CN208720994U - A kind of lathe five degree of freedom error measuring means - Google Patents
A kind of lathe five degree of freedom error measuring means Download PDFInfo
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Abstract
The utility model discloses a kind of lathe five degree of freedom error measuring means, including fixing end and mobile terminal, fixing end is equipped with first laser device, second laser, third laser, spectroscope, condenser lens and Position-Sensitive Detector, and mobile terminal is equipped with the first 4 quadrant detector, the second 4 quadrant detector and plane mirror；First laser device, second laser, third laser emitting light are parallel, wherein first laser device and the directional light of second laser outgoing are radiated at the first 4 quadrant detector and the second 4 quadrant detector respectively, first 4 quadrant detector and the second 4 quadrant detector can measure the straightness error of both direction, it, can be in the hope of roll angle using the straightness error that two 4 quadrant detectors measure in the case where the first 4 quadrant detector and the second 4 quadrant detector distance；The directional light of third laser emitting focuses on Position-Sensitive Detector through reflecting condenser lens, and Position-Sensitive Detector measures pitch angle and deflection angle.
Description
Technical field
The utility model belongs to machine tool error fields of measurement, especially lathe five degree of freedom error measuring means.
Background technique
The machining accuracy of numerically-controlled machine tool is the core of lathe, and it is to improve machine finish that machine tool error, which is measured and compensated,
One of important means.Traditional machine tool error measurement method has laser interferometer detection method, double gauge ball methods, laser tracking interferometer
The high-acruracy survey of machine tool error has may be implemented in detection method etc., these methods, it can be difficult to realizing multinomial geometric error
It measures simultaneously, and is only used for static measurement.In process, there is more than static error, there are also dynamics accidentally for numerically-controlled machine tool
Difference, i.e. random error, it is therefore desirable to which real-time measurement is carried out to NC Machine Error.
Three axis numerically controlled machine has 4 kinds of structures, respectively TXYZ, XTYZ, XYTZ and XYZT, wherein and tee indicates cutter,
X, Y, Z indicates coordinate axis, each letter before T indicate the direction of motion of the workpiece relative to fixed pedestal, and the subsequent letter of T indicates
The direction of motion of the cutter relative to fixed pedestal.For common XYTZ type numerically-controlled machine tool, a lathe single shaft five is had developed certainly
By degree error measuring means, which can on-line measurement single shaft five degree of freedom error, including pitch angle, roll angle, beat simultaneously
Angle and two straightness errors.Think that the precision of lathe grating scale is sufficiently high, therefore uniaxial position error is without measurement.Lathe three
The error of perpendicularity in a axis between every two axis uses laser interferometer measurement, thinks that verticality is missed during lathe work
Difference is invariable.Three axis numerically controlled machine shares 21 geometric errors, dry using three sets of five degree of freedom error measuring means and laser
Interferometer can be determined all.
To realize machine tool error compensation work, needs to establish machine tool error model, measured 21 geometry are missed
Difference substitutes into model, to calculate the space error in tri- directions lathe X, Y, Z.Current lathe spatial error model mainly uses
Homogeneous coordinate transformation method, but the theory is derived based on kinematics of mechanism, and analytic process does not follow abbe's principle, Bu Lai
Grace principle causes the space error analyzed to have differences with actual measured value.For traditional homogeneous coordinate transformation model, examine
The influence for considering error measure point deviation, is modified model.Consider that the error measure point of five degree of freedom error measuring means is inclined
Position carries out revised homogeneous coordinate transformation model further perfect.
Utility model content
The purpose of this utility model is to overcome deficiencies in the prior art, provide a kind of lathe five degree of freedom error survey
Measure device.The utility model be directed to traditional homogeneous coordinate transformation model, consider error measure point deviation influence, to model into
Row amendment.Consider five degree of freedom error measuring means error measure point deviation, to revised homogeneous coordinate transformation model into
Row is further perfect.
The purpose of this utility model is achieved through the following technical solutions:
A kind of lathe five degree of freedom error measuring means, including fixing end and mobile terminal, the fixing end are equipped with first
Laser, second laser, third laser, spectroscope, condenser lens and Position-Sensitive Detector, mobile terminal are equipped with first
4 quadrant detector, the second 4 quadrant detector and plane mirror；First laser device, second laser, third laser emitting light
In parallel, wherein first laser device and the directional light of second laser outgoing are radiated at the first 4 quadrant detector and the two or four respectively
Quadrant detector, the first 4 quadrant detector and the second 4 quadrant detector can measure the straightness error of both direction,
Meanwhile in the case where known first 4 quadrant detector and the second 4 quadrant detector distance, two Quadrant detectors are utilized
The straightness error of device measurement can be in the hope of roll angle；The directional light of third laser emitting is radiated on plane mirror, reflected light
Reflected through spectroscope, line focus lens focus on Position-Sensitive Detector, Position-Sensitive Detector to measure pitch angle with
Deflection angle.
Compared with prior art, beneficial effect brought by the technical solution of the utility model is:
(1) the utility model establishes lathe traditional homogeneous coordinate transformation model and points out the deficiency of the model, i.e. model is built
Abbe deviation and influence of the Brian deviation to error measurement are not considered during vertical；
(2) utility model device can carry out revised homogeneous coordinate transformation model further perfect, can be direct
It is compensated for five degree of freedom error measuring means on-line measurement.
Detailed description of the invention
Fig. 1 is XYTZ type machine tool structure schematic diagram.Wherein 1 is X slide unit, and 2 be X-ray grid ruler, and 3 be X-ray grid ruler reading head, and 4 be Y
Slide unit, 5 be Y grating scale, and 6 be Y grating ruler reading head, and 7 be Z slide unit, and 8 be Z grating scale, and 9 be Z grating ruler reading head, and 10 be cutter, 11
It is column for pedestal, 12, X slide unit, Y slide unit, the direction of motion of Z slide unit are as shown by arrows in figure.The upper right corner is world coordinate system,
Change in coordinate axis direction is identical as the slide unit direction of motion.
Fig. 2 is coordinate system schematic diagram on XYTZ type lathe.Reference frame R is wherein established on the base, it is sliding in X respectively
Platform, Z slide unit, establishes local coordinate system X, Y, Z, T on cutter at Y slide unit, and direction is consistent with reference frame R.As shown in Fig. 2,
When lathe initial position, the origin of coordinate system R, X, Y, Z, T are overlapped and are located at cutter tip point.Reference frame R is invariable, office
Portion coordinate system X, Y, Z, T change with each slide unit, cutter movement.Think that cutter and Z slide unit relative positional relationship are constant.The upper right corner
For world coordinate system, change in coordinate axis direction is identical as initial each coordinate system direction.
Fig. 3 is 21 error schematic diagrames of lathe.Each axis has 6 freedom degree errors, there is a verticality between every two axis
Error.Wherein, δxxFor X-axis position error, δyxFor the straightness error of X-axis Y-direction, δzxFor the straightness error of X-axis Z-direction,
εxxFor X-axis roll angle, εyxFor X-axis pitch angle, εzxFor X-axis deflection angle, δyyFor Y-axis position error, δxyFor Y-axis X-direction straight line
Spend error, δzyFor Y-axis Z-direction straightness error, εyyFor Y-axis roll angle, εxyFor Y-axis pitch angle, εzyFor Y-axis deflection angle, δzz
For Z axis position error, δxzFor Z axis X-direction straightness error, δyzFor Z axis Y-direction straightness error, εzzFor Z axis roll angle, εxz
For Z axis pitch angle, εyzFor Z axis deflection angle, αxyVerticality between X-axis and Y-axis, αxzVerticality between X-axis and Z axis,
αyzVerticality between Y-axis and Z axis.Position error, straightness error provide that error identical with reference axis positive direction is positive；
Roll angle, pitch angle, deflection angle are positive and negative to be determined according to right-handed helix criterion；The benchmark of the error of perpendicularity is X-axis, the error of perpendicularity
It is positive and negative be defined as with two axis forward direction angles increase be positive.The above error is the error at each coordinate origin.X, Y, Z of lathe
The space error in direction uses E respectivelyx、Ey、EzIt indicates.
Fig. 4 is X-axis error measure schematic diagram.Error uses laser interferometer measurement, and 13 reflect for laser interferometer measurement
Mirror, because measurement reflecting mirror is difficult to be placed on cutter tip point, the position error that measures, the straightness error of Y-direction, the side Z
To the error of straightness error and above-mentioned cutter tip point have differences, if the position error of laser interferometer measurement is δxxc、Y
The straightness error in direction is δyxc, Z-direction straightness error be δzxc, lathe is in initial position, laser interferometer measurement
The deviation of reflecting mirror to cutter tip point X-direction is Lxx0, the deviation of laser interferometer measurement reflecting mirror to cutter tip point Y-direction is
Lyx0, the deviation of laser interferometer measurement reflecting mirror to cutter tip point Z-direction is Lzx0.Similarly, when Y-axis error measure, it is fixed to exist
Position error deltayyc, X-direction straightness error δxyc, Z-direction straightness error δzyc, when initial position, laser interferometer measurement
The deviation of reflecting mirror to cutter tip point X-direction is Lxy0, the deviation of laser interferometer measurement reflecting mirror to cutter tip point Y-direction is
Lyy0, the deviation of laser interferometer measurement reflecting mirror to cutter tip point Z-direction is Lzy0；When Z axis error measure, there are position errors
δzzc, X-direction straightness error δxzc, Y-direction straightness error δyzc, when initial position, laser interferometer measurement reflecting mirror
Deviation to cutter tip point X-direction is Lxz0, the deviation of laser interferometer measurement reflecting mirror to cutter tip point Y-direction is Lyz0, swash
The deviation that optical interferometer measures reflecting mirror to cutter tip point Z-direction is Lzz0, instrumentation plan is similar with X-axis, and no longer attached drawing is said
It is bright.When modeling, consider that slide unit, pedestal, cutter are rigid body, angular error measurement result is uniform when slide unit any position measures
It causes.
Fig. 5 is the deviation figure of X-ray grid ruler reading head.Wherein, LxxsFor X-ray grid ruler reading head to the deviation of cutter tip point X-direction,
LyxsFor X-ray grid ruler reading head to the deviation of cutter tip point Y-direction, LzxsFor X-ray grid ruler reading head to the deviation of cutter tip point Z-direction.
Similarly, LxysFor Y grating ruler reading head to the deviation of cutter tip point X-direction, LyysFor Y grating ruler reading head to cutter tip point Y-direction
Deviation, LzysFor Y grating ruler reading head to the deviation of cutter tip point Z-direction；LxzsFor Z grating ruler reading head to cutter tip point X-direction
Deviation, LyzsFor Z grating ruler reading head to the deviation of cutter tip point Y-direction, LzzsFor Z grating ruler reading head to cutter tip point Z-direction
Deviation, deviation figure, the deviation figure of Z grating ruler reading head of Y grating ruler reading head are similar with Fig. 5, no longer Detailed description of the invention.
Fig. 6 is the schematic diagram that X-axis uses five degree of freedom error measuring means.Wherein five degree of freedom error measuring means is divided into
Two parts, 14 be five degree of freedom error measuring means fixing end, is mounted on Y slide unit 4, and 15 be five degree of freedom error measuring means
Mobile terminal is mounted on X slide unit 1, measurement be X-ray grid ruler reading head position error, the wherein error of X-ray grid ruler reading head position
There is the straightness error δ of Y-directionyxs, Z-direction straightness error δzxs, roll angle εxx, pitch angle εyx, deflection angle εzx, positioning
Error is ignored；Similarly, Y-axis use five degree of freedom error measuring means when, measurement be Y grating scale reading head location mistake
Difference, wherein the error of Y grating scale reading head location has the straightness error δ of X-directionxys, Z-direction straightness error δzys, rolling
Angle εyy, pitch angle εxy, deflection angle εzy, position error ignores；Similarly, when Z axis uses five degree of freedom error measuring means,
What is measured is the error of Z grating scale reading head location, and wherein the error of Z grating scale reading head location has the straightness error of X-direction
δxzs, Y-direction straightness error δyzs, roll angle εzz, pitch angle εxz, deflection angle εyz, position error ignores.
Fig. 7 is five degree of freedom error measuring means structural schematic diagram.Wherein 16 be first laser device, and 17 be second laser
Device, 18 be third laser, and 19 be spectroscope, and 20 be condenser lens, and 21 be Position-Sensitive Detector, and 22 visit for the first four-quadrant
Survey device, 23 are the second 4 quadrant detector, and 24 be plane mirror.
Specific embodiment
The utility model will be further described with reference to the accompanying drawing.
As shown in fig. 7, being the structure chart of five degree of freedom error measuring means.Five degree of freedom error measuring means fixing end 14
On have first laser device 16, second laser 17, third laser 18, spectroscope 19, condenser lens 20, Position-Sensitive Detector
21, there are the first 4 quadrant detector 22, the second 4 quadrant detector 23, plane on five degree of freedom error measuring means mobile terminal 15
Mirror 24.First laser device 16, second laser 17,18 emergent light of third laser are parallel, wherein first laser device 16 and second
The directional light that laser 17 is emitted is radiated at the first 4 quadrant detector 22 and the second 4 quadrant detector 23, the first four-quadrant respectively
Limit detector 22 and the second 4 quadrant detector 23 can measure the straightness error of both direction, meanwhile, known first
4 quadrant detector 22 and the second 4 quadrant detector 23 utilize the straight line of two 4 quadrant detectors measurement in the case where
Spending error can be in the hope of roll angle；The directional light that third laser 18 is emitted is radiated on plane mirror 24, and reflected light is through spectroscope
19 reflections, line focus lens 20 focus on Position-Sensitive Detector 21, Position-Sensitive Detector 21 can measure pitch angle with
Deflection angle.Therefore lathe single shaft, in addition to position error, remaining five degree of freedom error can be measured by five degree of freedom error measuring means.
After five degree of freedom error measuring means is mounted on lathe, needs to demarcate the positional relationship with lathe, can be measured after calibration
The error of grating scale reading head location.
For the error model method for building up of lathe five degree of freedom error measuring means, comprise the steps of:
A. judge machine tool structure type, establish reference frame on the base respectively according to machine tool structure type, slided in X
Platform, Y slide unit establish local coordinate system on Z slide unit, and each coordinate system is overlapped when lathe is located at initial position and origin is located at cutter
Vertex.According to homogeneous coordinate transformation principle, error transition matrix is established.Consider X slide unit, Y slide unit, in Z slide unit motion process
Relationship between each coordinate system establishes traditional homogeneous coordinate transformation model.Retouch to traditional homogeneous coordinate transformation clear model
21, the lathe relationships between error and space error are stated, but the model is derived based on kinematics of mechanism, is being built
The Abbe deviation of machine tool error measurement point and the influence of Brian deviation are not considered during vertical, therefore the model cannot directly make
With；
B. analysis Abbe deviation and Brian deviation bring during error measure influence, and are modified to model.
Think that lathe X slide unit, Y slide unit, Z slide unit are rigid body, therefore the pitch angle of X-axis, Y-axis, Z axis, deflection angle, rolling angle error are measuring
It is not influenced in the process by measurement point Abbe deviation and Brian deviation.Lathe is there are pitch angle, deflection angle, rolling angle error, therefore X
Axis, Y-axis, the position error of Z axis, both direction straightness are in measurement process by measurement point Abbe deviation and Brian deviation shadow
It rings.Lathe X-axis, Y-axis, the error of perpendicularity in Z axis between every two axis are not influenced by Abbe deviation and Brian deviation.It examines
Consider the influence of the Abbe deviation, Brian deviation of error measure point to position error, both direction straightness, homogeneous coordinates are become
Mold changing type is modified；
C. lathe grating scale general satisfaction requirement on machining accuracy, therefore ignore position error, in error measure using certainly
The five degree of freedom error measuring means of main research and development can measure five freedom degree errors in addition to position error, lathe X simultaneously online
Axis, Y-axis, the error of Z axis use five degree of freedom error measuring means, lathe X-axis, Y-axis, hanging down between every two axis in Z axis
Straight degree error uses laser interferometer measurement, and thinks that the error of perpendicularity is invariable during lathe work.Five degree of freedom
Error measuring means after demarcating, measurement be respective shaft grating scale reading head location error, by machine tool movement to initial position,
It determines the deviation between three axis grating ruler reading heads and cutter tip point, error and deviation is substituted into corrected homogeneous coordinates model
The error model for lathe five degree of freedom error measuring means is obtained afterwards.
Model foundation is influenced by machine tool structure type, as a result slightly difference, and the present embodiment is for XYTZ type lathe (and X
Axis is above Y-axis), above-mentioned model foundation process is described in detail:
A. it is directed to XYTZ type lathe, establishes traditional homogeneous coordinate transformation model.
As shown in Figure 1, being XYTZ type machine tool structure schematic diagram, XYTZ type lathe includes pedestal 11 and column 12, column 12
It is set to 11 side of pedestal, 11 upper surface of pedestal is provided with Y slide unit 4 by sliding rail, and 11 side of pedestal is equipped with Y grating scale 5, and Y is sliding
Y grating ruler reading head 6 is correspondingly equipped on platform；The upper surface of Y slide unit 4 is provided with X slide unit 1, the side of Y slide unit 4 by sliding rail
Equipped with X-ray grid ruler 2, X-ray grid ruler reading head 3 is correspondingly equipped on X slide unit 1；Z slide unit 7 is provided with by sliding rail on column 12, is stood
12 side of column is equipped with Z grating scale 8, and Z grating ruler reading head 9 is correspondingly equipped on Z slide unit 7, and the bottom of Z slide unit 7, which is equipped with, to be connected with
Cutter 10.X slide unit 1, Y slide unit 4, the moving direction of Z slide unit 7 are identical as upper right corner world coordinate system respective coordinates axis direction.
As shown in Fig. 2, establishing reference frame R on the base, established on X slide unit, Y slide unit, Z slide unit, cutter respectively
Local coordinate system X, Y, Z, T, direction are consistent with reference frame R.If Fig. 2 is in lathe initial position, coordinate system R, X, Y, Z, T
Origin be overlapped and be located at cutter tip point.Reference frame R is invariable, and local coordinate system X, Y, Z, T are with X slide unit, Y slide unit, Z
Slide unit, cutter are mobile and change.Think that cutter and Z slide unit relative positional relationship are constant.The upper right corner is world coordinate system, coordinate
Axis direction is identical as Initial R, X, Y, Z, T coordinate system direction.
In the ideal case, if 1 moving displacement x, Y slide unit of X slide unit, 4 moving displacement y, Z slide unit, 7 moving displacement z, then local
Homogeneous transform matrix of the coordinate system X to local coordinate system YHomogeneous coordinates matrix of the local coordinate system Y to reference frame RHomogeneous transform matrix of the reference frame R to local coordinate system ZIt is respectively as follows:
Without relative displacement between cutter 10 and Z slide unit 7, therefore the homogeneous transformation square of local coordinate system Z to tool coordinate system T
Battle arrayFor unit matrix.
Ideally, when X slide unit 1, Y slide unit 4, Z slide unit 7 distinguish moving displacement x, z, y, local coordinate system X to office
The homogeneous transform matrix of portion coordinate system T are as follows:
I.e. in the ideal case, coordinate of 10 vertex of cutter in local coordinate system X is (- x ,-y, z).
As shown in figure 3, XYTZ type lathe shares 21 errors under actual conditions, space error is caused in process,
To influence machining accuracy, analyze in detail below:
Under actual conditions, when 1 moving displacement x of X slide unit, there are position error δxx, Y-direction straightness error δyx, Z-direction
Straightness error δzx, roll angle εxx, pitch angle εyx, deflection angle εzx, the homogeneous transformation square of local coordinate system Y to local coordinate system X
Battle array are as follows:
Homogeneous transform matrix of the local coordinate system X to local coordinate system Y are as follows:
Under actual conditions, when 4 moving displacement y of Y slide unit, there are position error δyy, X-direction straightness error δxy, Z-direction
Straightness error δzy, roll angle εyy, pitch angle εxy, deflection angle εzy, consider verticality αxyInfluence, reference frame R to office
The homogeneous transform matrix of portion coordinate system Y are as follows:
Homogeneous transform matrix of the local coordinate system Y to reference frame R are as follows:
Under actual conditions, when 7 moving displacement z of Z slide unit, there are position error δzz, X-direction straightness error δxz, Y-direction
Straightness error δyz, roll angle εzz, pitch angle εxz, deflection angle εyz, consider verticality αxz、αyzInfluence, reference frame arrives
The homogeneous transform matrix of local coordinate system Z are as follows:
Without relative displacement between cutter 10 and Z slide unit 7, therefore the homogeneous transformation square of local coordinate system Z to tool coordinate system T
Battle arrayFor unit matrix.
Under actual conditions, when X slide unit 1, Y slide unit 4, Z slide unit 7 distinguish moving displacement x, z, y, local coordinate system X to office
The homogeneous transform matrix of portion coordinate system T are as follows:
Known by (4), (10), the space error E of XYTZ type lathex、Ey、EzAre as follows:
21, the lathe relationships between error and space error are described to the clear model, but since each positioning misses
Difference, straightness error are errors at respective coordinates system origin, and when error measure is difficult to directly measure, therefore the model cannot be direct
It uses.
B. according to the deviation of actual error measurement point to cutter, model is modified.
As shown in figure 4, laser interferometer measurement reflecting mirror 13 is error measure point, lathe when carrying out X-axis error measure
In initial position, there are Abbe deviation Lxx0, Brian deviation Lyx0、Lzx0, due to the shadow of Abbe deviation and Brian deviation
It rings, when there are roll angle εxx, pitch angle εyx, deflection angle εzxWhen, the position error δ at local coordinate system X originxx, Y-direction it is straight
Dimension error deltayx, Z-direction straightness error δzxWith the position error δ at laser interferometer measurement reflecting mirror 13xxc, Y-direction it is straight
Dimension error deltayxc, Z-direction straightness error δzxcIt has differences, can be represented by the formula:
Similarly, when carrying out Y-axis, Z axis error measure, there is a problem of identical.Positioning at local coordinate system Y origin misses
Poor δyy, X-direction straightness error δxy, Z-direction straightness error δzyIt can be represented by the formula:
Position error δ at local coordinate system Z originzz, X-direction straightness error δxz, Y-direction straightness error δyzIt can
It is indicated with following formula:
The error of X-axis, Y-axis, Z axis measurement point is substituted into (11), obtains revised homogeneous coordinate transformation model:
When using laser interferometer measurement machine tool error, (15) can be used directly in the deviation of recording error measurement point
The model of formula.Meanwhile the modification method is suitable for the amendment of other type machine tool error models.
C. according to the measurement point deviation of five degree of freedom error measuring means, revised homogeneous coordinate transformation model is carried out
It is further perfect.
As shown in figure 5, LxxsFor X-ray grid ruler reading head to the deviation of cutter tip point X-direction, LyxsFor X-ray grid ruler reading head to knife
Have the deviation of vertex Y-direction, LzxsFor X-ray grid ruler reading head to the deviation of cutter tip point Z-direction.Similarly, LxysFor Y grating ruler reading head
To the deviation of cutter tip point X-direction, LyysFor Y grating ruler reading head to the deviation of cutter tip point Y-direction, LzysFor Y grating ruler reading head
To the deviation of cutter tip point Z-direction；LxzsFor Z grating ruler reading head to the deviation of cutter tip point X-direction, LyzsFor Z grating ruler reading head
To the deviation of cutter tip point Y-direction, LzzsFor Z grating ruler reading head to the deviation of cutter tip point Z-direction.Five degree of freedom error measure
When device, measurement be grating scale reading head location error, at this point, the error of X-ray grid ruler reading head has the straightness error of Y-direction
δyxs, Z-direction straightness error δzxs, roll angle εxx, pitch angle εyx, deflection angle εzx, position error ignores；Y grating scale
The error of read head has the straightness error δ of X-directionxys, Z-direction straightness error δzys, roll angle εyy, pitch angle εxy, beat
Angle εzy, position error ignores；The error of Z grating ruler reading head has the straightness error δ of X-directionxzs, Y-direction straightness miss
Poor δyzs, roll angle εzz, pitch angle εxz, deflection angle εyz, position error ignores.
As shown in fig. 6, lathe X-axis error measure uses five degree of freedom error measuring means.Five degree of freedom error measure dress
It sets fixing end 14 to be mounted on Y slide unit 4, five degree of freedom error measuring means mobile terminal 15 is mounted on X slide unit 1；Similarly, Y-axis
Five degree of freedom error measuring means is also used with Z axis error measure.
The error of X, Y, Z grating scale reading head location, deviation are substituted into (15), obtains and is filled for lathe five degree of freedom error measure
The error model set:
The utility model is not limited to embodiments described above.Above the description of specific embodiment is intended to describe
With illustrate the technical solution of the utility model, the above mentioned embodiment is only schematical, is not restrictive.?
In the case of not departing from the utility model aims and scope of the claimed protection, those skilled in the art are practical at this
The specific transformation of many forms can be also made under novel enlightenment, these are belonged within the protection scope of the utility model.
Claims (1)
1. a kind of lathe five degree of freedom error measuring means, which is characterized in that including fixing end and mobile terminal, in the fixing end
Equipped with first laser device, second laser, third laser, spectroscope, condenser lens and Position-Sensitive Detector, on mobile terminal
Equipped with the first 4 quadrant detector, the second 4 quadrant detector and plane mirror；First laser device, second laser, third laser
Device emergent light is parallel, and wherein first laser device and the directional light of second laser outgoing are radiated at the first 4 quadrant detector respectively
With the second 4 quadrant detector, the first 4 quadrant detector and the second 4 quadrant detector can measure the straight line of both direction
Error is spent, meanwhile, in the case where known first 4 quadrant detector and the second 4 quadrant detector distance, utilize two four-quadrants
The straightness error for limiting detector measurement can be in the hope of roll angle；The directional light of third laser emitting is radiated on plane mirror,
Reflected light is reflected through spectroscope, and line focus lens focus on Position-Sensitive Detector, bow to measure by Position-Sensitive Detector
The elevation angle and deflection angle.
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Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108801146A (en) * | 2018-08-30 | 2018-11-13 | 天津大学 | A kind of lathe five degree of freedom error measuring means and error model method for building up |
| CN110375652A (en) * | 2019-08-28 | 2019-10-25 | 合肥工业大学 | The long range multiple degrees of freedom laser measurement system of beam stability can be improved |
| CN114234854A (en) * | 2021-11-22 | 2022-03-25 | 北京航天计量测试技术研究所 | Method and device for simultaneously measuring three-degree-of-freedom angles |
| CN116009478A (en) * | 2022-09-16 | 2023-04-25 | 大连理工大学 | Wafer surface shape prediction model establishment method based on Abbe principle and Blaine principle |
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2018
- 2018-08-30 CN CN201821414166.8U patent/CN208720994U/en active Active
Cited By (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN108801146A (en) * | 2018-08-30 | 2018-11-13 | 天津大学 | A kind of lathe five degree of freedom error measuring means and error model method for building up |
| CN110375652A (en) * | 2019-08-28 | 2019-10-25 | 合肥工业大学 | The long range multiple degrees of freedom laser measurement system of beam stability can be improved |
| CN114234854A (en) * | 2021-11-22 | 2022-03-25 | 北京航天计量测试技术研究所 | Method and device for simultaneously measuring three-degree-of-freedom angles |
| CN114234854B (en) * | 2021-11-22 | 2023-10-20 | 北京航天计量测试技术研究所 | Method and device for simultaneously measuring three-degree-of-freedom angles |
| CN116009478A (en) * | 2022-09-16 | 2023-04-25 | 大连理工大学 | Wafer surface shape prediction model establishment method based on Abbe principle and Blaine principle |
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