CN108169207A - Space autofocusing laser differential confocal Raman spectrum imaging detection method and device - Google Patents
Space autofocusing laser differential confocal Raman spectrum imaging detection method and device Download PDFInfo
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- G—PHYSICS
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- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
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Abstract
The present invention relates to space autofocusing laser differential confocal Raman spectrum imaging detection method and devices, belong to space optics imaging and spectral measurement methods field.The space autofocusing laser differential confocal Raman spectrum imaging detection method and device, lossless separation is carried out to Rayleigh scattering light and Raman diffused light, utilize the accurate corresponding characteristic in detector differential confocal response curve zero crossing and focal position, zero crossing is responded by searching accurately to control telescopic system adjust automatically focus, excitation beam is made to focus on measurand automatically, the spectral information of laser facula focal position is obtained simultaneously, and the image graphics information of target is obtained by image detector, device realizes the spectrographic detection of space automatic focusing, image acquisition, form a kind of achievable sample space autofocusing spectrum, the method and apparatus of image detection.The present invention has many advantages, such as automatic focusing, accurate positioning, and large space range, spectral detectivity are high, target image obtains.
Description
Technical field
The present invention relates to space optics imaging and spectral measurement methods fields, specially space autofocusing laser differential confocal
Raman spectrum imaging detection method and device.
Background technology
Confocal laser Raman spectrum measuring technology combines aerial image technology with Raman spectrum analysis technology
New technology, it focuses on incident laser on sample by autofocusing telescopic system, so as in larger distance not
In the case of being interfered by ambient substance, obtain material composition structure and composition of product etc. in the same old way, preferable molecule is provided and " is referred to
Line " feature.It not only can be with the raman spectral signal of microcells different in the same level of observing samples, moreover it is possible to which observing samples are empty respectively
Between the different level of depth Raman signal, spacescan is carried out to sample, so as to be reached in the case of not lesioned sample
To the effect for carrying out collection of illustrative plates detection.Confocal laser Raman spectrum measuring technology is due to its lossless spectrum tomography ability and high score
Resolution is widely used to physics, chemistry, biomedicine, petrochemical industry, environmental science, material science, geology, Xing detect, engage in archaeological studies
With the fields such as gemstone testing.
At present, after the principle of typical confocal laser Raman spectroscopic detection instrument is as shown in Figure 1, laser sends out light beam, warp
It after first condenser, the first pin hole, is expanded after second condenser lens as directional light, through the first beam splitting system, a quarter
It after wave plate, the 6th condenser, focuses on sample, inspires the Raman diffused light for being loaded with sample spectra characteristic, mobile quilt
Sample, after the Raman diffused light in corresponding sample region is made to pass through the 6th condenser, quarter-wave plate, and by first point
Photosystem reflects, and after the 7th condenser focuses on third pin hole, the second spectrometer is converged to by the 8th condenser, so as to survey
The Raman spectrum of sample spectral information must be loaded with.
Existing confocal laser Raman spectrometer has the following problems：1st, microscopic system is employed, it is detectable to limit system
Range；2nd, three-dimensional mobile platform is employed as sample carrying platform, limits sample size and existence；3rd, it is carrying out
Before sample detection, need to handle sample；4th, in order to reduce the energy loss of Raman diffused light, the pin hole selected in system
Usually between 150um-200um, system carries out focus positioning using photon excited, and pinhole size directly affects confocal axial direction and determines
The halfwidth of position curve, pinhole size is larger to lead to the reduction of system Focus accuracy, that is, reduces system space resolving power；5th, it utilizes
Weak Raman diffused light is positioned, and reduces the fixed-focus sensitivity of system；6th, during long-time spectrographic detection, system is held
It easily is influenced to drift about by factors such as environment, generates defocus, reduce the reliability of system long-term work；7th, system only carries out light
Spectrum detection, pattern are single；8th, it needs to hide light in measurement process, working environment is restricted.Above-mentioned reason limits confocal drawing
The ability of graceful spectroscopic system space exploration substance constrains the further development of crs technique.
Invention content
(1) the technical issues of solving
In view of the deficiencies of the prior art, the present invention provides the detections of space autofocusing laser differential confocal Raman spectrum imaging
Method and apparatus solves the ability for limiting confocal Raman spectra system space exploration substance, constrains confocal Raman spectra
The problem of further development of technology.
(2) technical solution
In order to achieve the above object, the present invention is achieved by the following technical programs：Space autofocusing laser differential confocal
Raman spectrum imaging detection method, specifically includes following steps：
Step 1 generates exciting light by laser beam generation system, by dichroic optical system, focusing system of looking in the distance
Afterwards, it is radiated on sample, and inspires Rayleigh scattering light and be loaded with the Raman diffused light of sample spectra characteristic；
Step 2, by focus adjusting mechanism of looking in the distance, the response of differential confocal detection system is made to reach zero crossing, completes exciting light
Beam is autofocusing on sample, while obtains the location information [α, β, l] of sample；
Step 3, the Rayleigh scattering light for making corresponding sample region and Raman diffused light again pass by focusing system of looking in the distance,
And focusing system of being looked in the distance is shaped to directional light and is transmitted through dichroic optical system, through dichroic optical system to Rayleigh scattering light
It is detached with Raman diffused light；
Step 4, part Rayleigh scattering light and natural light are transmitted by dichroic optical system, are reflected into through the first beam splitting system
Enter differential confocal detection system, using the first detector in differential confocal detection system, in differential confocal detection system
Four detectors measure the intensity response I [α, β, l] of reflection sample position information, you can carry out focusing system focal position of looking in the distance
Judgement, so as to the automatic focusing for focusing system of completing to look in the distance, excitation beam is focused on sample；
Step 5, Raman diffused light are transmitted through dichroic optical system, and being transmitted into Raman spectrum through the first beam splitting system visits
Examining system measures the Raman scattering signal I (λ) for being loaded with sample characteristic using Raman spectroscopic detection system, you can carries out light
Spectrum test, wherein λ are wavelength；
Step 6, natural light are reflected through the first beam splitting system part, and image optics system is reflected into through the second beam splitting system
System obtains target area image information；
I (λ) is transmitted to data processing module progress data processing by step 7, and area is corresponded to comprising sample so as to obtain
The spectral information I (λ) of domain position, object location information [α, β, l]；
Step 8, rotation detection system carry out along α, β scanning direction space, and focusing system of looking in the distance progress is swept along l directions
Focusing is retouched, repeat the above steps one group of n that the measure corresponding objective focus positions sequences comprising location information [α, β, l] and I (λ)
Row metrical information [I (λ), α, β, l]；
Step 9, using the corresponding location informations [α, β, l] of distinguishable region δ n, find out the spectral information in corresponding δ n regions
In (λ) value, further according to the relationship with space coordinate [α, β, l], reconstruct reflection measured object microcell δ n three-dimensional structures and spectral characteristic
Information In (α n, β n, ln, λ n), that is, realize the spectrographic detection of microcell δ min and three-dimensional geometry position sensing and corresponding
Image information；
Step 10, the three dimension scale of corresponding minimum distinguishable region δ min and spectral characteristic are determined by following formula：
Preferably, the corresponding focusing system focus F that looks in the distance at the differential confocal response curve zero crossing O, focuses on light herein
Spot size is minimum, and the region of detection is minimum, and differential confocal response curve other positions correspond to the defocus region for focusing system of looking in the distance,
Focused spot size before coke or in defocused region increases with defocusing amount and is increased, and using this feature, is adjusted by adjusting looking in the distance
The focus adjusting mechanism of looking in the distance of burnt system, accurately focuses on excitation beam on sample.
Preferably, the excitation beam can be light beam：Linear polarization, circular polarization, radial polarisation light etc., can also be
The structure light beam generated by pupil filtering technology can compress the size for measuring focal beam spot with polarization Modulation combination,
The angular resolving power of raising system.
The invention also discloses space autofocusing laser differential confocal Raman spectrum imaging detection device, including excitation beam
Generation system, focusing system of looking in the distance, dichroic optical system, the first beam splitting system, Raman spectroscopic detection system, differential confocal are visited
Examining system, optical imaging system and data processing module and computer control system, wherein, excitation beam generation system is looked in the distance
Focusing system, the reflection direction that dichroic optical system is placed sequentially in along light path, the first beam splitting system are in dichroic light splitting
The transmission direction of system, Raman spectroscopic detection system are located at the transmission direction of the first beam splitting system, differential confocal detection system position
In the reflection direction of the first beam splitting system, optical imaging system is located at the reflection direction of the second beam splitting system, data processing module
With Raman spectroscopic detection system and differential confocal detection system and looking in the distance focusing system and space panorama scanning system is connect, it is used for
Melt merging treatment Raman spectroscopic detection system and the collected data of differential confocal detection system and complete focusing system of looking in the distance
Automatic focusing.
Preferably, the excitation beam generation system can also include light polarization modulator and iris filter, for generating
Polarised light and space structure light beam, for improving the optical property of system.
It is preferably, described that for compressing, the iris filter of excitation hot spot can be located at Polarization Controller and dichroic is divided
Between system, dichroic optical system is may be located between focusing system of looking in the distance.
Preferably, the excitation beam generation system can also be placed on the transmission direction of dichroic optical system, tune of looking in the distance
Burnt system is placed sequentially in the transmission direction of dichroic optical system, and the first beam splitting system is placed sequentially in dichroic optical system
Reflection direction, Raman spectroscopic detection system is located at the transmission direction of the first beam splitting system, and differential confocal detection system is located at the
The reflection direction of one beam splitting system, imaging optical system can be located at the reflection direction of the second beam splitting system, data processing module
Connect differential confocal detection system and Raman spectroscopic detection system and focusing system of looking in the distance.
Preferably, the Raman spectroscopic detection system can be common Raman spectroscopic detection system, including along light path according to
5th condenser of secondary placement, second positioned at the first spectrometer of the 5th condenser focal position and after the first spectrometer
Detector for the detection of the surface spectrum of sample, can also be confocal Raman spectra detection system, including along light path according to
7th condenser of secondary placement, the third pin hole positioned at the 7th condenser focal position, the 8th optically focused after third pin hole
Mirror, the third detector positioned at the second spectrometer of the 8th condenser focal position and after the second spectrometer, for improving
System signal noise ratio and spatial resolution complete the spectrographic detection to sample.
Preferably, the data processing module includes the differential confocal data processing module and use for processing position information
In processing position information and the data fusion module of spectral information, the data control for controlling focusing system focusing of looking in the distance is further included
Molding block, the image sensing module for image information acquisition.
(3) advantageous effect
The present invention provides space autofocusing laser differential confocal Raman spectrum imaging detection method and devices.Have following
Advantageous effect：
(1), the space autofocusing laser differential confocal Raman spectrum imaging detection method and device, by using existing common
The Rayleigh scattering for being better than 1e3-1e6 times of sample Raman diffused light in the sample scattering light that burnt Raman spectroscopic detection system is collected into
Light beam carries out real-time spatial position tracking adjustment to the focus of focal beam spot, makes laser facula vernier focusing on sample, Raman
Raman diffused light in the sample scattering light that spectrum investigating system is collected into using system carries out spectrographic detection, passes through image optics
System using the natural light of target reflection, obtains the image information of target, then again by differential confocal detection system signal with drawing
Graceful spectral signal, spatial image information organically blend, and using autofocusing telescopic system, improve system Raman scattering light and collect energy
Power increases substantially the detectable distance of system, so as to fulfill laser differential confocal Raman spectrum imaging system large space range
Automatic material spectrographic detection, image acquisition.
(2), the space autofocusing laser differential confocal Raman spectrum imaging detection method and device are by using looking in the distance
System, improves system light capacity gauge, improves system detection range；It looks in the distance to focus using the control of differential confocal response curve and is
System is completed excitation beam and is autofocusing on sample.
(3), the space autofocusing laser differential confocal Raman spectrum imaging detection method and device, by using differential common
The zero crossing of burnt system axial response curve accurately corresponds to this characteristic with telescopic system focal position, passes through response curve zero passage
Point carrys out the accurate spectral information for obtaining excitation hot spot focal position, realizes the spectrographic detection of large space range.
(4), the space autofocusing laser differential confocal Raman spectrum imaging detection method and device, by using first point
Electro-optical device is divided the Rayleigh scattering light that system is collected into the Raman diffused light for being loaded with sample spectral information, Rayleigh
Scattering light enters differential confocal detection system, and Raman diffused light enters Raman spectroscopic detection system, realizes the full utilization of luminous energy,
Enable the entrance Raman spectroscopic detection system that faint Raman diffused light is lossless, improve system spectrum detectivity.
(5), the space autofocusing laser differential confocal Raman spectrum imaging detection method and device, by by differential confocal
Detection system is combined together with technology of auto, realizes the accurate focusing of automation.
(6), the space autofocusing laser differential confocal Raman spectrum imaging detection method and device, by by image optics
Technology, differential confocal Detection Techniques and Raman spectroscopic detection system and panorama scanning system are structurally and functionally blending, both
The imaging of sample geometric parameter can be achieved, and can realize the spectrographic detection of sample, i.e., realize that three dimensions is imaged simultaneously, collection of illustrative plates into
Picture and spectrum test Three models；Sample test is not needing to prepare, and realizes seeing for automation and surveys.
Description of the drawings
Fig. 1 is confocal Raman spectra imaging method schematic diagram of the present invention；
Fig. 2 is differential confocal response curve of the present invention；
Fig. 3 is space autofocusing laser differential confocal Raman spectrum imaging detection method schematic diagram of the present invention；
Fig. 4 is space autofocusing laser differential confocal Raman spectrum imaging detection device schematic diagram of the present invention；
Fig. 5 is autofocusing laser differential confocal Raman spectrum imaging detection method in space of the present invention and device embodiment
Figure；
In figure, 1- excitation beam generation systems, 2- lasers, the first negative lenses of 3-, the first condensers of 4-, the second optically focused of 5-
Mirror, the first pin holes of 6-, 7- third condensers, 8-1/4 wave plates, 9- dichroic optical systems, 10- look in the distance focusing system, and 11- looks in the distance
Collimating mirror, 12- look in the distance focus adjusting mechanism, and 13- looks in the distance focusing collecting lens, 14- samples, the first beam splitting systems of 15-, and 16- second is divided
The defocused detection systems of system 17-, the first detectors of 18-, the second pin holes of 19-, the 4th condensers of 20-, the confocal response curves of 21-,
22- Raman spectroscopic detection systems, the second detectors of 23-, the 5th condensers of 24-, the first spectrometers of 25-, 26- entrance slits, 27-
Plane mirror, 28- the first concave reflection condensers, 29- the second concave reflection condensers, 30- spectrum gratings, 31- images pass
Sensing system, 32- imaging sensors, 33- imaging optical systems, 34- data fusion modules, 35- computer control systems, 36-
Three-beam-splitting system, the 6th condensers of 37-, the 7th condensers of 38-, 39- third pin holes, the 8th condensers of 40-, the second spectrum of 41-
Instrument, 42- third detectors, the confocal response curves two of 43-, 44- three-dimensional mobile platforms, detection system before 45 cokes, 46- the 4th are detected
Device, the 4th pin holes of 47-, the 9th condensers of 48-, 49- differential confocal beam splitting systems, response curve before 50- cokes, the defocused responses of 51-
Curve, 52- differential confocal response curves, 53- differential confocal detection systems, 54- data processing modules.
Specific embodiment
Below in conjunction with the attached drawing in the embodiment of the present invention, the technical solution in the embodiment of the present invention is carried out clear, complete
Site preparation describes, it is clear that described embodiment is only part of the embodiment of the present invention, instead of all the embodiments.It is based on
Embodiment in the present invention, those of ordinary skill in the art are obtained every other without making creative work
Embodiment shall fall within the protection scope of the present invention.
The basic thought of the present invention is the investigative range that system is improved using telescopic system, utilizes focus technique, differential common
The automatic focusing of coke detection realization system, obtains image information, and be combined with Raman detection using image sensing, completes
The Raman spectrum imaging detection of space autofocusing.
As shown in Fig. 2, excitation beam generation system 1 generates exciting light, reflected by dichroic optical system 9, through looking in the distance
It after system 10, focuses on sample 14, and inspires Rayleigh scattering light on sample and be loaded with sample spectral characteristic
Raman diffused light, inspire Raman diffused light and Rayleigh scattering light and sample reflection natural light light echo is collected by system
Road, after telescopic system 10, after the transmission of dichroic optical system 9, Raman diffused light, natural light and part Rayleigh scattering light
Transmission, is divided through the first beam splitting system 15, and part Rayleigh scattering light is reflected into differential confocal detection system 53 and carries out position
Detection, Raman diffused light is transmitted into spectrum investigating system 22 and carries out spectrographic detection, according to differential confocal response curve, at data
Reason module controls focus adjusting mechanism focusing of looking in the distance, and exciting light is made to focus on sample, makes differential confocal response curve zero passage, completes to swash
The automatic focusing of luminous beam, after natural light is reflected by the first beam splitting system, and is reflected into image sensing system by the second beam splitting system
System, image sensing obtain the image information of target using natural light.
The embodiment of the present invention provide space autofocusing laser differential confocal Raman spectrum imaging detection method, specifically include with
Lower step：
Step 1 generates exciting light by laser beam generation system 1, by dichroic optical system 9, focusing system of looking in the distance
It after system 10, is radiated on sample 14, and inspires Rayleigh scattering light and be loaded with the Raman diffused light of 14 spectral characteristic of sample；
Step 2, by focus adjusting mechanism 12 of looking in the distance, the response of differential confocal detection system 53 is made to reach zero crossing, completes to swash
Luminous beam is autofocusing on sample 14, while obtains the location information [α, β, l] of sample 14；
Step 3, the Rayleigh scattering light for making corresponding sample region and Raman diffused light again pass by focusing system of looking in the distance
10, and focusing system 10 of being looked in the distance is shaped to directional light and is transmitted through dichroic optical system 9, through dichroic optical system 9 to auspicious
Profit scattering light and Raman diffused light are detached；
Step 4, part Rayleigh scattering light and natural light are transmitted by dichroic optical system 9, anti-through the first beam splitting system 15
It injects into differential confocal detection system 53, utilizes the first detector 18 in differential confocal detection system 53, differential confocal detection
The 4th detector 46 in system 53 measures the intensity response I [α, β, l] of reflection 14 location information of sample, you can look in the distance
Excitation beam so as to the automatic focusing for focusing system 10 of completing to look in the distance, is focused on sample by the judgement of 10 focal position of focusing system
On product 14；
Step 5, Raman diffused light are transmitted through dichroic optical system 9, and Raman light is transmitted into through the first beam splitting system 15
Detection system 22 is composed, the Raman scattering signal I (λ) for being loaded with 14 characteristic of sample is measured using Raman spectroscopic detection system 22,
Spectrum test can be carried out, wherein λ is wavelength；
Step 6, natural light are reflected through 15 part of the first beam splitting system, and image optics is reflected into through the second beam splitting system 16
System 33 obtains target area image information；
I (λ) is transmitted to data processing module progress data processing by step 7, is corresponded to so as to obtain comprising sample 14
The spectral information I (λ) of regional location, object location information [α, β, l]；
Step 8, rotation detection system carry out along α, β scanning direction space, and focusing system 10 of looking in the distance is carried out along l directions
Scanning focusing repeats the above steps and measures one group of n of corresponding objective focus positions comprising location information [α, β, l] and I (λ)
Sequence measuring information [I (λ), α, β, l]；
Step 9, using the corresponding location informations [α, β, l] of distinguishable region δ n, find out the spectral information in corresponding δ n regions
In (λ) value, further according to the relationship with space coordinate [α, β, l], reconstruct reflection measured object microcell δ n three-dimensional structures and spectral characteristic
Information In (α n, β n, ln, λ n), that is, realize the spectrographic detection of microcell δ min and three-dimensional geometry position sensing and corresponding
Image information；
Step 10, the three dimension scale of corresponding minimum distinguishable region δ min and spectral characteristic are determined by following formula：
As shown in figure 4, space autofocusing laser differential confocal Raman spectrum imaging detection method, testing procedure are as follows：
First, the laser 2 in excitation beam generation system 1 generates exciting light, is expanded by the diverging of the first negative lens 3,
Become collimated light beam through the first condenser 4 collimation, reflect through dichroic optical system 9, dissipated after focusing lens 11 of looking in the distance, through hoping
After remote focusing collecting lens 13, focus on sample 14, and inspire Rayleigh scattering light on sample and be loaded with sample
The Raman diffused light of spectral characteristic, the natural light of Raman diffused light and Rayleigh scattering light and object reflection inspired are looked in the distance tune
The burnt collection of collecting lens 13 recovering light path, the compression light beam bore after collimating mirror 11 of looking in the distance, after the transmission of dichroic optical system 9,
Raman diffused light and part Rayleigh scattering light transmission and natural light, are divided through the first beam splitting system 15, part Rayleigh scattering light and
Natural light is reflected into the second beam splitting system 16, and after the light splitting of the second beam splitting system, part Rayleigh scattering light enters differential common
Burnt detection system 53, part natural light enter image sensing 31, and the part Rayleigh into differential confocal detection system 53 dissipates
It penetrates light to transmit through differential confocal beam splitting system 49, assembles 20 through the 4th condenser, transmitted through the second pin hole 19, in the first detector
Defocused response signal is formed on 18, is partly reflected by differential confocal beam splitting system 49, through the 9th condenser, by the 4th pin hole
47, response signal before coke is formed on the 4th detector 46, and be sent to data processing module 34, transmitted after then being handled
To computer control system 35, after the processing of computer control system 35, form control signal and send data processing module 34 to,
Data processing module 34 generates focusing control signal and focus adjusting mechanism 12 of looking in the distance is controlled to focus, while the first detector 18,
The signal of 4th detector 46 can also track variation, form new control loop, this process continues, until differential confocal
There is zero crossing in response curve, and focus adjusting mechanism 12 completes the focusing of exciting light, and Raman diffused light is transmitted into spectrographic detection at this time
System 22 carries out spectrographic detection, and the natural light into image sensing 31 forms image information.
Using space autofocusing laser differential confocal Raman spectrum imaging detection device, pass through differential confocal probe response song
Line makes the focusing of the completion exciting light of focus adjusting mechanism 12, and Raman diffused light is transmitted into spectrum investigating system 22 and carries out spectrum spy at this time
It surveys, Raman diffused light is assembled by the 5th condenser 24 into the first spectrometer 25, and for Raman diffused light through entrance slit 26, plane is anti-
Spectrum grating 30 is reached after penetrating the reflection of 27 and first concave reflection condenser 28 of mirror, light beam is after 30 diffraction of spectrum grating, quilt
The reflection of second concave reflection condenser 29 focuses on the second detector 23.It is different in Raman spectrum since grating diffration acts on
The light of wavelength is separated from each other, go out from spectrometer shoot out be sample Raman spectrum.
In measurement process, when carrying out spacescan to sample 14, it is tested to measure reaction for differential confocal detection system 53
The intensity response of 14 distance change of sample is I (α, β, l), and gained intensity response I (α, β, l) is transmitted to data processing module 34
It is handled.
The Raman for being loaded with 14 spectral information of sample that second detector 23 detects in Raman spectroscopic detection system 22
It is I (λ) to scatter light spectral signal, and wherein λ is wavelength, at the same image sensing obtain target area image information IMG (α,
β, l)；
By I (λ), I (α, β, l), IMG (α, β, l) are transmitted to computer control system 35 and carry out data processing, so as to obtain
Include the three-dimensional measurement information I (α, β, l, λ, IMG) of sample 14 location information I (α, β, l) and spectral information I (λ).
To sample 14 along α, to scanning, focus adjusting mechanism 12 of looking in the distance repeats the above steps along l to scanning and measures correspondence β
One group of n near objective focus positions comprising location information [α, β, l] and I (λ) sequence measuring information [I (λ), α, β, l,
IMG]。
Using the corresponding location informations [α, β, l] of distinguishable region δ n, the spectral information In (λ) in corresponding δ n regions is found out
Value, further according to the relationship with space coordinate [α, β, l], the information of reconstruct reflection measured object microcell δ n three-dimensional structures and spectral characteristic
In (α n, β n, ln, λ n), that is, realize the spectrographic detection of microcell δ min and three-dimensional geometry position sensing
The three dimension scale and spectral characteristic of corresponding minimum distinguishable region δ min is determined by following formula：
Realize space autofocusing confocal laser Raman spectrum imaging detection, the imaging of microcell collection of illustrative plates；
Iσmin(α, β, l)=In(α, β, l) 3D shape is imaged
Iσmin(α, β, l)=In(λ) spectral measurement
Figure 4, it is seen that by the zero crossing of 53 response curve 52 of differential confocal detection system, can accurately capture sharp
The focal position of luminous spot from measuring in sequence data, extracts the excitation spectrum of corresponding focus positions F, that is, realizes microcell
Spectrographic detection and three-dimensional geometry position sensing, while obtain the image information of target microcell.
As shown in figure 4, space autofocusing laser differential confocal Raman spectrum imaging detection device is included positioned at dichroic point
The laser beam generation system 1 of 9 reflection direction of photosystem is sequentially placed positioned at 9 transmission direction of dichroic optical system along light path
Collimating mirror 11 of looking in the distance, look in the distance focusing collecting lens 13, sample 14, positioned at the first of 9 transmission direction of dichroic optical system
Beam splitting system 15, it is anti-positioned at the first beam splitting system positioned at the Raman spectroscopic detection system 22 of 15 transmission direction of the first beam splitting system
Second beam splitting system 16 in direction is penetrated, positioned at the differential confocal detection system 53 of 16 transmission direction of the second beam splitting system, positioned at
The image sensing of two beam splitting systems, 16 reflection direction and positioned at differential confocal detection system 53 and Raman spectroscopic detection system
22 and focus adjusting mechanism 12 of looking in the distance junction data processing module 34；Wherein, excitation beam generation system 1 excites for generating
Light beam, including the laser 2 being sequentially placed along light path, the first negative lens 3, the first condenser 4；Raman spectroscopic detection system includes
The 5th condenser 24 being sequentially placed along light path, positioned at the first spectrometer 25 of 24 focal position of the 5th condenser and positioned at first
The second detector 23 after spectrometer 25, wherein, the first spectrometer 25 includes the entrance slit 26 being sequentially placed along light path, plane
Speculum 27, the first concave reflection condenser 28, spectrum grating 30, the second concave reflection condenser 29；Differential confocal detection system
System 53 includes detection system 45, differential confocal beam splitting system 49 before defocused detection system 17, coke, wherein defocused detection system 27 is wrapped
The 4th condenser 20 is included, the second pin hole 19 behind 20 focal plane of the 4th condenser, first after the second pin hole 19 visits
Device 18 is surveyed, detection system 45 includes the 9th condenser 48, the 4th pin hole 47 before 48 focal plane of the 9th condenser, position before coke
The 4th detector 46 after the 4th pin hole 47；Data processing module 34 and computer control system 35, are adopted for fusion treatment
The data that collect simultaneously generate control signal.
In the present invention, the corresponding 10 focus F of focusing system that looks in the distance, focuses on herein at 52 zero crossing O of differential confocal response curve
Spot size is minimum, and the region of detection is minimum, 52 other positions of differential confocal response curve correspondence look in the distance focusing system 10 from
Burnt region, focused spot size before coke or in defocused region increase with defocusing amount and are increased, using this feature, by adjusting
It looks in the distance the focus adjusting mechanism 12 of looking in the distance of focusing system 10, accurately focuses on excitation beam on sample 14.
In the present invention, excitation beam can be light beam：Linear polarization, circular polarization, radial polarisation light etc., can also be by
The structure light beam of pupil filtering technology generation can compress the size for measuring focal beam spot with polarization Modulation combination, carry
The high angular resolving power of system.
The invention also discloses space autofocusing laser differential confocal Raman spectrum imaging detection device, including excitation beam
It is generation system 1, focusing system 10 of looking in the distance, dichroic optical system 9, the first beam splitting system 15, Raman spectroscopic detection system 22, poor
Dynamic confocal detection system 53, optical imaging system 33 and data processing module 59 and computer control system 35, wherein, excitation
Light beam producing system 1, focusing system 10 of looking in the distance, the reflection direction for being placed sequentially in along light path dichroic optical system 9, first point
Photosystem 15 is in the transmission direction of dichroic optical system 9, and Raman spectroscopic detection system 22 is located at the first beam splitting system 15
Transmission direction, differential confocal detection system 53 are located at the reflection direction of the first beam splitting system 15, and optical imaging system 33 is located at the
The reflection direction of two beam splitting systems 16, data processing module 59 and Raman spectroscopic detection system 22 and differential confocal detection system 53
And look in the distance focusing system 10 and space panorama scanning system 54 connects, for melt merging treatment Raman spectroscopic detection system 22 with it is poor
Dynamic 53 collected data of confocal detection system and completing are looked in the distance the automatic focusing of focusing system 10.
As shown in figure 3, the present apparatus includes the excitation beam generation system 1 being sequentially placed along light path, dichroic optical system
9, telescopic system 10, sample 14, positioned at the first beam splitting system 15 of 9 transmission direction of dichroic optical system, positioned at first
The spectrum investigating system 22 of 15 transmission direction of beam splitting system and the second catoptric system 16 of reflection direction, positioned at the second beam splitting system
The differential confocal detection system 53 of 16 transmission directions positioned at the image sensing 31 of 16 reflection direction of the second beam splitting system, is gone back
Data processing module 34 and calculating including connection spectrum investigating system 22 and differential confocal detection system 53 and telescopic system 10
Machine control system 35.
In the present invention, excitation beam generation system 1 can also include light polarization modulator and iris filter, for generating partially
Shake light and space structure light beam, for improving the optical property of system.
In the present invention, the iris filter for compressing excitation hot spot can be located at Polarization Controller and be with dichroic light splitting
Between system 9, dichroic optical system 9 is may be located between focusing system 10 of looking in the distance.
In the present invention, excitation beam generation system 1 can also be placed on the transmission direction of dichroic optical system 9, tune of looking in the distance
Burnt system 10 is placed sequentially in the transmission direction of dichroic optical system 9, and the first beam splitting system 15 is placed sequentially in dichroic point
The reflection direction of photosystem 9, Raman spectroscopic detection system 22 are located at the transmission direction of the first beam splitting system 15, differential confocal detection
System 53 is located at the reflection direction of the first beam splitting system 15, and imaging optical system 33 can be located at the reflection of the second beam splitting system 16
Direction, data processing module 59 connect differential confocal detection system 53 and Raman spectroscopic detection system 22 and focusing system of looking in the distance
10。
In the present invention, Raman spectroscopic detection system 22 can be common Raman spectroscopic detection system, including along light path according to
5th condenser 24 of secondary placement, positioned at the first spectrometer 25 of 24 focal position of the 5th condenser and positioned at the first spectrometer 25
The second detector 23 afterwards, for the detection of the surface spectrum of sample 14, can also be confocal Raman spectra detection system
22, including the 7th condenser 38 being sequentially placed along light path, the third pin hole 39 positioned at 38 focal position of the 7th condenser is located at
The 8th condenser 40 after third pin hole 39, positioned at the second spectrometer 41 of 40 focal position of the 8th condenser and positioned at the second light
Third detector 42 after spectrometer 41 for improving system signal noise ratio and spatial resolution, completes the spectrum to sample 14
Detection.
In the present invention, data processing module 59 includes the differential confocal data processing module and use for processing position information
In processing position information and the data fusion module of spectral information, the data for controlling the focusing of focusing system 10 of looking in the distance are further included
Control module, the image sensing module for image information acquisition.
It should be noted that herein, relational terms such as first and second and the like are used merely to a reality
Body or operation are distinguished with another entity or operation, are deposited without necessarily requiring or implying between these entities or operation
In any this practical relationship or sequence.Moreover, term " comprising ", "comprising" or its any other variant are intended to
Non-exclusive inclusion, so that process, method, article or equipment including a series of elements not only will including those
Element, but also including other elements that are not explicitly listed or further include as this process, method, article or equipment
Intrinsic element.
It although an embodiment of the present invention has been shown and described, for the ordinary skill in the art, can be with
Understanding without departing from the principles and spirit of the present invention can carry out these embodiments a variety of variations, modification, replace
And modification, the scope of the present invention is defined by the appended.
Claims (9)
1. space autofocusing laser differential confocal Raman spectrum imaging detection method, it is characterised in that：Specifically include following steps：
Step 1 generates exciting light by laser beam generation system (1), by dichroic optical system (9), focusing system of looking in the distance
It unites after (10), is radiated on sample (14), and inspire Rayleigh scattering light and be loaded with the Raman of sample (14) spectral characteristic
Scatter light；
Step 2, by focus adjusting mechanism of looking in the distance (12), the response of differential confocal detection system (53) is made to reach zero crossing, completes to swash
Luminous beam is autofocusing on sample (14), while obtains the location information [α, β, l] of sample (14)；
Step 3, the Rayleigh scattering light for making corresponding sample region and Raman diffused light again pass by focusing system of looking in the distance (10),
And focusing system of being looked in the distance (10) is shaped to directional light and is transmitted through dichroic optical system (9), it is right through dichroic optical system (9)
Rayleigh scattering light and Raman diffused light are detached；
Step 4, part Rayleigh scattering light and natural light are transmitted by dichroic optical system (9), anti-through the first beam splitting system (15)
It injects into differential confocal detection system (53), it is differential common using the first detector (18) in differential confocal detection system (53)
The 4th detector (46) in burnt detection system (53) measures the intensity response I [α, β, l] of reflection sample (14) location information,
Can carry out looking in the distance the judgement of focusing system (10) focal position, will so as to the automatic focusing for focusing system (10) of completing to look in the distance
Excitation beam is focused on sample (14)；
Step 5, Raman diffused light are transmitted through dichroic optical system (9), and Raman light is transmitted into through the first beam splitting system (15)
Detection system (22) is composed, the Raman scattering signal for being loaded with sample (14) characteristic is measured using Raman spectroscopic detection system (22)
I (λ), you can carry out spectrum test, wherein λ is wavelength；
Step 6, natural light are reflected through the first beam splitting system (15) part, and image optics is reflected into through the second beam splitting system (16)
System (33) obtains target area image information；
I (λ) is transmitted to data processing module progress data processing by step 7, and area is corresponded to comprising sample (14) so as to obtain
The spectral information I (λ) of domain position, object location information [α, β, l]；
Step 8, rotation detection system carry out along α, β scanning direction space, and focusing system of looking in the distance (10) progress is swept along l directions
Focusing is retouched, repeat the above steps one group of n that the measure corresponding objective focus positions sequences comprising location information [α, β, l] and I (λ)
Row metrical information [I (λ), α, β, l]；
Step 9, using the corresponding location informations [α, β, l] of distinguishable region δ n, find out the spectral information In (λ) in corresponding δ n regions
Value, further according to the relationship with space coordinate [α, β, l], the information of reconstruct reflection measured object microcell δ n three-dimensional structures and spectral characteristic
In (α n, β n, ln, λ n), that is, realize microcell δ min spectrographic detection and three-dimensional geometry position sensing and corresponding image letter
Breath；
Step 10, the three dimension scale of corresponding minimum distinguishable region δ min and spectral characteristic are determined by following formula：
2. space autofocusing laser differential confocal Raman spectrum imaging detection method according to claim 1, feature exist
In：Focusing system (10) the focus F that looks in the distance is corresponded at differential confocal response curve (52) the zero crossing O, herein focal beam spot ruler
Very little minimum, the region of detection is minimum, and differential confocal response curve (52) other positions correspond to the defocus for focusing system (10) of looking in the distance
Region, the focused spot size before coke or in defocused region increases with defocusing amount and is increased, using this feature, by adjusting prestige
The focus adjusting mechanism of looking in the distance (12) of remote focusing system (10), accurately focuses on excitation beam on sample (14).
3. space autofocusing laser differential confocal Raman spectrum imaging detection method according to claim 1, feature exist
In：The excitation beam can be light beam：Linear polarization, circular polarization, radial polarisation light etc. can also be by pupil filtering skill
The structure light beam of art generation can compress the size for measuring focal beam spot with polarization Modulation combination, it is angular to improve system
Resolving power.
4. space autofocusing laser differential confocal Raman spectrum imaging detection device, it is characterised in that：It is generated including excitation beam
System (1), focusing system of looking in the distance (10), dichroic optical system (9), the first beam splitting system (15), Raman spectroscopic detection system
(22), differential confocal detection system (53), optical imaging system (33) and data processing module (59) and computer control system
(35), wherein, excitation beam generation system (1), focusing system of looking in the distance (10) are placed sequentially in dichroic optical system along light path
(9) reflection direction, the transmission direction of the first beam splitting system (15) in dichroic optical system (9), Raman spectroscopic detection system
(22) are united positioned at the transmission direction of the first beam splitting system (15), differential confocal detection system (53) is positioned at the first beam splitting system (15)
Reflection direction, optical imaging system (33) positioned at the second beam splitting system (16) reflection direction, data processing module (59) with
Raman spectroscopic detection system (22) and differential confocal detection system (53) and focusing system of looking in the distance (10) and space panorama scanning system
System (54) connection, for melting merging treatment Raman spectroscopic detection system (22) and differential confocal detection system (53) collected number
According to and complete the automatic focusing of focusing system (10) of looking in the distance.
5. space autofocusing laser differential confocal Raman spectrum imaging detection device according to claim 4, feature exist
In：The excitation beam generation system (1) can also include light polarization modulator and iris filter, for generating polarised light and sky
Between structure light beam, for improving the optical property of system.
6. space autofocusing laser differential confocal Raman spectrum imaging detection device according to claim 4, feature exist
In：It is described for compress excitation hot spot iris filter can between Polarization Controller and dichroic optical system (9),
It may be located between dichroic optical system (9) and focusing system of looking in the distance (10).
7. space autofocusing laser differential confocal Raman spectrum imaging detection device according to claim 4, feature exist
In：The excitation beam generation system (1) can also be placed on the transmission direction of dichroic optical system (9), focusing system of looking in the distance
(10) transmission direction of dichroic optical system (9) is placed sequentially in, the first beam splitting system (15) is placed sequentially in dichroic point
The reflection direction of photosystem (9), Raman spectroscopic detection system (22) positioned at the first beam splitting system (15) transmission direction, it is differential common
For burnt detection system (53) positioned at the reflection direction of the first beam splitting system (15), imaging optical system (33) can be positioned at the second light splitting
The reflection direction of system (16), data processing module (59) connection differential confocal detection system (53) and Raman spectroscopic detection system
(22) and focusing system of looking in the distance (10).
8. space autofocusing laser differential confocal Raman spectrum imaging detection device according to claim 4, feature exist
In：The Raman spectroscopic detection system (22) can be common Raman spectroscopic detection system, including what is be sequentially placed along light path
5th condenser (24), positioned at first spectrometer (25) of the 5th condenser (24) focal position and positioned at the first spectrometer (25)
The second detector (23) afterwards for the detection of the surface spectrum of sample (14), can also be that confocal Raman spectra detects
System (22), including the 7th condenser (38) being sequentially placed along light path, the third positioned at the 7th condenser (38) focal position
Pin hole (39), the 8th condenser (40) after third pin hole (39), second positioned at the 8th condenser (40) focal position
Spectrometer (41) and the third detector (42) after the second spectrometer (41), for improving system signal noise ratio and spatial discrimination
Power completes the spectrographic detection to sample (14).
9. space autofocusing laser differential confocal Raman spectrum imaging detection device according to claim 4, feature exist
In：The data processing module (59) is including being used for the differential confocal data processing module of processing position information and for handling position
Confidence ceases and the data fusion module of spectral information, further includes the data control mould for controlling focusing system (10) focusing of looking in the distance
Block, the image sensing module for image information acquisition.
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Application publication date: 20180615 |