CN113091653B - Device and method for measuring angle freedom degree error of linear guide rail based on pentaprism - Google Patents
Device and method for measuring angle freedom degree error of linear guide rail based on pentaprism Download PDFInfo
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- CN113091653B CN113091653B CN202110419198.7A CN202110419198A CN113091653B CN 113091653 B CN113091653 B CN 113091653B CN 202110419198 A CN202110419198 A CN 202110419198A CN 113091653 B CN113091653 B CN 113091653B
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- autocollimator
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/26—Measuring arrangements characterised by the use of optical techniques for measuring angles or tapers; for testing the alignment of axes
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Abstract
The invention discloses a device and a method for measuring angle freedom degree errors of a linear guide rail based on a pentaprism. The device comprises a sliding table, a pentaprism, a first plane reflector, a second plane reflector, a first autocollimator, a second autocollimator and a computer, wherein the sliding table is slidably mounted on a linear guide rail to be detected, the pentaprism is fixedly mounted on the sliding table, the first plane reflector is fixedly mounted on the sliding table perpendicular to the extending direction of the linear guide rail to be detected, the second plane reflector is mounted on the side of the linear guide rail to be detected in parallel, and the first autocollimator and the second autocollimator are connected with the computer. The device can simultaneously complete the real-time measurement of three angles; the device has a simple structure, and the roll angle is calculated by utilizing the influence of the posture of the pentaprism on the emergent light vector; the measuring precision is high and is only influenced by the resolution precision of the autocollimator and the precision of the plane mirror.
Description
Technical Field
The invention relates to the technical field of optical measurement, in particular to a device and a method for calculating the influence of the posture change of a pentaprism on the emergent light angle by utilizing matrix optics, which are used for detecting three-angle-degree-of-freedom errors of a linear guide rail.
Background
Three angular degree of freedom errors exist in the motion process of the mechanical slide rail, and the longer the stroke, the larger the error generated. In the field of optical measurement, angle changes often have a non-negligible effect on the measurement result. Most sliding rail manufacturers only mark errors of straightness, positioning accuracy, pitch angle, yaw angle and the like of products, but rarely mark rolling angle errors of the sliding rails, mainly because wide-range high-accuracy direct measurement of the rolling angle of the guide rail is difficult to realize. However, this index is very important in some optical detection scenarios, and error correction is required according to the value of the index.
In general, we can measure three angles of the slide rail in two steps with a commercial autocollimator. Firstly, an autocollimator is fixed at one end of a sliding rail, a reflector is matched on a sliding table to measure a pitch angle and a yaw angle, then the autocollimator is fixed on the sliding table, a large-size plane reflector is used for measuring a roll angle, the autocollimator moves along with the sliding table to influence the precision of the autocollimator, and the roll angle obtained in the way is influenced by the yaw angle.
The patent application with the application number of CN201710590583.1 and the publication number of CN107462210A discloses a linear guide rail roll angle measuring device based on double pentaprisms. The device utilizes an auxiliary slide rail to replace a large-size reflector, utilizes two pentaprisms which form an angle of 90 degrees with each other to avoid the influence of the rotation angle of the auxiliary slide rail, neglects the influence of the posture change of the pentaprisms on the change of emergent light angles, and can only measure the roll angle.
Disclosure of Invention
Aiming at the problems in the prior art, the invention aims to provide a quick, simple and convenient method for detecting three angular degree of freedom errors of a linear guide rail, which is used for error correction of an optical system, has simple measuring process and high speed, and can obtain a result by single measurement.
In order to achieve the purpose, the technical scheme adopted by the invention is as follows:
device based on pentaprism measurement linear guide angle degree of freedom error, including slip table, pentaprism, first plane speculum, second plane speculum, first autocollimator, second autocollimator, computer, the slip table slidable mounting is on the linear guide that awaits measuring, pentaprism fixed mounting is on the slip table, the pentaprism has two faces of mutually perpendicular, and one of them face is parallel with the linear guide that awaits measuring, and another face is perpendicular with the linear guide that awaits measuring, the extending direction fixed mounting of first plane speculum perpendicular to the linear guide that awaits measuring on the slip table, the second plane speculum is installed in the side of the linear guide that awaits measuring parallelly, first autocollimator and second autocollimator all link to each other with the computer.
Furthermore, the second plane mirror at least covers the sliding range of the sliding table along the axial size of the linear guide rail to be measured.
Further, during the use process, the posture changes of the pentaprism and the first plane mirror are the same.
The method for measuring the angular degree of freedom error of the linear guide rail based on the pentaprism comprises the following steps:
step one, installation: installing the device for measuring the angle degree of freedom error of the linear guide rail based on the pentaprism;
step two, adjustment: adjusting the sliding table to the leftmost end as a reference position, adjusting the posture of the first autocollimator to enable reflected light to reach the central position, wherein the incident light is parallel to the second plane reflector, adjusting the posture of the second autocollimator to enable the reflected light to reach the central position, and the incident light is perpendicular to the first plane reflector;
step three, measurement: enabling the sliding table to move forwards, and enabling the posture of the sliding table to change along with the change of the position of the sliding table, wherein a pitch angle and a yaw angle are directly read out through a second autocollimator, reflected light angle information of the first autocollimator is read, and a vector of emergent light is calculated;
and step four, reversely deducing the roll angle by using the emergent light vector and the two angles obtained in the step three through a matrix optical method.
Further, in the fourth step, the roll angle is reversely deduced by solving the following formula:
wherein the incident light vector
Is a unit vector in the x-axis direction, an emergent light vector
Can be calculated from the first autocollimator reading, F is the second plane mirror reflection matrix, R is the angle of pitch theta y Yaw angle theta z And roll angle theta x Of the pentaprism, and theta y And theta z Can be directly read by a second autocollimator, and the right side of the formula is only theta x Is an unknown quantity, and the rolling angle theta can be obtained only by programming and resolving a nonlinear equation x ；
Further, the first autocollimator and the second autocollimator do not move during the measurement.
Compared with the prior art, the invention has the beneficial effects that:
the invention can simultaneously complete the real-time measurement of three angles by being equipped with two autocollimators, a pentaprism, a plane mirror, a large-size plane mirror and other devices. According to the method, on the basis of directly measuring the pitch angle, the roll angle and the emergent light vector of the pentaprism, the roll angle is reversely deduced by utilizing the influence of the posture change of the pentaprism on the emergent light vector, and the structure is simple. The autocollimator does not need to move in the measuring process, and because the influence on the posture of the pentaprism is completely analyzed, the precision is high, and the autocollimator is only influenced by the resolution precision of the autocollimator and the precision of the plane mirror, the defect that the measuring precision is influenced because the autocollimator moves along with the sliding table in the prior art is overcome, and more conveniently, three angular degree of freedom errors of any position can be obtained only by once measurement.
Drawings
FIG. 1 is a schematic diagram of a device for measuring an angular degree of freedom error of a linear guide rail by a pentaprism method;
FIG. 2 is a schematic diagram of pentaprism coordinates;
FIG. 3 is a schematic diagram of incident light vectors of a pentaprism;
fig. 4 is a schematic diagram of an emergent light vector of the pentaprism.
The mark in the figure is: 1. a computer; 2. a first autocollimator; 3. a second autocollimator; 4. a second planar mirror; 5. a linear guide rail to be detected; 6. a pentaprism; 7. a pentaprism bracket; 8. a first planar mirror; 9. and a sliding table.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings.
The embodiment provides a device for measuring the angular degree of freedom error of a linear guide rail based on a pentaprism, as shown in fig. 1. The device comprises a sliding table 9, a pentaprism 6, a first plane reflector 8, a second plane reflector 4, a first autocollimator 2, a second autocollimator 3 and a computer 1. The sliding table 9 is slidably mounted on the linear guide rail 5 to be measured, the pentaprism 6 is fixedly mounted on the sliding table 9, and the pentaprism 6 has two surfaces which are perpendicular to each other, wherein one surface is parallel to the linear guide rail 5 to be measured, and the other surface is perpendicular to the linear guide rail 5 to be measured. The first plane reflector 8 is fixedly arranged on the sliding table 9 perpendicular to the extending direction of the linear guide rail 5 to be measured, and the second plane reflector 4 is arranged on the side of the linear guide rail 5 to be measured in parallel. During use, the posture of the pentaprism 6 and the first plane mirror 8 changes the same. The first autocollimator 2 and the second autocollimator 3 are both connected to the computer 1. The device can simultaneously complete the real-time measurement of three angles; the device has a simple structure, and the roll angle can be calculated by utilizing the influence of the posture of the pentaprism on the emergent light vector; the device has high measurement precision which is only affected by the resolution precision of the autocollimator and the precision of the plane mirror.
In this embodiment, the axial dimension of the second plane mirror 4 along the linear guide 5 to be measured at least covers the sliding range to the sliding table 9.
In order to make the installation process more convenient and accurate, the embodiment preferably installs the pentaprism 6 on a pentaprism support 7, and at the same time, vertically installs the first plane mirror 8 on the side of the pentaprism support 7.
The embodiment also provides a linear guide rail angle degree of freedom error measuring method based on the device, which comprises the following steps:
step one, installation:
the sliding table 9 is slidably mounted on the linear guide rail 5 to be tested, and the pentaprism 6 is fixed on the sliding table 9 through the pentaprism support 7, so that one of two mutually perpendicular surfaces of the pentaprism 6 is parallel to the linear guide rail 5 to be tested, and the other surface is perpendicular to the linear guide rail 5 to be tested. And fixing the first plane reflector 8 on the side surface of the pentaprism support 7 in a manner of being vertical to the extending direction of the linear guide rail 5 to be measured. The second plane mirror 4 of large size is installed so as to be substantially parallel to the guide rail axial direction.
Step two, adjusting:
adjusting the sliding table 9 to the leftmost end as a reference position, connecting the first autocollimator 2 and the second autocollimator 3 to the computer 1, adjusting the posture of the first autocollimator 2 to enable reflected light to reach the central position, enabling incident light to be parallel to the large-sized second plane reflector 4 at the moment, setting the pitch angle, the yaw angle and the roll angle of the pentaprism to be zero at the moment, adjusting the posture of the second autocollimator 3 to enable the reflected light to reach the central position, and enabling the incident light to be perpendicular to the first plane reflector 8 at the moment.
Step three, measurement:
the sliding table 9 is moved forward, the posture of the sliding table 9 is changed along with the change of the position of the sliding table, the pitch angle and the yaw angle are directly read through the second autocollimator 3, the angle information of the reflected light of the first autocollimator 2 is read (since the angle information read by the autocollimator is automatically halved after the reflection action is considered, the numerical value of the autocollimator 1 needs to be multiplied by 2 when being substituted into the calculation), and the vector of the emitted light is calculated. The first autocollimator 2 and the second autocollimator 3 do not need to be moved during the measurement.
Step four, reversely deducing a roll angle theta by using the emergent light vector and two angle data (pitch angle and yaw angle) obtained in the step three x . The calculation process is as follows:
assuming that a light beam is incident in a direction perpendicular to a cross section of the pentaprism, a three-dimensional coordinate system is established with reference to fig. 2, in which an x-axis is along a slide axis direction, and incident and outgoing light vectors of the pentaprism are as shown in fig. 3 and 4. Let the incident light vector
And at this time the pitch angle theta y Yaw angle theta z Angle of roll theta x All are zero, and the emergent light is folded by 90 degrees.
Establishing a movable coordinate system, coinciding the movable coordinate system with the static coordinate system at the initial position, and assuming that the movable coordinate system respectively rotates theta around the x axis, the y axis and the z axis when the pentaprism moves forwards along with the sliding table x 、θ y 、θ z And the angles are respectively the following transformation matrixes from the fixed coordinate system to the moving coordinate system:
S x 、S y 、S z are all orthogonal matrices, so moving to fixed coordinatesIs to convert the matrix into S x -1 ＝S x T ，S y 、S z The same is true. Suppose that the pentaprism rotates only theta about the x-axis x Angle, then the first time the incident light passes through the turning matrix of the pentaprism is:
wherein Q is a pentaprism 90-degree turn matrix:
let the incident light vector
Vector of emergent light
Respectively as follows:
consider θ x 、θ y 、θ z In the case of simultaneous occurrence, the first pass of the incident light through the pentaprism's turn matrix is:
r is with respect to theta x 、θ y 、θ z The plane mirror reflection matrix is:
the matrix of the light beam which is reflected by the plane mirror and then is refracted by the pentaprism for the second time is R -1 The emergent light vector is:
because of the reflection matrix F and the incident light vector
Is known, therefore
Only with theta x 、θ y 、θ z And (4) correlating.
Let the emergent light angles measured by the first autocollimator be theta y ′、θ z ′。
a ′2 +b ′2 +c ′2 ＝1# (11)
By combining the above equations, a ', b ', c ' can be obtained
Known as θ in R y 、θ z Can be read directly from the second autocollimator, only theta x Is an unknown quantity, and can be obtained by solving a nonlinear equation according to the programming of the formula (10) x . When the flatness of the plane mirror is good and the angular degree of freedom error of the linear guide rail is small, b 'is approximately 0, the numerical precision is greatly influenced by the precision of the autocollimator, and c' (the third row of the matrix) is suitable for calculation to ensure the precision.
The second plane mirror 4 used in the method is a large-size plane mirror which is common in optical detection and can achieve a good precision level, and in addition, since the emergent light of the autocollimator is a uniform wide light beam instead of a point light source, the error caused by receiving reflected light for imaging is very small; in addition, the influence brought by the pentaprism machining error is small, and the influence on the measurement precision can be ignored.
The method for measuring the angular degree of freedom error of the linear guide rail utilizes the influence of the posture of the pentaprism on the change of the emergent light angle to reversely deduce the roll angle of the pentaprism (sliding table). The angular errors of the linear guide in three directions are obtained by only one measurement, and no additional step is needed except for data calculation.
In conclusion, the invention provides a device and a method for measuring the angular degree of freedom error of a linear guide rail based on a pentaprism, wherein the device comprises a first autocollimator, a second autocollimator, a pentaprism bracket, a reflector, a large-size reflector and a computer, the pentaprism and a plane reflector are fixed on a sliding table through the pentaprism bracket in the using process, the posture changes are the same, and the high-precision measurement of the angular degree of freedom error (a yaw angle, a pitch angle and a roll angle) of the linear guide rail at any position is realized. The invention has high measuring speed without an auxiliary guide rail, overcomes the problems that the roll angle of the sliding table is difficult to detect and three angular degree of freedom errors cannot be detected simultaneously by a common device, analyzes the influence of the posture of the pentaprism on the emergent light vector in detail and improves the measuring precision.
The above description is only for the purpose of illustrating the preferred embodiments of the present invention and is not to be construed as limiting the present invention. Any modification, equivalent replacement, and improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (3)
1. The method for measuring the angular degree of freedom error of the linear guide rail based on the pentaprism is characterized by comprising the following steps of:
step one, installation: the device for measuring the angle degree of freedom error of the linear guide rail based on the pentaprism comprises a sliding table (9), the pentaprism (6), a first plane reflecting mirror (8), a second plane reflecting mirror (4), a first autocollimator (2), a second autocollimator (3) and a computer (1), wherein the sliding table (9) is slidably mounted on the linear guide rail (5) to be measured, the pentaprism (6) is fixedly mounted on the sliding table (9), the pentaprism (6) is provided with two mutually perpendicular surfaces, one surface is parallel to the linear guide rail (5) to be measured, the other surface is perpendicular to the linear guide rail (5) to be measured, the first plane reflecting mirror (8) is fixedly mounted on the sliding table (9) perpendicular to the extending direction of the linear guide rail (5) to be measured, the second plane reflecting mirror (4) is parallelly mounted on the side of the linear guide rail (5) to be measured, and the first autocollimator (2) and the second autocollimator (3) are both connected with the computer (1); the second plane reflector (4) at least covers the sliding range of the sliding table (9) along the axial size of the linear guide rail (5) to be detected;
step two, adjustment: adjusting the sliding table (9) to the leftmost end as a reference position, adjusting the posture of the first autocollimator (2) to enable reflected light to reach the central position, wherein the incident light is parallel to the second plane reflector (4), adjusting the posture of the second autocollimator (3) to enable the reflected light to reach the central position, and the incident light is perpendicular to the first plane reflector (8);
step three, measurement: the sliding table (9) moves forwards, the posture of the sliding table (9) changes along with the change of the position of the sliding table, the pitch angle and the yaw angle are directly read out through the second autocollimator (3), the angle information of reflected light of the first autocollimator (2) is read, and the vector of emergent light is calculated; in the using process, the posture changes of the pentaprism (6) and the first plane mirror (8) are the same;
and step four, reversely deducing the roll angle by using the emergent light vector and the two angles obtained in the step three through a matrix optical method.
2. The method for measuring the angular degree of freedom error of the linear guide rail based on the pentaprism as claimed in claim 1, wherein in the fourth step, the roll angle is reversely deduced by solving the following formula:
wherein the incident light vector
Is a unit vector in the x-axis direction, an outgoing light vector
Can be calculated from the first autocollimator reading, F is the second plane mirror reflection matrix, and R is the pitch angle θ y Yaw angle theta z And roll angle theta x Of the pentaprism, and theta y And theta z Can be directly read out by a second autocollimator, and only theta is on the right side of the formula x Is an unknown quantity, and the rolling angle theta can be obtained only by programming and resolving a nonlinear equation x 。
3. The pentaprism-based linear guide angular degree of freedom error measurement method according to claim 1, characterized in that the first autocollimator (2) and the second autocollimator (3) do not move during the measurement.
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| CN114526693B (en) * | 2022-01-20 | 2023-11-21 | 重庆邮电大学 | Rolling angle measurement method based on non-standard cylindrical angle cone mirror |
| CN114858096B (en) * | 2022-05-19 | 2023-05-23 | 长春工业大学 | Horizontal light path transfer goniometer and measuring method |
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| CN2066570U (en) * | 1990-07-02 | 1990-11-28 | 中国计量科学研究院 | Standard measuring instrument for optic space angle |
| JPH06102030A (en) * | 1991-12-05 | 1994-04-12 | Chuo Seiki Kk | Planarity measuring apparatus |
| JP2009300180A (en) * | 2008-06-11 | 2009-12-24 | Mitsutoyo Corp | Straightness measuring device |
| CN102519424A (en) * | 2011-12-15 | 2012-06-27 | 航天科工惯性技术有限公司 | Accelerometer mounting tool angle change monitoring system |
| CN106863013A (en) * | 2017-01-22 | 2017-06-20 | 西安交通大学 | The multiple degrees of freedom error simultaneous measuring apparatus and method of a kind of linear feeding system |
| CN107462210A (en) * | 2017-07-19 | 2017-12-12 | 中国科学院上海光学精密机械研究所 | The rolling angle measurement device of line slideway |
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2021
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Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN2066570U (en) * | 1990-07-02 | 1990-11-28 | 中国计量科学研究院 | Standard measuring instrument for optic space angle |
| JPH06102030A (en) * | 1991-12-05 | 1994-04-12 | Chuo Seiki Kk | Planarity measuring apparatus |
| JP2009300180A (en) * | 2008-06-11 | 2009-12-24 | Mitsutoyo Corp | Straightness measuring device |
| CN102519424A (en) * | 2011-12-15 | 2012-06-27 | 航天科工惯性技术有限公司 | Accelerometer mounting tool angle change monitoring system |
| CN106863013A (en) * | 2017-01-22 | 2017-06-20 | 西安交通大学 | The multiple degrees of freedom error simultaneous measuring apparatus and method of a kind of linear feeding system |
| CN107462210A (en) * | 2017-07-19 | 2017-12-12 | 中国科学院上海光学精密机械研究所 | The rolling angle measurement device of line slideway |
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