore, the resolution of system in three dimension scale is 5.124umx * 5.124umy * 5.189umz.
Vertical shift platform 3 and translate stage 8 cooperating under the control of computing machine 9 is realized the adjustment of three-dimensional position relation between scanning objective 6 and the circuit board 7 with this.In order to realize the adjustment of vertical shift platform 3 and translate stage 8 three-dimensional relationship, in the utility model, it is one of following 3 kinds that the combination of vertical shift platform 3 and translate stage 8 can be selected, that is:
A kind of is vertical shift platform 3 when only being made of Z axle motion motor, and translate stage 8 is made up of X-axis motor and Y-axis motion motor; Vertical shift this moment platform 3 is motionless on X-axis and Y-axis, only moves up and down the distance of adjusting scanning objective 6 and circuit board 7.Translate stage 8 is at X-axis and/or Y direction walking circuit plate 7.
A kind of is that vertical shift platform 3 when being made up of Z axle motion motor and X-axis motion motor, translate stage 8 only are made of the Y-axis motion motor; Vertical shift this moment platform 3 is motionless on Y-axis, namely can move up and down the distance of adjusting scanning objective 6 and circuit board 7, again can be mobile in X-direction.Translate stage 8 is at Y direction walking circuit plate 7.
A kind of is that vertical shift platform 3 when being made up of Z axle motion motor and Y-axis motion motor, translate stage 8 only are made of the X-axis motion motor; Vertical shift this moment platform 3 is motionless on X-axis, namely can move up and down the distance of adjusting scanning objective 6 and circuit board 7, again can be mobile in Y direction.Translate stage 8 is at X-direction walking circuit plate 7.
The motion motor of vertical shift platform 3 and translate stage 8 can adopt the two-dimentional linear electric motors of HIWIN company, places it on the marble platform, and the bearing accuracy of linear electric motors and repeatable accuracy can reach 5um, and scanning area can reach 450mm * 450mm.Two-dimensional scan galvanometer 5 adopts the two-dimensional scan galvanometer of ScanLab company, effectively the minute surface bore is 10mm, it is the heart F-theta object lens far away of 100mm that scanning objective adopts focal length, it can guarantee that the light beam of each angle incident impinges perpendicularly on circuit board plane, and its scanning area can reach 40mm * 40mm.Two-dimensional scan galvanometer 5 and scanning objective 6 are positioned on the platform moving up and down, can realize the movement of Z axle, gated sweep object lens and printed circuit board (PCB) distance guarantee that the focal position is on circuit board plane.Two-dimensional scan galvanometer 6 is responsible for the zones of scanning 40mm * 40mm, utilizes linear electric motors to move at 450mm * 450mm then, can realize the scanning of blind hole in the whole printed circuit board (PCB) zone or through hole.
A kind of three-dimensional hole shape detection system method based on optical coherence tomography scanning that adopts said system to realize comprises the steps:
1. computing machine 9 reading pre-stored positional information of blind hole or through hole on the circuit board 7 to be measured in computing machine 9, and 8 motions of control vertical shift platform 3 and translate stage, allow and be fixed in each blind hole and/or the through hole that system's optical fiber collimator 4, two-dimensional scan galvanometer 5 and 6 pairs of scanning objectives on the vertical shift platform 3 be placed on the circuit board 7 on the translate stage 8 and scan one by one.
The control mode of 9 pairs of vertical shift platforms 3 of computing machine described above and translate stage 8 is one of following 3 kinds: namely: first kind: computing machine 9 control vertical shift platforms 3 in Z-direction motion and control translate stage 8 in X-axis and/or Y direction motion; Or second kind: computing machine 9 control vertical shift platforms 3 are at the Z axle and/or X-direction is moved and control translate stage 8 is moved in Y direction; Or the third: computing machine 9 control vertical shift platforms 3 are at the Z axle and/or Y direction is moved and control translate stage 8 is moved in X-direction.Second is identical with the third mode of motion, can realize both unifications by changing coordinate system in the actual mechanical process.
2. for each analyzing spot, the detection light that optical coherent chromatographic imaging device 1 sends enters system's optical fiber collimator 4 by optical fiber 2, system's optical fiber collimator 4 will be surveyed and enter into two-dimensional scan galvanometer 5 behind the optical alignment and carry out two-dimensional scan, the light of two-dimensional scan galvanometer 5 outputs enters the circuit board 7 that is placed on the translate stage 8 after scanning objective 6 focuses on, the reflected light that circuit board 7 produces through former road namely successively through scanning objective 6, be back to optical coherent chromatographic imaging device 1 behind two-dimensional scan galvanometer 5 and the system's optical fiber collimator 4, obtain interference signal by optical coherent chromatographic imaging device 1, finish the scanning of an analyzing spot thus.
In the present embodiment, optical coherent chromatographic imaging device 1 adopts domain optical coherence tomography method, that is: swept light source 10 is sent broadband frequency sweep light, enter into fiber annular 11, enter into fiber coupler 12 then, be divided into two-beam by fiber coupler 12, wherein a branch ofly enter catoptron 15 by first Polarization Controller 13 and optical fiber collimator 14 and reflect by former road and get back to fiber coupler 12; Another bundle outputs to system's optical fiber collimator 4 by second Polarization Controller 17 and two-dimensional scan galvanometer 5 enters into scanning objective 6, is focused in circuit board 7 by scanning objective 6; The reflected light of circuit board 7 is got back to fiber coupler 12 through former road; The two-way reflected light forms interference in fiber coupler 20; Balance detection device 16 is sent into computing machine 9 after receiving the interference signal that fiber annular 11 and detection optical fiber coupling mechanism 12 return simultaneously.
3. the interference signal of the different blind holes respectively optical coherent chromatographic imaging device 1 returned of computing machine 9 or through hole carries out data acquisition and handles, and reconstructs the three-dimensional structure information of each blind hole on the circuit board 7 and/or through hole.
4. computing machine 9 is according to three-dimensional structure information, obtains the degree of depth of each blind hole and/or through hole, relevant informations such as aperture, cull, the damaged situation of end copper up and down after image is handled, the quality of 7 blind hole or through hole on the decision circuitry plate.
Embodiment 2:
Architecture advances according to above-mentioned optical coherent chromatographic imaging device 1, make optical coherence tomography scanning three-dimensional hole shape detection system method step 2. in, its optical coherent chromatographic imaging device 1 also corresponding changing to adopts the spectral domain optical coherence chromatography imaging method, that is: broadband continuous light source 18 sends broadband spectral, enter into fiber coupler 20 through optoisolator 19, be divided into two bundles by fiber coupler 20, wherein a branch ofly enter catoptron 24 through first Polarization Controller 21 and first optical fiber collimator 23, get back to fiber coupler 20 by catoptron 24 reflections by former road; Another bundle outputs to system's optical fiber collimator 4 and two-dimensional scan galvanometer 5 enters into scanning objective 6 through second Polarization Controller 22, focuses on circuit board 7 by scanning objective 6, and the reflected light of circuit board 7 is got back to fiber coupler 20 through former road; The two-way reflected light forms interference in fiber coupler 20; Interference light is divided into each quasi-monochromatic light through the 3rd Polarization Controller 25, second optical fiber collimator 26 after entering into grating 27, focus on line scan camera 29 through spectrum object lens 28, the output of line scan camera 29 connects computing machine 9, reconstructs the blind hole of need detection and/or the three-dimensional structure information of through hole by computing machine 9.
More than be that preferable enforcement of the present utility model is specified, but the utility model is created and is not limited to described embodiment, those of ordinary skill in the art also can make all equivalent variations or replacement under the prerequisite of the utility model spirit, the distortion that these are equal to or replacement all are included in the application's claim institute restricted portion.
Claims (4)
1. based on the three-dimensional hole shape detection system of optical coherence tomography scanning, it is characterized in that:
Mainly formed by optical coherent chromatographic imaging device (1), system's optical fiber collimator (4), two-dimensional scan galvanometer (5), scanning objective (6), vertical shift platform (3), translate stage (8) and computing machine (9);
Vertical shift platform (3) all links to each other with computing machine (9) with translate stage (8), the motion of computing machine (9) control vertical shift platform (3) and translate stage (8); System's optical fiber collimator (4), two-dimensional scan galvanometer (5), scanning objective (6) are fixed on vertical shift platform (3), and follow vertical shift platform (3) motion; Circuit board to be measured (7) is placed on the translate stage (8), and follows translate stage (8) motion; Vertical shift platform (3) vertically be positioned at translate stage (8) directly over;
Optical coherent chromatographic imaging device (1) links to each other with computing machine (9); The detection light that optical coherent chromatographic imaging device (1) sends enters system's optical fiber collimator (4) by optical fiber (2), system's optical fiber collimator (4) will be surveyed and enter into two-dimensional scan galvanometer (5) behind the optical alignment and carry out two-dimensional scan, the light of two-dimensional scan galvanometer (5) output enters the circuit board (7) that is placed on the translate stage (8) after scanning objective (6) focuses on, the reflected light that circuit board (7) produces through former road namely successively through scanning objective (6), be back to optical coherent chromatographic imaging device (1) behind two-dimensional scan galvanometer (5) and the system's optical fiber collimator (4), obtained to send into computing machine (9) behind the interference signal by optical coherent chromatographic imaging device (1).
2. according to the described three-dimensional hole shape detection system based on optical coherence tomography scanning of claim 1, it is characterized in that:
Being combined as of vertical shift platform (3) and translate stage (8) is one of following 3 kinds, that is:
When vertical shift platform (3) only was made of Z axle motion motor, translate stage (8) was made up of X-axis motor and Y-axis motion motor;
Or vertical shift platform (3) when being made up of Z axle motion motor and X-axis motion motor, translate stage (8) only are made of the Y-axis motion motor;
Or vertical shift platform (3) when being made up of Z axle motion motor and Y-axis motion motor, translate stage (8) only are made of the X-axis motion motor.
3. according to claim 1 or 2 described three-dimensional hole shape detection systems based on optical coherence tomography scanning, it is characterized in that:
Optical coherent chromatographic imaging device (1) is the domain optical coherence tomography device, and this moment, this optical coherent chromatographic imaging device (1) mainly was made up of swept light source (10), fiber annular (11), fiber coupler (12), 2 Polarization Controllers (13,17), optical fiber collimator (14), catoptron (15) and balance detector (16);
Swept light source (10) is sent broadband frequency sweep light, enter into fiber annular (11), enter into fiber coupler (12) then, be divided into two-beam by fiber coupler (12), wherein a branch ofly enter catoptron (15) by first Polarization Controller (13) and optical fiber collimator (14) and reflect by former road and get back to fiber coupler (12); Another bundle outputs to system's optical fiber collimator (4) by second Polarization Controller (17) and two-dimensional scan galvanometer (5) enters into scanning objective (6), is focused in circuit board (7) by scanning objective (6); The reflected light of circuit board (7) is got back to fiber coupler (12) through former road; The two-way reflected light forms interference in fiber coupler (20); Balance detection device (16) is sent into computing machine (9) after receiving the interference signal that fiber annular (11) and detection optical fiber coupling mechanism (12) return simultaneously.
4. according to claim 1 or 2 described three-dimensional hole shape detection systems based on optical coherence tomography scanning, it is characterized in that:
Optical coherent chromatographic imaging device (1) is spectral domain optical coherent chromatographic imaging device, and this moment, this optical coherent chromatographic imaging device (1) mainly was made up of broadband continuous light source (18), optoisolator (19), fiber coupler (20), 3 Polarization Controllers (21,22,25), 2 optical fiber collimators (23,26), catoptron (24), grating (27), spectrum object lens (28) and line scan camera (29);
Broadband continuous light source (18) sends broadband spectral, enter into fiber coupler (20) through optoisolator (19), be divided into two bundles by fiber coupler (20), wherein a branch ofly enter catoptron (24) through first Polarization Controller (21) and first optical fiber collimator (23), get back to fiber coupler (20) by catoptron (24) reflection by former road; Another bundle outputs to system's optical fiber collimator (4) and two-dimensional scan galvanometer (5) enters into scanning objective (6) through second Polarization Controller (22), focus on circuit board (7) by scanning objective (6), the reflected light of circuit board (7) is got back to fiber coupler (20) through former road; The two-way reflected light forms interference in fiber coupler (20); Interference light is divided into each quasi-monochromatic light through the 3rd Polarization Controller (25), second optical fiber collimator (26) after entering into grating (27), focus on line scan camera (29) through spectrum object lens (28), the output of line scan camera (29) connects computing machine (9).
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Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103115580A (en) * | 2013-01-23 | 2013-05-22 | 刘茂珍 | Three-dimensional hole-shape detection method and detection system based on optical coherence tomography |
| CN107953037A (en) * | 2017-12-12 | 2018-04-24 | 佛山科学技术学院 | A kind of high-precision laser three dimensional sculpture device and method based on frequency sweep OCT |
| CN108535217A (en) * | 2018-04-08 | 2018-09-14 | 雄安华讯方舟科技有限公司 | optical coherence tomography system |
| CN108572307A (en) * | 2017-03-07 | 2018-09-25 | 惠州中京电子科技有限公司 | A kind of multi-layer H DI printed circuits board blind hole inspection method |
| CN108662986A (en) * | 2018-03-07 | 2018-10-16 | 温州医科大学 | A kind of free form surface on-line real-time measuremen method and device |
| CN109919019A (en) * | 2019-01-29 | 2019-06-21 | 浙江工业大学 | A kind of finger tip three-dimensional information acquisition system |
| CN110161528A (en) * | 2019-06-10 | 2019-08-23 | 中国科学院光电技术研究所 | A kind of scene of fire complex environment laser three-dimensional imaging method based on optical coherence tomography |
| CN115619737A (en) * | 2022-10-18 | 2023-01-17 | 深圳华焊生物科技有限公司 | Biological tissue welding effect detection device |
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Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103115580A (en) * | 2013-01-23 | 2013-05-22 | 刘茂珍 | Three-dimensional hole-shape detection method and detection system based on optical coherence tomography |
| CN103115580B (en) * | 2013-01-23 | 2016-01-13 | 刘茂珍 | Based on three-dimensional hole shape detection method and the system of optical coherence tomography scanning |
| CN108572307A (en) * | 2017-03-07 | 2018-09-25 | 惠州中京电子科技有限公司 | A kind of multi-layer H DI printed circuits board blind hole inspection method |
| CN107953037A (en) * | 2017-12-12 | 2018-04-24 | 佛山科学技术学院 | A kind of high-precision laser three dimensional sculpture device and method based on frequency sweep OCT |
| CN108662986A (en) * | 2018-03-07 | 2018-10-16 | 温州医科大学 | A kind of free form surface on-line real-time measuremen method and device |
| CN108535217A (en) * | 2018-04-08 | 2018-09-14 | 雄安华讯方舟科技有限公司 | optical coherence tomography system |
| CN109919019A (en) * | 2019-01-29 | 2019-06-21 | 浙江工业大学 | A kind of finger tip three-dimensional information acquisition system |
| CN110161528A (en) * | 2019-06-10 | 2019-08-23 | 中国科学院光电技术研究所 | A kind of scene of fire complex environment laser three-dimensional imaging method based on optical coherence tomography |
| CN110161528B (en) * | 2019-06-10 | 2022-07-19 | 中国科学院光电技术研究所 | Fire scene complex environment laser three-dimensional imaging method based on optical coherence tomography |
| CN115619737A (en) * | 2022-10-18 | 2023-01-17 | 深圳华焊生物科技有限公司 | Biological tissue welding effect detection device |
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