CN106767500A - For the light path system of topography measurement - Google Patents
For the light path system of topography measurement Download PDFInfo
- Publication number
- CN106767500A CN106767500A CN201611061350.4A CN201611061350A CN106767500A CN 106767500 A CN106767500 A CN 106767500A CN 201611061350 A CN201611061350 A CN 201611061350A CN 106767500 A CN106767500 A CN 106767500A
- Authority
- CN
- China
- Prior art keywords
- amici prism
- light
- measurement
- laser
- measured surface
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
Abstract
The present invention discloses a kind of light path system for topography measurement, including white light source 1, three Amici prisms, micro- eyepiece 5, microcobjective 6, interference objective 7, four-quadrant photoelectric sensor 8, laser 9 and imageing sensors 10, with two optical paths and laser measurement light path；Laser measurement light path is：Transferred through the 3rd Amici prism 4 by laser 9, measured surface 11 is focused to by microcobjective 6, after being reflected through measured surface 11, respectively through microcobjective 6, the 3rd Amici prism 4 and the second Amici prism 3, four-quadrant photoelectric sensor 8 is projected to for the measurement of the elevation information of measured surface 11；Laser 9 is transferred through the light that measured surface 11 is reflected by the second Amici prism 3, after the first Amici prism 2 and micro- eyepiece 5, it is imaged together to imageing sensor 10 with the lighting background light formed by white light source 1, is formed collection figure during laser measurement.
Description
Technical field
The present invention relates to a kind of topography measurement device, machine components, optical component especially for Ultra-precision Turning
Machined surface quality and Shape measure in manufacturing process.
Background technology
Surface topography refers to the geometric shape that shows of interface of object and surrounding medium, by surface basic configuration and
The surface defect parameter such as percent ripple, texture, surface roughness together constitutes the feature of body surface primary morphology.Added by machinery
The surface topography that the techniques such as work, surface treatment are formed directly affects its function and performance.With national defense industry, Aero-Space
And the field such as machine-building develops rapidly, the demand of Ultra-precision Turning part is also increasingly improved, product surface pattern and structure
Also become increasingly complex, therefore, the surface profile measurement technology such as machine components, optical element to Ultra-precision Turning is most important.
Surface topography measuring method is varied, and in order to adapt to complex surface topography measurement demand, main measurement means are still
It is point by point scanning metering system, most common contourgraph disclosure satisfy that the demand of ultraprecise highly-efficient processing.Meanwhile, some use whole field
Scan mode realizes the method that surface topography quickly measures optical surface, such as lasing area interferometric method, reflecting grating method.But more than
The measurement data sample rate of method is relatively relatively low, is only capable of obtaining the basic configuration (low-frequency information of surface topography) of surface topography.
And contact contourgraph is suitable only for the Roughness Information (high-frequency information of surface topography) on collection surface contour line.However,
The surface details such as texture or percent ripple of surface topography information (intermediate frequency information of surface topography) influences very big to performance.
At present, the white light interference method for being appropriate for surface details analysis is relatively confined to local measurement, and its cardinal principle is using white
The Low coherence characteristic of light, by object surface appearance message reflection to interference signal, and is drawn by the analysis to interference image
Recover the three-dimensional appearance on testing sample surface, Measurement Resolution can reach nanoscale.
The content of the invention
It is an object of the invention to provide a kind of light path that can be used to realize surface full frequency band measuring surface form on a large scale
System.Using in a set of measurement apparatus, the in site measurement in can both processing can also independently carry out off-line measurement to the present invention.
Technical scheme is as follows：
A kind of light path system for topography measurement, including it is 1, three Amici prisms of white light source, micro- eyepiece 5, micro-
Object lens 6, interference objective 7, four-quadrant photoelectric sensor 8, laser 9 and imageing sensor 10, with two optical paths and swash
Photo measure light path, wherein,
White light interferometric light path is：Light beam parallel projection is sent to being divided into two after the first Amici prism 2 by white light source 1
Beam, light beam is transferred 90 ° by the first Amici prism 2 and projects measured surface 11 by interference objective 7, and the light of reflection is through interference
The Amici prism 2 of object lens 7 and first returns to micro- eyepiece 5, and light beam and its light for reflecting occur dry in the visual field of micro- eyepiece 5
Relate to, imageing sensor 10 obtains interference fringe to obtain the surface topography information in region to be measured；Second beam light passes through the first light splitting
Prism 2, sequentially passes through the second Amici prism 3, the 3rd Amici prism 4 and microcobjective 6, converges at measured surface 11, through tested
Surface 11 reflect after respectively through microcobjective 6, the 3rd Amici prism 4, the second Amici prism 3, the first Amici prism 2 and micro-
Eyepiece 5, is imaged onto imageing sensor 10, is responsible for laser measurement light path and provides lighting background light；
Laser measurement light path is：Transferred through the 3rd Amici prism 4 by laser 9, by microcobjective 6 focus to by
Surface 11 is surveyed, after being reflected through measured surface 11, respectively through microcobjective 6, the 3rd Amici prism 4 and the second Amici prism 3, is thrown
Four-quadrant photoelectric sensor 8 is incident upon for the measurement of the elevation information of measured surface 11；Laser 9 is reflected through measured surface 11
Light transferred by the second Amici prism 3, by the first Amici prism 2 and micro- eyepiece 5 after, and formed by white light source 1
Lighting background light is imaged to imageing sensor 10 together, forms collection figure during laser measurement.
" white light-laser " complex form that light path system of the invention is used, then it is aided with three-dimensional movement platform, can be simultaneously real
Existing laser scanning measurement and white light interference topography measurement.Wherein laser scanning measurement realizes that surface topography low-frequency information is obtained, and adopts
Sampling point quantity is few, and measuring speed is fast, can carry out quick cognition to measured surface；White light interference topography measurement is then by multiple haplopias
Connecting method obtains measured surface medium-high frequency information, monoscopic measuring route can according to laser measurement recognizing for measured surface
Knowledge is planned.Therefore, light path system of the invention is placed in three-dimensional movement platform, high speed full range can be carried out to surface topography
Section measurement.Simultaneously as the light path system for topography measurement of the invention is by laser measurement and white light interferometric system light
Road is effectively combined, and therefore, it can the measuring system to form simple structure, be easily installed, not only can be with routing motion platform
The scanning survey of measured surface is carried out, can also be installed on machining tool, the in situ of surface topography to being processed device is surveyed
Amount, it is to avoid secondary dress just waits the error of introducing in process.
Brief description of the drawings：
Fig. 1 is " for the index path of the light path system of topography measurement
Fig. 2 light path system structural representations for topography measurement of the invention
Fig. 3 light path systems for topography measurement of the invention are positioned over three-dimensional movement platform schematic diagram
Fig. 4 light path systems for topography measurement of the invention place machining tool schematic diagram
Fig. 5 " white light-laser " measurement procedure figure
Fig. 6 " white light-laser " measuring route schematic diagram, (a) helical scan path；(b) grid line scanning pattern 1；(c) grid
Line scanning pattern 2.
Description of reference numerals is as follows：It is the micro- eyepiece 5 of white light source 1, Amici prism 2, Amici prism 3, Amici prism 4, aobvious
Speck mirror 6, interference objective 7, the laser 9 of four-quadrant photoelectric sensor 8, imageing sensor 10, measured surface 11, system shell
12nd, system handle 13, power supply and 14 light path system 15, the linear motion axis 16, (Z-direction for topography measurement of the invention of control
Kinematic axis) linear motion axis 17 (X is to kinematic axis), linear motion axis 18 (Y-direction kinematic axis), sample stage 18, be processed device 20,
Processing knife rest 21, system of processing 22
Specific embodiment
The present invention combines white light interference and Laser Scanning realizes surface full frequency band measuring surface form on a large scale.White light
Interferometric method can quickly realize the nanometer accuracy measurement of small field of view boundary surface pattern, because the sampling number of local measurement is more, because
This, it is possible to achieve the acquisition of full frequency band surface information.It is accomplished by carrying out multiple haplopia field datas for broad surface pattern
Splicing fusion.However, because measured surface is complex-shaped, measuring route of how making rational planning for realizes quick measurement and high accuracy
Splicing is the problem that broad surface topography measurement is realized by White Light Interferometer.Therefore, present invention introduces Laser Scanning
Measurement surface can be treated carries out fast prediction amount, and the characteristic information on surface to be measured is fully understanded by analyzing, and targetedly advises
Draw the path of white light interferometric.It is also possible to binding analysis result, targetedly focal point region carries out piecemeal survey
Amount.Effectively measure and evaluate in the hope of being carried out to measured surface.
Therefore, the present invention proposes the method (" white light-laser ") that white light interference and laser scanning measurement are combined, by means of sharp
Optical scanning metering system realizes the acquisition of surface topography low-frequency information, and white light interferometric passes through multiple monoscopic connecting methods
The principle of surface to be machined medium-high frequency information is obtained, both are combined into a system integrity measurement by light path, it is ensured that measurement
The miniaturization of system, realizes the accurate measurement to measured surface pattern.Fig. 1 is the light path system for topography measurement of the invention
Light path schematic diagram.Measuring system is main by white light source 1, Amici prism 2/3/4, micro- eyepiece 5, microcobjective 6, interferences
Mirror 7, four-quadrant photoelectric sensor 8, laser 9 and imageing sensor 10 are constituted.Measuring system includes two optical paths.White light
Interferometry optical routing white light source 1 sends light beam parallel projection and is divided into two beams, a branch of 2 turns of prism that is split to Amici prism 2
90 ° of folding projects measured surface 11 by interference objective 7, and eyepiece 5, two beams are returned to through interference objective 7 and Amici prism 2 after reflection
Light is interfered in the visual field of eyepiece 5, and imageing sensor 10 obtains interference fringe to obtain the surface topography information in region to be measured；
Another beam passes through Amici prism 2, through Amici prism 3, Amici prism 4 and microcobjective 6, converges at measured surface 11, is tested table
Respectively through microcobjective 6, Amici prism 4, Amici prism 3, Amici prism 2 and eyepiece 5 after the reflection of face 11, image biography is imaged onto
Sensor 10, is responsible for laser measurement light path and provides lighting background light.Laser measurement optical routing laser 9 sets out through Amici prism 4
Turnover, measured surface 11 is focused to by microcobjective 6, after being reflected through measured surface 11, respectively through microcobjective 6, light splitting
Prism 4 and Amici prism 3, are projected to four-quadrant photoelectric sensor 8 for the measurement of the elevation information of measured surface 11.When due to quilt
The change of the measured position elevation information of surface 11 is surveyed, laser can be caused to expose to the position of four-quadrant photoelectric sensor 8 difference, passed through
Laser spots position calculates measured position elevation information.Laser 9 passes through light splitting rib through the light that measured surface 11 is reflected
Mirror 3 is transferred, and is imaged together to image sensing by Amici prism 2 and eyepiece 5, and the lighting background light that white light source 1 is formed
Device 10, forms collection figure during laser measurement.Due to being focused on to measured zone when two-way optical path is different in measurement process,
Therefore, either white light interferometric or laser measurement in measurement process, white light source 1 and laser 9 are opened simultaneously, but
Will not be imaged on simultaneously on imageing sensor 10, therefore, two-way measuring system is independent of each other.
Fig. 2 is the structure design schematic diagram of the light path system for topography measurement of the invention.The measuring system can match somebody with somebody
Resultant motion platform carries out the topography scan of measured surface, as shown in Figure 3, it is also possible to be placed directly in machining tool, and it is right to realize
In the in site measurement of surface to be machined, it is to avoid when being measured measured surface 11 in process to be processed device 20 repeatedly
Clamping, the schematic diagram in site measurement is as shown in Figure 4.
Fig. 5 is flow chart when " white light-laser " system is measured.First by laser scanning system according to certain measurement
Path is quickly scanned to measured surface, and scanning pattern spacing is larger, sweep speed is fast, can quick obtaining measured surface it is big
Cause contour feature.Scanning pattern mode is relevant with the operation form of kinetic control system, main scanning form as shown in fig. 6,
Mainly include that helical scanning or grid line are scanned.According to white light measuring system single measurement field range, white light measurement system is determined
The measuring route of system, it is ensured that adjacent measurement field range has certain overlapping in white light measurement process, so as to ensure measurement data
Integrality.And after measured surface feature is obtained, each location point of white light measuring route can be according to the surface characteristics, mainly
It is height relief amount, the elevation carrection position of dialogue light measurement system is quickly positioned, so as to ensure that the fast of white light systems
Speed measurement, while also ensure that the uniformity of measurement dead-center position every time.After white light is measured, the measurement to each visual field
Result carries out data fusion and can obtain the system of whole measured surface, complete topographic data.So-called data fusion, is by phase
The data overlap part of adjacent measured zone is spliced, and in general, the final partial data is the average value of overlapped data.Number
It is the current techique in many visual field tests according to fusion, may be referred to related data realization.
Claims (1)
1. it is a kind of light path system for topography measurement, including white light source (1), three Amici prisms, micro- eyepiece (5), aobvious
Speck mirror (6), interference objective (7), four-quadrant photoelectric sensor (8), laser (9) and imageing sensor (10), with two
Optical path and laser measurement light path, wherein,
White light interferometric light path is：Light beam parallel projection is sent to being divided into two after the first Amici prism (2) by white light source (1)
Beam, light beam is transferred 90 ° by the first Amici prism (2) and projects measured surface (11), the light of reflection by interference objective (7)
Micro- eyepiece (5) is returned to through interference objective (7) and the first Amici prism (2), light beam and its light for reflecting are in micro- eyepiece
(5) interfered in visual field, imageing sensor (10) obtains interference fringe to obtain the surface topography information in region to be measured；Second
Shu Guang passes through the first Amici prism (2), sequentially passes through the second Amici prism (3), the 3rd Amici prism (4) and microcobjective (6),
Measured surface (11) is converged at, respectively through microcobjective (6), the 3rd Amici prism (4), the after being reflected through measured surface (11)
Two Amici prisms (3), the first Amici prism (2) and micro- eyepiece (5), are imaged onto imageing sensor (10), are responsible for Laser Measuring
Amount light path provides lighting background light；
Laser measurement light path is：Transferred through the 3rd Amici prism (4) by laser (9), focused to by microcobjective (6)
Measured surface (11), after being reflected through measured surface (11), respectively through microcobjective (6), the 3rd Amici prism (4) and second point
Light prism (3), is projected to four-quadrant photoelectric sensor (8) for the measurement of measured surface (11) elevation information；Laser (9) is passed through
The light that measured surface (11) is reflected is transferred by the second Amici prism (3), by the first Amici prism (2) and micro- eyepiece
(5) after, and it is imaged together to imageing sensor (10) by the lighting background light that white light source (1) is formed, is formed laser measurement
When collection figure.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611061350.4A CN106767500B (en) | 2016-11-25 | 2016-11-25 | Light path system for topography measurement |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201611061350.4A CN106767500B (en) | 2016-11-25 | 2016-11-25 | Light path system for topography measurement |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN106767500A true CN106767500A (en) | 2017-05-31 |
| CN106767500B CN106767500B (en) | 2019-03-22 |
Family
ID=58913367
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201611061350.4A Active CN106767500B (en) | 2016-11-25 | 2016-11-25 | Light path system for topography measurement |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN106767500B (en) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108871206A (en) * | 2018-08-23 | 2018-11-23 | 业成科技（成都）有限公司 | Surface measurement method and surface measuring device |
| CN111412861A (en) * | 2020-03-31 | 2020-07-14 | 天津大学 | Linear white light surface profile measuring method |
| CN114485464A (en) * | 2022-01-24 | 2022-05-13 | 天津大学 | Large-range plane element white light interference rapid measurement method |
| CN116931236A (en) * | 2023-09-14 | 2023-10-24 | 长春长光智欧科技有限公司 | Double-rate optical system based on probe alignment wafer |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10141926A (en) * | 1996-11-13 | 1998-05-29 | Olympus Optical Co Ltd | Method and equipment for measuring shape |
| JP2007263904A (en) * | 2006-03-30 | 2007-10-11 | Anritsu Corp | Device and method for measuring three-dimensional shape |
| CN101403608A (en) * | 2008-11-13 | 2009-04-08 | 哈尔滨工程大学 | Accurate measurement apparatus and method for workpiece surface appearance |
| CN201569419U (en) * | 2009-11-16 | 2010-09-01 | 浙江大学 | Rapid surface quality measuring device |
| CN102589463A (en) * | 2012-01-10 | 2012-07-18 | 合肥工业大学 | Two-dimensional and three-dimensional integrated imaging measurement system |
| CN103975220A (en) * | 2011-12-07 | 2014-08-06 | 柯尼卡美能达株式会社 | Shape-measuring device |
| CN105865370A (en) * | 2016-05-23 | 2016-08-17 | 华南师范大学 | White-light scanning interferometry measurement method and system |
-
2016
- 2016-11-25 CN CN201611061350.4A patent/CN106767500B/en active Active
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH10141926A (en) * | 1996-11-13 | 1998-05-29 | Olympus Optical Co Ltd | Method and equipment for measuring shape |
| JP2007263904A (en) * | 2006-03-30 | 2007-10-11 | Anritsu Corp | Device and method for measuring three-dimensional shape |
| CN101403608A (en) * | 2008-11-13 | 2009-04-08 | 哈尔滨工程大学 | Accurate measurement apparatus and method for workpiece surface appearance |
| CN201569419U (en) * | 2009-11-16 | 2010-09-01 | 浙江大学 | Rapid surface quality measuring device |
| CN103975220A (en) * | 2011-12-07 | 2014-08-06 | 柯尼卡美能达株式会社 | Shape-measuring device |
| CN102589463A (en) * | 2012-01-10 | 2012-07-18 | 合肥工业大学 | Two-dimensional and three-dimensional integrated imaging measurement system |
| CN105865370A (en) * | 2016-05-23 | 2016-08-17 | 华南师范大学 | White-light scanning interferometry measurement method and system |
Non-Patent Citations (1)
| Title |
|---|
| 常素萍: "《基于白光干涉轮廓尺寸与形貌非接触测量方法和系统》", 《中国博士学位论文全文数据库 工程科技Ⅰ辑》 * |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108871206A (en) * | 2018-08-23 | 2018-11-23 | 业成科技（成都）有限公司 | Surface measurement method and surface measuring device |
| CN108871206B (en) * | 2018-08-23 | 2021-06-22 | 业成科技（成都）有限公司 | Surface measuring method and surface measuring device |
| CN111412861A (en) * | 2020-03-31 | 2020-07-14 | 天津大学 | Linear white light surface profile measuring method |
| CN111412861B (en) * | 2020-03-31 | 2022-02-11 | 天津大学 | Linear white light surface profile measuring method |
| CN114485464A (en) * | 2022-01-24 | 2022-05-13 | 天津大学 | Large-range plane element white light interference rapid measurement method |
| CN114485464B (en) * | 2022-01-24 | 2022-12-27 | 天津大学 | Large-range plane element white light interference rapid measurement method |
| CN116931236A (en) * | 2023-09-14 | 2023-10-24 | 长春长光智欧科技有限公司 | Double-rate optical system based on probe alignment wafer |
| CN116931236B (en) * | 2023-09-14 | 2023-11-28 | 长春长光智欧科技有限公司 | Double-rate optical system based on probe alignment wafer |
Also Published As
| Publication number | Publication date |
|---|---|
| CN106767500B (en) | 2019-03-22 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN106441157B (en) | A kind of complex topography method for fast measuring | |
| CN106595515B (en) | The topography measurement device that a kind of white light interference and laser scanning combine | |
| Gao et al. | On-machine and in-process surface metrology for precision manufacturing | |
| TWI576563B (en) | Method and device for non-contact measuring surfaces | |
| CN102077052B (en) | Vision system for scan planning of ultrasonic inspection | |
| US20130010286A1 (en) | Method and device of differential confocal and interference measurement for multiple parameters of an element | |
| CN103115580B (en) | Based on three-dimensional hole shape detection method and the system of optical coherence tomography scanning | |
| CN106643550B (en) | Three-dimensional shape measuring device and method based on digital holographic scanning | |
| CN102425998B (en) | Full parameter detection apparatus of polished surface quality of optical element and detection method thereof | |
| CN106767500A (en) | For the light path system of topography measurement | |
| CN201569419U (en) | Rapid surface quality measuring device | |
| CN106197257A (en) | Amplitude & Phase combined modulation super-resolution three-dimensional micro-nano structure topography measurement device | |
| CN104913732B (en) | The normal tracking mode non-spherical measuring method and system interfered based on recombination laser | |
| JP2018529075A (en) | Real-time inspection of automatic ribbon placement | |
| CN203069151U (en) | Three-dimensional hole form detection system based on optical coherence tomography scanning | |
| CN107144237A (en) | Heavy caliber interferometer measuration system and algorithm based on three-dimensional splicing | |
| CN115371587A (en) | Surface topography measuring device and method and object surface height calculating method | |
| CN206832200U (en) | A kind of wide range three-dimensional surface profile measurement apparatus | |
| CN111406197A (en) | Transparent or translucent material curved surface contour detection system | |
| CN113588682A (en) | Large-range high-precision rapid defect detection system for 3D parts | |
| JP2017062159A (en) | Defect inspection device and defect inspection method | |
| CN208520339U (en) | Three-dimensional surface shape detection device without axial scan | |
| CN111854628A (en) | Three-dimensional imaging device for weld surface appearance | |
| CN107923735A (en) | Method and apparatus for the pattern for deriving body surface | |
| CN108955568A (en) | Three-dimensional surface shape detection device and its application method without axial scan |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |