CN109141223A - A kind of efficiently accurate calibration method of the laser interferometer light path based on PSD - Google Patents
A kind of efficiently accurate calibration method of the laser interferometer light path based on PSD Download PDFInfo
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- CN109141223A CN109141223A CN201811112040.XA CN201811112040A CN109141223A CN 109141223 A CN109141223 A CN 109141223A CN 201811112040 A CN201811112040 A CN 201811112040A CN 109141223 A CN109141223 A CN 109141223A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B9/00—Measuring instruments characterised by the use of optical techniques
- G01B9/02—Interferometers
- G01B9/02055—Reduction or prevention of errors; Testing; Calibration
- G01B9/0207—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer
- G01B9/02072—Error reduction by correction of the measurement signal based on independently determined error sources, e.g. using a reference interferometer by calibration or testing of interferometer
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Abstract
The invention discloses a kind of efficiently accurate calibration methods of laser interferometer light path based on PSD, initially set up system light path, then coarse regulation laser interferometer light path, the coordinate value of each calibration point is finally obtained according to PSD two-dimensional light sensitive position sensor and calculates offset of the measurement light relative to reference reflected light, and laser interferometer light path is accurately adjusted according to offset.The present invention realizes automatic correction laser interferometer light path by the coordinate measured in PSD two-dimensional light sensitive position sensor, the present invention obtains the offset of calibration beam using PSD two-dimensional light sensitive position sensor, to indirectly obtain the offset of measurement light, automatic adjustment optical path may be implemented, to realize high-precision light path calibration, the efficiency and precision of calibration are improved, there is preferable practicability.
Description
Technical field
The invention belongs to optical technical fields, and in particular to a kind of efficiently accurate school of the laser interferometer light path based on PSD
Quasi- method.
Background technique
Multi-axis NC Machine Tools are past in the processing that the fields such as aerospace and auto manufacturing are widely used in components
Toward it is needed, geometric accuracy is broadly divided into two aspects: (1) multi-axis NC Machine Tools is initial several with very high geometric accuracy
What precision；(2) in use, geometric accuracy can be declined multi-axis NC Machine Tools, geometry possessed by current lathe
Precision.
To stablize the geometric accuracy of lathe in higher level, it is necessary to the geometric accuracy of periodic detection lathe and right
The geometric error of generation compensates.The geometry of lathe can be effectively obtained using geometric error discrimination method and detecting instrument
Error, then pointedly geometric error is compensated by error compensation means.Here detecting instrument is exactly using most
Laser interferometer comprising measurement light source, with reference to corner cube reflector, mobile corner cube reflector and spectral interference mirror, tripod etc..
For the research of error identification method, 9 collimation methods, 12 are mainly proposed according to the characteristic of laser interferometer both at home and abroad
Collimation method, 15 collimation methods etc., these error identification methods are all to establish several line segments in space according to geometric precision of machine tool characteristic,
Driving machine tool chief axis moves along a straight line along measurement line segment, the geometric error that machine tool chief axis is exposed in detection process.Machine
When bed geometric accuracy detection early-stage preparations, it usually needs mobile corner cube reflector is fixed on machine tool chief axis, with random
Bed motion of main shaft.In addition, connecting and fixing with interference spectroscope with reference to corner cube reflector.Reference path length stabilisation is constant,
Optical path length changes with the movement of mobile corner cube reflector, and the relative phase of measured interference light also changes correspondingly, from
And obtain the practical moving distance of machine tool chief axis.
Current this measurement means there are the problem of be mainly manifested in: (1) established according to lathe geometric error discrimination method
Space measurement line segment direction multiplicity, the measurement line segment of such as single translation shaft be along lathe coordinate system X, Y, Z-direction, and
XZ, XY, XYZ multi-shaft interlocked measurement line segment and each reference axis constitute certain tilt angle, and according to the measurement of laser interferometer
Principle must assure that the measurement light returned through mobile corner cube reflector and the reference reflected light through reference corner cube reflector in laser
Interferometer receives capitiform into interference, this needs the position by adjusting laser interferometer just to calibrate optical path, guarantees that measurement light can
Head is received to return；(2) mode of calibration optical path is only that engineer utilizes tripod progress laser interferometer position at present
Fine tuning, depends on engineering experience unduly, and adjustment process low efficiency, accuracy rate are low.
These difficulties restrict laser interferometer in the application of geometric precision of machine tool context of detection, therefore, design a kind of sharp
The efficient accurate calibration method of optical interferometer optical path, cooperates electronic fine adjustment stage and PSD(Position Sensitive
Detector) optical position sensitive sensors use, the early period of laser interferometer light path when auxiliary lathe translation shaft geometric accuracy detects
Calibration, it is with important application prospects.
Summary of the invention
The purpose of the present invention is to provide a kind of efficiently accurate calibration method of laser interferometer light path based on PSD, this hairs
The bright coordinate by measuring in PSD two-dimensional light sensitive position sensor realizes automatic correction laser interferometer light path, has preferable
Practicability.
The present invention is achieved through the following technical solutions: a kind of efficiently accurate school of the laser interferometer light path based on PSD
Quasi- method, mainly comprises the steps that
Step S101: establishing system light path, and the transmitting light that laser interferometer emitting head issues is divided into reflection by interference spectroscope
Light and transmitted light, reflected light form return laser light after reference reflects light back into interference spectroscope by reference corner cube reflector and interfere
Instrument receives head；Transmitted light forms the mobile reflective mirror that reflects light back into through mobile corner cube reflector and is divided into calibration light and measurement light,
The calibration light projection obtains two-dimensional coordinate in PSD two-dimensional light sensitive position sensor, and the direction for emitting light is Y-axis；The measurement
Light receives head through interference spectroscope return laser light interferometer；
Step S102: several measurement points are chosen as calibration point in measurement line segment, machine tool chief axis is moved to first school
On schedule, using the position of the method adjustment laser interferometer of visual guidance, make to calibrate light projection in PSD two-dimensional light sensitive position sensing
The coordinate value of calibration hot spot is obtained on device, then so that calibration dot projection is existed according to the position that coordinate value adjusts laser interferometer
At the axle center of two-dimensional coordinate；
Step S103: machine tool chief axis is moved along measurement line segment, and obtains each calibration point by PSD two-dimensional light sensitive position sensor
Coordinate value and calculate offset of the measurement light relative to reference reflected light；If offset is greater than threshold value, by laser interferometer
Along X-axis or Z axis linear motion to calibrate optical path；Otherwise by laser interferometer by around X-axis or Z axis rotary motion fine tuning
Calibrate optical path.
Mobile corner cube reflector is mounted on machine tool chief axis, and machine tool chief axis is transported along the measurement line segment of error identification method
It is dynamic, guarantee mobile corner cube reflector perpendicular to measurement line segment, so that mobile reflected light is parallel to measurement line segment.The PSD two dimension
Optical position sensitive sensors are fixed on the pedestal of electronic fine adjustment stage, will not be subjected to displacement.
The first calibration point is chosen, the light path of optical path is most short at this time, and by visual guidance, engineer can easily control electricity
Dynamic fine adjustment stage adjustment calibration light projection is on PSD.PSD gets the coordinate value of calibration hot spot at this time, passes through data collecting card
It is transferred to computer, computer controls the position that electronic fine adjustment stage adjusts laser interferometer, so that calibration dot projection is in PSD
Center, complete the thick calibration of optical path.
In order to preferably realize the present invention, further, standard light shift amount and measurement light are established in the step S101
The equation of offset；When mobile corner cube reflector moves up and down either along Z axis around X-axis pitching rotation in ZY plane, then
There is measurement light shift amount to be equal to y, wherein y is the y-coordinate value for calibrating hot spot on PSD two-dimensional light sensitive position sensor；Work as movement
When pyramid scintilloscope moves left and right in X/Y plane along X-axis or beat rotates about the z axis, then there is measurement light shift amount to be equal to x,
Wherein x is the x coordinate value for calibrating hot spot on PSD two-dimensional light sensitive position sensor.
As shown in fig. 3 to 7, calibration light projection is at the center PSD, so that it may guarantee that measurement light returns to interferometer and receives in head
The heart；It establishes calibration light coordinate value and the equation of measurement light shift amount is as follows:
1) when moving up and down in ZY plane along z-axis when mobile corner cube reflector or rotated around x-axis pitching:
Current measurement light shift amount b=y, wherein y is the y-coordinate value for calibrating hot spot on PSD.
2) when mobile pyramid scintilloscope, which moves left and right in X/Y plane along x-axis, either to be rotated around z-axis beat:
Current measurement light shift amount d=x, wherein x is the x coordinate value for calibrating hot spot on PSD.
Further include step S104 further to preferably realize the present invention: control machine tool chief axis along measurement line segment from
Starting point moves to final position, receives head center if measurement light is incident upon laser interferometer always and is formed with reference reflected light
Interference, then light path calibration is completed.The essence calibration of laser interferometer light path is completed, to guarantee to calibrate the center that hot spot is in PSD
In range.
In order to preferably realize the present invention, further, mobile corner cube reflector is mounted on machine in the step S102
On bed main shaft, according to the error identification method of geometric precision of machine tool, mobile corner cube reflector is adjusted to guarantee it perpendicular to measurement
Line segment；10 measurement points are uniformly chosen as calibration point on measurement line segment.In the measurement of lathe geometric error recognition methods
10 measurement points are chosen in line segment as calibration point, are evenly distributed on it on measurement line segment.Lathe geometric error discrimination method
Including 22 collimation methods, 14 collimation methods, 12 collimation methods, 9 collimation methods etc. include parallel lines, face diagonal and body diagonal.It is required that calibration point is
It is evenly distributed on measurement line segment, guarantees that the reasonability of calibration point selection can effectively guarantee the success rate of light path calibration.
The lathe geometric error recognition methods is the prior art and is not improvement of the invention, and so it will not be repeated.
In order to preferably realize the present invention, further, the threshold value is 10mm.
In order to preferably realize the present invention, further, the laser interferometer includes mobile corner cube reflector, electronic micro-
Leveling platform and the laser interferometer emitting head being separately positioned in electronic fine adjustment stage, laser interferometer receive head, interference light splitting
Mirror, with reference to corner cube reflector, spectroscope；The laser interferometer emitting head, laser interferometer receive head and are longitudinally disposed side by side on
Close to the side of interference spectroscope, the side of the interference spectroscope is fixedly installed spectroscope, and the top of interference spectroscope
It is provided with reference to corner cube reflector；Spectroscopical lower section is fixedly installed PSD two-dimensional light sensitive position sensor；The movement
Corner cube reflector is mounted on machine tool chief axis.Electronic fine adjustment stage includes that 2 accurate electronic control translation stages and 2 are accurate automatically controlled
Angle position platform may be implemented along x, z-axis linear motion and around x, z-axis rotary motion, linear precision 5um, running accuracy 8 '.The electricity
Dynamic fine adjustment stage is the prior art and is not improvement of the invention, and so it will not be repeated.
One laser interferometer is installed in electronic fine adjustment stage, as measurement light source；By interference spectroscope, with reference to pyramid
Together with reflecting mirror is bolted with spectroscope, spectroscopical arranged beneath PSD two-dimensional light sensitive position sensor；It will interference
Spectroscope is fixed in laser interferometer together with reference to corner cube reflector, spectroscope, and PSD two-dimensional light sensitive position sensor is fixed
On the pedestal of electronic fine adjustment stage；Mobile corner cube reflector is mounted on machine tool chief axis.It can be returned always with reference to reflected light
Tieback receive head center, and electronic fine adjustment stage can control laser interferometer, interference spectroscope, with reference to corner cube reflector, point
Light microscopic adjusts position together；PSD is fixed on the pedestal of electronic fine adjustment stage, and position is fixed；Mobile pyramid is anti-
Penetrating mirror is fixed on machine tool chief axis, and perpendicular to measurement line segment；When the reflected light of mobile corner cube reflector is through spectroscope
When the measurement light of return is located at interferometer reception head center, calibration light is just incident upon the center of PSD.
Mobile machine tool main shaft is controlled electronic fine adjustment stage adjustment and is swashed to first calibration point by the way of visual guidance
Optical interferometer position, so that calibration light projection is on PSD two-dimensional light sensitive position sensor, electronic fine adjustment stage passes through PSD at this time
Coordinate value automatic adjustment laser interferometer position, realize the thick calibration of laser interferometer light path.
Interference spectroscope is put together by two pieces of 45 ° of right angle prisms,
In order to preferably realize the present invention, further, the linear precision of the electronic fine adjustment stage is 5mm, running accuracy is
8′；The power bracket of the laser of the laser interferometer is mw grades, wave-length coverage 633nm, spot size 6mm.
In order to preferably realize the present invention, further, the size of the PSD two-dimensional light sensitive position sensor is
20X20mm, and spectral region is 320-1100nm, linearity error range is ± 0.3%.
It is an object of the invention to the shortcoming to overcome prior art, a kind of the efficient of laser interferometer light path is provided
Accurate calibration method, this method are used cooperatively with electronic fine adjustment stage and PSD, common laser interferometer can be made to have automatic
The function of adjusting position facilitates the light path calibration of lathe translation shaft geometric accuracy detection laser interferometer early period, realizes optical path
The automation of calibration process greatly reduces time and the cost of the detection of lathe translation shaft geometric accuracy.
The present invention relates to a kind of efficiently accurate calibration methods of laser interferometer light path based on PSD, assist common laser dry
Interferometer completes the light path calibration that multi-axis NC Machine Tools translation shaft geometric accuracy detects early period.Calibration method is the following steps are included: (1)
According to the error identification method of geometric precision of machine tool, typical measurement point is chosen as calibration point in each measurement line segment；(2)
Mobile machine tool main shaft controls electronic fine adjustment stage adjustment laser interferometer by the way of visual guidance to first calibration point
Position, so that calibration light projection realizes the thick calibration of laser interferometer light path on PSD two-dimensional light sensitive position sensor；(3) it builds
Vertical calibration light shift amount and the offset equation for measuring light, mobile machine tool main shaft obtain the corresponding PSD coordinate value of each calibration point, meter
Calculate the offset of measurement light；(4) when measuring light shift amount less than or equal to 10mm, electronic fine adjustment stage is controlled around X-axis
Rotation rotates about the z axis；When offset is greater than 10mm, controls electronic fine adjustment stage and move along a straight line along X-axis or along Z
Axis linear motion completes the essence calibration of optical path；(5) light path calibration effect is verified, guarantees that measured interference light returns to interferometer always
Receive head center.The calibration method can be used cooperatively with common laser interferometer, PSD and electronic fine adjustment stage, the degree of automation
Height, adjustment is flexibly and precision is high, and common laser interferometer can be assisted to complete the connection of uniaxial positioning accuracy detection and more translation shafts
Dynamic rail mark positioning accuracy detects the facula position calibration of early period, improves detection efficiency.
The present invention is analyzed for the laser interferometer light path offset of ZY, X/Y plane, with the identification of lathe geometric error
Application note of the invention has been carried out for the laser interferometer light path calibration of method implementation process early period.Those skilled in the art
Member can voluntarily select lathe geometric error discrimination method and electronic fine adjustment stage in the case where being no more than the scope of the invention, only
Ensure the control precision of electronic fine adjustment stage.
Beneficial effects of the present invention:
(1) present invention realizes automatic correction laser interferometer light path by the coordinate measured in PSD two-dimensional light sensitive position sensor,
The present invention obtains the offset of calibration beam using PSD two-dimensional light sensitive position sensor, to indirectly obtain the inclined of measurement light
Shifting amount may be implemented automatic adjustment optical path to realize high-precision light path calibration and improve the efficiency and precision of calibration, has
There is preferable practicability；
(2) standard light shift amount is established in the step S101 and measures the equation of light shift amount；When mobile corner cube reflector exists
When moving up and down either along Z axis around X-axis pitching rotation in ZY plane, then there is measurement light shift amount to be equal to y, wherein y is calibration
Y-coordinate value of the hot spot on PSD two-dimensional light sensitive position sensor；When mobile pyramid scintilloscope moves in X/Y plane along X-axis or so
It is dynamic when either beat rotates about the z axis, then there is measurement light shift amount to be equal to x, wherein x is calibration hot spot in PSD two-dimensional light sensitive position
Set the x coordinate value on sensor.The present invention is by standard light shift amount and measures the foundation of light shift amount equation fast and effectively
The offset for measuring measurement light may be implemented automatic adjustment optical path to realize high-precision light path calibration and improve calibration
Efficiency and precision, have preferable practicability.
(3) mobile corner cube reflector is mounted on machine tool chief axis in the step S102, according to geometric precision of machine tool
Error identification method adjusts mobile corner cube reflector to guarantee it perpendicular to measurement line segment；It is uniformly chosen on measurement line segment
10 measurement points are as calibration point.It is required that calibration point is generally evenly distributed on measurement line segment, to guarantee that calibration point is chosen reasonable
Property can effectively guarantee the success rate of light path calibration, there is preferable practicability.
(4) laser interferometer includes mobile corner cube reflector, electronic fine adjustment stage and is separately positioned on electronic fine tuning
Laser interferometer emitting head, laser interferometer on platform receive head, interference spectroscope, with reference to corner cube reflector, spectroscope.This
Invention realizes that machine automatization adjusts laser interferometer light path by controlling electronic fine adjustment stage, has prevented to rely on the uncertain of experience
Property, the efficiency and precision of calibration are improved, there is preferable practicability.
Detailed description of the invention
Fig. 1 is the structural schematic diagram of laser interferometer of the invention；
Fig. 2 is the light path schematic diagram of light path calibration process ZY plane of the invention；
Fig. 3 is the light path schematic diagram that light path calibration process ZY planar movement corner cube reflector straight line of the invention deviates；
Fig. 4 is the light path schematic diagram of light path calibration process ZY planar movement corner cube reflector angle offset of the invention；
Fig. 5 is the light path schematic diagram of light path calibration process X/Y plane of the invention；
Fig. 6 is the light path schematic diagram that light path calibration process X/Y plane mobile corner cube reflector straight line of the invention deviates；
Fig. 7 is the light path schematic diagram of light path calibration process X/Y plane mobile corner cube reflector angle offset of the invention；
Fig. 8 is flow chart of the invention.
Wherein: 1- laser interferometer emitting head；2- interference spectroscope；3- refers to corner cube reflector；4- spectroscope；5- is mobile
Corner cube reflector；6-PSD two-dimensional light sensitive position sensor；7- laser interferometer receives head, A- emits light, B- refers to reflected light,
C- moves reflected light, D- calibration light, E- and measures light.
Specific embodiment
Embodiment 1:
A kind of efficiently accurate calibration method of the laser interferometer light path based on PSD, mainly comprises the steps that
Step S101: establishing system light path, as shown in Figure 1, the transmitting light A that laser interferometer emitting head 1 issues is by interference point
Light microscopic 2 is divided into reflected light and transmitted light, and reflected light, which passes through to be formed with reference to corner cube reflector 3, returns to interference light splitting with reference to reflected light B
Return laser light interferometer receives head 7 after mirror 2；Transmitted light forms mobile reflected light C through mobile corner cube reflector 5 and returns to reflective mirror quilt
It is divided into calibration light D and measures light E, the calibration light D is incident upon PSD two-dimensional light sensitive position sensor 6 and obtains two-dimensional coordinate, emits
The direction of light A is Y-axis；The measurement light E receives head 7 through 2 return laser light interferometer of interference spectroscope；
Step S102: several measurement points are chosen as calibration point in measurement line segment, machine tool chief axis is moved to first school
On schedule, using the position of the method adjustment laser interferometer of visual guidance, calibration light D is made to be incident upon PSD two-dimensional light sensitive position biography
Then the coordinate value that calibration light D spot is obtained on sensor 6 makes to calibrate light D spot according to the position that coordinate value adjusts laser interferometer
It is incident upon at the axle center of two-dimensional coordinate；
Step S103: machine tool chief axis is moved along measurement line segment, and obtains each calibration by PSD two-dimensional light sensitive position sensor 6
The coordinate value of point simultaneously calculates offset of the measurement light E relative to reference reflected light B；If offset is greater than threshold value, laser is done
Interferometer is along X-axis or Z axis linear motion to calibrate the road light D；Otherwise laser interferometer is passed through around X-axis or Z axis rotary motion
The road calibration light D of fine tuning.
The present invention realizes automatic correction laser interferometer light by the coordinate measured in PSD two-dimensional light sensitive position sensor 6
Road, the present invention obtain the offset of calibration light D beam using PSD two-dimensional light sensitive position sensor 6, to indirectly obtain measurement light
The offset of E may be implemented automatic adjustment optical path to realize high-precision light path calibration and improve the efficiency and essence of calibration
Degree has preferable practicability.
Embodiment 2:
The present embodiment is to optimize on the basis of embodiment 1, as in Figure 2-4, establishes standard light in the step S101
The equation of offset and measurement light E offset；When mobile corner cube reflector 5 in ZY plane along Z axis move up and down either around
When X-axis pitching rotates, then there is measurement light E offset to be equal to y, wherein y is calibration light D spot in PSD two-dimensional light sensitive position sensor 6
On y-coordinate value；As illustrated in figs. 5-7, it is moved left and right either about the z axis partially in X/Y plane along X-axis when mobile pyramid scintilloscope
When pendulum rotation, then there is measurement light E offset to be equal to x, wherein x is the x for calibrating light D spot on PSD two-dimensional light sensitive position sensor 6
Coordinate value.
The present invention obtains offset of the quasi-optical D spot of PSD lieutenant colonel relative to PSD zero point of reference frame by data collecting card, i.e.,
Present coordinate values (x, y).The processing of the data collecting card and data post is the prior art and is not of the invention change
Into point, so it will not be repeated.
Interference spectroscope 2 is put together it is found that calibrating the offset y and measurement light of light D spot by two pieces of 45 ° of right angle prisms
E beam offset b be it is identical, equation relationship is established according to the situation of change of 5 position of mobile corner cube reflector；
As shown in Fig. 2, mobile corner cube reflector 5 moves in ZY plane.It is flat in ZY when mobile corner cube reflector 5 as shown in Figure 3
In face along z-axis move up and down distance a-a ' or as shown in Figure 4 around x-axis pitching rotate angle [alpha] when；Current measurement light E beam
Offset b=y, wherein y is the current y-coordinate value of PSD two-dimensional light sensitive position sensor 66.
As shown in figure 5, mobile corner cube reflector 5 moves in X/Y plane.As shown in Figure 6 when mobile pyramid scintilloscope is in XY
When moving left and right distance c-c ' along x-axis in plane and either around z-axis beat rotate angle beta as shown in Figure 7；Current measurement light
E beam offset d=x, wherein x is the current x coordinate value of PSD two-dimensional light sensitive position sensor 66.
The present invention fast and effectively measures measurement light by the foundation of standard light shift amount and measurement light E offset equation
The offset of E may be implemented automatic adjustment optical path to realize high-precision light path calibration and improve the efficiency and essence of calibration
Degree has preferable practicability.
The other parts of the present embodiment are same as Example 1, and so it will not be repeated.
Embodiment 3:
The present embodiment be optimized on the basis of embodiment 2, as shown in figure 8, the threshold value be 10mm, further include step
S104: control machine tool chief axis moves to final position from starting point along measurement line segment, if measurement light E is incident upon laser interference always
Instrument, which receives 7 center of head and formed with reference reflected light B, interferes, then light path calibration is completed.Machine tool chief axis is along error identification method
The movement of measurement line segment, guarantee mobile corner cube reflector 5 perpendicular to measurement line segment, so that mobile reflected light C is parallel to measurement line
Section.
The present invention realizes automatic correction laser interferometer light by the coordinate measured in PSD two-dimensional light sensitive position sensor 6
Road, the present invention obtain the offset of calibration light D beam using PSD two-dimensional light sensitive position sensor 6, to indirectly obtain measurement light
The offset of E may be implemented automatic adjustment optical path to realize high-precision light path calibration and improve the efficiency and essence of calibration
Degree has preferable practicability.
The other parts of the present embodiment are identical as above-described embodiment 2, and so it will not be repeated.
Embodiment 4:
The present embodiment be embodiment 1-3 any one on the basis of optimize, as shown in Figure 1, the laser interferometer includes
Mobile corner cube reflector 5, electronic fine adjustment stage and the laser interferometer emitting head 1 being separately positioned in electronic fine adjustment stage swash
Optical interferometer receives head 7, interference spectroscope 2, with reference to corner cube reflector 3, spectroscope 4；The laser interferometer emitting head 1 swashs
Optical interferometer receives the longitudinal side for being disposed side by side on close interference spectroscope 2 of head 7, and the side of the interference spectroscope 2 is fixed
It is provided with spectroscope 4, and the top of interference spectroscope 2 is provided with reference to corner cube reflector 3；The lower section of the spectroscope 4 is fixed
It is provided with PSD two-dimensional light sensitive position sensor 6；The mobile corner cube reflector 5 is mounted on machine tool chief axis.
One laser is installed in electronic fine adjustment stage as the measurement source light E.Electronic fine adjustment stage includes 2 accurate
Electronic control translation stage and 2 accurate automatically controlled angle position platforms, may be implemented along x, z-axis linear motion and around x, z-axis rotary motion.It is described
Electronic fine adjustment stage is the prior art and is not improvement of the invention, and so it will not be repeated.
The interference spectroscope 2, be bolted with reference to corner cube reflector 3 with spectroscope 4 together with；Interference spectroscope
2 and spectroscope 4 be respectively cube shaped beam splitter, be put together by two pieces of 45 ° of right angle prisms；Corner cube reflector is by three
The tetrahedron that orthogonal isosceles right triangle (reflecting surface) and an equilateral triangle (plane of refraction) are constituted.PSD is two dimension
PSD, photosurface are its important components, and calibration light D beam, which is incident upon on PSD, forms hot spot, measure current x coordinate and y-coordinate,
Displacement information as calibration light D beam.The present invention controls laser, interference spectroscope 2 by electronic fine adjustment stage, with reference to pyramid
Reflecting mirror 3 and the common position of spectroscope 4, i.e. laser, interference spectroscope 2, with reference between corner cube reflector 3 and spectroscope 4
Relative position it is constant.
Thick calibration phase: mobile machine tool main shaft to first calibration point is manually controlled electronic by the way of visual guidance
Fine adjustment stage adjusts the position of laser interferometer, and engineer can easily control electronic fine adjustment stage adjustment calibration light D projection
On PSD two-dimensional light sensitive position sensor 6, PSD two-dimensional light sensitive position sensor 6 gets the coordinate value of calibration light D spot at this time,
It is transferred to computer by data collecting card, computer controls the position that electronic fine adjustment stage adjusts laser interferometer, so that school
Quasi-optical D spot is incident upon the center of PSD, to guarantee that measuring light E may return to reception head center.
The present invention realizes that machine automatization adjusts laser interferometer light path by controlling electronic fine adjustment stage, has prevented to rely on warp
The uncertainty tested improves the efficiency and precision of calibration, has preferable practicability.
Any one is identical with above-described embodiment 1-3 for the other parts of the present embodiment, and so it will not be repeated.
Embodiment 5:
The present embodiment is optimized on the basis of embodiment 4, and the linear precision of the electronic fine adjustment stage is 5mm, rotates
Precision is 8 '；The power bracket of the laser of the laser interferometer is mw grades, wave-length coverage 633nm, spot size are
6mm.The size of the PSD two-dimensional light sensitive position sensor 6 is 20X20mm, and spectral region is 320-1100nm, linearity error
Range is ± 0.3%.
The other parts of the present embodiment are identical as above-described embodiment 4, and so it will not be repeated.
Embodiment 6:
The present embodiment is to optimize on the basis of embodiment 1, is mounted on mobile corner cube reflector 5 in the step S102
On machine tool chief axis, according to the error identification method of geometric precision of machine tool, mobile corner cube reflector 5 is adjusted to guarantee it perpendicular to survey
Measure line segment；10 measurement points are uniformly chosen as calibration point on measurement line segment.It is required that calibration point is generally evenly distributed in measurement
On line segment, to guarantee that the reasonability of calibration point selection can effectively guarantee the success rate of light path calibration, have preferable practical
Property.
The other parts of the present embodiment are identical as above-described embodiment 1, and so it will not be repeated.
The above is only presently preferred embodiments of the present invention, not does limitation in any form to the present invention, it is all according to
According to technical spirit any simple modification to the above embodiments of the invention, equivalent variations, protection of the invention is each fallen within
Within the scope of.
Claims (8)
1. a kind of efficiently accurate calibration method of the laser interferometer light path based on PSD, which is characterized in that mainly include following step
It is rapid:
Step S101: establishing system light path, and the transmitting light (A) that laser interferometer emitting head (1) issues passes through interference spectroscope (2)
It is divided into reflected light and transmitted light, reflected light, which passes through to be formed with reference to corner cube reflector (3), returns to interference spectroscope with reference to reflected light (B)
(2) return laser light interferometer receives head (7) afterwards；Transmitted light forms mobile reflected light (C) through mobile corner cube reflector (5) and returns to instead
Light microscopic is divided into calibration light (D) and measurement light (E), and the calibration light (D) is incident upon PSD two-dimensional light sensitive position sensor (6) and obtains
To two-dimensional coordinate, the direction for emitting light (A) is Y-axis；The measurement light (E) penetrates interference spectroscope (2) return laser light interferometer
It receives head (7)；
Step S102: several measurement points are chosen as calibration point in measurement line segment, machine tool chief axis is moved to first school
On schedule, using the position of the method adjustment laser interferometer of visual guidance, calibration light (D) is made to be incident upon PSD two-dimensional light sensitive position
The coordinate value that calibration light (D) spot is obtained on sensor (6), then makes to calibrate according to the position that coordinate value adjusts laser interferometer
Light (D) spot is incident upon at the axle center of two-dimensional coordinate；
Step S103: machine tool chief axis is moved along measurement line segment, and obtains each school by PSD two-dimensional light sensitive position sensor (6)
Coordinate value on schedule simultaneously calculates offset of measurement light (E) relative to reference reflected light (B)；It, will if offset is greater than threshold value
Laser interferometer is along X-axis or Z axis linear motion to calibrate the road light (D)；Otherwise laser interferometer is passed through around X-axis or Z axis
Road calibration light (D) of rotary motion fine tuning.
2. the efficiently accurate calibration method of a kind of laser interferometer light path based on PSD according to claim 1, feature exist
In, established in the step S101 standard light shift amount and measure light (E) offset equation；When mobile corner cube reflector (5)
When moving up and down either along Z axis around X-axis pitching rotation in ZY plane, then there is measurement light (E) offset to be equal to y, wherein y
For y-coordinate value of calibration light (D) spot on PSD two-dimensional light sensitive position sensor (6)；When mobile pyramid scintilloscope is in X/Y plane
Along X-axis move left and right either about the z axis beat rotate when, then have measurement light (E) offset be equal to x, wherein x be calibration light (D)
X coordinate value of the spot on PSD two-dimensional light sensitive position sensor (6).
3. the efficiently accurate calibration method of a kind of laser interferometer light path based on PSD according to claim 2, feature exist
In further including step S104: control machine tool chief axis moves to final position from starting point along measurement line segment, if measurement light (E) is begun
It is incident upon laser interferometer eventually and receives head (7) center and is formed with reference reflected light (B) and interferes, then light path calibration is completed.
4. the efficiently accurate calibration method of a kind of laser interferometer light path based on PSD according to claim 1, feature exist
In mobile corner cube reflector (5) is mounted on machine tool chief axis in the step S102, is distinguished according to the error of geometric precision of machine tool
Knowledge method adjusts mobile corner cube reflector (5) to guarantee it perpendicular to measurement line segment；10 are uniformly chosen on measurement line segment
Measurement point is as calibration point.
5. the efficiently accurate calibration method of a kind of laser interferometer light path based on PSD according to claim 1-4,
It is characterized in that, the threshold value is 10mm.
6. the efficiently accurate calibration method of a kind of laser interferometer light path based on PSD according to claim 1, feature exist
In the laser interferometer includes mobile corner cube reflector (5), electronic fine adjustment stage and is separately positioned in electronic fine adjustment stage
Laser interferometer emitting head (1), laser interferometer receive head (7), interference spectroscope (2), with reference to corner cube reflector (3), point
Light microscopic (4)；The laser interferometer emitting head (1), laser interferometer receive head (7) and are longitudinally disposed side by side on close to interference light splitting
The side of the side of mirror (2), the interference spectroscope (2) is fixedly installed spectroscope (4), and the top of interference spectroscope (2)
It is provided with reference to corner cube reflector (3)；PSD two-dimensional light sensitive position sensor is fixedly installed below the spectroscope (4)
(6)；The mobile corner cube reflector (5) is mounted on machine tool chief axis.
7. the efficiently accurate calibration method of a kind of laser interferometer light path based on PSD according to claim 6, feature exist
In the linear precision of the electronic fine adjustment stage is 5mm, running accuracy is 8 '；The power of the laser of the laser interferometer
Range is mw grades, wave-length coverage 633nm, spot size 6mm.
8. the efficiently accurate calibration method of a kind of laser interferometer light path based on PSD according to claim 6, feature exist
In the size of the PSD two-dimensional light sensitive position sensor (6) is 20 × 20mm, and spectral region is 320-1100nm, linear to miss
Poor range is ± 0.3%.
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