CN209991947U - Plane surface shape subaperture splicing interference measuring device based on robot - Google Patents
Plane surface shape subaperture splicing interference measuring device based on robot Download PDFInfo
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- CN209991947U CN209991947U CN201921158225.4U CN201921158225U CN209991947U CN 209991947 U CN209991947 U CN 209991947U CN 201921158225 U CN201921158225 U CN 201921158225U CN 209991947 U CN209991947 U CN 209991947U
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Abstract
The utility model discloses a plane shape of face subaperture concatenation interferometry device based on robot, establish the subassembly including interferometer, industrial robot and coordinate system, the interferometer can be installed on industrial robot through connecting the frock, the coordinate system is established the subassembly and is included reference piece and calibration piece, the calibration piece is including connecting pad that can install on industrial robot and the alignment rod of setting in connecting pad one side, the extending direction of alignment rod is parallel with the connection pad installation axis of connecting pad, and this alignment rod is the calibration point with the connection pad apart from one the farthest. The utility model has the advantages of the structure is nimble simple, the range of application is wide, high-efficient safety, environmental suitability are good, has advantages such as sub-aperture interferometry's high spatial resolution concurrently, can satisfy the heavy-calibre optical element plane shape of face high accuracy measurement problem on throne under the various gravity gestures simultaneously, can carry out the plane shape of face measurement that the surface was not handled such as coating film or hacking.
Description
Technical Field
The utility model relates to a heavy-calibre optical element interferometry technical field, concretely relates to plane shape of face subaperture concatenation interferometry device based on robot.
Background
With the development of scientific technology, the application of large-aperture planar optical elements in the fields of astronomy, space optics, military, energy and the like is more and more extensive, and the requirements of large-scale optical systems on the aspects of detection efficiency, detection precision, spatial resolution and the like of the large-aperture optical elements are higher and higher.
For high-precision surface shape detection of large-caliber planar optical elements, a large-caliber interferometer and a sub-aperture splicing interferometer are commonly adopted at present. The large-caliber interferometer has high manufacturing cost and high requirement on environment, the size and the weight of the large-caliber interferometer limit the use flexibility of the large-caliber interferometer, and each detection needs to hoist the large-caliber optical element from a processing station or a mounting and correcting station to a detection station, so that the efficiency is low. Compared with a large-caliber interferometer, the sub-aperture splicing interferometer reduces the detection cost, retains the advantages of high spatial resolution and high measurement precision of small-caliber interferometry, and also has the problem that the measurement station and the processing, mounting and correcting station are different. In addition, the sub-aperture splicing interferometer basically adopts a mechanical displacement device to move the interferometer and/or the optical element to be measured, the existing mechanical displacement devices have low degree of freedom, the measurement position and the posture of the optical element to be measured are limited, the interference measurement efficiency is low, the interference measurement precision is influenced even to a certain degree, and the final spliced full-aperture surface shape is not accurate enough.
Therefore, the surface shape detection of the current large-caliber plane optical element only comprises the detection of an interferometer in a horizontal posture and a vertical posture, and the in-situ measurement of the surface shape of the large-caliber plane under various gravity inclined postures existing in workshop detection and optical engineering is extremely difficult to realize. Therefore, a simple, efficient and high-precision detection method is needed to realize the in-situ detection of the surface shape of the large-aperture planar optical element.
SUMMERY OF THE UTILITY MODEL
For solving the technical problem that the present detection method of the shape of face to the heavy-calibre optical element does not possess simple, high-efficient, high accuracy detection capability in situ, the utility model provides a plane shape of face subaperture concatenation interferometric measuring device based on robot.
The technical scheme is as follows:
the utility model provides a plane shape of face subaperture concatenation interferometric device based on robot, its main points lie in: the interferometer can be installed on the industrial robot through a connecting tool, plane surface shape sub-aperture splicing interference measurement can be carried out on an optical element under the driving of the industrial robot, the coordinate system establishing component comprises a reference piece arranged beside the industrial robot and a calibration piece calibrated based on the reference piece, the calibration piece comprises a connecting disc capable of being installed on the industrial robot and a calibration rod arranged on one side of the connecting disc, the extending direction of the calibration rod is parallel to the mounting axis of the connecting disc, and the point of the calibration rod farthest away from the connecting disc is a calibration point;
when the interferometer is installed on the connecting tool, the distance between the optical axis of the interferometer and the installation axis of the connecting tool is equal to the distance between the calibration point and the installation axis of the connecting disc, and the distance between the front end surface of the reference mirror installed at the front end of the interferometer and the rear end surface of the connecting tool is equal to the distance between the calibration point and the rear end surface of the connecting disc.
By adopting the structure, a tool coordinate system is established by matching the calibration part and the reference part, each tool is calibrated, then the industrial robot is used for driving the interferometer to perform scanning measurement, and further the full-aperture surface shape measurement result of the optical element to be measured in the attitude is obtained, the in-situ detection of the surface shape of the large-aperture planar optical element can be simply, efficiently and accurately performed, and particularly the planar surface shape sub-aperture splicing interference measurement of the optical element (at 45 degrees and other angles) in any inclined attitude can be realized.
Preferably, the method comprises the following steps: the calibration rod is installed on the connecting disc through a connecting support, and the connecting support comprises a first connecting rod and a second connecting rod, wherein the first connecting rod is coaxially installed on the connecting disc, and the second connecting rod is connected with the first connecting rod and the calibration rod at two ends respectively. By adopting the structure, the structure is simple, stable and reliable, the posture of the calibration rod is stable, and accurate calibration is facilitated.
Preferably, the method comprises the following steps: the reference piece comprises a reference base and a reference rod vertically arranged on the reference base, the upper end of the reference rod and one end, far away from the connecting disc, of the calibration rod are both of conical structures, and the vertex of the conical structure of the calibration rod is the calibration point. By adopting the structure, the calibration rod and the reference rod can be used for calibrating the tool and establishing a tool coordinate system, so that the industrial robot can adjust the position and the posture of the interferometer more accurately.
Preferably, the method comprises the following steps: the interferometer is a dynamic interferometer. Compared with the static interferometer commonly used at present, the dynamic interferometer is used, interference measurement is expanded to various measurement environments, interference of environmental factors during long-time scanning measurement is solved, and the accuracy and the repeatability of sub-aperture measurement are guaranteed.
Preferably, the method comprises the following steps: the reference mirror is arranged at the front end of the interferometer through a two-dimensional adjusting mirror frame. By adopting the structure, the position of the reference mirror can be simply, conveniently and reliably adjusted.
Preferably, the method comprises the following steps: an optical component support mechanism for supporting an optical component is provided beside the industrial robot. The structure is adopted, so that the optical element is convenient to position.
Compared with the prior art, the beneficial effects of the utility model are that:
the robot-based plane surface shape sub-aperture splicing interference measurement device and method adopting the technical scheme have the following advantages:
1. the structure is flexible and simple, and the position and the posture of the interferometer can be adjusted more conveniently by the robot;
2. the application range is wide, the high-precision in-situ measurement of the surface shape of the large-aperture optical element under various gravity postures can be simultaneously met, and the planar surface shape sub-aperture splicing interference measurement of the optical element under any inclined posture (45 degrees and other angles) can be realized;
3. the detection of the surface shape of the large-caliber optical element at a processing or installing and correcting station can be realized without moving;
4. the method has good environmental adaptability, not only expands the interference measurement to various measurement environments, but also solves the interference of environmental factors during long-time scanning measurement, and ensures the accuracy and repeatability of the sub-aperture measurement.
Drawings
FIG. 1 is a schematic diagram of an interferometric measuring device for measuring the surface shape of a vertically arranged large-caliber optical element;
FIG. 2 is a schematic view of the relationship between the connection tooling and the interferometer and the calibration piece;
FIG. 3 is a schematic diagram of an interferometric measuring device establishing a tool coordinate system;
FIG. 4 is a schematic view of a scanning path of an interferometric measuring device;
FIG. 5 is a schematic diagram of an interferometric measuring device for measuring the surface shape of an obliquely arranged large-caliber optical element.
Detailed Description
The present invention will be further described with reference to the following examples and accompanying drawings.
As shown in fig. 1-5, a robot-based planar sub-aperture splicing interferometry device mainly comprises an interferometer 2, an industrial robot 1, a connecting tool 3 and a coordinate system establishing component, wherein the coordinate system establishing component comprises a reference part 5 and a calibration part 6.
The interferometer 2 can be installed on the industrial robot 1 through the connecting tool 3, and can carry out plane surface shape sub-aperture splicing interferometry on the optical element 4 under the driving of the industrial robot 1, the coordinate system establishing component comprises a reference part 5 arranged beside the industrial robot 1 and a calibration part 6 calibrated based on the reference part 5, the calibration part 6 comprises a connecting disc 61 capable of being installed on the industrial robot 1 and a calibration rod 62 arranged on one side of the connecting disc 61, the extending direction of the calibration rod 62 is parallel to a connecting disc installation axis 61a of the connecting disc 61, and the point of the calibration rod 62 farthest from the connecting disc 61 is a calibration point 62 a;
when the interferometer 2 is installed on the connecting tool 3, the distance between the optical axis 2a of the interferometer 2 and the connecting tool installation axis 3a of the connecting tool 3 is equal to the distance between the calibration point 62a and the connecting disc installation axis 61a, and the distance between the front end surface of the reference mirror 7 installed at the front end of the interferometer 2 and the rear end surface of the connecting tool 3 is equal to the distance between the calibration point 62a and the rear end surface of the connecting disc 61.
Referring to fig. 1, 3 and 5, the end of the industrial robot 1 may be adjusted in six degrees of freedom (x, y, z, Rx, Ry, Rz), where x, y, z represents a position component and Rx, Ry, Rz represents a pose component rotating around the x, y, z direction. The end of the industrial robot 1 is provided with a flange 1a, and the connecting tool 3 and the calibration part 6 can be detachably mounted on the flange 1 a. So that the industrial robot 1 can adjust the positions and attitudes of the connecting tool 3 and the calibration piece 6 in six degrees of freedom.
Referring to fig. 1 and 5, the rear end structure of the connecting tool 3 is adapted to the flange 1a, and can be quickly connected to and separated from the flange 1 a. The upper end face of the connecting tool 3 can reliably position the interferometer 2, and the connecting tool 3 can bear the weight of the interferometer 2 without deformation and influence the normal use of the interferometer 2.
Referring to fig. 1, 2 and 5, the interferometer 2 is a dynamic interferometer, and a reference mirror 7 is mounted at the front end of the interferometer 2 through a two-dimensional adjusting mirror frame 8. The two-dimensional adjusting mirror frame 8 can be used for adjusting two degrees of freedom of deflection and pitching. The dynamic interferometer can fix the measurement cavity length between the reference mirror 7 and the optical element 4 to be measured, and realize surface shape measurement of a designated surface (the front surface or the rear surface of the optical element to be measured). When the dynamic interferometer is used for surface shape measurement, multiple times of measurement averaging is needed to reduce the interference of environmental factors.
Referring to fig. 2 and 3, the calibration bar 62 is mounted on the connection plate 61 through a connection bracket 63, and the connection bracket 63 includes a first connection bar 631 coaxially mounted on the connection plate 61 and a second connection bar 632 having both ends connected to the first connection bar 631 and the calibration bar 62, respectively. The reference piece 5 comprises a reference base 51 and a reference rod 52 vertically arranged on the reference base 51, the upper end of the reference rod 52 and one end of the calibration rod 62 far away from the connecting disc 61 are both conical structures, and the vertex of the conical structure of the calibration rod 62 is the calibration point 62 a.
Referring to fig. 1 and 5, an optical component support mechanism 9 is disposed beside the industrial robot 1, and the optical component support mechanism 9 can mount and place the optical component 4 to be measured and the standard mirror.
Referring to fig. 1 to 5, a planar sub-aperture stitching interferometry method based on a robot is performed according to the following steps:
s1: establishing a tool coordinate system
The calibration piece 6 is installed on the flange 1a of the industrial robot 1, the calibration point 62a of the calibration rod 62 is kept in contact with the designated position of the reference piece 5, namely the calibration point 62a of the calibration rod 62 is kept in contact with the sharp point of the conical structure of the reference rod 52, the pose of the tail end of the industrial robot 1 is adjusted for a plurality of times, the pose of the calibration rod 62 is changed, and the poses of the calibration rod 62 after the adjustment for a plurality of times are recorded, so that a tool coordinate system and a calibration tool are established, the robot can accurately drive the tool on the flange 1a to move and rotate, and the calibration piece 6 is removed from the industrial robot 1 after the adjustment is completed.
S2: calibration interferometer 2
The interferometer 2 is installed on a flange 1a of the industrial robot 1 through the connecting tool 3, and the two-dimensional adjusting mirror frame 8 is adjusted to enable the reference mirror 7 to be perpendicular to the optical axis of the interferometer 2.
S3: measuring the surface shape of a standard mirror
The standard mirror is installed on the optical element supporting mechanism 9, the position and the posture of the interferometer 2 are adjusted through the industrial robot 1, the number of interference fringes measured by the interferometer 2 is minimum, the surface shape of the standard mirror is obtained, and the distance between the interferometer 2 and the standard mirror is L. Further, in order to reduce the interference of environmental factors, the interferometer 2 is used to perform multiple measurement averaging to obtain the surface shape of the standard mirror, which is used as the system error Ws of the interferometer 2 and stored. It should be noted that the standard mirror is not smaller than the aperture of the reference mirror 7, and the amount of deformation occurring after the action of gravity is negligible compared to the large aperture optical element 4 to be measured.
S4: defining a scanning measurement plane of an interferometer 2
The optical element 4 to be measured is mounted on the optical element support mechanism 9 so that the attitude of the optical element 4 is the same as that of the standard mirror, the scanning measurement plane of the interferometer 2 and the x-axis and y-axis directions of the scanning plane are defined, and the position and scanning path of the scanning sub-aperture are defined. Since the interferometer 2 is not in contact with the optical element 4 to be measured, the defined scanning measurement plane is parallel to the plane of measurement of the optical element 4 to be measured, the spacing between the two planes being achieved by fixing the length of the measurement cavity, which is also L. According to the coordinate system defining method of the industrial robot 1, as shown in fig. 4, the transverse distribution direction of the scanning sub-apertures is defined as the x-axis of the scanning measuring plane, the longitudinal distribution direction is defined as the y-axis of the scanning measuring plane, and the direction perpendicular to the scanning measuring plane and directed to the optical element 4 to be measured is defined as the z-axis of the scanning measuring plane. The position of the sub-aperture 4a on the scanning measurement plane can thus easily be calculated, facilitating the movement and positioning of the industrial robot 1.
S5: scanning measurement of the optical element 4 to be measured
First, the interferometer 2 is moved to the sub-aperture 4a position Si,jWhere the indices i and j indicate that the sub-aperture is located in row i, column j. And adjusting the pose of the industrial robot 1 to obtain the number of interference fringes as few as possible, and measuring the surface shape. Subtracting the system error Ws stored in step S3 from the measurement result to obtain a sub-aperture surface shape result Wi,jAnd stores it. The interferometer 2 is then moved to the next sub-aperture 4a position according to the defined scan path. Therefore, the interferometer 2 is used for scanning and measuring the optical element 4 to be measured, and the surface shape measurement data of the sub-aperture 4a of the plane to be measured of the optical element 4 is obtained. In the step S5, in the step S,and deducting the system error Ws from the measured data of each sub-aperture 4a surface shape.
S6: sub-aperture 4a stitching
And splicing and calculating the surface shape measurement data of each sub-aperture 4a according to the position information of the sub-aperture 4a to obtain the full-aperture surface shape measurement result of the optical element 4 to be measured in the attitude, and storing the full-aperture surface shape measurement result.
The utility model has the advantages of the structure is nimble simple, the range of application is wide, high-efficient safety, environmental suitability are good, has advantages such as sub-aperture interferometry's high spatial resolution concurrently, can satisfy the heavy-calibre optical element plane shape of face high accuracy measurement problem on throne under the various gravity gestures simultaneously, can carry out the plane shape of face measurement that the surface was not handled such as coating film or hacking.
Finally, it should be noted that the above description is only a preferred embodiment of the present invention, and those skilled in the art can make various similar representations without departing from the spirit and the scope of the present invention.
Claims (6)
1. The utility model provides a plane shape of face subaperture concatenation interferometry device based on robot which characterized in that: comprises an interferometer (2), an industrial robot (1) and a coordinate system establishing component, the interferometer (2) can be arranged on the industrial robot (1) through a connecting tool (3), and can carry out plane surface shape sub-aperture splicing interference measurement on the optical element (4) under the drive of the industrial robot (1), the coordinate system establishing component comprises a reference part (5) arranged beside the industrial robot (1) and a calibration part (6) calibrated based on the reference part (5), the calibration piece (6) comprises a connecting disc (61) capable of being installed on the industrial robot (1) and a calibration rod (62) arranged on one side of the connecting disc (61), the extension direction of the calibration rod (62) is parallel to a connecting disc mounting axis (61a) of the connecting disc (61), the point of the calibration rod (62) which is farthest away from the connecting disc (61) is a calibration point (62 a);
when the interferometer (2) is installed on the connecting tool (3), the distance between the optical axis (2a) of the interferometer (2) and the connecting tool installation axis (3a) of the connecting tool (3) is equal to the distance between the calibration point (62a) and the connecting disc installation axis (61a), and the distance between the front end face of the reference mirror (7) installed at the front end of the interferometer (2) and the rear end face of the connecting tool (3) is equal to the distance between the calibration point (62a) and the rear end face of the connecting disc (61).
2. The robot-based planar sub-aperture stitching interferometry device of claim 1, wherein: the calibration rod (62) is installed on the connecting disc (61) through a connecting support (63), and the connecting support (63) comprises a first connecting rod (631) coaxially installed on the connecting disc (61) and a second connecting rod (632) with two ends respectively connected with the first connecting rod (631) and the calibration rod (62).
3. The robot-based planar sub-aperture stitching interferometry device of claim 1, wherein: the reference piece (5) comprises a reference base (51) and a reference rod (52) vertically arranged on the reference base (51), the upper end of the reference rod (52) and one end, far away from the connecting disc (61), of the calibration rod (62) are both conical structures, and the vertex of the conical structure of the calibration rod (62) is the calibration point (62 a).
4. The robot-based planar sub-aperture stitching interferometry device of claim 1, wherein: the interferometer (2) adopts a dynamic interferometer.
5. The robot-based planar sub-aperture stitching interferometry device of claim 1, wherein: the reference mirror (7) is arranged at the front end of the interferometer (2) through a two-dimensional adjusting mirror frame (8).
6. The robot-based planar sub-aperture stitching interferometry device of claim 1, wherein: an optical element support mechanism (9) for supporting an optical element (4) is arranged beside the industrial robot (1).
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN201921158225.4U CN209991947U (en) | 2019-07-22 | 2019-07-22 | Plane surface shape subaperture splicing interference measuring device based on robot |
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| CN201921158225.4U CN209991947U (en) | 2019-07-22 | 2019-07-22 | Plane surface shape subaperture splicing interference measuring device based on robot |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110243306A (en) * | 2019-07-22 | 2019-09-17 | 中国工程物理研究院激光聚变研究中心 | Plane surface shape sub-aperture stitching interferometer measuring device and method based on robot |
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2019
- 2019-07-22 CN CN201921158225.4U patent/CN209991947U/en not_active Expired - Fee Related
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN110243306A (en) * | 2019-07-22 | 2019-09-17 | 中国工程物理研究院激光聚变研究中心 | Plane surface shape sub-aperture stitching interferometer measuring device and method based on robot |
| CN110243306B (en) * | 2019-07-22 | 2024-06-11 | 中国工程物理研究院激光聚变研究中心 | Plane surface shape sub-aperture splicing interferometry device and method based on robot |
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Granted publication date: 20200124 Termination date: 20200722 |