CN105890753A - Automatic focusing system for Raman spectrometer - Google Patents

Automatic focusing system for Raman spectrometer Download PDF

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Publication number
CN105890753A
CN105890753A CN201610250266.0A CN201610250266A CN105890753A CN 105890753 A CN105890753 A CN 105890753A CN 201610250266 A CN201610250266 A CN 201610250266A CN 105890753 A CN105890753 A CN 105890753A
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China
Prior art keywords
focusing
low pass
object lens
sample
controller
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CN201610250266.0A
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Chinese (zh)
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CN105890753B (en
Inventor
薛文东
郑文楷
陈劲夫
王磊
洪永强
田中群
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Xiamen University
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Xiamen University
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01JMEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02Details
    • G01J3/0205Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0208Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using focussing or collimating elements, e.g. lenses or mirrors; performing aberration correction
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/01Arrangements or apparatus for facilitating the optical investigation

Abstract

The invention provides an automatic focusing system for a Raman spectrometer, and relates to a laser Raman spectrometer. The automatic focusing system for a Raman spectrometer is provided with a total reflective mirror, a low pass spectroscope, an object lens, a focusing camera, a controller and a focusing execution mechanism, wherein a green light beam of a green light LED penetrates through the total reflective mirror and then is reflected through the low pass spectroscope; the reflected light of the low pass spectroscope penetrates through the object lens and then irradiates to a sample; the reflected light of the sample penetrates through the object lens and then is reflected by the low pass spectroscope; the reflected light of the low pass spectroscope is reflected to the focusing camera through the total reflective mirror, and then is imaged on the focusing camera; the sample images are collected by the focusing camera, and then are transmitted to the controller; a control signal output end of the controller is connected with the focusing execution mechanism; a drive signal of the focusing execution mechanism controls the object lens to move until focusing is finished completely; the focusing characteristic images of the sample are specifically collected through the low pass spectroscope and a visual camera; the focusing state is analyzed through an image processing algorithm; and the lens focal length adjusting mechanism is controlled to perform automatic quick focusing.

Description

Raman spectrometer autofocus system
Technical field
The present invention relates to laser Raman spectrometer, especially relate to a kind of Raman spectrometer autofocus system.
Background technology
Laser Raman spectrometer is applied to detect various Matter Composition, is a kind of Dynamic Non-Destruction Measurement, has test sample noncontact Property, non-destructive, required amount of samples are few, the time is short in detection, sample without features such as prior preparations, be therefore widely used in The fields such as medicine, archaeology of cultural relic, Gemstone Identification, food safety and criminal investigation.But the Raman spectrum produced due to institute's test sample product The faintest, only about the 10 of laser excitation main line light-10~10-6, accordingly, it would be desirable to Raman spectrometer is accurately focused On sample, as much as possible improve the collection efficiency of Raman light intensity.
Current focusing mode be substantially hand-held sample or by mechanical mechanism manually regulate object lens and sample interval from, naked eyes are sentenced Laser facula size on disconnected sample, focusing judge the most accurately to be gathered image by CCD in spectrogrph after further according to obtaining Raman spectrum carries out artificial judgment, and it is inefficient, if focus effects is undesirable, then needs repeatedly to adjust object lens, can waste big The amount time, thus need a kind of the most quickly focusing method.
The open a kind of laser Raman spectrometer solid of Chinese patent CN204374086U and fluid sample focusing micromotion platform device, The open phasmon of Chinese patent CN103743721B strengthens Raman spectrum dynamic detection system.
Summary of the invention
It is an object of the invention to provide a kind of Raman spectrometer autofocus system.
The present invention is provided with total reflective mirror, low pass spectroscope, object lens, focusing camera head, controller and focusing actuator;
The green beam of green light LED is through total reflective mirror through low pass dichroic mirror, and low pass spectroscopical reflection light impinges upon through object lens On sample, the reflection light of sample is through object lens by low pass dichroic mirror, and it is right that low pass spectroscopical reflection light reflexes to through total reflective mirror Burnt photographic head, imaging on focusing camera head, focusing camera head gathers sample image and passes to controller, the control signal of controller Output termination focusing actuator, the driving signal of focusing actuator controls object lens and moves, until completing focusing.
The present invention gathers the focus feature image of sample specially by low pass spectroscope and vision camera, then passes through image procossing Algorithm Analysis focal length state, and control lens focus guiding mechanism, carry out automatic rapid focus.Due to Raman spectrometer and vision The public same set of object lens of harvester, so actually also achieving the automatic rapid focus of Raman spectrometer, thus improve Raman The collection efficiency of light intensity.
The present invention increases by a low pass spectroscope between LASER Light Source and lens, is provided above total reflective mirror and light filling at low pass spectroscope LED, total reflective mirror reflection direction arranges a focusing photographic head.Low pass spectroscope can reflect supplementary lighting sources by raman laser, mends Light LED light path passes total reflective mirror, through low pass dichroic mirror, impinges upon on sample through object lens, and the image light path of reflection passes thing Mirror, by low pass dichroic mirror, then arrives focusing camera head, imaging on focusing camera head through total reflective mirror reflection.Focusing camera Head picking rate is fast, and image that controller is passed back by image recognition algorithm identification focusing camera head also judges focus the most accurately, Control object lens accordingly to seesaw regulation focus, it is achieved rapid focus automatically.The laser of Raman spectrometer passes low pass spectroscope Arriving sample with object lens, Raman signal is through object lens, owing to wavelength is longer, it is possible to through the most undamped arrival of low pass spectroscope Raman spectrometer.
Accompanying drawing explanation
Fig. 1 is the structure composition schematic diagram of the embodiment of the present invention.
Detailed description of the invention
Following example will the present invention is further illustrated in conjunction with accompanying drawing.
Seeing Fig. 1, the embodiment of the present invention is provided with total reflective mirror 1, low pass spectroscope 2, object lens 3, focusing camera head 4, controller 5 With focusing actuator 6;The green beam G of green light LED reflects through total reflective mirror 1 through low pass spectroscope 2, low pass spectroscope 2 Reflection light impinge upon on sample A through object lens 3, the reflection light of sample A is reflected through object lens 3 by low pass spectroscope 2, low pass The reflection light of spectroscope 2 reflexes to focusing camera head 4 through total reflective mirror 1, imaging on focusing camera head 4, focusing camera head 4 Gather sample image and pass to controller 5, the control signal output termination focusing actuator 6 of controller 5, actuator 6 of focusing Driving signal control object lens 3 move, until complete focusing.In FIG, labelling P represents Raman spectrometer.
Specific embodiment given below:
Assuming that Raman spectrometer optical maser wavelength used is 785nm, design light filling LED is that (green wavelength is less than spectrogrph to green glow Raman laser 785nm), the separable green glow of low pass spectroscope and raman laser, green glow is fully reflective.Controller comprise CPU with Motion control core, CPU runs embedded OS, performs image recognition algorithm, it is judged that focusing state is the most accurate.Right Burnt actuator includes motor, motor-drive circuit, controls object lens and moves.
Before spectrometer collection, lighting green light LED, green glow light path passes total reflective mirror, through low pass dichroic mirror, shines through object lens On sample, the image light path of sample reflection is through object lens, by low pass dichroic mirror, then takes the photograph through total reflective mirror reflection arrival focusing As head, imaging on focusing camera head, focusing camera head gathers sample image and passes to controller.Controller is calculated by respective image Method judges when front focal length is the most correct.If incorrect, controller is moved by focusing actuating mechanism controls object lens, the most open close mistake Focusing camera head judges current focal length state and adjusts object lens, until completing focusing.After having focused, close green glow, start to adopt Collection Raman spectrum.

Claims (1)

1. Raman spectrometer autofocus system, it is characterised in that be provided with total reflective mirror, low pass spectroscope, object lens, focusing camera head, Controller and focusing actuator;
The green beam of green light LED is through total reflective mirror through low pass dichroic mirror, and low pass spectroscopical reflection light impinges upon through object lens On sample, the reflection light of sample is through object lens by low pass dichroic mirror, and it is right that low pass spectroscopical reflection light reflexes to through total reflective mirror Burnt photographic head, imaging on focusing camera head, focusing camera head gathers sample image and passes to controller, the control signal of controller Output termination focusing actuator, the driving signal of focusing actuator controls object lens and moves, until completing focusing.
CN201610250266.0A 2016-04-21 2016-04-21 Raman spectrometer autofocus system Active CN105890753B (en)

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Application Number Priority Date Filing Date Title
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CN105890753B CN105890753B (en) 2017-12-01

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Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106383105A (en) * 2016-08-29 2017-02-08 上海交通大学 Raman spectrum measuring device and method capable of automatically adjusting distance between device and measured sample
CN106546334A (en) * 2016-11-03 2017-03-29 北京信息科技大学 Space autofocusing confocal laser Raman spectroscopic detection method and apparatus
CN106645082A (en) * 2016-11-03 2017-05-10 北京信息科技大学 Gating optical fiber Raman spectrometer based on laser ranging automatic focusing
CN113984204A (en) * 2021-10-27 2022-01-28 北京华泰诺安探测技术有限公司 Raman spectrometer accessory and Raman spectrometer
US11874526B2 (en) 2020-11-02 2024-01-16 Industrial Technology Research Institute Textile detection module, textile sorting system and using method thereof

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1969215A (en) * 2004-06-17 2007-05-23 皇家飞利浦电子股份有限公司 Autofocus mechanism for spectroscopic system
JP2007173526A (en) * 2005-12-22 2007-07-05 Meiji Univ Silicon wafer surface strain distribution measuring device
CN202126529U (en) * 2011-03-07 2012-01-25 广东工业大学 Laser type auto-focusing device
CN103743718A (en) * 2013-12-11 2014-04-23 中国科学院西安光学精密机械研究所 Laser spectrum analyzer combining confocal micro-Raman spectrometer with laser-induced breakdown spectrometer
CN104316506A (en) * 2014-10-14 2015-01-28 上海交通大学 Raman probe and Raman signal detection system and method capable of focusing automatically
CN104678716A (en) * 2015-02-09 2015-06-03 中国科学院半导体研究所 Laser direct writing photolithographic system combined with single quantum dot locating function and method thereof

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN1969215A (en) * 2004-06-17 2007-05-23 皇家飞利浦电子股份有限公司 Autofocus mechanism for spectroscopic system
JP2007173526A (en) * 2005-12-22 2007-07-05 Meiji Univ Silicon wafer surface strain distribution measuring device
CN202126529U (en) * 2011-03-07 2012-01-25 广东工业大学 Laser type auto-focusing device
CN103743718A (en) * 2013-12-11 2014-04-23 中国科学院西安光学精密机械研究所 Laser spectrum analyzer combining confocal micro-Raman spectrometer with laser-induced breakdown spectrometer
CN104316506A (en) * 2014-10-14 2015-01-28 上海交通大学 Raman probe and Raman signal detection system and method capable of focusing automatically
CN104678716A (en) * 2015-02-09 2015-06-03 中国科学院半导体研究所 Laser direct writing photolithographic system combined with single quantum dot locating function and method thereof

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN106383105A (en) * 2016-08-29 2017-02-08 上海交通大学 Raman spectrum measuring device and method capable of automatically adjusting distance between device and measured sample
CN106546334A (en) * 2016-11-03 2017-03-29 北京信息科技大学 Space autofocusing confocal laser Raman spectroscopic detection method and apparatus
CN106645082A (en) * 2016-11-03 2017-05-10 北京信息科技大学 Gating optical fiber Raman spectrometer based on laser ranging automatic focusing
US11874526B2 (en) 2020-11-02 2024-01-16 Industrial Technology Research Institute Textile detection module, textile sorting system and using method thereof
CN113984204A (en) * 2021-10-27 2022-01-28 北京华泰诺安探测技术有限公司 Raman spectrometer accessory and Raman spectrometer
CN113984204B (en) * 2021-10-27 2023-01-24 北京华泰诺安探测技术有限公司 Raman spectrometer accessory and Raman spectrometer

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