CN112485805A - Laser triangular displacement sensor and measuring method thereof - Google Patents
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Abstract
本发明涉及一种激光三角位移传感器及其测量方法，包括以下步骤：激光器发射激光束至反射镜，反射镜将激光束反射至物体表面；经物体表面反射的激光束通过透镜聚焦，使聚焦之后的激光束在位置传感器接收面形成光斑；PSD传感器进行光电转换，并通过信号处理模块转换成表示物体位置的信息。本发明主要针对空间尺寸狭小的孔类零件、平行平板或其他复杂机械结构的内尺寸测量。其外形尺寸小，具有良好的通用性、便携性，可实现微小尺寸的高精度、高效率测量。
The invention relates to a laser triangular displacement sensor and a measuring method thereof, comprising the following steps: a laser emits a laser beam to a reflecting mirror, and the reflecting mirror reflects the laser beam to the surface of an object; The laser beam forms a spot on the receiving surface of the position sensor; the PSD sensor performs photoelectric conversion, and converts it into information representing the position of the object through the signal processing module. The invention is mainly aimed at the inner dimension measurement of hole parts, parallel plates or other complex mechanical structures with narrow space dimensions. It has a small size, good versatility and portability, and can achieve high-precision and high-efficiency measurement of tiny dimensions.
Description
Technical Field
The invention belongs to the field of geometric quantity measurement, and particularly relates to a laser triangular displacement sensor for an environment with a narrow space dimension and a measurement method thereof.
Background
With the steady development of the manufacturing industry in China, the mechanical manufacturing industry is undergoing a new round of transformation and upgrading, and an automatic and intelligent solution scheme is gradually replacing the traditional mechanical manufacturing scheme and becomes the core competitiveness leading to the Chinese manufacturing. In many dimension measurement technologies, automatic measurement of dimensions in a mechanical structure with a narrow space is not widely applied, and particularly, a large gap exists in the technical field in China.
At present, the size in a mechanical structure with narrow space is generally measured by using an air gauge, the measurement method has strict requirements on the tightness of the narrow space, measurement personnel are required to have higher operation level, the size measurement efficiency and precision in parts are low, and further large-scale detection tasks are difficult to perform. Therefore, an automatic and efficient measurement method for the dimension in a mechanical structure with a narrow space is needed to be proposed.
Disclosure of Invention
Aiming at the technical defects, the invention aims to solve the problem of high-precision and high-efficiency measurement of the inner size of the key part under the condition of narrow measurement space.
The technical scheme adopted by the invention for solving the technical problems is as follows: a laser triangulation displacement sensor comprising:
a laser for emitting a laser beam to the mirror;
a reflector for reflecting the laser beam to the surface of the object;
the lens is used for focusing the laser beam reflected by the surface of the object, so that the focused laser beam forms a light spot on the photosensitive surface of the PSD sensor;
and the PSD sensor is used for performing photoelectric conversion and converting the information into information representing the position of the object through the signal processing module.
And a reflector is arranged on the output light path of the laser, and an acute angle is formed between the reflector and the laser beam.
The laser, the lens and the PSD sensor are fixed in the shell, a hole, a window and a connecting rod are arranged on one side of the shell, one end of the connecting rod is arranged on the periphery of the hole, a reflector is arranged on the other end of the connecting rod, the connecting rod is parallel to an output light path of the laser, so that the laser of the laser is output through the hole, is reflected by the reflector and the surface of an object in sequence, and is focused to the PSD sensor through the window and the lens.
A laser triangular displacement sensor measuring method comprises the following steps:
the laser emits laser beams to the reflecting mirror, and the reflecting mirror reflects the laser beams to the surface of an object;
focusing the laser beam reflected by the surface of the object through a lens, and enabling the focused laser beam to form a light spot on a receiving surface of the position sensor;
the PSD sensor performs photoelectric conversion and converts the photoelectric conversion into information representing the position of an object through a signal processing module.
The PSD sensor performs photoelectric conversion, and converts the information into information representing the position of an object through a signal processing module, which is specifically as follows:
the PSD sensor obtains the light spot intensity gravity center according to the light spot, and converts the displacement of the light spot intensity gravity center relative to the center of the receiving surface of the PSD sensor into a digital signal through the signal processing module for feedback, and the digital signal is used for obtaining the actual object position according to the corresponding relation between the displacement and the object position.
The object position is the distance between an incident light point on the surface of the object and a laser beam; the laser beam is between the laser and the reflector.
The corresponding relation between the distance and the object position is obtained through calibration, and the method comprises the following steps:
establishing a calibration system: the surface of the object to be measured is fixed on the micro-displacement table; a measuring lens group, a reference lens group and an interferometer are sequentially arranged on one side of the surface to be measured; the measuring lens group is fixed on the surface of the measured object, and the spectroscope and the interferometer in the measuring lens group and the reference lens group are positioned on the same straight line; the other side of the measured object surface is provided with a laser, a receiving lens and a PSD, laser emitted by the laser is vertically incident to the measured object surface, and reflected laser is focused on a PSD sensor through the receiving lens to form a light spot;
adjusting the micro-displacement platform at intervals to enable the light spot to traverse all parts of the photosensitive surface of the PSD sensor, and respectively recording the measured value X [ n,1] of the PSD sensor and the measured value T [ n,1] of the laser interferometer, wherein n is the number of sampling points of the PSD sensor to form an original data set; fitting X [ n,1] and T [ n,1] by adopting a curve fitting method to obtain the corresponding relation between the measurement data of the PSD sensor and the real data of the interferometer as the relation between the displacement of the light spot intensity gravity center relative to the center of the photosensitive surface of the PSD sensor and the position of the object.
The invention has the following beneficial effects and advantages:
1. in the invention, the use of the reflector realizes oblique laser triangulation, and in actual measurement, the measurement can be finished only by extending the reflector into a narrow space and ensuring that equipment can receive reflected light. The problem that most direct-injection laser triangulation measuring equipment faces when the measuring space is narrow is solved.
2. The invention mainly aims at measuring the inner dimension of hole parts with narrow space dimension, parallel flat plates or other complex mechanical structures. The micro-size high-precision high-efficiency measurement instrument has small overall dimension, good universality and portability, and can realize high-precision and high-efficiency measurement of micro-size.
3. The invention integrates the advantages of the oblique laser triangulation method on the measurement of the dimension in a narrow space and the capability of high resolution, high sensitivity and rapid measurement.
Drawings
FIG. 1a is a schematic diagram of a direct laser triangulation method.
FIG. 1b is a diagram showing the relationship between object plane displacement and detector spot position during direct laser triangulation.
Fig. 2 is a schematic diagram of a laser triangulation structure of the present invention.
Fig. 3 shows a fixing manner of the core mirror in the present invention.
FIG. 4 is a flow chart illustrating initialization of the measurement according to the present invention.
FIG. 5 is a schematic diagram of a calibration system.
Detailed Description
The present invention will be described in further detail with reference to examples.
The invention relies on the laser triangulation technology, adopts a semiconductor laser as a laser light source, and adopts a Position Sensitive Device (PSD) as a light spot position detector. The laser triangulation method can be divided into direct-projection type and oblique-projection type according to whether the incident laser emitted by the laser is parallel to the normal of the surface of the object to be measured. Generally, an oblique laser triangulation method is used for a surface of a measured object mainly based on specular reflection, and when the surface of the measured object is rough, both direct and oblique methods can be used. Most of the existing high-precision size measurement solutions are based on a direct-injection laser triangulation method, however, due to the limitation of the principle of the direct-injection laser triangulation method, when a measurement task in a narrow space is performed, such measurement equipment is difficult to go deep into the space, and thus measurement cannot be performed. Oblique measurement becomes an effective solution to this problem.
There are many alternatives for the laser triangulation light spot position detector, and most of the existing solutions use discrete element detectors such as CCD or CMOS, but such detectors need to process the light spot signal during measurement, and the measurement accuracy is affected by the size of the discrete elements. The invention adopts PSD as a light spot position detector, and has the following advantages. Firstly, an output signal of the PSD is only related to the energy center of gravity of a light spot and is not related to the shape and the intensity of the light spot, and the PSD has the advantages of high resolution and high sensitivity for an application scene only needing to obtain one-dimensional position information; secondly, the processing process of the analog signal output by the PSD is simple, the processing of the light spot energy signal is not needed, the calculation complexity is low, and therefore the measuring speed is high.
Meanwhile, the invention has the following two beneficial effects compared with direct laser triangulation.
First, the measurement accuracy of the laser triangulation method depends largely on the control of the size of the light spot, and the smaller the light spot received by the detector, the higher the measurement accuracy. In the direct-injection laser triangulation method, incident laser directly irradiates on a measured object, and the size of a light spot changes correspondingly along with the small movement of the measured object, so that the size of the light spot received by a detector changes. In the present invention, however, the mirror does not change the spot size. Because the relative position of the laser and the reflector is unchanged, the laser spot reaching the reflector after laser collimation reaches the minimum, so that the displacement of the measured object cannot influence the size of the spot, the convergence of the lens and the acquisition of a detector signal are facilitated, and the system is closer to an ideal condition.
Second, as shown in FIG. 1a, the theoretical range of θ in laser triangulation is
And theta in direct trigonometry does not usually exceed
According to the geometrical relationship of the laser trigonometry, the method comprises the following steps:
in the formula, Deltax represents the movement displacement of the measured object surface, Deltay represents the movement displacement of the light spot on the PSD, l represents the distance between the initial light spot of the measured object surface and the front surface of the lens, l' represents the distance between the center of the detector and the rear surface of the lens, theta represents the included angle between the linear track of the light spot movement on the object surface and the reflected light,
the included angle between the reflected light and the plane of the PSD is shown, and the meanings of the same letters in the following figures are unchanged. The rough image of equation 1 is shown in fig. 1b, and it can be seen that the measured object plane displacement Δ x and the detector receiving spot displacement Δ y are not in a linear variation relationship, and have higher sensitivity to a small displacement of the object plane moving close to the laser. The present invention is improved greatly in this respect, as shown in fig. 2, the surface of the object to be measured needs to be displaced along the normal of the light spot, so that the angle theta in trigonometry can approach infinitely
Corresponding to
The angle can be infinitely close to
Form an abstract triangle", with equation 1 Δ y ≈ Δ x. Therefore, the reception range of the probe becomes large, and the sensitivity difference at each position is not large.
The technical scheme of the invention is as follows: the laser beam is obliquely emitted to the surface of the object to be measured at an incident angle e by the reflection of a mirror that is not perpendicular to the incident laser beam, and is diffusely reflected (including partial specular reflection), as shown in fig. 2. A receiving lens is arranged in the direction of symmetrical light of incident laser about a normal line of an incident point of an object plane, namely the symmetrical light is superposed with the optical axis of the receiving lens, and a PSD detector and a signal processing module are arranged behind the receiving lens.
In the scheme, the incident angle epsilon of the laser is independent of the shape and the position of the surface of the measured object, only depends on the angle of the reflector relative to the incident laser, the angle is determined according to the properties of the surface roughness and the like of the measured object, and the material of the measured object determines the reflection rule of the measured object to the light. For example, when a metal material is irradiated with laser light, reflected light is mainly specular reflection and secondarily diffuse reflection, and the composition of the reflected light differs from one another for metal surfaces under different processing conditions. Therefore, the incident angle ε should be determined to minimize the absorption of light by the object under test, consistent with laser triangulation.
For the placement of the receiving lens, it should be theoretically ensured that as much light as possible passes through the receiving lens, and usually for a measured object made of a metal material, the receiving lens is placed according to a mirror reflection rule, that is, the reflection angle is epsilon.
According to the principle of the invention, the reflector only needs to be stretched into a narrow measuring space during measurement, but the stretching depth of the device is not too large to ensure that the reflected light can be received.
After the measuring device is fixed, the movement of the measured object surface must be along the normal direction of the incident light point, otherwise the measured value is inconsistent with the actual displacement.
As shown in fig. 2, the present invention is an oblique laser triangulation method capable of measuring the inner dimension of a mechanical structure in a narrow measurement space. The system comprises a semiconductor laser, a laser reflector, a receiving lens module, a PSD detector, a signal processing module and an external upper computer. Fig. 3 shows a three-dimensional view of the measuring device, wherein fig. 2 is a schematic top view of fig. 3.
The semiconductor laser should be laser-collimated to ensure that the laser does not diverge and the light spot is sufficiently small when reaching the reflector.
The reflector is fixed with the main device through a two-link structure shown in fig. 3, and the method avoids the reflection and refraction effects on the laser when the transparent tubular glass is used for fixing. Because the angle of epsilon is determined by the properties of the roughness of the measured object surface and the like, the size of theta (the included angle between incident light and reflected light at the incident light point of the measured object surface) can be further determined according to epsilon, and the angle between the reflector and the vertical direction is calculated to be theta/4.
The receiving lens module needs to be precisely designed according to the design requirements of sensors such as initial ranging, measuring range and PSD relative position, and has a function of converging reflected light of an object, so that the PSD receives light spots as small as possible.
The PSD is a one-dimensional PSD sensor with the model number of S4584-06, the size of a photosensitive surface is 1mm x 3.5mm, the internal impedance is 140 kilo-ohms, and the spectral response range is 320nm to 1100 nm. The PSD is a transverse photoelectric effect device based on a P-N junction, as shown in figure 3, a pair of electrodes are arranged at two ends of a resistance layer of the PSD, and the position of incident light can be determined according to the proportion of current signals of the two electrodes by reasonably arranging a shunt layer and collecting current. Theoretically, the PSD has uniform resistance on the photosensitive surface, and the output currents of the two electrodes are I respectively on the assumption that the midpoint of the PSD is the originX1And IX2Then, the relationship between the position of the center of gravity of the light spot and the photocurrent can be expressed as follows:
in the formula: i isORepresenting the sum of photocurrents IX2+IX1；LXRepresenting the impedance length; xARepresenting the distance of the light spot from the midpoint of the PSD. From this, X is calculatedAThe expression of (a) is:
namely, the position of the gravity center of the light spot on the PSD can be calculated through the output current of the two stages. In addition, it is necessary to ensure that the one-dimensional PSD is placed in the measurement plane.
The signal processing module is an A/D conversion circuit, inputs a current analog signal, and the output port is a digital signal which is received by a host computer and is calculated to obtain the relative position information of the light spot.
The initialization procedure for measuring the dimensions of a small space using the present invention is shown in fig. 4 (measuring surface is shown in fig. 3). According to the design of the measuring sensor, the initial measuring height (namely the parallel distance between the incident laser emitted by the laser and the measured object surface) is 3mm, and after the operation is carried out according to the initialization flow, when the obtained position information is 0, the initial measuring height is reached. When the measured object surface moves along the normal direction of the light spot, the position of the light spot changes, the light spot on the PSD is displaced accordingly, and the displacement of the measured object relative to the initial position can be calculated according to the displacement distance of the light spot by calibrating and designing an algorithm of equipment.
The calibration method of the sensor comprises the following steps: the calibration is to determine a transformation relationship between the displacement data collected by the sensor and the measured real displacement, and therefore, the displacement needs to be measured by the sensor to be calibrated, and the size of the real displacement needs to be determined at the same time. An XL series laser interferometer of Renishaw company is selected, the precision is 0.1 mu m, and the XL series laser interferometer is used for measuring the real displacement of a measured object surface.
The calibration method is described by taking the calibration of the direct laser triangular displacement sensor as an example. A continuous reverse synchronous calibration scheme is adopted, as shown in figure 5, a measuring lens group is fixed on one side of a measured object and is placed on a micro-displacement table, the measuring lens group and a spectroscope and an interferometer in a reference lens group are positioned on the same straight line (the reference lens group consists of a spectroscope and a reflector), and the positions of other devices except the measuring lens group are fixed. The sensor to be calibrated is positioned on the other side of the object plane and fixed at a corresponding position, and the laser is vertically incident on the object plane.
The laser emits laser beams vertical to the surface of the measured object, the laser beams are reflected by the surface of the measured object and received by the PSD through the receiving lens, and a displacement measurement value is obtained; meanwhile, the laser beams emitted by the laser interferometer pass through the reference mirror group, one part of the laser beams is reflected by the reflecting mirror of the reference mirror group, the other part of the laser beams is incident to the measuring mirror group and is reflected, and the two reflected light beams generate interference to form interference fringes and are received by the laser interferometer.
Before calibration, operation is carried out according to the initialization flow of the sensor, and the interferometer is zeroed, so that when the surface of the measured object is located at the initial position, the outputs of the sensor to be calibrated and the interferometer are both 0, and the initialization of the calibration system is realized. And manually adjusting the micro-displacement platform at intervals to enable the light spots to traverse all parts of the photosensitive surface, and respectively recording the measured values X [ n,1] and T [ n,1] of the PSD sensor and the laser interferometer at all intervals, wherein n is the number of sampling points of the sensor, so as to form an original data set. Fitting the X [ n,1] and the T [ n,1] by adopting a curve fitting method to obtain the corresponding relation between the measurement data of the sensor to be calibrated and the real data of the interferometer, and completing the calibration of the equipment.
The device can complete all subsequent measurement tasks only by once calibration, and during actual measurement, the displacement value of the measured object surface relative to the initial position can be directly obtained within the measuring range of the sensor.
The core of the novel laser triangulation method is the use of a reflector, and the laser light path is changed through the reflector, so that oblique triangulation is realized. The device has the advantages that only the reflector needs to be stretched into a narrow space during measurement, the device main body (the laser emitting and receiving part) is outside the measurement space, and the micro-size precision measurement in the narrow space can be realized under the condition that the detector receives the reflected light.
Claims (7)
1. A laser triangulation displacement sensor, comprising:
a laser for emitting a laser beam to the mirror;
a reflector for reflecting the laser beam to the surface of the object;
the lens is used for focusing the laser beam reflected by the surface of the object, so that the focused laser beam forms a light spot on the photosensitive surface of the PSD sensor;
and the PSD sensor is used for performing photoelectric conversion and converting the information into information representing the position of the object through the signal processing module.
2. The laser triangular displacement sensor according to claim 1, wherein a reflecting mirror is disposed on an output light path of the laser, and the reflecting mirror forms an acute angle with the laser beam.
3. The laser triangular displacement sensor according to claim 1, wherein the laser, the lens, and the PSD sensor are fixed in a housing, one side of the housing is provided with a hole, a window, and a connecting rod, one end of the connecting rod is arranged at the periphery of the hole, the other end of the connecting rod is provided with a reflector, and the connecting rod is parallel to an output optical path of the laser, so that the laser of the laser is output through the hole, and is reflected by the reflector and the surface of an object in sequence, and is focused to the PSD sensor through the window and the lens.
4. A laser triangular displacement sensor measuring method is characterized by comprising the following steps:
the laser emits laser beams to the reflecting mirror, and the reflecting mirror reflects the laser beams to the surface of an object;
focusing the laser beam reflected by the surface of the object through a lens, and enabling the focused laser beam to form a light spot on a receiving surface of the position sensor;
the PSD sensor performs photoelectric conversion and converts the photoelectric conversion into information representing the position of an object through a signal processing module.
5. The method as claimed in claim 4, wherein the PSD sensor performs photoelectric conversion and converts the photoelectric conversion into information representing the position of the object through a signal processing module, specifically as follows:
the PSD sensor obtains the light spot intensity gravity center according to the light spot, and converts the displacement of the light spot intensity gravity center relative to the center of the receiving surface of the PSD sensor into a digital signal through the signal processing module for feedback, and the digital signal is used for obtaining the actual object position according to the corresponding relation between the displacement and the object position.
6. The method according to claim 4, wherein the object position is a distance between an incident light point on the surface of the object and the laser beam; the laser beam is between the laser and the reflector.
7. The method for measuring the laser triangular displacement sensor according to claim 4, wherein the corresponding relation between the distance and the position of the object is obtained by calibration, and the method comprises the following steps:
establishing a calibration system: the surface of the object to be measured is fixed on the micro-displacement table; a measuring lens group, a reference lens group and an interferometer are sequentially arranged on one side of the surface to be measured; the measuring lens group is fixed on the surface of the measured object, and the spectroscope and the interferometer in the measuring lens group and the reference lens group are positioned on the same straight line; the other side of the measured object surface is provided with a laser, a receiving lens and a PSD, laser emitted by the laser is vertically incident to the measured object surface, and reflected laser is focused on a PSD sensor through the receiving lens to form a light spot;
adjusting the micro-displacement platform at intervals to enable the light spot to traverse all parts of the photosensitive surface of the PSD sensor, and respectively recording the measured value X [ n,1] of the PSD sensor and the measured value T [ n,1] of the laser interferometer, wherein n is the number of sampling points of the PSD sensor to form an original data set; fitting X [ n,1] and T [ n,1] by adopting a curve fitting method to obtain the corresponding relation between the measurement data of the PSD sensor and the real data of the interferometer as the relation between the displacement of the light spot intensity gravity center relative to the center of the photosensitive surface of the PSD sensor and the position of the object.
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| CN114858060A (en) * | 2022-03-22 | 2022-08-05 | 合肥工业大学 | Displacement sensor and application based on coaxial laser triangulation and microscopic imaging |
| CN117092629A (en) * | 2023-10-18 | 2023-11-21 | 中交天津港湾工程研究院有限公司 | Submarine three-dimensional distance measurement method |
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| CN117092629B (en) * | 2023-10-18 | 2024-02-09 | 中交天津港湾工程研究院有限公司 | Submarine three-dimensional distance measurement method |
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