CN1040265A - The method and the measuring instrument of roughness surveyed in laser scanning - Google Patents
The method and the measuring instrument of roughness surveyed in laser scanning Download PDFInfo
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- CN1040265A CN1040265A CN 88104832 CN88104832A CN1040265A CN 1040265 A CN1040265 A CN 1040265A CN 88104832 CN88104832 CN 88104832 CN 88104832 A CN88104832 A CN 88104832A CN 1040265 A CN1040265 A CN 1040265A
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- roughness
- photodetector
- measuring instrument
- laser
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Abstract
The invention provides the roughness measuring instrument that a kind of reflection, scattering ratio with laser scanning and two circuit-switched data collection A/D conversion and calibration curve computer fitting measured the method for roughness and realized this method.This measuring instrument is made up of laser instrument, photodetector, scanner, single card microcomputer etc., it is characterized in that incident angle γ scope 50～85 degree of laser beam incident to the measured workpiece surface, photodetector is 10～300mm from reflection spot apart from d, and scanner is made of 12～24 polygonal rotating mirrors or twisting catoptron or acoustooptic deflection element.Its advantage be simple in structure, easy to operate, measuring speed is fast, a 33ms just can measure the mean roughness of hundreds of point.
Description
The present invention measures roughness with the method for laser scanning, and has invented the laser scanning roughness measuring instrument.
The classic method of roughness concentration has tracer method, geometrical optics approach (oblique trace, optic section method), physical optical method (interference microscope).
Over past ten years, utilize contrast of laser speckle pattern, speckle wavelength decorrelation, optical Fourier transform, the method for measure surface roughness such as reflection, scattering ratio and using optical fibre sensor, optical heterodyne principle all has report.About the laser scanning measurement roughness through the international online literature search, it is to utilize reflectometry scanning survey roughness that the article document number 36992 of finding following three pieces of correlation techniques has been reported " laser scanning roughness concentration " (Roughnessmeasurement with a Leser Seanning analyser), this method is owing to be subjected to power-supply fluctuation, environmental impacts such as laser power shakiness bring than mistake to measurement.And we take the reflection scattering ratio method to overcome the error that environmental impact brings.24154 reports of document number be " the magnetic pipe recording material surface topography interferometry of motion " and structure, operation and the data processing of reflection scattering ratio scanning survey roughness method of the present invention are all simplified, and cost reduces.Document number is that actual that 22-0638 " adjustment surface finish measurement " introduces is that scanning survey laser speed is measured roughness by the reflectogram that workpiece reflects to form.
Surfaceness is an important indicator of surface quality, fiting property to machine and instrument, operating accuracy, serviceable life and other are such as sealing, fluid dynamics, tribology, the electrochemical properties on the conduction of electricity and heat and even surface etc. all has a significant impact, therefore use contemporary optics, technology such as electronics and computing machine is carried out contactless to surfaceness, be an important problem extremely to be solved until real-time measurement with quality assurance and the quality control that realizes production management fast, traditional tracer method, measure surface roughness such as light cross-section method and optical microscopy method obviously can not satisfy above-mentioned requirements, closely during the last ten years, utilize contrast of laser speckle pattern, speckle wavelength decorrelation, optical Fourier transform, reflection scattering ratio and using optical fibre sensor, the method of measure surface roughness such as optical heterodyne principle all has report, but these measuring methods all can only be measured some the roughness of (locating), the mean roughness on the certain machined surface of energy measurement more can not carry out quality monitoring to polished surface.The present invention has realized the measurement to different surface roughness, can be applied to quality monitoring.
The present invention is that reflection, the scattering ratio of using laser scanning and two circuit-switched data collection A/D conversion and calibration curve computer fitting are surveyed roughness.Its principle is that laser beam shines on the measured surface with certain incident angle, except that a part is absorbed, major part is reflected and scattering, reflected light is formed the collection of illustrative plates relevant with roughness with scattered light, the light belt that core spot that reflects to form and scattering form is converted to electric signal by photoelectric commutator respectively, measures the ratio of reflective light intensity and scattered light intensity and just can try to achieve roughness
One laser beam obtains a scanning light beam that moves around fast by methods such as polygonal rotating mirror (or catoptron of swing) or acousto-optical devices, this light beam irradiates is to polished surface, the collection of illustrative plates that forms also is to move rapidly, application data is gathered and Computer Control Technology is gathered the reflected light of a hundreds of point and the electric signal that the scattered light conversion comes rapidly in scanning process, calculate both than mean value, by the computer fitting of calibration curve, directly provide roughness R again
aIts measuring instrument of realizing this method is constructed as follows:
This measuring instrument is by laser instrument (1), scanner (2), d.c. motor (3), lens (4), reflective mirror (5), example platform (6), photodetector (7), single card microcomputer (8), A/D conversion and print interface circuit (9), single card microcomputer power supply (10), transformer (11), motor power (12) constitutes.Feature is that the incident angle γ that laser beam is mapped to the measured workpiece surface is 50～85 degree, and photodetector (square structure or circular configuration) is 10～300mm from reflection spot apart from d, photodetector D
2Half height t
2Be 0.5～3mm, D
1Half height t
1Be 5～150mm, width S is 10～150mm; Photodetector square circular structure) D
2Half height (or radius) is 0.5～3mm, D
1Half height (or radius) is 5～150mm.Photodetector can be silicon photocell or photodiode array.The scanner scans width is 10～150mm, and scanning element is 12～24 polygonal rotating mirrors or twists catoptron, acoustooptic deflection element.Sweep frequency is adjustable.
Data handling system is seen Fig. 7.V wherein
pBe light nuclear energy, V
BFor light belt energy (13) is a prime amplifier, (14) are multi-way switch, and amplify for secondary (15), and (16) are the A/b conversion, and (17) are single card microcomputer, and (18) are printer.
The computer fitting of calibration curve, national standard roughness R
aWith reflected light nuclear energy V
p, scattering light belt energy V
BRatio R=V
p/ V
BBetween relation curve R
a～R is a calibration curve.Calibration curve by experiment records carries out the match of n power polynomial computer according to principle of least square method, promptly establishes R
a=a
0+ a
1R
1+ a
2R
2+ a
3R
3+ ... + a
nR
n, multinomial coefficient a is tried to achieve by the assembly language fit procedure in n=1～5
0, a
1, a
2A
nIts working method is when scanner is not worked, and measuring near the roughness of a point is one-point measurement, and mean roughness is a scanning survey on the measurement face when scanner is worked.During measurement under single card microcomputer control measuring light nuclear energy V
p, light belt energy V
B, by COMPUTER CALCULATION R=V
p/ V
BGet roughness R with polynomial expression
a, at last by printer prints V
p, V
B, R and R
a
Measurement range of the present invention: R
a＜0.5 μ m, measuring workpieces surface and processing road trace are:
Plane surface: one dimension, two-dimensional random processing road trace;
Cylinder surface: one-dimensional random processing road trace, the vertical segment of a cylinder of road trace;
Convex-concave spherical face: two-dimensional random processing road trace.
The invention has the advantages that measuring instrument is simple in structure, easy to operate, it is fast to measure roughness speed, survey a hundreds of mean roughness of putting and only need 33ms, and measure the roughness of several points, average again and also look much more than this time with classic method.
The invention will be further described below in conjunction with accompanying drawing
Fig. 1 is a kind of front view of the present invention.
Fig. 2 is a vertical view of the present invention.
Laser beam shines on the measured surface with certain incident angle, and the light belt of core spot that reflects to form and scattering form is respectively by photodetector D
2And D
1Be converted to electric signal after the absorption, after amplifying, send into A/D converter,, carry out data processing and print the result by single card microcomputer at last by single card microcomputer control carrying out data acquisition and A/D conversion.
Fig. 3 is laser beam incident angle figure.
Fig. 4 is laser instrument and photodetector.Wherein (1) is the He-Ne laser instrument, and γ is an incident angle, D
1, D
2Be photodetector, t
2Be photodetector D
2Half height, t
1Be photodetector D
1Half height, d is the distance of photodetector from reflection spot, S is the photodetector width.
Fig. 5 is square photodetector synoptic diagram.
Garden, Fig. 6 side shape photodetector synoptic diagram
Coupling method: measure portion (laser instrument, photodetector etc.) and data processing section (single card microcomputer, A/D conversion and print interface circuit, power supply etc.) can be assembled in the cabinet, also can separate groups dress up two parts.
Claims (6)
1, a kind of method of roughness concentration is characterized in that measuring roughness with reflection, the scattering ratio of laser scanning and two circuit-switched data collection A/D conversion and calibration curve computer fitting.
2,, it is characterized in that the computer fitting of calibration curve, roughness R according to the described roughness measurement method of claim 1
aWith reflected light nuclear energy V
p, scattering light belt energy V
BRatio R=V
p/ V
BBetween relation curve R
a～R is a calibration curve.
3, a kind of laser scanning measurement roughness measuring instrument, by laser instrument (1), scanner (2), d.c. motor (3), lens (4), reflective mirror (5), example platform (6), photodetector (7), single card microcomputer (8), A/D conversion and print interface circuit (9), single card microcomputer power supply (10), transformer (11), motor power (12) constitutes, and it is characterized in that: laser beam incident is to incident angle γ scope 50～85 degree on measured workpiece surface, photodetector is 10～300mm from reflection spot apart from d, scanner is made of 12～24 polygonal rotating mirrors or twisting catoptron or acoustooptic deflection element, sweep length 10～150mm, and sweep frequency is adjustable.
4,, it is characterized in that square photodetector D according to the described roughness measuring instrument of claim 3
2Half height t
2Be 0.5～3mmD
1Half height t
1Be 5～150mm, width S is 10～150mm.
5,, it is characterized in that square circular photodetector D according to the described roughness measuring instrument of claim 3
2Half height (or radius) is 0.5～3mm, D
1Half height (or radius) is 5～150mm.
6, according to the described roughness measuring instrument of claim 3, it is characterized in that roughness R
aMeasurement range is R
a＜0.50 μ m, measuring workpieces and processing road trace are as follows:
Plane surface: one dimension, two-dimensional random processing road trace;
Cylinder surface: one-dimensional random processing road trace, the vertical segment of a cylinder of road trace;
Convex-concave spherical face: two-dimensional random processing road trace.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 88104832 CN1014091B (en) | 1988-08-10 | 1988-08-10 | Laser scanning roughness measuring method and tester |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 88104832 CN1014091B (en) | 1988-08-10 | 1988-08-10 | Laser scanning roughness measuring method and tester |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1040265A true CN1040265A (en) | 1990-03-07 |
| CN1014091B CN1014091B (en) | 1991-09-25 |
Family
ID=4833152
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN 88104832 Expired CN1014091B (en) | 1988-08-10 | 1988-08-10 | Laser scanning roughness measuring method and tester |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1014091B (en) |
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1906478B (en) * | 2003-12-10 | 2011-02-16 | 以色列商·应用材料以色列公司 | Advanced roughness metrology |
| CN103913134A (en) * | 2014-04-30 | 2014-07-09 | 陈姚佳 | Rapid detection device and method for thin cylinder workpiece surface roughness |
| CN106840048A (en) * | 2016-12-17 | 2017-06-13 | 江汉大学 | Roughness measuring device and method |
| CN108253899A (en) * | 2016-12-28 | 2018-07-06 | 株式会社基恩士 | Optical scanner height measuring device |
| CN108317975A (en) * | 2018-01-30 | 2018-07-24 | 广州肖宁道路工程技术研究事务所有限公司 | Pavement skid resistance texture test device and its sweep mechanism |
| CN109060659A (en) * | 2018-08-08 | 2018-12-21 | 西安工业大学 | A kind of detection system and detection method of optical element surface defect three-dimensional information |
| WO2019007405A1 (en) * | 2017-07-06 | 2019-01-10 | 南京林业大学 | Inclined saw timber defect detection apparatus and detection method |
| CN109470155A (en) * | 2018-12-26 | 2019-03-15 | 湖北攀峰钻石科技有限公司 | A kind of ceramic saw blade sharpness detection equipment |
| CN110360962A (en) * | 2019-07-19 | 2019-10-22 | 北京中建建筑科学研究院有限公司 | A kind of method of quick identification planar smoothness |
| CN113048921A (en) * | 2021-03-24 | 2021-06-29 | 长江存储科技有限责任公司 | Method and system for measuring surface roughness of wafer |
-
1988
- 1988-08-10 CN CN 88104832 patent/CN1014091B/en not_active Expired
Cited By (14)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1906478B (en) * | 2003-12-10 | 2011-02-16 | 以色列商·应用材料以色列公司 | Advanced roughness metrology |
| CN103913134A (en) * | 2014-04-30 | 2014-07-09 | 陈姚佳 | Rapid detection device and method for thin cylinder workpiece surface roughness |
| CN103913134B (en) * | 2014-04-30 | 2016-06-01 | 陈姚佳 | The device for fast detecting of thin cylindrical workpiece surfaceness and detection method thereof |
| CN106840048B (en) * | 2016-12-17 | 2019-09-10 | 江汉大学 | Roughness measuring device and method |
| CN106840048A (en) * | 2016-12-17 | 2017-06-13 | 江汉大学 | Roughness measuring device and method |
| CN108253899A (en) * | 2016-12-28 | 2018-07-06 | 株式会社基恩士 | Optical scanner height measuring device |
| WO2019007405A1 (en) * | 2017-07-06 | 2019-01-10 | 南京林业大学 | Inclined saw timber defect detection apparatus and detection method |
| CN108317975A (en) * | 2018-01-30 | 2018-07-24 | 广州肖宁道路工程技术研究事务所有限公司 | Pavement skid resistance texture test device and its sweep mechanism |
| CN108317975B (en) * | 2018-01-30 | 2024-04-09 | 广州肖宁道路工程技术研究事务所有限公司 | Road surface antiskid texture testing device and scanning mechanism thereof |
| CN109060659A (en) * | 2018-08-08 | 2018-12-21 | 西安工业大学 | A kind of detection system and detection method of optical element surface defect three-dimensional information |
| CN109470155A (en) * | 2018-12-26 | 2019-03-15 | 湖北攀峰钻石科技有限公司 | A kind of ceramic saw blade sharpness detection equipment |
| CN110360962A (en) * | 2019-07-19 | 2019-10-22 | 北京中建建筑科学研究院有限公司 | A kind of method of quick identification planar smoothness |
| CN110360962B (en) * | 2019-07-19 | 2021-07-02 | 北京中建建筑科学研究院有限公司 | Method for rapidly identifying plane flatness |
| CN113048921A (en) * | 2021-03-24 | 2021-06-29 | 长江存储科技有限责任公司 | Method and system for measuring surface roughness of wafer |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1014091B (en) | 1991-09-25 |
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