CN104154869B - White light interference lens center thickness measuring system and method - Google Patents
White light interference lens center thickness measuring system and method Download PDFInfo
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- CN104154869B CN104154869B CN201410390204.0A CN201410390204A CN104154869B CN 104154869 B CN104154869 B CN 104154869B CN 201410390204 A CN201410390204 A CN 201410390204A CN 104154869 B CN104154869 B CN 104154869B
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Abstract
The invention discloses a kind of white light interference lens center thickness measuring system and method, belong to technical field of optical precision measurement.Solve the existing technical problem that lens center thickness measurement apparatus measurement accuracy is low, measurement dynamic range is small.The white light interference lens center thickness measuring system of the present invention, including super continuum source, photodetector, 1:1 fiber coupler, measuring arm, reference arm, the first optical fiber, the second optical fiber and data processing unit；Wherein, measuring arm includes the 3rd optical fiber and focusing lens, and reference arm includes the 4th optical fiber, GRIN Lens, scanning corner reflector, plane mirror, displacement mechanism and length-measuring interferometer system.The system accuracy can reach 0.2 μm (3 σ), and dynamic range can reach 1.5m.
Description
Technical field
The present invention relates to a kind of white light interference lens center thickness measuring system and method, belong to optical precision measurement technology
Field.
Background technology
In optical field, three basic parameters of lens are center thickness, refractive index and radius of curvature, wherein lens centre
The machining accuracy of thickness will directly affect the combination properties such as focal length, the aberration of lens, and then influence the performance of whole optical system.
In the debuging of optical system, optical axis drift angle, radial deflection and the axial gap of lens need according to the center thickness of lens come
Accurate adjustment is carried out, therefore the measurement accuracy of lens center thickness is higher, resetting difficulty and cost are lower.With litho machine
All optical parametrics including lens center thickness are carried by the appearance of the ultraprecise engineerings such as object lens, nuclear fusion optical system
More strict requirements are gone out.Design tolerance requirement either is met in order to ensure that optical lens is processed, or in order to reduce dress
Difficulty and cost are adjusted, has been required for high-precision optical detecting instrument to carry out one by onechecking to its parameter, and then eliminate its processing
Deviation.
At present, measurement lens thickness technology can be divided into contact and contactless two kinds.
Contact type measurement, usually with hand-held amesdial or miking.During measurement, lens centre point position it is accurate
Property will directly affect measurement accuracy, therefore inspector needs to move back and forth measured lens in measurement, finds peak (convex lens
Mirror) or minimum point (concavees lens), thus measuring speed is slow, error is big, and the frequent movement of gauge head easily scratches lens surface.
Noncontact measuring method has image method, coplanar appearance method, the confocal method of white light and interferometric method etc..Image method lens center thickness
Measurement is influenceed by camera imaging system, CCD resolving powers, image definition and calibration coefficient accuracy, and measurement error is in 15 μ
Within m.Coplanar capacitance method is relative measurement, in order to obtain authentic data as the foundation of detection, then needs coplanar capacitance gauge head
The material of measured lens is accurately tested, measurement process is complicated, is unfavorable for being measured with lens center thickness, measurement is missed
About 5 μm of difference.The confocal method of white light is carried out using white light by the probe of axial chromatic aberration formation after lens to measured lens surface vertices
Positioning, the spectral information then reflected by measured lens upper and lower surface summit calculates the thickness of lens.But this method focuses spirit
Sensitivity and resolving power are relatively low, and operating distance is limited (30 μm of -25mm).
Interferometric method lens center thickness measurement apparatus mainly has following two：The first is a kind of light of optic thickness
Measuring instrument (CN87200715) is learned, the instrument includes two Michelson interference systems, according to white-light fringe to tested
Two surfaces of lens are positioned, and are then compared measured lens and calibrated bolck thick in the hope of the center of measured lens
Degree.But, the measurement apparatus is complicated, and measurement process need to change element, and measurement accuracy depends not only on determining for multiple surfaces
Position precision, also relies on the precision of calibrated bolck known thickness.Second is that French Fogale Nanotech companies release
LenScan series of products, Michelson's interferometer is built using short-coherence light source, using the accurate movement for scanning reference mirror, is looked for
Different white-light fringes are sought, being accurately positioned for different mirror positions is realized.The dynamic model of maximum measurement of LenScan series of products
It is 600mm (optical thickness) to enclose, and the centre wavelength of wideband light source is about 1310nm, with a width of 30nm, and coherence length is 25 μm, empty
Gas interval measurement precision reaches 0.3 μm (3 σ), and in actually measurement, by measuring environment, the stability of scanning mirror, light intensity
The influence such as shake, about 2 μm of lens center thickness measurement accuracy (3 σ).
In the optics double calculation and system of photo-etching machine objective lens system are debug, to the precision of lens center thickness and interval measurement
It is required that up to 0.5 μm (3 σ), measurement dynamic range is expected in more than 1.0m.Lens center thickness measurement apparatus of the prior art without
Method meets the requirement.
The content of the invention
The invention aims to solve, existing lens center thickness measurement apparatus measurement accuracy is low, measurement dynamic range
There is provided a kind of white light interference lens center thickness measuring system and method for small technical problem.
The technical scheme that present invention solution above-mentioned technical problem is used is as follows：
White light interference lens center thickness measuring system, including super continuum source, photodetector, 1:1 fiber coupling
Device, measuring arm, reference arm, the first optical fiber, the second optical fiber and data processing unit；
The measuring arm includes the 3rd optical fiber and focusing lens；
The reference arm include the 4th optical fiber, GRIN Lens, scanning corner reflector, plane mirror, displacement mechanism and
Length-measuring interferometer system；
The same optical axis of focusing lens and measured lens；
Institute's displacement mechanism includes displacement guide rail and can make the mobile support of scanning motion on displacement guide rail, described to sweep
The side that corner reflector is fixed on mobile support is retouched, the measurement corner reflector of the length-measuring interferometer system fixes mobile support
Opposite side, the optical axis for scanning corner reflector is parallel with the optical axis of length-measuring interferometer system, mobile support edge scanning corner reflector
Optical axis direction is moved, and length-measuring interferometer systematic survey moves the displacement of support, and displacement is transmitted to data processing unit；
The white light of the super continuum source transmitting is transmitted to 1 through the first optical fiber:1 fiber coupler, is divided into two beams, a branch of
Through the incident focusing lens of the 3rd optical fiber, then reflected successively through the incident measured lens of focusing lens, then the front and rear surfaces through measured lens
Afterwards, along backtracking 1:1 fiber coupler；Then another beam enters through the incident GRIN Lens of the 4th optical fiber through GRIN Lens
Scanning corner reflector is penetrated, then scanned corner reflector reflexes to plane mirror, and returned through plane mirror reflection Hou Yanyuan roads
Return 1:1 fiber coupler, the emergent light of measuring arm and the emergent light of reference arm are through 1:1 fiber coupler is coupled into the second optical fiber
And interference light signal is produced, photodetector receives the interference light signal from the second optical fiber, and interference light signal is converted into
Transmitted after electric signal to data processing unit, data processing unit is handled interference light signal, with reference to length-measuring interferometer system
The displacement of the mobile support of unified test amount, obtains the displacement of the corresponding mobile support in very big interference light signal center, and
According to the center thickness of the displacement calculation measured lens；
The light path of the GRIN Lens incident scan angle speculum and the light of scanning corner reflector plane of incidence speculum
Road is parallel.
Further, the wave-length coverage of the super continuum source is 470-1700nm.
Further, the 3rd fiber lengths are equal with the 4th fiber lengths.
Further, the focusing lens is continuous focusing system.
Further, the measuring system also includes, the main control computer of service data processing unit, and the master control is calculated
Machine is connected with photodetector and length-measuring interferometer system respectively.
Further, the measuring system also includes, the Mechatronic control system of the mobile support motion of control.
Further, the measuring system also includes, fixed measured lens and the adjustment frame for adjusting measured lens optical axis.
Further, the measuring system also includes the environment being controlled to the gentle pressure of temperature, humidity of measuring environment
Control system.
Further, the center of the very big white light interference signal is judged by centroid algorithm.
Above-mentioned white light interference lens center thickness measuring system detects lens center thickness method, comprises the following steps：
Step 1: data processing unit is calculated in temperature T according to the relevant parameter of input1, pressure P1Interfere with length is surveyed to be
The laser head wavelength X of system1Under air refraction n1, in temperature T1, pressure P1With super continuum source wavelength X2Under air group
Refractive index n2, and in temperature T2, pressure P2With super continuum source wavelength X2The group index n of lower measured lens3；
Step 2: regulation measured lens and the same optical axis of focusing lens, making the reflected light of measured lens front and rear surfaces can pass through
Focusing lens returns to 1:1 fiber coupler；
Step 3: the mobile support of control does scanning motion along scan angle mirror light direction of principal axis, data processing unit is to light
The interference light signal that electric explorer is obtained is handled, and obtains the position of the corresponding mobile support in very big interference light signal center
Shifting amount Z1And Z2；
Step 4: data processing unit is according to below equation：
Calculate the center thickness D for obtaining measured lens.
Further, the data processing unit calculates n with dispersion equation and Ai Delun (Edl é n) formula1、n2And
n3。
Compared with prior art, beneficial effects of the present invention：
(1) light source in white light interference lens center thickness measuring system of the invention is super continuum source, wavelength model
It is 470-1700nm to enclose, and with a width of 1230nm, makes the coherence length of light source shorter, more sensitive to zero optical path difference, interference fringe
Center interpretation is more accurate, makes the theoretical precision that lens center thickness is measured up to 0.2 μm (3 σ)；
(2) white light interference lens center thickness measuring system of the invention adds focusing lens in measuring arm, by adjusting
The burnt intensity to the return light of the measured lens at diverse location is adjusted, and improves signal to noise ratio, can be simultaneously to multiple eyeglasses
It is accurately positioned and is measured；
(3) white light interference lens center thickness measuring system of the invention introduces scanning corner reflector in reference arm,
Constitute and fold light path, the dynamic range of measurement is reached 1.5m, and scanning corner reflector does not change in moving process
The direction of incident light and reflected light, improves the antivibration kinetic force of system.
Brief description of the drawings
Fig. 1 is the structural representation of white light interference lens center thickness measuring system of the present invention；
Fig. 2 is the spectrogram of super continuum source of the present invention；
In figure, 1, super continuum source, 2, photodetector, 3,1:1 fiber coupler, 4, measuring arm, 5, reference arm, 6,
First optical fiber, the 7, second optical fiber, the 8, the 3rd optical fiber, the 9, the 4th optical fiber, 10, focusing lens, 11, measured lens, 12, self-focusing it is saturating
Mirror, 13, scanning corner reflector, 14, plane mirror, 15, displacement mechanism, 151, mobile support, 152, displacement guide rail, 16, survey
Long interferometer system, 161, measurement corner reflector, 162, laser head, 17, main control computer, 18, Mechatronic control system, 19, adjust
Whole frame.
Embodiment
The present invention is further illustrated below in conjunction with accompanying drawing.
As described in Figure 1, white light interference lens center thickness measuring system of the invention includes：Super continuum source 1, photoelectricity
Detector 2,1:1 fiber coupler 3, measuring arm 4, reference arm 5, the first optical fiber 6, the second optical fiber 7 and data processing unit, its
In, measuring arm 4 includes the 3rd optical fiber 8 and focusing lens 10, and it is anti-that reference arm 5 includes the 4th optical fiber 9, GRIN Lens 12, scan angle
Penetrate mirror 13, plane mirror 14, displacement mechanism 15 and length-measuring interferometer system 16.
Super continuum source 1 passes through the first optical fiber 6 and 1:1 fiber coupler 3 is connected；Photodetector 2 passes through the second light
Fibre 7 and 1:1 fiber coupler 3 is connected；One end and 1 of 3rd optical fiber 8:1 fiber coupler 3 is connected, other end alignment focusing lens
10 and with the same optical axis of focusing lens 10；One end and 1 of 4th optical fiber 9:1 fiber coupler 3 is connected, other end alignment GRIN Lens
12 and with the same optical axis of GRIN Lens 12；3rd optical fiber 8 and the 4th optical fiber 9 equal length in error allowed band, can keep away
Exempt from the path-length error caused by thermal expansion is not equal, improve detection accuracy；Displacement mechanism 15 includes mobile support 151 and displacement
Guide rail 152, the bottom of mobile support 151 is arranged on displacement guide rail 152, and mobile support 151 can be along scanning corner reflector 13
Optical axis direction do scanning motion on displacement guide rail 152；Scanning corner reflector 13 is fixed on the side of mobile support 151；Survey
Long interferometer system 16 is prior art, the main measurement corner reflector 161 and laser head 162 for including setting along same optical axis,
Measurement corner reflector 161 is fixed on the opposite side of mobile support 151, and optical axis and the scanning corner reflection of length-measuring interferometer system 16
The optical axis of mirror 13 is parallel, the displacement of the mobile support 151 of the measurement of length-measuring interferometer system 16, and by displacement real-time Transmission to number
According to processing unit, because scanning corner reflector 13 is also secured on mobile support 151, and scanning corner reflector 13 is with surveying long interference
The optical axis of instrument system 16 is parallel, and mobile support 151 is moved along the optical axis direction of scanning corner reflector 13 again, so the displacement is also
Scan the displacement of corner reflector 13；
The light of the outgoing of super continuum source 1 is transmitted to 1 through the first optical fiber 6:1 fiber coupler 3,1:1 fiber coupler 3 will
Light is divided into two beams, and a branch of entrance measuring arm 4, another beam enters in reference arm 5；Into the light beam of measuring arm, first through the 3rd optical fiber 8
Incident focusing lens 10, after then being focused through focusing lens 10, is focused at focusing lens 10 with the measured lens 11 of optical axis, then through quilt
After the front and rear surfaces of survey lens 11 reflect successively, along backtracking 1:1 fiber coupler；Into the light beam of reference arm 5, first through
The incident GRIN Lens 12 of four optical fiber 9, then through the incident scan angle speculum 13 of GRIN Lens 12, then scanned corner reflector
13 reflex to plane mirror 14, after being reflected through plane mirror 14, along backtracking 1:1 fiber coupler 3, wherein from autohemagglutination
The light of the incident scan angle speculum 13 of focus lens 12 reflexes to the parallel light of plane mirror 14 with scanning corner reflector 13；Then
The emergent light of reference arm 5 and the emergent light of measuring arm 4 are through 1:1 fiber coupler 3 enters in the second optical fiber 7, and interferes, and produces
Raw interference light signal, interference light signal is transmitted to photodetector 2 through the second optical fiber 7, and photodetector 2 turns interference light signal
Change into after electric signal, transmit to data processing unit, data processing unit is handled interference light signal using centroid algorithm,
The displacement of the mobile support 151 measured with reference to length-measuring interferometer system 16, obtains white light interference signal maximum center
The displacement of corresponding mobile support 151 is (i.e.：Scan the displacement of corner reflector 13) Z1 and Z2, then according to the displacement and
Index of refraction relationship calculates the center thickness of measured lens 11.
The present invention principle be：Scanning corner reflector 13 does scanning motion under the drive of mobile support 151, works as scan angle
When speculum 13 is moved to a certain position, the optical path difference for making measuring arm light path and reference arm light path is zero, occurs first greatly
White light interference signal is received and shown on a display screen by photodetector 2, utilizes centroid algorithm and length-measuring interferometer system 16
The displacement of record, obtains the displacement of scanning corner reflector 13 corresponding with first very big white light interference signal center position
Z1；Continue to move to scan corner reflector 13, until there is second very big white light interference signal, obtained using same method and
The displacement of the corresponding scanning corner reflector 13 in second very big white light interference signal center position is Z2。
In present embodiment, data processing unit can also be calculated in temperature T1, pressure P1It is λ with laser head wavelength1Under
Air refraction n1, in temperature T1, pressure P1It is λ with super continuum source wavelength2Under air group index n2, in temperature T2、
Pressure P2It is λ with super continuum source wavelength2The group index n of lower measured lens 113, the calculation formula of center thickness can be：
In present embodiment, measuring system can also include the main control computer for being capable of service data processing unit, master control
Computer is connected with photodetector 2 and length-measuring interferometer system 16 respectively.
In present embodiment, measuring system can also include being connected with displacement mechanism 15, and control to move support 151 and sweep
The Mechatronic control system 18 of motion is retouched, Mechatronic control system 18 can be connected with main control computer 17, and by main control computer 17
Control.
In present embodiment, measuring system can also include fixed measured lens 11 and adjust the tune of the optical axis of measured lens 11
Whole frame 19, measured lens 11 are adjusted frame 19 and clamped, by adjusting the inclination and translation of adjustment frame 19, make measured lens 11 and tune
The burnt common optical axis of mirror 10, is reduced because of the measurement error that light shaft offset is introduced.
In present embodiment, measuring system can also include environmental control system, and environmental control system is positioned over white light and done
Relate in measuring environment residing for lens center thickness measuring system, the gentle pressure of the temperature, humidity to measuring environment carries out accurate control.
In present embodiment, super continuum source 1 is prior art, including pump laser, condenser lens, photonic crystal
Optical fiber, the joints of optical fibre and polarization maintaining optical fibre.The light line focus lens that laser is sent converge to the end of photonic crystal fiber side
Face, end face otch requirement is smooth and vertical with optical axis, and light enters after photonic crystal fiber, due to the Gao Fei of photonic crystal fiber
Linearly, super continuous spectrums white light is produced, the other end of photonic crystal fiber is connected by the joints of optical fibre with polarization maintaining optical fibre, by super company
Continuous spectrum white light output.In present embodiment, the centre wavelength of pump laser is 1060nm, and photonic crystal fiber is about 20.0m,
5.0 μm of core diameter, 2.2 μm of air bore dia, 3.4 μm of pitch of holes, 125.0 μm of cladding diameter.Fig. 2 is super continuum source 1
Spectrogram, from figure as can be seen that photonic crystal fiber produce the non-constant width of white-light spectrum, bandwidth δ λ be 1230nm, center
Wavelength X c is about 1085nm, and it is 0.42 μm that obtained coherence length Δ l is calculated using formula (2)；
As shown in Fig. 2 the white-light spectrum that photonic crystal fiber is produced is except 1060nm is nearby by pump laser injection light
Big rise and fall is influenceed, power spectrum is flatter in the range of whole output spectrum, disclosure satisfy that high-precision lenses center thickness is measured
Requirement to white light source.Super continuum source 1 makes the coherence length of light source shorter, more sensitive to zero optical path difference, interference fringe
Position of centre of gravity interpretation it is more accurate, make the center thickness of measured lens 11 measure theoretical precision up to 0.2 μm (3 σ).
In present embodiment, the vertical range of the range sweep corner reflector 13 of GRIN Lens 12 is farthest up to 0.75m, puts down
The vertical range of the range sweep corner reflector 13 of face speculum 14 is farthest up to 0.75m, i.e., formed by scanning corner reflector 13
Light path is folded, the dynamic range of measurement is reached 1.50m, and scan the propagation side that the movement of corner reflector 13 does not change reference light
To enhancing antivibration kinetic force.
In present embodiment, focusing lens 10 is preferably continuous focusing system, and the focusing range of focusing lens 10 is 5m-15m, can
The light of the outgoing of 3rd optical fiber 8 is converged to the diverse location of measured lens 11, the intensity of the light reflected measured lens 11 is carried out
Modulation, improves signal to noise ratio, while multiple eyeglasses are accurately positioned and measured.
The white light interference center thickness measuring system detection lens center thickness method of the present invention, comprises the following steps：
Step 1: log-on data processing unit, inputs relevant parameter, relevant parameter includes：The temperature T of reference arm light path1
With the pressure P of reference arm light path1；The temperature T of measuring arm light path2With the pressure P of measuring arm light path2；The wavelength X of laser head 1621；
The wavelength X of super continuum source 12；(commercially available or molded lens can be given refractive index of the measured lens 11 under fixed wave length
Go out the refractive index under a certain wavelength of determination) and abbe number；
Utilize dispersion equation：
And Ai Delun (Edl é n) formula：
N in formula (3)-(5)gRepresent group index；N represents the real-time refractive index of air；Represent abbe number, dispersion system
Number can be according to the different numerical value of temperature pressure change；λ is the wavelength in vacuum, and unit is μm, nsFor air refraction under standard state
Rate, t, p is the temperature and pressure of measuring environment, and correspondence unit is respectively DEG C, torr；
Calculating is obtained in temperature T1, pressure P1With the wavelength X of laser head 1621Under air refraction n1(by λ1(4) formula of substitution
It is middle first to obtain ns, then by nsN is obtained in (5) formula of substitution1), in temperature T1, pressure P1With the wavelength X of super continuum source 12Under
Air group index n2(the n for obtaining calculating1In (3) formula of substitution, now wavelength X is λ in (3) formula2, obtain n2), in temperature T2、
Pressure P2With the wavelength X of super continuum source 12The group index n of lower measured lens 113(by measured lens 11 under a certain wavelength
Refractive index is substituted into (3) formula, and now wavelength X is λ in (3) formula2, calculate and obtain n3), above-mentioned calculating process is prior art；
It is general to use the service data processing unit of main control computer 17；
Step 2: regulation measured lens 11 and the same optical axis of focusing lens 10, make the reflected light of the front and rear surfaces of measured lens 11 equal
1 can be returned by focusing lens 10:1 fiber coupler 3；
It is general that measured lens 11 are clamped using adjustment frame 19, by adjusting the inclination and translation of adjustment frame 19, make tested saturating
Mirror 11 and the common optical axis of focusing lens 10, are reduced because of the measurement error that light shaft offset is introduced；
Step 3: the mobile support 151 of control does scanning motion (mobile support 151 along the scanning optical axis direction of corner reflector 13
It is mobile, drive scanning corner reflector 13 and measurement corner reflector 161 to move), data processing unit is using centroid algorithm to interference
Optical signal is handled, the displacement measured with reference to length-measuring interferometer system 16, obtains very big interference light signal center pair
(data processing unit is greatly dry using what is received by the displacement Z1 and Z2 for the mobile support 151 (scanning corner reflector 13) answered
Relate to optical signal and determine that zero), then the optical path difference for the measuring arm light path that reference arm light path is returned with the front and rear surfaces of measured lens 11 is
According to formula：
Calculate the value for the center thickness D for obtaining measured lens 11；
Typically, mobile support 151 is by the drive control of Mechatronic control system 18, and Mechatronic control system 18 can be calculated by master control
Machine 17 is controlled, and is connected with displacement mechanism 15.
Obviously, the explanation of embodiment of above is only intended to the method and its core concept for helping to understand the present invention.Should
Point out, under the premise without departing from the principles of the invention, can also be to this for the those of ordinary skill of the technical field
Invention carries out some improvement and modification, and these are improved and modification is also fallen into the protection domain of the claims in the present invention.
Claims (10)
1. white light interference lens center thickness measuring system, it is characterised in that including super continuum source (1), photodetector
(2)、1:1 fiber coupler (3), measuring arm (4), reference arm (5), the first optical fiber (6), the second optical fiber (7) and data processing list
Member；
The measuring arm (4) includes the 3rd optical fiber (8) and focusing lens (10)；
The reference arm (5) includes the 4th optical fiber (9), GRIN Lens (12), scanning corner reflector (13), plane mirror
(14), displacement mechanism (15) and length-measuring interferometer system (16)；
The focusing lens (10) and measured lens (11) same to optical axis；
Institute's displacement mechanism (15) includes displacement guide rail (152) and can make the movement of scanning motion on displacement guide rail (152)
Support (151), the scanning corner reflector (13) is fixed on the side of mobile support (151), the length-measuring interferometer system
(16) scanning corner reflector (161) is fixed on the opposite side of mobile support (151), the optical axis of scanning corner reflector (13) and survey
The optical axis of long interferometer system (16) is parallel, optical axis direction motion of the mobile support (151) along scanning corner reflector (13), surveys length
The displacement of the mobile support (151) of interferometer system (16) measurement, and displacement is transmitted to data processing unit；
The light of super continuum source (1) transmitting is transmitted to 1 through the first optical fiber (6):1 fiber coupler (3), is divided into two beams,
It is a branch of through the incident focusing lens (10) of the 3rd optical fiber (8), then through the incident measured lens (11) of focusing lens (10), then through measured lens
(11) after front and rear surfaces reflect successively, along backtracking 1:1 fiber coupler (3), another beam is incident certainly through the 4th optical fiber (9)
Condenser lens (12), then through GRIN Lens (12) incident scan angle speculum (13), then scanned corner reflector (13) is anti-
Plane mirror (14) is incident upon, and along backtracking 1 after plane mirror (14) reflection:1 fiber coupler (3), measuring arm
(4) emergent light and the emergent light of reference arm (5) is through 1:1 fiber coupler (3) is coupled into the second optical fiber (7) and produces interference
Optical signal, photodetector (2) receives the interference light signal from the second optical fiber (7), and interference light signal is converted into telecommunications
Transmitted after number to data processing unit, data processing unit is handled interference light signal, with reference to the length-measuring interferometer of reception
The displacement of the mobile support (151) of system (16) measurement, obtains the corresponding mobile support in very big interference light signal center
(151) displacement, and according to the center thickness of the displacement calculation measured lens (11)；
The light path and scanning corner reflector (13) plane of incidence of GRIN Lens (12) the incident scan angle speculum (13) are anti-
The light path for penetrating mirror (14) is parallel；
The white light interference lens center thickness measuring system detects lens center thickness method, comprises the following steps：
Step 1: data processing unit is calculated in temperature T according to the relevant parameter of input1, pressure P1With length-measuring interferometer system
(16) laser head (162) wavelength X1Under air refraction n1, in temperature T1, pressure P1With super continuum source (1) wavelength X2
Under air group index n2, and in temperature T2, pressure P2With super continuum source wavelength X2Group's refraction of lower measured lens (11)
Rate n3；
Step 2: regulation measured lens (11) and focusing lens (10) same to optical axis, makes the reflected light of measured lens (11) front and rear surfaces
1 can be returned to by focusing lens (10):1 fiber coupler (3)；
Step 3: the mobile support (151) of control does scanning motion, data processing unit along scanning corner reflector (13) optical axis direction
The interference light signal that photodetector (2) is obtained is handled, the corresponding movement in very big interference light signal center is obtained
The displacement Z of support (151)1And Z2；
Step 4: data processing unit is according to below equation：
<mrow>
<mi>D</mi>
<mo>=</mo>
<mfrac>
<mrow>
<msub>
<mi>n</mi>
<mn>2</mn>
</msub>
<mo>&CenterDot;</mo>
<mn>2</mn>
<mrow>
<mo>(</mo>
<msub>
<mi>Z</mi>
<mn>2</mn>
</msub>
<mo>-</mo>
<msub>
<mi>Z</mi>
<mn>1</mn>
</msub>
<mo>)</mo>
</mrow>
</mrow>
<mrow>
<msub>
<mi>n</mi>
<mn>1</mn>
</msub>
<mo>&CenterDot;</mo>
<msub>
<mi>n</mi>
<mn>3</mn>
</msub>
</mrow>
</mfrac>
</mrow>
Calculating obtains the center thickness D of measured lens (11).
2. white light interference lens center thickness measuring system according to claim 1, it is characterised in that the super continuous spectrums
The wave-length coverage of light source (1) is 470-1700nm.
3. white light interference lens center thickness measuring system according to claim 1, it is characterised in that the 3rd optical fiber
(6) and the 4th optical fiber (7) equal length.
4. white light interference lens center thickness measuring system according to claim 1, it is characterised in that the focusing lens
(10) it is continuous focusing system.
5. white light interference lens center thickness measuring system according to claim 1, it is characterised in that also including operation number
According to the main control computer (17) of processing unit, the main control computer (17) respectively with photodetector (2) and length-measuring interferometer
System (16) is connected.
6. white light interference lens center thickness measuring system according to claim 1, it is characterised in that also include, control
The Mechatronic control system (18) of mobile support (151) motion.
7. white light interference lens center thickness measuring system according to claim 1, it is characterised in that also include, fixed
Measured lens (11) and the adjustment frame (19) for adjusting measured lens (11) optical axis.
8. white light interference lens center thickness measuring system according to claim 1, it is characterised in that also including to measurement
Temperature, the humidity of environment are gentle to press the environmental control system being controlled.
9. white light interference lens center thickness measuring system according to claim 1, it is characterised in that the very big white light
The center of interference signal is judged by centroid algorithm.
10. the white light interference lens center thickness measuring system detection lens center thickness described in claim 1-9 any one
Method, it is characterised in that comprise the following steps：
Step 1: data processing unit is calculated in temperature T according to the relevant parameter of input1, pressure P1With length-measuring interferometer system
(16) laser head (162) wavelength X1Under air refraction n1, in temperature T1, pressure P1With super continuum source (1) wavelength X2
Under air group index n2, and in temperature T2, pressure P2With super continuum source wavelength X2Group's refraction of lower measured lens (11)
Rate n3；
Step 2: regulation measured lens (11) and focusing lens (10) same to optical axis, makes the reflected light of measured lens (11) front and rear surfaces
1 can be returned to by focusing lens (10):1 fiber coupler (3)；
Step 3: the mobile support (151) of control does scanning motion, data processing unit along scanning corner reflector (13) optical axis direction
The interference light signal that photodetector (2) is obtained is handled, the corresponding movement in very big interference light signal center is obtained
The displacement Z of support (151)1And Z2；
Step 4: data processing unit is according to below equation：
<mrow>
<mi>D</mi>
<mo>=</mo>
<mfrac>
<mrow>
<msub>
<mi>n</mi>
<mn>2</mn>
</msub>
<mo>&CenterDot;</mo>
<mn>2</mn>
<mrow>
<mo>(</mo>
<msub>
<mi>Z</mi>
<mn>2</mn>
</msub>
<mo>-</mo>
<msub>
<mi>Z</mi>
<mn>1</mn>
</msub>
<mo>)</mo>
</mrow>
</mrow>
<mrow>
<msub>
<mi>n</mi>
<mn>1</mn>
</msub>
<mo>&CenterDot;</mo>
<msub>
<mi>n</mi>
<mn>3</mn>
</msub>
</mrow>
</mfrac>
</mrow>
Calculating obtains the center thickness D of measured lens (11).
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