CN106546334A - Space autofocusing confocal laser Raman spectroscopic detection method and apparatus - Google Patents
Space autofocusing confocal laser Raman spectroscopic detection method and apparatus Download PDFInfo
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Abstract
The present invention discloses a kind of space autofocusing confocal laser Raman spectroscopic detection method and apparatus, the method and device introduce focusing in spectrographic detection and look in the distance technology and confocal technology, and utilize dichroic optical system, lossless separation is carried out to Rayleigh scattering light and Raman diffused light, using the accurate corresponding characteristic in the confocal response curve maximum of detector and focal position, by finding response maximum come precise control telescopic system adjust automatically focus, excitation beam is made to focus on automatically measurand, the spectral information of laser facula focal position is obtained simultaneously, realize the spectrographic detection of space automatic focusing, constitute a kind of method and apparatus of achievable sample space autofocusing spectrographic detection.The present invention has automatic focusing, pinpoints accurate feature, and while expands investigative range and improve spectral detectivity.
Description
Technical field
The present invention relates to space optics imaging and spectral measurement methodses field, and in particular to a kind of space autofocusing laser is altogether
Burnt Raman spectroscopic detection method and apparatus.
Background technology
Aerial image technology is combined by confocal laser Raman spectrum measuring technology with Raman spectrum analyses technology
New technique, incident laser is focused on sample by it by autofocusing telescopic system, such that it is able in larger distance not
In the case of being disturbed by ambient substance, institute's material composition structure and composition of product etc. in the same old way is obtained, there is provided preferable molecule " refers to
Stricture of vagina " feature.It not only can in the same aspect of observing samples different microcells raman spectral signal, moreover it is possible to observing samples are empty respectively
Between the different aspect of depth Raman signal, spacescan is carried out to sample, so as to reach in the case of not lesioned sample
To the effect for carrying out collection of illustrative plates detection.Confocal laser Raman spectrum measuring technology is due to its lossless spectrum tomography ability and high score
Resolution, is widely used to physics, chemistry, biomedicine, petrochemical industry, environmental science, material science, geology, Xing and detects, engages in archaeological studies
With the field such as gemstone testing.
Existing confocal laser Raman spectrometer employs microscopic system at present, limits system detectable range；Using three
Dimension mobile platform limits sample size and existing forms as sample carrying platform；It is fixed to be carried out using weak Raman diffused light
Position, reduce system focuses sensitivity；；During long-time spectrographic detection, system is easily affected to occur by factors such as environment
Drift, produces out of focus, reduces the reliability of system long-term work；System only carries out spectrographic detection, and pattern is single；Measurement process
In need to hide light, working environment is restricted.
The content of the invention
The present invention provides a kind of space self-regulated confocal laser Raman spectroscopic detection method and apparatus, it is therefore intended that solve existing
Confocal Raman spectra Detection Techniques investigative range is difficult to the problem for improving and spectrographic detection pattern is single.
The technical scheme is that：A kind of space autofocusing confocal laser Raman spectroscopic detection method, using looking in the distance be
The light capacity gauge of system, by dichroic optical system by systematic collection to scattered light be separated into Rayleigh scattering light and Raman dissipates
Penetrate light；Described Rayleigh scattering light carries out the adjustment of telescope focal position and the focusing of exciting light into confocal detection system,
Described Raman diffused light carries out spectrographic detection into Raman spectroscopic detection system, using confocal curves maximum M and focus O position
Put, focused on sample come precise control excitation beam by maximizing, while obtain exciting
The spectral information of light spot focus position, realizes the automatic spectrum detection of large space scope, and the method comprises the steps：
1) by laser beam system produce exciting light, after dichroic optical system and telescopic system, be radiated at by
On test sample product, and inspire Rayleigh scattering light and be loaded with the Raman diffused light of sample spectra characteristic；
2) by focus adjusting mechanism, make the response of confocal detection system maximum, complete excitation beam and be autofocusing on sample,
The positional information [α, β, l] of sample is obtained simultaneously；
3) make the Rayleigh scattering light and Raman diffused light in correspondence sample region again pass by telescopic system, and looked in the distance
System is shaped to directional light and is transmitted through dichroic optical system, and Jing dichroic optical systems are to Rayleigh scattering light and Raman diffused light
Separated；
4) part Rayleigh scattering light is transmitted by dichroic optical system, and the first beam splitting systems of Jing are reflected into confocal detection system
System, using the first detector in confocal detection system, measures intensity response I [α, β, l] of reflection sample position information, you can
The judgement of telescopic system focal position is carried out, so as to complete the automatic focusing of telescopic system, excitation beam is focused on sample；
5) Raman diffused light Jing dichroic optical systems transmission, the first beam splitting systems of Jing are transmitted into Raman spectroscopic detection system
System, measures the Raman scattering signal I (λ) for being loaded with sample characteristic, you can carry out spectrum survey using Raman spectroscopic detection system
Examination, wherein λ are wavelength；
6) I (λ) is sent to data processing module carries out data processing, so as to obtain comprising sample corresponding region position
The spectral information I (λ) for putting, object location information [α, β, l]；
7) rotation detection system, is carried out to space along α, and β scanning directions, telescopic system carry out focusing along l scanning directions, weight
Multiple above-mentioned steps measure the one group of n letter of the sequence measuring comprising positional information [α, β, l] and I (λ) of correspondence objective focus positions
Breath [I (λ), α, β, l]；
8) using the corresponding positional informationes [α, β, l] of distinguishable region δ n, find out the spectral information In (λ) in correspondence δ n regions
Value, further according to the information of the relation with space coordinatess [α, β, l], reconstruct reflection measured object microcell δ n three dimensional structures and spectral characteristic
In (α n, β n, ln, λ n), that is, realize the spectrographic detection and three-dimensional geometry position sensing of microcell δ min；
9) three dimension scale and spectral characteristic of the minimum distinguishable region δ min of correspondence is determined by following formula：
The detection of large space scope confocal Raman spectra is realized.
Preferably, correspondence telescopic system focus O position at confocal curves maximum M, focused spot size is minimum herein, visits
The region of survey is minimum, the out of focus region of confocal curves other positions correspondence telescopic system, the focusing before Jiao or in defocused region
Spot size increases with defocusing amount and increases.Using this feature, by the focus adjusting mechanism for adjusting telescopic system, will accurately excite
Light beam is focused on sample.
Preferably, excitation beam can be polarized beam：Linear polarization, circular polarization or radial polarisation light, can also be by light
The structure light beam that pupil filtering technique is generated, which can compress the size of measurement focal beam spot, improve with polarization Modulation combination
The angular resolving power of system.
A kind of space autofocusing confocal laser Raman spectroscopic detection device, including excitation beam system, focusing system of looking in the distance,
Dichroic optical system, the first beam splitting system, Raman spectroscopic detection system, confocal detection system and data processing module；Wherein
Excitation beam system and focusing system of looking in the distance are placed sequentially in the reflection direction of dichroic optical system along light path；First light splitting system
Transmission direction of the system in dichroic optical system；Raman spectroscopic detection system is located at the transmission direction of the first beam splitting system；Altogether
Burnt detection system is located at the reflection direction of the first beam splitting system；Data processing module and Raman spectroscopic detection system and confocal detection
System and focusing system of looking in the distance connection.
Preferably, excitation beam system can also include light polarization modulator and iris filter.For produce polarized light and
Space structure light beam, for improving the optical property of system.
Preferably, the iris filter of hot spot is excited to may be located at Polarization Controller and dichroic optical system for compression
Between, may be located between dichroic optical system and telescopic system.
Preferably, excitation beam system can also be placed on the transmission direction of dichroic optical system, and telescopic system is placed on
The transmission direction of dichroic optical system, the first beam splitting system are placed on the reflection direction of dichroic optical system one.
Preferably, Raman spectroscopic detection system can be normal Raman spectroscopy detection system, including being sequentially placed along light path
The 5th condenser lenss, positioned at the first spectrogrph of the 5th condenser lenss focal position and after the first spectrogrph second detection
Device, for the detection of the surface spectrum of sample；Confocal Raman spectra detection system is can also be, including being put along light path successively
The 7th condenser lenss put, positioned at the 3rd pin hole of the 7th condenser lenss focal position, the 8th condenser lenss after the 3rd pin hole, position
In second spectrogrph and the 3rd detector after the second spectrogrph of the 8th condenser lenss focal position, for improving system letter
Make an uproar than and spatial resolution, complete the spectrographic detection to sample.
Preferably, data processing module is included for the confocal data processing module of processing position information and for processing position
Confidence ceases the data fusion module with spectral information, also includes for controlling the data control block that telescopic system is focused.
The invention has the beneficial effects as follows：A kind of space autofocusing confocal laser Raman spectroscopic detection method and apparatus, fusion
Look in the distance technology, focus technique, confocal technology and spectrographic detection technology, improve system light capacity gauge using telescopic system, make be
System is with large space investigative range；Using being accurately positioned for confocal system focusing, the spatial discrimination of spectrographic detection is greatly improved
Power；System globe area confocal technology, focus technique, are capable of achieving to focus on automatically, realize the Auto-focusing detecting of sample；The same space-time of system
Between imaging, collection of illustrative plates imaging and spectrum test Three models.
Description of the drawings
With reference to the accompanying drawing enclosed, the present invention more purpose, function and advantages are by by the as follows of embodiment of the present invention
Description is illustrated, wherein：
Fig. 1 illustrates confocal laser response curve of the present invention；
Fig. 2 illustrates space autofocusing confocal laser Raman spectroscopic detection method schematic diagram of the present invention；
Fig. 3 illustrates space autofocusing confocal laser Raman spectroscopic detection schematic device of the present invention；
Fig. 4 illustrates 1 schematic diagram of space autofocusing confocal laser Raman spectroscopic detection method and apparatus embodiment of the present invention；
Fig. 5 illustrates 2 schematic diagram of space autofocusing confocal laser Raman spectroscopic detection method and apparatus embodiment of the present invention.
Specific embodiment
By reference to one exemplary embodiment, the purpose of the present invention and function and the side for realizing these purposes and function
Method will be illustrated.However, the present invention is not limited to one exemplary embodiment disclosed below；Can by multi-form come
Which is realized.The essence of description is only to aid in the detail of the various equivalent modifications Integrated Understanding present invention.
Hereinafter, embodiments of the invention will be described with reference to the drawings.In the accompanying drawings, identical reference represents identical
Or similar part, or same or like step.
The present invention is described further with reference to the accompanying drawings and examples.
Fig. 1 is confocal laser response curve of the present invention.
Fig. 2 is space autofocusing confocal laser Raman spectroscopic detection method schematic diagram of the present invention.As shown in Fig. 2 exciting light
Beam system 600 produces exciting light, reflects through dichroic optical system 900, Jing after focusing system 100 of looking in the distance, focuses on tested
On sample 140, and Rayleigh scattering light is inspired on sample and the Raman diffused light of sample spectral characteristic is loaded with, inspired
Raman diffused light and Rayleigh scattering light by systematic collection recovering light path, after focusing system 100 of looking in the distance, Jing dichroic light splitting system
After 900 transmission of system, Raman diffused light and part Rayleigh scattering light transmission, 150 light splitting of the first beam splitting systems of Jing, part Rayleigh scattering
Light is reflected into confocal detection system 170 and carries out position sensing, and Raman diffused light is transmitted into spectrum investigating system 220 to be carried out
Spectrographic detection, according to confocal response curve, data processing module controls focus adjusting mechanism focusing of looking in the distance, and makes exciting light focus on sample
On, make confocal response curve maximum, complete the automatic focusing of excitation beam.
Fig. 3 is space autofocusing confocal laser Raman spectroscopic detection schematic device of the present invention.As shown in figure 3, this device
Including the excitation beam system 600 being sequentially placed along light path, dichroic optical system 900, focusing system 100 of looking in the distance, detected sample
Product 140, positioned at the first beam splitting system 150 of 900 transmission direction of dichroic optical system, transmit positioned at the first beam splitting system 150
The confocal detection system 170 of the spectrum investigating system 220 and reflection direction in direction, also including connection 220 He of spectrum investigating system
The data processing module 340 and computer control system 350 of confocal detection system 170 and telescopic system 100.
Embodiment 1
Fig. 4 is 1 schematic diagram of space autofocusing confocal laser Raman spectroscopic detection method and apparatus embodiment of the present invention.
As shown in figure 4, a kind of space autofocusing confocal laser Raman spectroscopic detection method, specific method of testing include with
Lower step：
Laser instrument 610 in excitation beam system 600 produces exciting light, expands through the diverging of the first minus lenses 620, Jing the
The collimation of one condenser lenss 630 becomes collimated light beam.
Collimated light beam Jing dichroic optical systems 900 reflect, and dissipate Jing after focusing lens 110 of looking in the distance, and Jing looks in the distance collecting lens 130
After focusing, focus on sample 140, and Rayleigh scattering light is inspired on sample and sample spectral characteristic is loaded with
Raman diffused light.
The Raman diffused light and Rayleigh scattering light for inspiring collecting lens 130 of being looked in the distance collects recovering light path, through focusing of looking in the distance
Compression light beam bore after mirror 110, Jing after dichroic optical system 900 is transmitted, Raman diffused light and part Rayleigh scattering light transmission,
150 light splitting of the first beam splitting systems of Jing.
Part Rayleigh scattering light is reflected into confocal detection system 170, and the 4th condenser lenss 200 of Jing are assembled, the second pins of Jing
Hole 190 transmits, and forms Intensity response signal, and be sent to data processing module 340 on the first detector 180, then by
Computer control system 350 is sent to after process, after the process of computer control system 350, control signal is formed and is sent number to
According to processing module 340, data processing module 340 produces focusing control signal controlling focus adjusting mechanism 120 of looking in the distance and is focused, together
When the first detector 180 signal can also track change, form new control circulation, this process continues, until first
There is peak response in detector 180, and focus adjusting mechanism 120 completes the focusing of exciting light, and now Raman diffused light is transmitted into spectrum
Detection system 220 carries out spectrographic detection.
Utilization space autofocusing confocal laser Raman spectroscopic detection device, makes focus adjusting mechanism by confocal detection response curve
120 focusing for completing exciting light, now Raman diffused light be transmitted into spectrum investigating system 220 and carry out spectrographic detection, Raman dissipates
Penetrate light to be assembled into the first spectrogrph 250, Raman diffused light Jing entrance slits 260, plane mirror by the 5th condenser lenss 240
270 and the first concave reflection condenser lenss 280 reflect after reach spectrum grating 300, light beam after 300 diffraction of spectrum grating, quilt
The reflection of second concave reflection condenser lenss 290 focuses on the second detector 230.As grating diffration is acted on, in Raman spectrum not
The light of co-wavelength is separated from each other, go out from spectrogrph shoot out be sample Raman spectrum.
The first detector in measurement process, when carrying out spacescan to sample 140, in confocal detection system 170
180, the intensity response for measuring reaction 140 distance change of sample is that (α, β, l), by gained intensity response I, (α, β l) are passed I
It is sent to data processing module 340 to be processed.
The drawing for being loaded with 140 spectral information of sample that second detector 230 is detected in Raman spectroscopic detection system 220
Graceful scattered light spectral signal is I (λ), and wherein λ is wavelength；
By I (λ), (α, β, l) be sent to computer control system 350 carries out data processing to I, so as to obtain comprising detected sample
14 positional information I of product (α, β, l) three-dimensional measurement information I (α, β, l, λ) with spectral information I (λ).
To sample 140 along α, to scanning, along l to scanning, repeat the above steps measure right focus adjusting mechanism 120 of looking in the distance β
Answer one group of n near the objective focus positions sequence measuring information comprising positional information [α, β, l] and I (λ) [I (λ), α, β,
l]。
Using the corresponding positional informationes [α, β, l] of distinguishable region δ n, the spectral information In (λ) in correspondence δ n regions is found out
Value, further according to the information of the relation with space coordinatess [α, β, l], reconstruct reflection measured object microcell δ n three dimensional structures and spectral characteristic
In (α n, β n, ln, λ n), that is, realize the spectrographic detection and three-dimensional geometry position sensing of microcell δ min.
The three dimension scale and spectral characteristic of the minimum distinguishable region δ min of correspondence is determined by following formula：
Space autofocusing confocal laser Raman spectroscopic detection is realized.
Microcell collection of illustrative plates is imaged
Iσmin(α, β, l)=In(α, β, l) 3D shape imaging
Iσmin(α, β, l)=In(λ) spectral measurement
Figure 4, it is seen that by the maximum point of 170 response curve 210 of confocal detection system, can accurately capture sharp
The focal position of luminous speckle, from measurement sequence data, extracts the excitation spectrum of corresponding focus positions O, that is, realizes microcell
Spectrographic detection and three-dimensional geometry position sensing.
As shown in figure 4, space autofocusing confocal laser Raman spectroscopic detection device is included positioned at dichroic optical system 900
The laser beam system 600 of reflection direction, positioned at the tune of looking in the distance that 900 transmission direction of dichroic optical system is sequentially placed along light path
Burnt mirror 110, look in the distance collecting lens 130 and sample 140, positioned at the first light splitting system of 900 transmission direction of dichroic optical system
System 150, positioned at the Raman spectroscopic detection system 220 of 150 transmission direction of the first beam splitting system, positioned at the first beam splitting system reflection side
To confocal detection system 170, and with confocal detection system 170 and Raman spectroscopic detection system 220 and focus adjusting mechanism 120 of looking in the distance
Connection data processing module 340 and the computer control system 350 being connected by serial ports with data processing module 340.
Wherein, excitation beam generation system 600 is used to produce excitation beam, including the laser instrument being sequentially placed along light path
610th, the first minus lenses 620 and the first condenser lenss 630.
Raman spectroscopic detection system 220 includes the 5th condenser lenss 240 being sequentially placed along light path, positioned at the 5th condenser lenss
First spectrogrph 250 of 240 focal positions and the second detector 230 after the first spectrogrph 250.
Wherein, the first spectrogrph 250 includes entrance slit 260, the plane mirror 270, first being sequentially placed along light path
Concave reflection condenser lenss 280, spectrum grating 300 and the second concave reflection condenser lenss 290.
Confocal detection system 170 includes the 4th condenser lenss 200, positioned at the second pin hole of 200 focal position of the 4th condenser lenss
190 and first detector 180.
Data processing module 340 and computer control system 350, the data collected for fusion treatment simultaneously produce control
Signal.
Embodiment 2
Fig. 5 is 2 schematic diagram of space autofocusing confocal laser Raman spectroscopic detection method and apparatus embodiment of the present invention.This reality
Apply example and be compared to the difference of embodiment 1 and be：As shown in figure 5, excitation beam system 600 is placed in dichroic optical system
900 transmission direction, focusing system 100 of looking in the distance are placed in the transmission direction of dichroic optical system 900, the first beam splitting system 150
It is placed at the reflection direction of dichroic optical system 900.
The specific embodiment of the present invention is described above in association with accompanying drawing, but these explanations can not be understood to limit
The scope of the present invention, protection scope of the present invention is limited by appended claims, any in the claims in the present invention base
The change carried out on plinth is all protection scope of the present invention.
Claims (9)
1. a kind of space autofocusing confocal laser Raman spectroscopic detection method, the method comprise the steps:
1) exciting light is produced by laser beam system, after dichroic optical system and telescopic system, is radiated at detected sample
On product, and inspire Rayleigh scattering light and be loaded with the Raman diffused light of sample spectra characteristic；
2) by focus adjusting mechanism, make the response of confocal detection system maximum, complete excitation beam and be autofocusing on sample, while
Obtain the positional information [α, β, l] of sample；
3) Rayleigh scattering light and Raman diffused light in correspondence sample region is made to again pass by telescopic system, and by telescopic system
It is shaped to directional light and is transmitted through dichroic optical system, Jing dichroic optical systems is carried out to Rayleigh scattering light and Raman diffused light
Separate；
4) part Rayleigh scattering light is transmitted by dichroic optical system, and the first beam splitting systems of Jing are reflected into confocal detection system,
Using the first detector in confocal detection system, intensity response I [α, β, l] of reflection sample position information is measured, will be excited
Light beam is focused on sample；
5) Raman diffused light Jing dichroic optical systems transmission, the first beam splitting systems of Jing are transmitted into Raman spectroscopic detection system,
The Raman scattering signal I (λ) for being loaded with sample characteristic is measured using Raman spectroscopic detection system, wherein λ is wavelength；
6) I (λ) is sent to data processing module carries out data processing, so as to obtain comprising sample corresponding region position
Spectral information I (λ) and object location information [α, β, l]；
7) rotation detection system, is carried out to space along α, and β scanning directions, telescopic system carry out focusing along l scanning directions, in repetition
State the one group of n sequence measuring information [I comprising positional information [α, β, l] and I (λ) that step measures correspondence objective focus positions
(λ), α, β, l]；
8) spectral information In (λ) value in correspondence δ n regions using the corresponding positional informationes [α, β, l] of distinguishable region δ n, is found out,
Further according to information In of the relation with space coordinatess [α, β, l], reconstruct reflection measured object microcell δ n three dimensional structures and spectral characteristic
(α n, β n, ln, λ n)；
9) three dimension scale and spectral characteristic of the minimum distinguishable region δ min of correspondence is determined by following formula：。
2. space autofocusing confocal laser Raman spectroscopic detection method according to claim 1, it is characterised in that confocal song
Correspondence telescopic system focus O position at line maximum M, focused spot size is minimum herein, and the region of detection is minimum, confocal curves
The out of focus region of other positions correspondence telescopic system, the focused spot size before Jiao or in defocused region is with defocusing amount increase
Increase.
3. space autofocusing confocal laser Raman spectroscopic detection method according to claim 1, it is characterised in that exciting light
Beam can be polarized beam：Linear polarization, circular polarization or radial polarisation light, can also be the structure light generated by pupil filtering technology
Beam.
4. a kind of space autofocusing confocal laser Raman spectroscopic detection device, including excitation beam system, focusing system of looking in the distance, two
To color beam splitting system, the first beam splitting system, Raman spectroscopic detection system, confocal detection system and data processing module；Wherein, swash
Luminous beam system and focusing system of looking in the distance are placed sequentially in the reflection direction of dichroic optical system along light path；First beam splitting system
In the transmission direction of dichroic optical system；Raman spectroscopic detection system is located at the transmission direction of the first beam splitting system；It is confocal
Detection system is located at the reflection direction of the first beam splitting system；Data processing module and Raman spectroscopic detection system and confocal detection system
System and focusing system connection of looking in the distance.
5. space autofocusing confocal laser Raman spectroscopic detection device according to claim 4, it is characterised in that exciting light
Beam system can also include light polarization modulator and iris filter.
6. space autofocusing confocal laser Raman spectroscopic detection device according to claim 5, it is characterised in that for pressing
Contracting excites the iris filter of hot spot to may be located between Polarization Controller and dichroic optical system, may be located on dichroic
Between beam splitting system and telescopic system.
7. space autofocusing confocal laser Raman spectroscopic detection device according to claim 4, it is characterised in that exciting light
Beam system can also be placed on the transmission direction of dichroic optical system, and telescopic system is placed on the transmission side of dichroic optical system
To the first beam splitting system is placed on the reflection direction of dichroic optical system one.
8. space autofocusing confocal laser Raman spectroscopic detection device according to claim 4, it is characterised in that Raman light
Spectrum detection system can be normal Raman spectroscopy detection system, including the 5th condenser lenss being sequentially placed along light path, positioned at the 5th
First spectrogrph of condenser lenss focal position and the second detector after the first spectrogrph；Can also be confocal Raman spectra
Detection system, including the 7th condenser lenss being sequentially placed along light path, positioned at the 3rd pin hole of the 7th condenser lenss focal position, is located at
The 8th condenser lenss after 3rd pin hole, positioned at the second spectrogrph of the 8th condenser lenss focal position and after the second spectrogrph
3rd detector.
9. space autofocusing confocal laser Raman spectroscopic detection device according to claim 4, it is characterised in that at data
Reason module includes confocal data processing module and data fusion module, also including data control block.
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| CN109060761A (en) * | 2018-07-03 | 2018-12-21 | 上海理工大学 | High-speed Raman spectrum scanning imaging method and device with three-dimensional high spatial resolution |
| CN109765213A (en) * | 2019-03-27 | 2019-05-17 | 威朋（苏州）医疗器械有限公司 | Coherent anti-stokes raman scattering microscope imaging device |
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| CN112683795A (en) * | 2020-12-11 | 2021-04-20 | 北京华泰诺安探测技术有限公司 | Automatic focusing system and Raman detection system and method |
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| CN107991286B (en) * | 2017-12-26 | 2024-02-27 | 同方威视技术股份有限公司 | Raman spectrum detection equipment and method based on reflected light power |
| CN109060761B (en) * | 2018-07-03 | 2021-01-22 | 上海理工大学 | High-speed Raman spectrum scanning imaging method and device with three-dimensional high spatial resolution |
| CN109060761A (en) * | 2018-07-03 | 2018-12-21 | 上海理工大学 | High-speed Raman spectrum scanning imaging method and device with three-dimensional high spatial resolution |
| CN109765213A (en) * | 2019-03-27 | 2019-05-17 | 威朋（苏州）医疗器械有限公司 | Coherent anti-stokes raman scattering microscope imaging device |
| CN109765213B (en) * | 2019-03-27 | 2024-03-29 | 苏州威邦震电光电技术有限公司 | Coherent anti-stokes raman scattering microscope imaging device |
| CN111076813A (en) * | 2019-12-31 | 2020-04-28 | 中国科学院西安光学精密机械研究所 | Method and device for installing and adjusting vacuum ultraviolet light machine system |
| CN111239047B (en) * | 2020-03-09 | 2023-10-27 | 深圳中科飞测科技股份有限公司 | Optical device and method for realizing automatic focusing |
| CN111239047A (en) * | 2020-03-09 | 2020-06-05 | 深圳中科飞测科技有限公司 | Optical equipment and method for realizing automatic focusing |
| CN112444512A (en) * | 2020-11-12 | 2021-03-05 | 山东大学 | Miniaturized laser Raman spectrum acquisition device and method |
| CN112444512B (en) * | 2020-11-12 | 2022-04-12 | 山东大学 | Miniaturized laser Raman spectrum acquisition device and method |
| CN112683795A (en) * | 2020-12-11 | 2021-04-20 | 北京华泰诺安探测技术有限公司 | Automatic focusing system and Raman detection system and method |
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