CN105806231B - A kind of calibrator based on optical fiber white light interference principle - Google Patents
A kind of calibrator based on optical fiber white light interference principle Download PDFInfo
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- CN105806231B CN105806231B CN201610136698.9A CN201610136698A CN105806231B CN 105806231 B CN105806231 B CN 105806231B CN 201610136698 A CN201610136698 A CN 201610136698A CN 105806231 B CN105806231 B CN 105806231B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
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Abstract
The invention belongs to technical field of optical fiber, and in particular to be a kind of calibrator based on optical fiber white light interference principle.The present invention by wide spectrum light source 1, fiber coupler, optical fiber power attenuator 3, three fiber port circulators, optical fiber collimator, scanning shift platform control speculum 6, have the fixed calibration fiber segment 8 of length, signal processing unit 11 and connect optical fiber form.The present invention can obtain the accurate light path thickness of object under test by comparing the ratio between the gap length of fixed fiber segment and this two groups of stripeds, which is equal to the product of refractive index and physical thickness.At this time if it is known that the refractive index of object, then can accurately obtain the physical thickness of object.
Description
Technical field
The invention belongs to technical field of optical fiber, and in particular to be a kind of calibrator based on optical fiber white light interference principle.
Background technology
With the rapid development of science and technology and production level, requirement of the people to product quality also increasingly improves.One
High field of engineering technology is required Product Precision a bit, and if optical lens is processed, aerospace material processing etc. is required for production
Product or product subsurface thickness carry out stringent control.So contactless high-precision calibrator has highly important application demand.
The main method of common thickness measuring has Mechanical Method, capacitance method, supercritical ultrasonics technology, ray method, eddy-current method, magnetic method, light at present
Method etc..The characteristics of different test methods, enables them to issue the effect of waving in different test occasions.
Mechanical calibrator is with a long history, its precision depends primarily on displacement sensor, is contact under normal circumstances
It measures.Published patent such as lens thickness meter [Chinese Patent Application No.：200710201329.4], major advantage is operation
Simply, cost is relatively low, and measurement range is big；The disadvantage is that precision is low, there is certain damage to measured object, is not easy to realize that dynamic measures.
Magnetic-type calibrator be mainly used in matrix and measured object magnetic conductivity differ larger in the case of thickness measure, such as exist
Non magnetic coating on ferromagnetism matrix, the variation of coating layer thickness will cause the variation of entire magnetic circuit reluctance, electromagnetic coil made to produce
Raw induced potential changes.Published patent such as handle type coating thickness detector [Chinese Patent Application No.：
201210118794.2], major advantage is high sensitivity, and wide range of measurement, instrument is light, easy to operate etc.；The disadvantage is that easily
It is interfered by environmental factor, application conditions harshness etc..
Condenser type calibrator can measure the thickness of non-metallic object.Major advantage is that measuring speed is fast, easy to operate, one
A variety of measured objects are applicable under fixed condition；The disadvantage is that contact type measurement, is easily interfered by external electromagnetic field, and require measured object table
Face is smooth etc..
Ray method is a kind of conventional method, and because of radioactive ray energy stabilization, this calibrator can substantially be used as absolutely thick
Spend the instrument measured.Published patent such as nondestructive flaw detection thickness meter [Chinese Patent Application No.：200910026959.1], master
It is that reaction speed is fast to want advantage, can accurately and continuously be measured, non-contact measurement, to measured object without mechanical injuries；The disadvantage is that
Due to safety factor, calibrator is whole very heavy, and mechanical erection required precision is very high, very sensitive to environmental factor, mark
Fixed complexity, there are repetition problem of calibrating, involve great expense, harmful etc..
Optical fiber white light interference measuring technique is widely used in recent years, and major advantage has：It is non-contact, measure essence
Degree is high, and strong antijamming capability is simple in structure, cheap, easy to operate etc..Thickness measuring is made using optical fiber white light interference principle
Instrument has apparent advantage for the measurement of thin transparent object thickness.Published patent such as white light interference lens center thickness
Measuring system and method [Chinese Patent Application No.：201410390204.0] it is a kind of survey using optical fiber white light measuring technique
Thick instrument, but its structure is more complex, since many places use mechanical displacement structure control speculum in its system, is readily incorporated system mistake
Difference, it is very strict to the measure of precision requirement of system building and operation if wanting to obtain preferable measurement result, make building for system
Vertical and maintenance cost is very high.
Invention content
The purpose of the present invention is to provide a kind of simple and compact for structure, easy to operate, high certainty of measurement white based on optical fiber
The calibrator of interference of light principle.
The object of the present invention is achieved like this：
A kind of calibrator based on optical fiber white light interference principle is decayed by wide spectrum light source 1, fiber coupler, optical fiber power
Device 3, three fiber port circulators, optical fiber collimator, scanning shift platform control speculum 6, have the fixed nominal light of length
Fine section 8, signal processing unit 11 and connection optical fiber composition, the device use light path balanced type interferometer structure, the balance
In formula interferometer structure, the light sent out from wide spectrum light source 1 is divided into two after the ports a incidence of 2 × 2 fiber couplers 2
Beam is emitted from the ports b of fiber coupler 2 and the ports c respectively；The part light path being connected with the ports b in system is interferometer
Reference arm including optical fiber power attenuator 3, three fiber port circulators 4, optical fiber collimator 5, is controlled by scanning shift platform
Speculum 6；The part light path being connected with the ports c be interferometer measuring arm, including three fiber port circulators 7, by
The speculum 6 of scanning shift platform control has the fixed calibration fiber segment 8 of length, optical fiber collimator 9, the reference in reference arm
Optical signal eventually enters into the ports j of fiber coupler 10, and the measurement optical signal in measuring arm then enters the ends k of fiber coupler 10
Mouthful；So the ports the l and m output of fiber coupler 10 is reference light and the interference signal that measures light, the two passes through signal
It can be obtained the precise thickness information of determinand after the demodulation of processing unit 11.
The optical path regulator of the reference arm is accurate by optical fiber power attenuator 3, three fiber port circulators 4, optical fiber
Straight device 5, the speculum 6 controlled by scanning shift platform are constituted；The ports d of three fiber port circulator 4 of optical signals are first after entering
Optical fiber collimator 5 is first output to by the ports e, optical fiber collimator 5 and the speculum 6 of scanning shift platform control pass through fine adjustment,
So that the most of optical signal being emitted by optical fiber collimator 5 can return to after speculum reflects again by optical fiber collimator 5
In optical fiber；The optical signal of return enter three fiber port circulators 4 the ports e after by the ports f export after be sent to coupler 10,
Form interference signal；Change the position of speculum 6 by adjusting scanning shift platform, you can change optical signal and undergone in reference arm
Total optical path.
The calibrated scale of Unit Scale in the measuring arm, in the fiber segment before placing measured object, preset one
One section of optical fiber of unit length at the both ends of this section there is catoptric arrangement, the unit length section both ends of the surface will generate reflected light letter
Number, and come out by system detectio, show as the interference signal of two intrinsic spacing, for being carried out pair with the thickness of object under test
Than.
The light path of the measuring thickness device reference arm is adjustable, with match required reflected light signal in measuring arm after light
Journey；Due to the prefabricated caliberating device of regular length in measuring arm so that the calibrator needn't carry out separately in use
Outer calibration process, length comparison procedure are collected by institute by the software program in being embedded in signal processing unit only
Four reflected light signals can be automatically performed the accurate measurement of determinand thickness.
The beneficial effects of the present invention are：
The present invention can obtain object under test by comparing the ratio between the gap length of fixed fiber segment and this two groups of stripeds
Accurate light path thickness, the thickness are equal to the product of refractive index and physical thickness.It, then can be at this time if it is known that the refractive index of object
The accurate physical thickness for obtaining object.
Description of the drawings
Fig. 1 is the structure diagram of the accurate calibrator of transparent material based on optical fiber white light interference principle.
Fig. 2 be have the matching length fiber segment 8 of on-line automatic calibrating function be connected with optical fiber collimator 9 tail end with it is to be measured
Object schematic diagram.
Specific implementation mode
The present invention is described further below in conjunction with the accompanying drawings.
The invention discloses a kind of calibrators based on optical fiber white light interference sensing principle.It is by wide spectrum light source 1, optical fiber coupling
Clutch 2 and 10, optical fiber power attenuator 3, three fiber port circulators 4 and 7, optical fiber collimator 5 and the control of 9, scanning shift platform
Speculum 6, there is the fixed calibration fiber segment 8 of length, signal processing unit 11 and necessary connection optical fiber to form.This hair
The bright non-contact accurate measurement that can be used for transparent thin objects or object skin depth.The configuration of the present invention is simple, cost is relatively low, measures
Speed is fast, precision is high.It can be widely used for the product fields of measurement in industrial production.
As shown in Figure 1, the optical fiber white light interference formula calibrator is by wide spectrum light source 1, fiber coupler 2 and 10, optical fiber power
Attenuator 3, three fiber port circulators 4 and 7, optical fiber collimator 5 and the 9, speculum 6 that is controlled by scanning shift platform have length
Spend fixed calibration fiber segment 8, signal processing unit 11 and necessary connection optical fiber composition.
The measuring thickness device uses light path balanced type interferometer structure.In the balanced type interferometer structure, wide spectrum optical is come from
The light that source 1 is sent out is divided into two beams after the ports a incidence of 2 × 2 fiber couplers 2, respectively from the ports b of fiber coupler 2
It is emitted with the ports c.The part light path being connected with the ports b in system is (including optical fiber power attenuator 3, three fiber port rings
The devices such as row device 4, optical fiber collimator 5, the speculum 6 that is controlled by scanning shift platform) it is known as the reference arm of interferometer；With the ports c
Connected part light path (is consolidated including three fiber port circulators 7, the speculum 6 controlled by scanning shift platform, with length
The devices such as fixed calibration fiber segment 8, optical fiber collimator 9) it is known as the measuring arm of interferometer.Reference optical signal in reference arm is final
Into the ports j of fiber coupler 10, the measurement optical signal in measuring arm then enters the ports k of fiber coupler 10.So light
What the ports l and m of fine coupler 10 exported is the interference signal of reference light and measurement light, and the two passes through signal processing unit 11
Demodulation after can be obtained the precise thickness information of determinand.
In reference arm, optical signal enters three fiber port rings from the ports d later first by optical fiber power attenuator 3
Then row device 4 enters optical fiber collimator 5 by the ports e of three fiber port circulators 4.The speculum 6 of scanning shift platform control passes through
Fine adjustment is crossed, is made it in the most of light reflection back into optical fibers collimator 5 that will be emitted from optical fiber collimator 5.Turn again to light
Optical signal in fine collimator 5 subsequently enters the ports e of three fiber port circulators 4 and is exported from the ports f.Due to speculum 6
Can be controlled by scanning shift platform with the relative position of optical fiber collimator 5, thus the reference optical signal in reference arm undergone it is total
Light path scanning shift platform is adjusted.Optical fiber collimator 5 and reflection in range i.e. displacement platform scanning process that light path can change
Two times (due to light round trips between) of the spacing of mirror 6.
In measuring arm, optical signal enters three fiber port circulators 7 from the ports g first, then by three fiber port rings
The ports h of row device 7 are emitted, due to the specially treated in the matching length fiber segment 8 with calibrated scale, in two made in advance
There to be part optical signals to be reflected at a scale, remainder light beam injects measured object by optical fiber collimator 9, before and after measured object
End face also will generate reflected light signal respectively, they are largely returned to by optical fiber collimator 9 in system light path.All reflections
Optical signal all will enter the three fiber port ports circulator 7h and be exported from the ports i.
Section before and after the reflected light signal and measured object of two scales in measurement optical signals fiber segment 8 in measuring arm
Four kinds of heterogeneities of reflected light signal, the total optical path that they are undergone in measuring arm are different.The displacement platform in reference arm
During scanning, when the position of displacement platform just makes the total optical path that reference optical signal is undergone be exactly equal to four in measuring arm
When the total optical path that a certain kind in kind ingredient is undergone, referred to as the two light path matches, according to white light interference theory, reference light letter
Number with measure optical signal interference signal be up to a maximum, that is, there are interference peaks.
In reference arm in a scan period of displacement platform, the total optical path of reference optical signal experience will be with measurement optical signal
In four kinds of ingredients match successively.So in signal processing unit, it will record scanning shift platform in four different locations
The interference peaks of generation.Since the first two interference peaks are the reflection signal generations by two scales made in advance in fiber segment 8, and
Practical spacing between the two scales is known, and because the process that scanning shift platform changes reference arm total optical path uniformly connects
It is continuous.Therefore the spacing of the spacing and the first two interference peaks of latter two interference peaks generated by fault plane reflection before and after measured object can be passed through
Ratio, calculate the actual (real) thickness of measured object.
According to white light interference theory, the intensity of two optical signals is closer, then the interference fringe that they are generated when interfering is visible
Degree is bigger.So can improve to control the light intensity of reference optical signal by adjusting optical fiber power attenuator 3 in reference arm and be
System performance.
The signal processing unit 11 of this system can only extract the interference light all the way in the ports l and m of fiber coupler 10
Signal is demodulated.By above-mentioned analysis, it need to only record in displacement platform scanning process interference light signal and reach extreme value four times
Position, then pass through known calibrated length, you can calculate the thickness of measured object.The premise of such method is that displacement platform is scanning
In the process to the change uniformly continuous of total optical path in reference arm.Signal processing unit 11 also can be in the interference light for acquiring each moment
The moment displacement platform present position information is acquired while intensity, uneven caused mistake when avoiding displacement platform from scanning with this
Difference.By comparing the ratio between the gap length of fixed fiber segment 8 and this two groups of stripeds, the accurate light path of object under test can be obtained
Thickness, the thickness are equal to the product of refractive index and physical thickness.At this time if it is known that the refractive index of object, then can accurately obtain object
The physical thickness of body.
The accurate calibrator of transparent material as shown in Figure 1 based on optical fiber white light interference principle, is by wide spectrum light source 1, optical fiber
Coupler 2 and 10, optical fiber power attenuator 3, three fiber port circulators 4 and 7, optical fiber collimator 5 and 9, by scanning shift platform
The speculum 6 of control, the matching length fiber segment 8 with calibrated scale, signal processing unit 11 and necessary connection optical fiber
Composition.
When system works, first by adjusting, determinand is made this time to carry out the position alignment of thickness measuring and hanging down as possible accordingly
Directly in optical fiber collimator 9.After position alignment, the distance between speculum 6 and optical fiber collimator 5 of the control of scanning shift platform are by close
To far gradually changing.During this period, signal processing unit 11 carries out real-time data acquisition.
After the distance between the speculum 6 of scanning shift platform control and optical fiber collimator 5 reach maximum, displacement platform stops
Movement, signal processing unit 11 handle collected data, to obtain the actual (real) thickness letter at the determinand position
Breath.
A kind of fiber coupling that is achieved in that in only acquisition displacement platform motion process of simple signal processing unit 11
The real time data of one output signal strength in the ports l and m of device 10.During the single pass of displacement platform, the number
According to will be there are four maximum, the reflection signal of pre-set two scales and the reflection of determinand front/rear end in corresponding measuring arm
Four moment that the light path that signal is undergone with reference optical signal respectively matches.Due in displacement platform scanning process, generating
In the period of this four interference peaks, the change of reference arm total optical path may be considered uniform and continuous.Two after institute
The ratio of a interference peaks spacing and the first two interference peaks spacing, the corresponding light path of thickness and optical fiber as at determinand test position
In between two scales light path ratio.Thickness of the determinand at this can be calculated by substituting into relevant parameter.
During system use, optical fiber power attenuator 3 can be adjusted according to the intensity difference for measuring optical signal, be ginseng
The intensity for examining optical signal is close equal, and the performance of system is improved with this.As shown in Fig. 2, the light in measuring arm will be in optical fiber
At two pre- scale makings in the section 8 and upper and lower end face of determinand generates stronger reflected light signal respectively, these optical signals will
It is extracted by signal processing unit, to calculate the precise thickness of determinand.
Claims (3)
1. a kind of calibrator based on optical fiber white light interference principle is decayed by wide spectrum light source (1), fiber coupler, optical fiber power
Device (3), three fiber port circulators, optical fiber collimator, scanning shift platform control speculum (6), have the fixed mark of length
Determine fiber segment (8), signal processing unit (11) and connection optical fiber composition, it is characterised in that：The device uses light path balance
Formula interferometer structure, in the balanced type interferometer structure, the light that is sent out from wide spectrum light source (1) is from 2 × 2 fiber couplers (2)
The incidence of the ports a after, be divided into two beams, be emitted respectively from the ports b of fiber coupler (2) and the ports c；In system with the ports b
Connected part light path be interferometer reference arm, including optical fiber power attenuator (3), three fiber port circulators (4),
Optical fiber collimator (5), the speculum (6) controlled by scanning shift platform；The part light path being connected with the ports c is the measurement of interferometer
Arm including three fiber port circulators (7), has the fixed calibration fiber segment (8) of length, optical fiber collimator (9), reference
Reference optical signal in arm eventually enters into the ports j of fiber coupler (10), and the measurement optical signal in measuring arm then enters optical fiber
The ports k of coupler (10)；So the ports the l and m output of fiber coupler (10) is reference light and the interference that measures light
Signal, the two can be obtained the precise thickness information of determinand after the demodulation by signal processing unit (11)；The measurement
There is the fixed calibration fiber segment of length, in the fiber segment before placing measured object, one section of a preset unit length in arm
Optical fiber at the both ends of this section there is catoptric arrangement, the unit length section both ends of the surface will generate reflected light signal, and by system detectio
Out, the interference signal for showing as two intrinsic spacing, is compared for the thickness with object under test；Since length is fixed
The specially treated in fiber segment (8) is demarcated, there will be part optical signals to be reflected at two scales made in advance, remainder light beam
Measured object is injected by optical fiber collimator (9).
2. a kind of calibrator based on optical fiber white light interference principle according to claim 1, it is characterised in that：The reference
The optical path regulator of arm be by optical fiber power attenuator (3), three fiber port circulators (4), optical fiber collimator (5), by sweeping
The speculum (6) for retouching displacement platform control is constituted；First by the ends e after the ports the d entrance of three fiber port circulator (4) of optical signals
Mouth is output to optical fiber collimator (5), and optical fiber collimator (5) and the speculum (6) of scanning shift platform control pass through fine adjustment, make
Obtaining the most of optical signal being emitted by optical fiber collimator (5) can return after speculum reflects again by optical fiber collimator (5)
Into optical fiber；The optical signal of return enter three fiber port circulators (4) the ports e after by the ports f export after be sent to coupling
Device (10) forms interference signal；Change the position of speculum (6) by adjusting scanning shift platform, you can change optical signal and joining
Examine the total optical path undergone in arm.
3. a kind of calibrator based on optical fiber white light interference principle according to claim 1, it is characterised in that：The survey
The light path of thick device reference arm is adjustable, with match required reflected light signal in measuring arm after light path；Due in measuring arm
In the prefabricated caliberating device of regular length so that the calibrator needn't carry out other calibration process in use, long
Comparison procedure is spent by the software program in being embedded in signal processing unit only, is by collected four reflected light signals of institute
The accurate measurement of determinand thickness can be automatically performed.
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Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN107167085B (en) * | 2017-04-25 | 2019-09-27 | 哈尔滨工程大学 | A kind of optical path self calibration apparatus for measuring thickness of thin film and measurement method altogether |
| CN110260816A (en) * | 2019-06-26 | 2019-09-20 | 湖南省鹰眼在线电子科技有限公司 | A kind of back drill hole depth measuring device and method based on white light interference |
| CN112033279B (en) * | 2020-07-24 | 2021-12-10 | 长沙麓邦光电科技有限公司 | White light interference system |
| CN115791090B (en) * | 2023-02-08 | 2023-05-05 | 武汉昊衡科技有限公司 | System and method for improving signal measurement sensitivity and polarization stability |
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Effective date of registration: 20201027 Address after: 541004 the Guangxi Zhuang Autonomous Region golden Guilin Qixing District Road No. 1 Patentee after: GUILIN University OF ELECTRONIC TECHNOLOGY Address before: 150001 Heilongjiang, Nangang District, Nantong street,, Harbin Engineering University, Department of Intellectual Property Office Patentee before: HARBIN ENGINEERING University |