CN109187493A - It is divided the femtosecond laser processing monitoring method and device of the confocal Raman-LIBS spectrographic detection of pupil - Google Patents
It is divided the femtosecond laser processing monitoring method and device of the confocal Raman-LIBS spectrographic detection of pupil Download PDFInfo
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Abstract
The present invention relates to a kind of femtosecond laser processing monitoring method for being divided the confocal Raman-LIBS spectrographic detection of pupil and devices, belong to laser accurate detection technique, femtosecond laser processing monitoring technical field, can be used for femtosecond laser processing and on-line monitoring and physical property comprehensive parameters on-line checking.The present invention will be divided pupil confocal laser axial direction monitoring modular and organically blend with femtosecond laser system of processing, carries out high accuracy in-situ on-line monitoring to sample axial position using light splitting pupil confocal system and sample axial direction processing dimension measures；The information such as molecular structure, element and ion of specimen material are monitored analysis after being processed using Raman spectroscopic detection module, LIBS spectrographic detection module to femtosecond laser, and above- mentioned information are merged by computer, it realizes that the high-precision processing of fine structure femtosecond laser is integrated with the monitoring analysis of microcell form performance in-situ, improves controllability and processing quality of sample of fine structure femtosecond laser machining accuracy etc..
Description
Technical field
The invention belongs to laser accurate detection technique, femtosecond lasers to process monitoring technical field, and it is confocal to be related to light splitting pupil
The femtosecond laser processing monitoring method and device, the femtosecond laser that can be used for complicated fine structure of Raman-LIBS spectrographic detection add
Work and form performance synthesis parameter original position on-line checking.
Background technique
Femtosecond laser is processed since wide with adaptability for materials, processing fineness is high, processing is not necessarily to the remarkable advantages such as mask,
And the century property technology for being considered as " may cause the new industrial revolution " is concerned, and by as macro-micro- across scale minute manufacturing
Preferred means obtain the worlds such as China, the U.S. and respectively manufacture first developing for big country.
Femtosecond laser processing is exactly the nonlinear effect using laser and material, in the nanometer ruler for surmounting optical diffraction limit
Make material that forming occur and become second nature on degree, change and regulation while essence is material shape and performance parameter, thus, we
The transient change state for only monitoring material shape in process, performance parameter simultaneously, it is non-could really to disclose femtosecond laser
The mechanism of action and its Evolution linearly processed.
There is also non-linear processing to make object lens axial feeding can not accurate counter sample axial direction for femtosecond laser processing at present
This significant bottleneck problem of removal amount, but it is existing based on the axially monitoring, backscattering coherent tomographic of triangle Optical displacement sensor
The methods of monitoring and optical coherence tomography monitoring, resolution capability are micron or sub-micrometer scale, such as Canadian Queens University
On-line monitoring technique research, but its direction x-y-z are carried out using interference imaging method (OCT) with German brother's Dettingen Laser Experiments room
Monitoring resolution capability only up to micron dimension.As it can be seen that femtosecond process unit due to being restricted by existing monitoring technology, still lacks high
The in-situ monitoring means of performance, this just makes generally existing based on processing, long time-consuming femtosecond laser process equipment: non-linear to go
It removes, axial remove is not allowed；Long time-consuming drift, keeps system of processing unstable；It is unstable point processing, make process scale less etc. general character
Problem.It is inaccurate that it has its source in system of processing axial direction fixed-focus, and then constrains femtosecond laser in across scale key element micro-nano system
Make the application of aspect.
In addition, Material Processing is different in femtosecond laser process, the mechanism of action of femtosecond pulse and substance is not
Together, the form that sample generates in process and performance change difference；Under the action of pulse laser, the molecular structure of sample,
Element ratio and charged ion etc. can change, and how carry out to the physical parameter and morphological parameters of sample after processing is completed
Accurate detection is not only to guarantee the key of machining accuracy and research femtosecond laser processing mechanism, promotes processing technology level
Important prerequisite.
It can be seen that there is an urgent need to study shape in femtosecond laser processing with the rapid development of femtosecond laser processing technology
The in-situ monitoring means of state performance parameter.
In the detection of form performance parameter, it is based on the confocal laser Raman spectroscopic detection skill of Raman (Raman) scattering effect
Art, since the information such as intensity, position, displacement, ratio, halfwidth of detection sample raman microspectroscopy spectrum spectral peak can be passed through, to survey
The parameters such as material domain component, stress, temperature are obtained, and by the important means as form performance parameter test in femtosecond laser
It is obtained into the off-line monitorings such as photoinduced strain, crystal crystalline state, variations in refractive index, carrier density, state of temperature, the ingredient of processing
Function application, but the processing of existing femtosecond laser still lacks the integrated in-situ monitoring hand of femtosecond laser processing form performance parameter
Section, while Raman spectrum form performance detection method cannot also reflect the form performance parameter of processed sample completely, it is necessary to it borrows
Other means are helped, detect sample microcell substance such as LIBS (Laser-induced breakdown spectroscopy) spectrum
The complete information of component.
In conclusion in existing femtosecond laser processing accurately fixed-focus and alignment can not be carried out to sample, it can not be to processing
In sample morphology performance parameter carry out high-precision in-situ monitoring, result limit femtosecond laser processing effect stability and
Across scale working ability also constrains the raising of femtosecond laser processing mechanism research and processing technology level.
For this purpose, present invention proposition creatively incorporates the laser light splitting confocal Raman- of pupil in femtosecond laser system of processing
LIBS spectrographic detection technology swashs to realize the integrated in-situ monitoring of form performance parameter in femtosecond laser processing for femtosecond
Light processes form performance parameter integration in-situ monitoring and provides new tool, promotes the precision property and macro-micro- of femtosecond laser processing
Across scale working ability etc..
Summary of the invention
The purpose of the present invention is be also easy to produce axial drift and after processing is completed sample to solve sample in femtosecond laser processing
The problems such as complex shape state performance parameter in situ detection, proposes the femtosecond laser processing of the light splitting confocal Raman-LIBS spectrographic detection of pupil
Monitoring method and device realize axial drift, inclined on-line monitoring and sample structure axial direction ruler in sample processing procedure
Very little nanoscale monitoring, it is ensured that the accurate real-time fixed-focus of sample in process, and realize sample microcell after processing is completed
The comprehensive detection of appearance structure and complicated physical parameter, for feedback modifiers, mechanism study and the process modification of femtosecond laser processing
Technical foundation is provided, the controllability of laser processing precision and the processing quality of sample are improved.
The purpose of the present invention is what is be achieved through the following technical solutions.
The femtosecond laser of the light splitting confocal Raman-LIBS spectrographic detection of pupil of the invention processes monitoring method, is swashed using femtosecond
Light system of processing carries out fine structure processing to sample, using light splitting pupil confocal laser axial direction monitoring modular to sample surface morphology
Sample surfaces axial position is monitored in real time in profile, processing, and is detected to the geometric parameter of sample surfaces after processing,
It is tested and analyzed, is utilized using molecule structure change of the Raman spectroscopic detection module to specimen material after femtosecond laser processing
LIBS spectrographic detection module tests and analyzes the atom of material, small molecule and element information, merges to above- mentioned information
Sample microcell form and physical property comprehensive parameters are obtained, and then realize the processing of fine structure femtosecond laser high-precision and microcell form
It can in-situ monitoring analysis integration, the controllability of raising fine structure femtosecond laser machining accuracy and the processing quality of sample；
Be divided the confocal Raman-LIBS spectrographic detection of pupil femtosecond laser processing monitoring method the following steps are included:
Step 1: sample is placed on precision stage, sample is driven to be scanned movement by precision stage, using dividing
The confocal axial monitoring modular of pupil is scanned measurement to the surface profile of sample, and by its measurement feedback to computer,
Adjustment for femtosecond laser system of processing to processing control parameter；
Wherein, the confocal axial monitoring modular of light splitting pupil is by laser, beam expander, reflecting mirror, detection object lens, light splitting pupil detection
Module composition, the axial collimated light beam that monitors into object lens and are focused onto sample after dichroscope A reflection, dichroscope B transmission
On product, through the reflection of sample reflection, axially the convergence after reflecting mirror, detection object lens, hot spot enlarging objective of monitoring light beam penetrates pin hole
It is received afterwards by light intensity detector, obtains light splitting pupil confocal curves by light intensity signal processor；
Peak point position according to light splitting pupil confocal curves carries out high precision monitor to the axial defocusing position of sample；
Step 2: processing system using the femtosecond laser that femto-second laser, laser space-time Shaping Module, two-dimensional scanner are constituted
System carries out micro-nano structure processing to sample, utilizes the confocal axial monitoring modular of light splitting pupil to sample in process in process
The axial position on surface is monitored；Peak point position according to light splitting pupil confocal curves carries out the axial position of sample high-precision
Degree monitoring；
Step 3: axial position of the computer according to measurement result adjustment sample, adjusts the position of precision stage in real time,
Realize the accurate fixed-focus of sample in process；
Step 4: after processing is completed, using the confocal axial monitoring modular of light splitting pupil to sample structure after processing is completed into
Row scanning survey realizes the nano high-precision in situ detection of sample morphology parameter after processing；
Step 5: axial monitoring collimated light beam focuses on sample through object lens, raman scattering spectrum is inspired, spectrum warp
It is detected through dichroscope C by Raman spectroscopic detection module after dichroscope B reflection, to the molecular structural parameter of sample after processing
Carry out in situ detection analysis, wherein Raman detection module is made of Raman-Coupled mirror and Raman spectroscopy detector；
Step 6: pulsed light beam focuses on sample through object lens, plasma plume is inspired, plasma plume buries in oblivion sending
LIBS spectrum, which is reflected again by dichroscope C after dichroscope B reflection, is detected by LIBS spectrographic detection module, right
The atom of sample, small molecule and element information carry out in situ detection analysis after processing；
Step 7: being detected to obtain signal transmission by light intensity signal processor, Raman spectroscopy detector, LIBS spectral detector
Information fusion, the microcell form and performance synthesis parameter of the sample after being processed, and according to the micro- of sample are carried out to computer
Sample physical property changing rule in area's form and performance synthesis Parameter analysis process and the effect after processing, to passing through laser
Space-time Shaping Module is modulated processing laser beam, improves the controllability and sample of micro-nano structure femtosecond laser machining accuracy
Processing quality etc..
The femtosecond laser of the light splitting confocal Raman-LIBS spectrographic detection of pupil of the present invention processes monitoring method, further includes
Coarse alignment is carried out to sample using micro-imaging module；White light source issue light through lighting system, illumination spectroscope, two to
After Look mirror B, object lens on uniform irradiation to sample, the light returned through sample is imaged onto after illumination spectroscope reflection through imaging len
On CCD, inclination and the position of sample can determine whether.
In the femtosecond laser processing monitoring method of the light splitting confocal Raman-LIBS spectrographic detection of pupil of the invention, the femtosecond
The processing laser beam and axial monitoring collimated light beam that laser-processing system issues coaxially are coupled to sample surfaces through object lens, respectively
Realize the processing and detection of micro-nano structure.
The femtosecond laser of the light splitting confocal Raman-LIBS spectrographic detection of pupil of the invention processes monitoring device, including femtosecond swashs
Light device, laser space-time Shaping Module and two-dimensional scanner positioned at femto-second laser exit direction are located at femto-second laser and are emitted
Dichroscope A, dichroscope B, object lens and the precision stage in beam orthogonal direction, positioned at point of dichroscope A reflection direction
The confocal axial monitoring modular of pupil and the dichroscope C positioned at dichroscope B reflection direction, Raman spectroscopic detection module, are located at
The LIBS spectrographic detection module of dichroscope C reflection direction, object lens are driven by axial scan device；It is divided the confocal axial monitoring mould of pupil
Block includes laser, the beam expander positioned at laser emitting direction, reflecting mirror and the detection object lens positioned at reflection specular reflection direction
With light splitting pupil detecting module, coaxially it is incident on wherein axially monitoring collimated light beam and processing laser beam through dichroscope A, object lens
Sample surfaces.
In the femtosecond laser processing monitoring device of the light splitting confocal Raman-LIBS spectrographic detection of pupil of the invention, the light splitting
Pupil detecting module can be made of hot spot enlarging objective, pin hole and light intensity detector, and wherein pin hole is located at the picture of hot spot enlarging objective
On face；
In the femtosecond laser processing monitoring device of the light splitting confocal Raman-LIBS spectrographic detection of pupil of the invention, the light splitting
Pupil detecting module can also be constituted by hot spot enlarging objective, detection CCD, positioned at the search coverage for detecting CCD image plane center；
In the femtosecond laser processing monitoring device of the light splitting confocal Raman-LIBS spectrographic detection of pupil of the invention, the laser
Space-time Shaping Module can be made of spacing shaping device, temporal shaping device, to femto-second laser issue laser beam carry out time domain and
The combined regulating of airspace parameter improves femtosecond femtosecond laser working ability；
The femtosecond laser of the light splitting confocal Raman-LIBS spectrographic detection of pupil of the present invention processes monitoring device, can be with
Sample is observed using micro-imaging module, wherein micro-imaging module is divided by white light source, lighting system, illumination
Mirror, image-forming objective lens, CCD composition.The light that white light source issues is equal after lighting system, illumination spectroscope, dichroscope B, object lens
Even to be irradiated on sample, the light returned through sample is imaged on CCD after illumination spectroscope reflection through imaging len.
Beneficial effect
The method of the present invention, which compares prior art, has following innovative point:
1) using the confocal axial monitoring technology of light splitting pupil, axial position monitoring capability and the axial direction in process are improved
Size detection ability, solves the problems, such as fixed-focus when the drifting problem and high-precision real in femtosecond laser process, this is this hair
One of bright innovative point；
2) using the confocal axial nanoscale monitoring technology of light splitting pupil, the axial ruler of femtosecond laser processed sample has been combined
Operating distance and measurement sensitivity in very little detection, solve the problem on line detection of femtosecond laser processed sample, this is this hair
The two of bright innovative point；
3) light beam for being divided pupil confocal system, femtosecond laser system of processing is coupled to sample through same object lens, realized
The online position monitoring of sample and axial dimension detection in micro-nano structure process, improve the controllability of process and add
Working medium amount, this is the three of innovative point of the invention.
The present invention, which compares prior art, has following distinguishing feature:
1. using having the light splitting pupil confocal technology of long working distance and high resolution to combine with femtosecond laser processing technology,
The on-line monitoring for realizing the sample axial defocusing position in process, solves the sample drifting problem in process,
Improve the controllability of process；
2. carrying out sample axial position monitoring using the maximum of points of light splitting pupil confocal curves, make femtosecond laser beam with most
Small focal beam spot focus on sample surfaces, it can be achieved that sample high-precision micro-nano technology；
3. inhibiting in monitoring process sample surfaces stray light to axial position monitoring and axis using light splitting pupil confocal technology
Interference to size detection, improves and monitors ability in process on-line.
4. being combined using confocal laser Raman spectrum, LIBS spectrographic detection technology, realize to the sample microcell after processing
The in-situ monitoring of form and physical property comprehensive parameters (component molecular structure, element information and ionic structure of specimen material etc.) variation
And analysis, the controllability of existing femtosecond laser process level and processing quality can be improved；
5. sample is imaged the slant correction, it can be achieved that sample position using micro-imaging technique, improve processed
Position regulated efficiency in journey.
Detailed description of the invention
Fig. 1 is the femtosecond laser processing monitoring method schematic diagram that embodiment 1 is divided the confocal Raman-LIBS spectrographic detection of pupil；
Fig. 2 is the femtosecond laser processing monitoring device schematic diagram that embodiment 2 is divided the confocal Raman-LIBS spectrographic detection of pupil；
Fig. 3 is the femtosecond laser processing monitoring device schematic diagram that embodiment 3 is divided the confocal Raman-LIBS spectrographic detection of pupil；
Fig. 4 is the femtosecond laser processing monitoring device schematic diagram that embodiment 4 is divided the confocal Raman-LIBS spectrographic detection of pupil；
Fig. 5 is the femtosecond laser processing monitoring device schematic diagram that embodiment 5 is divided the confocal Raman-LIBS spectrographic detection of pupil；
Fig. 6 is the femtosecond laser processing monitoring device schematic diagram that embodiment 6 is divided the confocal Raman-LIBS spectrographic detection of pupil.
Wherein: 1- is divided the confocal axial monitoring modular of pupil, 2- laser, 3- beam expander, 4- axially monitoring collimated light beam, 5-
Dichroscope A, 6- dichroscope B, 7- object lens, 8- axial scan device, 9- sample, 10- precision stage, the axial prison of 11- reflection
It surveys light beam, 12- reflecting mirror, 13- detection object lens, 14- and is divided pupil detecting module, 15- femto-second laser, 16- laser space-time shaping
Module, 17- process laser beam, 18- two-dimensional scanner, 19- hot spot enlarging objective, 20- pin hole, 21- light intensity detector, 22-
Light intensity signal processor, 23- are divided pupil confocal curves, 24- Raman-Coupled lens, 25- Raman spectroscopy detector, 26- Raman light
Compose detecting module, 27-LIBS coupled lens, 28-LIBS spectral detector, 29-LIBS spectrographic detection module, 30- plasma
Plumage, 31- computer, 32- dichroscope C, 33- detection CCD, 34- detect hot spot, 35- search coverage, 36- image signal process
Device, 37- spacing shaping device, 38- temporal shaping device, 39- white light source, 40- lighting system, 41- micro-imaging module, 42- shine
Bright spectroscope, 43- spectroscope, 44- imaging len, 45-CCD.
Specific embodiment
Present invention will be further explained below with reference to the attached drawings and examples.
The basic idea of the invention is that: by long working distance, the high light splitting pupil confocal laser axial direction monitoring modular axially differentiated
It organically blends with femtosecond laser system of processing, nanoscale is carried out to sample axial defocusing position using light splitting pupil confocal curves zero point
Monitoring, the axial fixed-focus in real time of sample and axial position monitoring solve axial drift in femtosecond laser process and online
The problems such as detection, and the detection of sample molecule structure is carried out using the Raman spectrum of continuous laser excitation, it is excited using pulse laser
Sample generates plasma plume, collects small molecule and element letter that detection plasma buries in oblivion the LIBS spectrum acquisition sample of generation
Breath obtains the microcell form and performance synthesis parameter of sample by the fusion of information, realizes the effect processed to femtosecond laser
Comprehensive monitoring and analysis improve controllability and processing quality of sample of micro-nano structure femtosecond laser machining accuracy etc..May be used also
To merge micro-imaging module in above system, coarse alignment is carried out to sample using micro-imaging module.
Embodiment 1
Such as Fig. 1, processed in the surface location and process of preceding sample 9 using confocal 1 pair of the axial monitoring modular of light splitting pupil
The axial position of sample 9 is monitored, and computer 33 carries out anti-two-dimensional scanner 18, precision stage 10, axial scan device 8
Feedback control is realized and is adjusted to the processing of sample 9 with the 3-D scanning and position monitored；Femtosecond laser system of processing is by femto-second laser
15, laser space-time Shaping Module 16, two-dimensional scanner 18 are constituted.
Light splitting pupil detector 14 is made of hot spot enlarging objective 19 and dual-quadrant detector 20.It is divided the confocal Raman- of pupil
The femtosecond laser processing monitoring method implementation steps of LIBS spectrographic detection are as follows:
1) sample 9 is placed on precision stage 10, drives sample 9 to be scanned movement by precision stage 10；
2) before processing, measurement is scanned to the surface of sample 9 using light splitting pupil confocal axial monitoring modular 1；Axial prison
Collimated light beam 4 is surveyed after dichroscope A5 reflection, dichroscope B6 transmission, is focused on sample 9 by object lens 7, is reflected through sample 9
Reflection axially the monitoring light beam 11 confocal axial monitoring modular 1 of pupil that is split receives；Wherein, the confocal axial monitoring modular of light splitting pupil
1 is made of laser 2, beam expander 3, reflecting mirror 12, detection object lens 13, light splitting pupil detector 14；Axial monitoring collimated light beam 4 passes through
After dichroscope A5 reflection, dichroscope B6 transmission, focused on sample 9 by object lens 7, the reflection reflected through sample 9 is axially supervised
Survey light beam 11 by reflecting mirror 12, detection object lens 13, after hot spot enlarging objective 19 convergence by after pin hole 20 by light intensity detector 21
It receives, is handled by light intensity signal processor 22 and obtain any confocal signal of light splitting pupil of 9 surface of sample；
3) axial scanner 8 is controlled by computer 31 and axial scan is carried out to sample 9, obtain that there is being total to for actual zero point
Burnt curve 23；
4) high precision monitor, meter are carried out to the axial position of sample 9 according to the peak point position of light splitting pupil confocal curves 23
Calculation machine 31 is adjusted the processing control parameter of femtosecond laser system of processing according to measurement result；
5) the processing laser beam 17 modulated through laser space-time Shaping Module 16 is through dichroscope A5, dichroscope B6 and object
The surface that mirror 7 focuses on sample 9 laser machines sample 9, and the scanning machining of film micro area controls two dimension by computer 31 and sweeps
Retouch the completion of device 18；
6) in process, the confocal axial monitoring modular 1 of light splitting pupil supervises the axial position of sample 9 in process
It surveys；
7) monitoring result that computer 31 controls precision stage 10, feeds back according to the confocal axial monitoring modular 1 of light splitting pupil
9 position of sample is adjusted, realizes the accurate fixed-focus of sample in process, eliminates the influence of sample drift；
8) axial scanner 8 is controlled by computer 31 and precision stage 10 is scanned sample 9, after obtaining processing
Sample micro-nano structure axial dimension realizes the nanoscale detection of 9 axial dimension of sample；Pass through 25 He of Raman spectroscopic detection module
The performance parameters such as molecular structure, atom, small molecule and element of sample, Jin Ershi after the acquisition processing of LIBS spectrographic detection module 29
The high accuracy in-situ detection of 9 form performance parameter of sample after now processing；
9) according in the microcell form of sample and performance synthesis Parameter analysis process sample physical property changing rule and
Effect after detection processing, is modulated to by 16 pairs of processing laser beams 17 of laser space-time Shaping Module, improves micro-nano knot
The controllability of structure femtosecond laser machining accuracy and the processing quality of sample.
Embodiment 2
As shown in Fig. 2, light splitting pupil detector 14 is by hot spot enlarging objective 19 and detection CCD33, search coverage 35 and image
Signal processor 36 is constituted, and wherein search coverage 35 is located at the image plane center position of detection CCD33；Utilize the light splitting confocal axial direction of pupil
To when the axial position of sample 9 and axial dimension are monitored in process, the axial collimated light beam 4 that monitors passes through monitoring modular 1
After dichroscope A5 reflection, dichroscope B6 transmission, focused on sample 9 by object lens 7, the reflection reflected through sample 9 is axially supervised
It surveys light beam 11 to be detected on CCD33 by converging to after reflecting mirror 12, detection object lens 13, hot spot enlarging objective 19, image signal process
The signals of search coverage 35 in 36 pairs of device detection CCD33 image planes are handled, obtain 9 surface of sample any light splitting pupil it is confocal
Signal.
Remaining step is same as Example 1.
Embodiment 3
As shown in figure 3, laser space-time Shaping Module 16 is made of spacing shaping device 37 and temporal shaping device 38, femtosecond is swashed
The light beam that light device 15 issues carries out the adjustment of time domain and airspace parameter respectively, keeps femtosecond laser processing performance best.
Remaining is same as Example 1.
Embodiment 4
As shown in figure 4, before processing, after sample 9 is placed in precision stage 10, using micro-imaging module 41 to sample
9 carry out coarse alignment, and the light that white light source 39 issues is raw after lighting system 40, illumination spectroscope 42, dichroscope B6, object lens 7
At the illumination light that on collimated light beam uniform irradiation to sample 9, sample 9 is scattered through imaging len 44 after illumination spectroscope 42 reflects
It is imaged on CCD45, position and the imaging region of sample 9 can be obtained, and then can determine whether inclination and the position of sample 9.
Remaining is same as Example 1.
Embodiment 5
As shown in figure 5, before processing, after sample 9 is placed in precision stage 10, using micro-imaging module 41 to sample
9 carry out coarse alignment, and the light that white light source 41 issues is raw after lighting system 40, illumination spectroscope 42, dichroscope B6, object lens 7
At the illumination light that on collimated light beam uniform irradiation to sample 9, sample 9 is scattered through imaging len 44 after illumination spectroscope 42 reflects
It is imaged on CCD45, position and the imaging region of sample 9 can be obtained, and then can determine whether inclination and the position of sample 9.
Remaining is same as Example 2.
Embodiment 6
As shown in fig. 6, laser space-time Shaping Module 16 is made of spacing shaping device 39 and temporal shaping device 40, femtosecond is swashed
The light beam that light device 15 issues carries out the adjustment of time domain and airspace parameter respectively, keeps femtosecond laser processing performance best.
Before processing, after sample 9 being placed in precision stage 10, it is thick right to be carried out using micro-imaging module 41 to sample 9
Standard, the light that white light source 39 issues generate collimated light beam after lighting system 40, illumination spectroscope 42, dichroscope B6, object lens 7
On uniform irradiation to sample 9, the illumination light that sample 9 scatters is imaged onto after illumination spectroscope 42 reflects through imaging len 44
On CCD45, position and the imaging region of sample 9 can be obtained, and then can determine whether inclination and the position of sample 9.
Remaining is same as Example 2.
A specific embodiment of the invention is described in conjunction with attached drawing above, but these explanations cannot be understood to limit
The scope of the present invention, protection scope of the present invention are limited by appended claims, any in the claims in the present invention base
Change on plinth is all protection scope of the present invention.
Claims (10)
1. the femtosecond laser for being divided the confocal Raman-LIBS spectrographic detection of pupil processes monitoring method, it is characterised in that: utilize femtosecond
Laser-processing system carries out fine structure processing to sample, using light splitting pupil confocal laser axial direction monitoring modular to sample surfaces shape
Sample surfaces axial position is monitored in real time in looks profile, processing, and is examined to the geometric parameter of sample surfaces after processing
It surveys, is tested and analyzed using molecule structure change of the Raman spectroscopic detection module to specimen material after femtosecond laser processing, benefit
The atom of material, small molecule and element information are tested and analyzed with LIBS spectrographic detection module, above- mentioned information are melted
It closes and obtains sample microcell form and physical property comprehensive parameters, and then realize the processing of fine structure femtosecond laser high-precision and microcell form
Performance in-situ monitoring analysis integration, improves the controllability of fine structure femtosecond laser machining accuracy and the processing quality of sample；
The following steps are included:
Step 1: sample (9) is placed on precision stage (10), sample (9) are driven to be scanned by precision stage (10)
Movement is scanned measurement to the surface profile of sample (9) using the confocal axial monitoring modular (1) of light splitting pupil, and is measured
As a result it feeds back to computer (33), the adjustment for femtosecond laser system of processing to processing control parameter；
Wherein, the confocal axial monitoring modular (1) of light splitting pupil is by laser (2), beam expander (3), reflecting mirror (12), detection object lens
(13), light splitting pupil detecting module (14) composition, axial monitor collimated light beam (4) are through dichroscope A (5) reflection, dichroscope B
(6) it after transmiting, into object lens (7) and is focused on sample (9), axially monitoring light beam (11) of the reflection through sample (9) reflection
After dichroscope B (6) transmission, dichroscope A (5) reflection, reflecting mirror (12) reflection, it is split pupil by detecting object lens (13)
Detecting module (14) receives, and light splitting pupil confocal curves (23) is obtained after light intensity signal processor (22)；
Peak point position according to light splitting pupil confocal curves (23) carries out high precision monitor to the axial defocusing position of sample (9)；
Step 2: being swashed using the femtosecond that femto-second laser (15), laser space-time Shaping Module (16), two-dimensional scanner (18) are constituted
Light system of processing carries out micro-nano structure processing to sample (9), utilizes the confocal axial monitoring modular (1) of light splitting pupil right in process
The axial position on sample (9) surface is monitored in process；Peak point position pair according to light splitting pupil confocal curves (23)
The axial position of sample (9) carries out high precision monitor；
Step 3: axial position of the computer (33) according to measurement result adjustment sample (9), adjusts precision stage (10) in real time
Position, realize process in sample accurate fixed-focus；
Step 4: after processing is completed, being carried out using the confocal axial monitoring modular (1) of light splitting pupil to sample structure after processing is completed
Scanning survey realizes the nano high-precision in situ detection of sample (9) morphological parameters after processing；
Step 5: axial monitoring collimated light beam (4) focuses on sample (9) through object lens (7), raman scattering spectrum is inspired, it should
Spectrum is detected through dichroscope C (34) by Raman spectroscopic detection module (26) after dichroscope B (6) are reflected, Raman spectrum
Detecting module (26) carries out in situ detection analysis to the molecular structural parameter of sample after processing, wherein Raman spectroscopic detection module
(26) it is made of Raman-Coupled mirror (24) and Raman spectroscopy detector (25)；
Step 6: the pulsed light beam that femto-second laser (15) issues focuses on sample (9) through object lens (7), plasma is inspired
Body feathers (30), plasma plume (30), which is buried in oblivion, issues LIBS spectrum, and LIBS spectrum is after dichroscope B (6) are reflected again by two
It reflects to Look mirror C (34), is detected by LIBS spectrographic detection module (29), the atom of sample, small molecule and element after processing are believed
Breath carries out in situ detection analysis；
Step 7: by light splitting pupil detecting module (14), light intensity signal processor (22), Raman spectroscopy detector (25), LIBS light
Spectrum detector (28) detection obtains signal and is transmitted to computer (33) progress information fusion, the microcell shape of the sample after being processed
State and performance synthesis parameter, and become according to the sample physical property in the microcell form of sample and performance synthesis Parameter analysis process
Effect after law and processing is modulated processing laser beam (17) to by laser space-time Shaping Module (16), mentions
The high controllability of micro-nano structure femtosecond laser machining accuracy and the processing quality of sample.
2. it is according to claim 1 light splitting the confocal Raman-LIBS spectrographic detection of pupil femtosecond laser processing monitoring method with
Device, it is characterised in that: further include that coarse alignment is carried out to sample (9) using micro-imaging module (43)；White light source (41)
The light of sending is uniform after lighting system (40), illumination spectroscope (42) transmission, dichroscope B (6) reflection, object lens (7) focus
It is irradiated on sample (9), the light returned through sample (9) is after illumination spectroscope (42) reflection through spectroscope (43) transmission, imaging
Lens (44) are imaged on CCD (45), inclination and position for judgement sample (9).
3. it is according to claim 1 light splitting the confocal Raman-LIBS spectrographic detection of pupil femtosecond laser processing monitoring method with
Device, it is characterised in that: the light splitting pupil detecting module (14) is by hot spot enlarging objective (19), pin hole (20) and light intensity detector
(21) it forms.
4. it is according to claim 1 light splitting the confocal Raman-LIBS spectrographic detection of pupil femtosecond laser processing monitoring method with
Device, it is characterised in that: the light splitting pupil detecting module (14) is by hot spot enlarging objective (19), detection CCD (33) and detecting area
Domain (35) composition, detection image obtain light splitting pupil confocal curves (23) through image-signal processor (36)；The search coverage
(35) it is located in the image planes of detection CCD (33).
5. it is according to claim 1 light splitting the confocal Raman-LIBS spectrographic detection of pupil femtosecond laser processing monitoring method with
Device, it is characterised in that: the processing laser beam (17) and axial monitoring collimated light beam (4) warp that femtosecond laser system of processing issues
Object lens (7) are coaxially coupled to sample (9) surface, realize the processing and detection of micro-nano structure respectively.
6. the femtosecond laser for being divided the confocal Raman-LIBS spectrographic detection of pupil processes monitoring device, it is characterised in that: femtosecond laser
Device (15), the laser space-time Shaping Module (16) and two-dimensional scanner (18) for being located at femto-second laser (15) exit direction, are located at
The dichroscope A (5), dichroscope B (6), object lens (7) and precision stage of femto-second laser (15) outgoing beam vertical direction
(10), anti-positioned at the confocal axial monitoring modular (1) of the light splitting pupil of dichroscope A (5) reflection direction and positioned at dichroscope B (6)
Dichroscope C (32), the Raman spectroscopic detection module (26) in direction are penetrated, the LIBS light of dichroscope C (32) reflection direction is located at
It composes detecting module (29), object lens (7) are driven by axial scan device (8)；Being divided the confocal axial monitoring modular (1) of pupil includes laser
(2), positioned at the beam expander (3) of laser (2) exit direction, reflecting mirror (12) and the detection for being located at reflecting mirror (12) reflection direction
Object lens (13) and light splitting pupil detecting module (14), wherein axial monitoring collimated light beam (4) and process laser beam (17) through two to
Look mirror A (5), object lens (7) are coaxially incident on sample (9) surface.
7. the femtosecond laser of the light splitting confocal Raman-LIBS spectrographic detection of pupil according to claim 6 processes monitoring device,
It is characterized by: light splitting pupil detecting module (14) can be by hot spot enlarging objective (19), pin hole (20) and light intensity detector (21) structure
At wherein pin hole (20) is located in the image planes of hot spot enlarging objective (19).
8. the femtosecond laser of the light splitting confocal Raman-LIBS spectrographic detection of pupil according to claim 6 processes monitoring device,
It is characterized by: light splitting pupil detecting module (14) can also by hot spot enlarging objective (19), detection CCD (33), be located at detection CCD
(33) search coverage (35) of image plane center is constituted.
9. the femtosecond laser of the light splitting confocal Raman-LIBS spectrographic detection of pupil according to claim 6 processes monitoring device,
It is characterized by: laser space-time Shaping Module (16) can be made of spacing shaping device (39), temporal shaping device (40), femtosecond is swashed
The laser beam that light device (15) issues carries out the combined regulating of time domain and airspace parameter, improves femtosecond femtosecond laser working ability.
10. the femtosecond laser of the light splitting confocal Raman-LIBS spectrographic detection of pupil according to claim 6 processes monitoring device,
It is characterized by: also observing using micro-imaging module (43) sample (9), wherein micro-imaging module (43) by
White light source (41), lighting system (42), illumination spectroscope (44), image-forming objective lens (46), CCD (47) composition；White light source
(41) light issued through lighting system (42), illumination spectroscope (44), dichroscope B (6), after object lens (7) uniform irradiation to sample
On product (9), the light returned through sample (9) is imaged on CCD (47) after illumination spectroscope (44) reflection through imaging len (46).
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| CN110014224A (en) * | 2019-05-14 | 2019-07-16 | 中南大学 | The femtosecond laser high efficient production device of infrared anti-reflection micro-structure |
| CN111551538A (en) * | 2020-05-06 | 2020-08-18 | 中国海洋大学 | LIBS technology-based signal enhancement method for heavy metal detection in aquatic products |
| CN111610179A (en) * | 2020-05-20 | 2020-09-01 | 北京科技大学 | System and method for quickly detecting components LIBS of high-temperature sample in front of furnace |
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