CN103926233A - Laser differential confocal Brillouin-Raman spectroscopy measuring method and device thereof - Google Patents
Laser differential confocal Brillouin-Raman spectroscopy measuring method and device thereof Download PDFInfo
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Abstract
The invention belongs to the field of a microimaging and spectral measurement technology and relates to a laser differential confocal Brillouin-Raman spectroscopy measuring method and a device thereof which can be used in micro-area morphological parameter comprehensive test and high-resolution imaging of a sample. According to the method and the device, a differential confocal technology is incorporated into spectrum detection. Sample position detection is performed by the differential confocal technology; spectrum detection is conducted by a spectrum detection system; and properties, such as elasticity, piezoelectricity and the like, of a material are tested by the use of brillouin scattering light abandoned by a traditional confocal Raman spectrum detection technology. Thus, micro-area high-spatial resolution morphological parameter measurement of a sample is realized. The method and the device have advantages of accurate positioning, high spatial resolution, high spectrum detection sensitivity, controllable measured focusing spot size and the like, and have a wide application prospect in fields of biomedicine, evidence obtaining in court, micro and nano-fabrication, materials engineering, engineering physics, precision metrology, physical chemistry and the like.
Description
Technical field
The invention belongs to microspectrum technical field of imaging, differential confocal microtechnic is combined with spectrographic detection technology, relate to high-resolution spectra imaging and detection method and the device of one " collection of illustrative plates unification ", be particularly related to a kind of laser differential confocal Brillouin-method for measuring Raman spectrum and device, can be used for the integration test of microcell morphological parameters and the high-resolution imaging of sample.
Technical background
Nineteen ninety G.J.Puppels etc. report the confocal laser Raman spectrum microtechnic that Raman spectrum Detection Techniques are combined with confocal laser microtechnic of its invention at Nature periodical, be that the revolution of Raman technology is broken through.This technology had both been inherited the high-resolution tomography feature of confocal microscopy, can carry out spectral analysis to sample again, therefore can realize the high-resolution chromatography of sample microscopic spectrum is surveyed.This remarkable advantage makes confocal laser Raman spectrum microtechnic take the course of its own in spectrum test field, and develop the important means into a kind of extremely important sample structure and constituent analysis rapidly, make it in the leading basic research of the subjects such as being widely used in ﹑ Sheng Wu ﹑ medical science, Wu Li ﹑ geology, court's evidence obtaining, criminal investigation.
At present, the principle of typical confocal laser Raman spectrum detection instrument as shown in Figure 2, laser, after light path condenser focusing successively, pin hole, collimation lens, polarization splitting prism, quarter-wave plate, object lens, focuses on sample, inspires the Raman diffused light that is loaded with sample spectra characteristic; Mobile sample, the Raman diffused light that makes corresponding sample zones of different, again by quarter-wave plate and be polarized Amici prism reflection, enters confocal Raman spectra detection system and carries out spectrographic detection.
The fast development of modern science and technology is had higher requirement to microscopic spectrum detectivity and spatial discrimination detectivity, if will improve spatial resolution, must accurately focus system.In optical detection system, its size minimum in the time that measurement focal beam spot is positioned at focus, excitation light intensity is the strongest, therefore in order to obtain high spatial resolution, the spectrum of the strength of excitation light intensity be must be able to capture, thereby its optimal spatial resolving power and optimum spectrographic detection ability obtained.As shown in Figure 1, near the BB ' region of existing confocal microscopy laser excitation focus O, all can inspire the Raman spectrum of sample, and can be surveyed by the spectrum investigating system after pin hole.Thereby the often BA of out of focus and A ' B ' district in confocal curves (61) of the actual detection position of confocal Raman spectra microtechnic, thereby cause " microcell " of actual detection much larger than measuring beam focus O place spot size, simultaneously, it is lower that application Raman spectrum carries out confocal location signal to noise ratio (S/N ratio), and because the effect of the blocking meeting of pin hole further reduces the energy of Raman spectrum, expanding pinhole size raising spectrum percent of pass can increase the halfwidth of confocal axial location curve, reduce its positioning precision, and confocal pinhole size in existing confocal Raman system is conventionally between 150 μ m～200 μ m, pinhole size used is relatively large, also can not well play the effect of focusing.Above-mentioned reason has limited the ability of confocal Raman spectra microscopic system detection microscopic spectrum, restricted it in meticulousr microscopic spectrum test and application of analyzing in occasion, thereby the Focus accuracy of raising system is the key of its spatial resolution of raising.
The people such as Kimberley F in 1996 propose to replace with fibre bundle the method for the microscopical pin hole of confocal Raman spectra in " Description and Theory of a Fiber-Optic Confocal and Super-Focal Raman Microspectrometer ", the on-mechanical of realizing " pin hole " size regulates, it does not reduce the Spectral resolution of system in the time expanding " pin hole "; The picosecond laser that E Kenwood Blvd in 2007 etc. propose by using 3-4ps in " Very efficient fluorescent background suppression in confocal Raman microscopy Department of Physics " makes the fluorescence background of sample measurement reduce approximately 3 orders of magnitude in conjunction with corresponding instantaneous exposure technology, has improved the resolving power of confocal Raman spectra microscopy; N.Everall in 2008 etc. point out to adopt large-numerical aperture (NA=1.4) oil immersion objective in " The Influence of Out-of-Focus Sample Regions on the Surface Specificity of Confocal Raman Microscopy ", the azimuthal resolution higher than traditional confocal Raman spectrometer and signal to noise ratio (S/N ratio) can be obtained, but this method need to be carried out film-making to sample, can not realize noncontact and nondestructive measurement, limit the range of application of system; M.J.Pelletier in 2009 and Neil J.Everall etc. propose to utilize the interference of proofreading and correct object lens or structure pupil mask and eliminated the spectral intensity of out of focus position Raman scattering in " Control of Out-of-Focus Light Intensity in Confocal Raman microscopy using optical preprocessing ", improve spectrographic detection efficiency, greatly reduced the impact of confocal Raman system out of focus Raman spectrum on its significant depth resolving power.
Above-mentioned research, mainly concentrate on the aspects such as light-source system that confocal Raman spectra microscopic system relates to, spectrum investigating system, focusing objective len system, spectral information processing, although improved the overall performance of spectroscopic system, but aspect confocal Raman spectra system space resolution characteristic, significantly do not improve, the spatial resolution that improves Raman spectrum system is still outstanding issue.
In addition traditional confocal Raman spectra Detection Techniques have been abandoned and have been contained the Rayleigh Scattering Spectra and the Brillouin scattering spectrum that enrich sample message, make it limited aspect the property detection such as elasticity and piezoelectricity of material, measurement demand when having restricted mechanical form performance parameter.
Brillouin scattering spectrum is to be occurred to interact and a kind of scattering spectrum of generation by the acoustical phonon in light wave and medium, be the scattering being caused by the elastic vibration (vibrate outward and rotate) of molecule, Brillouin scattering is the important means taking light multiple elementary excitation such as phonon, spin wave in probe measurement material.Brillouin scattering is because physical quantity that can sensing is many, and signal intensity is larger, and have that sensing sensitivity is high, dynamic range is large, distance sensing is long, the response time is short, the advantage such as spatial resolution and measuring accuracy height.
Brillouin-Raman spectrum coupling technique is in multipotency parameter measurement field, and the difference that comprises molecular information according to Raman spectrum and Brillouin spectrum can obtain sample surfaces structural parameters and molecular machine performance parameter simultaneously.Can provide a new approach for the research in the fields such as biomedicine, bioengineering, optical fiber sensing technology, marine monitoring, laser radar, optical communication.
In existing confocal Raman spectra detection instrument, systematic collection to sample scattering light beam in the Raman diffused light that comprises extremely faint, only have systematic collection to sample scattering light beam in the Rayleigh light beam that comprises 10
-3～10
-6doubly, therefore, that abandons how to utilize existing spectrum investigating system in confocal Raman spectra is surveyed in is better than Raman diffused light 10
3～10
6rayleigh light beam is doubly assisted and surveyed is the new way of improving confocal Raman spectra Detection Techniques spatial resolution.
Based on above-mentioned situation, what the present invention proposed to abandon in sample scattering light that differential confocal detection system utilizes existing confocal Raman spectra detection system to collect is better than sample Raman diffused light 10
3～10
6rayleigh light beam doubly carries out detected with high accuracy, utilize Brillouin scattering spectrum to survey the mechanical property of material, itself and Raman spectrum detection system are organically blended, when carrying out spatial positional information and spectral information, survey, to realizing high spatial resolution, measure differential confocal light spectrum image-forming and the detection of controlled " the collection of illustrative plates unification " of focused spot size.
Summary of the invention
The object of the invention is to be difficult in order to overcome existing confocal Raman spectra Detection Techniques spatial resolution the deficiency improving, the Brillouin scattering that simultaneously utilizes existing confocal Raman detection system to abandon is surveyed the mechanical property of material, proposes a kind of laser differential confocal Brillouin-method for measuring Raman spectrum and device.
The object of the invention is to be achieved through the following technical solutions.
Laser differential confocal Brillouin-method for measuring Raman spectrum provided by the invention, concrete steps are as follows:
A) produce exciting light by excitation beam generation system, through the first beam splitting system, after object lens, focus on sample, and inspire Reyleith scanttering light and be loaded with Raman diffused light and the Brillouin scattering of sample spectral characteristic, Reyleith scanttering light, Brillouin scattering and Raman diffused light are by systematic collection recovering light path, after object lens, reflexed to dichroic optical system by the first beam splitting system, after dichroic optical system light splitting, Raman diffused light and other spectrum are separated from each other, Reyleith scanttering light and Brillouin scattering are reflected and enter the second beam splitting system, Reyleith scanttering light and Brillouin scattering through the second beam splitting system transmission enter differential confocal detection system, Reyleith scanttering light and Brillouin scattering through the second beam splitting system reflection enter Brillouin spectrum detection system, enter Raman spectrum detection system through the Raman diffused light of dichroic optical system transmission, utilize differential confocal curve zero crossing and accurately corresponding this characteristic of focal position, accurately catch by triggering zero point the spectral information that excites hot spot focal position, realize the spectrographic detection of high-space resolution,
B) differential wave that only the first detector to reception Reyleith scanttering light and Brillouin scattering and the second detector obtain is carried out differential subtracting each other while processing, and system can be carried out the three dimension scale tomography of high-space resolution; When the raman spectral signal that the 3rd detector of only docking receipts Raman diffused light obtains is processed, system can be carried out Raman spectrum detection; When only penetrating Brillouin light spectrum signal that the 4th detector of light obtains to receiving Reyleith scanttering light and Brillouin and processing, system can be carried out Brillouin spectrum detection; When the raman spectral signal that the differential wave that the first detector to reception Reyleith scanttering light and Brillouin scattering and the second detector obtain simultaneously, the Brillouin light spectrum signal of the 4th detector acquisition that receives Reyleith scanttering light and Brillouin scattering and three detectors of reception Raman diffused light obtain is processed, system can be carried out the microcell collection of illustrative plates tomography of high-space resolution, be " the collection of illustrative plates unification " of the high-space resolution of sample geometric position information and spectral information, can carry out the reconstruct of three-dimensional appearance high-resolution and the measurement of microcell form performance parameter to sample;
C) the focus O of the accurate corresponding object lens in zero crossing place of differential confocal curve, in measuring process, can carry out accurate tracking to sample in real time focuses, ensure sample in whole measuring process all the time in focal position, suppress the impacts of factor on spectral measurement such as environment temperature and vibration, thereby improve measuring accuracy;
D) the homologue mirror foci O of zero crossing place of differential confocal curve, focused spot size minimum herein, the region minimum of surveying, the out of focus region of the corresponding object lens in other positions of range of linearity BB', focused spot size before burnt or in defocused BB' region increases with defocusing amount, utilizes this feature, and the z by adjustment sample is to defocusing amount, and control the size of focal beam spot according to Surveying Actual Precision demand, realize controlled to sample search coverage size.
In detection method of the present invention, excitation beam can be light beam: line polarisation, rotatory polarization, radial polarisation light etc.; It can also be the structure light beam being generated by pupil filtering technology, itself and the coupling of pupil filtering technology can be compressed measurement focused spot size, raising system transverse resolution, in addition, can also obtain different Raman spectral information according to excitation beam polarization state difference, thereby obtain more structure of matter information.
In detection method of the present invention, this system can also be surveyed the scattering spectrum including fluorescence, Compton scattering light etc.
The invention provides laser differential confocal Brillouin-raman spectroscopy measurement device, comprise that excitation beam produces system, the first beam splitting system, object lens, 3-D scanning worktable, dichroic optical system, Raman spectrum detection system, the second beam splitting system, Brillouin spectrum detection system, differential confocal detection system and data processing module, wherein, the first beam splitting system, object lens, 3-D scanning worktable is placed on successively excitation beam along light path and produces system exit direction, dichroic optical system is positioned at the reflection direction of the first beam splitting system, Raman spectrum detection system is positioned at the transmission direction of dichroic optical system, the second beam splitting system is positioned at the reflection direction of dichroic optical system, Brillouin spectrum is surveyed and is trusted the reflection direction that is positioned at the second beam splitting system, differential confocal detection system is positioned at the transmission direction of the second beam splitting system, data processing module and Raman spectrum detection system, Brillouin spectrum detection system and differential confocal detection system connect, be used for merging and processing Raman spectrum detection system, the data that Brillouin spectrum detection system and differential confocal detection system collect.
In device of the present invention, Raman spectrum detection system and Brillouin spectrum detection system can be common spectrum investigating systems, comprise the 4th condenser placed successively along dichroic optical system transmitted light path, be positioned at the Raman spectrometer of the 4th condenser focal position and be positioned at the 3rd detector after Raman spectrometer, the 5th condenser placed successively along the second beam splitting system reflected light path, be positioned at the Brillouin light spectrometer of the 5th condenser focal position and be positioned at the 4th detector after Brillouin light spectrometer, for the top layer spectrographic detection of sample, it can also be confocal spectrum investigating system, comprise the 4th condenser of placing successively along the transmitted light path of dichroic light-dividing device, be positioned at the 4th pin hole of the 4th condenser focal position, be positioned at the 6th condenser after the 4th pin hole, be positioned at the 6th condenser Raman spectrometer afterwards, the detection focal plane of Raman spectrometer and the 4th pin hole are with respect to the 6th condenser conjugation, be positioned at the 3rd detector after Raman spectrometer, and the 5th condenser of placing successively along the second beam splitting system reflected light path, be positioned at the 5th pin hole of the 5th condenser focal position, be positioned at the 7th condenser after the 5th pin hole, be positioned at the 7th condenser Brillouin light spectrometer afterwards, the detection focal plane of Brillouin light spectrometer and the 5th pin hole are with respect to the 7th condenser conjugation, and be positioned at the 4th detector after Brillouin light spectrometer, improve system signal noise ratio and spatial resolution, and chromatography spectrographic detection to sample.
In device of the present invention, excitation beam produces system can also comprise radial polarisation optical generator and iris filter, for generation of polarized light and structure light beam.
In device of the present invention, excite the iris filter of hot spot can be between radial polarisation optical generator and the first beam splitting system for compressing, can also be between the first beam splitting system and object lens.
In device of the present invention, Brillouin spectrum detection system can also be placed on the transmission direction of the second beam splitting system, and differential confocal detection system is positioned at the reflection direction of the second beam splitting system.
In device of the present invention, excitation beam generation system can also be placed on the reflection direction of the first beam splitting system, dichroic optical system is successively placed on the transmission direction of the first beam splitting system along light path, Raman spectrum detection system is positioned at the transmission direction of dichroic optical system, the second beam splitting system is positioned at the reflection direction of dichroic optical system, Brillouin spectrum detection system is positioned at the reflection direction of the second beam splitting system, differential confocal detection system is positioned at the transmission direction of the second beam splitting system, data processing module connects differential confocal detection system, Raman spectrum detection system and Brillouin spectrum detection system.
In device of the present invention, can also comprise the 4th beam splitting system and be positioned at the 4th beam splitting system reflection direction microscopic observation system, slightly take aim at for sample; Wherein, the 4th beam splitting system can produce between system and the first beam splitting system at excitation beam, can also be between the first beam splitting system and object lens.
In device of the present invention, data processing module comprises differential subtraction module, for the treatment of positional information; Data fusion module, for merging positional information and spectral information, completes sample three-dimensionalreconstruction and Spectrum Data Fusion.
Beneficial effect:
The present invention contrasts prior art and has following innovative point:
1) the present invention can survey the raman scattering spectrum and the Brillouin scattering spectrum that contain different information by appropriate design simultaneously, form and have complementary advantages, realize material composition and the high-resolution of basic physical property have been surveyed, be convenient to the integration test of many performance parameters;
2) utilize accurately corresponding this characteristic of the zero crossing of differential confocal system axial response curve and focal position, accurately catch by triggering zero point the spectral information that excites hot spot focal position, realize the spectrographic detection of high-space resolution;
3) utilize dichroic light-dividing device to systematic collection to Reyleith scanttering light and the Raman diffused light that is loaded with sample information carry out light splitting, Reyleith scanttering light and Brillouin scattering enter differential confocal detection system and Brillouin spectrum detection system, Raman diffused light enters Raman spectrum detection system, realize the utilization completely of luminous energy, what make that faint Raman diffused light can can't harm enters Raman spectrum detection system, improve system spectrum detection sensitivity, realize the high-space resolution " collection of illustrative plates unification " of sample geometric position information and spectral information;
4) utilize the characteristic of the corresponding different focused spot size in the differential confocal response curve range of linearity, accuracy controlling is carried out in focal beam spot position, and then the size of control survey focal beam spot, be convenient to the sample of different testing requirements to test and analyze, realize measurement focused spot size adjustable;
5) differential confocal microscopic system and spectrum imaging system are merged mutually on 26S Proteasome Structure and Function, both can realize the tomography of sample microcell geometric parameter, can realize again the spectrographic detection of sample microcell, realize the multiple imaging patterns such as microscale tomography, collection of illustrative plates tomography and spectrum test simultaneously, and significantly improve antijamming capability, linearity and the defocused property of imaging test system;
The present invention contrasts prior art and has following remarkable advantage:
1) merge differential confocal technology and spectrographic detection technology, utilize the accurate location of differential confocal system focusing, significantly improve the spatial resolution of spectrographic detection;
2) utilize the out of focus region of differential confocal response curve, regulation and control focused spot size, can meet different testing requirements, makes system have versatility;
3) differential confocal focus triggers Detection Techniques, can significantly suppress the impact on measurement result such as non-linear, the sample reflectivity of system and surface tilt, be beneficial to measurement realizing microtexture high resolution, high anti-jamming capacity, high precision and high chromatography ability etc.;
4) can be by the beam splitting system before differential confocal detection system and Brillouin spectrum detection system is selected to suitable saturating inverse ratio, with maximum using light intensity.
Brief description of the drawings
Fig. 1 is differential confocal and confocal microscopy axial response schematic diagram;
Fig. 2 is confocal Raman spectra formation method schematic diagram;
Fig. 3 is laser differential confocal Brillouin-method for measuring Raman spectrum schematic diagram;
Fig. 4 is laser differential confocal Brillouin-raman spectroscopy measurement device schematic diagram;
Fig. 5 is laser differential confocal Brillouin-raman spectroscopy measurement device schematic diagram with confocal spectrographic detection function;
Fig. 6 is laser differential confocal Brillouin-raman spectroscopy measurement device schematic diagram that Brillouin spectrum transmission-type is surveyed;
Fig. 7 is excitation source reflective laser differential confocal Brillouin-raman spectroscopy measurement device schematic diagram;
Fig. 8 is laser differential confocal Brillouin-raman spectroscopy measurement device schematic diagram with microscopic function;
Fig. 9 is that the laser differential confocal Brillouin-raman spectroscopy measurement with microscopic function is implemented illustration;
Wherein, 1-excitation beam produces system, 2-the first beam splitting system, 3-object lens, 4-sample, 5-3 D scanning system, 6-dichroic optical system, 7-Raman spectrum detection system, 8-the second beam splitting system, 9-Brillouin spectrum detection system, 10-differential confocal detection system, 11-data processing module, 12-differential confocal response curve, 13-Raman spectrum response curve, 14-Brillouin spectrum response curve, 15-three-beam-splitting system, 16-the first condenser, 17-the first pin hole, 18-the first detector, 19-second condenser lens, 20-the second pin hole, 21-the second detector, 22-laser instrument, 23-the 3rd condenser, 24-the 3rd pin hole, 25-the first collimation lens, 26-radial polarisation optical generator, 27-iris filter, 28-the 4th condenser, 29-Raman spectrometer, 30-the 3rd detector, 31-the 5th condenser, 32-Brillouin light spectrometer, 33-the 4th detector, the differential subtraction module of 34-, 35-data fusion module, 36-the 4th pin hole, 37-the 6th condenser, 38-the 5th pin hole, 39-the 7th condenser, 40-the 4th beam splitting system, 41-microscopic observation system, 42-the 5th beam splitting system, 43-Kohler illumination system, 44-the 8th condenser, 45-the 5th detector, 46-entrance slit, 47-plane mirror, 48-the first concave reflection condenser, 49-spectrum grating, 50-the second concave reflection condenser, 51-exit slit, 52-the 6th pin hole, 53-the second collimation lens, the even angle prism of 54-first, the even angle prism of 55-second, the logical F-P of 56-more than first, the logical F-P of 57-more than second, 58-the 9th condenser, 59-the 7th pin hole, 60-quarter-wave plate, the confocal response curve of 61-.
Embodiment
Below in conjunction with drawings and Examples, the invention will be further described.
Basic thought of the present invention is to utilize differential confocal to survey and the combine spectrographic detection of realization " collection of illustrative plates unification " of confocal Raman detection, and utilize the Brillouin scattering abandoning in traditional confocal Raman spectra detection system to survey the performance of material, realizing sample is morphological parameters composite measurement and high-space resolution imaging.
Laser differential confocal Brillouin-method for measuring Raman spectrum, its testing procedure is as follows:
First, Kohler illumination system 43 produces equal white light, white light sees through after the 5th beam splitting system 42, reflected by the 4th beam splitting system 40, focus on sample 4 through object lens 3, white light is reflected back toward original optical path, after being reflected respectively by the 4th beam splitting system 40, the 5th beam splitting system 42 after object lens 4, after the 8th condenser 44, enter the 5th detector 45, by the image of observing in the 5th detector 45, test sample product 4 are slightly taken aim at, to determine that the region that sample need to be observed carries out coarse positioning to sample.
Then, the light beam that laser instrument 22 sends enters the 3rd pin hole 24 after the 3rd condenser 23 is assembled becomes pointolite, after the first collimation lens 25 collimator and extenders, the parallel outgoing of light beam, after radial polarisation optical generator 26, become radial polarisation light, radial polarisation light light beam after iris filter 27 is modulated, see through after the first beam splitting system 2, forming compression hot spot by object lens 3 focuses on sample 4, and inspire Reyleith scanttering light and be loaded with Raman diffused light and the Brillouin scattering of sample 4 spectral characteristics, sample 4 can be processed by strengthening the Raman enhancing technology such as Raman spectrum nano particle, to improve Raman scattering light intensity.
Mobile sample 4, make Raman diffused light and the Brillouin scattering of Reyleith scanttering light and corresponding sample 4 zoness of different be returned original optical path by systematic collection, through object lens 3 and transmitted through after the 4th beam splitting system 40, the first beam splitting system 2 reflections arrive dichroic optical system 6, wherein, Raman scattering light transmission dichroic optical system 6 enters Raman spectrum detection system 7, Raman diffused light enters Raman spectrometer 29 after being assembled by the 4th condenser 28, and the response that is positioned at the 3rd detector 30 after Raman spectrometer 29 by monitoring can obtain the Raman spectrum of sample 4; Reyleith scanttering light and Brillouin scattering are entered the second beam splitting system 8 by dichroic optical system 6 reflections, the Reyleith scanttering light and the Brillouin scattering that reflect through the second beam splitting system 8 enter Brillouin spectrum detection system 9, Reyleith scanttering light and Brillouin scattering enter Brillouin spectrum instrument 32 after being converged by the 5th condenser 31, can obtain the Brillouin spectrum of sample 4 by the response of the 4th detector 33 after monitoring Brillouin light spectrometer 32; Reyleith scanttering light and Brillouin scattering through the second beam splitting system 8 transmissions enter differential confocal detection system 10, be divided into two bundles through three-beam-splitting system 15, the Reyleith scanttering light reflecting through three-beam-splitting system 15 is focused on by the first condenser 16, and to enter apart from the first condenser 16 focus front distances be that the first pin hole 17 of M position is rear is received by the first detector 18; Reyleith scanttering light through three-beam-splitting system 15 transmissions is focused on by second condenser lens 19, and the second pin hole 20 that to enter apart from distance after second condenser lens 19 focuses be M, is received by the second detector 21 after the second pin hole 20 then, and M is pin hole axial offset.
In measuring process, when sample 4 is carried out to axial and transversal scanning, the first detector 18 and the second detector 21 in differential confocal detection system 10, the intensity response that records respectively the 4 concavo-convex variations of reaction sample is I
1(ν, u ,+u
m) and I
2(ν, u ,-u
m), by gained intensity response I
1(ν, u ,+u
m) and I
2(ν, u ,-u
m) be sent to differential subtraction module 34 and carry out the differential processing of subtracting each other, obtain differential confocal intensity response I (ν, u, u
m):
I(ν,u,u
M)=I
1(ν,u,+u
M)-I
2(ν,u,-u
M) （1）
Thereby realize the microscopy tomography of sample 4 geometric positions, in formula (1), v is horizontal normalization optical coordinate, and u is axial normalization optical coordinate, u
m, be pin hole normalized offset, I
1for defocused front degree response, I
2for intensity response before burnt;
The Raman diffused light spectral signal that is loaded with sample 4 spectral informations that in confocal Raman spectra detection system 7, the 3rd detector 30 detects is I (λ
r), wherein λ
rfor sample 4 stimulated luminescences excite sent Raman scattering light wavelength.。
The Brillouin scattering spectral signal that is loaded with sample 4 spectral informations that in confocal Brillouin spectrum detection system 9, the 4th detector 33 detects is I (λ
b), wherein λ
bfor sample 4 stimulated luminescences excite the wavelength of sent Brillouin scattering.。
By I (λ
r), I (λ
b), I (ν, u, u
m) be sent to data fusion module 35 and carry out data processing, obtain and comprise sample 4 positional information I (ν, u, u
m) and spectral information I (λ
r, λ
b) metrical information I (ν, u, λ
r, λ
b).
To sample 4, along x, y to scanning, object lens 3, along z to scanning, repeat above-mentioned steps, record near homologue mirror foci position one group of i and comprise positional information I (ν, u, u
m) and spectral information I (λ
r, λ
b) sequence measuring information { I
i(λ
r, λ
b), I
i(ν, u) };
Utilize distinguishable region δ
icorresponding positional information I
i(ν, u, u
m), find out corresponding δ
ithe spectral information I in region
i(λ
r, λ
b) value, then according to the relation of v and lateral attitude coordinate (x, y) and the relation of u and axial location coordinate z, reconstruct reflection measured object microcell δ
ithe information I of three dimension scale and spectral characteristic
i(x
i, y
i, z
i, λ
ri, λ
bi);
Corresponding minimum distinguishable region δ
minthree dimension scale and spectral characteristic can by formula (2) determine:
Can realize like this nanoscale microcell laser differential confocal spectrum micro-imaging.
Meanwhile, can utilize the different measuring value { z of differential confocal axial response curve BB ' section
i, determine the spectral characteristic of corresponding different measuring value position
can realize the spectral characteristic test that excites near the controlled microcell of focus.
In detection method of the present invention, excitation beam can be light beam: line polarisation, rotatory polarization, radial polarisation light etc.; It can also be the structure light beam being generated by pupil filtering technology, itself and the coupling of pupil filtering technology can be compressed measurement focused spot size, raising system transverse resolution, in addition, can also obtain different Raman spectral information according to excitation beam polarization state difference, thereby obtain more structure of matter information.
In detection method of the present invention, this system can also be surveyed the scattering spectrum including fluorescence, Compton scattering light etc.
Laser differential confocal Brillouin-raman spectroscopy measurement device comprises that the excitation beam of placing successively along light path produces system 1, be positioned at the first beam splitting system 2 that excitation beam produces system 1 exit direction, object lens 3, sample 4, 3 D scanning system 5 and be positioned at the dichroic optical system 6 of the first beam splitting system 2 reflection directions, be positioned at the Raman spectrum detection system 7 of dichroic optical system 6 transmission direction, be positioned at the second beam splitting system 8 of dichroic optical system 6 reflection directions, the Brillouin spectrum detection system 9 that is positioned at the second beam splitting system 8 reflection directions is positioned at the differential confocal detection system 10 of the second beam splitting system 8 transmission direction, and with differential confocal detection system 10, the data processing module 11 that Raman spectrum detection system 7 is connected with Brillouin spectrum detection system 9, wherein, excitation beam produces system 1 for generation of excitation beam, comprises along light path and places successively laser instrument 22, the 3rd condenser 23, is positioned at the 3rd pin hole 24, the first collimation lens 25, radial polarisation optical generator 26 and the iris filter 27 of the 3rd condenser 23 focal positions, Raman spectrum detection system comprises the 4th condenser 28 of placing successively along light path, the Raman spectrometer 29 that is positioned at the 4th condenser 28 focal positions, and be positioned at the 3rd detector 30 after Raman spectrometer, wherein, Raman spectrometer 29 comprises entrance slit 46, plane mirror 47, the first concave reflection condenser 48, spectrum grating 49, the second concave reflection condenser 50 and the exit slit 51 placed successively along light path, Brillouin spectrum sniffer 9 comprises the 5th condenser 31 of placing successively along light path, the Brillouin light spectrometer 32 that is positioned at the 5th condenser 31 focuses, and is positioned at the 4th detector 33 after Brillouin light spectrometer, differential confocal detection system comprises three-beam-splitting system 15, is positioned at the second condenser lens 19 of the 4th beam splitting system 15 transmission direction, the second pin hole 20, the second detector 21, be positioned at the first condenser 16, the first pin hole 17, first detector 18 of three-beam-splitting system 15 transmission direction, wherein, it is defocused apart from M place that the second pin hole 20 is positioned at second condenser lens 19, and the first pin hole 17 is positioned at the burnt front distance M of the first condenser 16 place, data processing module 11 comprises differential subtraction module 34 and data fusion module 35, the data that collect for fusion treatment.
In device of the present invention, Raman spectrum detection system 7 and Brillouin spectrum detection system 9 can be common spectrum investigating systems, comprise the 4th condenser 28 of placing successively along dichroic optical system 6 transmitted light paths, be positioned at the Raman spectrometer 29 of the 4th condenser 28 focal positions and be positioned at the 3rd detector 30 after Raman spectrometer 29, the 5th condenser 31 of placing successively along the second beam splitting system 8 reflected light paths, be positioned at the Brillouin light spectrometer 32 of the 5th condenser 31 focal positions and be positioned at the 4th detector 33 after Brillouin light spectrometer 32, for the top layer spectrographic detection of sample, it can also be confocal spectrum investigating system, comprise the 4th condenser 28 of placing successively along dichroic optical system 6 transmitted light paths, be positioned at the 4th pin hole 36 of the 4th condenser 28 focal positions, be positioned at the 6th condenser 37 after the 4th pin hole 36, be positioned at the 6th condenser 37 Raman spectrometer 29 afterwards, the detection focal plane of Raman spectrometer and the 4th pin hole 36 are with respect to the 6th condenser 37 conjugation, be positioned at the 3rd detector 30 after Raman spectrometer 29, and second the 5th condenser 31 placed successively of beam splitting system 8 reflected light paths, be positioned at the 5th pin hole 38 of the 5th condenser 31 focal positions, be positioned at the 7th condenser 39 after the 5th pin hole 38, be positioned at the 7th condenser 39 Brillouin light spectrometer 32 afterwards, the detection focal plane of Brillouin light spectrometer and the 5th pin hole 38 are with respect to the 7th condenser 39 conjugation, and be positioned at the 4th detector 33 after Brillouin light spectrometer 32, to improve system signal noise ratio and spatial resolution, and chromatography spectrographic detection to sample.
In device of the present invention, excitation beam produces system 1 can also comprise radial polarisation optical generator 26 and iris filter 27, for generation of polarized light and structure light beam.
In device of the present invention, excite the iris filter 27 of hot spot can be between iris filter 26 and the first beam splitting system 2 for compressing, can also be between the first beam splitting system 2 and object lens 3.
In device of the present invention, Brillouin spectrum detection system 9 can also be placed on the transmission direction of the second beam splitting system 8, and differential confocal detection system 10 is positioned at the reflection direction of the second beam splitting system 8.
In device of the present invention, excitation beam generation system 1 can also be placed on the reflection direction of the first beam splitting system 2, dichroic optical system 6 is successively placed on the transmission direction of the first beam splitting system 2 along light path, Raman spectrum detection system 7 is positioned at the transmission direction of dichroic optical system 6, the second beam splitting system 8 is positioned at the reflection direction of dichroic optical system 6, Brillouin spectrum detection system 9 is positioned at the reflection direction of the second beam splitting system 8, differential confocal detection system 10 is positioned at the transmission direction of second system 8, data processing module 11 connects differential confocal detection system 10, Raman spectrum detection system 7 and Brillouin spectrum detection system 9.
In device of the present invention, can also comprise the 4th beam splitting system 40 and be positioned at the microscopic observation system 41 of the 4th beam splitting system 40 reflection directions, slightly take aim at for sample; Wherein, the 4th beam splitting system 40 can produce between system 1 and the first beam splitting system 2 at excitation beam, can also be between the first beam splitting system 2 and object lens 3.
In device of the present invention, data processing module 11 comprises differential subtraction module 34, for the treatment of positional information; Data fusion module 35, for merging positional information and spectral information, completes sample three-dimensionalreconstruction and Spectrum Data Fusion.
Embodiment
In the present embodiment, the first beam splitting system 2 is polarization splitting prism, 3 D scanning system 5 is 3-D scanning worktable, dichroic optical system 6 is Notch Filter, the second beam splitting system 8 is spectroscope, and three-beam-splitting system 15 and the 4th beam splitting system 40 are for protecting inclined to one side Amici prism, and Brillouin light spectrometer 32 is Fabry-Perot interferometer (F-P interferometer), the 5th beam splitting system 42 is broadband Amici prism, and the 5th detector 45 is CCD.
As shown in Figure 9, laser differential confocal Brillouin-method for measuring Raman spectrum, its testing procedure is as follows:
First, Kohler illumination system 43 produces equal white light, white light sees through after broadband Amici prism 42, protected inclined to one side Amici prism 40 and reflect, focus on sample 4 through object lens 3, white light is reflected back toward original optical path, after being reflected respectively by the inclined to one side Amici prism 40 of guarantor, broadband Amici prism 42 after object lens 4, after the 8th condenser 44, enter CCD45, by the image of observing in CCD45, test sample product 4 are slightly taken aim at, to determine that the region that sample need to be observed carries out coarse positioning to sample.
Then, the light beam that laser instrument 22 sends enters the 3rd pin hole 24 after the 3rd condenser 23 is assembled becomes pointolite, after the first collimation lens 25 collimator and extenders, the parallel outgoing of light beam, after radial polarisation optical generator (26), become radial polarisation light, radial polarisation light light beam after iris filter 27 is modulated, see through after polarization splitting prism 2, forming compression hot spot by object lens 3 focuses on sample 4, and inspire Reyleith scanttering light and be loaded with Raman diffused light and the Brillouin scattering of sample 4 spectral characteristics, sample 4 can be processed by strengthening the Raman enhancing technology such as Raman spectrum nano particle, to improve Raman scattering light intensity.
Mobile sample 4, make Raman diffused light and the Brillouin scattering of Reyleith scanttering light and corresponding sample 4 zoness of different be returned original optical path by systematic collection, through object lens 3 and transmitted through protecting after inclined to one side Amici prism 40, the first beam splitting system 2 reflections arrive Notch filter6, wherein, Raman scattering light transmission Notch filter6 enters Raman spectrum detection system 7, Raman spectrum detection system 7 is confocal Raman spectra detection system, Raman diffused light is converged to the 4th pin hole 36 by the 4th condenser 28, assemble and enter Raman spectrometer 29 through the 6th condenser 37, Raman diffused light is through entrance slit 46, after plane mirror 47 and the first concave reflection condenser 48 reflections, arrive spectrum grating 49, light beam is after spectrum grating 49 diffraction, by the second concave reflection condenser 50 reflect focalizations to exit slit 51, finally incide the 3rd detector 30.Due to grating diffration effect, in Raman spectrum, the light of different wave length is separated from each other, be monochromatic light from exit slit 51 light out, in the time that spectrum grating 49 rotates, from the optical wavelength difference of exit slit 51 outgoing, by supervising the 3rd Raman spectrum of surveying the response of detector 30 and the angle of grating rotating and can obtain sample 4, the response that is positioned at Raman spectrometer 29 the 3rd detector 30 afterwards by monitoring can obtain the Raman spectrum of sample 4; Reyleith scanttering light and Brillouin scattering are entered spectroscope 8 by Notch filter6 reflection, the Reyleith scanttering light reflecting through spectroscope 8 and Brillouin scattering enter Brillouin spectrum detection system 9, Brillouin's detection system 9 is confocal Brillouin's detection system, Reyleith scanttering light and Brillouin scattering are converged to the 5th pin hole 38 by the 5th condenser 31, converge and enter F-P interferometer 32 through the 7th condenser 39, the response that is positioned at the 4th detector 33 after F-P interferometer 32 by monitoring can obtain the Brillouin spectrum of sample 4; Reyleith scanttering light and Brillouin scattering through spectroscope 8 transmissions enter differential confocal detection system 10, be divided into two bundles through protecting inclined to one side Amici prism 15, focused on by the first condenser 16 through protecting the Reyleith scanttering light that inclined to one side Amici prism 15 reflects, to enter apart from the first condenser 16 focus front distances be that the first pin hole 17 of M position is rear is received by the first detector 18; The Reyleith scanttering light of protecting inclined to one side Amici prism 15 transmissions is focused on by second condenser lens 19, and the second pin hole 20 that to enter apart from distance after second condenser lens 19 focuses be M, is received by the second detector 21 after the second pin hole 20 then.
In measuring process, sample 4 is carried out axially and when transversal scanning, in differential confocal detection system 10, two the first detectors 18 and the second detector 21, record respectively and reflect that the intensity response of sample 4 concavo-convex variations is I
1(ν, u ,+u
m) and I
2(ν, u ,-u
m), by gained intensity response I
1(ν, u ,+u
m) and I
2(ν, u ,-u
m) be sent to differential subtraction module 34 and carry out the differential processing of subtracting each other, obtain differential confocal intensity response I (ν, u, u
m):
I(ν,u,u
M)=I
1(ν,u,+u
M)-I
2(ν,u,-u
M) （1）
Thereby realize the microscopy tomography of sample 4 geometric positions, in formula (1), v is horizontal normalization optical coordinate, and u is axial normalization optical coordinate, u
m, be pin hole normalized offset, I
1for defocused front degree response, I
2for intensity response before burnt;
The Raman diffused light spectral signal that is loaded with sample 4 Raman spectral information that in confocal Raman spectra detection system 7, the 3rd detector 30 detects is I (λ
r), wherein λ
bfor sample 4 stimulated luminescences excite sent Raman scattering light wavelength.
The Brillouin scattering spectral signal of what in confocal Brillouin spectrum detection system 9, the 4th detector 33 detected be loaded with sample 4 Brillouin light spectrum informations is I (λ
b), wherein λ
bfor sample 4 stimulated luminescences excite the wavelength of sent Brillouin scattering.
By I (λ
r), I (λ
b), I (ν, u, u
m) be sent to data fusion module 35 and carry out data processing, obtain and comprise sample 4 positional information I (ν, u, u
m) and spectral information I (λ
r, λ
b) metrical information I (ν, u, λ
r, λ
b).
To sample 4, along x, y to scanning, object lens 3, along z to scanning, repeat above-mentioned steps, record near homologue mirror foci position one group of i and comprise positional information I (ν, u, u
m) and spectral information I (λ
r, λ
b) sequence measuring information I
i(x
i, y
i, z
i, λ
ri, λ
bi);
Utilize distinguishable region δ
icorresponding positional information I
i(ν, u, u
m), find out corresponding δ
ithe spectral information I in region
i(λ
r, λ
b) value, then according to the relation of v and lateral attitude coordinate (x, y) and the relation of u and axial location coordinate z, reconstruct reflection measured object microcell δ
iinformation I (ν, u, the λ of three dimension scale and spectral characteristic
r, λ
b);
Corresponding minimum distinguishable region δ
minthree dimension scale and spectral characteristic can by formula (2) determine:
Can realize like this nanoscale microcell laser differential confocal spectrum micro-imaging.
Meanwhile, can utilize the different measuring value { z of differential confocal axial response curve BB ' section
i, determine the spectral characteristic I of corresponding different measuring value position
δ i(z
i, λ
i), can realize the spectral characteristic test that excites near the controlled microcell of focus.
As can be seen from Figure 9, by the actual zero point O of differential confocal detection system 10, can accurately catch the focal position that excites hot spot, from measuring sequence data I
i(x
i, y
i, z
i, λ
ri, λ
bi) in, the excitation spectrum of extraction corresponding focus positions O, has realized microcell δ
minspectrographic detection and three-dimensional geometry position sensing.
By to metrical information I
i(x
i, y
i, z
i, λ
ri, λ
bi) fusion treatment, can realize the multiple measurement pattern shown in formula (3), that is: microcell collection of illustrative plates tomography test, microcell Raman spectrum tomography, microcell Brillouin spectrum tomography, three dimension scale tomography, Raman spectrum detection, Brillouin spectrum detection etc.
As shown in Figure 9, laser differential confocal spectrum microscopic imaging device comprises that the excitation beam of placing successively along light path produces system 1, be positioned at the first beam splitting system 2 that excitation beam produces system 1 exit direction, protect inclined to one side Amici prism 40, object lens 3, sample 4, 3-D scanning worktable 5 and be positioned at and protect the microscopic observation system 41 of inclined to one side Amici prism 40 reflection directions, be positioned at the Notch filter6 of the first beam splitting system 2 reflection directions, be positioned at the Raman spectrum detection system 7 of Notch filter6 transmission direction, be positioned at the spectroscope 8 of Notch filter6 reflection direction, be positioned at the Brillouin spectrum detection system 9 of spectroscope 8 reflection directions, be positioned at the differential confocal detection system 10 of spectroscope 8 transmission direction, and be positioned at differential confocal detection system 10 and Raman spectrum detection system 7, the data processing module 11 of Brillouin spectrum detection system 9 junctions, wherein, excitation beam produces system 1 for generation of excitation beam, comprises along light path and places successively laser instrument 22, the 3rd condenser 23, is positioned at the 3rd pin hole 24, the first collimation lens 25, radial polarisation optical generator 26 and the iris filter 27 of the 3rd condenser 23 focal positions, microscopic observation system 41 comprises the broadband Amici prism 42 that is positioned at inclined to one side Amici prism 40 transmission direction of guarantor, be positioned at the Kohler illumination system 43 of broadband Amici prism 42 transmission direction, be positioned at the 8th condenser 44 of broadband Amici prism 42 reflection directions, and detection focal plane is positioned at the CCD45 at the 8th condenser 44 focus places, Raman spectrum detection system 7 comprises the 4th condenser 28 of placing successively along light path, be positioned at the 4th pin hole 36 of the 4th condenser 28 focal positions, be positioned at the 6th condenser 37 after the 4th pin hole 36, be positioned at the 6th condenser 37 Raman spectrometer 29 afterwards, the test surface of Raman spectrometer and the 4th pin hole 36 are with respect to the 6th condenser 37 conjugation, and be positioned at the 3rd detector 30 after spectrometer, wherein, Raman spectrometer 29 comprises the entrance slit 46 of placing successively along light path, plane mirror 47, the first concave reflection condenser 48, spectrum grating 49, the second concave reflection condenser 50 and exit slit 51, Brillouin spectrum detection system 9 comprises the 5th condenser 31 of placing successively along light path, be positioned at the 5th pin hole 38 at the 5th condenser 31 focus places, be positioned at the 5th pin hole 38 the 7th condenser 39 afterwards, be positioned at the 7th condenser 39 after F-P interferometer 32, the test surface of F-P interferometer 32 and the 5th pin hole 38 are with respect to the 7th condenser 39 conjugation, and be positioned at the 4th detector 33 after F-P interferometer 32, wherein, F-P interferometer 32 comprises the 6th pin hole 52, the second collimation lens 53, the first even angle prism 54, the second even angle prism 55, logical F-P56 more than first, logical F-P57 more than second, the 9th condenser 58 and the 7th pin hole 59, differential confocal detection system comprises the inclined to one side Amici prism 15 of code insurance, is positioned at second condenser lens 19, the second pin hole 20, second detector 21 of inclined to one side Amici prism 15 transmission direction of guarantor, is positioned at the first condenser 16, the first pin hole 17, the first detector 18 of protecting inclined to one side Amici prism 15 transmission direction, wherein, it is defocused apart from M place that the second pin hole 20 is positioned at second condenser lens 19, and the first pin hole 17 is positioned at the burnt front distance M of the first condenser 16 place, data processing module 11 comprises differential subtraction module 34 and data fusion module 35, the data that collect for fusion treatment.
Below by reference to the accompanying drawings the specific embodiment of the present invention is described; but these explanations can not be understood to limit scope of the present invention; protection scope of the present invention is limited by the claims of enclosing, and any change of carrying out on the claims in the present invention basis is all protection scope of the present invention.
Claims (10)
1. laser differential confocal Brillouin-method for measuring Raman spectrum, is characterized in that:
A) produce system (1) by excitation beam and produce exciting light, through the first beam splitting system (2), after object lens (3), focus on sample (4), and inspire Reyleith scanttering light and be loaded with Raman diffused light and the Brillouin scattering of sample (4) spectral characteristic, Reyleith scanttering light, Brillouin scattering and Raman diffused light are by systematic collection recovering light path, after object lens (3), reflexed to dichroic optical system (6) by the first beam splitting system (2), after dichroic optical system (6) light splitting, Raman diffused light and other spectrum are separated from each other, Reyleith scanttering light and Brillouin scattering are reflected and enter the second beam splitting system (8), Reyleith scanttering light and Brillouin scattering through the second beam splitting system (8) transmission enter differential confocal detection system (10), Reyleith scanttering light and Brillouin scattering through the second beam splitting system (8) reflection enter Brillouin spectrum detection system (9), Raman diffused light through dichroic optical system (6) transmission enters Raman spectrum detection system (7), utilize differential confocal curve (12) zero crossing and accurately corresponding this characteristic of focal position, accurately catch by triggering zero point the spectral information that excites hot spot focal position, realize the spectrographic detection of high-space resolution,
B) differential wave that only the first detector (18) to reception Reyleith scanttering light and Brillouin scattering, the second detector (21) obtain is carried out differential subtracting each other while processing, and system can be carried out the three dimension scale tomography of high-space resolution, when the raman spectral signal that the 3rd detector (30) of only docking receipts Raman diffused light obtains is processed, system can be carried out Raman spectrum detection, when only penetrating Brillouin light spectrum signal that the 4th detector (33) of light obtains to receiving Reyleith scanttering light and Brillouin and processing, system can be carried out Brillouin spectrum detection, simultaneously to receiving first detector (18) of Reyleith scanttering light and Brillouin scattering, the differential wave that the second detector (21) obtains, receive the Brillouin light spectrum signal of the 4th detector (33) acquisition of Reyleith scanttering light and Brillouin scattering, the raman spectral signal obtaining with the 3rd detector (30) that receives Raman diffused light is while processing, system can be carried out the microcell collection of illustrative plates tomography of high-space resolution, be " the collection of illustrative plates unification " of the high-space resolution of sample geometric position information and spectral information, can carry out the reconstruct of three-dimensional appearance high-resolution and the measurement of microcell form performance parameter to sample,
C) the focus O of differential confocal curve (12) the accurate corresponding object lens in zero crossing place (3), in measuring process, can carry out accurate tracking to sample (4) in real time focuses, ensure sample (4) in whole measuring process all the time in focal position, suppress the impacts of factor on spectral measurement such as environment temperature and vibration, thereby improve measuring accuracy;
D) corresponding object lens (3) the focus O that measures in differential confocal curve (12) zero crossing place, focused spot size minimum herein, the region minimum of surveying, the out of focus region of the range of linearity BB' corresponding object lens in other positions (3), focused spot size before burnt or in defocused BB' region increases with defocusing amount, utilizes this feature, and the z by adjustment sample is to defocusing amount, and control the size of focal beam spot according to Surveying Actual Precision demand, realize controlled to sample search coverage size.
2. according to the laser differential confocal Brillouin-method for measuring Raman spectrum described in right 1, it is characterized in that: excitation beam can be light beam: line polarisation, rotatory polarization, radial polarisation light etc.; It can also be the structure light beam being generated by pupil filtering technology, itself and the coupling of pupil filtering technology can be compressed measurement focused spot size, raising system transverse resolution, in addition, can also obtain different Raman spectral information according to excitation beam polarization state difference, thereby obtain more structure of matter information.
3. according to the laser differential confocal Brillouin-method for measuring Raman spectrum described in right 1, it is characterized in that: this system can also be surveyed and comprise that fluorescence, Compton scattering light etc. are at inscattering spectrum.
4. laser differential confocal Brillouin-raman spectroscopy measurement device, is characterized in that: comprise that excitation beam produces system (1), the first beam splitting system (2), object lens (3), 3 D scanning system (5), dichroic optical system (6), Raman spectrum detection system (7), the second beam splitting system (8), Brillouin spectrum detection system (9), differential confocal detection system (10) and data processing module (11), wherein, the first beam splitting system (2), object lens (3), 3 D scanning system (5) is placed on successively excitation beam along light path and produces system (1) exit direction, dichroic optical system (6) is positioned at the reflection direction of the first beam splitting system (2), Raman spectrum detection system (7) is positioned at the transmission direction of dichroic optical system (6), the second beam splitting system (8) is positioned at the reflection direction of dichroic optical system (6), Brillouin spectrum detection system (9) is positioned at the reflection direction of the second beam splitting system (8), differential confocal detection system (10) is positioned at the transmission direction of the second beam splitting system (8), data processing module (11) and Raman spectrum detection system (7), Brillouin spectrum detection system (9) and differential confocal detection system (10) connect, be used for merging and processing Raman spectrum detection system (7), the data that Brillouin spectrum detection system (9) and differential confocal detection system (10) collect.
5. according to the laser differential confocal Brillouin-raman spectroscopy measurement device described in right 4, it is characterized in that: Raman spectrum detection system (7) and Brillouin spectrum detection system (9) can be common spectrum investigating systems, comprise the 4th condenser (28) of placing successively along dichroic optical system (6) transmitted light path, be positioned at the Raman spectrometer (29) of the 4th condenser (28) focal position and be positioned at the 3rd detector (30) after Raman spectrometer (29), the 5th condenser (31) of placing successively along the second beam splitting system (8) reflected light path, be positioned at the Brillouin light spectrometer (32) of the 5th condenser (31) focal position and be positioned at the 4th detector (33) after Brillouin light spectrometer (32), for the top layer spectrographic detection of sample, it can also be confocal spectrum investigating system, comprise the 4th condenser (28) of placing successively along dichroic optical system (6) transmitted light path, be positioned at the 4th pin hole (36) of the 4th condenser (28) focal position, be positioned at the 6th condenser (37) after the 4th pin hole (36), be positioned at the 6th condenser (37) Raman spectrometer (29) afterwards, the detection focal plane of Raman spectrometer (29) and the 4th pin hole (36) are with respect to the 6th condenser (37) conjugation, be positioned at the 3rd detector (30) after Raman spectrometer (29), and second the 5th condenser (31) placed successively of beam splitting system (8) reflected light path, be positioned at the 5th pin hole (38) of the 5th condenser (31) focal position, be positioned at the 7th condenser (39) after the 5th pin hole (38), be positioned at the 7th condenser (39) Brillouin light spectrometer (32) afterwards, the detection focal plane of Brillouin light spectrometer (32) and the 5th pin hole (38) are with respect to the 7th condenser (39) conjugation, and be positioned at the 4th detector (33) after Brillouin light spectrometer (32), improve system signal noise ratio and spatial resolution, and chromatography spectrographic detection to sample.
6. according to the laser differential confocal Brillouin-raman spectroscopy measurement device described in right 4, it is characterized in that: excitation beam produces system (1) can also comprise radial polarisation optical generator (26) and iris filter (27), for generation of polarized light and structure light beam.
7. according to the laser differential confocal Brillouin-raman spectroscopy measurement device described in right 4, it is characterized in that: excite the iris filter (27) of hot spot can be positioned between light polarization modulator (26) and the first beam splitting system (2) for compressing, can also be positioned between the first beam splitting system (2) and object lens (3).
8. according to the laser differential confocal Brillouin-raman spectroscopy measurement device described in right 4, it is characterized in that: Brillouin spectrum detection system (9) can also be placed on the transmission direction of the second beam splitting system (8), differential confocal detection system (10) is positioned at the reflection direction of the second beam splitting system (8).
9. according to the laser differential confocal Brillouin-raman spectroscopy measurement device described in right 4, it is characterized in that: excitation beam generation system (1) can also be placed on the reflection direction of the first beam splitting system (2), dichroic optical system (6) is successively placed on the transmission direction of the first beam splitting system (2) along light path, Raman spectrum detection system (7) is positioned at the transmission direction of dichroic optical system (6), the second beam splitting system (8) is positioned at the reflection direction of dichroic optical system (6), Brillouin spectrum detection system (9) is positioned at the reflection direction of the second beam splitting system (8), differential confocal detection system (10) is positioned at the transmission direction of the second beam splitting system (8), data processing module (11) connects differential confocal detection system (10), Raman spectrum detection system (7) and Brillouin spectrum detection system (9).
10. according to the laser differential confocal Brillouin-raman spectroscopy measurement device described in right 4, it is characterized in that: can also comprise the 4th beam splitting system (40) and be positioned at the microscopic observation system (41) of the 4th beam splitting system (40) reflection direction, slightly take aim at for sample; Wherein, the 4th beam splitting system (40) can be positioned at excitation beam and produce between system (1) and the first beam splitting system (2), can also be positioned between the first beam splitting system (2) and object lens (3).
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