CN110243306A - Plane surface shape sub-aperture stitching interferometer measuring device and method based on robot - Google Patents
Plane surface shape sub-aperture stitching interferometer measuring device and method based on robot Download PDFInfo
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- CN110243306A CN110243306A CN201910661568.0A CN201910661568A CN110243306A CN 110243306 A CN110243306 A CN 110243306A CN 201910661568 A CN201910661568 A CN 201910661568A CN 110243306 A CN110243306 A CN 110243306A
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- 238000005305 interferometry Methods 0.000 claims abstract description 12
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
- G01B11/2441—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures using interferometry
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Abstract
The invention discloses a kind of plane surface shape sub-aperture stitching interferometer measuring device and method based on robot, including interferometer, industrial robot and establishment of coordinate system component, the interferometer can be mounted on industrial robot by connecting tooling, the establishment of coordinate system component includes reference member and calibration component, the calibration component includes the terminal pad that can be mounted on industrial robot and the calibrating stem that terminal pad side is arranged in, the extending direction of the calibrating stem is parallel with the terminal pad mounting axis of terminal pad, any of the calibrating stem and terminal pad distance farthest is calibration point.The present invention has many advantages, such as that flexible structure is simple, has a wide range of application, highly effective and safe, good environmental adaptability, the advantages that having both the high spatial resolution of sub-aperture interferometry, the optical elements of large caliber plane surface shape high-precision on-position measure problem under various gravity postures can be met simultaneously, the plane surface shape measurement that surface free crosses the processing such as plated film or feather plucking can be carried out.
Description
Technical field
The present invention relates to optical elements of large caliber interferometry technical fields, and in particular to a kind of plane based on robot
Face shape sub-aperture stitching interferometer measuring device and method.
Background technique
With the development of science and technology, heavy-calibre planar optical elements are led in astronomy, space optics, military affairs and energy etc.
In domain using more and more extensive, Large optical system is to the detection efficiency of optical elements of large caliber, detection accuracy and space
The requirement of resolution ratio etc. is also higher and higher.
For heavy-calibre planar optical elements high-precision surface shape detection, generally use at present be aperture interferometer and
Sub-aperture stitching interferometer instrument.Wherein, aperture interferometer involves great expense, high to environmental requirement, also, the body of aperture interferometer
Long-pending and weight also limits its flexibility used, and detection is required optical elements of large caliber from processing stations or dress school every time
Station is hoisted to detection station, thus inefficiency.Compared to aperture interferometer, sub-aperture stitching interferometer instrument reduce detection at
Originally, the advantages of remaining the high spatial resolution and high measurement accuracy of small-bore interferometry, but similarly it is faced with measurement work
Position and processing dress gyp position different problems.Also, sub-aperture stitching interferometer instrument is substantially all using mechanical displacement device, right
Interferometer and/or optical element to be measured are moved, these existing mechanical displacement device freedom degrees are few, are limited to photometry
The measurement position and posture of element do not only result in interferometry inefficiency, or even can influence interferometry to a certain extent
Precision, cause the unified face shape finally spliced not accurate enough.
Therefore, current heavy-calibre planar optical elements surface testing contains only interferometer in horizontal and vertical two kinds of appearances
It is detected under state, Yao Shixian is in workshop detection and present in optical engineering, under various gravimetric tilt postures, heavy caliber face
Shape on-position measure is extremely difficult.Therefore, it needs to find simple, efficient, high-precision detection method to realize heavy-calibre planar light
Learn the detection in place of component side shape.
Summary of the invention
It is simple, efficient, high-precision in place to solve not having for optical elements of large caliber surface testing method at present
The technical issues of detectability, the plane surface shape sub-aperture stitching interferometer measuring device based on robot that the present invention provides a kind of
And method.
Its technical solution is as follows:
A kind of plane surface shape sub-aperture stitching interferometer measuring device based on robot, is characterized by: including interferometer,
Industrial robot and establishment of coordinate system component, the interferometer can be mounted on industrial robot by connecting tooling, and
The measurement of plane surface shape sub-aperture stitching interferometer can be carried out to optical element under the drive of industrial robot, the coordinate system is built
Vertical component includes the reference member being arranged in by industrial robot and the calibration component calibrated based on reference member, the calibration component packet
Include the terminal pad that can be mounted on industrial robot and the calibrating stem that terminal pad side is set, the extension side of the calibrating stem
To parallel with the terminal pad mounting axis of terminal pad, the calibrating stem and terminal pad distance it is farthest be a little calibration point；
When interferometer is mounted on connecting tooling, the connecting tooling mounting axis of the optical axis and connecting tooling of interferometer
Spacing is equal to the spacing of calibration point and terminal pad mounting axis, is mounted on the reference mirror front end face and connecting tooling of interferometer front end
The spacing of rear end face is equal to the spacing of calibration point and terminal pad rear end face.
Using the above structure, tool coordinates system is established first with the cooperation of calibration component and reference member, and each tool carries out
Calibration recycles industrial robot that interferometer is driven to be scanned measurement, and then obtains optical element to be measured under the posture
Unified surface shape measurement is as a result, it is possible to inspection in place that is simple, efficient, being accurately proceed heavy-calibre planar optical elements face shape
It surveys, is especially that by and plane surface shape sub-aperture is carried out to (45 degree and other angles) optical element under any lateral attitude
Stitching interferometer measurement.
As preferred: the calibrating stem is mounted in terminal pad by connecting bracket, and the connecting bracket includes coaxial peace
The second connecting rod that first connecting rod and both ends in terminal pad are connect with first connecting rod and calibrating stem respectively.Using
The above structure, structure is simple, reliable and stable, makes calibrating stem attitude stabilization, is convenient for accurately calibrating.
As preferred: the reference member includes the reference lever for referring to pedestal and being vertically provided at reference to pedestal, the ginseng
The one end of upper end and calibrating stem far from terminal pad for examining bar is conical structure, and the vertex of the calibrating stem conical structure is
The calibration point.Using the above structure, the calibration of tool and the foundation of tool coordinates system are carried out convenient for calibrating stem and reference lever, made
Industrial robot can adjust position and the posture of interferometer more accurately.
As preferred: the interferometer uses dynamic interferometer.Relative to currently used static interferometer, dynamic is used
Interferometer not only expands to interferometry in various measurement environment, environmental factor when also solving lengthy scan measurement
Interference ensure that the precision and repeatability of the measurement of its sub-aperture.
As preferred: the reference mirror is mounted on the front end of interferometer by two-dimension adjustment mirror holder.Using the above structure, energy
Enough positions that is simple, convenient, reliably adjusting reference mirror.
As preferred: being provided with the optical element support mechanism for being used to support optical element by the industrial robot.
Using the above structure, in order to being positioned to optical element.
A kind of plane surface shape sub-aperture stitching interferometer measurement method based on robot, is characterized by, according to following step
It is rapid to carry out:
S1: tool coordinates system is established
Calibration component is mounted on industrial robot, the cusp of the calibration point and reference lever conical structure that make calibrating stem is kept
Contact, and adjust the pose of industrial robot end several times, changes the posture of calibrating stem, at the same record it is above-mentioned adjust several times after
The posture of calibrating stem after the completion sheds calibration component to establish tool coordinates system from industrial robot；
S2: calibration interferometer
Interferometer is mounted on industrial robot by connecting tooling, adjusts two-dimension adjustment mirror holder, makes reference mirror and interference
The optical axis of instrument is vertical；
S3: the face shape of measurement standard mirror
Standard mirror is mounted in optical element support mechanism, the pose of interferometer is adjusted by industrial robot, makes to do
The number of interference fringes that interferometer measures is minimum, obtains the face shape of standard mirror, and the spacing of interferometer and standard mirror is L at this time；
S4: the scanning survey plane of interferometer is defined
Optical element to be measured is mounted in optical element support mechanism, is made in posture and the step S3 of the optical element
The posture of standard mirror is identical, defines the scanning survey plane of interferometer and the x-axis of the plane of scanning motion and y-axis direction, the interference
The scanning survey plane of instrument and the plane to be measured of optical element to be measured are parallel, and scanning direction is parallel to x-axis or y-axis direction, and dry
Interferometer and the spacing of optical element to be measured are L；
S5: it treats photometry element and is scanned measurement
Photometry element is treated using interferometer and is scanned measurement, obtains the sub-aperture of several optical element planes to be measured
Diametric plane shape measurement data；
S6: sub-aperture stitching
According to the location information of sub-aperture, splicing calculating is carried out to the surface shape measurement data of each sub-aperture, obtains light to be measured
Learn unified surface shape measurement result of the element under the posture.
It, being capable of inspection in place that is simple, efficient, being accurately proceed heavy-calibre planar optical elements face shape using above method
It surveys, not only has a wide range of application, the optical elements of large caliber face shape high-precision survey in place under various gravity postures can be met simultaneously
Amount (can be realized and carry out plane surface shape sub-aperture stitching to (45 degree and other angles) optical element under any lateral attitude
Interferometry), optical elements of large caliber face shape may be implemented in the detection for processing or filling gyp position in and highly effective and safe, without
It must be moved, while good environmental adaptability, not only be expanded to interferometry in various measurement environment, be also solved for a long time
The interference of environmental factor when scanning survey ensure that the precision and repeatability of the measurement of its sub-aperture.
As preferred: in step S4, the cross direction profiles direction of definition scanning sub-aperture is the x-axis of scanning survey plane, is indulged
It is the y-axis of scanning survey plane to distribution arrangement, perpendicular to the side of scanning survey plane and the plane to be measured of direction optical element
To the z-axis for scanning survey plane.Using above method, position of the sub-aperture in the scanning survey plane just easily can
It enough calculates, convenient for the movement and positioning of industrial robot.
As preferred: in step S5, when interferometer is often moved to a sub- inside diameter measurement position, passing through industrial robot
The pose of interferometer is adjusted, the number of interference fringes for measuring interferometer is minimum.Using above method, the face of sub-aperture can be improved
The precision of shape measurement data, to improve unified surface shape measurement result of the optical element to be measured under the posture.
As preferred: in step S3, being taken multiple measurements averagely using interferometer, obtain the face shape of standard mirror, made
For the systematic error Ws of interferometer；In step S5, each sub-aperture surface shape measurement data deduct systematic error Ws.More than
Method can be improved the precision of the surface shape measurement data of sub-aperture, to reduce the interference of environmental factor, to improve to photometry
Unified surface shape measurement result of the element under the posture.
Compared with prior art, beneficial effects of the present invention:
Using the plane surface shape sub-aperture stitching interferometer measuring device and method based on robot of above technical scheme, tool
It has the advantage that
1, flexible structure is simple, and it is more convenient that robot adjusts the position and attitude of interferometer；
2, have a wide range of application, the optical elements of large caliber face shape high-precision that can meet simultaneously under various gravity postures is in place
Measurement can be realized and carry out the spelling of plane surface shape sub-aperture to (45 degree and other angles) optical element under any lateral attitude
Connect interferometry；
3, highly effective and safe, may be implemented optical elements of large caliber face shape process or fill gyp position detection, without into
Row movement；
4, interferometry is not only expanded in various measurement environment, also solves lengthy scan by good environmental adaptability
The interference of environmental factor when measurement ensure that the precision and repeatability of the measurement of its sub-aperture.
Detailed description of the invention
Fig. 1 is the schematic diagram for the optical elements of large caliber face shape that interferometric measuring means measurement is placed vertically；
Fig. 2 is the relation schematic diagram of connecting tooling and interferometer and calibration component；
Fig. 3 is the schematic diagram that interferometric measuring means establish tool coordinates system；
Fig. 4 is the schematic diagram of interferometric measuring means scan path；
Fig. 5 is the schematic diagram that interferometric measuring means measure tilted-putted optical elements of large caliber face shape.
Specific embodiment
The invention will be further described with attached drawing with reference to embodiments.
As Figure 1-Figure 5, a kind of plane surface shape sub-aperture stitching interferometer measuring device based on robot, is mainly wrapped
Include interferometer 2, industrial robot 1, connecting tooling 3 and establishment of coordinate system component, wherein establishment of coordinate system component includes reference
Part 5 and calibration component 6.
The interferometer 2 can be mounted on industrial robot 1 by connecting tooling 3, and can be in industrial robot 1
The measurement of plane surface shape sub-aperture stitching interferometer is carried out to optical element 4 under drive, the establishment of coordinate system component includes that setting exists
The reference member 5 on 1 side of industrial robot and the calibration component 6 calibrated based on reference member 5, the calibration component 6 include that can install
Terminal pad 61 on industrial robot 1 and the calibrating stem 62 that 61 side of terminal pad is set, the extension side of the calibrating stem 62
To parallel with the terminal pad mounting axis 61a of terminal pad 61, the calibrating stem 62 and terminal pad 61 apart from it is farthest be some calibration
Point 62a；
When interferometer 2 is mounted on connecting tooling 3, the optical axis 2a of interferometer 2 and the connecting tooling of connecting tooling 3 are installed
The spacing of axis 3a is equal to the spacing of calibration point 62a and terminal pad mounting axis 61a, is mounted on the reference mirror 7 of 2 front end of interferometer
The spacing of front end face and 3 rear end face of connecting tooling is equal to the spacing of calibration point 62a and 61 rear end face of terminal pad.
Referring to Figure 1, Fig. 3 and Fig. 5, the end of the industrial robot 1 can carry out six-freedom degree (x, y, z, Rx,
Ry, Rz) adjustment, wherein x, y, z indicate location components, Rx, Ry, and Rz is indicated around x, y, the posture component that the direction z rotates.It is described
The end of industrial robot 1 has ring flange 1a, and connecting tooling 3 and calibration component 6 can be removably mounted on ring flange 1a
On.To which industrial robot 1 can adjust to six degree of freedom position and the posture of connecting tooling 3 and calibration component 6.
It is adapted referring to Figure 1 with Fig. 5, the rear end structure and ring flange 1a of the connecting tooling 3, it can be with ring flange 1a
It is rapidly connected and is separated.The upper surface of the connecting tooling 3 can reliably position interferometer 2, also, connecting tooling 3
The weight of interferometer 2 can be carried without deformation, while not influencing the normal use of interferometer 2.
Referring to Figure 1, Fig. 2 and Fig. 5, the interferometer 2 use dynamic interferometer, and the front end of interferometer 2 is adjusted by two dimension
Whole mirror holder 8 is equipped with reference mirror 7.The two-dimension adjustment mirror holder 8 can carry out the adjusting of two freedom degrees of beat and pitching.It is described
Dynamic interferometer can make the measurement chamber between reference mirror 7 and optical element to be measured 4 is long to fix, and realize designated surface (light to be measured
Learn element front surface or rear surface) surface shape measurement.The dynamic interferometer needs repeatedly to be surveyed when carrying out surface shape measurement
Amount is average, to reduce the interference of environmental factor.
Fig. 2 and Fig. 3 are referred to, the calibrating stem 62 is mounted in terminal pad 61 by connecting bracket 63, the connection branch
Frame 63 include the first connecting rod 631 that is coaxially mounted in terminal pad 61 and both ends respectively with first connecting rod 631 and calibration
The second connecting rod 632 that bar 62 connects.The reference member 5 includes with reference to pedestal 51 and being vertically provided at the ginseng with reference to pedestal 51
Bar 52 is examined, the upper end and the one end of calibrating stem 62 far from terminal pad 61 of the reference lever 52 are conical structure, the school
The vertex of quasi- 62 conical structure of bar is the calibration point 62a.
Referring to Figure 1 and Fig. 5, it is provided with optical element support mechanism 9 by the industrial robot 1, the optical element
Optical element 4 and standard mirror to be measured can be installed and be placed to supporting mechanism 9.
- Fig. 5 referring to Figure 1, a kind of plane surface shape sub-aperture stitching interferometer measurement method based on robot, according to following
Step carries out:
S1: tool coordinates system is established
Calibration component 6 is mounted on the ring flange 1a of industrial robot 1, the calibration point 62a and reference member 5 of calibrating stem 62 are made
Designated position be kept in contact, i.e. the calibration point 62a of calibrating stem 62 and the cusp of 52 conical structure of reference lever are kept in contact, and are adjusted
The pose of whole 1 end of industrial robot several times, changes the posture of calibrating stem 62, while recording calibrating stem after above-mentioned adjustment several times
62 posture, so that tool coordinates system and truing tool are established, in order to make robot accurately drive the work on ring flange 1a
Tool is moved and is rotated, and after the completion sheds calibration component 6 from industrial robot 1.
S2: calibration interferometer 2
Interferometer 2 is mounted on the ring flange 1a of industrial robot 1 by connecting tooling 3, adjusts two-dimension adjustment mirror holder 8,
Keep reference mirror 7 vertical with the optical axis of interferometer 2.
S3: the face shape of measurement standard mirror
Standard mirror is mounted in optical element support mechanism 9, the pose of interferometer 2 is adjusted by industrial robot 1, is made
The number of interference fringes that interferometer 2 measures is minimum, obtains the face shape of standard mirror, and the spacing of interferometer 2 and standard mirror is L at this time.Into
One step, for the interference for reducing environmental factor, is taken multiple measurements averagely using interferometer 2, the face shape of standard mirror is obtained, by it
As the systematic error Ws of interferometer 2, and stored.It should be pointed out that standard mirror is not less than the bore of reference mirror 7, and
The deformation quantity occurred after by gravity can be ignored compared with optical elements of large caliber 4 to be measured.
S4: the scanning survey plane of interferometer 2 is defined
Optical element 4 to be measured is mounted in optical element support mechanism 9, the posture and step of the optical element 4 are made
The posture of S3 Plays mirror is identical, defines the scanning survey plane of interferometer 2 and the x-axis of the plane of scanning motion and y-axis direction, and
The position of definition scanning sub-aperture and scan path.Due to interferometer 2 with optical element 4 to be measured be it is non-contacting, determine
The scanning survey plane of justice with the plane to be measured of optical element 4 to be measured be it is parallel, the spacing between two planes is by consolidating
Surely the length of chamber is measured come what is realized, which is also L.According to the Method for Coordinate Definition of industrial robot 1, as shown in figure 4,
The cross direction profiles direction of definition scanning sub-aperture is the x-axis of scanning survey plane, and genesis analysis direction is the y of scanning survey plane
Axis is the z-axis of scanning survey plane perpendicular to the direction that scanning survey plane is directed toward optical element 4 to be measured.Sub-aperture 4a in this way
Position in the scanning survey plane just can easily calculate, convenient for the movement and positioning of industrial robot 1.
S5: it treats photometry element 4 and is scanned measurement
Firstly, interferometer 2 is made to be moved to sub-aperture 4a position Si,jPlace, subscript i and j indicate that the sub-aperture is located at the i-th row,
Jth column.1 pose of industrial robot is adjusted, number of interference fringes as few as possible is obtained, carries out surface shape measurement.Step S3 is stored
Systematic error Ws deducted from the measurement result, obtain the face shape result W of sub-aperturei,jAnd it is stored.Then according to definition
Scan path, interferometer 2 is moved on at the position next sub-aperture 4a.To using interferometer 2 treat photometry element 4 into
Row scanning survey obtains the sub-aperture 4a surface shape measurement data of several planes to be measured of optical element 4.In step S5, every height
Aperture 4a surface shape measurement data deduct systematic error Ws.
S6: sub-aperture 4a splicing
According to the location information of sub-aperture 4a, splicing calculating is carried out to the surface shape measurement data of each sub-aperture 4a, obtain to
Unified surface shape measurement of the photometry element 4 under the posture is as a result, and stored.
The present invention has many advantages, such as that flexible structure is simple, has a wide range of application, highly effective and safe, good environmental adaptability, has both son
The advantages that high spatial resolution of aperture interferometry, the optical elements of large caliber that can meet simultaneously under various gravity postures are flat
Face face shape high-precision on-position measure problem can carry out the plane surface shape measurement that surface free crosses the processing such as plated film or feather plucking.
Finally, it should be noted that foregoing description is only the preferred embodiment of the present invention, the ordinary skill people of this field
Member under the inspiration of the present invention, without prejudice to the purpose of the present invention and the claims, can make multiple similar tables
Show, such transformation is fallen within the scope of protection of the present invention.
Claims (10)
1. a kind of plane surface shape sub-aperture stitching interferometer measuring device based on robot, it is characterised in that: including interferometer
(2), industrial robot (1) and establishment of coordinate system component, the interferometer (2) can be mounted on work by connecting tooling (3)
In industry robot (1), and the spelling of plane surface shape sub-aperture can be carried out to optical element (4) under the drive of industrial robot (1)
Interferometry is connect, it includes setting in the other reference member (5) of industrial robot (1) and based on ginseng that the tool coordinates system, which establishes component,
The calibration component (6) that part (5) is calibrated is examined, the calibration component (6) includes the terminal pad that can be mounted on industrial robot (1)
(61) and setting terminal pad (61) side calibrating stem (62), the extending direction of the calibrating stem (62) and terminal pad (61)
In parallel, any of the calibrating stem (62) and terminal pad (61) distance farthest is calibration point (62a) to terminal pad mounting axis (61a)；
When interferometer (2) is mounted on connecting tooling (3), the optical axis (2a) of interferometer (2) and the connection work of connecting tooling (3)
The spacing for filling mounting axis (3a) is equal to the spacing of calibration point (62a) and terminal pad mounting axis (61a), is mounted on interferometer
(2) spacing of reference mirror (7) front end face of front end and connecting tooling (3) rear end face is equal to calibration point (62a) and terminal pad (61)
The spacing of rear end face.
2. the plane surface shape sub-aperture stitching interferometer measuring device according to claim 1 based on robot, feature exist
In: the calibrating stem (62) is mounted on terminal pad (61) by connecting bracket (63), and the connecting bracket (63) includes coaxial
The first connecting rod (631) being mounted on terminal pad (61) and both ends respectively with first connecting rod (631) and calibrating stem (62)
The second connecting rod (632) of connection.
3. the plane surface shape sub-aperture stitching interferometer measuring device according to claim 1 based on robot, feature exist
In: the reference member (5) includes the reference lever (52) for referring to pedestal (51) and being vertically provided at reference to pedestal (51), the ginseng
The one end of upper end and calibrating stem (62) far from terminal pad (61) for examining bar (52) is conical structure, the calibrating stem (62)
The vertex of conical structure is the calibration point (62a).
4. the plane surface shape sub-aperture stitching interferometer measuring device according to claim 1 based on robot, feature exist
In: the interferometer (2) uses dynamic interferometer.
5. the plane surface shape sub-aperture stitching interferometer measuring device according to claim 1 based on robot, feature exist
In: the reference mirror (7) passes through the front end that two-dimension adjustment mirror holder (8) are mounted on interferometer (2).
6. the plane surface shape sub-aperture stitching interferometer measuring device according to claim 1 based on robot, feature exist
In: the optical element support mechanism (9) for being used to support optical element (4) is provided with by the industrial robot (1).
7. a kind of plane surface shape sub-aperture stitching interferometer measurement method based on robot, which is characterized in that according to the following steps
It carries out:
S1: tool coordinates system is established
Calibration component (6) is mounted on industrial robot (1), the calibration point (62a) and reference lever (52) circle of calibrating stem (62) are made
The cusp of wimble structure is kept in contact, and adjusts the pose of industrial robot (1) end several times, changes the appearance of calibrating stem (62)
State, while the posture of calibrating stem (62) after above-mentioned adjustment several times is recorded, so that tool coordinates system is established, after the completion by calibration component
(6) it is shed from industrial robot (1)；
S2: calibration interferometer (2)
Interferometer (2) is mounted on industrial robot (1) by connecting tooling (3), is adjusted two-dimension adjustment mirror holder (8), is made to refer to
Mirror (7) is vertical with the optical axis of interferometer (2)；
S3: the face shape of measurement standard mirror
Standard mirror is mounted on optical element support mechanism (9), the pose of interferometer (2) is adjusted by industrial robot (1),
The number of interference fringes for measuring interferometer (2) is minimum, obtains the face shape of standard mirror, at this time the spacing of interferometer (2) and standard mirror
For L；
S4: the scanning survey plane of interferometer (2) is defined
Optical element to be measured (4) is mounted on optical element support mechanism (9), the posture and step of the optical element (4) are made
The posture of rapid S3 Plays mirror is identical, defines the scanning survey plane of interferometer (2) and the x-axis of the plane of scanning motion and y-axis side
To the scanning survey plane of the interferometer (2) is parallel with the plane to be measured of optical element to be measured (4), and scanning direction is parallel to x-axis
Or y-axis direction, and the spacing of interferometer (2) and optical element to be measured (4) is L；
S5: it treats photometry element (4) and is scanned measurement
Photometry element (4) is treated using interferometer (2) and is scanned measurement, obtains several optical element (4) planes to be measured
Sub-aperture (4a) surface shape measurement data；
S6: sub-aperture (4a) splicing
According to the location information of sub-aperture (4a), splicing calculating is carried out to the surface shape measurement data of each sub-aperture (4a), obtain to
Unified surface shape measurement result of the photometry element (4) under the posture.
8. the plane surface shape sub-aperture stitching interferometer measurement method according to claim 7 based on robot, feature exist
In: in step S4, the cross direction profiles direction of definition scanning sub-aperture (4a) is the x-axis of scanning survey plane, genesis analysis direction
It is scanning perpendicular to the direction of scanning survey plane and the plane to be measured of direction optical element (4) for the y-axis of scanning survey plane
Measure the z-axis of plane.
9. the plane surface shape sub-aperture stitching interferometer measurement method according to claim 7 based on robot, feature exist
In: in step S5, when interferometer (2) is often moved to sub-aperture (4a) measurement position, adjusted by industrial robot (1)
The pose of interferometer (2), the number of interference fringes for measuring interferometer (2) are minimum.
10. the plane surface shape sub-aperture stitching interferometer measurement method according to claim 7 based on robot, feature exist
In: in step S3, is taken multiple measurements averagely using interferometer (2), the face shape of standard mirror is obtained, as interferometer (2)
Systematic error Ws；In step S5, each sub-aperture (4a) surface shape measurement data deduct systematic error Ws.
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| Application Number | Priority Date | Filing Date | Title |
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| CN201910661568.0A CN110243306B (en) | 2019-07-22 | 2019-07-22 | Plane surface shape sub-aperture splicing interferometry device and method based on robot |
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| CN201910661568.0A CN110243306B (en) | 2019-07-22 | 2019-07-22 | Plane surface shape sub-aperture splicing interferometry device and method based on robot |
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN114002243A (en) * | 2021-10-25 | 2022-02-01 | 中国科学院高能物理研究所 | Device and method for calibrating world coordinate system of CT imaging system |
| CN114459377A (en) * | 2022-02-10 | 2022-05-10 | 中国航发沈阳发动机研究所 | Device and method for measuring blade profile of aircraft engine |
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| CN114002243A (en) * | 2021-10-25 | 2022-02-01 | 中国科学院高能物理研究所 | Device and method for calibrating world coordinate system of CT imaging system |
| CN114459377A (en) * | 2022-02-10 | 2022-05-10 | 中国航发沈阳发动机研究所 | Device and method for measuring blade profile of aircraft engine |
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