CN214586205U - Liquid microscopic optical system - Google Patents
Liquid microscopic optical system Download PDFInfo
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- CN214586205U CN214586205U CN202120497773.0U CN202120497773U CN214586205U CN 214586205 U CN214586205 U CN 214586205U CN 202120497773 U CN202120497773 U CN 202120497773U CN 214586205 U CN214586205 U CN 214586205U
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Abstract
The utility model relates to a liquid microscopic optical system, include: the light-emitting component comprises a first light source and a grating, the first light source forms a light beam carrying grating pattern information through the grating, and the light beam carrying the grating pattern information is irradiated on an object to be detected to obtain a first reflected light beam; the microscopic amplification assembly is arranged on one side of the object to be detected to amplify the first reflected light beam to obtain a light beam to be detected; the first light splitting and adjusting component modulates the light beam to be detected to obtain a first light splitting beam to be detected and a second light splitting beam to be detected, which have different optical distances; the first sensor is used for acquiring imaging information of the first to-be-detected split beam and the second to-be-detected split beam; and the focusing assembly comprises a liquid lens, and the diopter of the liquid lens is adjusted according to the imaging information acquired by the first sensor so as to realize the focusing of the micro-optical system. The device eliminates abrasion caused by mechanical motion, and has the advantages of low noise, good stability and high response speed.
Description
Technical Field
The utility model belongs to the technical field of the optics technique and specifically relates to indicate a liquid microscopic optical system.
Background
The microscope usually has two modes of manual focusing and automatic focusing, the manual focusing mode has the defect of long focusing time, and needs to artificially and subjectively judge whether the focusing is clear, and different people have different subjective judgments, which reduces the focusing accuracy. The existing automatic focusing technology is that a motor drives a zoom lens group to move axially to perform mechanical zooming, the focusing mode does not need manual operation, the focusing is fully automatic, the focusing accuracy is improved, but the mechanical reciprocating motion can cause abrasion, the motor-driven focusing speed is slow, motor noise can be introduced, the whole mechanism is complex, the occupied space is large, and the automatic focusing technology is not suitable for a miniaturized microscopic imaging system.
SUMMERY OF THE UTILITY MODEL
Therefore, the utility model discloses the technical problem that will solve lies in overcoming the problem that mechanical focusing is slow and introduce motor noise among the prior art, changes the focus through liquid lens, and this has just also eliminated because of the wearing and tearing that mechanical motion brought, and small in noise, stability is good, and response speed is fast.
In order to solve the above technical problem, the utility model provides a liquid microscopic optical system, include:
the light-emitting component comprises a first light source and a grating, the first light source forms a light beam carrying grating pattern information through the grating, and the light beam carrying the grating pattern information is irradiated on an object to be detected to obtain a first reflected light beam;
the microscopic amplification assembly is arranged on one side of the object to be detected to amplify the first reflected light beam to obtain a light beam to be detected;
the first light splitting adjusting component modulates the light beam to be detected to obtain a first light splitting beam to be detected and a second light splitting beam to be detected, which have different optical distances;
the first sensor is used for acquiring imaging information of the first to-be-detected split beam and the second to-be-detected split beam;
and the focusing assembly is connected with the first sensor and comprises a liquid lens, and the diopter of the liquid lens is adjusted according to the imaging information acquired by the first sensor so as to realize the focusing of the microscopic optical system.
Preferably, the first light source is an infrared point light source.
Preferably, the device also comprises a lighting assembly and a second sensor;
the lighting assembly comprises a second light source, and light beams emitted by the second light source irradiate on an object to be detected to obtain second reflected light;
the second sensor acquires imaging information of the second reflected light.
Preferably, the second light source is a white light point light source.
Preferably, the sensor further comprises a first filter element, the first filter element is located at the front end of the first sensor, and the first filter element is a white light filter.
Preferably, the optical fiber sensor further comprises a second filter element, the second filter element is located at the front end of the second sensor, and the second filter element is an infrared filter.
Preferably, the second sensor is an area array sensor.
Preferably, the micro-magnification assembly comprises an eyepiece and an objective lens, and the liquid lens is located between the objective lens and the eyepiece.
Preferably, the first beam splitting adjusting component comprises a first beam splitter and a first reflector, the light beam to be measured passes through the first beam splitter to be split into a first beam to be measured and a second beam to be measured, the second beam to be measured passes through the first reflector to be reflected so as to form an image at the first position point of the first sensor, and the first beam to be measured is in the image at the second position point of the first sensor.
Preferably, the first sensor is a line sensor.
Compared with the prior art, the technical scheme of the utility model have following advantage:
1. the utility model discloses an introduce liquid lens, change liquid lens's diopter, and liquid lens's diopter response time is at the millisecond level, has improved automatic focusing optical system's the speed of focusing greatly, and whole optical system does not have mechanical motion at the in-process of focusing, is through liquid lens change focus, and this has just also eliminated because of the wearing and tearing that mechanical motion brought.
2. The utility model discloses small, compact structure, small in noise, stability is good.
Drawings
In order to make the content of the present invention more clearly understood, the present invention will be described in further detail with reference to the following embodiments of the present invention, in conjunction with the accompanying drawings.
Fig. 1 is a light path diagram of the present invention.
The specification reference numbers indicate: 10. a first light source; 11. a grating; 20. an objective lens; 21. a liquid lens; 22. an eyepiece; 30. a first beam splitter; 31. a first reflector; 32. a first sensor; 33. a first filter element; 40. a second light source; 41. a second sensor; 42. a second filter element; 50. a second reflector; 51. a second spectroscope; 52. a third beam splitter; 53. a fourth spectroscope; 60. an object to be measured.
Detailed Description
The present invention is further described with reference to the following drawings and specific embodiments so that those skilled in the art can better understand the present invention and can implement the present invention, but the embodiments are not to be construed as limiting the present invention.
Referring to fig. 1, the utility model discloses a liquid microscopic optical system, including light emitting component, micro-amplification subassembly, first beam split adjusting part, first sensor 32 and focusing subassembly.
The light emitting assembly includes a first light source 10 and a grating 11, the first light source 10 forms a light beam carrying grating pattern information through the grating 11, and the light beam carrying the grating pattern information is irradiated on the object 60 to be measured to obtain a first reflected light beam. The microscopic magnifying assembly is disposed at one side of the object to be measured 60 to magnify the first reflected light beam to obtain a light beam to be measured. The first light splitting adjusting component modulates the light beam to be detected to obtain a first light splitting beam to be detected and a second light splitting beam to be detected, wherein the light splitting beams are different in optical path. The first sensor 32 collects imaging information of the first and second partial light beams to be measured.
The focusing assembly is connected with the first sensor 32, the focusing assembly comprises a liquid lens 21, and diopter of the liquid lens 21 is adjusted according to the imaging information collected by the first sensor 32 so as to realize focusing of the microscopic optical system.
The utility model discloses a theory of operation is: the light emitting assembly is matched with the grating 11 through the first light source 10 to form a light beam carrying grating pattern information, the light beam carrying grating pattern information irradiates on an object to be measured 60 and is reflected to obtain a first reflected light beam, the first reflected light beam passes through the microscopic amplifying assembly and the first light splitting adjusting assembly to obtain a first light splitting beam to be measured and a second light splitting beam to be measured, the first light splitting beam and the second light splitting beam to be measured are different in optical length, the first light splitting beam and the second light splitting beam to be measured are imaged on the first sensor 32, the diopter of the liquid lens 21 is adjusted according to imaging information collected by the first sensor 32 to achieve focusing of the micro optical system, and when the contrast of imaging of the first light splitting beam to be measured and the second light splitting beam to be measured, which is collected clearly, on the focal plane of the optical system of the object to be measured 60 is determined when the contrast of the imaging of the first light splitting beam to be measured and the second light splitting beam to be measured is 0. When the contrast of the imaging of the first to-be-measured split beam and the second to-be-measured split beam collected by the first sensor 32 is different, it is indicated that the object 60 to be measured is not in the focal plane, the defocus amount and the defocus direction are obtained by comparing the difference of the contrast values, and then the diopter of the liquid lens 21 is changed until the contrast of the imaging of the first to-be-measured split beam and the imaging of the second to-be-measured split beam collected by the first sensor 32 is 0.
The utility model discloses an use liquid lens 21, change liquid lens 21's diopter, and liquid lens 21's diopter response time is at the millisecond level, has improved automatic focusing optical system's focusing speed greatly, and whole optical system does not have mechanical motion at the in-process of focusing, is through liquid lens 21 change focus, and this has just also eliminated because of the wearing and tearing that mechanical motion brought.
The utility model discloses in, the imaging data that first sensor 32 gathered is acquireed to the accessible computer to carry out the diopter to liquid lens 21 and adjust, thereby realize auto focus. The liquid lens 21 is a lens that changes the focal length by changing the curvature of the liquid using the liquid as a lens. The more mature liquid lenses are variable focus optical lenses that utilize the principle of electrowetting on dielectric (EWOD). It can change the shape of the drop by an applied voltage, and thus its focal length.
In an embodiment, the first light source 10 may be an infrared point light source, the infrared point light source emits infrared light, and the infrared light is invisible light, and is in a different band from the visible light, and the infrared light is used to focus the optical system, so that the accuracy is high.
The utility model discloses still including polishing subassembly and second sensor 41. The polishing assembly can polish the object 60 to be measured, thereby improving the imaging quality. The lighting assembly includes a second light source 40, and a light beam emitted by the second light source 40 irradiates on the object 60 to be measured to obtain a second reflected light. The second sensor 41 acquires imaging information of the second reflected light. The second sensor 41 can monitor the lighting intensity of the second light source 40 in real time, thereby facilitating the adjustment of the lighting intensity of the second light source 40. The second light source 40 is a white light point light source, and the white light point light source can emit white light, so that the imaging effect of the object 60 to be measured can be improved conveniently in a visible light wave band. The first light source 10 uses a red light point light source, so that the first light source 10 and the second light source 40 are in two completely different wave bands, thereby realizing high-precision focusing.
The utility model discloses still include first filter element 33, first filter element 33 is located the front end of first sensor 32, and first filter element 33 is white light filter. By providing a white light filter, white light can be filtered out, so that infrared light reflected from the object 60 to be measured is imaged on the first sensor 32. The utility model discloses still include second filter element 42, second filter element 42 is located the front end of second sensor 41, and second filter element 42 is infrared filter. By providing the infrared filter, infrared light can be filtered, so that the infrared light reflected from the object 60 to be measured is imaged on the second sensor 41. By combining the first filter element 33 and the second filter element 42, in combination with the type selection of the first light source 10 and the second light source 40, on the one hand, the imaging effect is improved, and on the other hand, the focusing accuracy can be improved.
The second sensor 41 is an area array sensor. By using the area array sensor, the white light reflected by the object 60 to be measured can be better collected. The second sensor 41 may be a CCD or a CMOS. The second sensor 41 collects light intensity information to facilitate adjustment of the imaging brightness of the object 60 to be measured.
The microscopic magnification assembly comprises an eyepiece 22 and an objective lens 20, and a liquid lens 21 is positioned between the objective lens 20 and the eyepiece 22. By adjusting the diopter of the liquid lens 21, the focusing of the entire optical system can be performed. For the existing microscopic imaging system, a magnified virtual image of an object can be formed through the matching of the objective lens 20 and the ocular lens 22, and the focal length of the whole optical system can be adjusted through introducing the liquid lens 21 between the objective lens 20 and the ocular lens 22.
The first light splitting adjusting assembly comprises a first light splitting mirror 30 and a first reflecting mirror 31, the light beam to be measured is split into a first light splitting beam to be measured and a second light splitting beam to be measured through the first light splitting mirror 30, the second light splitting beam to be measured is reflected through the first reflecting mirror 31 to be imaged at a first position point of a first sensor 32, and the first light splitting beam to be measured is imaged at a second position point of the first sensor 32. Due to the arrangement of the first beam splitter 30 and the first reflector 31, the optical path of the second to-be-measured light beam is longer than that of the first to-be-measured light beam, the first to-be-measured split light beam and the second to-be-measured split light beam with different optical paths form images at different positions of the first sensor 32, the first to-be-measured split light beam forms an image at the point a, and the second to-be-measured split light beam forms an image at the point B. When the contrast of the two images AB is different, the object 60 to be measured is not on the focal plane, the defocusing amount and the defocusing direction are obtained by comparing the contrast difference, then the information is fed back to the computer, and the computer adjusts the diopter of the liquid lens 21, so that the focal length of the whole optical system is changed, and the rapid focusing is realized. When the difference between the image contrast values at the two locations AB is 0, it indicates that the object 60 to be measured is on the focal plane, i.e. the focus is clear. The utility model discloses in, first sensor 32 can be linear array sensor. The linear sensor is convenient for acquiring AB two-point imaging. The first sensor 32 may be a CCD or CMOS.
In order to make the structure of the optical imaging system of the present invention more compact, the present invention further comprises a second reflecting mirror 50, a second beam splitter 51, a fourth beam splitter 53 and a fourth beam splitter 53. The first light source 10 is an infrared point light source, emits infrared light to irradiate the grating 11, obtains a light beam carrying grating pattern information, is reflected by the second reflecting mirror 50, is incident to the fourth splitting mirror 53 through the second splitting mirror 51, the fourth splitting mirror 53 reflects half of the light downward to the objective lens 20, and the light passes through the objective lens 20 and then irradiates the surface of the object 60 to be measured. The light is reflected by the object 60 to be measured, the reflected light beam passes through the objective lens 20 and the fourth beam splitter 53 in sequence, the infrared light is incident on the liquid lens 21, the liquid lens 21 is connected to a computer through a driver, the light passes through the eyepiece 22 after passing through the liquid lens 21, half of the light is reflected by the fourth light splitter 53 to the first filter element 33, half of the light is projected to the second filter element 42, the first filter element 33 is a white light filter, the second filter element 42 is an infrared filter, the infrared light is blocked by the second filter element 42 and cannot be projected to the second sensor 41, the infrared light can pass through the first filter element 33, after passing through the first filter element 33, half of the light directly passes through the first beam splitter 30 and irradiates on a of the first sensor 32, and the other half of the light is reflected by the first beam splitter 30 and the first reflector 31 and irradiates on B of the first sensor 32.
The second light source 40 is a white light point light source, the emitted white light is reflected by the second beam splitter 51 and the fourth beam splitter 53, and then irradiates the object 60 to be measured through the objective lens 20, at this time, the object 60 to be measured is illuminated by the second light source 40, the reflected light sequentially passes through the objective lens 20, the fourth beam splitter 53, the liquid lens 21, the eyepiece 22 and the fourth beam splitter 53, the white light is reflected and transmitted at the fourth beam splitter 53, the reflected light is blocked by the first filtering element 33, and the transmitted light can pass through the second filtering element 42 and is imaged on the second sensor 41. The auto-focus process is performed by analyzing the contrast of the images at AB of the first sensor 32. The computer processes the imaging data of the two points AB, when the image contrast of the two points AB is different, the object 60 to be measured is not in the focal plane, the defocusing amount and the defocusing direction are obtained by comparing the contrast difference, then the information is fed back to the controller, and the controller adjusts the diopter of the liquid lens 21, so that the focal length of the whole optical system is changed, and the rapid focusing is realized. When the difference between the image contrast values at the two locations AB is 0, it indicates that the object 60 to be measured is on the focal plane, i.e. the focus is clear.
The utility model has the advantages that: the utility model discloses utilize liquid lens 21 to realize optical system's the process of zooming, liquid lens 21's diopter response time is at the millisecond level, has improved automatic focusing optical system's focusing speed greatly, and whole optical system does not have mechanical motion at the in-process of focusing, changes the focus through liquid lens 21, and this has just also eliminated because of the wearing and tearing that mechanical motion brought, applicable in fields such as semiconductor detection and medical science.
It should be understood that the above examples are only for clarity of illustration and are not intended to limit the embodiments. Other variations and modifications will be apparent to persons skilled in the art in light of the above description. And are neither required nor exhaustive of all embodiments. And obvious variations or modifications can be made without departing from the scope of the invention.
Claims (10)
1. A liquid microscope optical system, comprising:
the light-emitting component comprises a first light source and a grating, the first light source forms a light beam carrying grating pattern information through the grating, and the light beam carrying the grating pattern information is irradiated on an object to be detected to obtain a first reflected light beam;
the microscopic amplification assembly is arranged on one side of the object to be detected to amplify the first reflected light beam to obtain a light beam to be detected;
the first light splitting adjusting component modulates the light beam to be detected to obtain a first light splitting beam to be detected and a second light splitting beam to be detected, which have different optical distances;
the first sensor is used for acquiring imaging information of the first to-be-detected split beam and the second to-be-detected split beam;
and the focusing assembly is connected with the first sensor and comprises a liquid lens, and the diopter of the liquid lens is adjusted according to the imaging information acquired by the first sensor so as to realize the focusing of the microscopic optical system.
2. The liquid microscope optical system of claim 1, wherein the first light source is an infrared point source.
3. The liquid microscope optical system of claim 2, further comprising a polishing assembly and a second sensor;
the lighting assembly comprises a second light source, and light beams emitted by the second light source irradiate on an object to be detected to obtain second reflected light;
the second sensor acquires imaging information of the second reflected light.
4. The liquid microscope optical system of claim 3, wherein the second light source is a white light point source.
5. The liquid microscope optical system according to claim 4, further comprising a first filter element located at a front end of the first sensor, the first filter element being a white light filter.
6. The liquid microscope optical system according to claim 4, further comprising a second filter element located at a front end of the second sensor, the second filter element being an infrared filter.
7. The liquid microscope optical system of claim 3, wherein the second sensor is an area array sensor.
8. The liquid microscope optical system of claim 1, wherein the micro-magnification assembly includes an eyepiece and an objective lens, the liquid lens being positioned between the objective lens and the eyepiece.
9. The liquid microscope system as claimed in claim 1, wherein the first beam splitter adjustment assembly includes a first beam splitter and a first mirror, the beam to be measured is split into a first beam to be measured and a second beam to be measured, the second beam to be measured is reflected by the first mirror to be imaged at a first position of a first sensor, and the first beam to be measured is imaged at a second position of the first sensor.
10. The liquid microscope optical system of claim 1, wherein the first sensor is a line sensor.
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| CN202120497773.0U CN214586205U (en) | 2021-03-09 | 2021-03-09 | Liquid microscopic optical system |
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| CN202120497773.0U CN214586205U (en) | 2021-03-09 | 2021-03-09 | Liquid microscopic optical system |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115437099A (en) * | 2022-09-29 | 2022-12-06 | 苏州灵猴机器人有限公司 | Automatic focusing optical system and focusing method |
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2021
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN115437099A (en) * | 2022-09-29 | 2022-12-06 | 苏州灵猴机器人有限公司 | Automatic focusing optical system and focusing method |
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