CN202339188U - Collimating laser two-dimensional displacement measurement system - Google Patents
Collimating laser two-dimensional displacement measurement system Download PDFInfo
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- CN202339188U CN202339188U CN 201120492439 CN201120492439U CN202339188U CN 202339188 U CN202339188 U CN 202339188U CN 201120492439 CN201120492439 CN 201120492439 CN 201120492439 U CN201120492439 U CN 201120492439U CN 202339188 U CN202339188 U CN 202339188U
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Abstract
The utility model provides a collimating laser two-dimensional displacement measurement system, which detects laser beams of a laser collimator for transmitting cross laser beams through a first linear array charge coupled device (CCD) laser beam position and line width detection device and a second linear array CCD laser beam position and line width detection device on a receiving target, and transmits detection data to a personal computer (PC) through a control box for processing, so that measurement on displacement variables of a guiding rail in the horizontal direction and the vertical direction is finished and measurement of levelness and torsion of the guiding rail is finished. The collimating laser two-dimensional displacement measurement system has the advantages of being low in cost, easy to operate, convenient to use, fast in measuring and high in measuring accuracy and overcomes the defects of large errors, low accuracy and high cost in the existing technology of straightness measurement of the guiding rail.
Description
Technical field
The utility model belongs to laser measuring technique, is specifically related to collimation laser two-dimension displacement measuring system and utilizes the method for this systematic survey guide rail.
Background technology
The linearity of incisal guide rail, torsion resistance are the important quality index during guide rail is made; The linearity of machine tool guideway, torsion resistance for the precision of equipment and fiduciary level, high-acruracy survey for the precision that improves machine-building and installation, to prolong the machine works life-span most important; Guide rail is as the guiding parts of elevator, and its quality is determining that can elevator safe, comfortable, operation at high speed, and the straightness error of guide rail is the main factor that is determining quality of guide rail.
Present level instrument method, laser interferometer measurement method, autocollimator method to guide rail linearity.
The level meter method is simple to operate, easy to use, cost is lower.But precision is lower, generally can only reach 0.4～0.5mm/m.The general accumulative total that adopts is put point measurement, so accumulative total measuring error and human factor are bigger.Level meter can be measured linearity and the depth of parallelism two guide rail between of guide rail in vertical plane, but measures the linearity difficulty very in the surface level.Use the level meter method of testing, the collection of data and arrangement easy error are because this method is to be measuring object with some fixed sample point on the guide rail, so measuring distance has been grown the authenticity that is difficult to guarantee test result.
Present autocollimator method is to adopt a branch of collimated light source, on tested guide rail, places receiving target, and human eye is estimated the deviation of reading the relative central point of collimated light, and its precision is low, and human factor is bigger.And distance laser receives the disturbance of factors such as atmosphere, vibrations easily, and ambient light is relatively poor according to the observability of strong back laser.
The advantage of laser interferometer is that measuring distance is big, and measuring speed is fast, and measuring accuracy is high, but continuous coverage is carried out the data reason, shows and printed with the employing microcomputer.But itself costs an arm and a leg laser interferometer, also need be equipped with special optical device when carrying out straight line degree measurement with it, according to different measurement ranges, needs to be equipped with the optical device of two cover Linearity Measurement errors, thereby makes whole system expensive.It is inconvenient to add whole system light path adjustment in detection, and this makes it be difficult to popularized.In addition, the inclination in the angled mirrors motion also can influence measuring accuracy.
The utility model content
The purpose of the utility model is big, the low defect of high cost that reaches of precision of existing error in the existing guide rail linearity measuring technique of solution.
For reaching above-mentioned purpose; The utility model provides a kind of collimation laser two-dimension displacement measuring system; Comprise alignment-laser, be seated in being used on the guide rail to be measured receive the receiving target of the laser that this alignment-laser sends, this receiving target obtains the control enclosure of information and receives information that this control enclosure transmits and the PC that this information is handled certainly; Its special character is that said alignment-laser is the laser collimator of emission cross laser bundle; The horizontal light of this cross laser bundle is parallel with the surface level of said guide rail, and its vertical light is vertical with the surface level of said guide rail; At least be provided with on the target surface of said receiving target one be used to detect the horizontal light of said cross laser bundle the first line array CCD laser beam position and live width pick-up unit and be used to measure the second line array CCD laser beam position and the live width pick-up unit of the vertical light of said cross laser bundle; Said receiving target connects through its base and said guide rail are movable, and it can be moved forward and backward along this guide rail; The said first line array CCD laser beam position all connects with said PC through said control enclosure with the live width pick-up unit with the live width pick-up unit and the second line array CCD laser beam position; Said control enclosure mainly accomplish said PC order reception and to the said first line array CCD laser beam position and the control of live width pick-up unit and the second line array CCD laser beam position and live width pick-up unit, the transmission of data and the management of power supply.
This system also includes one and measures target, this measurement target target surface on be provided with a three-linear array CCD laser beam position and live width pick-up unit and one the 4th line array CCD laser beam position and live width pick-up unit at least; Said three-linear array CCD laser beam position and live width pick-up unit are used to receive the horizontal light of said cross laser bundle, and said the 4th line array CCD laser beam position and live width pick-up unit are used to receive the vertical light of said cross laser bundle; Said three-linear array CCD laser beam position and live width pick-up unit and the 4th line array CCD laser beam position and live width pick-up unit all with said control enclosure communication; Said measurement target connects through its base and said guide rail are movable, and it can be moved forward and backward along this guide rail.
Above-mentioned receiving target or measure target and be outside equipped with light shield is provided with the light inlet groove corresponding to the said first line array CCD laser beam position and live width pick-up unit, the second line array CCD laser beam position and live width pick-up unit, three-linear array CCD laser beam position and live width pick-up unit or the 4th line array CCD laser beam position and live width pick-up unit place on the front end face of this light shield.
Along continuous straight runs and the vertical direction setting on the target surface of this receiving target respectively of first line array CCD laser beam position on the above-mentioned receiving target and live width pick-up unit and the second line array CCD laser beam position and live width pick-up unit; Three-linear array CCD laser beam position on the target surface of said measurement target and live width pick-up unit and the 4th line array CCD laser beam position and live width pick-up unit be along continuous straight runs and vertical direction setting on the target surface of this measurement target respectively.
The utility model has the advantages that: cost is lower, and is simple to operate, easy to use, measuring speed is fast, and measuring accuracy is high; Not only can detect the linearity of guide rail; And can detect torsion resistance, promptly bidimensional is measured, but also continuous coverage is carried out data processing, demonstration and printing with the employing microcomputer.
Description of drawings
Below will combine accompanying drawing that the utility model is explained further details:
Fig. 1 is the synoptic diagram of the collimation laser two-dimension displacement measuring system that provides of the utility model.
Fig. 2 is collimation laser two-dimension displacement that the utility model the provides synoptic diagram when measuring remote long guideway system.
The synoptic diagram that Fig. 3 is a receiving target when measuring target the height such as grade is not provided with.
Fig. 4 is the synoptic diagram of light shield.
Fig. 5 is a line array CCD synoptic diagram of being arranged to the L type.
Fig. 6 is the light path synoptic diagram of measuring when semi-transparent semi-reflecting lens are set in the target.
Among the figure: 1, alignment-laser; 2, guide rail to be measured; 3, cross laser bundle; 4, receiving target; 5, measure target; 6, light shield; 7,8, light inlet groove; 9, three-linear array CCD laser beam position and live width pick-up unit; 10, the 4th line array CCD laser beam position and live width pick-up unit; 11, the rear end face of light shield; 12, semi-transparent semi-reflecting lens.
Embodiment
Existing error is big in the existing guide rail linearity measuring technique in order to solve, precision is low and defect of high cost; Present embodiment provides collimation laser two-dimension displacement measuring system as shown in Figure 1; Comprise alignment-laser 1, be seated in being used on the guide rail 2 to be measured receive the receiving target 4 of the laser 3 that this alignment-laser 1 sends and certainly this receiving target obtain the control enclosure of information and receive information that this control enclosure transmits and the PC (not shown) that this information is handled; Wherein, alignment-laser 1 is the laser collimator of emission cross laser bundle 3; The horizontal light of this cross laser bundle is parallel with the surface level of guide rail 2, and its vertical light is vertical with the surface level of guide rail 2; At least be provided with on the target surface of receiving target 4 one be used to measure the horizontal light of cross laser bundle 3 the first line array CCD laser beam position and live width pick-up unit and be used to measure the second line array CCD laser beam position and the live width pick-up unit of the vertical light of cross laser bundle; Receiving target 4 can move forward and backward it along this guide rail 2 through its base and 2 movable connections of guide rail; The said first line array CCD laser beam position all connects with said PC through said control enclosure with the live width pick-up unit with the live width pick-up unit and the second line array CCD laser beam position; Control enclosure mainly accomplish PC order reception and to the first line array CCD laser beam position and the control of live width pick-up unit and the second line array CCD laser beam position and live width pick-up unit, the transmission of data and the management of power supply.
Utilize collimation laser two-dimension displacement measuring system shown in Figure 1; When levelness, torsion resistance and the linearity of guide rail are measured; For obtaining the measurement data of degree of precision; Preferably measure closely short lead rail, detailed process is: laser collimator 1 and receiving target 4 are seated in this closely end, two ends of short lead rail respectively, and this laser collimator 1 projects the cross laser bundle 3 of emission on this receiving target 4; This receiving target 4 is measured the first line array CCD laser beam position and live width pick-up unit and the second line array CCD laser beam position and the live width pick-up unit of the vertical light that is used to measure this cross laser bundle 3 of the horizontal light of this cross laser bundle 3 through being used to of being provided with on it; Survey the position of horizontal light with the vertical light of cross laser bundle of cross laser bundle 3 respectively, and this information is transferred to PC through control enclosure, in the process of measuring; This receiving target 4 connects with short lead rail activity closely through its base; And along this closely short lead rail move forward and backward, realizing, thereby draw the closely two-dimension displacement variable of short lead rail (being vertical direction and horizontal direction) to this closely levelness of short lead rail and measurement of torsion resistance.The two-dimension displacement variable here refers to the variable of guide rail on vertical direction and horizontal direction both direction, according to measurement data, through Computer Processing, just knows the linearity and the levelness of this guide rail.
When measuring remote long guideway; Because laser receives the disturbance of atmosphere bigger when remote; And influenced like vibrations etc. by external environment, minimum in order to drop to this influence, obtain the measurement data of degree of precision; It at a distance is that the disturbance whether a benchmark receiving target 4 observation collimation lasers receive atmosphere is put in the other end of long guideway that present embodiment is employed in; Measure target 5 collimation laser with one and survey, the benefit of doing like this is after disturbance, can come according to the variable quantity of disturbance to compare with measurement result, when the higher coincidence measurement of precision requires, can continue to measure or adopt its detection data; When error can not meet the requirements more greatly, can stop to measure, help the raising of work efficiency.The measurement target of wherein mentioning 5 target surface on be provided with at least one be used to receive the horizontal light of cross laser bundle 3 three-linear array CCD laser beam position and live width pick-up unit, one is used to receive the 4th line array CCD laser beam position and the live width pick-up unit of the vertical light of cross laser bundle 3; This three-linear array CCD laser beam position all connects with PC through control enclosure with the live width pick-up unit with the 4th line array CCD laser beam position with the live width pick-up unit; Measure target 5 and connect, it can be moved forward and backward along this guide rail through its base and guide rail are movable.
For this reason, see also Fig. 2, when measuring remote long guideway; In order to obtain the data of degree of precision and reliability; In system shown in Figure 1, set up one and measured target 5, when measuring, laser collimator 1 and receiving target 4 have been seated in the end, two ends of this remote long guideway respectively; Put measurement target 5 on the remote long track being somebody's turn to do between this laser collimator 1 and the receiving target 4, this laser collimator 1 projects this receiving target 4 with the cross laser bundle of launching 3 and measures on the target 5; This receiving target 4 is measured the first line array CCD laser beam position and live width pick-up unit and the second line array CCD laser beam position and the live width pick-up unit of the vertical light that is used to measure this cross laser bundle 3 of the horizontal light of this cross laser bundle 3 through being used to of being provided with on it; Survey the position of horizontal light with the vertical light of cross laser bundle 3 of cross laser bundle 3 respectively, and this information is transferred to said PC through said control enclosure; This measurement target 5 receives the horizontal light of cross laser bundle 3 through being used to of being provided with on it three-linear array CCD laser beam position and live width pick-up unit and another is used to receive the 4th line array CCD laser beam position and the live width pick-up unit of the vertical light of cross laser bundle 3; Survey the position of horizontal light with the vertical light of cross laser bundle of cross laser bundle 3 respectively, and this information is transferred to said PC through said control enclosure; In the process of measuring, this measurement target 5 connects with remote long guideway is movable through its base, it can be moved forward and backward by this remote long guideway of edge, to realize the measurement to the torsion resistance of this remote long guideway.
In the measuring process; For guaranteeing to measure the incident light that target 5 does not block receiving target 4; The scheme of selecting for use one is shown in Figure 3 will measure settings of staggering in vertical direction of target 5 and receiving target 4, does not promptly wait the height setting, can guarantee that so the vertical light in the cross laser bundle 3 incides on the receiving target 4; At this moment the variation of 4 detection of vertical light of receiving target and disturbance (certainly; As long as be provided with second line array CCD laser beam position and live width pick-up unit on the receiving target 4 this moment) because when vertically light changes, horizontal light also is certain to variation.
Another program is as shown in Figure 6; Be on measurement target 5, to be provided with semi-transparent semi-reflecting lens 12; Make cross laser bundle 3 incide on these semi-transparent semi-reflecting lens 12 after a part see through this semi-transparent semi-reflecting lens 12 and incide on the receiving target 4, another part reflects three-linear array CCD laser beam position and live width pick-up unit and the 4th line array CCD laser beam position and the live width pick-up unit reception detection that supplies on this measurements target 5 vertically downward.This scheme is because semi-transparent semi-reflecting lens 12 Installation and Debugging are complicated, and its error will influence measuring error, and is inapplicable again than scheme one complicacy, not as not waiting high design.
For fear of the interference of exterior light to laser, add light shield 6 at measurement target 5, the zone that formation one is dark relatively makes that observation laser is apparent in view, so can be implemented in than completion under the high light and measures.Simultaneously; Incide and measure on the target 5 in order not influence laser, be provided with light inlet groove 7 and 8 shown in Figure 4 corresponding to three-linear array CCD laser beam position and live width pick-up unit and the 4th line array CCD laser beam position and the live width pick-up unit place measured on the target 5 on the front end face of light shield 6.Light inlet groove 7 with 8 why setting as shown in Figure 3 to be the two vertical each other; Constitute a L shaped shape; Be because; Being provided with of three-linear array CCD laser beam position on the measurement target 5 and live width pick-up unit and the 4th line array CCD laser beam position and live width pick-up unit is as shown in Figure 5; Measure three-linear array CCD laser beam position and live width pick-up unit and the 4th line array CCD laser beam position and along continuous straight runs and the vertical direction setting on the target surface of measuring target 5 respectively of live width pick-up unit on the target 5, constitute a L shaped shape each other.
Certainly; Along continuous straight runs and the vertical direction setting on the target surface of this receiving target 4 respectively of first line array CCD laser beam position on the receiving target 4 and live width pick-up unit and the second line array CCD laser beam position and live width pick-up unit also can constitute a L shaped shape each other.
It should be noted that; In order not influence the detection of 4 pairs of laser beam of receiving target, light shield 6 or be not have rear panel 11, or be that plate 11 is provided with the corresponding light output groove of light inlet groove 7,8 or with rear panel 11 and is designed to printing opacity in the back; Also can whole rear panel 11 be processed like telescope lens barrel form; In a word, quovis modo is not as long as its rear panel 11 printing opacities stop the incident laser of receiving target 4.
First line array CCD laser beam position that present embodiment is selected for use and live width pick-up unit, the second line array CCD laser beam position and live width pick-up unit, three-linear array CCD laser beam position and live width pick-up unit and the 4th line array CCD laser beam position and live width pick-up unit; Can be CN102062579A by publication number; Name is called the utility application of " a kind of detection method and device thereof with line array CCD Laser Measurement bundle position and live width " and knows; Here the line array CCD measuring laser beam position of mentioning and the pick-up unit of live width: comprise programmable device FPGA, line array CCD, power-supply management system, amplifying circuit, A/D change-over circuit (shaping and digital processing circuit); Line array CCD is through the amplifying circuit and the A/D change-over circuit of serial connection are electrically coupled to programmable device FPGA successively; Programmable device FPGA is connected to MCU (control enclosure) again, gives PC by this MCU (control enclosure) with data information transfer at last.
The course of work of the pick-up unit of line array CCD measuring laser beam position and live width is specifically: line array CCD will be beaten laser light signal on its light-sensitive surface and be converted into electric signal and export to the amplification that amplifying circuit carries out signal; Signal after the amplification is digital signal through shaping and digital processing circuit with analog signal conversion; And this digital signal sent into programmable device FPGA; By this programmable device FPGA this digital signal is calculated in real time; And give control enclosure (MCU) through the RS485 bus transfer with result of calculation (storing in the storer), last result of calculation is uploaded to PC and this computer result is handled by this control enclosure (MCU), thereby accomplish whole measuring process by this PC; Wherein, PC is communicated by letter with control enclosure through serial ports or USB mouth.
Control enclosure (MCU) is mainly accomplished the reception of PC order and to the control of CCD apparatus module (pick-up unit of line array CCD measuring laser beam position and live width), the transmission of data and the management of power supply.Control enclosure (MCU) is through serial ports or USB mouth and PC communication.
PC is lost one's life through serial ports or USB oral instructions and is made and receive the measurement data that control enclosure (MCU) transmits CCD apparatus module (pick-up unit of line array CCD measuring laser beam position and live width); And utilize the next data of application software transmission to carry out data analysis and trajectory analysis, and functions such as the preservation of completion corresponding data and printing.
The closely short lead rail of mentioning in present embodiment is different and different according to its residing environment with remote long guideway, and general indoor about 50～60 meters is that laser receives atmospheric disturbance less; The measuring distance of this moment is fit to the described closely short lead rail of present embodiment, and the length that is to say guide rail is called short lead rail during less than 60 meters, is fit to close-in measurement; The length of guide rail is called long guideway during greater than 60 meters, be fit to telemeasurement, and outdoor measuring distance 10 is greater than Mi Yihou; Laser receives atmospheric disturbance bigger; So the length of guide rail is separation with 10 meters, less than 10 meters the short lead rail that is called, greater than 10 meters the long guideway that is called.
More than giving an example only is to the illustrating of the utility model, and does not constitute the restriction to the protection domain of the utility model, everyly all belongs within the protection domain of the utility model with the same or analogous design of the utility model.
Claims (4)
1. collimation laser two-dimension displacement measuring system; Comprise alignment-laser, be seated in being used on the guide rail to be measured receive the receiving target of the laser that this alignment-laser sends, this receiving target obtains the control enclosure of information and receives information that this control enclosure transmits and the PC that this information is handled certainly, it is characterized in that: said alignment-laser is the laser collimator of emission cross laser bundle; The horizontal light of this cross laser bundle is parallel with the surface level of said guide rail, and its vertical light is vertical with the surface level of said guide rail; At least be provided with on the target surface of said receiving target one be used to detect the horizontal light of said cross laser bundle the first line array CCD laser beam position and live width pick-up unit and be used to measure the second line array CCD laser beam position and the live width pick-up unit of the vertical light of said cross laser bundle; Said receiving target connects through its base and said guide rail are movable, and it can be moved forward and backward along this guide rail; Said first line array CCD laser beam position and live width pick-up unit and the second line array CCD laser beam position and live width pick-up unit all with said control enclosure communication; Said control enclosure mainly accomplish said PC order reception and to the said first line array CCD laser beam position and the control of live width pick-up unit and the second line array CCD laser beam position and live width pick-up unit, the transmission of data and the management of power supply.
2. collimation laser two-dimension displacement measuring system as claimed in claim 1; It is characterized in that: this system also includes one and measures target, is provided with a three-linear array CCD laser beam position and live width pick-up unit and one the 4th line array CCD laser beam position and live width pick-up unit on the target surface of this measurement target at least; Said three-linear array CCD laser beam position and live width pick-up unit are used to receive the horizontal light of said cross laser bundle, and said the 4th line array CCD laser beam position and live width pick-up unit are used to receive the vertical light of said cross laser bundle; Said three-linear array CCD laser beam position all connects with said PC through said control enclosure with the live width pick-up unit with the 4th line array CCD laser beam position with the live width pick-up unit; Said measurement target connects through its base and said guide rail are movable, and it can be moved forward and backward along this guide rail.
3. collimation laser two-dimension displacement measuring system as claimed in claim 2; It is characterized in that: said receiving target or measure target and be outside equipped with light shield is provided with the light inlet groove corresponding to the said first line array CCD laser beam position and live width pick-up unit, the second line array CCD laser beam position and live width pick-up unit, three-linear array CCD laser beam position and live width pick-up unit or the 4th line array CCD laser beam position and live width pick-up unit place on the front end face of this light shield.
4. like claim 1 or 2 or 3 described collimation laser two-dimension displacement measuring systems, it is characterized in that: along continuous straight runs and the vertical direction setting on the target surface of this receiving target respectively of first line array CCD laser beam position on the said receiving target and live width pick-up unit and the second line array CCD laser beam position and live width pick-up unit; Three-linear array CCD laser beam position on the target surface of said measurement target and live width pick-up unit and the 4th line array CCD laser beam position and live width pick-up unit be along continuous straight runs and vertical direction setting on the target surface of this measurement target respectively.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120492439 CN202339188U (en) | 2011-12-01 | 2011-12-01 | Collimating laser two-dimensional displacement measurement system |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN 201120492439 CN202339188U (en) | 2011-12-01 | 2011-12-01 | Collimating laser two-dimensional displacement measurement system |
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| CN202339188U true CN202339188U (en) | 2012-07-18 |
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| Application Number | Title | Priority Date | Filing Date |
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| CN 201120492439 Expired - Lifetime CN202339188U (en) | 2011-12-01 | 2011-12-01 | Collimating laser two-dimensional displacement measurement system |
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Cited By (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102506724A (en) * | 2011-12-01 | 2012-06-20 | 西安华科光电有限公司 | Two-dimension displacement measuring system utilizing collimating laser and method utilizing same to measure guide rails |
| CN104006769A (en) * | 2014-05-13 | 2014-08-27 | 苏州金牛精密机械有限公司 | Jig used for detecting planarity of fin tube |
| CN105571530A (en) * | 2015-08-28 | 2016-05-11 | 仲炳华 | Steel bar straightness detector |
| CN106323202A (en) * | 2016-09-28 | 2017-01-11 | 西安交通大学 | Linear feed system's guide rail linearity measuring apparatus and method |
| CN107560587A (en) * | 2017-08-29 | 2018-01-09 | 广州文冲船厂有限责任公司 | A kind of flatness detection method |
| CN114851417A (en) * | 2022-07-06 | 2022-08-05 | 沈阳和研科技有限公司 | Dicing saw |
-
2011
- 2011-12-01 CN CN 201120492439 patent/CN202339188U/en not_active Expired - Lifetime
Cited By (10)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN102506724A (en) * | 2011-12-01 | 2012-06-20 | 西安华科光电有限公司 | Two-dimension displacement measuring system utilizing collimating laser and method utilizing same to measure guide rails |
| CN104006769A (en) * | 2014-05-13 | 2014-08-27 | 苏州金牛精密机械有限公司 | Jig used for detecting planarity of fin tube |
| CN104006769B (en) * | 2014-05-13 | 2017-01-18 | 苏州金牛精密机械有限公司 | Jig used for detecting planarity of fin tube |
| CN105571530A (en) * | 2015-08-28 | 2016-05-11 | 仲炳华 | Steel bar straightness detector |
| CN105571530B (en) * | 2015-08-28 | 2018-06-26 | 珠海交通工程技术有限公司 | Reinforcing bar Linearity surveying device |
| CN106323202A (en) * | 2016-09-28 | 2017-01-11 | 西安交通大学 | Linear feed system's guide rail linearity measuring apparatus and method |
| CN106323202B (en) * | 2016-09-28 | 2018-10-30 | 西安交通大学 | A kind of the guide rail linearity measuring device and method of linear feeding system |
| CN107560587A (en) * | 2017-08-29 | 2018-01-09 | 广州文冲船厂有限责任公司 | A kind of flatness detection method |
| CN107560587B (en) * | 2017-08-29 | 2020-09-01 | 广州文冲船厂有限责任公司 | Flatness detection method |
| CN114851417A (en) * | 2022-07-06 | 2022-08-05 | 沈阳和研科技有限公司 | Dicing saw |
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| C14 | Grant of patent or utility model | ||
| GR01 | Patent grant | ||
| CX01 | Expiry of patent term |
Granted publication date: 20120718 |
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| CX01 | Expiry of patent term |