CN109187723A - Postposition is divided pupil differential confocal Raman spectra-mass spectrum micro imaging method and device - Google Patents
Postposition is divided pupil differential confocal Raman spectra-mass spectrum micro imaging method and device Download PDFInfo
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Abstract
Postposition light splitting pupil differential confocal Raman spectra-mass spectrum micro imaging method and device disclosed by the invention, belong to confocal microscopic imaging, light spectrum image-forming and mass spectrum imaging field of measuring technique.Postposition is divided pupil laser differential confocal micro-imaging technique and spectrum by the present invention, mass spectrometry detection technology combines, the imaging of high-space resolution form is carried out to sample using the small focal beam spot of the postposition light splitting pupil differential confocal microscope handled through super resolution technology, using mass spectrometry detection system to sample microcell charged molecule, atom etc. carries out mass spectrometry detection, microscopic spectrum detection is carried out to the Raman spectrum that focal beam spot excites using spectrum investigating system, utilize the high-space resolution and highly sensitive imaging and detection of the mutual supplement with each other's advantages of the multispectral detection of laser and the complete component information of structure fusion realization sample microcell and morphological parameters.The present invention can be imaged for the fields form such as biomedicine, material science, mineral products, minute manufacturing and material composition detection provides a completely new effective technical way.
Description
Technical field
The invention belongs to confocal microscopic imaging technology, spectral imaging technology and mass spectrum imaging technical fields, and postposition is divided
Pupil laser differential confocal micro-imaging technique, Raman spectrum imaging technology are combined with mass spectrum imaging technology, are related to a kind of postposition
It is divided pupil laser differential confocal Raman spectrum-mass spectrum micro imaging method and device, in biomedicine, material science, physico
The fields such as, mineral products, minute manufacturing have wide practical use.
Background technique
Mass spectrograph (Mass Spectrometry) is to ionize the component in sample, makes the different charge-mass ratios generated
Charge atom, molecule or molecular fragment focused respectively under the action of electric and magnetic fields obtain by mass-to-charge ratio size order arrange
The map instrument of column.Mass spectrum imaging be tiny areas multiple in sample 2 dimensional region are analyzed by mass spectrometry respectively it is specific to detect
The distribution of mass-to-charge ratio (m/z) substance.
It is raw from the substance assistant laser desorpted ionized this highly sensitive and high quality detection range of last century the mid-80
The appearance of substance spectral imaging technology has opened up mass-spectrometry one brand-new field-biological mass spectrometry, has promoted mass-spectrometric technique application model
Enclose the various fields for expanding to life science, especially mass spectrum protein, nucleic acid, in terms of answer
With not only providing new tool for life science, but also also promote the development of mass-spectrometric technique itself.
But there are problems following prominent for existing substance assistant laser desorpted ionized mass spectrograph:
1) due to being focused using simple laser come desorption ionization sample, thus its there are still laser focal beam spots big, matter
Compose the problems such as space exploration resolving power is not high；
2) molecular structure and chemical bond etc. can not be detected, result constrains the accurate complete of sample component information
It obtains；
3) long the time required to mass spectrum imaging, laser mass spectrometry instrument focal beam spot axial position often drifts about with respect to sample
Problem.
And the accurate acquisition of mineral products, " microcell " pattern of space substance and biological sample and complete component information is for section
It learns research and production detection is all extremely important.In fact, how to detect micro-area composition information with sensitivity is mesh
The important technological problems that the fields such as preceding mineral products analysis, biochemistry detection are urgently studied.
Raman spectroscopy can obtain the molecular structure and chemical key information of sample by measuring sample scattering spectrum, will draw
Graceful spectral technique combine may be implemented in conjunction with mass spectrometry detection technology have complementary advantages and structure function merge, utilize laser mass spectrometry
The complete component information detection of sample is realized with Raman spectrum integration technology.
Postposition is divided pupil laser differential confocal technology and is detected using illumination and the non-line structure altogether of detection optical path, is not only shown
The azimuthal resolution and Focus accuracy for improving optical path are write, realizes the high-resolution imaging detection of sample topography, and can be effective
Inhibit backscattering interference, improves spectrographic detection signal-to-noise ratio.
Based on this, the present invention proposes a kind of postposition light splitting pupil laser differential confocal Raman spectrum-mass spectrum micro imaging method
With device, innovation be: for the first time by with the postposition of high-space resolution ability light splitting pupil laser differential confocal microtechnic with
Raman spectroscopy and mass spectrometry detection technology blend, it can be achieved that sample microcell high-space resolution and highly sensitive pattern and group
The imaging and detection divided.
A kind of postposition light splitting pupil laser differential confocal Raman spectrum-mass spectrum micro imaging method of the present invention can make a living with device
The pattern component imaging detection in the fields such as object medicine, material science, physical chemistry, mineral products, minute manufacturing provide one it is completely new
Effective technical way.
Summary of the invention
The purpose of the invention is to improve the spatial resolving power of mass spectrum imaging, inhibit focal beam spot phase in imaging process
Drift to sample proposes that a kind of postposition is divided pupil laser differential confocal, Raman-mass spectrum micro imaging method and device, to
Sample micro-raman spectra information and component information are obtained simultaneously.The purpose of the present invention is what is be achieved through the following technical solutions.
Postposition of the invention is divided pupil laser differential confocal Raman spectrum-mass spectrum micro imaging method, utilizes high spatial point
It distinguishes that the focal beam spot of postposition laser differential confocal microscopic system carries out axial fixed-focus and imaging to sample, utilizes mass spectrometry detection system
Charged molecule, atom generated to laser differential confocal microscopic system focal beam spot desorption ionization sample etc. carries out microcell mass spectrum
Imaging produces postposition light splitting pupil laser differential confocal microscopic system focal beam spot excitation sample using Raman spectroscopic detection system
Raw scattering spectrum is detected, and then then realizes that sample is micro- with analysis is compared by the fusion of detection data information again
The imaging and detection of area's high-space resolution and highly sensitive form and component, comprising the following steps:
Step 1: reflecting collimated light beam simultaneously by compression focal beam spot system, through Amici prism transmission, dichroscope A
It is focused on sample by measurement object lens；
Step 2: computer control precise three-dimensional working platform is made to drive sample attached in measurement object focal point along measuring surface
It closely moves up and down, the light through sample reflection reflects to obtain Returning beam, Returning beam by Amici prism by dichroscope A
After reflection, postposition light splitting pupil measuring beam is formed after the collection pupil filtering in postposition pupil, postposition is divided pupil measuring beam
It converges on dual-quadrant detector by detection object lens, relaying amplifying lens and after relaying amplifying lens, is put about relaying
The first symmetrically placed detection quadrant of big lens axis and the second detection quadrant are split detection to amplification Airy, are ended
In the first microcell of spot the off-axis confocal axial strength curve of strength characteristics first, the strength characteristics of the second microcell of Airy is bent
The off-axis confocal axial strength curve of line second；Step 3: by the first off-axis confocal axial strength curve and the second off-axis confocal axis
Subtract each other processing to intensity curve and obtains postposition light splitting pupil laser differential confocal axial strength curve, it is poor using postposition light splitting pupil laser
Moving confocal axial strength curve can be accurately positioned sample this axial height information；
Step 4: computer controls three-dimensional according to the dead-center position of postposition light splitting pupil laser differential confocal axial strength curve
Workbench drives sample to move along measuring surface normal direction, focuses on the focal beam spot for measuring object lens 7 on sample；
Step 5: using the Raman spectroscopy detector of Raman spectroscopic detection system to being transmitted through dichroscope A and Raman coupling
It closes the raman spectral signal light beam that lens are collected to be detected, measures the sample element composition information in corresponding focal beam spot region；
Step 6: changing collimated light beam light illumination mode, the microcell desorption ionization of sample is excited to generate plasma plume；
Step 7: dividing in the plasma plume for being generated focal beam spot desorption ionization sample using ion suction pipe
Son, atom and ion suck to form particle detection, and particle detection, which enters, carries out mass spectrum imaging in mass spectrometry detection system, measure correspondence
The Information in Mass Spectra in focal beam spot region；
Step 8: the laser focal beam spot position sample that computer measures postposition light splitting pupil laser differential confocal detection system
Raman spectral information, the mass spectrometry detection system that the laser that product elevation information, Raman spectroscopic detection system detect focuses microcell measure
Laser focus the Information in Mass Spectra of microcell and carry out fusion treatment, then obtain the height of focal beam spot microcell, spectrum and mass spectrum letter
Breath；
Step 9: computer control precise three-dimensional working platform makes to measure the next to be measured of object focal point alignment sample
Then region is operated by step 2~step 8, obtain height, spectrum and the mass spectrum letter of next focal zone to be measured
Breath；
Measured Step 10: repeating step 9 until all tested points on sample, then using computer into
Row processing obtains sample shape information and complete component information.
Postposition of the invention is divided pupil laser differential confocal Raman spectrum-mass spectrum micro imaging method, described in step 1
Collimated light beam is shaped as annular beam, which focuses through Amici prism transmission, dichroscope A reflection, measurement object lens again
Desorption ionization generates plasma plume on to sample.
Postposition of the invention is divided pupil laser differential confocal Raman spectrum-mass spectrum micro imaging method, and the pupil is D type
Postposition pupil or round postposition pupil；Collecting pupil is that D type collects pupil or circular collection pupil；D type postposition pupil and D type are received
Collection pupil is used in conjunction with；Round postposition pupil and circular collection pupil are used in conjunction with.
Postposition of the invention is divided pupil laser differential confocal Raman spectrum-mass spectrum micro imaging method, compresses focal beam spot
System vector beam generating system and the iris filter substitution for generating vector beam.
Postposition of the invention is divided pupil laser differential confocal Raman spectrum-mass spectrum microscopic imaging device, including generates excitation
The light-source system of light beam, Amici prism, the dichroscope A being sequentially placed along light source exit direction, with dichroscope A reflection side
To identical measurement object lens, precision three-dimensional workbench, dichroscope A reflects the Raman spectrum measurement system of opposite direction, with point
The postposition in light prismatic reflection direction is divided pupil laser differential confocal measuring system, mass spectrometry detection system and computer processing system.
Postposition of the invention is divided pupil laser differential confocal Raman spectrum-mass spectrum microscopic imaging device, and postposition is divided pupil and swashs
The equation of light is moved the optional following two mode of confocal detection module and is realized:
Mode one: postposition is divided pupil laser differential confocal detecting module by relaying amplifying lens and dual-quadrant detector structure
At wherein the first detection quadrant on dual-quadrant detector test surface and the second detection quadrant are symmetrical about optical axis.
Mode two: postposition light splitting pupil laser differential confocal detecting module is made of relaying amplifying lens, ccd detector,
The first microcell of Airy and the second microcell of Airy that middle ccd detector detects are symmetrical about optical axis.
Postposition of the invention is divided pupil laser differential confocal Raman spectrum-mass spectrum microscopic imaging device, and light-source system is by arteries and veins
Rush laser, collector lens, collector lens focal point Optic transmission fiber substitution simultaneously, emergent light is introduced in laser focusing system
Beam attenuation device introduces detection beam attenuator in postposition light splitting pupil laser differential confocal detection system.Decayed by outgoing beam
Device and detection beam attenuator constitute Light intensity regulating system, and the hot spot for decay focal beam spot and dual-quadrant detector detection is strong
Degree, to adapt to light intensity demand when sample surfaces positioning.
The utility model has the advantages that
1) " zero crossing " and high-acruracy survey object lens of pupil laser differential confocal axial response curve are divided by postposition
Focus accurately corresponds to this characteristic, realizes accurate fixed-focus to sample, be able to suppress existing mass spectrograph because long-time mass spectrum at
Drifting problem of the focal beam spot with respect to sample as in；
2) combine Raman spectrum detection, can overcome existing laser mass spectrometry instrument can not to molecular structure and chemical bond etc. into
The deficiency of row detection realizes the mutual supplement with each other's advantages and structure function fusion of laser mass spectrometry and Raman spectrum component imaging detection, can be with
Obtain more comprehensively microcell component information；
3) the preparatory fixed-focus of sample is carried out using " zero crossing " of postposition light splitting pupil laser differential confocal curve, makes minimum focusing
Hot spot focuses on sample surfaces, can be realized sample microcell high-space resolution mass spectrometry detection and microcell micro-imaging, effectively sends out
Wave the potential differentiated between postposition light splitting pupil laser differential confocal system altitude；
4) using compression focal beam spot technology, it can be improved the spatial resolving power of laser mass spectrometry instrument；
5) signal is obtained due to the method using division focal spot, it can be set on system detection focal plane by changing
The parameter of tiny area is to match the reflectivity of different samples, so as to extend its application field；Calculating can also only be passed through
The matching of the measurement object lens to different NA values is realized in the processing of machine system software, without carrying out any hardware adjustment to system again,
It is advantageously implemented the versatility of instrument.
Detailed description of the invention
Fig. 1 is that postposition of the present invention is divided pupil laser differential confocal Raman spectrum-mass spectrum micro imaging method schematic diagram；
Fig. 2 is that the postposition of the embodiment of the present invention 1 is divided pupil laser differential confocal Raman spectrum-mass spectrum micro imaging method
With schematic device；
Fig. 3 is that the postposition of the embodiment of the present invention 2 is divided pupil laser differential confocal Raman spectrum-mass spectrum micro imaging method
With schematic device；
Fig. 4 is light splitting pupil differential confocal axial strength curve.
Wherein: 1- light-source system, 2- collimation lens, 3- collimated light beam, 4- compression focal beam spot system, 5- Amici prism,
6- dichroscope A, 7- measure object lens, 8- sample, 9- plasma plume, 10- precision three-dimensional workbench, 11-D type postposition pupil,
12-D type collects pupil, 13- detects object lens, 14- postposition light splitting pupil laser differential confocal detection system, 15- relay amplifying lens,
It is micro- that 16- dual-quadrant detector, 17- first detect quadrant, 18- second detects quadrant, 19- amplifies Airy, 20- Airy first
Area, the second microcell of 21- Airy, the off-axis confocal axial strength curve of 22- first, the off-axis confocal axial strength curve of 23- second,
24- is divided pupil laser differential confocal axial strength curve, 25- raman spectral signal light beam, 26- particle detection, 27- return light
Beam, 28- postposition are divided pupil measuring beam, 29- Raman spectroscopic detection system, 30- Raman-Coupled lens, 31- Raman spectroscopic detection
Device, 32- ion suction pipe, 33- mass spectrograph, 34- computer, 35- vector optical generator, 36- iris filter, 37- circle postposition
Pupil, 38- circular collection pupil, 39-CCD detector, 40- pulse laser, 41- collector lens, 42- Optic transmission fiber, 43- go out
Irradiating light beam attenuator, 44- detect beam attenuator.
Specific embodiment
Invention is further described in detail with reference to the accompanying drawings and examples.
Embodiment 1
Pupil 11 is collected as shown in Figure 1, placing on detection 13 pupil plane of object lens.Light-source system 1 selects point light source, puts light
The excitation beam of source outgoing is by collimation lens 2, compression focal beam spot system 4, Amici prism 5, dichroscope A6 and measurement object
It after mirror 7, converges on sample 8, computer 34 controls precision three-dimensional workbench 10 and drives sample 8 in measurement object lens 7
Near focal point moves up and down, and the light reflected through sample 8 passes through D type postposition by dichroscope A6 reflection, the reflection of Amici prism 5
D type in pupil 11 converges on dual-quadrant detector 16 after collecting pupil 12, detection object lens 13, relaying amplifying lens 14, closes
It is split detection in the first symmetrically placed detection quadrant 17 of acquisition optical axis and second detection 18 pairs of amplification Airy 19 of quadrant,
The strength characteristics for obtaining the first microcell of Airy 20 and the second microcell of Airy 21 are respectively that the first off-axis confocal axial direction is strong
It writes music line 22 and the second off-axis confocal axial strength curve 23；
First off-axis confocal axial strength curve 22 and the second off-axis confocal axial strength curve 23 are subtracted each other processing and obtained
Postposition is divided pupil laser differential confocal axial strength curve 24, is divided pupil laser differential confocal axial strength curve 24 using postposition
This axial height information of sample 8 can be accurately positioned；
Using the Raman spectroscopy detector 31 of Raman spectroscopic detection system 29 to dichroscope A6 transmission, Raman-Coupled lens
The 30 raman spectral signal light beams 25 collected are detected, and 8 element of the sample composition information in corresponding focal beam spot region is measured；
Change point light source operating mode, improve illumination intensity, the microcell desorption ionization of excitation sample 8 generates plasma
Body feathers 9；
The molecule in plasma plume 9 that is generated focal beam spot desorption ionization sample 8 using ion suction pipe 32, original
Mass spectrum imaging is carried out in son and ion sucking mass spectrometry detection system 33, measures the Information in Mass Spectra in corresponding focal beam spot region；
The laser that postposition light splitting pupil laser differential confocal detection system measures is focused micro-raman spectra information, drawn by computer 34
The laser that Raman spectral information, the mass spectrometry detection system 33 that the laser that graceful spectrum investigating system 26 detects focuses microcell measure focuses
The Information in Mass Spectra of microcell carries out fusion treatment, obtains height, spectrum and the Information in Mass Spectra of focal beam spot microcell；
Computer 34, which controls precision three-dimensional workbench 10, to be made to measure next region to be measured that object lens 7 are directed at sample 8,
Then height, spectrum and the Information in Mass Spectra of next focal zone to be measured are obtained；
Until all tested points on sample 8 are measured, then computer 34 is utilized to carry out data fusion and figure
As reconstruction processing, sample topographical information and complete component information can be obtained.
Embodiment 2
As shown in Fig. 2, compression focuses in postposition light splitting pupil laser differential confocal Raman spectrum-mass spectrum microscopic imaging device
Spot system 4 is substituted by vector beam generating system 35, iris filter 36, and D type postposition pupil 11 can be by round postposition pupil
37 substitutions, dual-quadrant detector are substituted by ccd detector 39, wherein the first microcell of Airy and Airy of ccd detector detection
The second microcell of spot, it is symmetrical about optical axis.
Remaining is identical as the embodiment of embodiment 1.
Embodiment 3
As shown in figure 3, point light source 1 can in postposition light splitting pupil laser differential confocal Raman spectrum-mass spectrum microscopic imaging device
It is substituted by the Optic transmission fiber 42 of pulse laser 40, collector lens 41,41 focal point of collector lens simultaneously, in laser focusing system
Middle introducing outgoing beam attenuator 43 introduces detection beam attenuator in postposition light splitting pupil laser differential confocal detection system
44.Light intensity regulating system is constituted by outgoing beam attenuator 43 and detection beam attenuator 44, for focal beam spot and two of decaying
The spot intensity that quadrant detector 16 detects, to adapt to light intensity demand when sample surfaces positioning.
Remaining imaging method and process are same as Example 1.
A specific embodiment of the invention is described in conjunction with attached drawing above, but these explanations cannot be understood to limit
The scope of the present invention.Protection scope of the present invention is limited by appended claims, any in the claims in the present invention base
Change on plinth is all protection scope of the present invention.
Claims (8)
1. postposition is divided pupil differential confocal Raman spectra-mass spectrum micro imaging method, it is characterised in that: using after high-space resolution
The focal beam spot for setting laser differential confocal microscopic system carries out axial fixed-focus and imaging to sample (8), utilizes mass spectrometry detection
Charged molecule, the atom etc. that system generates laser differential confocal microscopic system focal beam spot desorption ionization sample (8)
Microcell mass spectrum imaging is carried out, postposition light splitting pupil differential confocal microscopic system focal beam spot is excited using Raman spectroscopic detection system
Sample (8) and the scattering spectrum generated is detected, then again by the fusion of detection data information and compare analysis after
And realize the imaging and detection of sample (8) microcell high-space resolution and highly sensitive form and component, comprising the following steps:
Step 1: collimated light beam (3) is made to transmit (5), dichroscope A by compression focal beam spot system (4), through Amici prism
(6) it reflects and is focused on sample (8) by measurement object lens (7)；
Step 2: computer (34) control precision three-dimensional workbench (10) is made to drive sample (8) along measuring surface in measurement object
Mirror (7) near focal point moves up and down, and the light through sample (8) reflection obtains Returning beam by dichroscope A (6) reflection
(27), Returning beam (27) forms postposition point after Amici prism (5) reflection after the collection pupil filtering in postposition pupil
Pupil measuring beam (28), postposition light splitting pupil measuring beam (28) are by detection object lens (13), relaying amplifying lens (15) and position
It is converged on dual-quadrant detector (16) after relaying amplifying lens (15), it is symmetrically placed about relaying amplifying lens (15) optical axis
The first detection quadrant (17) and the second detection quadrant (18) be split detection to Airy (19) are amplified, obtain Airy the
The off-axis confocal axial strength curve (22) of the strength characteristics first of one microcell (20), the intensity of the second microcell of Airy (22)
The off-axis confocal axial strength curve (23) of characteristic curve second；
Step 3: the first off-axis confocal axial strength curve (22) and the second off-axis confocal axial strength curve (23) are subtracted each other place
Reason obtains postposition light splitting pupil differential confocal axial strength curve (24), is divided pupil differential confocal axial strength curve using postposition
(24) it is accurately positioned sample (8) this axial height information；
Step 4: computer (34) controls three-dimensional according to the dead-center position of postposition light splitting pupil differential confocal axial strength curve (24)
Workbench (10) drive sample (8) moved along measuring surface normal direction, make measure object lens (7) focal beam spot focus on by
In sample (8)；
Step 5: using Raman spectroscopic detection system (29) Raman spectroscopy detector (31) to through dichroscope A (6) transmission and
The raman spectral signal light beam (25) that Raman-Coupled lens (30) are collected is detected, and the sample in corresponding focal beam spot region is measured
(8) element forms information；
Step 6: changing collimated light beam (3) light illumination mode, the microcell desorption ionization of excitation sample (8) generates plasma
Plumage (9)；
Step 7: in the plasma plume (9) generated focal beam spot desorption ionization sample (8) using ion suction pipe (32)
Molecule, atom and ion suck to be formed particle detection (26), particle detection (26) enter mass spectrometry detection system in carries out mass spectrum
Imaging, measures the Information in Mass Spectra in corresponding focal beam spot region；
Step 8: the laser focal beam spot position sample that computer (34) measures postposition light splitting pupil differential confocal detection system (14)
The laser that product elevation information, Raman spectroscopic detection system (29) detect focuses Raman spectral information, the mass spectrometry detection system of microcell
(33) Information in Mass Spectra that the laser measured focuses microcell carries out fusion treatment, then obtains height, the spectrum of focal beam spot microcell
And Information in Mass Spectra；
Step 9: computer (34) control precision three-dimensional workbench (10) makes to measure object lens (7) focus alignment sample (8)
Next region to be measured, is then operated by step 2~step 8, and height, the spectrum of next focal zone to be measured are obtained
And Information in Mass Spectra；
Step 10: repetition step 9 is measured until all tested points on sample (8), then computer (34) are utilized
It is handled and obtains sample shape information and complete component information.
2. a kind of postposition according to claim 1 is divided pupil differential confocal Raman spectra-mass spectrum micro imaging method, special
Sign is: so that collimated light beam described in step 1 (3) is shaped as annular beam, the annular beam again through Amici prism (5) transmission,
Dichroscope A (6) reflection, measurement object lens (7) focus on desorption ionization on sample (8) and generate plasma plume (9).
3. a kind of postposition according to claim 1 is divided pupil differential confocal Raman spectra-mass spectrum micro imaging method, special
Sign is: the postposition pupil is D type postposition pupil (11) or round postposition pupil (37)；Collecting pupil is that D type collects pupil
(12) or circular collection pupil (38)；D type postposition pupil (11) and D type are collected pupil (12) and are used in conjunction with；Round postposition pupil
(37) it is used in conjunction with circular collection pupil (38).
4. a kind of postposition according to claim 1 is divided pupil differential confocal Raman spectra-mass spectrum micro imaging method, special
Sign is: compression focal beam spot system (4) the vector beam generating system (35) and iris filter for generating vector beam
(36) it substitutes.
5. postposition is divided pupil differential confocal Raman spectra-mass spectrum microscopic imaging device, it is characterised in that: including generating excitation beam
Light-source system (1), the Amici prism (5), the dichroscope A (6) that are sequentially placed along light-source system (1) exit direction, with two
Measurement object lens (7), precision three-dimensional workbench (10) to Look mirror A (6) reflection direction reflect opposite direction with dichroscope A (6)
Raman spectrum measurement system (29), the postposition of Amici prism (5) reflection direction is divided pupil differential confocal measurement system (14), matter
Compose detection system (33) and computer (34) processing system.
6. postposition according to claim 5 is divided pupil differential confocal Raman spectra-mass spectrum microscopic imaging device, feature exists
In: postposition is divided pupil differential detection module (14) and is made of relaying enlarging objective (15) and dual-quadrant detector (16), wherein two
The first detection quadrant (17) and the second detection quadrant (18) on quadrant detector (16) test surface is symmetrical about optical axis.
7. postposition according to claim 5 is divided pupil differential confocal Raman spectra-mass spectrum microscopic imaging device, feature exists
In: postposition is divided pupil differential confocal detecting module (14) and is made of relaying amplifying lens, ccd detector (39), wherein CCD detection
The first microcell of Airy (20) and the second microcell of Airy (21) that device (39) detects are symmetrical about optical axis.
8. postposition according to claim 5 is divided pupil differential confocal Raman spectra-mass spectrum microscopic imaging device, feature exists
In: light-source system (1) by pulse laser (40), collector lens (41), collector lens (41) focal point Optic transmission fiber (42)
Substitution simultaneously, introduces outgoing beam attenuator (43) in laser focusing system, is divided pupil differential confocal detection system in postposition
Middle introducing detects beam attenuator (44)；Light intensity regulating is constituted by outgoing beam attenuator (43) and detection beam attenuator (44)
System, for the spot intensity of decay focal beam spot and dual-quadrant detector (16) detection, to adapt to when sample surfaces position
Light intensity demand.
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113866152A (en) * | 2021-09-27 | 2021-12-31 | 北京理工大学 | Laser differential correlation confocal Raman spectrum testing method and device |
| CN115452804A (en) * | 2022-11-10 | 2022-12-09 | 泉州师范学院 | Raman spectrum detection device and method for body fluid |
Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE69117455D1 (en) * | 1990-12-03 | 1996-04-04 | Nikon Corp | Confocal laser scanning microscope with contrast by difference from interference signals |
| US5804813A (en) * | 1996-06-06 | 1998-09-08 | National Science Council Of Republic Of China | Differential confocal microscopy |
| CN103969239A (en) * | 2013-09-06 | 2014-08-06 | 北京理工大学 | Split pupil laser differential confocal Raman spectrum test method and device |
| CN104677831A (en) * | 2015-03-03 | 2015-06-03 | 北京理工大学 | Spectrophotometric pupil differential confocal-photoacoustic microimaging device and method |
| CN105241849A (en) * | 2015-07-17 | 2016-01-13 | 北京理工大学 | Spectral pupil laser differential confocal LIBS, Raman spectrum-mass spectrum microscopic imaging method and Raman spectrum-mass spectrum microscopic imaging device |
| CN104677884B (en) * | 2015-03-17 | 2017-07-11 | 北京理工大学 | High-space resolution laser light splitting pupil differential confocal mass spectrum micro imaging method and device |
-
2018
- 2018-11-13 CN CN201811343410.0A patent/CN109187723A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| DE69117455D1 (en) * | 1990-12-03 | 1996-04-04 | Nikon Corp | Confocal laser scanning microscope with contrast by difference from interference signals |
| US5804813A (en) * | 1996-06-06 | 1998-09-08 | National Science Council Of Republic Of China | Differential confocal microscopy |
| CN103969239A (en) * | 2013-09-06 | 2014-08-06 | 北京理工大学 | Split pupil laser differential confocal Raman spectrum test method and device |
| CN103969239B (en) * | 2013-09-06 | 2016-04-13 | 北京理工大学 | A kind of point pupil laser differential confocal Raman spectra test method and device |
| CN104677831A (en) * | 2015-03-03 | 2015-06-03 | 北京理工大学 | Spectrophotometric pupil differential confocal-photoacoustic microimaging device and method |
| CN104677884B (en) * | 2015-03-17 | 2017-07-11 | 北京理工大学 | High-space resolution laser light splitting pupil differential confocal mass spectrum micro imaging method and device |
| CN105241849A (en) * | 2015-07-17 | 2016-01-13 | 北京理工大学 | Spectral pupil laser differential confocal LIBS, Raman spectrum-mass spectrum microscopic imaging method and Raman spectrum-mass spectrum microscopic imaging device |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113866152A (en) * | 2021-09-27 | 2021-12-31 | 北京理工大学 | Laser differential correlation confocal Raman spectrum testing method and device |
| CN113866152B (en) * | 2021-09-27 | 2023-11-10 | 北京理工大学 | Laser differential correlated confocal Raman spectrum testing method and device |
| CN115452804A (en) * | 2022-11-10 | 2022-12-09 | 泉州师范学院 | Raman spectrum detection device and method for body fluid |
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