CN102494623A - Method for non-contact measuring center to center distance of lens optical surfaces and measuring device - Google Patents
Method for non-contact measuring center to center distance of lens optical surfaces and measuring device Download PDFInfo
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- CN102494623A CN102494623A CN2011103577568A CN201110357756A CN102494623A CN 102494623 A CN102494623 A CN 102494623A CN 2011103577568 A CN2011103577568 A CN 2011103577568A CN 201110357756 A CN201110357756 A CN 201110357756A CN 102494623 A CN102494623 A CN 102494623A
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Abstract
The invention relates to a method for non-contact measuring the center to center distance of lens optical surfaces and a measuring device. In the invention, emergent light form a wideband light source generates an interfere signal through an interference structure; two-dimensional chromatography images of the optical surfaces in the lens can be obtained through the sampling and image reconstruction for the interference signal; a thin parallel light beam is used in a sample arm as a scanning light beam, the starting position of the related chromatography imaging can be changed through moving an optical fiber collimating device, and further the characteristic images of all the optical surfaces with different depth in the lens can be obtained; and finally, the center to center distance between the two optical surfaces can be obtained as per the positions of the optical surfaces in the characteristic images and the moving distance of the imaging starting position. The invention has the advantages of non-contact nondestructive measurement, high measuring accuracy and simplicity in data processing, and can be widely applied in the fields such as optical processing, optical alignment and optical detection.
Description
Technical field
The invention belongs to the optical measurement field, be specifically related to OC contactless measurement of optical surface and measurement mechanism in a kind of camera lens, it is applicable in the optical alignment process the airspace of camera lens or lens group or the detection of lens center thickness.
Background technology
The dress alignment in the dress school, particularly object lens of optical system connects and influences imaging optical instrument imaging quality and performance, is very crucial technology.The dress school process of object lens mainly contains the requirement of three aspects: the eccentric error of 1) proofreading and correct each face; 2) guarantee the airspace; 3) installing under the firm prerequisite, guaranteeing that minute surface is indeformable.The measurement of airspace and control are one of critical processes of object lens production.If the airspace can not strict be controlled, can bring spherical aberration, aberration and influence focal length, multiplying power etc., even have a strong impact on the object lens image quality.The measurement of airspace and control are one of critical processes of object lens production.
The optical surface spacing has multiple measuring method at present, mainly is divided into two types: contact type measurement and non-contact measurement.The domestic contact method of still generally continuing to use is measured.Contact measurement method has two kinds usually: the one, and the distance on the last summit of the last summit of the last lens of measurement and back one lens deducts lens thickness then; The 2nd, measure the distance of sphere summit to the microscope base section.Instrument with contacts mainly contains: dial gauge, clock gauge or grating dial gauge etc.The major defect of contact type measurement is to scratch lens surface easily.For avoiding scratching, between measuring head and measured surface, add layer of protecting paper usually, so measuring accuracy is low.And the length consuming time of contact type measurement, can't in optics processing and dress process, realize guiding in real time.For some surface that is coated with special rete, forbid contact type measurement, therefore must adopt non-contact measurement.
A kind of novel non-contact optical system airspace measuring method has been proposed in one Chinese patent application number " 01133730.3 "; Constitute main optical detection system by the Fizeau interferometer; The focus of interferometer standard lens is gathered on the summit of measured lens; Through a photoelectronic imaging converter measured lens minute surface summit wavefront upset auto-interference is located; The interlock of the standard lens of indication grating and interferometer, thus the frame of reference through grating sensor and digital display meter composition reads the airspace value that the amount of movement of standard lens obtains optical system.
This measuring method is compared contact type measurement and is had the following advantages: realized contactless nondestructive measurement, improved measuring accuracy greatly; The dress school that can be used for special lenses such as plated film is detected; Convenient reading is simple.This measuring method has realized non-contact measurement, but still there are a lot of defectives in himself: the focus location of standard lens is realized by the degree of crook of adjustment interference fringe, complex operation in the adjustment process, and workload is bigger, has introduced bigger personal error.
Optical coherence tomography (OCT) is a kind of chromatographic technique of newly-developed; Low coherence interferometer and cofocus scanning microscopy are combined; Utilize the heterodyne detection technology to obtain the internal information of sample; Its imaging depth reaches the mm magnitude, and spatial resolution remains on μ m magnitude, is a kind of harmless real time imagery instrument of high resolving power that has bright prospects in a lot of fields.
Summary of the invention
The objective of the invention is to the weak point that exists in the prior art; OC contactless measurement of optical surface and measurement mechanism in a kind of camera lens are provided; Can measure optical surface center distance in the camera lens non-contactly, have simultaneously measuring accuracy height, data processing simple, can realize guiding in real time, use advantage flexibly.
Technical scheme provided by the invention is: the OC contactless measurement of optical surface in a kind of camera lens, and step is following:
Wherein, also comprise step 00 before the step 10, make the sample arm scanning light beam through camera lens optical axis to be measured; The said sample arm scanning light beam that makes is that behind the coverage reference arm reflected light, the light intensity that photodetector detects is maximum through the criterion of camera lens optical axis to be measured.
Wherein, step 20 comprises:
Step 21 makes the coherence chromatographic imaging reference position move Δ z, obtains an optical coherence tomography image;
Step 22 is observed the characteristic image whether next optical surface is arranged in the optical coherence tomography image that obtains in the step 21, continues execution in step 21 if not, if execution in step 23;
Step 23 remembers that this coherence chromatographic imaging reference position moving total is x
i, i ∈ 1,2 ..., N-1}, N are the optical surface sum relevant with optical surface spacing to be measured, and N-1 adjacent optical surface spacing promptly arranged.
Step 30 is if obtained the characteristic image of the whole optical surfaces relevant with the optical surface spacing to be measured of camera lens to be measured, execution in step 40, otherwise execution in step 20;
Step 40 is carried out data processing to the characteristic image that has obtained, tries to achieve required optical surface distance values;
Wherein, step 40 comprises:
Step 41 is confirmed the optical surface center in the characteristic image that has obtained, remember that the pixel position of j optical surface in its characteristic image is z
j, j ∈ 1,2 ..., N};
Step 42 is calculated adjacent two optical surface distance values, and remembers that i adjacent optical surface spacing value is l
i, computing formula does
I ∈ 1,2 ..., N-1}, x
iBe corresponding coherence chromatographic imaging reference position amount of movement, n
iBe material refractive index at interval, d is the corresponding light path value of the single pixel of tomographic map;
Step 43, the adjacent two optical surface distance values that obtain according to step 42 obtain required two optical surface distance values.
Wherein, scanning light beam described in the step 00 is thin parallel beam.
Wherein, the method that changes the coherence chromatographic imaging reference position in the step 20 is an optical fiber collimator in optical fiber collimator or the mobile optical lag line in the mobile example arm, perhaps optical fiber collimator in optical fiber collimator and the optical delay line in the mobile example arm simultaneously.
Wherein, characteristic image described in the step 30 is the two-dimensional cross sectional tomographic map that optical coherent chromatographic imaging obtains.
Wherein, the z of Δ described in the step 21 is less than the coherence tomography system scope that axially forms images.
Wherein, to move be to move to sample position along the light incident direction to said coherence chromatographic imaging reference position.
The present invention also provides the OC non-contact measurement apparatus of optical surface in a kind of camera lens, and this measurement mechanism comprises wideband light source, fiber coupler; Two Polarization Controllers, phase modulator, optical delay line; The sample scanister, photodetector, low-noise preamplifier; Data collecting card, computing machine;
This measurement mechanism adopts the Michelson interference structure of fiberize, and the light that sends from wideband light source gets into reference arm and sample arm respectively after the fiber coupler beam split; Get into reference arm a road successively through Polarization Controller, phase modulator and optical delay line, optical delay line adopts the quick delayed sweep line of spectral domain, optical delay line is by optical fiber collimator, diffraction grating, fourier lense, scanning galvanometer, catoptron is formed; What get into sample arm leads up to another Polarization Controller and sample scanister; The sample scanister comprises optical fiber collimator, high precision guide rail, electronic micro-displacement platform and testing sample; The two-way reflected light interferes when fiber coupler converges; After interference signal is surveyed by photodetector, amplify at low-noise preamplifier, filtering, insert data collecting card and computing machine then.
The present invention is with respect to the advantage of prior art:
1, the OC contactless measurement of optical surface in the camera lens of the present invention, harmless to sample, but flexible Application is in dress school and detection range;
2, the present invention has utilized Optical Coherence Tomography Imaging Technology, so measuring accuracy is high, can reach micron dimension;
3, the present invention uses thin parallel beam scanning, and by high precision guide rail moving fiber collimating apparatus, and then changing the tomography scope, measurement range reaches tens millimeters; Data processing is simple.
Description of drawings
Fig. 1 is a workflow diagram of the present invention;
Fig. 2 is a pick-up unit structural representation of the present invention;
The optical delay line structural representation that Fig. 3 adopts for embodiment of the present invention;
The sample scanister structural representation that Fig. 4 adopts for embodiment of the present invention;
Fig. 5 is the data processing synoptic diagram;
Fig. 6 object lens sample interval measurement result synoptic diagram.
Embodiment
Below in conjunction with accompanying drawing and embodiment the present invention is further described.
As shown in Figure 2, apparatus of the present invention comprise wideband light source 1, fiber coupler 2, Polarization Controller 3,4, phase modulator 5, optical delay line 6, sample scanister 7, photodetector 8, low-noise preamplifier 9, data collecting card 10, computing machine 11.
Measurement mechanism adopts the Michelson interference structure of fiberize, and the light that sends from wideband light source 1 gets into reference arm and sample arm respectively after fiber coupler 2 beam split.Get into reference arm a road successively through Polarization Controller 3, phase modulator 5 and optical delay line 6, optical delay line 6 select for use the quick delayed sweep line of spectral domain (Rapid Scan Optical Delay Line, RSOD); Optical delay line 6 is by optical fiber collimator 12; Diffraction grating 13, fourier lense 14, scanning galvanometer 15; Catoptron 16 is formed, and is as shown in Figure 3; What get into sample arm leads up to Polarization Controller 4 and sample scanister 7, and sample scanister 7 comprises optical fiber collimator 18, high precision guide rail 17, and electronic micro-displacement platform 19 and testing sample 20, as shown in Figure 4.The two-way reflected light interferes when fiber coupler 2 converges, and after interference signal is surveyed by photodetector 8, amplifies at low-noise preamplifier 9, filtering, inserts data collecting card 10 and computing machine 11 then.
Principle of the present invention is: because the low coherence of wideband light source 1; When reference arm light path fixedly the time; Have only reference arm reflected light and sample arm back reflected laser optical path difference less than the coherent length of wideband light source 1, just can interfere, promptly have only the back reflected laser of sample certain depth just can interfere; The interference light light intensity is maximum when two arm optical path differences are zero, reduces rapidly along with the increase of optical path difference.When optical delay line 6 carried out light path scanning, the back reflected laser with the sample different depth interfered respectively, refractive index information on the interference signal envelope representative sample depth direction.Optical surface for the refractive index sudden change; The optical surface positional information is represented at the envelope center; Therefore the centre distance of adjacent envelope is just represented the spacing on adjacent optical surface; And the change in optical path length of optical delay line 6 is strict controlled, so through obtaining the corresponding optical path difference in adjacent envelope center, just can obtain its spacing value divided by material refractive index between the adjacent optical surface again.
The current signal that photodetector 8 produces is at first delivered to low-noise preamplifier 9; Amplify, voltage transitions, filtering, DC component is filtered, carry out data acquisition by data collecting card 10 again and send into computing machine 11; Carry out Hilbert transform and extract the envelope information of interference signal; Be amplitude information, convert amplitude signal into the gradation of image value then, computing machine obtains the characteristic image of sample respective depth scope according to respective algorithms; This algorithm is ripe application the in the prior art, does not do detailed description here.
By top said, the axial gray scale envelope of characteristic image is the interference signal envelope.Optical surface for the refractive index sudden change; The gray scale extreme point is represented the optical surface positional information; Therefore the distance between the gray scale extreme point is just represented the spacing on respective optical surface; And the change in optical path length of optical delay line 6 is strict controlled, and imaging depth direction scope can accurately be demarcated, so can obtain the respective optical surface and the actual range between the reference position that forms images through obtaining gray scale extreme point position in characteristic image.
Use the signal generator generated frequency to be 500Hz; Peak-to-peak value is the triangular signal driven sweep galvanometer 15 of 2V; Signal generator generates with triangular signal simultaneously has the door of fixed delay, EDM Generator of Adjustable Duty Ratio to trigger matrix signal; Be used for trigger data acquisition card 10 and carry out data acquisition, SF 5M/s.Set door in this embodiment and trigger the relative triangular signal delay 20% of matrix signal; Single axial scan 2048 points of sampling; System axial imaging scope 1.074mm (in the air), image resolution ratio is 800*406, the corresponding air middle distance of single pixel d is 2.645 μ m.
Be described further (referring to Fig. 1) in the face of measuring process down.
Step 00; At first make the sample arm scanning light beam through camera lens optical axis to be measured, concrete grammar is for opening light source, behind the coverage reference arm reflected light; Littlely move lens location to be measured, think that scanning light beam is through camera lens optical axis to be measured when the light intensity that detects when photodetector 8 is maximum.
The executive software control-signals generator produces triangular signal; Drive optical delay line 6 and begin to carry out light path scanning; Trigger pip trigger data acquisition card 10 beginning data acquisitions simultaneously; Electronic micro-displacement platform 19 is done traverse motion, and computing machine 11 carries out image reconstruction and shows, obtains the two-dimensional cross sectional tomographic map of first optical surface.
Along light incident direction optical fiber collimator 18 in sample position mobile example arm, displacement Δ z, the coherence chromatographic imaging reference position also moves thereupon, direction is identical, thereby can to sample more deep-seated put and carry out tomography.Optical fiber collimator 18 displacement Δ z can be read by high precision guide rail 17; Δ z is less than the system axial scope (in the air) that forms images; Observe in the image and whether comprise next optical surface; Continue moving fiber collimating apparatus 18 Δ z if not,, remember that simultaneously optical fiber collimator 18 moving totals are x if carry out next step
iI ∈ 1,2 ..., N-1}, N are the optical surface sum relevant with optical surface spacing to be measured, and N-1 adjacent optical surface spacing promptly arranged.
Step 30 is if obtained the characteristic image of the whole optical surfaces relevant with optical surface spacing to be measured, execution in step 40, otherwise execution in step 20.
Step 40 is carried out data processing to the characteristic image that has obtained, tries to achieve required optical surface distance values.
Step 40 comprises:
Step 41 is confirmed the optical surface center in characteristic image, remember that the pixel position of j optical surface in its characteristic image is z
j, j ∈ 1,2 ..., N}.
Along the picture depth direction, do gray-scale value projection statistics, the image size is 800*406 in this embodiment, at each depth location (totally 406 places), the summation of adding up all pixels (800) gray-scale value, the optical surface position is represented in the extreme point position.
Step 42 is calculated adjacent two optical surface distance values, and remembers that i adjacent optical surface spacing value is l
i, computing formula does
I ∈ 1,2 ..., N-1}, x
iBe corresponding coherence chromatographic imaging reference position amount of movement, n
iBe material refractive index at interval, d is the corresponding light path value of the single pixel of tomographic map.
Fig. 5 is the synoptic diagram of data processing.
Fig. 6 is the measurement result synoptic diagram to object lens, and object lens are totally 5 optical surfaces, and the characteristic image of each optical surface calculates 4 adjacent optical surface spacing values according to above-mentioned data processing method and is respectively: l shown in figure
1=6.021mm, l
2=4.066mm, l
3=10.750mm, l
4=5.929mm.
Step 43, the adjacent two optical surface distance values that obtain according to step 42 obtain required two optical surface distance values.
To the required optical surface spacing of object lens among Fig. 6 is that promptly spacing d, the object lens gross thickness of the 3rd optical surface and the 4th optical surface are the spacing L of the 1st optical surface and the 5th optical surface in the airspace.4 adjacent optical surface spacing values by having obtained in the step 42 can get: d=l
3=10.750mm, L=l
1+ l
2+ l
3+ l
4=26.766mm.
Those skilled in the art can also carry out various modifications to above content under the condition that does not break away from the definite the spirit and scope of the present invention of claims.Therefore scope of the present invention is not limited in above explanation, but confirm by the scope of claims.
Claims (10)
1. the OC contactless measurement of optical surface in the camera lens is characterized in that, comprising:
Step 10 is carried out optical coherent chromatographic imaging to first optical surface of camera lens to be measured;
Step 20 changes the coherence chromatographic imaging reference position, and the next optical surface of camera lens to be measured is carried out optical coherent chromatographic imaging;
Step 30 is if obtained the characteristic image of the whole optical surfaces relevant with the optical surface spacing to be measured of camera lens to be measured, execution in step 40, otherwise execution in step 20;
Step 40 is carried out data processing to the characteristic image that has obtained, tries to achieve required optical surface distance values.
2. the OC contactless measurement of optical surface is characterized in that in a kind of camera lens according to claim 1, also comprises step 00 before the step 10, makes the sample arm scanning light beam through camera lens optical axis to be measured; The said sample arm scanning light beam that makes is that behind the coverage reference arm reflected light, the light intensity that photodetector detects is maximum through the criterion of camera lens optical axis to be measured.
3. the OC contactless measurement of optical surface in a kind of camera lens according to claim 1 is characterized in that step 20 comprises:
Step 21 makes the coherence chromatographic imaging reference position move Δ z, obtains an optical coherence tomography image;
Step 22 is observed the characteristic image whether next optical surface is arranged in the optical coherence tomography image that obtains in the step 21, continues execution in step 21 if not, if execution in step 23;
Step 23 remembers that this coherence chromatographic imaging reference position moving total is x
i, i ∈ 1,2 ..., N-1}, N are the optical surface sum relevant with optical surface spacing to be measured, and N-1 adjacent optical surface spacing promptly arranged.
4. the OC contactless measurement of optical surface in a kind of camera lens according to claim 1 is characterized in that step 40 comprises:
Step 41 is confirmed the optical surface center in the characteristic image that has obtained, remember that the pixel position of j optical surface in its characteristic image is z
j, j ∈ 1,2 ..., N};
Step 42 is calculated adjacent two optical surface distance values, and remembers that i adjacent optical surface spacing value is l
i, computing formula does
I ∈ 1,2 ..., N-1}, x
iBe corresponding coherence chromatographic imaging reference position amount of movement, n
iBe material refractive index at interval, d is the corresponding light path value of the single pixel of tomographic map;
Step 43, the adjacent two optical surface distance values that obtain according to step 42 obtain required two optical surface distance values.
5. the OC contactless measurement of optical surface is characterized in that in a kind of camera lens according to claim 2, and said scanning light beam is thin parallel beam.
6. the OC contactless measurement of optical surface in a kind of camera lens according to claim 1; It is characterized in that; The method that changes the coherence chromatographic imaging reference position in the step 20 is an optical fiber collimator in optical fiber collimator or the mobile optical lag line in the mobile example arm, perhaps optical fiber collimator in optical fiber collimator and the optical delay line in the mobile example arm simultaneously.
7. the OC contactless measurement of optical surface is characterized in that in a kind of camera lens according to claim 1, and characteristic image described in the step 30 is the two-dimensional cross sectional tomographic map that optical coherent chromatographic imaging obtains.
8. the OC contactless measurement of optical surface is characterized in that in a kind of camera lens according to claim 3, and the z of Δ described in the step 21 is less than the coherence tomography system scope that axially forms images.
9. the OC contactless measurement of optical surface is characterized in that in a kind of camera lens according to claim 6, and it is to move to sample position along the light incident direction that said coherence chromatographic imaging reference position moves.
10. the OC non-contact measurement apparatus of optical surface in the camera lens is characterized in that this measurement mechanism comprises wideband light source (1); Fiber coupler (2), two Polarization Controllers (3,4), phase modulator (5); Optical delay line (6), sample scanister (7), photodetector (8); Low-noise preamplifier (9), data collecting card (10), computing machine (11);
This measurement mechanism adopts the Michelson interference structure of fiberize, and the light that sends from wideband light source (1) gets into reference arm and sample arm respectively after fiber coupler (2) beam split; Get into a road of reference arm and pass through Polarization Controller (3), phase modulator (5) and optical delay line (6) successively; Optical delay line (6) adopts the quick delayed sweep line of spectral domain; Optical delay line (6) is by optical fiber collimator (12), diffraction grating (13), fourier lense (14); Scanning galvanometer (15), catoptron (16) is formed; What get into sample arm leads up to another Polarization Controller (4) and sample scanister (7), and sample scanister (7) comprises optical fiber collimator (18), high precision guide rail (17), electronic micro-displacement platform (19) and testing sample (20); The two-way reflected light interferes when converging at fiber coupler (2), after interference signal is surveyed by photodetector (8), amplifies at low-noise preamplifier (9), filtering, inserts data collecting card (10) and computing machine (11) then.
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