CN108592829A - A kind of measuring device and method of non-cpntact measurement deep hole inside surface roughness - Google Patents
A kind of measuring device and method of non-cpntact measurement deep hole inside surface roughness Download PDFInfo
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- CN108592829A CN108592829A CN201810250651.4A CN201810250651A CN108592829A CN 108592829 A CN108592829 A CN 108592829A CN 201810250651 A CN201810250651 A CN 201810250651A CN 108592829 A CN108592829 A CN 108592829A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/30—Measuring arrangements characterised by the use of optical techniques for measuring roughness or irregularity of surfaces
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Abstract
The present invention provides a kind of measuring devices and method of non-cpntact measurement deep hole inside surface roughness, the device includes motion-control module, laser, coupling device, launching fiber, fibre optic sensor arra, Photoelectric Detection module, data collecting card and computer, motion-control module traction optical fiber sensor array, which is listed in hole to be measured, to be moved, and fibre optic sensor arra includes multiple fibre optical sensors；Laser emits laser beam simultaneously, coupled device is passed to main launching fiber, using multiple fibre optical sensor is reached from launching fiber, right angle microprism makes on laser vertical irradiation to the inner surface for waiting for gaging hole, through waiting for that the laser of the surface scattering of gaging hole is received by reception optical fiber, and converted through Photoelectric Detection resume module, then through data collecting card, the calculating and display of roughness are finally realized by computer.Surface roughness on energy of the invention while four busbares of depth measurement internal surface of hole, can effectively reject data point when misalignment measurement, to improve the measuring precision.
Description
Technical field
The present invention relates to product quality detection technique field more particularly to a kind of non-cpntact measurement deep hole inside surface roughnesses
Measuring device and method.
Background technology
Surface roughness largely affects the property of workpiece as one of characterization most important parameter of surface quality
Can, especially in the numerous areas such as optics, machinery, biomedical engineering and aerospace, measurement and the evaluation one of surface roughness
It is directly the important subject in industry.Existing most of surface roughness measuring methods are primarily directed to plane, outer surface
Detection, the research of the inner surface especially more busbar noncontact measurements of the full depth of deep hole inside surface roughness is because of its diameter depth ratio
Big and inner space is small, still remains the problems such as of high cost, precision is low, operation difficulty is big, efficiency is low.
Currently, the detection technique of common inside surface roughness mainly has mechanical tracer method, visual detection method, light scattering
Method.Wherein Mechanical stylus measurement method because its good operating stability, resolution ratio it is higher, be most widely used in industrial detection.
There is scholar to have developed a kind of portable timepiece surface roughness automatic detection device based on Mechanical stylus method, can realize deep hole inner surface
The measurement of roughness on more busbares, but it that there is measurement efficiencies is relatively low, can scratch the limitations such as soft metal surface.Vision is examined
For survey method as a kind of contactless measurement, detection efficiency is high, can obtain the inner surface three-dimensional appearance of surveyed workpiece, but
It is its resolution ratio also to need further to be promoted with measurement accuracy, and cost is higher, there are a foregone conclusions for the application in industrial detection
Limit.Fibre Optical Sensor inside surface roughness measuring technique based on light scattering method is since good economy performance, reliability are high, multidigit in recent years
Scholar studies technique, and Zhang Tao et al. exists《Sichuan University's journal》It delivers《Inside Surface Roughometer》,
Probe can be deep into hole by the device, carry out regional roughness concentration, but its optical texture is more complex and control is smart
It spends more demanding, so measuring speed is slower, is only suitable for experimentally measuring, industrial detection application is restricted.
Invention content
In response to the deficiencies in the existing technology, the present invention provides a kind of surveys of non-cpntact measurement deep hole inside surface roughness
Device and method, while the roughness on a plurality of busbar of full depth survey deep hole inner surface are measured, there is at low cost, motion control
It is required that feature low, that detection efficiency is high and highly practical.
The present invention achieves the above technical objects by the following technical means.
A kind of measuring device of non-cpntact measurement deep hole inside surface roughness, including motion-control module, laser, coupling
Device, fibre optic sensor arra, Photoelectric Detection module, data collecting card and computer；
The fibre optic sensor arra includes gauge head and multiple fibre optical sensors, and the gauge head is cylindric, the gauge head
It is connect with the motion-control module that can control its linear movement, is equipped with multiple sensor location holes, institute in the gauge head in an axial direction
It is through-hole to state sensor location hole, and multiple sensor location holes are uniformly distributed circumferentially, and respectively with each Fibre Optical Sensor
Device corresponds；
The fibre optical sensor is transceiver structure, including optical fiber sensor head, reception optical fiber, from launching fiber, right angle
Microprism and fixator, the reception optical fiber and one end from launching fiber are passed by fixator convergence for optical fiber all the way and optical fiber
Feel one end connection of head, the right angle microprism is installed on the other end of optical fiber sensor head, multiple other ends from launching fiber
It is main launching fiber by fixator convergence
One end of the coupling device is connect with laser, and the other end is connect with main launching fiber, and what laser was sent out swashs
Light beam reaches main launching fiber by coupling device, is further divided into multichannel respectively by entering corresponding Fibre Optical Sensor from launching fiber
Head；
The other end of the reception optical fiber is connect with Photoelectric Detection module, the Photoelectric Detection module, data collecting card and
Computer is sequentially connected electrically；
Preferably, it is described from launching fiber use core diameter 10um, numerical aperture be 0.14 quartz material single mode optical fiber,
The reception optical fiber uses core diameter 200um, the multimode fibre for the quartz material that numerical aperture is 0.22.
Preferably, the number of the fibre optical sensor is four.
Preferably, it is 980nm that the laser, which sends out wavelength, and power is the laser beam of 20mW.
Preferably, the coupling device FC flanges, the FC flanges include male seat and female seat, the female seat peace of the FC flanges
On the exit ports of laser, the male seat of the FC flanges is installed on main launching fiber one end.
Preferably, the optical fiber sensor head and sensor location hole are interference fitted, the test surface of the right angle microprism with
The radial direction that gauge head corresponds to positioning holes center excessively is vertical.
A kind of method of non-cpntact measurement deep hole inside surface roughness, including：
Motion-control module traction optical fiber sensor array, which is listed in hole to be measured, to be moved, and the fibre optic sensor arra includes more
A fibre optical sensor axial arranged along hole to be measured；
The stable laser beam of laser transmitting simultaneously, coupled device is passed to main launching fiber, using multiple from hair
It penetrates optical fiber and reaches corresponding fibre optical sensor, the optical fiber sensor head end of each fibre optical sensor is fitted with right angle microprism, directly
Angle prism makes on laser vertical irradiation to the inner surface for waiting for gaging hole；
Laser after the surface scattering after gaging hole is received by reception optical fiber；
The optical signal that reception optical fiber receives is converted into voltage signal through Photoelectric Detection resume module, then through data collecting card
The A/D conversions for realizing voltage signal, are finally realized the calculating and display of roughness by computer.
Preferably, the motion-control module traction optical fiber sensor array is listed in the speed moved in hole to be measured less than 5mm/
s。
Preferably, the formula of the computer calculating roughness is：
Wherein, RaTested rough inner surface angle value；U is the output voltage of the measuring device；A, b are calibration coefficient；C is
Compensation factor.
Beneficial effects of the present invention：
1) present invention uses fibre optic sensor arra, can rapidly and efficiently realize the full depth of deep hole inside surface roughness parameter
Spend the on-line measurement on more busbares.
2) fibre optic sensor arra of the invention includes four fibre optical sensors disposed in parallel, can survey simultaneously and wait for gaging hole
Surface roughness data on the different busbares of inner surface four, can effectively reject data point when misalignment measurement, be to improve
Unified test accuracy of measurement.
Description of the drawings
Fig. 1 is a kind of composition frame chart of the measuring device of non-cpntact measurement deep hole inside surface roughness of the present invention.
Fig. 2 is a kind of composed structure signal of measuring device of non-cpntact measurement deep hole inside surface roughness of the present invention
Figure.
Fig. 3 is the structural schematic diagram of fibre optic sensor arra of the present invention.
Fig. 4 is the end face schematic diagram of gauge head of the present invention.
Fig. 5 is optical fibre sensor structure schematic diagram of the present invention.
Fig. 6 is the composed structure schematic diagram for the test device that the present invention measures fibre optical sensor characteristic.
Fig. 7 is that fibre optical sensor of the present invention is exported with measurement distance variation influence.
Fig. 8 is the roughness change curve of fibre optical sensor characteristic test device of the present invention actual measurement.
In figure：
1. motion-control module；2. laser；3. coupling device；4. fibre optic sensor arra；5. Photoelectric Detection module；6.
Data collecting card；7. computer；8. fibre optical sensor；801. right angle microprisms；8011. test surface；802. reception optical fiber；803.
Optical fiber sensor head；804. from launching fiber；805. main launching fibers；806. fixator；9. gauge head；901. sensor location holes；
10. precise mobile platform；；11. waiting for gaging hole.
Specific implementation mode
Below in conjunction with the accompanying drawings and specific embodiment the present invention is further illustrated, but protection scope of the present invention is simultaneously
It is without being limited thereto.
As depicted in figs. 1 and 2, the measuring device of a kind of non-cpntact measurement deep hole inside surface roughness of the present invention,
Including motion-control module 1, laser 2, coupling device 3, fibre optic sensor arra 4, Photoelectric Detection module 5, data collecting card 6
With computer 7；
The fibre optic sensor arra 4 includes gauge head 9 and four fibre optical sensors 8, and the effect of gauge head 9 is mainly fixed
Fibre optical sensor 8 can carry out stable low-speed motion under the traction of motion-control module 1.The structure of four fibre optical sensors 8
Parameter is identical, as shown in figure 5, the fibre optical sensor 8 is transceiver structure, including optical fiber sensor head 803, reception optical fiber
802, from launching fiber 804, right angle microprism 801 and fixator 806, the reception optical fiber 802 with from the one of launching fiber 804
End is connect for optical fiber all the way and by the convergence of fixator 806 with one end of optical fiber sensor head 803, multiple from launching fiber 804
The other end is main launching fiber 805 by the convergence of fixator 806, and the right angle microprism 801 is installed on optical fiber sensor head 803
The other end, 801 size of right angle microprism are 2mm × 2mm × 2mm, and inclined-plane plated film ensures that light is anti-on prismatic reflection face
It penetrates rate and is more than 98%, and 803 end face of optical fiber sensor head and right angle microprism 801 couple using UV optical cements, height
Translucency can also greatly reduce the energy loss that emergent light is brought by prism, can not consider.
As shown in Figure 3 and Figure 4, the gauge head 9 is cylindric, the gauge head 9 and the movement control that can control its linear movement
Molding block 1 connects, and sets that there are four sensor location holes 901 in the gauge head 9 in an axial direction, and the sensor location hole 901 is logical
Hole, four sensor location holes 901 are uniformly distributed circumferentially, and are corresponded respectively with each fibre optical sensor 8.Optical fiber
Sensing head 803 is interference fitted with sensor location hole 901, and to reduce and avoid array, optical fiber sensor head 803 loosens when moving
Or the influence to fall off to measurement.The test surface 8011 of the right angle microprism 801 corresponds to 901 center of location hole excessively with gauge head 9
Radial direction A it is vertical so that the transmitting luminous energy of fibre optical sensor 8 impinges perpendicularly on the inner wall of hole.
Coupling device 3 is FC flanges, and the FC flanges include male seat and female seat, and the female seat of the FC flanges is mounted on laser
On the exit ports of device 2, the male seat of the FC flanges is installed on 805 one end of main launching fiber, and optical signal is reached Fibre Optical Sensor
First 803.Main launching fiber 805 concentrates in an optical cable, is driven by laser 2, is further ensured that except quilt from light source
The consistency of other conditions other than measurement.
The reception optical fiber 802 is connect with Photoelectric Detection module 5, the Photoelectric Detection module 5, data collecting card 6 and meter
Calculation machine 7 is electrically connected；Photoelectric Detection module 5 is made of multiple PIN diodes with photoelectric detective circuit, the response wave of PIN diode
It grows other than visible-range, the interference that natural light is brought can be effectively reduced；Photoelectric detective circuit is by IV conversion modules, amplification
Module, biasing zeroing module composition, wherein what IV conversion module circuits were exported the PIN diode using T-type circuit structure
Current signal is converted to voltage signal, and amplification module circuit carries out voltage signal amplification, amplification using reverse amplification circuit structure
Adjustable gain, biasing zeroing module generate pressure difference using adjustable resistance partial pressure and to the PIN diode, IV conversion modules and put
The drift that big module generates compensates.
Laser 2 sends out the infrared laser signal of a branch of power stability, wavelength 980nm, power 20mW, coupled dress
It sets 3 and is coupled into and become owner of that launching fiber 805 is latter to be divided into four and reach four roads respectively from launching fiber 804, the laser of four tunnels outgoing
, it can be achieved that simultaneously to internal surface of hole 4 on vertical irradiation to the inner surface for waited for gaging hole 11 after being deflected using right angle microprism 801
Roughness concentration on busbar.
The position d of sensor location hole 901 in various sizes of gauge head 91And be not fixed, it is determined by optimum measurement distance d
It is fixed, the relationship of the two d1=d-1, wherein d11.5mm is had to be larger than, therefore d also has to be larger than 2.5mm.And optimum measurement distance d
It is related with the characteristic of fibre optical sensor 8, it is therefore desirable to which that optimum measurement distance is determined by the characteristic test experiment of fibre optical sensor 8
D, and then determine the position d of the sensor location hole 901 in gauge head1.As shown in fig. 6, fibre optical sensor characteristic test device makes
The movement of single fibre optical sensor 8 is controlled with precise mobile platform 10, the coupled device 3 of laser and send that laser 2 emits
Optical fiber reaches fibre optical sensor 8, perpendicular to the inner surface for waiting for gaging hole 11, the light of inner surface scattering after right angle microprism 801
Photoelectric Detection module 5 is reached after received optical fiber 802, is calculated and be shown by computer 7 after then being converted by data collecting card 6.
For when measuring the inside surface roughness in the apertures 12mm, flow specific embodiment party selected optimum measurement distance d
Formula is as follows：
Step 1：It is 0.1 μm to select aperture 12mm, roughness, and 0.2 μm, 0.4 μm, 0.8 μm is ground endoporus sample block group；
Step 2：Three-dimensional precise mobile platform 10 controls fibre optical sensor 8 and moves, and mobile 0.1mm is as a data every time
Average treatment is done in collection point, single measurement 5 times, draws surface RaTest device at=0.1 μm, 0.2 μm, 0.4 μm, 0.8 μm
Output is with operating distance change curve, as shown in Figure 7.Characteristic test device output changes with measurement distance in Fig. 7 influences song
The effect of line is to analyze the distance sensitive characteristic of fibre optical sensorMeasurement distance d is from the data on 0~2.5mm in Fig. 7
The fibre optical sensor vertical irradiation for not installing prism accordingly grinds endoporus sample block group and measures, and the data since 2.5mm are to load onto rib
The fibre optical sensor of mirror measures.
Step 3：According to step 2, characteristic test device when drawing measurement distance d=2.6mm, 2.8mm, 3.0mm, 3.2mm
Output is with roughness change curve, as shown in figure 8, effect is to analyze the roughness sensitivity characteristic of fibre optical sensorI.e.
The slope of curve.Fibre optical sensor characteristic test device is exported with curved surface roughness relational expression,
U≈a·exp[b·Ra 2]+c
Wherein, RaTested rough inner surface angle value；U is device output voltage；A, b are calibration coefficient；C is compensation factor.
Step 4：Comprehensive analysisWithFibre optical sensor 8 needs smaller when measuring inside surface roughnessWith compared with
BigTherefore optimum measurement distance is determined as 2.8mm.
U-R when corresponding measurement distance 2.8mm is also obtained according to step 3aFormula, it is as follows, obtain fibre optical sensor characteristic
Test device output voltage U and roughness value RaBetween conversion.
U≈0.4714·exp[-13.85·Ra 2]+0.2483
It converts to above formula, you can obtain the corresponding surface roughness value R of device output Ua, roughness RaCalculating formula
A kind of method of non-cpntact measurement deep hole inside surface roughness of the present invention, including：
1 traction optical fiber sensor array 4 of motion-control module is waiting for moving in gaging hole 11, the fibre optic sensor arra packet
Include multiple fibre optical sensors axial arranged along deep hole；
Laser 2 emits stable laser beam simultaneously, and coupled device 2 is passed to main launching fiber 805, using multiple
Fibre optical sensor 8 is reached from launching fiber 804,803 end of optical fiber sensor head of fibre optical sensor 8 is equipped with right angle microprism
801, right-angle prism 801 makes on laser vertical irradiation to the inner surface for waiting for gaging hole 11；
It is received by reception optical fiber 802 through the laser after the scattering of the inner surface of gaging hole 11；
The optical signal that reception optical fiber 802 receives handles through Photoelectric Detection module 5 and is converted into voltage signal, is then adopted through data
Truck 6 realizes the A/D conversions of voltage signal, and the calculating and display of roughness are finally realized by computer 7.
When test, 1 traction optical fiber sensor array 4 of motion-control module is less than 5mm/ in the speed for waiting for moving in gaging hole 11
S, to meet the quick measurement request of full depth.
Further, the formula of the calculating of the computer 7 roughness is：
Wherein, RaTested rough inner surface angle value；U is a kind of non-cpntact measurement deep hole inside surface roughness of the present invention
Measuring device output voltage；A, b are calibration coefficient；C is compensation factor.
The embodiment is the preferred embodiments of the present invention, but present invention is not limited to the embodiments described above, not
Away from the present invention substantive content in the case of, those skilled in the art can make it is any it is conspicuously improved, replace
Or modification all belongs to the scope of protection of the present invention.
Claims (9)
1. a kind of measuring device of non-cpntact measurement deep hole inside surface roughness, which is characterized in that including motion-control module
(1), laser (2), coupling device (3), fibre optic sensor arra (4), Photoelectric Detection module (5), data collecting card (6) and meter
Calculation machine (7)；
The fibre optic sensor arra (4) includes gauge head (9) and multiple fibre optical sensors (8), the gauge head (9) be it is cylindric,
The gauge head (9) connect with the motion-control module (1) that can control its linear movement, is equipped in an axial direction in the gauge head (9) more
A sensor location hole (901), the sensor location hole (901) are through-hole, and multiple sensor location holes (901) are along week
To being uniformly distributed, and corresponded respectively with each fibre optical sensor (8)；
The fibre optical sensor (8) is transceiver structure, including optical fiber sensor head (803), reception optical fiber (802), from transmitting
Optical fiber (804), right angle microprism (801) and fixator (806), the reception optical fiber (802) with from the one of launching fiber (804)
End is connect for optical fiber all the way and with one end of optical fiber sensor head (803), the right angle microprism by fixator (806) convergence
(801) it is installed on the other end of optical fiber sensor head (803), multiple other ends from launching fiber (804) pass through fixator (806)
Convergence is main launching fiber (805)；
One end of the coupling device (3) is connect with laser (2), and the other end is connect with main launching fiber (805), laser
(2) laser beam sent out reaches main launching fiber (805) by coupling device (3), is further divided into multichannel and passes through respectively from transmitting light
Fine (804) enter corresponding optical fiber sensor head (803)；
The other end of the reception optical fiber (802) is connect with Photoelectric Detection module (5), and the Photoelectric Detection module (5), data are adopted
Truck (6) and computer (7) are sequentially connected electrically.
2. the measuring device of non-cpntact measurement deep hole inside surface roughness according to claim 1, which is characterized in that described
Core diameter 10um, the single mode optical fiber for the quartz material that numerical aperture is 0.14, the reception optical fiber are used from launching fiber (804)
(802) core diameter 200um, the multimode fibre for the quartz material that numerical aperture is 0.22 are used.
3. the measuring device of non-cpntact measurement deep hole inside surface roughness according to claim 2, which is characterized in that described
The number of fibre optical sensor (8) is four.
4. the measuring device of non-cpntact measurement deep hole inside surface roughness according to claim 1, which is characterized in that described
It is 980nm that laser (2), which sends out wavelength, and power is the laser beam of 20mW.
5. the measuring device of non-cpntact measurement deep hole inside surface roughness according to claim 1, which is characterized in that described
Coupling device (3) is FC flanges, and the FC flanges include male seat and female seat, and the female seat of the FC flanges is mounted on laser (2)
Exit ports on, the male seat of the FC flanges is installed on main launching fiber (805) one end.
6. the measuring device of non-cpntact measurement deep hole inside surface roughness according to claim 1, which is characterized in that described
Optical fiber sensor head (803) is interference fitted with sensor location hole (901), the test surface (8011) of the right angle microprism (801)
The radial direction A for corresponding to location hole (901) center excessively with gauge head (9) is vertical.
7. a kind of method of non-cpntact measurement deep hole inside surface roughness, which is characterized in that including：
Motion-control module (1) traction optical fiber sensor array (4) is waiting for moving in gaging hole (11), the fibre optic sensor arra
The axial arranged fibre optical sensor of gaging hole (11) is waited for including multiple edges；
The stable laser beam of laser (2) transmitting simultaneously, coupled device (2) is passed to main launching fiber (805), using more
It is a to reach corresponding fibre optical sensor (8), optical fiber sensor head (803) end of each fibre optical sensor (8) from launching fiber (804)
It is fitted with right angle microprism (801), right-angle prism (801) makes on laser vertical irradiation to the inner surface for waiting for gaging hole (11)；
It is received by reception optical fiber (802) through the laser after the surface scattering of gaging hole (11)；
The optical signal that reception optical fiber (802) receives handles through Photoelectric Detection module (5) and is converted into voltage signal, is then adopted through data
Truck (6) realizes the A/D conversions of voltage signal, and the calculating and display of roughness are finally realized by computer (7).
8. the method for non-cpntact measurement deep hole inside surface roughness according to claim 7, which is characterized in that the movement
Control module (1) traction optical fiber sensor array (4) is less than 5mm/s in the speed for waiting for moving in gaging hole (11).
9. the method for non-cpntact measurement deep hole inside surface roughness according to claim 6, which is characterized in that the calculating
Machine (7) calculate roughness formula be：
Wherein, RaTested rough inner surface angle value；U is the output voltage of the measuring device；A, b are calibration coefficient；C is compensation
The factor.
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| CN110779473A (en) * | 2019-10-11 | 2020-02-11 | 深圳市乐业科技有限公司 | Safe and reliable's multi-functional laser check out test set |
| CN112762861A (en) * | 2019-11-04 | 2021-05-07 | 聊城大学 | Multi-core optical fiber sensing assembly and multi-core optical fiber sensing system |
| CN113310439A (en) * | 2021-05-08 | 2021-08-27 | 中国工程物理研究院材料研究所 | Method and system for detecting surface roughness of spherical shell part based on white light confocal sensor |
| CN113567965A (en) * | 2021-07-19 | 2021-10-29 | Oppo广东移动通信有限公司 | Detection device of electronic device sensor |
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| Publication number | Priority date | Publication date | Assignee | Title |
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