CN109187495A - Femtosecond laser machined parameters are divided pupil differential confocal Raman spectrum monitoring method and apparatus - Google Patents
Femtosecond laser machined parameters are divided pupil differential confocal Raman spectrum monitoring method and apparatus Download PDFInfo
- Publication number
- CN109187495A CN109187495A CN201811345887.2A CN201811345887A CN109187495A CN 109187495 A CN109187495 A CN 109187495A CN 201811345887 A CN201811345887 A CN 201811345887A CN 109187495 A CN109187495 A CN 109187495A
- Authority
- CN
- China
- Prior art keywords
- sample
- processing
- differential confocal
- femtosecond laser
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
- G01N21/65—Raman scattering
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
Landscapes
- Health & Medical Sciences (AREA)
- Physics & Mathematics (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Investigating, Analyzing Materials By Fluorescence Or Luminescence (AREA)
Abstract
The invention belongs to laser accurate detection technique, laser micro/nanos to process monitoring technical field, be related to femtosecond laser machined parameters light splitting pupil differential confocal Raman spectrum monitoring method and apparatus.The present invention organically blends high-resolution light splitting pupil differential confocal axial direction monitoring modular with femtosecond laser system of processing, nanoscale monitoring is carried out to sample axial position using light splitting pupil differential confocal curve zero point and sample axial direction processing dimension measures, the high-acruracy survey of micro-nano structure size, solves the drifting problem and high accuracy in-situ test problems in measurement process after realizing the real-time fixed-focus of sample axial position and processing；Analysis is monitored to information such as the molecular structures of specimen material after processing using differential confocal Raman spectra detecting module, above- mentioned information are merged using computer, it realizes that the high-precision processing of fine structure femtosecond laser is integrated with the monitoring analysis of microcell form performance in-situ, improves controllability and processing quality of sample of femtosecond laser machining accuracy etc..
Description
Technical field
The invention belongs to laser accurate detection techniques, femtosecond laser processing and manufacturing technology, are related to femtosecond laser processing
Parameter is divided pupil differential confocal Raman in-situ monitoring integral method and device, processes microcell shape for fine structure femtosecond laser
State performance in-situ on-line monitoring and analysis.
Background technique
Femtosecond laser is processed since wide with adaptability for materials, processing fineness is high, processing is not necessarily to the remarkable advantages such as mask,
And the century property technology for being considered as " may cause the new industrial revolution " is concerned, and by as macro-micro- across scale minute manufacturing
Preferred means obtain the worlds such as China, the U.S. and respectively manufacture first developing for big country.
Femtosecond laser processing is exactly the nonlinear effect using laser and material, in the nanometer ruler for surmounting optical diffraction limit
Make material that forming occur and become second nature on degree, change and regulation while essence is material shape and performance parameter, thus, we
The transient change state for only monitoring material shape in process, performance parameter simultaneously, it is non-could really to disclose femtosecond laser
The mechanism of action and its Evolution linearly processed.
There is also non-linear processing to make object lens axial feeding can not accurate counter sample axial direction for femtosecond laser processing at present
This significant bottleneck problem of removal amount, but it is existing based on the axially monitoring, backscattering coherent tomographic of triangle Optical displacement sensor
The methods of monitoring and optical coherence tomography monitoring, resolution capability are micron or sub-micrometer scale, such as Canadian Queens University
On-line monitoring technique research, but its direction x-y-z are carried out using interference imaging method (OCT) with German brother's Dettingen Laser Experiments room
Monitoring resolution capability only up to micron dimension.As it can be seen that femtosecond process unit due to being restricted by existing monitoring technology, still lacks high
The in-situ monitoring means of performance, this just makes generally existing based on processing, long time-consuming femtosecond laser process equipment: non-linear to go
It removes, axial remove is not allowed；Long time-consuming drift, keeps system of processing unstable；It is unstable point processing, make process scale less etc. general character
Problem.It is inaccurate that it has its source in system of processing axial direction fixed-focus, and then constrains femtosecond laser in across scale key element micro-nano system
Make the application of aspect.
In addition, Material Processing is different in femtosecond laser process, the mechanism of action of femtosecond pulse and substance is not
Together, the form that sample generates in process and performance change difference；Under the action of pulse laser, the molecular structure of sample,
Element ratio and charged ion etc. can change, and how carry out to the physical parameter and morphological parameters of sample after processing is completed
Accurate detection is not only to guarantee the key of machining accuracy and research femtosecond laser processing mechanism, promotes processing technology level
Important prerequisite.
It can be seen that there is an urgent need to study shape in femtosecond laser processing with the rapid development of femtosecond laser processing technology
The in-situ monitoring means of state performance parameter.
In the detection of form performance parameter, the confocal laser Raman spectroscopic detection technology based on Raman scattering effect, due to
It can be micro- to measure material by information such as intensity, position, displacement, ratio, the halfwidths of detection sample raman microspectroscopy spectrum spectral peak
The parameters such as district's groups point, stress, temperature, and the light processed by the important means as form performance parameter test in femtosecond laser
Application of succeeding in the off-line monitorings such as strain, crystal crystalline state, variations in refractive index, carrier density, state of temperature, ingredient is caused,
But existing femtosecond laser processing still lacks the integrated in-situ monitoring means of femtosecond laser processing form performance parameter.
In conclusion in existing femtosecond laser processing accurately fixed-focus and alignment can not be carried out to sample, it can not be to processing
In sample morphology performance parameter carry out high-precision in-situ monitoring, result limit femtosecond laser processing effect stability and
Across scale working ability also constrains the raising of femtosecond laser processing mechanism research and processing technology level.
For this purpose, present invention proposition creatively incorporates laser light splitting pupil differential confocal Raman in femtosecond laser system of processing
Spectrographic detection technology, to realize the integrated in-situ monitoring of form performance parameter in femtosecond laser processing, for femtosecond laser plus
Work form performance parameter integration in-situ monitoring provides new tool, promotes the precision property and macro-micro- across ruler of femtosecond laser processing
Spend working ability etc..
Summary of the invention
The purpose of the present invention is be also easy to produce axial drift and after processing is completed sample to solve sample in laser micro/nano processing
The problems such as complex shape state performance parameter in situ detection, the present invention disclose a kind of femtosecond laser machined parameters light splitting pupil differential confocal
Raman spectrum monitoring method and apparatus realizes axial drift, inclined on-line monitoring and sample knot in sample processing procedure
The nanoscale of structure axial dimension monitors, it is ensured that the accurate real-time fixed-focus of sample in process, and realize after processing is completed
The comprehensive detection of sample micro-raman spectra structure and complicated physical parameter, for the feedback modifiers of femtosecond laser processing, mechanism study and
Process modification provides technical foundation, improves the controllability of laser processing precision and the processing quality of sample.
The purpose of the present invention is what is be achieved through the following technical solutions.
Femtosecond laser machined parameters of the invention are divided pupil differential confocal Raman spectrum monitoring method, utilize femtosecond laser
System of processing carries out fine structure processing to sample, using laser light splitting pupil differential confocal axial direction monitoring modular to sample surfaces shape
Sample surfaces axial position is monitored in real time in looks profile, processing, and is examined to the geometric parameter of sample surfaces after processing
It surveys, the physical property variation of specimen material after femtosecond laser processing is monitored point using differential confocal Raman spectra detecting module
Analysis, and then realize that the high-precision processing of fine structure femtosecond laser is integrated with the monitoring analysis of microcell form performance in-situ, it improves micro-
The controllability of fine texture femtosecond laser machining accuracy and the processing quality of sample；
Femtosecond laser machined parameters light splitting pupil differential confocal Raman spectrum monitoring method the following steps are included:
Step 1: sample is placed on precision stage, sample is driven to be scanned movement by precision stage, using dividing
Pupil differential confocal axial direction monitoring modular is scanned measurement to the surface profile of sample, and by its measurement feedback to calculating
Machine, the adjustment for femtosecond laser system of processing to processing control parameter；
Wherein, light splitting pupil differential confocal axial direction monitoring modular is by laser, beam expander, reflecting mirror, detection object lens, light splitting pupil
Differential detection device composition, the axial collimated light beam that monitors into object lens and are gathered after dichroscope A reflection, dichroscope B transmission
On coke to sample, through the reflection of sample reflection, axially monitoring light beam converges to after reflecting mirror, detection object lens, hot spot enlarging objective
On detector C CD, two symmetrical first search coverages and the second detecting area are taken on the detection hot spot in detector C CD image planes
Domain obtains light splitting pupil differential confocal curve；
Zero crossing position according to light splitting pupil differential confocal curve carries out nanoscale detection to the axial defocusing position of sample；
Step 2: processing system using the femtosecond laser that femto-second laser, laser space-time Shaping Module, two-dimensional scanner are constituted
System carries out micro-nano structure processing to sample, utilizes light splitting pupil differential confocal axial direction monitoring modular in process in process
The axial position of sample surfaces is monitored；According to axial position of the zero crossing position to sample for being divided pupil differential confocal curve
Carry out nanoscale monitoring；
Step 3: axial position of the computer according to measurement result adjustment sample, adjusts the position of precision stage in real time,
Realize the accurate fixed-focus of sample in process；
Step 4: after processing is completed, using light splitting pupil differential confocal axial direction monitoring modular to sample knot after processing is completed
Structure is scanned measurement, realizes the nano high-precision in situ detection of sample morphology parameter after processing；
Step 5: axial monitoring collimated light beam focuses on sample through object lens, raman scattering spectrum is inspired, spectrum warp
It is detected after dichroscope B reflection by Raman spectroscopic detection module, in situ detection analysis is carried out to the physical parameter of sample after processing,
Wherein, Raman spectroscopic detection module is made of spectrum coupled lens and spectral detector.
In femtosecond laser machined parameters light splitting pupil differential confocal Raman spectrum monitoring method of the invention, before processing may be used
Coarse alignment is carried out to sample using micro-imaging module；White light source issue light through lighting system, spectroscope, dichroscope B,
After object lens on uniform irradiation to sample, the light returned through sample is imaged on CCD after spectroscope reflects through image-forming objective lens, can be sentenced
The inclination of disconnected sample and position.
In femtosecond laser machined parameters light splitting pupil differential confocal Raman spectrum monitoring method of the invention, the femtosecond swashs
The processing laser beam and axial monitoring collimated light beam that light system of processing issues coaxially are coupled to sample surfaces through object lens, real respectively
The processing and detection of existing micro-nano structure.
Femtosecond laser machined parameters of the invention are divided pupil differential confocal Raman optical spectrum monitoring device, comprising: femtosecond laser
Device, laser space-time Shaping Module and two-dimensional scanner positioned at femto-second laser exit direction are located at femto-second laser emergent light
Dichroscope A, dichroscope B, object lens and the precision stage of beam vertical direction, positioned at the light splitting of dichroscope A reflection direction
Pupil differential confocal axial direction monitoring modular and Raman spectroscopic detection module positioned at dichroscope B reflection direction, object lens are by axially sweeping
Retouch device driving；Light splitting pupil differential confocal axial direction monitoring modular includes laser, the beam expander positioned at laser emitting direction, reflection
Mirror and positioned at reflection specular reflection direction detection object lens and light splitting pupil differential detection device；Wherein axial monitoring collimated light beam and processing
Laser beam is coaxially incident on sample surfaces through dichroscope A, object lens.
In femtosecond laser machined parameters light splitting pupil differential confocal Raman optical spectrum monitoring device of the invention, the light splitting pupil
Differential detection device can be made of hot spot enlarging objective and detection CCD, the first search coverage and the second search coverage, wherein first visits
It is in the image planes of detection CCD and symmetrical about optical axis to survey region and the second search coverage；
In femtosecond laser machined parameters light splitting pupil differential confocal Raman optical spectrum monitoring device of the invention, the light splitting pupil
Differential detection device can be also made of hot spot enlarging objective and dual-quadrant detector, wherein first on dual-quadrant detector test surface
It detects quadrant and the second detection quadrant is symmetrical about optical axis；
In femtosecond laser machined parameters light splitting pupil differential confocal Raman optical spectrum monitoring device of the invention, when the laser
Empty Shaping Module can be made of spacing shaping device, temporal shaping device, carry out time domain and sky to the laser beam that femto-second laser issues
The combined regulating of field parameter improves femtosecond laser micro-nano technology ability.
In femtosecond laser machined parameters light splitting pupil differential confocal Raman optical spectrum monitoring device of the invention, it can also utilize
Micro-imaging module observes sample, wherein micro-imaging module is by white light source, lighting system, spectroscope, dichroic
Mirror B, image-forming objective lens, CCD composition.
Beneficial effect
The method of the present invention, which compares prior art, has following innovative point:
1) using light splitting pupil differential confocal axial direction monitoring technology, improve axial position monitoring capability in process and
Axial dimension detectability solves the problems, such as fixed-focus when the drifting problem and high-precision real in femtosecond laser process, this is
One of innovative point of the invention；
2) using light splitting pupil differential confocal axial direction nanoscale monitoring technology, the high-precision of femtosecond laser processed sample is realized
Axial dimension detectability solves the problem on line detection of femtosecond laser processed sample, this is the two of innovative point of the invention；
3) light beam for being divided pupil differential confocal system, femtosecond laser system of processing is coupled to sample through same object lens, it is real
Show the online position monitoring of sample and axial dimension detection in micro-nano structure process, improves the controllability of process
And processing quality, this is the three of innovative point of the invention；
The method of the present invention, which compares prior art, has following distinguishing feature:
1. using the light splitting pupil differential confocal technology and femtosecond laser processing technology phase with long working distance and high resolution
In conjunction with, realize the on-line monitoring of the sample axial defocusing position in process, solve in process sample drift
Problem improves the controllability of process；
2. using light splitting pupil differential confocal curve zero crossing carry out sample axial position monitoring, make femtosecond laser beam with
Minimum focal beam spot focus on sample surfaces, it can be achieved that sample high-precision micro-nano technology；
3. realizing the online prison of nanoscale resolution using the zero crossing fixed-focus measuring technique of light splitting pupil differential confocal curve
It surveys, the axial micro-nano technology ability of femtosecond laser processing technology can be improved；
4. inhibiting sample surfaces stray light in monitoring process to monitor axial position using light splitting pupil differential confocal technology
With the interference of axial dimension detection, improves and monitor ability in process on-line.
5. sample is imaged the slant correction, it can be achieved that sample position using micro-imaging technique, improve processed
Position regulated efficiency in journey.
Detailed description of the invention
Fig. 1 is that femtosecond laser machined parameters of the present invention are divided pupil differential confocal Raman spectrum monitoring method schematic diagram；
Fig. 2 is that femtosecond laser machined parameters of the present invention are divided the signal of pupil differential confocal Raman spectrum monitoring method and apparatus
Figure；
Fig. 3 is that femtosecond laser machined parameters of the present invention are divided the signal of pupil differential confocal Raman spectrum monitoring method and apparatus
Figure；
Fig. 4 is that femtosecond laser machined parameters of the present invention are divided pupil differential confocal Raman spectrum monitoring method schematic diagram；
Fig. 5 is that femtosecond laser machined parameters of the present invention are divided the signal of pupil differential confocal Raman spectrum monitoring method and apparatus
Figure；
Fig. 6 is that femtosecond laser machined parameters of the present invention are divided the signal of pupil differential confocal Raman spectrum monitoring method and apparatus
Figure.
Wherein: 1- is divided pupil differential confocal axial direction monitoring modular, 2- laser, 3- beam expander, 4- axially monitoring directional light
Beam, 5- dichroscope A, 6- dichroscope B, 7- object lens, 8- axial scan device, 9- sample, 10- precision stage, 11- axis of reflection
When being divided pupil differential detection device, 15- femto-second laser, 16- laser to monitoring light beam, 12- reflecting mirror, 13- detection object lens, 14-
Empty Shaping Module, 17- process laser beam, 18- two-dimensional scanner, 19- hot spot enlarging objective, 20- dual-quadrant detector, 21-
First detection quadrant, 22- second detect quadrant, 23- light splitting pupil differential confocal curve, 24- spectrum coupled lens, 25- spectrum and visit
Survey device, 26- Raman spectroscopic detection module, 27- detection CCD, 28- detection hot spot, the first search coverage of 29-, the second detecting area of 30-
Domain, 31- spacing shaping device, 32- temporal shaping device, 33- computer, 34- white light source, 35- lighting system, 36- illumination light splitting
Mirror, 37- image-forming module, the second spectroscope of 38-, 39- image-forming objective lens, 40-CCD.
Specific embodiment
Present invention will be further explained below with reference to the attached drawings and examples.
The basic idea of the invention is that: long working distance, the high light splitting pupil laser axially differentiated are divided pupil differential confocal axis
It organically blends to monitoring modular and femtosecond laser system of processing, using light splitting pupil differential confocal system curve zero point to sample axial direction
Defocus position carries out nanoscale monitoring, the axial fixed-focus in real time of sample and axial position monitoring, solves femtosecond laser process
In axial drift and the problems such as on-line checking, improve the controllability of micro-nano femtosecond laser machining accuracy and the processing matter of sample
Amount, can also merge micro-imaging module in above system, carry out coarse alignment to sample using micro-imaging module.
Embodiment 1
Such as Fig. 1, the surface location of sample 9 and processed before being processed using 1 Dui of pupil differential confocal axial direction monitoring modular of light splitting
The axial position of sample 9 is monitored in journey, computer 30 to two-dimensional scanner 18, precision stage 10, axial scan device 8 into
Row feedback control is realized and is processed and the 3-D scanning monitored and position adjustment to sample 9；Femtosecond laser system of processing is swashed by femtosecond
Light device 15, laser space-time Shaping Module 16, two-dimensional scanner 18 are constituted.
Light splitting pupil differential detection device 14 is made of hot spot enlarging objective 25 and dual-quadrant detector 29.Femtosecond laser processing ginseng
Number light splitting pupil differential confocal Raman spectrum monitoring method implementation steps are as follows:
1) sample 9 is placed on precision stage 10, drives sample 9 to be scanned movement by precision stage 10；
2) before processing, measurement is scanned to the surface of sample 9 using light splitting pupil differential confocal axial direction monitoring modular 1；Axis
To monitoring collimated light beam 4 after dichroscope A5 reflection, dichroscope B6 transmission, focused on sample 9 by object lens 7, through sample 9
Axially monitoring light beam 11 is received after reflecting mirror 12, detection object lens 13 by light splitting pupil differential detection device 14 for the reflection of reflection, is obtained
Any light splitting pupil differential confocal signal 23 of 9 surface of sample；Wherein, light splitting pupil differential confocal axial direction monitoring modular 1 is by laser
2, beam expander 3, reflecting mirror 12, detection object lens 13, light splitting pupil differential detection device 14 form；
3) axial scanner 8 is controlled by computer 30 and axial scan is carried out to sample 9, obtain point with actual zero point
Pupil differential confocal curve 29；
4) nanoscale prison is carried out to the axial position of sample 9 according to the zero crossing position of light splitting pupil differential confocal curve 28
It surveys, computer 30 is adjusted the processing control parameter of femtosecond laser system of processing according to measurement result；
5) the processing laser beam 17 modulated through laser space-time Shaping Module 16 is through dichroscope A5, dichroscope B6 and object
The surface that mirror 7 focuses on sample 9 laser machines sample 9, and the scanning machining of film micro area controls two dimension by computer 30 and sweeps
Retouch the completion of device 18；
6) in process, light splitting pupil differential confocal axial direction monitoring modular 1 to the axial position of sample 9 in process into
Row monitoring；
7) monitoring that computer 30 controls precision stage 10, feeds back according to light splitting pupil differential confocal axial direction monitoring modular 1
As a result 9 position of sample is adjusted, realizes the accurate fixed-focus of sample in process, eliminate the influence of sample drift；
8) axial scanner 8 is controlled by computer 30 and precision stage 10 is scanned sample 9, after obtaining processing
Sample micro-nano structure axial dimension realizes the nanoscale detection of 9 axial dimension of sample；It is obtained by Raman spectroscopic detection module 26
The molecular structure energy parameter of sample after processing, and then realize the high accuracy in-situ detection of 9 form performance parameter of sample after processing；
9) according in the microcell form of sample and performance synthesis Parameter analysis process sample physical property changing rule and
Effect after detection processing, is modulated to by 16 pairs of processing laser beams 17 of laser space-time Shaping Module, improves micro-nano
The controllability of structure femtosecond laser machining accuracy and the processing quality of sample.
Embodiment 2
As shown in Fig. 2, light splitting pupil differential detection device 14 is by hot spot enlarging objective 25 and detection CCD26, the first search coverage
31 and second search coverage 32 constitute, wherein the first search coverage 31 and the second search coverage 32 are located at the image planes of detection CCD26
It is upper and symmetrical about optical axis；Using light splitting pupil differential confocal axial direction monitoring modular 1 to the axial position of sample 9 in process
When being monitored with axial dimension, the axial collimated light beam 4 that monitors is after dichroscope A5 reflection, dichroscope B6 transmission, by object
Mirror 7 focuses on sample 9, and axially monitoring light beam 11 is put by reflecting mirror 12, detection object lens 13, hot spot for the reflection reflected through sample 9
It is converged on dual-quadrant detector 29 after big object lens 25, to the first detection quadrant 36 and the on dual-quadrant detector test surface 33
The two obtained signals of detection quadrants 37 are handled, any light splitting pupil differential confocal signal of 9 surface of sample is obtained.
Remaining step is same as Example 1.
Embodiment 3
As shown in figure 3, laser space-time Shaping Module 16 is made of spacing shaping device 34 and temporal shaping device 35, femtosecond is swashed
The light beam that light device 15 issues carries out the adjustment of time domain and airspace parameter respectively, keeps femtosecond laser processing performance best.
Remaining is same as Example 1.
Embodiment 4
As shown in figure 4, before processing, after sample 9 is placed in precision stage 10, using micro-imaging module 24 to sample
9 carry out coarse alignment, and the light that white light source 19 issues generates flat after lighting system 20, spectroscope 21, dichroscope B6, object lens 7
Row homogenizer is irradiated on sample 9, and the illumination light that sample 9 scatters is imaged onto after the reflection of spectroscope 21 through image-forming objective lens 22
On CCD23, position and the imaging region of sample 9 can be obtained, and then can determine whether inclination and the position of sample 9.
Remaining is same as Example 1.
Embodiment 5
As shown in figure 5, before processing, after sample 9 is placed in precision stage 10, using micro-imaging module 24 to sample
9 carry out coarse alignment, and the light that white light source 19 issues generates flat after lighting system 20, spectroscope 21, dichroscope B6, object lens 7
Row homogenizer is irradiated on sample 9, and the illumination light that sample 9 scatters is imaged onto after the reflection of spectroscope 21 through image-forming objective lens 22
On CCD23, position and the imaging region of sample 9 can be obtained, and then can determine whether inclination and the position of sample 9.
Remaining is same as Example 2.
Embodiment 6
As shown in fig. 6, laser space-time Shaping Module 16 is made of spacing shaping device 34 and temporal shaping device 35, femtosecond is swashed
The light beam that light device 15 issues carries out the adjustment of time domain and airspace parameter respectively, keeps femtosecond laser processing performance best.
Before processing, after sample 9 being placed in precision stage 10, it is thick right to be carried out using micro-imaging module 24 to sample 9
Standard, it is uniform that the light that white light source 19 issues generates collimated light beam after lighting system 20, spectroscope 21, dichroscope B6, object lens 7
It is irradiated on sample 9, the illumination light that sample 9 scatters is imaged on CCD23 after the reflection of spectroscope 21 through image-forming objective lens 22, can be obtained
Position and imaging region to sample 9, and then can determine whether inclination and the position of sample 9.
Remaining is same as Example 2.
A specific embodiment of the invention is described in conjunction with attached drawing above, but these explanations cannot be understood to limit
The scope of the present invention, protection scope of the present invention are limited by appended claims, any in the claims in the present invention base
Change on plinth is all protection scope of the present invention.
Claims (8)
1. femtosecond laser machined parameters are divided pupil differential confocal Raman spectrum monitoring method, it is characterised in that: utilize femtosecond laser
System of processing carries out fine structure processing to sample, using laser light splitting pupil differential confocal axial direction monitoring modular to sample surfaces shape
Sample surfaces axial position is monitored in real time in looks profile, processing, and is examined to the geometric parameter of sample surfaces after processing
It surveys, the physical property variation of specimen material after femtosecond laser processing is monitored point using differential confocal Raman spectra detecting module
Analysis, and then realize that the high-precision processing of fine structure femtosecond laser is integrated with the monitoring analysis of microcell form performance in-situ, it improves micro-
The controllability of fine texture femtosecond laser machining accuracy and the processing quality of sample；
The following steps are included:
Step 1: sample (9) is placed on precision stage (10), sample (9) are driven to be scanned by precision stage (10)
Movement is scanned measurement to the surface profile of sample (9) using light splitting pupil differential confocal axial direction monitoring modular (1), and will survey
Amount result feeds back to computer (33), the adjustment for femtosecond laser system of processing to processing control parameter；
Wherein, light splitting pupil differential confocal axial direction monitoring modular (1) is by laser (2), beam expander (3), reflecting mirror (12), detection object
Mirror (13) and light splitting pupil differential detection device (14) composition；Axial monitoring collimated light beam (4) is through dichroscope A (5) reflection, dichroic
It after mirror B (6) transmission, into object lens (7) and is focused on sample (9), the reflection through sample (9) reflection axially monitors light beam
(11) it converges on detector C CD (27), is detecting after reflecting mirror (12), detection object lens (13), hot spot enlarging objective (19)
Two symmetrical first search coverages (29) and the second search coverage are taken on detection hot spot (28) in device CCD (27) image planes
(30), light splitting pupil differential confocal curve (23) is obtained；
Zero crossing position according to light splitting pupil differential confocal curve (23) carries out nanoscale inspection to the axial defocusing position of sample (9)
It surveys；
Step 2: the femtosecond constituted using femto-second laser (15), laser space-time Shaping Module (16) and two-dimensional scanner (18)
Laser-processing system carries out micro-nano structure processing to sample (9), utilizes light splitting pupil differential confocal axial direction monitoring mould in process
Block (1) is monitored the axial position on sample in process (9) surface；Mistake according to light splitting pupil differential confocal curve (23)
Dead-center position carries out nanoscale monitoring to the axial position of sample (9)；
Step 3: axial position of the computer (33) according to measurement result adjustment sample (9), adjusts precision stage (10) in real time
Position, realize process in sample accurate fixed-focus；
Step 4: Step 4: after processing is completed, using light splitting pupil differential confocal axial direction monitoring modular (1) to after processing is completed
Sample structure is scanned measurement, realizes the nano high-precision in situ detection of sample (9) morphological parameters after processing；
Step 5: axial monitoring collimated light beam (4) focuses on sample (9) through object lens (7), raman scattering spectrum is inspired, institute
It states raman scattering spectrum to be detected after dichroscope B (6) reflection by Raman spectroscopic detection module (26), to the object of sample after processing
Property parameter carry out in situ detection analysis, wherein Raman spectroscopic detection module (26) is by spectrum coupled lens (24) and spectrographic detection
Device (25) composition.
2. femtosecond laser machined parameters according to claim 1 are divided pupil differential confocal Raman spectrum monitoring method, special
Sign is: the processing laser beam (17) and axial monitoring collimated light beam (4) that femtosecond laser system of processing issues are same through object lens (7)
Axis is coupled to sample (9) surface, realizes high-resolution monitoring and the original position of femtosecond laser processed sample geometric shape and performance parameter
Imaging.
3. femtosecond laser machined parameters according to claim 1 are divided pupil differential confocal Raman spectrum monitoring method, special
Sign is: also observing using micro-imaging module (37) sample (9), assists sample pose adjustment；White light source
(34) light issued through lighting system (35), illumination spectroscope (36), dichroscope B (6), after object lens (7) uniform irradiation to sample
On product (9), the light returned through sample (9) is after illumination spectroscope (36), the second spectroscope (38) reflection through image-forming objective lens (39)
It is imaged on CCD (40), is capable of inclination and the position of judgement sample (9).
4. femtosecond laser machined parameters are divided pupil differential confocal Raman optical spectrum monitoring device, it is characterised in that: including femtosecond laser
Device (15), the laser space-time Shaping Module (16) and two-dimensional scanner (18) for being located at femto-second laser (15) exit direction, are located at
The dichroscope A (5), dichroscope B (6), object lens (7) and precision stage of femto-second laser (15) outgoing beam vertical direction
(10), positioned at the light splitting pupil differential confocal axial direction monitoring modular (1) of dichroscope A (5) reflection direction and positioned at dichroscope B
(6) the Raman spectroscopic detection module (26) of reflection direction, object lens (7) are driven by axial scan device (8)；It is divided pupil differential confocal axis
Include laser (2), be located at the beam expander (3) of laser (2) exit direction, reflecting mirror (12) and be located to monitoring modular (1)
The detection object lens (13) of reflecting mirror (12) reflection direction and light splitting pupil differential detection device (14)；Wherein axial monitoring collimated light beam
(4) and processing laser beam (17) through dichroscope A (5), object lens (7) is coaxially incident on sample (9) surface.
5. femtosecond laser machined parameters according to claim 4 are divided pupil differential confocal Raman optical spectrum monitoring device, special
Sign is: light splitting pupil differential detection device (14) can be by hot spot enlarging objective (19) and detection CCD (27), the first search coverage (29)
It is constituted with the second search coverage (30), wherein the first search coverage (29) and the second search coverage (30) are located at detection CCD (27)
Image planes on and it is symmetrical about optical axis.
6. femtosecond laser machined parameters according to claim 4 are divided pupil differential confocal Raman optical spectrum monitoring device, special
Sign is: light splitting pupil differential detection device (14) can be also made of hot spot enlarging objective (19) and dual-quadrant detector (20), wherein
The first detection quadrant (21) and the second detection quadrant (22) on dual-quadrant detector (20) test surface is symmetrical about optical axis.
7. femtosecond laser machined parameters according to claim 4 are divided pupil differential confocal Raman optical spectrum monitoring device, special
Sign is: laser space-time Shaping Module (16) can be made of spacing shaping device (31), temporal shaping device (32), to femto-second laser
(15) laser beam issued carries out the combined regulating of time domain and airspace parameter, improves femtosecond laser micro-nano technology ability.
8. femtosecond laser machined parameters according to claim 4 are divided pupil differential confocal Raman optical spectrum monitoring device, special
Sign is: can also be observed using image-forming module (37) sample (9), wherein image-forming module (37) is by white light source
(34), lighting system (35), illumination spectroscope (36), dichroscope B (6), image-forming objective lens (39), CCD (40) composition；White light light
The light that source (34) issues uniform irradiation after lighting system (32), illumination spectroscope (36), dichroscope B (6), object lens (7) arrives
On sample (9), the light returned through sample (9) is after illumination spectroscope (36), the second spectroscope (38) reflection through image-forming objective lens
(39) it is imaged on CCD (40), the inclination of judgement sample (9) and position.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811345887.2A CN109187495A (en) | 2018-11-13 | 2018-11-13 | Femtosecond laser machined parameters are divided pupil differential confocal Raman spectrum monitoring method and apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201811345887.2A CN109187495A (en) | 2018-11-13 | 2018-11-13 | Femtosecond laser machined parameters are divided pupil differential confocal Raman spectrum monitoring method and apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN109187495A true CN109187495A (en) | 2019-01-11 |
Family
ID=64939524
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN201811345887.2A Pending CN109187495A (en) | 2018-11-13 | 2018-11-13 | Femtosecond laser machined parameters are divided pupil differential confocal Raman spectrum monitoring method and apparatus |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN109187495A (en) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110966928A (en) * | 2019-11-20 | 2020-04-07 | 北京理工大学 | Laser processing morphological performance time-resolved differential confocal spectrum measuring method and device |
| CN110966929A (en) * | 2019-11-20 | 2020-04-07 | 北京理工大学 | Laser processing morphological performance time-resolved confocal spectrum measurement method and device |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5804813A (en) * | 1996-06-06 | 1998-09-08 | National Science Council Of Republic Of China | Differential confocal microscopy |
| JP2003161890A (en) * | 2001-11-29 | 2003-06-06 | Canon Inc | Shape observing apparatus |
| CN101526477A (en) * | 2009-04-21 | 2009-09-09 | 北京理工大学 | Laser differential confocal spectrum microscopy tomography device |
| CN105136750A (en) * | 2015-07-17 | 2015-12-09 | 北京理工大学 | Laser differential confocal LIBS, Raman spectrum-mass spectrum imaging method and Raman spectrum-mass spectrum imaging device |
| CN105241849A (en) * | 2015-07-17 | 2016-01-13 | 北京理工大学 | Spectral pupil laser differential confocal LIBS, Raman spectrum-mass spectrum microscopic imaging method and Raman spectrum-mass spectrum microscopic imaging device |
| CN108413867A (en) * | 2017-04-18 | 2018-08-17 | 北京理工大学 | Laser micro/nano processing light splitting pupil differential confocal on-line monitoring integral method and device |
-
2018
- 2018-11-13 CN CN201811345887.2A patent/CN109187495A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5804813A (en) * | 1996-06-06 | 1998-09-08 | National Science Council Of Republic Of China | Differential confocal microscopy |
| JP2003161890A (en) * | 2001-11-29 | 2003-06-06 | Canon Inc | Shape observing apparatus |
| CN101526477A (en) * | 2009-04-21 | 2009-09-09 | 北京理工大学 | Laser differential confocal spectrum microscopy tomography device |
| CN101526477B (en) * | 2009-04-21 | 2010-11-10 | 北京理工大学 | Laser differential confocal spectrum microscopy tomography device |
| CN105136750A (en) * | 2015-07-17 | 2015-12-09 | 北京理工大学 | Laser differential confocal LIBS, Raman spectrum-mass spectrum imaging method and Raman spectrum-mass spectrum imaging device |
| CN105241849A (en) * | 2015-07-17 | 2016-01-13 | 北京理工大学 | Spectral pupil laser differential confocal LIBS, Raman spectrum-mass spectrum microscopic imaging method and Raman spectrum-mass spectrum microscopic imaging device |
| CN108413867A (en) * | 2017-04-18 | 2018-08-17 | 北京理工大学 | Laser micro/nano processing light splitting pupil differential confocal on-line monitoring integral method and device |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110966928A (en) * | 2019-11-20 | 2020-04-07 | 北京理工大学 | Laser processing morphological performance time-resolved differential confocal spectrum measuring method and device |
| CN110966929A (en) * | 2019-11-20 | 2020-04-07 | 北京理工大学 | Laser processing morphological performance time-resolved confocal spectrum measurement method and device |
| CN110966929B (en) * | 2019-11-20 | 2021-02-05 | 北京理工大学 | Laser processing morphological performance time-resolved confocal spectrum measurement method and device |
| CN110966928B (en) * | 2019-11-20 | 2021-02-26 | 北京理工大学 | Laser processing morphological performance time-resolved differential confocal spectrum measuring method and device |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| CN108413867A (en) | Laser micro/nano processing light splitting pupil differential confocal on-line monitoring integral method and device | |
| CN108286936A (en) | Laser micro/nano processes differential confocal on-line monitoring integral method and device | |
| CN109270047A (en) | Femtosecond laser machined parameters confocal Raman spectra in-situ monitoring method and device | |
| CN109187494A (en) | Femtosecond laser machined parameters differential confocal Raman spectra in-situ monitoring method and device | |
| CN103940800B (en) | Confocal laser Brillouin-method for measuring Raman spectrum and device | |
| EP2538170A1 (en) | Method and device for measuring multiple parameters of differential confocal interference component | |
| CN104482880B (en) | Laser stimulated emission depletion three-dimensional super-resolution light splitting pupil differential confocal imaging method and device | |
| CN104567674B (en) | Bilateral fitting confocal measurement method | |
| CN105181298B (en) | Multiple reflections formula confocal laser Long focal length measurement method and apparatus | |
| CN103115580B (en) | Based on three-dimensional hole shape detection method and the system of optical coherence tomography scanning | |
| CN104181131B (en) | Infrared modulated luminescence generated by light two-dimensional imaging light path is automatically positioned calibrating installation | |
| CN102589428B (en) | Asymmetric-incidence-based sample axial position tracking and correcting method and device | |
| CN109187492A (en) | The femtosecond laser for being divided pupil differential confocal Raman-LIBS spectrographic detection processes monitoring method | |
| CN109211876A (en) | Femtosecond laser machined parameters are divided the confocal Raman spectrum in-situ monitoring method of pupil and device | |
| CN108169207A (en) | Space autofocusing laser differential confocal Raman spectrum imaging detection method and device | |
| CN203069151U (en) | Three-dimensional hole form detection system based on optical coherence tomography scanning | |
| CN113588682A (en) | Large-range high-precision rapid defect detection system for 3D parts | |
| CN109444110A (en) | The femtosecond laser processing monitoring fusion method and device of differential confocal Raman-LIBS spectrographic detection | |
| CN109187493A (en) | It is divided the femtosecond laser processing monitoring method and device of the confocal Raman-LIBS spectrographic detection of pupil | |
| CN103954598A (en) | Axial high-accuracy location method and device based on evanescent wave illumination | |
| CN109187725A (en) | The femtosecond laser processing monitoring method and device of confocal Raman-LIBS- mass spectrometry detection | |
| CN113267252A (en) | Staring type confocal microscopic morphology spectrum four-dimensional detection system | |
| CN109187495A (en) | Femtosecond laser machined parameters are divided pupil differential confocal Raman spectrum monitoring method and apparatus | |
| CN104697967B (en) | High-space resolution laser twin shaft confocal spectroscopic mass spectrum micro imaging method and device | |
| CN108226131A (en) | A kind of space panorama laser differential confocal Raman spectrum imaging detection method and device |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination |