CN104154869B - White light interference lens center thickness measuring system and method - Google Patents

White light interference lens center thickness measuring system and method Download PDF

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CN104154869B
CN104154869B CN201410390204.0A CN201410390204A CN104154869B CN 104154869 B CN104154869 B CN 104154869B CN 201410390204 A CN201410390204 A CN 201410390204A CN 104154869 B CN104154869 B CN 104154869B
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CN104154869A (en
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彭石军
苗二龙
王汝冬
高松涛
隋永新
杨怀江
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Beijing Guowang Optical Technology Co Ltd
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Changchun Institute of Optics Fine Mechanics and Physics of CAS
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Abstract

本发明公开了一种白光干涉透镜中心厚度测量系统及方法,属于光学精密测量技术领域。解决了现有透镜中心厚度测量装置测量精度低、测量动态范围小的技术问题。本发明的白光干涉透镜中心厚度测量系统,包括超连续谱光源、光电探测器、1:1光纤耦合器、测量臂、参考臂、第一光纤、第二光纤和数据处理单元;其中,测量臂包括第三光纤和调焦镜,参考臂包括第四光纤、自聚焦透镜、扫描角反射镜、平面反射镜、位移机构和测长干涉仪系统。该系统精度可以达到0.2μm(3σ),动态范围可以达到1.5m。

The invention discloses a system and method for measuring the central thickness of a white light interference lens, belonging to the technical field of optical precision measurement. The technical problems of low measuring precision and small measuring dynamic range of the existing lens center thickness measuring device are solved. The white light interference lens central thickness measuring system of the present invention comprises a supercontinuum light source, a photodetector, a 1:1 fiber coupler, a measuring arm, a reference arm, a first optical fiber, a second optical fiber, and a data processing unit; wherein, the measuring arm It includes a third optical fiber and a focusing mirror, and the reference arm includes a fourth optical fiber, a self-focusing lens, a scanning angle mirror, a plane mirror, a displacement mechanism and a length measuring interferometer system. The accuracy of the system can reach 0.2μm (3σ), and the dynamic range can reach 1.5m.

Description

白光干涉透镜中心厚度测量系统及方法System and method for measuring center thickness of white light interference lens

技术领域technical field

本发明涉及一种白光干涉透镜中心厚度测量系统及方法,属于光学精密测量技术领域。The invention relates to a system and method for measuring the central thickness of a white light interference lens, belonging to the technical field of optical precision measurement.

背景技术Background technique

在光学领域,透镜的三项基本参数是中心厚度、折射率和曲率半径,其中透镜中心厚度的加工精度将直接影响透镜的焦距、像差等综合性能,进而影响整个光学系统的性能。在光学系统的装调中,透镜的光轴偏角、径向偏移和轴向间隙需要根据透镜的中心厚度来进行精密的调整,因此透镜中心厚度的测量精度越高,装调难度及成本就越低。随着光刻机物镜、核聚变光学系统等超精密工程的出现,对包括透镜中心厚度在内的所有光学参数提出了更为严格的要求。无论是为了保证光学透镜加工满足设计公差要求,还是为了降低装调难度及成本,都需要有高精度的光学检测仪器对其参数进行逐项检测,进而消除其加工偏差。In the field of optics, the three basic parameters of a lens are central thickness, refractive index and radius of curvature. The processing accuracy of the central thickness of the lens will directly affect the overall performance of the lens such as focal length and aberration, and then affect the performance of the entire optical system. In the installation and adjustment of the optical system, the optical axis deflection angle, radial offset and axial clearance of the lens need to be precisely adjusted according to the center thickness of the lens. Therefore, the higher the measurement accuracy of the lens center thickness, the more difficult and expensive the installation and adjustment lower. With the emergence of ultra-precision engineering such as lithography objective lens and nuclear fusion optical system, more stringent requirements are put forward for all optical parameters including lens center thickness. Whether it is to ensure that the optical lens processing meets the design tolerance requirements, or to reduce the difficulty and cost of assembly and adjustment, it is necessary to have high-precision optical testing instruments to detect its parameters item by item, thereby eliminating its processing deviation.

目前,测量透镜厚度技术可以分为接触式和非接触式两种。At present, the technology of measuring lens thickness can be divided into contact type and non-contact type.

接触式测量,一般是用手持千分表或千分尺测量。测量时,透镜中心点位置的准确性将直接影响测量精度,因此检验员在测量时需要来回移动被测量透镜,寻找最高点(凸透镜)或最低点(凹透镜),因而测量速度慢,误差大,且测头的频繁移动容易划伤镜片表面。Contact measurement, usually with a hand-held dial gauge or micrometer. During measurement, the accuracy of the center point of the lens will directly affect the measurement accuracy, so the inspector needs to move the measured lens back and forth during measurement to find the highest point (convex lens) or the lowest point (concave lens), so the measurement speed is slow and the error is large. And the frequent movement of the measuring head is easy to scratch the surface of the lens.

非接触测量法有图像法、共面容法、白光共焦法和干涉法等。图像法透镜中心厚度测量受摄像机成像系统、CCD分辨力、图像清晰度和标定系数精确度的影响,测量误差在15μm以内。共面电容法是相对测量,为了取得可靠数据作为检测的依据,则需要共面电容测头对被测透镜的材料进行精确测试,测量过程复杂,不利于用在透镜中心厚度测量上,测量误差约5μm。白光共焦法利用白光通过透镜后轴向色差形成的探针对被测透镜表面顶点进行定位,然后通过被测透镜上下表面顶点反射的光谱信息计算透镜的厚度。但该方法定焦灵敏度和分辨力较低,且工作距离有限(30μm-25mm)。Non-contact measurement methods include image method, co-planar method, white light confocal method and interferometry. The lens center thickness measurement by image method is affected by the camera imaging system, CCD resolution, image clarity and calibration coefficient accuracy, and the measurement error is within 15 μm. The coplanar capacitance method is a relative measurement. In order to obtain reliable data as the basis for detection, a coplanar capacitance probe is required to accurately test the material of the tested lens. The measurement process is complicated, which is not conducive to the measurement of the thickness of the lens center, and the measurement error about 5 μm. The white light confocal method uses the probe formed by the axial chromatic aberration after the white light passes through the lens to locate the apex of the surface of the tested lens, and then calculates the thickness of the lens through the spectral information reflected by the apex of the upper and lower surfaces of the tested lens. However, this method has low focus sensitivity and resolution, and the working distance is limited (30μm-25mm).

干涉法透镜中心厚度测量装置主要有以下两种:第一种为一种光学元件厚度的光学测量仪器(CN87200715),该仪器包含两个迈克尔逊干涉系统,根据白光干涉条纹对被测透镜的两个表面进行定位,然后将被测透镜与标准块进行比较以求得被测透镜的中心厚度。但是,该测量装置结构复杂,测量过程需更换元件,测量精度不仅取决于多个表面的定位精度,还依赖于标准块已知厚度的精度。第二种是法国Fogale Nanotech公司推出的LenScan系列产品,采用短相干光源搭建迈克尔逊干涉仪,利用扫描参考镜的精确移动,找寻不同白光干涉条纹,实现不同镜面位置的精确定位。LenScan系列产品的最大测量动态范围是600mm(光学厚度),宽带光源的中心波长约为1310nm,带宽为30nm,相干长度为25μm,空气间隔测量精度达到0.3μm(3σ),而且在实际测量中,受测量环境、扫描镜的稳定性、光强的抖动等影响,透镜中心厚度测量精度约2μm(3σ)。There are two main types of interferometric lens center thickness measuring devices: the first is an optical measuring instrument for the thickness of an optical element (CN87200715), which includes two Michelson interferometric systems. The surface is positioned, and then the lens under test is compared with the standard block to obtain the center thickness of the lens under test. However, the structure of the measuring device is complex, and components need to be replaced during the measurement process. The measurement accuracy not only depends on the positioning accuracy of multiple surfaces, but also depends on the accuracy of the known thickness of the standard block. The second is the LenScan series products launched by Fogale Nanotech in France, which use a short coherent light source to build a Michelson interferometer, and use the precise movement of the scanning reference mirror to find different white light interference fringes and achieve precise positioning of different mirror positions. The maximum measurement dynamic range of the LenScan series products is 600mm (optical thickness), the central wavelength of the broadband light source is about 1310nm, the bandwidth is 30nm, the coherence length is 25μm, and the air gap measurement accuracy reaches 0.3μm (3σ), and in the actual measurement, Affected by the measurement environment, the stability of the scanning mirror, and the jitter of the light intensity, the measurement accuracy of the lens center thickness is about 2 μm (3σ).

在光刻机物镜系统的光学复算和系统装调中,对透镜中心厚度和间隔测量的精度要求达0.5μm(3σ),测量动态范围期望在1.0m以上。现有技术中的透镜中心厚度测量装置无法满足该要求。In the optical recalculation and system adjustment of the objective lens system of the lithography machine, the accuracy of the lens center thickness and spacing measurement is required to reach 0.5μm (3σ), and the measurement dynamic range is expected to be above 1.0m. The lens center thickness measuring device in the prior art cannot meet this requirement.

发明内容Contents of the invention

本发明的目的是为了解决现有透镜中心厚度测量装置测量精度低、测量动态范围小的技术问题,提供一种白光干涉透镜中心厚度测量系统及方法。The object of the present invention is to provide a white light interference lens center thickness measurement system and method to solve the technical problems of low measurement accuracy and small measurement dynamic range of the existing lens center thickness measurement device.

本发明解决上述技术问题所采用的技术方案如下:The technical solution adopted by the present invention to solve the problems of the technologies described above is as follows:

白光干涉透镜中心厚度测量系统,包括超连续谱光源、光电探测器、1:1光纤耦合器、测量臂、参考臂、第一光纤、第二光纤和数据处理单元;White light interference lens center thickness measurement system, including supercontinuum light source, photodetector, 1:1 fiber coupler, measuring arm, reference arm, first optical fiber, second optical fiber and data processing unit;

所述测量臂包括第三光纤和调焦镜;The measuring arm includes a third optical fiber and a focusing mirror;

所述参考臂包括第四光纤、自聚焦透镜、扫描角反射镜、平面反射镜、位移机构和测长干涉仪系统;The reference arm includes a fourth optical fiber, a self-focusing lens, a scanning angle mirror, a plane mirror, a displacement mechanism and a length measuring interferometer system;

所述调焦镜和被测透镜同光轴;The focusing mirror and the measured lens are on the same optical axis;

所述位移机构包括位移导轨和可以在位移导轨上作扫描运动的移动支架,所述扫描角反射镜固定在移动支架的一侧,所述测长干涉仪系统的测量角反射镜固定移动支架的另一侧,扫描角反射镜的光轴与测长干涉仪系统的光轴平行,移动支架沿扫描角反射镜的光轴方向运动,测长干涉仪系统测量移动支架的位移量,并将位移量传输至数据处理单元;The displacement mechanism includes a displacement guide rail and a mobile bracket that can perform scanning motion on the displacement guide rail. The scanning angle mirror is fixed on one side of the mobile bracket, and the measurement angle mirror of the length measuring interferometer system is fixed on the side of the mobile bracket. On the other side, the optical axis of the scanning corner reflector is parallel to the optical axis of the length-measuring interferometer system, the moving bracket moves along the optical axis direction of the scanning corner reflecting mirror, the length-measuring interferometer system measures the displacement of the moving bracket, and the displacement The data is transmitted to the data processing unit;

所述超连续谱光源发射的白光经第一光纤传输至1:1光纤耦合器,分成两束,一束经第三光纤入射调焦镜,然后经调焦镜入射被测透镜,再经被测透镜的前后表面依次反射后,沿原路返回1:1光纤耦合器;另一束经第四光纤入射自聚焦透镜,然后经自聚焦透镜入射扫描角反射镜,再经扫描角反射镜反射至平面反射镜,又经平面反射镜反射后沿原路返回1:1光纤耦合器,测量臂的出射光和参考臂的出射光经1:1光纤耦合器耦合进入第二光纤并产生干涉光信号,光电探测器接收来自第二光纤的干涉光信号,并将干涉光信号转换成电信号后传输至数据处理单元,数据处理单元对干涉光信号进行处理,结合测长干涉仪系统测量的移动支架的位移量,得到极大干涉光信号中心位置对应的移动支架的位移量,并根据该位移量计算被测透镜的中心厚度;The white light emitted by the supercontinuum light source is transmitted to the 1:1 fiber coupler through the first optical fiber, and is divided into two beams. One beam enters the focusing mirror through the third optical fiber, and then enters the lens under test through the focusing mirror, and then passes through the After being reflected by the front and rear surfaces of the measurement lens in turn, it returns to the 1:1 fiber coupler along the original path; the other beam enters the self-focusing lens through the fourth optical fiber, and then enters the scanning angle mirror through the self-focusing lens, and then reflects through the scanning angle mirror to the plane reflector, and then return to the 1:1 fiber coupler along the original path after being reflected by the plane reflector, the outgoing light of the measurement arm and the reference arm are coupled into the second optical fiber through the 1:1 fiber coupler and generate interference light signal, the photodetector receives the interference light signal from the second optical fiber, converts the interference light signal into an electrical signal, and transmits it to the data processing unit. The data processing unit processes the interference light signal, and combines the movement measured by the length measuring interferometer The displacement of the bracket, the displacement of the mobile bracket corresponding to the center position of the maximum interference light signal is obtained, and the center thickness of the measured lens is calculated according to the displacement;

所述自聚焦透镜入射扫描角反射镜的光路和扫描角反射镜入射平面反射镜的光路平行。The light path of the self-focusing lens incident on the scanning corner reflector is parallel to the light path of the incident plane reflector of the scanning corner reflector.

进一步的,所述超连续谱光源的波长范围是470-1700nm。Further, the wavelength range of the supercontinuum light source is 470-1700nm.

进一步的,所述第三光纤长度与第四光纤长度相等。Further, the length of the third optical fiber is equal to the length of the fourth optical fiber.

进一步的,所述调焦镜为连续调焦系统。Further, the focusing mirror is a continuous focusing system.

进一步的,所述测量系统还包括,运行数据处理单元的主控计算机,所述主控计算机分别与光电探测器和测长干涉仪系统连接。Further, the measurement system further includes a main control computer running a data processing unit, and the main control computer is respectively connected with the photodetector and the length measuring interferometer system.

进一步的,所述测量系统还包括,控制移动支架运动的机电控制系统。Further, the measurement system also includes an electromechanical control system for controlling the movement of the mobile support.

进一步的,所述测量系统还包括,固定被测透镜并调整被测透镜光轴的调整架。Further, the measurement system further includes an adjustment mount for fixing the measured lens and adjusting the optical axis of the measured lens.

进一步的,所述测量系统还包括对测量环境的温度、湿度和气压进行控制的环境控制系统。Further, the measurement system also includes an environment control system for controlling the temperature, humidity and air pressure of the measurement environment.

进一步的,所述极大白光干涉信号的中心位置通过重心算法判断。Further, the center position of the maximum white light interference signal is judged by a center of gravity algorithm.

上述白光干涉透镜中心厚度测量系统检测透镜中心厚度方法,包括以下步骤:The method for detecting the center thickness of the lens by the white light interference lens center thickness measuring system includes the following steps:

步骤一、数据处理单元根据输入的相关参数计算在温度T1、压强P1和测长干涉以系统的激光头波长λ1下的空气折射率n1,在温度T1、压强P1和超连续谱光源波长λ2下的空气群折射率n2,及在温度T2、压强P2和超连续谱光源波长λ2下被测透镜的群折射率n3Step 1. The data processing unit calculates the air refractive index n 1 at the temperature T 1 , the pressure P 1 and the wavelength λ 1 of the laser head of the length measuring interference system according to the input related parameters, and at the temperature T 1 , pressure P 1 and super The air group refractive index n 2 at the wavelength λ 2 of the continuum light source, and the group refractive index n 3 of the measured lens at the temperature T 2 , the pressure P 2 and the wavelength λ 2 of the supercontinuum light source;

步骤二、调节被测透镜和调焦镜同光轴,使被测透镜前后表面的反射光均能通过调焦镜返回1:1光纤耦合器;Step 2. Adjust the optical axis of the tested lens and the focusing mirror so that the reflected light from the front and rear surfaces of the tested lens can return to the 1:1 fiber coupler through the focusing mirror;

步骤三、控制移动支架沿扫描角反射镜光轴方向做扫描运动,数据处理单元对光电探测器获取的干涉光信号进行处理,得到极大干涉光信号中心位置对应的移动支架的位移量Z1和Z2Step 3: Control the mobile support to perform scanning motion along the optical axis of the scanning angle mirror, and the data processing unit processes the interference light signal obtained by the photodetector to obtain the displacement Z of the mobile support corresponding to the center position of the maximum interference light signal and Z2 ;

步骤四、数据处理单元根据以下公式:Step 4, the data processing unit according to the following formula:

计算得到被测透镜的中心厚度D。Calculate the central thickness D of the tested lens.

进一步的,所述数据处理单元运用色散公式以及艾德伦(Edlén)公式计算n1、n2及n3Further, the data processing unit uses dispersion formula and Edlén formula to calculate n 1 , n 2 and n 3 .

与现有技术相比,本发明的有益效果:Compared with prior art, the beneficial effect of the present invention:

(1)本发明的白光干涉透镜中心厚度测量系统中的光源为超连续谱光源,波长范围是470-1700nm,带宽为1230nm,使光源的相干长度更短,对零光程差更敏感,干涉条纹的中心位置判读更精确,使透镜中心厚度测量的理论精度可达0.2μm(3σ);(1) The light source in the white light interference lens center thickness measurement system of the present invention is a supercontinuum light source, the wavelength range is 470-1700nm, and the bandwidth is 1230nm, so that the coherence length of the light source is shorter, and it is more sensitive to zero optical path difference. Interpretation of the central position of the fringes is more accurate, so that the theoretical accuracy of lens center thickness measurement can reach 0.2μm (3σ);

(2)本发明的白光干涉透镜中心厚度测量系统在测量臂中增加了调焦镜,通过调焦对不同位置处的被测透镜的返回光的强度进行调节,提高了信噪比,能同时对多个镜片进行精确定位和测量;(2) The white light interference lens central thickness measuring system of the present invention has increased focusing lens in measuring arm, by focusing, the intensity of the return light of the measured lens at different positions is adjusted, improved signal-to-noise ratio, can simultaneously Precise positioning and measurement of multiple lenses;

(3)本发明的白光干涉透镜中心厚度测量系统在参考臂中引入了扫描角反射镜,构成折叠光路,不仅使测量的动态范围到达1.5m,而且扫描角反射镜在移动过程中不改变入射光和反射光的方向,提高了系统的抗振动能力。(3) The white light interference lens central thickness measurement system of the present invention introduces a scanning angle reflector in the reference arm to form a folded optical path, which not only makes the dynamic range of measurement reach 1.5m, but also does not change the incident angle during the movement of the scanning angle reflector. The direction of light and reflected light improves the vibration resistance of the system.

附图说明Description of drawings

图1为本发明白光干涉透镜中心厚度测量系统的结构示意图;Fig. 1 is a schematic structural view of a white light interference lens central thickness measurement system of the present invention;

图2为本发明超连续谱光源的光谱图;Fig. 2 is the spectrogram of supercontinuum light source of the present invention;

图中,1、超连续谱光源,2、光电探测器,3、1:1光纤耦合器,4、测量臂,5、参考臂,6、第一光纤,7、第二光纤,8、第三光纤,9、第四光纤,10、调焦镜,11、被测透镜,12、自聚焦透镜,13、扫描角反射镜,14、平面反射镜,15、位移机构,151、移动支架,152、位移导轨,16、测长干涉仪系统,161、测量角反射镜,162、激光头,17、主控计算机,18、机电控制系统,19、调整架。In the figure, 1. Supercontinuum light source, 2. Photodetector, 3. 1:1 fiber coupler, 4. Measuring arm, 5. Reference arm, 6. First optical fiber, 7. Second optical fiber, 8. The first Three optical fibers, 9, fourth optical fiber, 10, focusing mirror, 11, measured lens, 12, self-focusing lens, 13, scanning angle reflector, 14, plane reflector, 15, displacement mechanism, 151, mobile bracket, 152. Displacement guide rail, 16. Length measuring interferometer system, 161. Measuring angle reflector, 162. Laser head, 17. Main control computer, 18. Electromechanical control system, 19. Adjusting frame.

具体实施方式detailed description

以下结合附图进一步说明本发明。Further illustrate the present invention below in conjunction with accompanying drawing.

如图1所述,本发明的白光干涉透镜中心厚度测量系统包括:超连续谱光源1、光电探测器2、1:1光纤耦合器3、测量臂4、参考臂5、第一光纤6、第二光纤7和数据处理单元,其中,测量臂4包括第三光纤8和调焦镜10,参考臂5包括第四光纤9、自聚焦透镜12、扫描角反射镜13、平面反射镜14、位移机构15和测长干涉仪系统16。As shown in Figure 1, the white light interference lens center thickness measuring system of the present invention comprises: a supercontinuum light source 1, a photodetector 2, a 1:1 fiber coupler 3, a measuring arm 4, a reference arm 5, a first optical fiber 6, Second optical fiber 7 and data processing unit, wherein, measuring arm 4 comprises the 3rd optical fiber 8 and focusing mirror 10, and reference arm 5 comprises the 4th optical fiber 9, self-focusing lens 12, scanning angle reflector 13, plane reflector 14, Displacement mechanism 15 and length measuring interferometer system 16.

超连续谱光源1通过第一光纤6与1:1光纤耦合器3连接;光电探测器2通过第二光纤7与1:1光纤耦合器3连接;第三光纤8的一端与1:1光纤耦合器3连接,另一端对准调焦镜10且与调焦镜10同光轴;第四光纤9的一端与1:1光纤耦合器3连接,另一端对准自聚焦透镜12且与自聚焦透镜12同光轴;第三光纤8与第四光纤9在误差允许范围内长度相等,可以避免因热膨胀不同等引起的光程误差,提高检测精确度;位移机构15包括移动支架151和位移导轨152,移动支架151的底端设置在位移导轨152上,移动支架151可以沿扫描角反射镜13的光轴方向在位移导轨152上做扫描运动;扫描角反射镜13固定在移动支架151的一侧;测长干涉仪系统16为现有技术,主要包括沿同一光轴设置的测量角反射镜161和激光头162,测量角反射镜161固定在移动支架151的另一侧,且测长干涉仪系统16的光轴与扫描角反射镜13的光轴平行,测长干涉仪系统16测量移动支架151的位移量,并将位移量实时传输至数据处理单元,由于扫描角反射镜13也固定在移动支架151上,且扫描角反射镜13与测长干涉仪系统16光轴平行,移动支架151又沿扫描角反射镜13的光轴方向移动,所以该位移量也为扫描角反射镜13的位移量;The supercontinuum light source 1 is connected with the 1:1 fiber coupler 3 through the first optical fiber 6; the photodetector 2 is connected with the 1:1 fiber coupler 3 through the second optical fiber 7; one end of the third optical fiber 8 is connected with the 1:1 optical fiber The coupler 3 is connected, and the other end is aimed at the focusing lens 10 and is coaxial with the focusing lens 10; one end of the fourth optical fiber 9 is connected with the 1:1 fiber coupler 3, and the other end is aimed at the self-focusing lens 12 and is connected with the self-focusing lens 12. The focusing lens 12 is on the same optical axis; the third optical fiber 8 and the fourth optical fiber 9 are equal in length within the error tolerance range, which can avoid the optical path error caused by thermal expansion difference and improve the detection accuracy; the displacement mechanism 15 includes a mobile bracket 151 and a displacement Guide rail 152, the bottom end of movable support 151 is arranged on displacement guide rail 152, and movable support 151 can do scanning motion on displacement guide rail 152 along the optical axis direction of scanning angle reflector 13; One side; length measuring interferometer system 16 is prior art, mainly comprises measuring angle reflector 161 and laser head 162 that are arranged along the same optical axis, and measuring angle reflector 161 is fixed on the other side of movable bracket 151, and length measuring The optical axis of the interferometer system 16 is parallel to the optical axis of the scanning angle reflector 13, and the length-measuring interferometer system 16 measures the displacement of the movable support 151, and transmits the displacement to the data processing unit in real time, because the scanning angle reflector 13 is also Fixed on the movable support 151, and the scanning angle reflector 13 is parallel to the optical axis of the length measuring interferometer system 16, the movable support 151 moves along the optical axis direction of the scanning angle reflector 13, so the displacement is also the scanning angle reflector 13 displacements;

超连续谱光源1出射的光经第一光纤6传输至1:1光纤耦合器3,1:1光纤耦合器3将光分成两束,一束进入测量臂4,另一束进入参考臂5中;进入测量臂的光束,先经第三光纤8入射调焦镜10,然后经调焦镜10调焦后,会聚在与调焦镜10同光轴的被测透镜11上,再经被测透镜11的前后表面依次反射后,沿原路返回1:1光纤耦合器;进入参考臂5的光束,先经第四光纤9入射自聚焦透镜12,然后经自聚焦透镜12入射扫描角反射镜13,再经扫描角反射镜13反射至平面反射镜14,经平面反射镜14反射后,沿原路返回1:1光纤耦合器3,其中从自聚焦透镜12入射扫描角反射镜13的光与扫描角反射镜13反射至平面反射镜14的光平行;然后参考臂5的出射光和测量臂4的出射光经1:1光纤耦合器3进入第二光纤7中,并相互干涉,产生干涉光信号,干涉光信号经第二光纤7传输至光电探测器2,光电探测器2将干涉光信号转换成电信号后,传输至数据处理单元,数据处理单元利用重心算法对干涉光信号进行处理,结合测长干涉仪系统16测量的移动支架151的位移量,得到白光干涉信号极大值中心位置对应的移动支架151的位移量(即:扫描角反射镜13的位移量)Z1和Z2,然后根据该位移量及折射率关系计算被测透镜11的中心厚度。The light emitted by the supercontinuum light source 1 is transmitted to the 1:1 fiber coupler 3 through the first optical fiber 6, and the 1:1 fiber coupler 3 divides the light into two beams, one beam enters the measurement arm 4, and the other beam enters the reference arm 5 Middle; the light beam entering the measuring arm first enters the focusing mirror 10 through the third optical fiber 8, then after being focused by the focusing mirror 10, it converges on the measured lens 11 on the same optical axis as the focusing mirror 10, and then passes through the After the front and rear surfaces of the measurement lens 11 reflect sequentially, they return to the 1:1 fiber coupler along the original path; the light beam entering the reference arm 5 first enters the self-focusing lens 12 through the fourth optical fiber 9, and then the incident scanning angle reflection through the self-focusing lens 12 Mirror 13 is reflected to plane reflector 14 through scanning angle reflector 13 again, and after plane reflector 14 is reflected, returns 1:1 optical fiber coupler 3 along the original path, wherein from self-focusing lens 12 incident scanning angle reflector 13 The light is parallel to the light reflected by the scanning corner reflector 13 to the plane reflector 14; then the outgoing light of the reference arm 5 and the outgoing light of the measuring arm 4 enter the second optical fiber 7 through the 1:1 fiber coupler 3 and interfere with each other. Interfering optical signals are generated, and the interfering optical signals are transmitted to the photodetector 2 through the second optical fiber 7. After the photoelectric detectors 2 convert the interfering optical signals into electrical signals, they are transmitted to the data processing unit. The data processing unit uses the center of gravity algorithm to analyze the interfering optical signals Processing, combined with the displacement of the moving bracket 151 measured by the length measuring interferometer system 16, the displacement of the moving bracket 151 corresponding to the center position of the maximum value of the white light interference signal (ie: the displacement of the scanning angle mirror 13) Z1 and Z2, and then calculate the central thickness of the measured lens 11 according to the displacement amount and the relationship between the refractive index.

本发明的原理是:扫描角反射镜13在移动支架151的带动下做扫描运动,当扫描角反射镜13移动到某一位置时,使测量臂光路与参考臂光路的光程差为零,出现第一个极大白光干涉信号被光电探测器2接收并在显示屏上显示,利用重心算法和测长干涉仪系统16记录的位移量,得到与第一个极大白光干涉信号中心位置对应的扫描角反射镜13的位移Z1;继续移动扫描角反射镜13,直到出现第二个极大白光干涉信号,利用同样的方法得到与第二个极大白光干涉信号中心位置对应的扫描角反射镜13的位移为Z2The principle of the present invention is: the scanning angle reflector 13 is driven by the movable bracket 151 to scan, and when the scanning angle reflector 13 moves to a certain position, the optical path difference between the measuring arm optical path and the reference arm optical path is zero, When the first maximum white light interference signal appears, it is received by the photodetector 2 and displayed on the display screen. Using the center of gravity algorithm and the displacement recorded by the length measuring interferometer system 16, the center position corresponding to the first maximum white light interference signal is obtained. The displacement Z 1 of the scanning angle reflector 13; continue to move the scanning angle reflector 13 until the second maximum white light interference signal appears, and use the same method to obtain the scanning angle corresponding to the center position of the second maximum white light interference signal The displacement of mirror 13 is Z 2 .

本实施方式中,数据处理单元还能够计算在温度T1、压强P1和激光头波长为λ1下的空气折射率n1,在温度T1、压强P1和超连续谱光源波长为λ2下的空气群折射率n2,在温度T2、压强P2和超连续谱光源波长为λ2下被测透镜11的群折射率n3,中心厚度的计算公式可以为:In this embodiment, the data processing unit can also calculate the air refractive index n 1 at temperature T 1 , pressure P 1 and laser head wavelength λ 1 , and at temperature T 1 , pressure P 1 and supercontinuum light source wavelength λ The air group refractive index n 2 at 2 , the group refractive index n 3 of the measured lens 11 under the temperature T 2 , pressure P 2 and supercontinuum light source wavelength λ 2 , the formula for calculating the central thickness can be:

本实施方式中,测量系统还可以包括能够运行数据处理单元的主控计算机,主控计算机分别与光电探测器2和测长干涉仪系统16连接。In this embodiment, the measurement system may further include a main control computer capable of running a data processing unit, and the main control computer is connected to the photodetector 2 and the length measuring interferometer system 16 respectively.

本实施方式中,测量系统还可以包括与位移机构15连接,并控制移动支架151作扫描运动的机电控制系统18,机电控制系统18可以与主控计算机17连接,并由主控计算机17控制。In this embodiment, the measurement system may also include an electromechanical control system 18 connected to the displacement mechanism 15 and controlling the moving bracket 151 to perform scanning motion. The electromechanical control system 18 may be connected to the main control computer 17 and controlled by the main control computer 17.

本实施方式中,测量系统还可以包括固定被测透镜11并调整被测透镜11光轴的调整架19,被测透镜11被调整架19夹持,通过调节调整架19的倾斜和平移,使被测透镜11与调焦镜10共光轴,降低因光轴偏移引入的测量误差。In this embodiment, the measurement system may also include an adjustment mount 19 that fixes the measured lens 11 and adjusts the optical axis of the measured lens 11. The measured lens 11 is clamped by the adjustment mount 19. By adjusting the inclination and translation of the adjustment mount 19, the The lens under test 11 has the same optical axis as the focusing mirror 10, which reduces the measurement error caused by the offset of the optical axis.

本实施方式中,测量系统还可以包括环境控制系统,环境控制系统放置于白光干涉透镜中心厚度测量系统所处测量环境中,对测量环境的温度、湿度和气压进行精密控制。In this embodiment, the measurement system may also include an environment control system, which is placed in the measurement environment where the white light interference lens center thickness measurement system is located, and precisely controls the temperature, humidity and air pressure of the measurement environment.

本实施方式中,超连续谱光源1为现有技术,包括泵浦激光器、聚焦透镜、光子晶体光纤、光纤连接器和保偏光纤。激光器发出的光经聚焦透镜会聚到光子晶体光纤一侧的端面,端面切口要求平滑,且与光轴垂直,光进入光子晶体光纤后,由于光子晶体光纤的高非线性,产生超连续谱白光,光子晶体光纤的另一端通过光纤连接器与保偏光纤连接,将超连续谱白光输出。本实施方式中,泵浦激光器的中心波长为1060nm,光子晶体光纤长约20.0m,纤芯直径5.0μm,空气孔直径2.2μm,孔间距3.4μm,包层直径125.0μm。图2为超连续谱光源1的光谱图,从图上可以看出,光子晶体光纤产生的白光光谱非常宽,带宽δλ为1230nm,中心波长λc约为1085nm,利用公式(2)计算得到的相干长度Δl为0.42μm;In this embodiment, the supercontinuum light source 1 is an existing technology, including a pump laser, a focusing lens, a photonic crystal fiber, a fiber connector and a polarization-maintaining fiber. The light emitted by the laser is converged to the end face of one side of the photonic crystal fiber through the focusing lens. The cut of the end face is required to be smooth and perpendicular to the optical axis. After the light enters the photonic crystal fiber, due to the high nonlinearity of the photonic crystal fiber, supercontinuum white light is generated. The other end of the photonic crystal fiber is connected to the polarization-maintaining fiber through a fiber connector to output supercontinuum white light. In this embodiment, the central wavelength of the pump laser is 1060 nm, the photonic crystal fiber is about 20.0 m long, the core diameter is 5.0 μm, the air hole diameter is 2.2 μm, the hole spacing is 3.4 μm, and the cladding diameter is 125.0 μm. Figure 2 is the spectrum diagram of the supercontinuum light source 1. It can be seen from the figure that the white light spectrum generated by the photonic crystal fiber is very wide, the bandwidth δλ is 1230nm, and the central wavelength λc is about 1085nm. The coherence calculated by formula (2) The length Δl is 0.42 μm;

如图2所示,光子晶体光纤产生的白光光谱除1060nm附近受泵浦激光器注入光的影响起伏较大,在整个输出光谱范围内功率谱较平坦,能够满足高精度透镜中心厚度测量对白光光源的要求。超连续谱光源1使光源的相干长度更短,对零光程差更敏感,干涉条纹的重心位置判读更精确,使被测透镜11中心厚度测量的理论精度可达0.2μm(3σ)。As shown in Figure 2, the white light spectrum generated by the photonic crystal fiber is affected by the injection light of the pump laser except around 1060nm. requirements. The supercontinuum light source 1 shortens the coherence length of the light source, is more sensitive to zero optical path difference, and interprets the position of the center of gravity of the interference fringes more accurately, so that the theoretical accuracy of the center thickness measurement of the tested lens 11 can reach 0.2 μm (3σ).

本实施方式中,自聚焦透镜12距离扫描角反射镜13的垂直距离最远可达0.75m,平面反射镜14距离扫描角反射镜13的垂直距离最远可达0.75m,即通过扫描角反射镜13形成折叠光路,使测量的动态范围达到1.50m,且扫描角反射镜13的移动不改变参考光的传播方向,增强了抗振动能力。In this embodiment, the vertical distance from the self-focusing lens 12 to the scanning corner mirror 13 can reach up to 0.75m, and the vertical distance from the plane mirror 14 to the scanning corner mirror 13 can reach up to 0.75m. The mirror 13 forms a folded optical path, so that the dynamic range of the measurement reaches 1.50m, and the movement of the scanning corner mirror 13 does not change the propagation direction of the reference light, which enhances the anti-vibration capability.

本实施方式中,调焦镜10优选为连续调焦系统,调焦镜10的调焦范围是5m-15m,可将第三光纤8出射的光会聚到被测透镜11的不同位置,对被测透镜11反射的光的强度进行调制,提高信噪比,同时对多个镜片进行精确定位和测量。In this embodiment, the focusing mirror 10 is preferably a continuous focusing system, and the focusing range of the focusing mirror 10 is 5m-15m, which can converge the light emitted by the third optical fiber 8 to different positions of the tested lens 11, and the The intensity of the light reflected by the measuring lens 11 is modulated, the signal-to-noise ratio is improved, and multiple lenses are precisely positioned and measured at the same time.

本发明的白光干涉中心厚度测量系统检测透镜中心厚度方法,包括以下步骤:The white light interference center thickness measurement system of the present invention detects the lens center thickness method, comprising the following steps:

步骤一、启动数据处理单元,输入相关参数,相关参数包括:参考臂光路的温度T1和参考臂光路的压强P1;测量臂光路的温度T2和测量臂光路的压强P2;激光头162的波长λ1;超连续谱光源1的波长λ2;被测透镜11在固定波长下的折射率(商购或已成型的透镜,会给出确定的在某一波长下的折射率)及色散系数;Step 1, start the data processing unit, input relevant parameters, relevant parameters include: the temperature T 1 of the optical path of the reference arm and the pressure P 1 of the optical path of the reference arm; the temperature T 2 of the optical path of the measuring arm and the pressure P 2 of the optical path of the measuring arm; the laser head The wavelength λ 1 of 162; the wavelength λ 2 of the supercontinuum light source 1; the refractive index of the measured lens 11 at a fixed wavelength (commercially purchased or molded lenses will give a certain refractive index at a certain wavelength) and dispersion coefficient;

利用色散公式: Using the dispersion formula:

以及艾德伦(Edlén)公式:and Edlén's formula:

式(3)-(5)中ng代表群折射率;n表示空气实时折射率;表示色散系数,色散系数会根据温度压强变化不同数值;λ为真空中的波长,单位是μm,ns为标准状态下空气折射率,t,p为测量环境的温度和压强,对应单位分别为℃,torr;In the formula (3)-(5), n g represents the group refractive index; n represents the real-time refractive index of air; Indicates the dispersion coefficient, and the dispersion coefficient will change different values according to the temperature and pressure; λ is the wavelength in vacuum, the unit is μm, n s is the refractive index of air in the standard state, t, p are the temperature and pressure of the measurement environment, and the corresponding units are °C, torr;

计算得到在温度T1、压强P1和激光头162波长λ1下的空气折射率n1(将λ1代入(4)式中先得到ns,然后将ns代入(5)式中得到n1),在温度T1、压强P1和超连续谱光源1波长λ2下的空气群折射率n2(将计算得到的n1代入(3)式中,(3)式中此时波长λ为λ2,得到n2),在温度T2、压强P2和超连续谱光源1波长λ2下被测透镜11的群折射率n3(将被测透镜11在某一波长下的折射率代入(3)式中,(3)式中此时波长λ为λ2,计算得到n3),上述计算过程均为现有技术;Calculate the air refractive index n 1 at temperature T 1 , pressure P 1 and laser head 162 wavelength λ 1 (substitute λ 1 into (4) formula to get n s first, then substitute n s into (5) formula to get n 1 ), the air group refractive index n 2 at temperature T 1 , pressure P 1 and supercontinuum light source 1 wavelength λ 2 (substituting the calculated n 1 into (3) formula, in (3) formula at this time wavelength λ is λ 2 , and n 2 is obtained), and the group refractive index n 3 of the measured lens 11 at temperature T 2 , pressure P 2 and supercontinuum light source 1 wavelength λ 2 (the measured lens 11 is measured at a certain wavelength The refractive index of (3) is substituted into (3) formula, and wavelength λ is λ 2 in (3) formula at this moment, calculate and obtain n 3 ), above-mentioned calculation process is prior art;

一般采用主控计算机17运行数据处理单元;Generally, the main control computer 17 is used to run the data processing unit;

步骤二、调节被测透镜11和调焦镜10同光轴,使被测透镜11前后表面的反射光均能通过调焦镜10返回1:1光纤耦合器3;Step 2, adjust the optical axis of the measured lens 11 and the focusing mirror 10, so that the reflected light on the front and rear surfaces of the measured lens 11 can return to the 1:1 fiber coupler 3 through the focusing mirror 10;

一般采用调整架19夹持被测透镜11,通过调节调整架19的倾斜和平移,使被测透镜11与调焦镜10共光轴,降低因光轴偏移引入的测量误差;Generally, the lens under test 11 is clamped by the adjustment frame 19. By adjusting the tilt and translation of the adjustment frame 19, the lens under test 11 and the focusing mirror 10 have the same optical axis, reducing the measurement error caused by the offset of the optical axis;

步骤三、控制移动支架151沿扫描角反射镜13光轴方向做扫描运动(移动支架151移动,带动扫描角反射镜13和测量角反射镜161移动),数据处理单元利用重心算法对干涉光信号进行处理,结合测长干涉仪系统16测量的位移量,得到极大干涉光信号中心位置对应的移动支架151(扫描角反射镜13)的位移量Z1和Z2(数据处理单元利用接收到的极大干涉光信号确定参考臂光路与被测透镜11前后表面返回的测量臂光路的光程差为零),然后根据公式:Step 3, control the mobile bracket 151 to perform scanning motion along the direction of the optical axis of the scanning corner mirror 13 (the moving bracket 151 moves to drive the scanning corner mirror 13 and the measuring corner mirror 161 to move), and the data processing unit utilizes the center of gravity algorithm to analyze the interference light signal Processing, combined with the displacement measured by the length-measuring interferometer system 16, the displacements Z1 and Z2 of the mobile support 151 (scanning angle mirror 13) corresponding to the center position of the maximum interference optical signal are obtained (the data processing unit utilizes the received pole The large interference light signal determines that the optical path difference between the optical path of the reference arm and the optical path of the measuring arm returned by the front and rear surfaces of the measured lens 11 is zero), then according to the formula:

计算得到被测透镜11的中心厚度D的值;Calculate the value of the center thickness D of the measured lens 11;

一般,移动支架151由机电控制系统18驱动控制,机电控制系统18可以由主控计算机17控制,并与位移机构15连接。Generally, the mobile bracket 151 is driven and controlled by the electromechanical control system 18 , and the electromechanical control system 18 can be controlled by the main control computer 17 and connected with the displacement mechanism 15 .

显然,以上实施方式的说明只是用于帮助理解本发明的方法及其核心思想。应当指出,对于所述技术领域的普通技术人员来说,在不脱离本发明原理的前提下,还可以对本发明进行若干改进和修饰,这些改进和修饰也落入本发明权利要求的保护范围内。Apparently, the descriptions of the above embodiments are only used to help understand the method and core idea of the present invention. It should be pointed out that for those of ordinary skill in the technical field, without departing from the principle of the present invention, some improvements and modifications can also be made to the present invention, and these improvements and modifications also fall within the protection scope of the claims of the present invention .

Claims (10)

1. white light interference lens center thickness measuring system, it is characterised in that including super continuum source (1), photodetector (2)、1:1 fiber coupler (3), measuring arm (4), reference arm (5), the first optical fiber (6), the second optical fiber (7) and data processing list Member;
The measuring arm (4) includes the 3rd optical fiber (8) and focusing lens (10);
The reference arm (5) includes the 4th optical fiber (9), GRIN Lens (12), scanning corner reflector (13), plane mirror (14), displacement mechanism (15) and length-measuring interferometer system (16);
The focusing lens (10) and measured lens (11) same to optical axis;
Institute's displacement mechanism (15) includes displacement guide rail (152) and can make the movement of scanning motion on displacement guide rail (152) Support (151), the scanning corner reflector (13) is fixed on the side of mobile support (151), the length-measuring interferometer system (16) scanning corner reflector (161) is fixed on the opposite side of mobile support (151), the optical axis of scanning corner reflector (13) and survey The optical axis of long interferometer system (16) is parallel, optical axis direction motion of the mobile support (151) along scanning corner reflector (13), surveys length The displacement of the mobile support (151) of interferometer system (16) measurement, and displacement is transmitted to data processing unit;
The light of super continuum source (1) transmitting is transmitted to 1 through the first optical fiber (6):1 fiber coupler (3), is divided into two beams, It is a branch of through the incident focusing lens (10) of the 3rd optical fiber (8), then through the incident measured lens (11) of focusing lens (10), then through measured lens (11) after front and rear surfaces reflect successively, along backtracking 1:1 fiber coupler (3), another beam is incident certainly through the 4th optical fiber (9) Condenser lens (12), then through GRIN Lens (12) incident scan angle speculum (13), then scanned corner reflector (13) is anti- Plane mirror (14) is incident upon, and along backtracking 1 after plane mirror (14) reflection:1 fiber coupler (3), measuring arm (4) emergent light and the emergent light of reference arm (5) is through 1:1 fiber coupler (3) is coupled into the second optical fiber (7) and produces interference Optical signal, photodetector (2) receives the interference light signal from the second optical fiber (7), and interference light signal is converted into telecommunications Transmitted after number to data processing unit, data processing unit is handled interference light signal, with reference to the length-measuring interferometer of reception The displacement of the mobile support (151) of system (16) measurement, obtains the corresponding mobile support in very big interference light signal center (151) displacement, and according to the center thickness of the displacement calculation measured lens (11);
The light path and scanning corner reflector (13) plane of incidence of GRIN Lens (12) the incident scan angle speculum (13) are anti- The light path for penetrating mirror (14) is parallel;
The white light interference lens center thickness measuring system detects lens center thickness method, comprises the following steps:
Step 1: data processing unit is calculated in temperature T according to the relevant parameter of input1, pressure P1With length-measuring interferometer system (16) laser head (162) wavelength X1Under air refraction n1, in temperature T1, pressure P1With super continuum source (1) wavelength X2 Under air group index n2, and in temperature T2, pressure P2With super continuum source wavelength X2Group's refraction of lower measured lens (11) Rate n3
Step 2: regulation measured lens (11) and focusing lens (10) same to optical axis, makes the reflected light of measured lens (11) front and rear surfaces 1 can be returned to by focusing lens (10):1 fiber coupler (3);
Step 3: the mobile support (151) of control does scanning motion, data processing unit along scanning corner reflector (13) optical axis direction The interference light signal that photodetector (2) is obtained is handled, the corresponding movement in very big interference light signal center is obtained The displacement Z of support (151)1And Z2
Step 4: data processing unit is according to below equation:
<mrow> <mi>D</mi> <mo>=</mo> <mfrac> <mrow> <msub> <mi>n</mi> <mn>2</mn> </msub> <mo>&amp;CenterDot;</mo> <mn>2</mn> <mrow> <mo>(</mo> <msub> <mi>Z</mi> <mn>2</mn> </msub> <mo>-</mo> <msub> <mi>Z</mi> <mn>1</mn> </msub> <mo>)</mo> </mrow> </mrow> <mrow> <msub> <mi>n</mi> <mn>1</mn> </msub> <mo>&amp;CenterDot;</mo> <msub> <mi>n</mi> <mn>3</mn> </msub> </mrow> </mfrac> </mrow>
Calculating obtains the center thickness D of measured lens (11).
2. white light interference lens center thickness measuring system according to claim 1, it is characterised in that the super continuous spectrums The wave-length coverage of light source (1) is 470-1700nm.
3. white light interference lens center thickness measuring system according to claim 1, it is characterised in that the 3rd optical fiber (6) and the 4th optical fiber (7) equal length.
4. white light interference lens center thickness measuring system according to claim 1, it is characterised in that the focusing lens (10) it is continuous focusing system.
5. white light interference lens center thickness measuring system according to claim 1, it is characterised in that also including operation number According to the main control computer (17) of processing unit, the main control computer (17) respectively with photodetector (2) and length-measuring interferometer System (16) is connected.
6. white light interference lens center thickness measuring system according to claim 1, it is characterised in that also include, control The Mechatronic control system (18) of mobile support (151) motion.
7. white light interference lens center thickness measuring system according to claim 1, it is characterised in that also include, fixed Measured lens (11) and the adjustment frame (19) for adjusting measured lens (11) optical axis.
8. white light interference lens center thickness measuring system according to claim 1, it is characterised in that also including to measurement Temperature, the humidity of environment are gentle to press the environmental control system being controlled.
9. white light interference lens center thickness measuring system according to claim 1, it is characterised in that the very big white light The center of interference signal is judged by centroid algorithm.
10. the white light interference lens center thickness measuring system detection lens center thickness described in claim 1-9 any one Method, it is characterised in that comprise the following steps:
Step 1: data processing unit is calculated in temperature T according to the relevant parameter of input1, pressure P1With length-measuring interferometer system (16) laser head (162) wavelength X1Under air refraction n1, in temperature T1, pressure P1With super continuum source (1) wavelength X2 Under air group index n2, and in temperature T2, pressure P2With super continuum source wavelength X2Group's refraction of lower measured lens (11) Rate n3
Step 2: regulation measured lens (11) and focusing lens (10) same to optical axis, makes the reflected light of measured lens (11) front and rear surfaces 1 can be returned to by focusing lens (10):1 fiber coupler (3);
Step 3: the mobile support (151) of control does scanning motion, data processing unit along scanning corner reflector (13) optical axis direction The interference light signal that photodetector (2) is obtained is handled, the corresponding movement in very big interference light signal center is obtained The displacement Z of support (151)1And Z2
Step 4: data processing unit is according to below equation:
<mrow> <mi>D</mi> <mo>=</mo> <mfrac> <mrow> <msub> <mi>n</mi> <mn>2</mn> </msub> <mo>&amp;CenterDot;</mo> <mn>2</mn> <mrow> <mo>(</mo> <msub> <mi>Z</mi> <mn>2</mn> </msub> <mo>-</mo> <msub> <mi>Z</mi> <mn>1</mn> </msub> <mo>)</mo> </mrow> </mrow> <mrow> <msub> <mi>n</mi> <mn>1</mn> </msub> <mo>&amp;CenterDot;</mo> <msub> <mi>n</mi> <mn>3</mn> </msub> </mrow> </mfrac> </mrow>
Calculating obtains the center thickness D of measured lens (11).
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