CN102095388B - System and method for automatically measuring best matching angle of crystals - Google Patents
System and method for automatically measuring best matching angle of crystals Download PDFInfo
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- CN102095388B CN102095388B CN201010606231A CN201010606231A CN102095388B CN 102095388 B CN102095388 B CN 102095388B CN 201010606231 A CN201010606231 A CN 201010606231A CN 201010606231 A CN201010606231 A CN 201010606231A CN 102095388 B CN102095388 B CN 102095388B
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Abstract
The invention discloses a system and method for automatically measuring best matching angle of crystals. The system comprises an optical path subsystem, a motion control subsystem and a data processing subsystem, wherein the optical path subsystem comprises a pulse laser, a spectroscope A, a spectroscope B, a reflecting mirror A, a periscope A, a periscope B, a reflecting mirror B and a spectroscope C; the motion control subsystem is simultaneously used for controlling the rotation of measured crystals as well as the micro-angle drive and the synchronous two-dimensional scanning motion of reflecting mirros in the periscopes A and B; and the data processing subsystem is mainly used for monitoring power readings of a dynamometer A and a dynamometer B, performing quality analysis on laser spot images acquired by a CCD (Charge-Coupled Device), and acquiring collimation data of a laser autocollimator A and a crystal autocollimator B.
Description
Technical field
The present invention relates to optical technology, computer technology, automatic control technology field, relate in particular to a kind of crystal optimum matching angle automatic measurement system and method.
Background technology
In the solid high power laser system, need the KDP crystal is carried out high-precision closely packed school.But before the dress school, need precision measurement through different spatial crystal optimum matching angle under the high power density, and the mensuration of diverse location frequency tripling efficient absolute value, so that reduce dress school difficulty and improve dress school speed.
This device realization is to the automatic measurement at KDP crystal optimum matching angle, and its major function is to realize the collimation control of laser, the automatic collection of measurement data, storage and analysis, integrated debugging collimation, measuring system and high-precision test request.
Summary of the invention
Technical matters to be solved by this invention provides a kind of crystal optimum matching angle automatic measurement system and method.
The present invention adopts following technical scheme:
A kind of crystal optimum matching angle automatic measurement system comprises, light path subsystem and, motion control subsystem and data process subsystem; The light path subsystem comprises, pulsed laser, spectroscope A, spectroscope B; Catoptron A, periscope A, periscope B, catoptron B; Spectroscope C, light path subsystem principle is: after pulsed laser sends laser, by spectroscope A incident beam is divided into two bundles: a branch of inciding on the power meter A; Incide periscope A behind another Shu Guang process spectroscope B and the catoptron A; Light beam incides on the periscope B through behind the tested crystal; Through inciding after the periscope B reflection on the power meter B that is placed on behind the tested crystal; Periscope A and B drive to realize that by motion control subsystem synchronous two-dimensional scan campaign, motion control subsystem also are used for controlling little angle driving of catoptron of rotation, periscope A and the B of tested crystal simultaneously; Said data process subsystem be mainly used in monitoring power meter A and B the power measurement reading, the representation of laser facula of obtaining through CCD is carried out quality analysis, the collimation data of Laser Autocollimator A and crystal autocollimator B is gathered.
Described crystal optimum matching angle method for automatic measurement; May further comprise the steps: (1) is measured and is prepared: build light path; And whether the motion control, the operation of crystal adjustment rack, ccd image collection, autocollimator and the power meter that detect motion platform move normally; If unusual, need debugging or maintenance to reach normal level; And tested crystal put on the shelf, and adjust to test position; Parameter is set;
(2) beam path alignment: through gathering the data of crystal autocollimator B, drive tested crystal adjustment position by motion control subsystem, consistent to guarantee tested crystal with the attitude of heavy caliber standard crystal; Through gathering the data of Laser Autocollimator A, the catoptron among little driving periscope A and the B is to reach incident laser perpendicular to plane of crystal;
(3) the full-automatic multi-point scanning of crystal is measured: each measurement point is gathered 5 pairs of valid data, calculate the optimum matching angle of this point by the processing rule that pre-sets;
(4) assembly average
at calculating tested crystal m * n dot matrix optimum matching angle
The present invention mainly solves 2 problems:
(1) crystal optimum matching angle is confirmed: according to the test result that m * the n dot matrix is arranged at diverse location crystal optimum matching angle, calculate the unified assembly average at crystal optimum matching angle under the high power density;
(2) classification of crystal double frequency efficient is judged: the unified assembly average with crystal optimum matching angle is the basis; Calculate the difference of diverse location crystal optimum matching angle and mean value; And the space lattice of diverse location shg efficiency absolute value is arranged; With the pairing beam quality in diverse location optimum matching angle, adopt the BP neural network algorithm to provide the shg efficiency rank of crystal, judge that according to the shg efficiency rank can crystal use at last.
Description of drawings
The light path of Fig. 1 crystal optimum matching of the present invention angle measuring device and control, data acquisition synoptic diagram;
The unified scan mode explanation of Fig. 2 the present invention: dotted line is a return route, and solid line is for detecting route.
Embodiment
Below in conjunction with specific embodiment, the present invention is elaborated.
As shown in Figure 1, system comprises, light path subsystem and, motion control subsystem and data process subsystem; The light path subsystem comprises, pulsed laser, spectroscope A, spectroscope B; Catoptron A, periscope A, periscope B, catoptron B; Spectroscope C, light path subsystem principle is: after pulsed laser sends laser, by spectroscope A incident beam is divided into two bundles: a branch of inciding on the power meter A; Incide periscope A behind another Shu Guang process spectroscope B and the catoptron A; Light beam incides on the periscope B through behind the tested crystal; Through inciding after the periscope B reflection on the power meter B that is placed on behind the tested crystal; Periscope A and B are driven by motion control subsystem and realize that synchronous two-dimensional scan campaign, motion control subsystem also are used for controlling little angle driving of the catoptron of the rotation of tested crystal, periscope group simultaneously; Said data process subsystem be mainly used in monitoring power meter A and B the power measurement reading, the representation of laser facula of obtaining through CCD is carried out quality analysis, the collimation data of Laser Autocollimator A and the sub-collimator B of crystal is gathered; Accomplish the measurement of the energy change value when different matching angle state of each measurement point on the tested crystal, the data acquisition of crystal autocollimator and processing capacity be exactly when guaranteeing each measurement point tested crystal place attitude be consistent (through the heavy caliber standard crystal for reference to realizing).
The two-dimensional scan motion control of periscope A and B mainly accomplish tested crystal from left to right, the unified measurement function that distributes of the m of measuring sequence * n dot matrix from top to bottom, little angle drive controlling function of the catoptron in the periscope group guarantees that mainly incident laser is perpendicular to tested plane of crystal.
The data processing rule of data process subsystem:
(1) to the data processing rule of power meter A and power meter B
The reception data validity is judged: the corresponding output of power meter A and power meter B energy datum; Singular point is rejected, if power meter A is output as singular point, then corresponding power meter B should put invalid; Otherwise if power meter B is output as singular point; Then corresponding power meter A should put invalidly, i.e. the output of A and B all effectively the time, thinks that just valid data are right.When the valid data of measured angular command control system when surpassing 5 rotates to next measured angular with tested crystal.
For each measurement point x, corresponding energy E1 (being measured by power meter A) is distinguished averaged (i.e. 5 pairs of Validity Test data) with E2 (being measured by power meter B) obtain e1 and e2, further calculate e2 and obtain y divided by the value of e1.Adopt the normalized curve of the matching angle that cubic spline algorithm match y order about x, the x value of correspondence is as the optimum matching angle when finding out peak according to matched curve.For this measurement point x, crystal will rotate, and measure a lot of angles, and its y value of different angles is different.The corresponding angle of the highest y value is the optimum matching angle of this measurement point;
The number of times of the energy ratio that calculates the duplicate measurements matching angle also can be set, be not necessarily 5 times.Can in 3～50, be provided with arbitrarily.5 times is to draw a balance result between test duration and measuring accuracy in the experiment.
Unified assembly average with the crystal optimum matching angle of each measurement point is the basis; Calculate the difference of diverse location crystal optimum matching angle and mean value; And the m of diverse location shg efficiency absolute value * n dot matrix arranges, and calculate unified in this crystal frequency tripling efficient that can realize.
(2) laser beam quality analysis
To being incident in the light spot image of CCD, extract the parameters such as barycenter, energy distribution of this laser facula, analyze beam quality.Through distribution curve (each measurement point, all corresponding one group beam quality parameter of these parameters with each point.So just constituted a series of distribution curves) analyze the beam quality of each measurement point, with these data as one of input data of the good and bad classification of crystal double frequency efficient.
(3) the good and bad classification rule of crystal double frequency efficient
Unified assembly average with crystal optimum matching angle is the basis; Calculate the difference of diverse location crystal optimum matching angle and mean value; And the space lattice of diverse location shg efficiency absolute value is arranged; With the pairing beam quality parameter in diverse location optimum matching angle (barycenter of hot spot, energy distribution), adopt the BP neural network algorithm to provide the shg efficiency rank of crystal.
The classification of crystal double frequency efficient is judged: the unified assembly average with crystal optimum matching angle is the basis; Calculate the difference of diverse location crystal optimum matching angle and mean value; And the space lattice of diverse location shg efficiency absolute value is arranged; And derive the frequency tripling efficient that unified interior this crystal can be realized, judge that according to the shg efficiency rank can crystal use.
Measure flow process:
(1) measure to prepare by the light path of building shown in Figure 1, and whether the equipment such as motion control, the operation of crystal adjustment rack, ccd image collection, autocollimator and power meter that detect motion platform moves normally,, need debug or keep in repair to reach normal level if unusual; And tested crystal put on the shelf, and adjust to test position.In software systems m, the value of n and the size of crystal among test dot matrix m * n are set, system will be provided with the step pitch of two-dimensional scan automatically according to the parameter of input.
(2) beam path alignment is through gathering Laser Autocollimator A data, and the catoptron in little driving periscope group is to reach incident laser perpendicular to plane of crystal.Through gathering crystal autocollimator B data, drive tested crystal adjustment rack, consistent to guarantee tested crystal with the attitude of heavy caliber standard crystal.
(3) the full-automatic multi-point scanning of crystal is measured, and adopts scanning sequency as shown in Figure 2, before to every some test, need carry out the beam path alignment of step 2.Each matching angle of measurement point need have 5 pairs of valid data, calculates the optimum matching angle of this point by aforesaid data processing rule.The incremental amplitude of matching angle can be provided with arbitrarily by system.Drive periscope A and periscope B completion multi-point scanning by the two-dimensional scan control system.
(4) assembly average
at the m * tested crystal optimum matching of n dot matrix angle adopts aforesaid data processing rule to calculate, and provides test report.
Among the present invention, realization be the measurement of m * n dot matrix, the system that has possibly not need so many measurement points, but adopts 9 methods of testing (promptly 3 * 3, just can not need the two dimensional motion control system).The precision of motion control subsystem and the precision of collimator are influential to the measuring accuracy of system, so the hardware combinations of different accuracy, can develop the equipment of measurement series precision.
Should be understood that, concerning those of ordinary skills, can improve or conversion, and all these improvement and conversion all should belong to the protection domain of accompanying claims of the present invention according to above-mentioned explanation.
Claims (2)
1. a crystal optimum matching angle automatic measurement system is characterized in that, comprises light path subsystem, motion control subsystem and data process subsystem; The light path subsystem comprises, pulsed laser, spectroscope A, spectroscope B; Catoptron A, periscope A, periscope B, catoptron B; Spectroscope C, light path subsystem principle is: after pulsed laser sends laser, by spectroscope A incident beam is divided into two bundles: a branch of inciding on the power meter A; Incide periscope A behind another Shu Guang process spectroscope B and the catoptron A; Light beam through after the periscope A reflection incides on the periscope B through behind the tested crystal; Through inciding catoptron B after the periscope B reflection; Through inciding spectroscope C after the catoptron B reflection, through one tunnel entering CCD after the spectroscope C beam split, one tunnel entering is placed on the power meter B behind the tested crystal; Periscope A and B drive to realize that by motion control subsystem synchronous two-dimensional scan campaign, motion control subsystem also are used for controlling little angle driving of catoptron of rotation, periscope A and the B of tested crystal simultaneously; Said data process subsystem be mainly used in monitoring power meter A and B the power measurement reading, the representation of laser facula of obtaining through CCD is carried out quality analysis, the collimation data of Laser Autocollimator A and crystal autocollimator B is gathered.
2. use the described crystal optimum matching of claim 1 angle automatic measurement system to carry out crystal optimum matching angle method for automatic measurement; It is characterized in that; May further comprise the steps: (1) is measured and is prepared: build light path; And whether the motion control, the operation of crystal adjustment rack, ccd image collection, autocollimator and the power meter that detect motion platform move normally, if unusual, need debug or keep in repair to reach normal level; And tested crystal put on the shelf, and adjust to test position; Parameter is set;
(2) beam path alignment: through gathering the data of crystal autocollimator B, drive tested crystal adjustment position by motion control subsystem, consistent to guarantee tested crystal with the attitude of heavy caliber standard crystal; Through gathering the data of Laser Autocollimator A, the catoptron among little driving periscope A and the B is to reach incident laser perpendicular to plane of crystal;
(3) the full-automatic multi-point scanning of crystal is measured: each measurement point is gathered 5 pairs of valid data, calculate the optimum matching angle of this point by the processing rule that pre-sets; For each measurement point x, with corresponding energy E1 and E2 respectively averaged obtain e1 and e2, further calculate e2 and obtain y divided by the value of e1; Wherein, Energy E 1 is measured by power meter A, and energy E 2 is measured by power meter B, and mean value is that 5 pairs of valid data are carried out result calculated; For this measurement point x; Crystal need rotate, and measure a lot of angles, and its y value of different angles is different; Adopt the normalized curve of the matching angle that cubic spline algorithm match y order about x, find out the optimum matching angle of the angle of peak correspondence as this measurement point according to matched curve;
(4) assembly average at calculating tested crystal m * n dot matrix optimum matching angle
θ
IjFor crystal being carried out the optimum matching angle of full-automatic m * n lattice scanning each measurement point when measuring.
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| CN201010606231A CN102095388B (en) | 2010-12-27 | 2010-12-27 | System and method for automatically measuring best matching angle of crystals |
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| CN201010606231A CN102095388B (en) | 2010-12-27 | 2010-12-27 | System and method for automatically measuring best matching angle of crystals |
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Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN103278128B (en) * | 2013-05-17 | 2015-11-04 | 中国工程物理研究院激光聚变研究中心 | One is KDP crystal optimum matching angle accurate measurement method fast |
| CN104483098B (en) * | 2014-11-20 | 2017-07-18 | 中国工程物理研究院激光聚变研究中心 | Crystal match angle off-line measurement error real-time correcting method |
| CN108572061B (en) * | 2018-07-23 | 2023-10-13 | 中国工程物理研究院激光聚变研究中心 | Full-caliber harmonic conversion efficiency measuring system and measuring method thereof |
| CN111442743A (en) * | 2020-05-27 | 2020-07-24 | 中科院南京天文仪器有限公司 | Wedge-shaped flat plate included angle measuring device and method based on photoelectric autocollimator |
| CN113376857B (en) * | 2021-06-08 | 2023-05-05 | 福州市纳飞光电科技有限公司 | High-precision optical path debugging device and method |
| CN114413794B (en) * | 2022-01-29 | 2023-09-22 | 中国工程物理研究院激光聚变研究中心 | System and method for measuring optimal phase matching angle of large-caliber KDP crystal |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1258843A (en) * | 1999-12-16 | 2000-07-05 | 中国科学院上海光学精密机械研究所 | Method for measuring parametric amplification phase matching angle of crystal |
| US6614584B1 (en) * | 2000-02-25 | 2003-09-02 | Lambda Physik Ag | Laser frequency converter with automatic phase matching adjustment |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2898720B2 (en) * | 1990-08-28 | 1999-06-02 | パイオニア株式会社 | Optical nonlinearity generator |
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Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN1258843A (en) * | 1999-12-16 | 2000-07-05 | 中国科学院上海光学精密机械研究所 | Method for measuring parametric amplification phase matching angle of crystal |
| US6614584B1 (en) * | 2000-02-25 | 2003-09-02 | Lambda Physik Ag | Laser frequency converter with automatic phase matching adjustment |
Non-Patent Citations (3)
| Title |
|---|
| J.Q.Yao etal..Calculations of optimum phase match parameters for the biaxial crystal KTIOPO4.《J.Appl.Phys.》.1984,第55卷(第1期),第65-68页. * |
| JP平4-107434A 1992.04.08 |
| 宋常立等.一水甲酸锂最佳相位匹配角的计算.《光学学报》.1982,第2卷(第5期),第468-472页. * |
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