CN108955568A - Three-dimensional surface shape detection device and its application method without axial scan - Google Patents
Three-dimensional surface shape detection device and its application method without axial scan Download PDFInfo
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- CN108955568A CN108955568A CN201810895728.3A CN201810895728A CN108955568A CN 108955568 A CN108955568 A CN 108955568A CN 201810895728 A CN201810895728 A CN 201810895728A CN 108955568 A CN108955568 A CN 108955568A
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- light
- spectrometer
- optical fibre
- wavelength
- measured piece
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
Abstract
The present invention provides a kind of three-dimensional surface shape detection devices and its application method without axial scan, including secondary color light source, control and data processing system with multi-wavelength's characteristic；Input optical fibre, pin hole, collimating mirror, dispersion object lens, spectroscope, object space condenser lens are disposed between secondary color light source and measured piece；Further include a spectrometer, image space condenser lens, focusing aperture, output optical fibre are disposed between the spectroscope and spectrometer；The spectrometer connects the output optical fibre, and the spectrometer connects the control and data processing system；It further include a scanning system, the scanning system includes stepper motor, driver, X-axis guide rail, Y-axis guide rail, Two-dimensional Position moving stage；The part to be measured is placed on the two-dimensional movement platform.It can realize that scanning object dimensional pattern does not need to carry out axial scan using the technical program, device debugging is easy to use, shortens time of measuring.
Description
Technical field
The present invention relates to a kind of three-dimensional surface shape detection devices and its application method without axial scan.
Background technique
The surface quality that the techniques such as machining, surface treatment are formed will directly affect its functional characteristic and use, such as rub
Scouring damage, corrosion resistance, electric conductivity, thermal conductivity etc., while being also the important references of evaluation processing technology quality.Surface topography
Measurement is that the important link for manufacturing product quality characterization and quality control the premise reliably guaranteed with function.
Surface topography measuring method mainly includes contact type measurement method and non-contact type measuring method.Wherein contact type measurement method
Most commonly seen with Mechanical stylus formula mensuration, this method is contacted using mechanical probes and is moved along measured surface, is passed by displacement
The variation of surface profile is converted electric signal by sensor, and surface profile parameters are obtained after data acquisition and processing (DAP).This method
Measurement accuracy is high, strong antijamming capability, but measuring speed is slower, and device is complicated, and its detector is easy to scratch measured piece table
Face, using being restricted.For non-contact type measuring method based on optical measurement, measurement method has light cross-section method, White Light Interferometer, projection
Raster method, etc., these contactless measurements overcome contact type measurement and are easy the shortcomings that scratching measured object surface, mention
High measuring speed and measurement accuracy.Wherein, light cross-section method is based on laser point by point scanning, using laser line light source, through cylinder
Mirror generates planar light and is radiated on sample, generates a bright light belt on sample surface, is adopted by CCD camera
Collection obtains digital figure, the two-dimensional silhouette information by graphics process up to object on the optical section, if further along third
Tie up stepping measurement, so that it may obtain three-D profile overall picture.White light interferometric method is the coherence using white light, by object three
Dimension topographical information is reflected on interference signal, can quickly recover the three of sample to be tested surface by the analysis to interference image
Tie up pattern.Projection grating method uses projection grating phase-stepping, shoots several deformed grating pictures for carrying contour of object information,
Measuring surface form is realized after carrying out phase demodulating.Their shared disadvantages are to require axial scan, and time of measuring is long.
Summary of the invention
It is an object of the invention to overcome the deficiencies in the prior art described above, a kind of surface three without axial scan is provided
Shape measure device and its application method are tieed up, does not need to carry out axial scan, device debugging is easy to use, when shortening measurement
Between.
In order to solve the above-mentioned technical problems, the present invention provides a kind of three-dimensional surface shapes without axial scan to detect dress
It sets, including secondary color light source, control and data processing system with multi-wavelength's characteristic；Between secondary color light source and measured piece successively
It is provided with input optical fibre, pin hole, collimating mirror, dispersion object lens, spectroscope, object space condenser lens；It further include a spectrometer, described point
Image space condenser lens, focusing aperture, output optical fibre are disposed between light microscopic and spectrometer；The spectrometer connection is described defeated
Optical fiber out, the spectrometer connect the control and data processing system；
The secondary color light source, input optical fibre, pin hole, collimating mirror, dispersion object lens and measured piece form light path；Described point
Light microscopic, image space condenser lens, focusing aperture, output optical fibre and spectrometer form receiving light path；The light path and reception light
Road is vertical；
It further include a scanning system, the scanning system is installed on the lower section of the object space condenser lens, and and detection light
The optical axis on road is vertical；The scanning system includes stepper motor, driver, X-axis guide rail, Y-axis guide rail, Two-dimensional Position moving stage；It is described
Part to be measured is placed on the two-dimensional movement platform.
The present invention also provides a kind of surface three-dimensional appearance testing methods without axial scan, are not necessarily to using above-mentioned
The three-dimensional surface shape detection device of axial scan；The following steps are included:
The polychromatic light that secondary color light source generates is after input optical fibre, pin hole, collimating mirror, dispersion object lens by the photochromic of different wave length
It scatters, through the light of light path after object space condenser lens, focuses the light of different wave length in the direction of the optical axis not
Same position forms a series of monochromatic focal beam spots；
The light being reflected back through measured piece enters receiving light path by spectroscope, wherein only focusing on certain of measured piece surface
The specific light of one specific wavelength is received by image space condenser lens, focusing aperture, output optical fibre by spectrometer, other are not focused on
The defocus light on measured piece surface is since the obstruction of focusing aperture is without can enter output optical fibre, and spectrometer is by collected spectrum number
According to being sent to control and data processing system is handled and stored；
Establish the linear mapping relation of wavelength and displacement；Any wavelength light (λ i.e. in working rangei) it is corresponding poly-
Burnt position f (λi), each wavelength forms point spread function in object space by optical path, and axial light intensity function isWherein, ISAxial intensity, behalf optical axis direction coordinate are represented, α represents objective lens numerical hole
Diameter, k represent proportionality coefficient, I0Initial beam intensity is represented, when the surface of measured piece is located at the focusing surface of corresponding wavelength, light
Spectrometer could obtain largest light intensity value, and dispersion pipe mirror realizes that the light of different wave length is equal in the focusing areal coordinate distribution of optical axis direction
It is even, it is in a linear relationship: h (λi)=a λi+b；Wherein, h (λi) coordinate position corresponding to any wavelength light is represented, a, b indicate line
The surface of the coefficient of sexual intercourse, the measured piece that spectrometer is obtained focuses wavelength X1Wavelength X is focused with datum level0It substitutes into respectively public
Formula h (λi)=a λiH (λ is obtained in+b1)、h(λ0), the absolute value that the two subtracts each other difference is measured piece apparent height h；
The movement instruction that the driver receives control and data processing system issues, refers to two-dimensional movement platform according to movement
Enable makes it reach another position along X-axis or the one or more step pitches of Y-axis feeding, and obtains the spectrum of the point by spectrometer collection
Data repeat the above steps until scanned；
After having acquired measured point all on measured piece with certain Scanning step, with three-dimensionalreconstruction algorithm by all numbers
According to being handled, and reconstruct the three-dimensional appearance on measured piece surface.
Compared to the prior art, technical solution of the present invention have it is following the utility model has the advantages that
The present invention provides a kind of three-dimensional surface shape detection devices and its application method without axial scan, are not necessarily to axis
To scanning, it is only necessary to scanned by the planar of X-axis and Y-axis to obtain the three dimensional topography of tested object plane, can quickly, nothing
Damage obtains measured piece three-dimensional surface shape.
Detailed description of the invention
Fig. 1 is the structural representation in the preferred embodiment of the present invention without the three-dimensional surface shape detection device of axial scan
Figure；
Fig. 2 is measured piece surface light path schematic diagram in the preferred embodiment of the present invention；
Fig. 3 is spectrometer collection data imaging figure in the preferred embodiment of the present invention.
Specific embodiment
Below in conjunction with the drawings and specific embodiments, the present invention will be further described.
A kind of three-dimensional surface shape detection device without axial scan, referring to figs. 1 to 2, including with multi-wavelength spy
Property secondary color light source 101, control and data processing system 300；It is disposed between secondary color light source 101 and measured piece 108 defeated
Enter optical fiber 102, pin hole 103, collimating mirror 104, dispersion object lens 105, spectroscope 106, object space condenser lens 107；It further include a light
Spectrometer 201 is disposed with image space condenser lens 110, focusing aperture 111, defeated between the spectroscope 106 and spectrometer 201
Optical fiber 112 out；The spectrometer 201 connects the output optical fibre 112, and the spectrometer 201 connects at the control and data
Reason system 300；The secondary color light source 101, input optical fibre 102, pin hole 103, collimating mirror 104, dispersion object lens 105 and measured piece
108 form light path 113；The spectroscope 106, image space condenser lens 110, focusing aperture 111, output optical fibre 112 and light
Spectrometer 201 forms receiving light path 114；The light path 113 is vertical with receiving light path 114；It further include a scanning system, it is described
Scanning system is installed on the lower section of the object space condenser lens 107, and vertical with the optical axis of light path 113；The scanning system
System includes stepper motor, driver, X-axis guide rail, Y-axis guide rail, Two-dimensional Position moving stage；The measured piece 108 is placed in the two dimension and moves
On dynamic platform 109.
The application method of this three-dimensional surface shape detection device without axial scan of detailed description below, including it is following
Step:
The polychromatic light that secondary color light source 101 generates is after input optical fibre 102, pin hole 103, collimating mirror 104, dispersion object lens 105
Photochromic by different wave length scatters, and through the light of light path 113 after object space condenser lens 107, makes different wave length
Light focuses different location in the direction of the optical axis, forms a series of monochromatic focal beam spots；When measured piece 108 is located in measurement range
When, each axial position in measurement range has corresponding focusing wavelength, and this mapping relations one by one are through marking
Displacement-wavelength curve can be obtained after fixed.
The light being reflected back through measured piece 108 enters receiving light path 114 by spectroscope 106, wherein only focusing on tested
The specific light of a certain specific wavelength on 108 surface of part is by image space condenser lens 110, focusing aperture 111,112 quilt of output optical fibre
Spectrometer 201 receives, other be not focused on the defocus light on 108 surface of measured piece due to the obstruction of focusing aperture 111 and cannot be into
Enter output optical fibre 112, collected spectroscopic data is sent to control and the processing of data processing system 300 and stored up by spectrometer 201
It deposits；The light that secondary color light source 101 generates is imported by input optical fibre 102, via pin hole 103, collimating mirror 104, dispersion object lens 105, is divided
The focus point and pin hole 103 formed after light microscopic 106, object space focusing objective len is in conjugate relation.Spectroscope is reflected back from measured piece 108
106, and received via after image space condenser lens 110, focusing aperture 111 by output optical fibre 112, it focuses on measured piece 108
Focal spot and focusing aperture 111 are in conjugate relation.Therefore, above-mentioned pin hole 103, object space focus point and focusing aperture 111 3
Person's conjugate relation each other.Spectrometer 201 is to collected spectrum data processing method: obtaining spectrum number through curve fitting algorithm
According to matched curve, and find out central wavelength corresponding to matched curve peak value to get to central wavelength value corresponding to measurement point,
With reference to Fig. 3.
Establish the linear mapping relation of wavelength and displacement；Any wavelength light (λ i.e. in working rangei) it is corresponding poly-
Burnt position f (λi), each wavelength forms point spread function in object space by optical path, and axial light intensity function isWherein, ISAxial intensity, behalf optical axis direction coordinate are represented, α represents objective lens numerical hole
Diameter, k represent proportionality coefficient, I0Initial beam intensity is represented, is located at the focusing surface of corresponding wavelength and if only if the surface of measured piece 108
When, spectrometer 201 could obtain largest light intensity value, and dispersion pipe mirror realizes that the light of different wave length is sat in the focusing surface of optical axis direction
Mark is evenly distributed, in a linear relationship: h (λi)=a λi+b；Wherein, h (λi) represent coordinate position corresponding to any wavelength light, a,
B indicates the coefficient of linear relationship, and the surface for the measured piece 108 that spectrometer 201 is obtained focuses wavelength X1With datum level focus wave
Long λ0Formula h (λ is substituted into respectivelyi)=a λiH (λ is obtained in+b1)、h(λ0), the absolute value that the two subtracts each other difference is 108 table of measured piece
Face height h；
The movement instruction that the driver receives control and data processing system 300 issues, makes 109 basis of two-dimensional movement platform
Movement instruction, which feeds one or more step pitches along X-axis or Y-axis, makes it reach another position, and is collected by spectrometer 201
The spectroscopic data of the point repeats the above steps until scanned；
After having acquired measured point all on measured piece 108 with certain Scanning step, will own with three-dimensionalreconstruction algorithm
Data handled, and reconstruct the three-dimensional appearance on 108 surface of measured piece.
The present invention provides a kind of three-dimensional surface shape detection devices and its application method without axial scan, are not necessarily to axis
To scanning, it is only necessary to it is scanned by the planar of X-axis and Y-axis to obtain the three dimensional topography on 108 surface of measured piece, it can be fast
Fast, lossless obtains 108 three-dimensional surface shape of measured piece.
The foregoing is only a preferred embodiment of the present invention, but the design concept of the present invention is not limited to this,
Anyone skilled in the art in the technical scope disclosed by the present invention, using this design carries out the present invention non-
Substantive change belongs to the behavior for invading the scope of the present invention.
Claims (2)
1. a kind of three-dimensional surface shape detection device without axial scan, it is characterised in that including with multi-wavelength's characteristic
Secondary color light source, control and data processing system；Input optical fibre, pin hole, collimation are disposed between secondary color light source and measured piece
Mirror, dispersion object lens, spectroscope, object space condenser lens；Further include a spectrometer, is set gradually between the spectroscope and spectrometer
There are image space condenser lens, focusing aperture, output optical fibre；The spectrometer connects the output optical fibre, and the spectrometer connects institute
State control and data processing system；
The secondary color light source, input optical fibre, pin hole, collimating mirror, dispersion object lens and measured piece form light path；The light splitting
Mirror, image space condenser lens, focusing aperture, output optical fibre and spectrometer form receiving light path；The light path and receiving light path
Vertically；
Further include a scanning system, the scanning system is installed on the lower section of the object space condenser lens, and with light path
Optical axis is vertical；The scanning system includes stepper motor, driver, X-axis guide rail, Y-axis guide rail, Two-dimensional Position moving stage；It is described to be measured
Part is placed on the two-dimensional movement platform.
2. a kind of surface three-dimensional appearance testing method without axial scan, it is characterised in that use 1 institute of the claims
The three-dimensional surface shape detection device without axial scan stated；The following steps are included:
The polychromatic light that secondary color light source generates is after input optical fibre, pin hole, collimating mirror, dispersion object lens by the optical dispersion of different wave length
It opens, through the light of light path after object space condenser lens, makes the difference of the light focusing of different wave length in the direction of the optical axis
Position forms a series of monochromatic focal beam spots；
The light being reflected back through measured piece enters receiving light path by spectroscope, wherein only focusing on a certain spy on measured piece surface
The long specific light of standing wave is received by image space condenser lens, focusing aperture, output optical fibre by spectrometer, other are not focused on tested
The defocus light on part surface is sent out collected spectroscopic data without can enter output optical fibre, spectrometer due to the obstruction of focusing aperture
It send to control and data processing system and handles and store；
Establish the linear mapping relation of wavelength and displacement；Any wavelength light (λ i.e. in working rangei) corresponding focusing position
Set f (λi), each wavelength forms point spread function in object space by optical path, and axial light intensity function isWherein, IsAxial intensity, behalf optical axis direction coordinate are represented, α represents objective lens numerical hole
Diameter, k represent proportionality coefficient, I0Initial beam intensity is represented, when the surface of measured piece is located at the focusing surface of corresponding wavelength, light
Spectrometer could obtain largest light intensity value, and dispersion pipe mirror realizes that the light of different wave length is equal in the focusing areal coordinate distribution of optical axis direction
It is even, it is in a linear relationship: h (λi)=a λi+b；Wherein, h (λi) coordinate position corresponding to any wavelength light is represented, a, b indicate line
The surface of the coefficient of sexual intercourse, the measured piece that spectrometer is obtained focuses wavelength X1Wavelength X is focused with datum level0It substitutes into respectively public
Formula h (λi)=a λiH (λ is obtained in+b1)、h(λ0), the absolute value that the two subtracts each other difference is measured piece apparent height h；
The movement instruction that the driver receives control and data processing system issues, makes two-dimensional movement platform according to movement instruction edge
X-axis or Y-axis, which feed one or more step pitches, makes it reach another position, and obtains the spectrum number of the point by spectrometer collection
According to repeating the above steps until scanned；
After having acquired measured point all on measured piece with certain Scanning step, with three-dimensionalreconstruction algorithm by all data into
Row processing, and reconstruct the three-dimensional appearance on measured piece surface.
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| CN201810895728.3A CN108955568A (en) | 2018-08-08 | 2018-08-08 | Three-dimensional surface shape detection device and its application method without axial scan |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN111238383A (en) * | 2020-01-21 | 2020-06-05 | 武汉工程大学 | Colloid three-dimensional reconstruction and thickness measurement method and system based on spectrum confocal |
| CN113847888A (en) * | 2021-11-30 | 2021-12-28 | 中国工程物理研究院激光聚变研究中心 | Automatic measurement device and method for heterogeneous jump surface morphology |
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