CN106442467B - Spatial self-focusing laser confocal imaging Raman spectrum detection method and device - Google Patents
Spatial self-focusing laser confocal imaging Raman spectrum detection method and device Download PDFInfo
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Abstract
The invention discloses a space self-focusing laser confocal imaging Raman spectrum detection method and a device, the method and the device introduce a focusing and telescopic technology and a confocal technology in the spectrum detection, and utilize a dichroic beam splitting system, separating Rayleigh scattered light from Raman scattered light, utilizing the characteristic that the maximum value of the confocal response curve of the detector is accurately corresponding to the position of a focus, the response maximum value is searched to accurately control the telescopic focusing system to automatically adjust the focus, so that the excitation light beam is automatically focused on the measured object, meanwhile, the spectral information of the focal position of the laser spot is acquired, and simultaneously, the image acquisition of a sample space area is acquired through the light splitting system, the imaging system and the image sensing system, so that the spectral detection and the image acquisition of space automatic focusing are realized, and the method and the device for realizing the spectral detection of the sample space self-focusing imaging are formed. The invention has the characteristics of automatic focusing and accurate positioning, enlarges the detection range and improves the spectral detection sensitivity.
Description
Technical Field
The invention relates to the technical field of space optical imaging and spectral measurement, in particular to a space self-focusing laser confocal imaging Raman spectrum detection method and device.
Background
The laser confocal Raman spectrum testing technology is a new technology combining a space imaging technology and a Raman spectrum analysis technology, and focuses incident laser on a sample through a self-focusing and telescopic focusing system, so that the material composition structure, composition and the like of the illuminated sample can be obtained at a longer distance without being interfered by surrounding materials, and better molecular fingerprint characteristics are provided. The Raman spectrum signal observation device can observe Raman spectrum signals of different micro-areas in the same layer surface of a sample, can also respectively observe Raman signals of different layer surfaces of the sample with different space depths, and performs space scanning on the sample to be detected, so that the effect of spectrum detection is achieved under the condition that the sample is not damaged. The laser confocal raman spectrum testing technology is widely applied to the fields of physics, chemistry, biomedicine, petrochemical industry, environmental science, material science, geology, criminal investigation, archaeology, jewelry identification and the like because of the lossless spectral tomography capability and high resolution.
The prior laser confocal Raman spectrometer adopts a microscope system, so that the detectable range of the system is limited; a three-dimensional moving platform is used as a sample bearing platform, so that the size and the existing form of a sample are limited; weak Raman scattering light is used for positioning, so that the focusing sensitivity of the system is reduced; (ii) a In the long-time spectrum detection process, the system is easy to drift under the influence of factors such as environment and the like, defocusing is generated, and the reliability of the system in long-time work is reduced; the system can only carry out spectrum detection and has a single mode; the light is required to be shielded and shielded in the measuring process, and the working environment is limited.
Disclosure of Invention
The invention provides a space self-adjusting laser confocal imaging Raman spectrum detection method and device, and aims to solve the problems that the detection range of the existing confocal Raman spectrum detection technology is difficult to improve and the spectrum detection mode is single.
The technical scheme of the invention is as follows: a spatial self-focusing laser confocal imaging Raman spectrum detection device comprises an excitation beam system, a telescopic focusing system, a dichroic beam splitting system, a first beam splitting system, a second beam splitting system, a Raman spectrum detection system, a confocal detection system, an image sensing system and a data processing module; the excitation beam system and the telescope focusing system are sequentially arranged in the reflection direction of the dichroic beam splitting system along a light path; the first light splitting system is in the transmission direction of the dichroic light splitting system; the Raman spectrum detection system is positioned in the transmission direction of the first light splitting system; the second light splitting system is positioned in the reflection direction of the first light splitting system; the confocal detection system is positioned in the transmission direction of the second light splitting system; the image sensing system is positioned in the reflection direction of the second light splitting system; the data processing module is connected with the Raman spectrum detection system, the image sensing system, the confocal detection system and the telescopic focusing system.
Preferably, the excitation beam system further comprises a polarization modulator and a pupil filter. For generating polarized light and spatially structured light beams for improving the optical performance of the system.
Preferably, the pupil filter for compressing the excitation light spot is located between the polarization controller and the dichroic beam splitting system or between the dichroic beam splitting system and the telescopic focusing system.
Preferably, the excitation beam system and the telescopic focusing system are further sequentially arranged in the transmission direction of the dichroic beam splitting system along the light path, the first beam splitting system is sequentially arranged in the reflection direction of the dichroic beam splitting system, the raman spectrum detection system is arranged in the transmission direction of the first beam splitting system, the second beam splitting system is arranged in the reflection direction of the confocal detection system, the confocal detection system is arranged in the transmission direction of the second beam splitting system, and the image sensing system is arranged in the reflection direction of the second beam splitting system.
Preferably, the raman spectrum detection system is a common raman spectrum detection system, and comprises a fifth condenser lens, a first spectrometer and a second detector, wherein the fifth condenser lens, the first spectrometer and the second detector are sequentially arranged along a light path, the first spectrometer is positioned at the focal position of the fifth condenser lens, and the second detector is positioned behind the first spectrometer and is used for detecting the surface spectrum of the detected sample; or the confocal Raman spectrum detection system comprises a seventh collecting lens, a third pinhole, an eighth collecting lens, a second spectrometer and a third detector, wherein the seventh collecting lens is sequentially arranged along a light path, the third pinhole is positioned at the focal position of the seventh collecting lens, the eighth collecting lens is positioned behind the third pinhole, the second spectrometer is positioned at the focal position of the eighth collecting lens, the third detector is positioned behind the second spectrometer, and the confocal Raman spectrum detection system is used for improving the signal-to-noise ratio and the spatial resolution of the system and completing the spectrum detection of a detected sample.
Preferably, the data processing module comprises a confocal data processing module for processing the position information, a data fusion module for processing the position information and the spectral information, and a data control module and an image module for controlling the focusing of the telescopic focusing system.
A space self-focusing laser confocal imaging Raman spectrum detection method utilizes the light collection capability of a telescopic focusing system; the dichroic beam splitting system separates the scattered light collected by the system into Rayleigh scattered light and Raman scattered light; the Rayleigh scattered light enters a confocal detection system to adjust the focal position of the telescope and focus the exciting light; the Raman scattering light enters a Raman spectrum detection system for spectrum detection; the image sensing system acquires a sample space image, the maximum value M of the confocal curve is accurately corresponding to the position of a focus O, the maximum value is searched to accurately control the excitation light beam to be focused on the sample, the spectral information of the focus position of the excitation light spot is acquired at the same time, and the image sensing system is used for completing the acquisition of the sample space image; the method comprises the following steps:
1) an excitation beam is generated by an excitation beam system, and the excitation beam passes through a dichroic beam splitting system and a telescopic focusing system, then irradiates on a tested sample, and excites Rayleigh scattering light and Raman scattering light carrying the spectral characteristics of the sample;
2) enabling the Rayleigh scattered light and the Raman scattered light corresponding to the detected sample area to pass through the telescopic focusing system again, shaping the Rayleigh scattered light and the Raman scattered light into parallel light by the telescopic focusing system, transmitting the parallel light to the dichroic beam splitting system, and separating the Rayleigh scattered light and the Raman scattered light by the dichroic beam splitting system;
3) part of Rayleigh scattering light is transmitted by the dichroic light splitting system, reflected by the first light splitting system, transmitted by the second light splitting system and enters the confocal detection system, and the intensity response I [ α, l ] reflecting the position information of the sample is measured by using a first detector in the confocal detection system;
4) the response of the confocal detection system is maximized through a focusing mechanism, the automatic focusing of the excitation beam on the sample is completed, and meanwhile, the position information of the sample is obtained [ α, l ];
5) after the excitation light beam is focused, the image sensing system acquires sample space image information P (α, l);
6) the Raman scattering light is transmitted through the dichroic light splitting system and then transmitted through the first light splitting system to enter the Raman spectrum detection system, and a Raman scattering signal I (lambda) carrying the characteristics of a detected sample is measured by using the Raman spectrum detection system, so that spectrum test can be carried out, wherein lambda is the wavelength;
7) transmitting the I (lambda) to a data processing module for data processing, thereby obtaining spectral information I (lambda) containing the position of the corresponding region of the tested sample and object position information [ α, l ];
8) scanning the tested sample along α direction, scanning and focusing along l direction by the telescopic focusing system, repeating the above steps to obtain a group of n sequence measurement information [ I (lambda), α, l ] and Pn (α, l) containing position information [ α, l ] and I (lambda) corresponding to the focus position of the objective lens;
9) the spectral information In (lambda) value corresponding to the delta n region is found out by utilizing the position information [ α, l ] corresponding to the distinguishable region delta n, and then the information In (α n, β n, ln, lambda n) reflecting the three-dimensional structure and spectral characteristics of the micro-region delta n of the measured object is reconstructed according to the relation with the space coordinate [ α, l ], so that the spectral detection and the three-dimensional geometric position detection of the micro-region delta min are realized;
10) the three-dimensional scale and spectral characteristics corresponding to the minimum resolvable area δ min are determined by the following formula:
the confocal imaging Raman spectrum detection in a large space range is realized.
Preferably, the position of the maximum value of the confocal curve corresponds to the focus position of the telescopic focusing system, the focused light spot size is minimum, the detected area is minimum, the other positions of the confocal curve correspond to the out-of-focus area of the telescopic focusing system, and the focused light spot size in the area before or after the focus is increased along with the increase of the out-of-focus amount. By utilizing the characteristics, the excitation light beam is accurately focused on the sample by adjusting the focusing mechanism of the telescopic focusing system.
Preferably, the excitation beam is a polarized beam: linearly, circularly or radially polarized light, or structured light beams generated by pupil filtering techniques, which in combination with polarization modulation techniques can compress the size of the measured focused spot, improving the system angular resolution.
The invention has the beneficial effects that: a spatial self-focusing laser confocal imaging Raman spectrum detection method and device integrates a telescope technology, a focusing technology, a confocal technology, a spectrum detection technology and an image sensing technology; the telescopic focusing system is utilized to improve the light collection capability of the system, so that the system has a large space detection range; acquiring spatial image information of a sample by using an image sensing technology; the confocal system is used for accurately positioning the focus, so that the spatial resolution of spectral detection is greatly improved; the system integrates a confocal technology and a focusing technology, can realize automatic focusing and realize automatic focusing detection of a sample; the system has three modes of space imaging, atlas imaging and spectrum testing at the same time.
Drawings
Further objects, features and advantages of the present invention will become apparent from the following description of embodiments of the invention, with reference to the accompanying drawings, in which:
FIG. 1 shows the laser confocal response curve of the present invention;
FIG. 2 is a schematic diagram of the spatial self-focusing laser confocal imaging Raman spectrum detection method of the present invention;
FIG. 3 is a schematic diagram of a spatial self-focusing laser confocal imaging Raman spectrum detection device according to the present invention;
FIG. 4 is a schematic diagram of a spatial self-focusing laser confocal imaging Raman spectrum detection method and apparatus according to embodiment 1 of the present invention;
fig. 5 is a schematic diagram of a spatial self-focusing laser confocal imaging raman spectrum detection method and device according to embodiment 2 of the present invention.
Detailed Description
The objects and functions of the present invention and methods for accomplishing the same will be apparent by reference to the exemplary embodiments. However, the present invention is not limited to the exemplary embodiments disclosed below; it can be implemented in different forms. The nature of the description is merely to assist those skilled in the relevant art in a comprehensive understanding of the specific details of the invention.
Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings. In the drawings, the same reference numerals denote the same or similar parts, or the same or similar steps.
The invention is further described below with reference to the accompanying drawings and examples.
Fig. 1 is a laser confocal response curve of the present invention, as shown in fig. 1, the position M of the maximum value of the confocal curve corresponds to the focal position O of the telescopic focusing system.
FIG. 2 is a schematic diagram of the spatial self-focusing laser confocal imaging Raman spectrum detection method of the present invention. As shown in fig. 2, the excitation beam system 600 generates excitation light, which is reflected by the dichroic beam splitting system 900, focused on the sample 140 after passing through the telescopic focusing system 100, and excites rayleigh scattered light and raman scattered light carrying spectral characteristics of the sample, the excited raman scattered light and rayleigh scattered light are collected by the system back to the optical path, after passing through the telescopic focusing system 100 and after being transmitted by the dichroic beam splitting system 900, the raman scattered light and part of rayleigh scattered light are split by the first beam splitting system 150, part of the rayleigh scattered light is reflected into the second beam splitting system 160, part of the raman scattered light is transmitted into the confocal detection system 170 for position detection, part of the raman scattered light is reflected into the image sensing system 310 by the second beam splitting system 160, the raman scattered light is transmitted into the spectral detection system 220 for spectral detection, and the data processing module 340 controls the telescopic focusing mechanism 120 to focus according to the response curve, and focusing the exciting light on the sample to maximize the confocal response curve, and finishing the automatic focusing of the exciting light beam.
Fig. 3 is a schematic diagram of the spatial self-focusing laser confocal imaging raman spectrum detection device of the present invention. As shown in fig. 3, the apparatus includes an excitation beam system 600, a dichroic beam splitting system 900, a telescopic focusing system 100, a sample 140 to be measured, a first beam splitting system 150 located in a transmission direction of the dichroic beam splitting system 900, a spectrum detection system 220 located in the transmission direction of the first beam splitting system 150, a second beam splitting system 160 located in a reflection direction, a confocal detection system 170 located in the transmission direction of the second beam splitting system 160, an image sensing system 310 located in the reflection direction of the second beam splitting system 160, a data processing module 340 connected to the spectrum detection system 220, the confocal detection system 170, the image sensing system 310, the telescopic focusing system 100, and a computer control system 350.
Example 1
In this embodiment, the dichroic beam splitting system 900 is an optical notch filter, the first beam splitting system 150 is a broadband beam splitting system with a certain splitting ratio, and the second beam splitting system 160 is a broadband beam splitting system with a certain splitting ratio.
Fig. 4 is a schematic view of a spatial self-focusing laser confocal imaging raman spectrum detection method and apparatus according to embodiment 1 of the present invention.
As shown in fig. 4, the detection method of spatial self-focusing laser confocal imaging raman spectrum specifically includes the following steps:
the laser 610 in the excitation beam system 600 generates excitation light, which is diverged and expanded by the negative lens 620 and then collimated into a parallel beam by the first condenser lens 630.
The parallel light beams are reflected by the dichroic beam splitting system 900, then are diverged by the telescope focusing lens 110 and focused by the telescope condenser 130, and then are irradiated on the sample 140 to be measured, and rayleigh scattered light and raman scattered light carrying spectral characteristics of the sample to be measured are excited on the sample.
The excited raman scattered light and rayleigh scattered light are collected by the telescope 130 and returned to the optical path, pass through the telescope 110 and then compress the beam aperture, and are transmitted by the dichroic beam splitting system 900, and then the raman scattered light and a part of rayleigh scattered light are split by the first beam splitting system 150.
Part of the rayleigh scattered light is reflected into the second beam splitting system 160, wherein part of the light is transmitted into the confocal detection system 170, condensed by the fourth condenser lens 200, transmitted through the second pinhole 190, and forms a light intensity response signal on the first detector 180; another portion of the light is reflected into the image sensing system 310 and imaged onto the image sensor 320 via the imaging lens 330.
The light intensity response signal of the first detector 180 and the image signal on the image sensor 320 are transmitted to the data processing module 340, then transmitted to the computer control system 350 after being processed, a control signal is formed after being processed by the computer control system 350 and transmitted to the data processing module 340, the data processing module 340 generates a focusing control signal and controls the telescopic focusing mechanism 120 to perform focusing, meanwhile, the signal of the first detector 180 also tracks and changes, a new control loop is formed, the process continues until the first detector 180 has the maximum response, the focusing mechanism 120 completes focusing of the excitation light, at this time, the raman scattering light is transmitted to the spectrum detection system 220 to perform spectrum detection, and the image sensing system 310 completes sample image information acquisition.
The spatial self-focusing laser confocal imaging Raman spectrum detection device is utilized, the focusing mechanism 120 completes the focusing of exciting light through a confocal detection response curve, at the moment, Raman scattering light is transmitted into the spectrum detection system 220 for spectrum detection, the Raman scattering light is converged by the fifth condenser lens 240 and enters the first spectrometer 250, the Raman scattering light reaches the spectrum grating 300 after being reflected by the incident slit 260, the plane reflector 270 and the first concave surface reflection condenser lens 280, and light beams are reflected by the second concave surface reflection condenser lens 290 and focused on the second detector 230 after being diffracted by the spectrum grating 300. Due to the diffraction effect of the grating, light with different wavelengths in the Raman spectrum is mutually separated, and the light emitted from the spectrometer is the Raman spectrum of the sample.
During the measurement, when the measured sample 140 is scanned spatially, the first detector 180 in the confocal detection system 170 measures an intensity response I (α, l) reflecting the distance change of the measured sample 140, and transmits the obtained intensity response I (α, l) to the data processing module 340 for processing.
The raman scattered light spectrum signal detected by the second detector 230 of the raman spectrum detection system 220 carrying the spectral information of the sample 140 under test is I (λ), where λ is the wavelength.
The image sensing system acquires sample spatial image information P (α, l).
The I (λ), I (α, l) is transmitted to the computer control system 350 for data processing, thereby obtaining three-dimensional measurement information I (α, l, λ) including position information I (α, l) and spectral information I (λ) of the sample 140 under test.
The sample 140 is scanned in direction α and the telescopic focus mechanism 120 is scanned in direction l, and the above steps are repeated to obtain a set of n series measurement information [ I (λ), α, l ] containing position information [ α, l ] and I (λ) near the focal position of the objective lens.
And (3) finding out the spectral information In (lambda) value corresponding to the delta n region by utilizing the position information [ α, l ] corresponding to the distinguishable region delta n, and reconstructing information In (α n, β n, ln, lambda n) reflecting the three-dimensional structure and spectral characteristics of the micro-region delta n of the measured object according to the relation with the space coordinate [ α, l ], so that the spectral detection and the three-dimensional geometric position detection of the micro-region delta min are realized.
The three-dimensional scale and spectral characteristics corresponding to the minimum resolvable area δ min are determined by the following formula:
the spatial self-focusing laser confocal imaging Raman spectrum detection is realized.
Iσmin(α,β,l)＝In(α, l) three-dimensional shape imaging
Iσmin(α,β,l)＝In(lambda) spectroscopic measurement
As can be seen from fig. 4, the confocal detection system 170 responds to the maximum point of the curve 210, so as to accurately capture the focus position of the excitation light spot, and extract the excitation spectrum corresponding to the focus position O from the measurement sequence data, i.e. to implement the spectrum detection and the three-dimensional geometric position detection of the sample and the image information.
As shown in fig. 4, the spatial self-focusing laser confocal imaging raman spectrum detection apparatus includes a laser beam system 600 located in the reflection direction of a dichroic beam splitting system 900; the telescope focusing lens 110, the telescope condenser 130 and the sample 140 to be measured are sequentially arranged along the light path in the transmission direction of the dichroic beam splitting system 900; a first dichroic beam splitting system 150 positioned in a transmission direction of the dichroic beam splitting system 900; a Raman spectrum detection system 220 located in the transmission direction of the first beam splitting system 150; a second light splitting system 160 located in a reflection direction of the first light splitting system 150; a confocal detection system 170 in the transmission direction of the second beam splitting system 160; the image sensing system 310 located in the reflection direction of the second dichroic system 160, the data processing module 340 connected with the common focus detection system 170, the image sensing system 310, the raman spectrum detection system 220 and the telescopic focusing mechanism 120, and the computer control system 350 connected with the data processing module 340 through serial ports.
The excitation beam system 600 is configured to generate an excitation beam, and includes a laser 610, a negative lens 620, and a first condenser 630, which are sequentially disposed along an optical path.
The raman spectroscopy detection system 220 includes a fifth condenser 240, a first spectrometer 250 positioned at a focal point of the fifth condenser 240, and a second detector 230 positioned behind the first spectrometer 250, which are sequentially positioned along the optical path.
The first spectrometer 250 includes an entrance slit 260, a plane mirror 270, a first concave reflection condenser 280, and a spectrum grating 300, which are sequentially disposed along the optical path.
The image sensing system 310 includes an image sensor 320, an imaging lens 330, and a second concave reflective condenser 290; the confocal detection system 170 includes a fourth collection mirror 200, a second pinhole 190 at the focal position of the fourth collection mirror 200, and a first detector 180.
A data processing module 340 and a computer control system 350 for fusion processing the collected data and generating a control signal, and acquiring image information.
Example 2
Fig. 5 is a schematic view of a spatial self-focusing laser confocal imaging raman spectrum detection method and apparatus according to embodiment 2 of the present invention. The present example differs from example 1 in that: as shown in fig. 5, the excitation beam system 600 is disposed in the transmission direction of the dichroic beam splitting system 900, the telescopic focusing system 100 is disposed in the transmission direction of the dichroic beam splitting system 900, and the first beam splitting system 150 is disposed in the reflection direction of the dichroic beam splitting system 900.
While the invention has been described in connection with specific embodiments thereof, it will be understood that it is not intended to limit the scope of the invention, which is defined by the appended claims, any modifications that may be made based on the claims.
Claims (8)
1. A spatial self-focusing laser confocal imaging Raman spectrum detection device comprises an excitation beam system, a telescopic focusing system, a dichroic beam splitting system, a first beam splitting system, a second beam splitting system, a Raman spectrum detection system, a confocal detection system, an image sensing system and a data processing module;
the excitation beam system and the telescopic focusing system are sequentially arranged in the reflection direction of the dichroic beam splitting system along a light path;
the first light splitting system is in a transmission direction of the dichroic light splitting system; the Raman spectrum detection system is positioned in the transmission direction of the first light splitting system; the second light splitting system is positioned in the reflection direction of the first light splitting system; the confocal detection system is positioned in the transmission direction of the second light splitting system; the image sensing system is positioned in the reflection direction of the second light splitting system;
the data processing module is connected with the Raman spectrum detection system, the image sensing system, the confocal detection system and the telescopic focusing system;
the telescopic focusing system comprises a telescopic focusing mechanism, a telescopic focusing lens and a telescopic light collecting lens, wherein the telescopic focusing mechanism is connected with the data processing module;
the excitation beam system generates excitation light, the excitation light is reflected by the dichroic beam splitting system, the excitation light is focused on a sample to be detected after passing through the telescopic focusing system, Rayleigh scattered light and Raman scattered light with spectral characteristics of the sample to be detected are excited on the sample, the excited Raman scattered light and the Rayleigh scattered light are collected by the system and returned to a light path, the Raman scattered light and part of Rayleigh scattered light are split by the first beam splitting system after passing through the telescopic focusing system and transmitted by the dichroic beam splitting system, part of Rayleigh scattered light is reflected into the second beam splitting system, part of Rayleigh scattered light is transmitted into the confocal detection system to be detected in position, part of Rayleigh scattered light is reflected into the image sensing system by the second beam splitting system, the Raman scattered light is transmitted into the spectrum detection system to be detected in spectrum, and the data processing module controls the telescopic focusing mechanism, the confocal response curve is maximized to complete the auto-focusing of the excitation beam.
2. The confocal spatial imaging raman spectroscopy apparatus of claim 1, wherein the excitation beam system further comprises a polarization modulator and a pupil filter.
3. The confocal spatial imaging raman spectroscopy apparatus of claim 2, wherein the pupil filter is located between the polarization controller and the dichroic beam splitting system or between the dichroic beam splitting system and the telescopic focusing system.
4. The spatial self-focusing laser confocal imaging Raman spectrum detection device according to claim 1, wherein the Raman spectrum detection system is a common Raman spectrum detection system and comprises a fifth condenser lens, a first spectrometer and a second detector, wherein the fifth condenser lens, the first spectrometer and the second detector are sequentially arranged along an optical path, the first spectrometer is arranged at a focal point of the fifth condenser lens, and the second detector is arranged behind the first spectrometer and is used for detecting the surface spectrum of the sample to be detected; or the confocal Raman spectrum detection system comprises a seventh collecting lens, a third pinhole, an eighth collecting lens, a second spectrometer and a third detector, wherein the seventh collecting lens is sequentially arranged along a light path, the third pinhole is positioned at the focal position of the seventh collecting lens, the eighth collecting lens is positioned behind the third pinhole, the second spectrometer is positioned at the focal position of the eighth collecting lens, the third detector is positioned behind the second spectrometer, and the confocal Raman spectrum detection system is used for improving the signal-to-noise ratio and the spatial resolution of the system and completing the spectrum detection of a detected sample.
5. The spatial self-focusing laser confocal imaging Raman spectrum detection device according to claim 1, wherein the data processing module comprises a confocal data processing module, a data fusion module, a data control module and an image module.
6. The spatial self-focusing laser confocal imaging Raman spectrum detection method applied to the spatial self-focusing laser confocal imaging Raman spectrum detection device according to claim 1, wherein the method comprises the following steps:
1) the excitation beam system generates an excitation beam, the excitation beam passes through the dichroic beam splitting system and the telescopic focusing system, then irradiates on a measured sample, and excites Rayleigh scattering light and Raman scattering light carrying spectral characteristics of the sample;
2) the Rayleigh scattered light and the Raman scattered light corresponding to the detected sample area pass through the telescopic focusing system again, are shaped into parallel light by the telescopic focusing system, and are transmitted by the dichroic beam splitting system, and simultaneously the Rayleigh scattered light and the Raman scattered light are separated by the dichroic beam splitting system;
3) part of Rayleigh scattering light is transmitted by the dichroic beam splitting system, reflected by the first beam splitting system and transmitted by the second beam splitting system to enter the confocal detection system, and an intensity response I [ α, l ] reflecting the position information of the sample is measured by using a first detector in the confocal detection system;
4) the response of the confocal detection system is maximized through a focusing mechanism, the automatic focusing of the excitation beam on the sample is completed, and meanwhile, the position information of the sample is obtained [ α, l ];
5) after the excitation light beam is focused, the image sensing system acquires sample space image information P (α, l);
6) the Raman scattering light is transmitted through the dichroic light splitting system, is transmitted through the first light splitting system and enters the Raman spectrum detection system, and a Raman scattering signal I (lambda) with the characteristics of a detected sample is measured by the Raman spectrum detection system to perform spectrum test;
7) transmitting the I (lambda) to a data processing module for data processing, thereby obtaining spectral information I (lambda) containing the position of the corresponding region of the tested sample and object position information [ α, l ];
8) scanning the tested sample along α direction, scanning and focusing along l direction by the telescopic focusing system, repeating the above steps to obtain a group of n sequence measurement information [ I (lambda), α, l ] and Pn (α, l) containing position information [ α, l ] and I (lambda) corresponding to the focus position of the objective lens;
9) utilizing the position information [ α, l ] corresponding to the distinguishable region delta n to find out the spectral information In (lambda) value corresponding to the delta n region, and reconstructing information In (α n, β n, ln, lambda n) reflecting the three-dimensional structure and spectral characteristics of the distinguishable region delta n according to the relation with the position information [ α, l ];
10) the three-dimensional scale and spectral characteristics corresponding to the minimum resolvable area δ min are determined by the following formula:
7. the method as claimed in claim 6, wherein the maximum position of the confocal curve corresponds to the focus position of the telescopic focusing system, where the focused spot size is smallest and the detected area is smallest, and the other positions of the confocal curve correspond to the out-of-focus areas of the telescopic focusing system, and the focused spot size in the area before or after focus increases with the increase of the out-of-focus amount.
8. The method as claimed in claim 6, wherein the excitation beam is a polarized beam: linearly polarized, circularly polarized, or radially polarized light, or structured light beams generated by pupil filtering techniques.
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| WO2019061114A1 (en) * | 2017-09-27 | 2019-04-04 | 深圳前海达闼云端智能科技有限公司 | Focal-point testing method and apparatus for substance detection, and storage medium and device |
| CN107748158B (en) * | 2017-11-03 | 2020-11-06 | 中国科学院重庆绿色智能技术研究院 | micro-Raman imaging spectrum rapid detection device and method |
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| CN103091299B (en) * | 2013-01-21 | 2015-01-21 | 北京理工大学 | Laser differential confocal map microimaging imaging method and device |
| CN103105231B (en) * | 2013-01-21 | 2014-10-15 | 北京理工大学 | Method and device for confocal Raman spectrum detection with high spatial discrimination |
| CN103940800B (en) * | 2014-03-10 | 2016-08-17 | 北京理工大学 | Confocal laser Brillouin-method for measuring Raman spectrum and device |
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