CN111442743A - Wedge-shaped flat plate included angle measuring device and method based on photoelectric autocollimator - Google Patents
Wedge-shaped flat plate included angle measuring device and method based on photoelectric autocollimator Download PDFInfo
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- CN111442743A CN111442743A CN202010460829.5A CN202010460829A CN111442743A CN 111442743 A CN111442743 A CN 111442743A CN 202010460829 A CN202010460829 A CN 202010460829A CN 111442743 A CN111442743 A CN 111442743A
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- wedge
- flat plate
- shaped flat
- included angle
- photoelectric autocollimator
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
Abstract
The invention discloses a method for measuring a large-caliber wedge-shaped flat plate included angle based on a photoelectric autocollimator, which sequentially comprises the photoelectric autocollimator, a wedge-shaped flat plate first working surface and a wedge-shaped flat plate second working surface along the incident direction of light rays, wherein the photoelectric autocollimator is arranged on a two-dimensional translation device. Based on the basic optical principle of optical autocollimation, the invention utilizes the photoelectric autocollimator to perform multi-point scanning measurement on the wedge-shaped flat plate, thereby obtaining the included angle data of multiple measurement points, solving the mean value of included angle data, and finally obtaining the included angle of the wedge-shaped plate. The method can be used for measuring wedge plate elements with larger calibers, the multi-point measurement can inhibit the surface shape error caused by the surface shape of the wedge plate with a large calibre, and simultaneously reduces the accuracy requirement on the adjustment of the device.
Description
Technical Field
The invention relates to the technical field of optical engineering, in particular to a method for measuring a large-caliber wedge-shaped flat plate included angle based on a photoelectric autocollimator.
Background
The angle measurement is an important content in the measurement science, and the angle measurement is required to be accurately carried out in many fields such as precision machining, aerospace, military, communication and the like, and has extremely important significance and effect. The optical angle measurement method has the characteristics of high accuracy and high sensitivity through non-contact measurement, and is emphasized by people, particularly, the condition of measurement work is reduced along with the development of a laser light source, so that the optical angle measurement method is more and more widely applied.
At present, instruments for measuring the included angle of an optical element mainly comprise an autocollimator, an interferometer, a rotating table, a three-coordinate measuring instrument, a laser tracker and the like, wherein the laser tracker, the rotating table and the like can be generally used for large-angle measurement, but the cost is high and the popularization is difficult to achieve in a large scale, the three-coordinate measuring instrument and the laser tracker are contact type measuring devices and have the defects of easy pollution and damage to the surface of the element to be measured, the interferometer and the autocollimator can precisely measure the relative position angle deviation of various parts, the flatness measurement of a large flat plate and the like, but the three-coordinate measuring instrument and the laser tracker are generally only suitable for small-angle measurement in the metering field due to the limitation of small view field range.
Disclosure of Invention
The invention provides a wedge-shaped flat plate included angle measuring device and method based on a photoelectric autocollimator, and aims to solve the problems that the existing wedge plate measurement can only measure small-caliber original parts, the debugging equipment is complex, the measuring precision is low, and the error is large.
The technical scheme of the invention is as follows:
the device comprises a photoelectric autocollimator, a wedge-shaped flat plate first working surface and a wedge-shaped flat plate second working surface in sequence along the incident direction of light rays, wherein the photoelectric autocollimator is arranged on a two-dimensional translation device.
Furthermore, the rail-type two-dimensional translation mechanism of the two-dimensional translation device comprises a transverse translation rail and a longitudinal translation rail.
A wedge-shaped flat plate included angle measurement method based on a photoelectric autocollimator comprises the following steps:
the method comprises the following steps: mounting the photoelectric autocollimator on a two-dimensional translation device;
step two: the photoelectric autocollimator emits light beams, and the light beams are split by a first working surface of the wedge-shaped flat plate to form a first light beam and a second light beam;
step three: the first light beam is reflected by the first working surface and returns to the photoelectric autocollimator, and the deflection angle theta is obtained by the measurement of the photoelectric autocollimator1(x1,y1)；
Step four: the second light beam is transmitted from the first working surface to the second working surface, reflected by the second working surface, transmitted by the first working surface, received by the photoelectric autocollimator, and measured to obtain a deflection angle theta2(x1,y1) And further obtain (x)1,y1) Angle between two surfaces delta theta at test point1(x1,y1)；
Step five: scanning the wedge-shaped flat plate area by using a two-dimensional translation device until the whole area is measured; repeating the process of the third step and the fourth step to obtain a group of included angle measured values delta theta1(x1,y1)，Δθ2(x2,y2)，…….Δθn(xn,yn)；
Step six: and D, averaging the measured values of the included angles of the groups in the step five, so as to obtain the included angles of the two surfaces of the wedge-shaped flat plate.
Furthermore, in the fourth step, a formula is used
Calculate (x)1,y1) Angle between two surfaces delta theta at test point1(x1,y1)。
Furthermore, the wedge-shaped flat plate is subjected to multi-point scanning measurement by using the photoelectric autocollimator, so that included angle data of multiple measurement points are obtained, the included angle data is averaged, and finally the included angle of the wedge-shaped plate is obtained.
Compared with the prior art, the invention has the following remarkable advantages: based on the basic optical principle of optical autocollimation, the invention utilizes the photoelectric autocollimator to perform multi-point scanning measurement on the wedge-shaped flat plate, thereby obtaining the included angle data of multiple measurement points, solving the mean value of included angle data, and finally obtaining the included angle of the wedge-shaped plate. The scheme overcomes the limitation that the conventional photoelectric autocollimator can only be used for small-caliber small-angle measurement, can be used for measuring wedge plate elements with larger calibers, can inhibit surface shape errors caused by the surface shape of a large-caliber wedge plate through multi-point measurement, and simultaneously reduces the accuracy requirement on device adjustment.
Drawings
FIG. 1 is a two-dimensional schematic diagram of an autocollimator detecting wedge plate to be detected;
FIG. 2 is a front view of a wedge plate to be detected for autocollimator detection;
FIG. 3 is a schematic diagram of the optical path;
figure 4 is a schematic view of an autocollimator scanning the entire wedge plate.
In the figure: 1. a two-dimensional translation device; 2. a photoelectric autocollimator; 3. a wedge-shaped flat plate; 4. a wedge-shaped flat plate first working surface; 5. a wedge-shaped flat plate second working surface.
Detailed Description
The following provides a more detailed description of the embodiments and the operation of the present invention with reference to the accompanying drawings.
The embodiment provides a dull and stereotyped contained angle measuring device of wedge based on photoelectric autocollimator as shown in fig. 1-2, and this wedge flat board 3 is the shape for the wedge mirror body that awaits measuring, including wedge flat board first working face 4 and wedge flat board second working face 5, along the direction of light incidence, the device includes photoelectric autocollimator 2 in proper order, wedge flat board first working face 4, wedge flat board second working face 5, and photoelectric autocollimator 2 installs on two-dimentional translation device 1. In this embodiment, two-dimensional translation device 1 mainly used following photoelectric autocollimator 2's two-dimensional motion, transverse motion and longitudinal motion, can realize two-dimensional motion's device among the prior art a lot, and common rail mounted two-dimensional translation mechanism is chooseed for use to this embodiment, as shown in fig. 1, this rail mounted two-dimensional translation mechanism includes transverse translation track, longitudinal translation track, bottom platform, and the bottom platform can be controlled from top to bottom and remove by a wide margin.
As shown in fig. 3, the measuring method of the wedge-shaped flat plate included angle measuring device is as follows:
the method comprises the following steps: mounting a photoelectric autocollimator 2 on a two-dimensional translation device 1;
step two: the photoelectric autocollimator 2 emits light beams, and the light beams are split by the first working surface 4 of the wedge-shaped flat plate to form a first light beam and a second light beam;
step three: the first light beam is reflected by the first working surface 4 of the wedge-shaped flat plate and returns to the photoelectric autocollimator 2, and the deflection angle theta is measured by the photoelectric autocollimator 21(x1,y1)；
Step four: the second light beam is transmitted from the first working surface 4 of the wedge-shaped flat plate to be incident to the second working surface 5 of the wedge-shaped flat plate, is reflected by the second working surface 5 of the wedge-shaped flat plate, is transmitted by the first working surface 4 of the wedge-shaped flat plate, is received by the photoelectric autocollimator 2, and measures the deflection angle theta2(x1,y1) Using the formula
Calculate (x)1,y1) Angle between two surfaces delta theta at test point1(x1,y1)；
Step five: the wedge plate 3 is scanned over the area using the two-dimensional translation device (1), as shown in fig. 4, until the entire area is measured. Repeating the process of the third step and the fourth step to obtain a group of included angle measured values delta theta1(x1,y1)，Δθ2(x2,y2)，…….Δθn(xn,yn)；
Step six: and finally, averaging the measured values of the included angles of the groups in the step five, so as to obtain the included angles of the two surfaces of the wedge-shaped flat plate.
In summary, the invention provides a wedge plate included angle measuring device and method based on a photoelectric autocollimator, which can use the photoelectric autocollimator to measure the wedge angle of a large-caliber wedge plate, and the main components comprise a two-dimensional translation guide rail, the photoelectric autocollimator and a wedge plate to be measured; the light beam emitted by the photoelectric autocollimator is split by the first working surface of the wedge-shaped flat plate to form a first light beam and a second light beam, the first light beam and the second light beam are respectively reflected back to the photoelectric autocollimator by the first working surface and the second working surface of the wedge-shaped flat plate, the deflection angles of the two working surfaces are measured, and the included angles of the two sub-surfaces are calculated; and scanning the wedge-shaped flat plate region by using a two-dimensional translation guide rail until the included angle of each test point position in the whole wedge-shaped flat plate region is measured, averaging the included angle data solved by each test point position, and finally obtaining the included angles of two surfaces of the wedge-shaped flat plate.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the present invention. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (5)
1. Wedge dull and stereotyped contained angle measuring device based on photoelectricity autocollimator, its characterized in that: the device comprises a photoelectric autocollimator (2), a wedge-shaped flat plate first working surface (4) and a wedge-shaped flat plate second working surface (5) in sequence along the incident direction of light rays, wherein the photoelectric autocollimator (2) is arranged on a two-dimensional translation device (1).
2. The wedge-shaped flat plate included angle measuring device based on the photoelectric autocollimator of claim 1, which is characterized in that: the rail type two-dimensional translation mechanism of the two-dimensional translation device (1) comprises a transverse translation rail and a longitudinal translation rail.
3. A wedge-shaped flat plate included angle measurement method based on a photoelectric autocollimator comprises the following steps:
the method comprises the following steps: mounting a photoelectric autocollimator (2) on a two-dimensional translation device (1);
step two: the photoelectric autocollimator (2) emits light beams, and the light beams are split by a first working surface (4) of the wedge-shaped flat plate to form a first light beam and a second light beam;
step three: the first light beam is reflected by the first working surface (4) and returns to the photoelectric auto-collimationAn instrument (2) for obtaining a deflection angle theta by the measurement of the photoelectric autocollimator (2)1(x1，y1)；
Step four: the second light beam is transmitted from the first working surface (4) to enter the second working surface (5), is reflected by the second working surface (5), is transmitted by the first working surface (4), is received by the photoelectric autocollimator (2), and the deflection angle theta is measured2(x1，y1) And further obtain (x)1，y1) Angle between two surfaces delta theta at test point1(x1，y1)；
Step five: scanning the wedge-shaped flat plate (3) by using a two-dimensional translation device (1) until the whole area is measured; repeating the process of the third step and the fourth step to obtain a group of included angle measured values delta theta1(x1，y1)，Δθ2(x2，y2)，…….Δθn(xn，yn)；
Step six: and D, averaging the measured values of the included angles of the groups in the step five, so as to obtain the included angles of the two surfaces of the wedge-shaped flat plate.
4. The method for measuring the included angle of the wedge-shaped flat plate based on the photoelectric autocollimator of claim 3, which comprises: in the fourth step, the formula is utilized
Calculate (x)1，y1) Angle between two surfaces delta theta at test point1(x1，y1)。
5. The method for measuring the included angle of the wedge-shaped flat plate based on the photoelectric autocollimator of claim 3, which comprises: the wedge-shaped flat plate is subjected to multi-point scanning measurement by using the photoelectric autocollimator, so that included angle data of multiple measurement points are obtained, the included angle data is averaged, and finally the included angle of the wedge-shaped plate is obtained.
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| CN202010460829.5A CN111442743A (en) | 2020-05-27 | 2020-05-27 | Wedge-shaped flat plate included angle measuring device and method based on photoelectric autocollimator |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113203639A (en) * | 2021-04-21 | 2021-08-03 | 华中科技大学 | Torsion testing device for microscale material |
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Application publication date: 20200724 |