CN109187438A - Postposition is divided pupil confocal laser Brillouin-Raman spectra test method and device - Google Patents
Postposition is divided pupil confocal laser Brillouin-Raman spectra test method and device Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
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- G01N21/62—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light
- G01N21/63—Systems in which the material investigated is excited whereby it emits light or causes a change in wavelength of the incident light optically excited
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Abstract
The present invention relates to a kind of postposition light splitting pupil confocal laser Brillouin-Raman spectra test method and devices, belong to microspectrum technical field of imaging.By the Rayleigh scattering light building light splitting pupil confocal laser micro imaging system abandoned in confocal Raman spectra detection system, the high-space resolution detection of sample geometrical morphology is realized；A variety of fundamental propertys that sample is obtained by the Brillouin scattering abandoned in detection confocal Raman spectra detection system, to be measured to parameters such as the elasticity, density, elasticity of material；The spectral information of sample focal point is accurately obtained using the focal position that light splitting pupil confocal laser micro imaging system obtains, and then realizes light splitting pupil confocal laser Brillouin-Raman spectrum high-space resolution imaging and the detection of " collection of illustrative plates "；By blending confocal Raman spectra Detection Techniques and confocal Brillouin spectrum Detection Techniques, the measurement of sample topography performance multi-parameter comprehensive is realized.
Description
Technical field
The present invention relates to a kind of postposition light splitting pupil confocal laser Brillouin-Raman spectra test method and devices, belong to aobvious
Postposition is divided pupil confocal laser microtechnic, Raman spectroscopic detection technology and Brillouin light by low-light spectral imaging technology field
It composes Detection Techniques to organically combine, is related to the postposition light splitting pupil confocal laser Brillouin-Raman spectrum test of a kind of " collection of illustrative plates "
Method and device can be used for carrying out high-space resolution detection etc. to all kinds of sample microcell machinery form performance multi-parameters.
Background technique
Scattering effect can occur when phonon interaction in photon and substance, wherein the not changed scattering title of frequency
For elastic scattering (Rayleigh scattering), the changed scattering of frequency is known as inelastic scattering (Raman scattering and Brillouin scattering),
Wherein Raman scattering is photon and optical phonon interaction and photon and acoustical phonon phase interaction respectively with Brillouin scattering
Result.
Photon and phonon positive energy exchange are smaller in Rayleigh scattering, and frequency displacement changes less than 10-5cm-1, photon in Brillouin scattering
Smaller with acoustical phonon positive energy exchange, Brillouin frequency shifts change in 0.01~2cm-1Between.And in Raman scattering photon with
The energy of optical phonon exchange is big, and Raman scattering frequency displacement is in 10~5000cm-1Between.
Raman spectrum is the caused inelastic scattering spectrum of the intramolecule vibration in sample, due to different samples
Product correspond to different Raman signatures spectral peaks, therefore Raman spectrum is also known as " molecular fingerprint spectrum ".By measuring Raman spectrum, to light
Frequency displacement, intensity, spectrum width and the ratio of spectrum are decoupled, so obtain the constituent of sample, stress, strain, temperature and
The information such as fault of construction.
Brillouin spectrum is inelastic scattering spectrum caused by molecule thermal vibration in sample, by Brillouin
Spectrum measures, can member excitations a variety of to phonon, spin wave in condensed state matter etc. measure, and then analyze sample
A variety of fundamental propertys such as viscoplasticity, phase transformation and magnetism, and then the various cross effects such as piezoelectricity, magnetic bullet, photoelastic are monitored.
In recent years, Brillouin scattering research is also made that significant contribution for the birth and development of Integrated ferroelectrics and spintronics.
Confocal spectroscopic Detection Techniques have the characteristics that measurement accuracy is high, chromatography ability is strong, spectral information is abundant, to sample
Carry out performance form measuring multiple parameters when, due to scattering spectrum technology have the advantages that it is respective, by rational design and it is organic
In conjunction with achievable mutual supplement with each other's advantages.It is to realize that the more performance parameters of fine structure material measure using Raman scattering and Brillouin scattering
Key technology.
The detection principle of traditional confocal Raman spectra system is as shown in Figure 1, light-source system shoot laser penetrates light splitting rib
After mirror, quarter-wave plate and measurement object lens, sample surfaces are focused on, the Raman for being loaded with sample microscopic spectrum characteristic is inspired
Light is scattered, by the mobile sample of 3 D scanning system, makes Raman scattering corresponding to different tested regions on sample
Light is collected by object lens, and by the reflection of quarter-wave plate and Amici prism, the first convergent mirror is by the Raman scattering of reflection
Light converges at the first pin hole, and the Raman spectrum for being loaded with sample microcell characterisitic parameter information is measured using spectrum investigating system.
Traditional confocal Raman spectra system is the signal-to-noise ratio of raising system, obtains raman microspectroscopy spectral information abundant,
It usually requires to carry out prolonged Raman spectrum imaging to sample.But instrument in prolonged imaging process be easy by
The influence of many factors such as environment temperature, air agitation, system vibration, easily make system generate drift, defocus phenomena such as.Due to
The ability of Focus tracking is not present in existing confocal Raman spectra detection system, therefore exciting light is difficult to ensure in imaging process
Spot is overlapped with objective focus positions, leads to that hot spot is excited to be greater than ideal focal beam spot, result reduces spectrum investigating system
Spatial resolution, therefore limit the detectivity of confocal Raman spectrometer.
Since spontaneous Raman scattering light is very faint, only the 10 of Rayleigh scattering light-3~10-6Times, therefore drawn to reduce
Graceful energy loss improves the detected intensity of Raman spectrum, the pin hole of larger size is generallyd use in system, about 150 μm~
Between 200 μm.Since system carries out axially position using confocal focal position, the oversized of pin hole will lead to axial fixed-focus energy
The reduction of power, and then reduce the spatial resolution of system.With the development of modern science and technology, people are for crs technique
Spatial resolution and spectroscopic probing capabilities more stringent requirements are proposed.In confocal Raman spectra system, work as focal beam spot
When size minimum, the excitation intensity of Raman spectrum reaches maximum, and spectroscopic probing capabilities and spatial resolution reach most preferably, therefore essence
Determine that coke is of great significance for confocal Raman spectra system.
In addition, faint Raman diffused light is only utilized in traditional confocal Raman spectra system, and intensity is abandoned much
Higher than the Rayleigh scattering light of Raman diffused light, therefore spectrographic detection can only be carried out, more sample messages, measurement side can not be obtained
Formula is single, limits its application field.And axial fixed-focus and light spectrum image-forming directly are carried out using Raman diffused light, there is survey
Measure the disadvantages such as the time is long, system sensitivity is low.
For the above-mentioned deficiency for overcoming traditional confocal Raman system, Beijing Institute of Technology Zhao Wei is modest et al. it is proposed that one kind
Light splitting pupil confocal laser Brillouin-Raman spectra test method with very strong microscopic spectrum detectivity, by burnt to detection
Spot is split processing, obtains the light intensity signal of search coverage, carries out axis to sample by " extreme point " of confocal curves
To fixed-focus, and then realize tracking measurement.Pupil confocal laser Brillouin-Raman spectrum measuring technology is divided in patent ZL
In 201410086366 (inventors: Zhao Weiqian etc.), with entitled " light splitting pupil confocal laser Brillouin-method for measuring Raman spectrum
And device " disclose, its principle is as shown in Figure 2, and this method is intended to " extreme point " using light splitting pupil confocal microscopic imaging device
This characteristic corresponding with its focus realizes the high-space resolution detection to sample microcell geometric position and spectral information, and simultaneously
Reach resolving power and the effective of measurement range takes into account.But the test method makes full use of the significant figure for measuring object lens due to failing
It is worth aperture, affects the spatial resolution of confocal spectroscopic system；In addition, the test macro is required stringent, dress by off-axis position
Adjust the limitation of the factors such as difficulty.
Summary of the invention
It is larger the purpose of the present invention is being limited for the solution prior art by extraneous factor, and the problem that spatial resolution is low,
It is proposed that a kind of postposition is divided pupil confocal laser Brillouin-Raman spectra test method and device.It is detected by confocal Raman spectra
The Rayleigh scattering light building postposition light splitting pupil confocal laser micro imaging system abandoned in system, realizes the height of sample geometrical morphology
Spatial-resolved detection；The more of sample are obtained by the Brillouin scattering abandoned in detection confocal Raman spectra detection system
Kind fundamental property, to be measured to parameters such as the elasticity, density, elasticity of material；It is aobvious using postposition light splitting pupil confocal laser
The spectral information of sample focal point accurately to obtain in the focal position that micro- imaging system obtains, and then realizes after " collection of illustrative plates "
Set light splitting pupil confocal laser Brillouin-Raman spectrum high-space resolution imaging and detection；By the way that confocal Raman spectra is detected skill
Art is blended with confocal Brillouin spectrum Detection Techniques, realizes the measurement of sample topography performance multi-parameter comprehensive.
The purpose of the present invention is what is be achieved through the following technical solutions.
A kind of postposition light splitting pupil confocal laser Brillouin-Raman spectra test method, comprising the following steps:
It is placed on collecting object lens pupil plane first and collects pupil, the excitation beam of light-source system outgoing passes through Amici prism
After measurement object lens, it is focused on sample, inspires the Raman diffused light and cloth for being loaded with sample microcell characterisitic parameter information
In deep pool scattering light, while reflecting Rayleigh scattering light；Raman diffused light, Brillouin scattering and Rayleigh scattering light are by measurement object
Mirror is collected, and after Amici prism reflects, is divided into two bundles by dichroic optical system, wherein reflecting by dichroic optical system
Rayleigh scattering light and Brillouin scattering enter beam splitting system light splitting, through beam splitting system transmission Rayleigh scattering light and Brillouin
Scattering light enters postposition light splitting pupil confocal laser detection system, after collecting object lens and collecting pupil, by intensity collection system
System carries out focal spot segmentation detection, realizes the detection to sample microcell geometric position.Detailed process are as follows: to intensity collection system
The focal beam spot that system obtains is handled, and obtains the axial strength characteristic response I of sample by the light intensity in search coverage
(z), three-dimensional laminar analysis measurement can be carried out to sample, wherein z is axial physical coordinates.Utilize light splitting pupil confocal curves
" extreme point " accurately corresponds to characteristic with measurement object focal point, is triggered by " extreme point " accurately to capture excitation light spot focus position
It sets, and then realizes the geometry detection and space orientation of high-space resolution.In Rayleigh scattering light and cloth by beam splitting system reflection
Deep pool scattering light enters in Brillouin spectrum detection system, realizes Brillouin spectrum detection.
At the same time, the light beam of the Raman diffused light by dichroic optical system transmission enters Raman spectroscopic detection system
In system.Postposition light splitting pupil confocal laser detection system accurately captures the spectrum letter of focal beam spot by the position of " extreme point "
Breath, and then realize the spectrographic detection to sample microcell high spatial.Detailed process are as follows: after carrying out axial scan acquisition to sample
The axial response curve for setting light splitting pupil confocal laser detection system, by " extreme point " of curve to sample carry out in real time with
Track fixed-focus.The spatial position of sample is controlled, by 3 D scanning system to guarantee to obtain always in entire measurement process
Raman spectral information at focal position, and then inhibit system drifting and external environment caused by long-time spectral measurement
It influences, improves the measurement accuracy and spatial resolution of system.
When the laser facula only obtained to the postposition light splitting pupil confocal laser detection system for receiving Reyleith scanttering light is handled,
It is able to carry out the chromatography detection of high-space resolution three-dimensional；
When the raman spectral signal that the Raman spectroscopic detection system that only Raman diffused light is received in docking obtains is handled, energy
It is enough that Raman spectroscopic detection is carried out to sample；
At the Brillouin light spectrum signal only obtained to the Brillouin spectrum detection system for receiving Brillouin scattering
When reason, Brillouin spectrum detection can be carried out to sample；
When simultaneously in the light intensity signal for the postposition light splitting pupil confocal laser detection system acquisition for receiving Reyleith scanttering light, reception cloth
The Raman spectrum of Brillouin light spectrum signal and reception Raman diffused light that the Brillouin spectrum detection system of deep pool scattering light obtains
When the raman spectral signal that detection system obtains is handled, it is able to carry out high-space resolution microcell map tomography, is realized
The postposition light splitting pupil confocal laser Brillouin-Raman spectrum high-space resolution imaging of " collection of illustrative plates " is carried out to sample and is visited
It surveys.
Particularly, in the methods of the invention, collecting pupil can be D-shaped, circle or other shapes.
In the methods of the invention, excitation beam includes light beams such as line polarisation, rotatory polarization, radial polarisation light and by pupil
Thus the structure light beam that the technologies such as filtering generate improves system spectrum Signal-to-Noise and system transverse resolution.
In the methods of the invention, can also detect including fluorescence, Brillouin scattering, Compton scattering light scattering light
Spectrum.
In the methods of the invention, that the object lens of the measurement to different NA can be realized only is handled by computer system software
Match, without carrying out any hardware adjustment to system.
The present invention provides a kind of postpositions to be divided pupil confocal laser Brillouin-Raman spectroscopy test device, including generates and swash
Light-source system, the measurement object lens, 3 D scanning system, dichroic optical system, beam splitting system, Raman spectroscopic detection system of luminous beam
System, Brillouin spectrum detection system, postposition are divided pupil confocal laser measuring system, computer processing system.
Wherein, it collects pupil to be placed on the pupil plane for collecting object lens, sample is fixed on the load of 3 D scanning system
On object platform.Dichroic optical system is placed on the light beam reflection direction of Amici prism, and Raman spectroscopic detection system is placed on two
To in the transmission direction of color beam splitting system, beam splitting system is placed on the reflection direction of dichroic optical system, and postposition is divided pupil
Confocal laser measuring system is placed in the transmission direction of beam splitting system, and Brillouin spectrum detection system is placed on beam splitting system
On reflection direction, computer processing system is used for 3 D scanning system, Brillouin spectrum detection system, Raman spectroscopic detection system
System and postposition light splitting pupil confocal laser measuring system carry out data processing and coordinated control.
In apparatus of the present invention, intensity collection system can use method of the pin hole in conjunction with light intensity point detector, realize
Segmentation detection to Airy.
In apparatus of the present invention, intensity collection system can use ccd detector, be detected by being arranged in CCD detection face
The position in region and size realize that the segmentation to Airy detects.
In apparatus of the present invention, intensity collection system can be real using conduction optical fiber, by the focal plane for collecting object lens
Now the segmentation of Airy is detected.
In apparatus of the present invention, magnifying glass can be relayed by increasing, the Aili spot that amplification intensity collection system detects, with
Improve the acquisition precision of postposition light splitting pupil confocal laser measuring system.
Beneficial effect
1, the present invention has merged high axial postposition of differentiating and has been divided pupil confocal laser microtechnic, Brillouin spectrum Detection Techniques
With Raman spectroscopic detection technology, " extreme point " and high-acruracy survey object of pupil confocal laser axial response curve are divided by postposition
The focus of mirror accurately corresponds to this characteristic, realizes accurate fixed-focus to sample, while obtaining the geometric position of sample, Brillouin
Spectral signal and raman spectral signal are greatly improving the same of the microscopic spectrum detectivity of existing confocal spectroscopic detection system
When, the light channel structure of system is also greatly simplified, this is one of the innovative point for being different from existing spectrographic detection technology；
2, the present invention is divided pupil confocal laser measuring system by the way that postposition is added in collecting optical path, in conventional confocal Raman
It realizes that postposition is divided pupil confocal laser micro-imaging on the basis of system, further increases in postposition light splitting pupil confocal laser cloth
Deep pool-Raman spectroscopy spatial resolution and spectral signal intensity, this is the wound for being different from existing spectrographic detection technology
The two of new point；
3, the present invention obtains signal using the method for division focal spot, by hot spot focal plane in setting intensity collection system
The size of tiny area extends its application field to match different sample reflectivity；At computer system software
The matching of the measurement object lens to different NA values may be implemented in reason, without carrying out any hardware adjustment, Jin Erti to system again
The versatility of high instrument.This be different from existing spectrographic detection technology innovative point three；
4, postposition is divided pupil confocal laser microscopic system, Brillouin spectrum detection system and Raman spectrum and visited by the present invention
Examining system structurally and functionally combines, it can be achieved that the micro- detection of sample microcell postposition light splitting pupil confocal laser, confocal laser
Brillouin spectrum detection, confocal laser Raman spectroscopic detection, postposition light splitting pupil confocal laser Brillouin-Raman spectroscopic detection are a variety of
Pattern switching realizes high-space resolution form performance measuring multiple parameters, this is the innovative point for being different from existing spectrographic detection technology
Four.
Detailed description of the invention
Fig. 1 is conventional confocal Raman spectrum imaging method schematic diagram；
Fig. 2 is that existing postposition is divided pupil confocal laser Brillouin-Raman spectra test method schematic diagram；
Fig. 3 is that postposition of the present invention is divided pupil confocal laser Brillouin-Raman spectra test method schematic diagram；
Fig. 4 is that round postposition is divided pupil confocal laser Brillouin-Raman spectra test method schematic diagram；
Fig. 5 is postposition light splitting pupil confocal laser Brillouin-Raman spectra test method schematic diagram in conjunction with iris filter；
Fig. 6 is that the postposition with beam modulation system is divided pupil confocal laser Brillouin-Raman spectroscopy test device signal
Figure；
Fig. 7 is that the postposition with detection focal spot amplification system is divided pupil confocal laser Brillouin-Raman spectroscopy test device
Schematic diagram；
Fig. 8 is to be divided pupil confocal laser Brillouin-Raman spectrum test using the postposition of pin hole and light intensity point detector to fill
Set schematic diagram；
Fig. 9 is to be divided pupil confocal laser Brillouin-Raman spectroscopy test device schematic diagram using the postposition of ccd detector；
Figure 10 is that the postposition detected using optical fiber is divided pupil confocal laser Brillouin-Raman spectroscopy test device signal
Figure；
Figure 11 is that high-space resolution postposition is divided pupil confocal laser Brillouin-Raman spectra test method and device signal
Figure, i.e. embodiment are schemed.
Figure 12 is the light splitting confocal simulation curve of pupil；
Figure 13 is the light splitting confocal measured curve of pupil.
Wherein, 1- light-source system, 2- Amici prism, 3- measure object lens, 4- sample, 5- 3 D scanning system, 6- bis-
To color beam splitting system, 7- Raman spectroscopic detection system, the first convergent mirror of 8-, the first pin hole of 9-, the second convergent mirror of 10-, 11- Raman
Spectrographic detection unit, 12- beam splitting system, 13- Brillouin spectrum detection system, 14- third convergent mirror, the second pin hole of 15-, 16-
4th convergent mirror, 17- Brillouin spectrum probe unit, 18- postposition are divided pupil confocal laser detection system, 19- collects object lens,
20- collects pupil, 21- intensity collection system, 22- search coverage, 23- light splitting pupil confocal curves, 24- radial polarisation conversion system
System, 25- iris filter, 26- beam modulation system, the 5th convergent mirror of 27-, 28- third pin hole, the 6th convergent mirror of 29-, 30-
It relays magnifying glass, the 4th pin hole of 31-, 32- light intensity point detector, 33-CCD detector, 34- and conducts optical fiber, 35- computer, 36-
Quarter-wave plate, 37- assemble object lens, 38- illumination iris, 39- and detect pupil, the 7th convergent mirror of 40-, 41- light intensity detection system
System, 42- laser spot detection region, the confocal axial characteristic response curve of 43-, the light splitting pupil confocal laser axial response actual measurement of 44- postposition
Curve.
Specific embodiment
Invention is further described in detail with reference to the accompanying drawings and examples.
Pupil 20 is collected as shown in figure 3, placing on collecting 19 pupil plane of object lens.The excitation beam that light-source system 1 is emitted
It after through Amici prism 2 and measurement object lens 3, is focused on sample 4, inspires and be loaded with sample microcell characterisitic parameter letter
The Raman diffused light and Brillouin scattering of breath, while reflecting Rayleigh scattering light.Raman diffused light, Brillouin and Rayleigh scattering
Light by measurement object lens collect, by Amici prism 2 reflection after, be divided into two bundles by dichroic optical system 6, wherein by two to
The Rayleigh scattering light and Brillouin scattering that color beam splitting system 6 reflects enter beam splitting system 12, reflect by beam splitting system 12
Rayleigh scattering light and Brillouin scattering enter Brillouin spectrum detection system 13, the Rayleigh scattering transmitted by beam splitting system 12
Light and Brillouin scattering enter postposition light splitting pupil confocal laser detection system 18, by collecting object lens 19 and collecting pupil 20
Afterwards, focal spot segmentation detection is carried out by intensity collection system 21, realizes the detection to sample microcell geometric position.By two to
The light beam for the Raman diffused light that color beam splitting system 6 transmits enters in Raman spectroscopic detection system 7, is divided pupil laser using postposition
" extreme point " for the light splitting pupil confocal curves 26 that confocal detection system 18 obtains accurately corresponds to object lens focal beam spot focus, and this is special
Property, the spectral information of focal beam spot is accurately captured by the position of " extreme point ", and then realize to sample microcell high spatial
Spectrographic detection.
Particularly, it can will collect pupil 20 and replace other shapes, it is such as round, that is, it is total to constitute round postposition light splitting pupil laser
Burnt Brillouin-Raman spectra test method, as shown in Figure 4.
Particularly, by addition radial polarisation converting system 24 and iris filter 25, to further increase spectrographic detection
Spatial resolution, that is, constitute addition iris filter postposition be divided pupil confocal laser Brillouin-Raman spectra test method,
As shown in Figure 5.
Particularly, have by adding beam modulation system 26 between light-source system 1 and Amici prism 2, and then constituting
The postposition of beam modulation system is divided pupil confocal laser Brillouin-Raman spectroscopy test device.As shown in fig. 6, beam modulation system
System 26 includes the 5th convergent mirror 27, third pin hole 28, the 6th convergent mirror 29 being sequentially placed along optical path.
Particularly, increase relaying magnifying glass 30 in postposition light splitting pupil confocal laser detection system 18, to improve postposition point
The acquisition precision of pupil confocal laser detection system, as shown in Figure 7.
Particularly, the method combined using pin hole 31 with light intensity point detector 32 realizes that the segmentation to Airy detects, such as
Shown in Fig. 8.
Particularly, intensity collection system 21 can use ccd detector 33, set micro- on detection focal plane by changing
The parameter of zonule is realized that the segmentation to Airy detects, is answered so as to extend it to match the reflectivity of different samples
With field, as shown in Figure 9.
Particularly, intensity collection system 21 can be passed using conduction optical fiber by placing at the focal plane for collecting object lens 19
Guiding fiber 34 realizes that the segmentation to Airy detects, as shown in Figure 10.
Embodiment
In the present embodiment, light-source system 1 uses 532nm continuous wave laser, and dichroic optical system 6 uses Notch
Filter, Raman spectroscopic detection unit 11 use Raman spectrometer, and Brillouin spectrum probe unit 17 uses Brillouin light spectrometer.
As shown in figure 11, postposition light splitting pupil confocal laser Brillouin-Raman spectroscopic detection process is as follows:
Firstly, the laser that the light-source system 1 being made of laser is emitted is assembled by the 5th convergent mirror 27 and enters third needle
Behind hole 28, parallel excitation beam is formed by 29 collimator and extender of the 6th convergent mirror.Excitation beam is by radial polarisation conversion system
After system 24, Amici prism 2 and iris filter 25, be measured object lens 3 and be focused on sample 4, inspire be loaded with it is tested
The Raman diffused light and Brillouin scattering of 4 microcell characterisitic parameter of sample.
Then the mobile sample 4 of 3 D scanning system 5 is controlled by computer 35, makes different zones on sample 4
Raman diffused light, Brillouin scattering and the Reyleith scanttering light in the corresponding region be measured object lens 3 and collect, by iris filter
25 and Amici prism 2 reflect after, Notch Filter6 by Reyleith scanttering light, Brillouin scattering and Raman diffused light carry out it is lossless
Separation.
Wherein the Reyleith scanttering light by Notch Filter6 reflection and Brillouin scattering enter in beam splitting system 12, pass through
The Reyleith scanttering light and Brillouin scattering that beam splitting system 12 reflects pass through third convergent mirror 14, the second pin hole 15, the 4th convergent mirror 16
It is received afterwards by Brillouin light spectrometer 17, measures the Brillouin scattering spectrum for being loaded with 4 microscopic spectrum characteristic of sample.
The Reyleith scanttering light and Brillouin scattering transmitted by beam splitting system 12 enters postposition light splitting pupil confocal laser detection
In system 18, relaying magnifying glass 30 is entered after collecting object lens 19 and collecting pupil 20, the hot spot being amplified is by ccd detector
33 receive, and by the way that search coverage is arranged on detection focal plane, measure the confocal axial strength of light splitting pupil in 4 region of sample
It responds I (z), in conjunction with the location information of the 3 D scanning system 5 obtained by computer 35, obtains postposition light splitting pupil confocal laser
The confocal curves 23 of detection system and its position of " extreme point "；It is divided " extreme point " and excitation beam of pupil confocal curves 23
Focal beam spot accurately corresponds to, therefore the elevation information of sample 4, Jin Erchong can be obtained by " extreme point " of confocal curves 23
The three-dimensional appearance of structure sample 4, Figure 13 is the light splitting confocal measured curve figure of pupil, wherein 44 are divided pupil confocal laser axis for postposition
To response measured curve.
Raman diffused light by Notch Filter6 transmission passes through the first convergent mirror 8, the first pin hole 9 and the second meeting
It is received after poly- mirror 10 by Raman spectrometer 11, measures the raman scattering spectrum for being loaded with 4 microscopic spectrum characteristic of sample.
When the laser facula only obtained to the postposition light splitting pupil confocal laser detection system 18 for receiving Reyleith scanttering light is handled,
The chromatography detection of high-space resolution three-dimensional can be carried out to sample 4；When only the Raman spectrometer 11 of Raman diffused light is received in docking
When the raman spectral signal of acquisition is handled, Raman spectroscopic detection can be carried out to sample 4；When only to reception Brillouin
When the Brillouin light spectrum signal that the Brillouin light spectrometer 17 of scattering light obtains is handled, sample 4 can be carried out in cloth
Deep spectrographic detection；Light intensity signal to the postposition light splitting acquisition of pupil confocal laser detection system 18 for receiving Reyleith scanttering light, reception simultaneously
The Brillouin light spectrometer of raman spectral signal and reception Brillouin scattering that the Raman spectrometer 11 of Raman diffused light obtains
The 17 Brillouin light spectrum signals obtained are when being handled, sample 4 can be carried out high-space resolution microcell map chromatography at
Picture, and then the postposition for carrying out " collection of illustrative plates " to sample is divided pupil confocal laser Brillouin-Raman spectrum high-space resolution
Imaging and detection.
As shown in figure 11, postposition light splitting pupil confocal laser Brillouin-Raman spectroscopy test device includes generating excitation beam
Light-source system 1, beam modulation system 26, radial polarisation converting system 24, Amici prism 2, iris filter 25, measurement object lens
3, sample 4,3 D scanning system 5, Notch Filter 6, beam splitting system 12, postposition light splitting pupil confocal laser detection system
System 18, Raman spectroscopic detection system 7 and Brillouin spectrum detection system 13.
More than, along the laser emitting direction of light-source system 1, it is sequentially placed the 5th convergent mirror 27, third pin hole 28, the 6th meeting
Poly- mirror 29, radial polarisation converting system 24, Amici prism 2, iris filter 25, measurement object lens 3, sample 4 and three-dimensional
Scanning system 5 is sequentially placed Notch Filter6, the first convergent mirror 8, the first pin hole 9, second in 2 reflection direction of Amici prism
Convergent mirror 10, Raman spectrometer 11 place beam splitting system 12, in the reflection of beam splitting system 12 in Notch Filter6 reflection direction
Direction is sequentially placed third convergent mirror 14, the second pin hole 15, the 4th convergent mirror 16, Brillouin light spectrometer 17, in beam splitting system 12
Transmission direction, which is sequentially placed, collects object lens 19, collects pupil 20, relaying magnifying glass 30, ccd detector 33, wherein collecting pupil 20
Optical axis and 12 the reflected beams of beam splitting system optical axis coincidence；In the entire system, continuous wave laser 1,3-D scanning translation stage
5, Raman spectrometer 11, Brillouin light spectrometer 17 and ccd detector 33 are controlled by computer 35, the three-dimensional position that system obtains
Confidence breath and spectral information also carry out fusion treatment by computer 35.
A specific embodiment of the invention is described in conjunction with attached drawing above, but these explanations cannot be understood to limit
The scope of the present invention, protection scope of the present invention are limited by appended claims, any in the claims in the present invention base
The change carried out on plinth is all protection scope of the present invention.
Claims (8)
1. postposition is divided pupil confocal laser Brillouin-Raman spectra test method, it is characterised in that: the following steps are included:
Pupil (20) are collected Step 1: placing on collecting object lens (19) pupil plane；The excitation beam warp of light-source system (1) outgoing
It after crossing Amici prism (2) and measurement object lens (3), is focused on sample (4), inspires and be loaded with sample (4) microcell spy
The Brillouin scattering and Raman diffused light of property parameter information, while reflecting Rayleigh scattering light；Raman diffused light, Brillouin dissipate
It penetrates light and Rayleigh scattering light to collect by measurement object lens (3), after Amici prism (2) reflection, by dichroic optical system (6)
It is divided into two bundles, wherein the Rayleigh scattering light and Brillouin scattering by dichroic optical system (6) reflection enter beam splitting system
(12), the Rayleigh scattering light by beam splitting system (12) reflection and Brillouin scattering enter Brillouin spectrum detection system (13)
Brillouin spectrum detection is carried out, the Rayleigh scattering light and Brillouin scattering by beam splitting system (12) transmission enter light splitting pupil and swash
Light confocal detection system (18) is carried out after collecting object lens (19) and collecting pupil (20) by intensity collection system (21)
Focal spot segmentation detection, realizes the detection to sample (4) microcell geometric position；
To the method for the detection of sample (4) microcell geometric position described in step 1 are as follows:
The focal beam spot obtained to intensity collection system (21) is split processing, obtains the corresponding light intensity letter of search coverage (22)
Number, and then obtain light splitting pupil confocal curves (23)；It is burnt using " extreme point " and measurement object lens (3) of light splitting pupil confocal curves (23)
The accurate corresponding characteristic of point, is triggered by " extreme point " accurately to capture excitation hot spot focal position, and then realize high-space resolution
Geometry detection and space orientation；
Step 2: at the same time, the light beam of the Raman diffused light by dichroic optical system (6) transmission enters Raman spectrum
In detection system (7)；Utilize " the extreme value for the light splitting pupil confocal curves (23) that light splitting pupil confocal laser detection system (18) obtains
Point " is accurately corresponding to measure this characteristic of object lens (3) focal beam spot focus, accurately captures focal beam spot by the position of " extreme point "
The spectral information at place, and then realize the spectrographic detection to sample (4) microcell high spatial；
To the method for the spectrographic detection of sample (4) microcell high spatial described in step 2 are as follows: by carrying out axial sweep to sample
The confocal curves (23) for obtaining light splitting pupil confocal laser detection system are retouched, sample are carried out by " extreme point " of curve real
When track fixed-focus；By the spatial position of 3 D scanning system (5) control sample (4), to guarantee in entire measurement process
In obtain spectral information at focal position always, and then inhibit system drifting and the external world caused by long-time spectral measurement
The influence of environment improves the measurement accuracy and spatial resolution of system；
It, can when the laser facula only obtained to the light splitting pupil confocal laser detection system (18) for receiving Reyleith scanttering light is handled
The chromatography detection of high-space resolution three-dimensional is carried out to sample (4)；
When the raman spectral signal that the Raman spectroscopic detection system (7) that only Raman diffused light is received in docking obtains is handled, energy
It is enough that Raman spectroscopic detection is carried out to sample (4)；
At the Brillouin light spectrum signal only obtained to the Brillouin spectrum detection system (13) for receiving Brillouin scattering
When reason, Brillouin spectrum detection can be carried out to sample (4)；
The light intensity signal for light splitting pupil confocal laser detection system (18) acquisition for receiving Reyleith scanttering light, reception Brillouin are dissipated when simultaneously
The Brillouin light spectrum signal for penetrating Brillouin spectrum detection system (13) acquisition of light and the Raman spectrum for receiving Raman diffused light are visited
When the raman spectral signal that examining system (7) obtains is handled, it is able to carry out high-space resolution microcell map tomography, in turn
Light splitting pupil confocal laser Brillouin's Raman spectrum high-space resolution imaging of " collection of illustrative plates " is carried out to sample (4) and is visited
It surveys.
2. postposition according to claim 1 is divided pupil confocal laser Brillouin-Raman spectra test method, feature exists
In: the shape for collecting pupil (20) includes D-shaped or circle.
3. postposition according to claim 1 is divided pupil confocal laser Brillouin-Raman spectra test method, feature exists
In: the excitation beam includes light beam and structure light beam, thus improves system spectrum Signal-to-Noise and system is laterally divided
Distinguish power.
4. postposition is divided pupil confocal laser Brillouin-Raman spectroscopy test device, it is characterised in that: including generating excitation beam
Light-source system (1), Amici prism (2), measurement object lens (3), sample (4), 3 D scanning system (5), dichroic light splitting system
It unites (6), beam splitting system (12), light splitting pupil confocal laser detection system (18), Raman spectroscopic detection system (7), Brillouin spectrum
Detection system (13) and computer processing system (35)；
The Raman spectroscopic detection system (7) includes the first convergent mirror (8), the first pin hole (9), the second convergent mirror (10) and Raman
Spectrographic detection unit (11)；
The Brillouin spectrum detection system (13) includes third convergent mirror (14), the second pin hole (15), the 4th convergent mirror (16)
With Brillouin spectrum probe unit (17)；
Sample (4) is placed on 3 D scanning system (5)；The excitation beam of light-source system (1) outgoing passes through through light splitting rib
After mirror (2) and measurement object lens (3), it is focused on sample (4), inspires the Raman for being loaded with sample microcell characterisitic parameter information
Light, Brillouin scattering are scattered, while reflecting Rayleigh scattering light；Raman diffused light, Brillouin scattering and Rayleigh scattering light
It collects by measurement object lens, after Amici prism (2) reflection, is divided into two bundles by dichroic optical system (6), wherein passing through two
The Rayleigh scattering light and Brillouin scattering reflected to color beam splitting system (6) enters beam splitting system (12), by beam splitting system
(12) Rayleigh scattering light and Brillouin scattering reflected enters Brillouin spectrum detection system (13) and carries out Brillouin spectrum spy
It surveys；Rayleigh scattering light and Brillouin scattering by beam splitting system (12) transmission enter light splitting pupil confocal laser detection system
(18)；The light beam of Raman diffused light by dichroic optical system (6) transmission enters in Raman spectroscopic detection system (7).
5. postposition according to claim 4 is divided pupil confocal laser Brillouin-Raman spectroscopy test device, feature exists
In: it further include radial polarisation converting system (24) and iris filter (25)；Radial polarisation converting system (24) is placed in light source system
It unites (1) between Amici prism (2)；The iris filter (25) is placed between Amici prism (2) and measurement object lens (3).
6. postposition according to claim 4 is divided pupil confocal laser Brillouin-Raman spectroscopy test device, feature exists
In: it further include beam modulation system (26)；The beam modulation system (26) be placed in light-source system (1) and Amici prism (2) it
Between；The beam modulation system (26) is made of the 5th convergent mirror (27), third pin hole (28) and the 6th convergent mirror (29).
7. postposition according to claim 4 is divided pupil confocal laser Brillouin-Raman spectroscopy test device, feature exists
In: the light splitting pupil confocal laser detection system (18) is by collection object lens (19), collection pupil (20) and intensity collection system
(21) it forms；Or it is made of collection object lens (19), collection pupil (20) and the 4th pin hole (31) with light intensity point detector (32)；
Or it is made of collection object lens (19), collection pupil (20) and ccd detector (33)；Or by collection object lens (19), collection pupil
(20) it is formed with conduction optical fiber (34).
8. postposition according to claim 7 is divided pupil confocal laser Brillouin-Raman spectroscopy test device, feature exists
In: the light splitting pupil confocal laser detection system (18) further includes relaying magnifying glass (30), and relaying magnifying glass (30) is placed in collection
After object lens (19).
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| CN112945927A (en) * | 2021-01-18 | 2021-06-11 | 吉林大学 | In-situ high-pressure confocal Raman spectrum measurement system |
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