CN105806231A - Thickness gauge based on optical fiber white light interference principle - Google Patents
Thickness gauge based on optical fiber white light interference principle Download PDFInfo
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- CN105806231A CN105806231A CN201610136698.9A CN201610136698A CN105806231A CN 105806231 A CN105806231 A CN 105806231A CN 201610136698 A CN201610136698 A CN 201610136698A CN 105806231 A CN105806231 A CN 105806231A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
Abstract
The invention belongs to the technical field of optical fiber, and specifically relates to a thickness gauge based on an optical fiber white light interference principle. The thickness gauge is formed by a broadband optical source 1, an optical fiber coupler, an optical fiber power attenuator 3, a three-port optical fiber circulator, an optical fiber collimator, a mirror 6 controlled by a scanning displacement bench, a calibrating optical fiber section 8 with certain length, a signal processing unit 11 and connecting optical fiber. According to the invention, the precise optical path thickness of the to-be-measured object is obtained through comparing the space length of the fixed optical fiber section and one group of stripes and the space length of the fixed optical fiber section and the other one group of stripes, and the thickness is equal to the product of refractive index and physical thickness. At that time, if the refractive index of the object is known, the physical thickness of the object can be precisely obtained.
Description
Technical field
The invention belongs to technical field of optical fiber, particularly relate to a kind of calibrator based on optical fiber white light interference principle.
Background technology
Along with science and technology and the developing rapidly of the level of production, the requirement of product quality is also improved by people day by day.At some, Product Precision is required high field of engineering technology, as optical lens is processed, aerospace material processing etc., it is required for product or product subsurface thickness are carried out strict control.So, contactless high-precision calibrator has highly important application demand.
The main method of conventional thickness measuring has Mechanical Method, capacitance method, supercritical ultrasonics technology, ray method, eddy-current method, magnetic method, optical method etc. at present.The feature of different method of testings enables them to test occasion in difference and issues the effect of waving.
Mechanical type calibrator is with a long history, and its precision depends primarily on displacement transducer, is generally contact type measurement.Published patent such as lens thickness meter [Chinese Patent Application No.: 200710201329.4], it has the advantages that simple to operate, less costly, measures scope big；Shortcoming is that precision is low, measured object has certain damage, not easily realizes kinetic measurement.
Magnetic-type calibrator is mainly used in the magnetic conductivity of matrix and measured object and differs the thickness measure in bigger situation, such as the non magnetic coating on ferromagnetism matrix, the change that the change of coating layer thickness will cause whole magnetic circuit reluctance, makes the induced potential that solenoid produces change.Published patent such as handle type coating thickness detector [Chinese Patent Application No.: 201210118794.2], it has the advantages that highly sensitive, measures scope wide, and instrument is light, simple to operate etc.；Shortcoming is to be subject to environmental factors interference, and application conditions is harsh.
Condenser type calibrator can measure the thickness of non-metallic objectsit is not a metal object.Have the advantages that measuring speed is fast, easy to operate, it is applicable to multiple measured object under certain condition；Shortcoming is contact type measurement, is subject to external electromagnetic field interference, and requires measured object surfacing etc..
Ray method is a kind of traditional method, because of lonizing radiation energy stabilization, and the instrument that this calibrator substantially can be measured as absolute thickness.Published patent such as nondestructive flaw detection thickness meter [Chinese Patent Application No.: 200910026959.1], it has the advantages that response speed is fast, can accurately and continuously measure, non-contact measurement, measured object mechanical is damaged；Shortcoming is that calibrator entirety is very heavy due to safety factors, and mechanical erection required precision is very high, and environmental factors is very sensitive, demarcates complexity, there is repetition problem of calibrating, involve great expense, harmful etc..
Optical fiber white light interference is measured technology and is widely used in recent years, and its major advantage has: noncontact, and certainty of measurement is high, and capacity of resisting disturbance is strong, and simple in construction is cheap, easy to operate etc..Adopting optical fiber white light interference principle to make calibrator, the measurement for thin transparent object thickness has obvious advantage.Published patent such as white light interference lens center thickness is measured system and method [Chinese Patent Application No.: 201410390204.0] and is a kind of calibrator applying optical fiber white light measurement technology, but its structure is more complicated, owing in its system, many places adopt mechanical displacement structure control reflecting mirror, it is readily incorporated systematic error, if wanting to obtain good measurement result, then the measure of precision of system building and operation is required very strict, make the foundation of system and maintenance cost significantly high.
Summary of the invention
It is an object of the invention to provide a kind of simple and compact for structure, easy to operate, calibrator based on optical fiber white light interference principle that certainty of measurement is high.
The object of the present invention is achieved like this:
A kind of calibrator based on optical fiber white light interference principle, the reflecting mirror 6 that controlled by wide spectrum light source 1, fiber coupler, optical fiber power attenuator 3, three fiber port circulator, optical fiber collimator, scanning shift platform, there is the fixing demarcation fiber segment 8 of length, signal processing unit 11 and connect optical fiber and form, this device have employed light path balanced type interferometer structure, in this balanced type interferometer structure, the light sent from wide spectrum light source 1 is after a port incidence of 2 × 2 fiber couplers 2, it is divided into two bundles, respectively from the b port of fiber coupler 2 and c port outgoing；The reference arm that part light path is interferometer being connected with b port in system, including optical fiber power attenuator 3, three fiber port circulator 4, optical fiber collimator 5, the reflecting mirror 6 that controlled by scanning shift platform；The measurement arm that part light path is interferometer being connected with c port, including three fiber port circulators 7, scanning shift the platform reflecting mirror 6 controlled, there is the fixing demarcation fiber segment 8 of length, optical fiber collimator 9, reference optical signal in reference arm eventually enters into the j port of fiber coupler 10, and the optical signal of measuring measured in arm then enters the k port of fiber coupler 10；So being reference light and measure interference of light signal of l and the m port output of fiber coupler 10, the two is by obtaining the precise thickness information of determinand after the demodulation of signal processing unit 11.
The optical path regulator of described reference arm is to be made up of optical fiber power attenuator 3, three fiber port circulator 4, optical fiber collimator 5, the reflecting mirror 6 that controlled by scanning shift platform；First the d port of optical signals three fiber port circulator 4 is exported optical fiber collimator 5 by e port after entering, the reflecting mirror 6 that optical fiber collimator 5 and scanning shift platform control is through fine adjustment so that can return in optical fiber again by optical fiber collimator 5 after being reflected mirror reflection by most of optical signal of optical fiber collimator 5 outgoing；The optical signal returned is sent to bonder 10 after being exported by f port after entering the e port of three fiber port circulators 4, forms interference signal；Change the position of reflecting mirror 6 by regulating scanning shift platform, the total optical path that optical signal experiences in reference arm can be changed.
The calibrated scale of the described Unit Scale measured in arm, in placing the fiber segment before measured object, one section of optical fiber of a preset unit length, at the two ends of this section, there is catoptric arrangement, these unit length section both ends of the surface will produce reflected light signal, and detected by system, show as the interference signal of two intrinsic spacing, contrast for the thickness with object under test.
The light path of described measuring thickness device reference arm is adjustable, measures, to mate, the light path that in arm, required reflected light signal is gone through；Owing to measuring the prefabricated caliberating device of regular length in arm, make this calibrator in use needn't carry out other calibration process, length comparison procedure by be embedded in signal processing unit only in software program, four reflected light signals passing through to collect can be automatically performed the accurate measurement of determinand thickness.
The beneficial effects of the present invention is:
The present invention, by relatively more fixing fiber segment and the ratio of the gap length of these two groups of stripeds, just can obtain the accurate light path thickness of object under test, and this thickness is equal to the product of refractive index with physical thickness.Now if it is known that the refractive index of object, then can accurately obtain the physical thickness of object.
Accompanying drawing explanation
Fig. 1 is based on the structured flowchart of the accurate calibrator of transparent material of optical fiber white light interference principle.
Fig. 2 is that the matching length fiber segment 8 with on-line automatic calibrating function is connected with optical fiber collimator 9 tail end and determinand schematic diagram.
Detailed description of the invention
Below in conjunction with accompanying drawing, the present invention is described further.
The invention discloses a kind of calibrator based on optical fiber white light interference sensing principle.Reflecting mirror 6 that it is controlled by wide spectrum light source 1, fiber coupler 2 and 10, optical fiber power attenuator 3, three fiber port circulator 4 and 7, optical fiber collimator 5 and 9, scanning shift platform, the connection optical fiber with the fixing demarcation fiber segment 8 of length, signal processing unit 11 and necessity form.The present invention can be used for the noncontact of thin transparent object or object table layer thickness and accurately measures.Present configuration is simple, and less costly, measuring speed is fast, precision is high.Can be widely used for the product fields of measurement in commercial production.
As it is shown in figure 1, this optical fiber white light interference formula calibrator is made up of wide spectrum light source 1, fiber coupler 2 and 10, optical fiber power attenuator 3, three fiber port circulator 4 and 7, optical fiber collimator 5 and 9, scanning shift the platform reflecting mirror 6 controlled, the connection optical fiber with the fixing demarcation fiber segment 8 of length, signal processing unit 11 and necessity.
This measuring thickness device have employed light path balanced type interferometer structure.In this balanced type interferometer structure, the light sent from wide spectrum light source 1, after a port incidence of 2 × 2 fiber couplers 2, is divided into two bundles, respectively from the b port of fiber coupler 2 and c port outgoing.The part light path that is connected with b port in system (including devices such as optical fiber power attenuator 3, three fiber port circulator 4, optical fiber collimator 5, the reflecting mirrors 6 that controlled by scanning shift platform) is called the reference arm of interferometer；The part light path that is connected with c port (including three fiber port circulators 7, the reflecting mirror 6 controlled by scanning shift platform, has the devices such as the fixing demarcation fiber segment 8 of length, optical fiber collimator 9) and is called the measurement arm of interferometer.Reference optical signal in reference arm eventually enters into the j port of fiber coupler 10, and the optical signal of measuring measured in arm then enters the k port of fiber coupler 10.So being reference light and measure interference of light signal of l and the m port output of fiber coupler 10, the two is by obtaining the precise thickness information of determinand after the demodulation of signal processing unit 11.
In reference arm, optical signal first passes through optical fiber power attenuator 3, enters three fiber port circulators 4 from d port afterwards, is then entered optical fiber collimator 5 by the e port of three fiber port circulators 4.The reflecting mirror 6 that scanning shift platform controls, through fine adjustment, makes it from most of luminous reflectance back into optical fibers collimator 5 of optical fiber collimator 5 outgoing.Turn again to the optical signal in optical fiber collimator 5 subsequently enter the e port of three fiber port circulators 4 and export from f port.Owing to the relative position of reflecting mirror 6 with optical fiber collimator 5 can be controlled by scanning shift platform, so the total optical path scanning shift platform that the reference optical signal in reference arm experiences regulates.In scope that light path can change i.e. displacement platform scanning process two times (due to light round trips between) of optical fiber collimator 5 and the spacing of reflecting mirror 6.
In measuring arm, first optical signal enters three fiber port circulators 7 from g port, then by the h port outgoing of three fiber port circulators 7, owing to having the special handling in the matching length fiber segment 8 of calibrated scale, part optical signals will be had to be reflected at two the scale places made in advance, remainder light beam injects measured object by optical fiber collimator 9, and the front/rear end at measured object also will produce reflected light signal respectively, and they major parts are returned in system light path by optical fiber collimator 9.All of reflected light signal all will enter three fiber port circulator 7h ports and from i port export.
Measuring the reflected light signal measuring two scales in optical signals fiber segment 8 in arm and four kinds of heterogeneities of reflected light signal of section before and after measured object, the total optical path that they experience in measuring arm is different.In reference arm in the process of displacement platform scanning, when the total optical path that the position of displacement platform just makes a certain kind that the total optical path that reference optical signal experiences is exactly equal to measure in arm in four kinds of compositions experience, it is called that the two light path matches, according to white light interference theory, reference optical signal and the signal measuring optical signal interference are up to a maximum, interference peaks namely occur.
In reference arm in the scan period of displacement platform, the total optical path of reference optical signal experience will mate successively with the four kinds of compositions measured in optical signal.So at signal processing unit, it will record the interference peaks that scanning shift platform produces when four diverse locations.Owing to the first two interference peaks is to be produced by the reflected signal of two scales made in advance in fiber segment 8, and the actual pitch between the two scale is known, again because scanning shift platform changes the process uniformly continuous of reference arm total optical path.Therefore can pass through, by the spacing of latter two interference peaks of fault plane reflection generation before and after measured object and the ratio of the spacing of the first two interference peaks, to calculate the actual (real) thickness of measured object.
According to white light interference theory, the intensity of two optical signals closer to, then the visibility of interference fringes that they produce when interfering is more big.So, control the light intensity of reference optical signal by regulating optical fiber power attenuator 3 in reference arm, it is possible to improve systematic function.
The signal processing unit 11 of native system can only extract l and the m port Zhong mono-road interference light signal of fiber coupler 10 and be demodulated.By above-mentioned analysis, only need to record interference light signal in displacement platform scanning process reaches the position of extreme value for four times, again through known calibrated length, can calculate the thickness of measured object.The premise of this kind of method be displacement platform in scanning process to the change uniformly continuous of total optical path in reference arm.Signal processing unit 11 also can gather this moment displacement platform present position information, the uneven error caused when avoiding displacement platform to scan with this while gathering the interference light intensity in each moment.By relatively more fixing fiber segment 8 and the ratio of the gap length of these two groups of stripeds, just obtaining the accurate light path thickness of object under test, this thickness is equal to the product of refractive index with physical thickness.Now if it is known that the refractive index of object, then can accurately obtain the physical thickness of object.
As shown in Figure 1 based on the accurate calibrator of the transparent material of optical fiber white light interference principle, it is made up of the connection optical fiber of wide spectrum light source 1, fiber coupler 2 and 10, optical fiber power attenuator 3, three fiber port circulator 4 and 7, optical fiber collimator 5 and 9, scanning shift the platform reflecting mirror 6 controlled, the matching length fiber segment 8 with calibrated scale, signal processing unit 11 and necessity.
During system work, first pass through corresponding adjustment, make determinand this time carry out the position alignment of thickness measuring and be perpendicular to optical fiber collimator 9 as far as possible.After position alignment, the distance between reflecting mirror 6 and optical fiber collimator 5 that scanning shift platform controls gradually changes from the near to the remote.During this period, signal processing unit 11 carries out real-time data acquisition.
When scanning shift platform control reflecting mirror 6 and optical fiber collimator 5 between distance reach maximum after, displacement platform stop motion, the data collected are processed by signal processing unit 11, thus obtaining the actual (real) thickness information of this position of determinand.
A kind of real time data of the output signal strength being achieved in that only gathered in l and the m port of the fiber coupler 10 in displacement platform motor process of simple signal processing unit 11.In the single pass process of displacement platform, these data will have four maximum, four moment that the light path that the corresponding reflected signal measuring two scales pre-set in arm and determinand front/rear end reflected signal experience respectively matches with reference optical signal.Due in displacement platform scanning process, within the time period producing these four interference peaks, the change of reference arm total optical path be may be considered uniform and continuous print.So the ratio of latter two interference peaks spacing and the first two interference peaks spacing, it is in light path corresponding to determinand test position place thickness and optical fiber the ratio of light path between two scales.Substitute into relevant parameter and can calculate the thickness at this place of determinand.
In system use procedure, optical fiber power attenuator 3 can be regulated according to the intensity difference measuring optical signal, be that the intensity of reference optical signal is close equal, improve the performance of system with this.As in figure 2 it is shown, the upper and lower end face at pre-for two in fiber segment 8 scale making place and determinand is produced stronger reflected light signal by light in measurement arm respectively, these optical signals will be extracted by signal processing unit, thus calculating the precise thickness of determinand.
Claims (4)
1. the calibrator based on optical fiber white light interference principle, by wide spectrum light source (1), fiber coupler, optical fiber power attenuator (3), three fiber port circulators, optical fiber collimator, the reflecting mirror (6) that scanning shift platform controls, there is the demarcation fiber segment (8) that length is fixing, signal processing unit (11) and connection optical fiber composition, it is characterized in that: this device have employed light path balanced type interferometer structure, in this balanced type interferometer structure, the light sent from wide spectrum light source (1) is after a port incidence of 2 × 2 fiber couplers (2), it is divided into two bundles, respectively from the b port of fiber coupler (2) and c port outgoing；The reference arm that part light path is interferometer being connected with b port in system, including optical fiber power attenuator (3), three fiber port circulators (4), optical fiber collimator (5), the reflecting mirror (6) that controlled by scanning shift platform；The measurement arm that part light path is interferometer being connected with c port, including three fiber port circulators (7), scanning shift the platform reflecting mirror 6 controlled, there is the fixing demarcation fiber segment (8) of length, optical fiber collimator (9), reference optical signal in reference arm eventually enters into the j port of fiber coupler (10), measures the measurement optical signal in arm and then enters the k port of fiber coupler (10)；So being reference light and measure interference of light signal of l and the m port output of fiber coupler (10), the two is by obtaining the precise thickness information of determinand after the demodulation of signal processing unit (11).
2. a kind of calibrator based on optical fiber white light interference principle according to claim 1, it is characterised in that: the optical path regulator of described reference arm is to be made up of optical fiber power attenuator (3), three fiber port circulators (4), optical fiber collimator (5), the reflecting mirror (6) that controlled by scanning shift platform；The d port of optical signals three fiber port circulator (4) is first exported optical fiber collimator (5) by e port after entering, the reflecting mirror (6) that optical fiber collimator (5) and scanning shift platform control is through fine adjustment so that can return in optical fiber again by optical fiber collimator (5) after being reflected mirror reflection by most of optical signal of optical fiber collimator (5) outgoing；The optical signal returned is sent to bonder (10) after being exported by f port after entering the e port of three fiber port circulators (4), forms interference signal；Change the position of reflecting mirror (6) by regulating scanning shift platform, the total optical path that optical signal experiences in reference arm can be changed.
3. a kind of calibrator based on optical fiber white light interference principle according to claim 1, it is characterized in that: the calibrated scale of the described Unit Scale measured in arm, in placing the fiber segment before measured object, one section of optical fiber of a preset unit length, having catoptric arrangement at the two ends of this section, these unit length section both ends of the surface will produce reflected light signal, and be detected by system, show as the interference signal of two intrinsic spacing, contrast for the thickness with object under test.
4. a kind of calibrator based on optical fiber white light interference principle according to claim 1, it is characterised in that: the light path of described measuring thickness device reference arm is adjustable, measures, to mate, the light path that in arm, required reflected light signal is gone through；Owing to measuring the prefabricated caliberating device of regular length in arm, make this calibrator in use needn't carry out other calibration process, length comparison procedure by be embedded in signal processing unit only in software program, four reflected light signals passing through to collect can be automatically performed the accurate measurement of determinand thickness.
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| CN107167085A (en) * | 2017-04-25 | 2017-09-15 | 哈尔滨工程大学 | A kind of light path self calibration apparatus for measuring thickness of thin film and measuring method altogether |
| CN110260816A (en) * | 2019-06-26 | 2019-09-20 | 湖南省鹰眼在线电子科技有限公司 | A kind of back drill hole depth measuring device and method based on white light interference |
| CN112033279A (en) * | 2020-07-24 | 2020-12-04 | 长沙麓邦光电科技有限公司 | White light interference system |
| CN115791090A (en) * | 2023-02-08 | 2023-03-14 | 武汉昊衡科技有限公司 | System and method for improving signal measurement sensitivity and polarization stability |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115791090A (en) * | 2023-02-08 | 2023-03-14 | 武汉昊衡科技有限公司 | System and method for improving signal measurement sensitivity and polarization stability |
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Effective date of registration: 20201027 Address after: 541004 the Guangxi Zhuang Autonomous Region golden Guilin Qixing District Road No. 1 Patentee after: GUILIN University OF ELECTRONIC TECHNOLOGY Address before: 150001 Heilongjiang, Nangang District, Nantong street,, Harbin Engineering University, Department of Intellectual Property Office Patentee before: HARBIN ENGINEERING University |