CN103245303A - Multi-pose large-caliber plane optical element surface shape detecting device and method - Google Patents
Multi-pose large-caliber plane optical element surface shape detecting device and method Download PDFInfo
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Abstract
The invention discloses a multi-pose large-caliber plane optical element surface shape detecting device and method. The detecting device comprises an optical system (1), a three-dimensional precision motion platform (2) and a surface shape detecting controlling and processing system (3), wherein the three-dimensional precision motion platform (2) comprises a vertically moving guide rail (4), a horizontally moving guide rail (5) and a rotationally moving platform (6), and is used for realizing the two-dimensional scanning motion in the surface shape measuring process of an optical element in different poses; and the surface shape detecting controlling and processing system (3) is used for realizing motion control on the three-dimensional precision motion platform (2), and functions of pose adjustment, light spot information acquisition, surface shape reconstruction and surface shape drawing of the optical system (1). The device and the method have the advantages that the measuring precision of a system is improved, the technologies, such as a high-precision angular instrument, a catwalk manner measuring method and optical system pose automatic correcting are adopted, and the detecting precision can reach 1/6 of the wavelength.
Description
Technical field
The invention belongs to the machine vision technique detection range, relate generally to a kind of colourful attitude heavy-calibre planar optical elements surface shape detection apparatus and method, its design utilizes the angular difference principle to carry out the apparatus and method that the element surface face shape under the different attitudes is detected.
Background technology
Face shape technology mainly contains methods such as angular difference method, LTP, transient state interferometer and Hartmann's detection.The angular difference ratio juris is that the variation of face shape can reflect by the variable quantity of its each point normal direction angle, adopt the face shape of the method reconstructing element of high precision measurement angle variable quantity, Xinan Science and Technology Univ. has developed the optical elements of large caliber surface shape detection apparatus, and accuracy of detection reaches 1/3 wavelength.LTP adopts light pencil interferometry principle, if detected face is relatively perpendicular to the plane inclination certain angle of optical axis, then the interference fringe on the focus planardetector of LTP just has movement, by its displacement of accurate measurement, just can obtain the change curve of bank error, just can obtain the height error curve to this curvilinear integral, its measuring accuracy can reach 1/20 wavelength.The transient state interferometer is the interference system that the common road shearing interferometer technology that space bit is modulated is mutually combined with the digitized wave surface technology, can adopt near infrared as testing light source, and measuring accuracy can reach wavefront root mean square and be better than 1/15 wavelength.Hartman test is the detection method of sampling by a corrugated that some apertures are arranged, and is subjected to ectocine little, and testing environment is required to require low than the testing environment of interferometer; But the design of the optical system of the heavy caliber Hartmann beam-expanding system that needs in the experiment, Structural Design Requirement height, and cost is also high.It is high to adopt interferometric method that testing environment is required, and the online testing conditions in the ICF laboratory is difficult to satisfy the requirement of transient state interferometer or LTP, and can not carry out face shape to the optical element that is in different heeling conditions and detect.
Chinese invention patent ZL200910058280.0, this scheme utilizes the measured optical unit to be reference substance, and utilizes the one dimension unchangeability of pentaprism, has overcome traditional angular difference method and can not effectively deduct the measuring error problem that motion platform brings because of mechanical motion or vibration etc.Simultaneously owing to adopted two bundle reference lighies in (row) test in the vertical direction, can effectively deduct and vibrate the influence that brings, simultaneously also with the measured optical unit as absolute reference, thereby can also deduct the error of bringing because of foundation vibration, atmosphere vibration etc.; Because adopt gantry structure, for the detection of super large optical element, its bodily form is huge, the debug time under different attitudes is longer, and accuracy of detection only has 1/3 wavelength.
Summary of the invention
Technical matters to be solved by this invention is to provide a kind of colourful attitude heavy-calibre planar optical elements surface shape detection apparatus and method at the deficiencies in the prior art.
Technical scheme of the present invention is as follows:
A kind of colourful attitude heavy-calibre planar optical elements surface shape detection apparatus comprises that optical system (1), three-dimensional precision movement platform (2) and face shape are detected control and disposal system (3); Three-dimensional precision movement platform (2) comprises vertical movement guide rail (4), horizontal moving guide rail (5) and the platform that rotatablely moves (6); Three-dimensional precision movement platform (2) is used for realization to the two-dimensional scan campaign of the surface shape measurement process of optical element under the different attitudes; Face shape is detected control and is realized that with disposal system (3) motion control, the attitude adjustment of optical system (1), facula information collection, the reconstruct of face shape, face shape to three-dimensional precision movement platform (2) are drawn function; Optical system (1) comprises optical head (8), wedge mirror group (9) and is fixed on the terminal periscope (10) of optical head (8); Optical head (8) produces a branch of high-quality parallel beam and obtains from the picture of the light beam of detected element reflected back, the a branch of directional light that comes out from optical head (8) is by after the wedge mirror group (9), be divided into 2 * 2 bundle parallel beams, through inciding optical element surface behind the periscope (10), enter CCD camera (16) imaging after the reflection and form 2 * 2 hot spots; Do two-dimensional scan control by high-accuracy motion platform, utilize laser facula in the detected image in the horizontal direction with vertical direction on displacement, the face shape that reconstructs the detected element surface distributes.
Described surface shape detection apparatus, described optical head (8) comprises laser instrument (11), autocollimator (12), spectroscope (13), expand tube (14), lens (15) and CCD camera (16), the pointolite that is produced by laser instrument (11) produces a branch of directional light by autocollimator (12), through spectroscope (13) with after expanding tube (14), directional light after formation expands incides the detected element surface, directional light after the reflection passes through the picture that lens (15) and CCD camera (16) form reflection back light beam again through after expanding tube (14) and spectroscope (13).
Described surface shape detection apparatus, described wedge mirror group (9) comprises 2 wedge-shaped lens, 2 wedge-shaped lens are the L type and place.
Described surface shape detection apparatus, described periscope (10) comprises first catoptron (17), second catoptron (18) and two dimension tilt platform (19) fast, and two dimension is the two-dimentional quick slant function of tilt platform (19) realization second catoptron (18) fast.
Described surface shape detection apparatus carries out the method that face shape is detected, and comprises following flow process:
(1) described surface shape detection apparatus is relative with tested planar optical elements and put, regulate fine motion machinery adjusting mechanism, make the vertical movement guide rail (4) of tested planar optical elements measured surface and surface shape detection apparatus and the plane parallel that horizontal guide rail (5) is formed; Tested planar optical elements for become angle with the plane that vertical movement guide rail (4) and horizontal guide rail (5) are formed drives rotary optical head (8) by actuating unit and control system thereof, makes tested planar optical elements parallel with surface shape detection apparatus;
(2) power supply of unlatching laser instrument (11), the directional light that optical head (8) produces, to tested planar optical elements, turn back to optical head (8) through wedge mirror group (9), periscope (10) again, enter CCD camera (16) through spectroscope (13) and pool 2x2 laser facula;
(3) motion step-length, the origin coordinates initial point of motion, the automatic correction accuracy of optical head attitude of size, vertical movement guide rail (4) and the horizontal moving guide rail (5) of the tested planar optical elements of setting;
(4) laser instrument (11) preheating is after 30 minutes, and actuating unit drives optical head (8) tested planar optical elements is adopted from left to right, and mode is carried out two-dimensional scan from top to bottom; At each measurement point, by the quick tilt platform of two dimension (19), system judges whether the upper left corner hot spot of reflected back and a last measurement point are in same position, if same position, then the adjustment of optical system attitude finishes;
(5) face shape is detected control and is gathered the hot spot that forms by detected element reflected back CCD camera (16) with disposal system (3), image is handled the centroid position that obtains hot spot, and the face shape that reconstructs tested planar optical elements by conventional face shape restructing algorithm distributes.
The present invention has promoted the measuring accuracy of system, adopts high precision angle-measuring instrument, mannequin's steps method measuring method and optical system attitude from technology such as normal moveout correction, and accuracy of detection can reach 1/6 wavelength.
Description of drawings
Fig. 1 forms synoptic diagram for system;
Fig. 2 is the system architecture synoptic diagram;
Fig. 3 forms synoptic diagram for optical system;
Fig. 4 is the optical head principle schematic;
Fig. 5 adjusts (periscope) schematic diagram automatically for the optical head attitude;
Fig. 6 is mannequin's steps method measuring principle;
Embodiment
Below in conjunction with specific embodiment, the present invention is described in detail.
As Fig. 1 colourful attitude heavy-calibre planar optical elements surface shape detection apparatus of the present invention, comprise that optical system 1, three-dimensional precision movement platform 2 and face shape are detected control and disposal system 3.Three-dimensional precision movement platform 2 comprises vertical movement guide rail 4, horizontal moving guide rail 5 and the platform 6 that rotatablely moves as shown in Figure 2.Three-dimensional precision movement platform 2 is mainly realized the two-dimensional scan campaign in the surface shape measurement process of optical element under the different attitudes.Face shape is detected control and is realized that with disposal system 3 motion control, the attitude adjustment of optical system 1, facula information collection, the reconstruct of face shape, face shape to three-dimensional precision movement platform 2 are drawn function.
As shown in Figure 3, optical system 1 comprises optical head 8, wedge mirror group 9 and is fixed on the periscope 10 of optical head 8 ends; The a branch of directional light that comes out from optical head 8 is divided into 2 * 2 bundle parallel beams by after the wedge mirror group 9, incides optical element surface through behind the periscope 10, enters 16 imagings of CCD camera after the reflection and forms 2 * 2 hot spots.
As shown in Figure 4, optical head 8 comprises laser instrument 11, autocollimator 12, spectroscope 13, expands tube 14, lens 15 and CCD camera 16, and its function is to produce a branch of high-quality parallel beam and produce from the picture of the light beam of detected element reflected back.The pointolite that is produced by laser instrument 11 produces a branch of directional light by autocollimator 12, through spectroscope 13 with after expanding tube 14, directional light after formation expands incides the detected element surface, directional light after the reflection forms the picture (hot spot) that reflects the back light beam through lens 15 and CCD camera 16 again through after expanding tube 14 and spectroscope 13.
Wedge mirror group 9 comprises 2 wedge-shaped lens, and 2 wedge-shaped lens are the L type and place; As shown in Figure 5, periscope 10 comprises first catoptron 17, second catoptron 18 and two dimension tilt platform 19 fast, and two dimension is the two-dimentional quick slant function of tilt platform 19 realizations second catoptron 18 fast.
The a branch of directional light that comes out from optical head 8 is divided into 2 * 2 bundle parallel beams by after the wedge mirror group 9, incides optical element surface through behind the periscope 10, and reflection enters CCD camera 16 behind tube 14, the spectroscope 13 and forms 2 * 2 hot spots by expanding.Do two-dimensional scan control by high-accuracy motion platform, utilize laser facula in the detected image in the horizontal direction with vertical direction on displacement, the face shape that reconstructs the detected element surface distributes.For the optical element that different attitudes are placed, adopt rotation platform rotary optical head 8 to make optical head 8 parallel with the measured optical unit, carry out the two-dimensional scan campaign to obtain the face shape of detected element by high-accuracy motion platform then.
Detect the error of bringing for face shape for eliminating because of motion platform beat and the pitching on the vertical direction etc. in the horizontal direction, second catoptron 18 is adjusted by the quick tilt platform 19 of two dimension, realizes the precision adjustment to optical head attitude in the scanning motion process.Two dimension tilt platform 19 fast is made up of two-dimensional piezoelectric ceramic stack and micromotion control system, to realize high precision, the attitude adjustment of 2 dimensions fast.The present invention is owing to realize automatically the automatic adjustment of the attitude of the optical system that causes because of mechanical motion is overcome traditional angular difference method and can not directly, effectively deduct the measuring error problem that motion platform brings because of mechanical motion or vibration etc. by fast two-dimensional tilt platform 19.
Mannequin's steps method measuring principle as shown in Figure 6, has 2 bundle measuring beams in the one dimension direction; During measurement, second measuring beam when first measuring beam when requiring the n time measurement and the n-1 time measurement overlaps (as the x among Fig. 6 at the physical location of the measured optical unit
3And x
3' physical location overlap).Because the face shape of the measured optical unit the same area is identical, can reconstruct the face shape of whole optical element by this condition.
Measure flow process:
(1) surface shape detection apparatus of the present invention is relative with tested planar optical elements and put, regulate fine motion machinery adjusting mechanism, make the plane parallel of vertical movement guide rail 4 and horizontal guide rail 5 compositions of tested planar optical elements measured surface and surface shape detection apparatus; Tested planar optical elements for become angle with the plane that vertical movement guide rail 4 and horizontal guide rail 5 are formed drives the rotary optical head by actuating unit and control system thereof, makes tested planar optical elements parallel with surface shape detection apparatus;
(2) power supply of unlatching laser instrument 11, the directional light that optical head 8 produces is waited until tested planar optical elements through wedge mirror group 9, periscope 10, turns back to optical head 8 again, enters CCD camera 16 through spectroscope 13 and pools 2x2 laser facula;
(3) parameters such as the origin coordinates initial point of the motion step-length of size, vertical movement guide rail 4 and the horizontal moving guide rail 5 of the tested planar optical elements of setting, motion, the automatic correction accuracy of optical head attitude;
(4) the laser instrument preheating is after 30 minutes, and actuating unit drives 8 pairs of tested planar optical elements of optical head and adopts from left to right, and mode is carried out two-dimensional scan from top to bottom; At each measurement point, by the quick tilt platform 19 of two dimension, system judges whether the upper left corner hot spot of reflected back and a last measurement point are in same position, if same position, then the adjustment of optical system attitude finishes;
(5) face shape is detected control and is gathered the hot spot that forms by detected element reflected back CCD camera 16 with disposal system 3, image is handled the centroid position that obtains hot spot.The face shape that reconstructs tested planar optical elements by conventional face shape restructing algorithm distributes.
Should be understood that, for those of ordinary skills, can be improved according to the above description or conversion, and all these improvement and conversion all should belong to the protection domain of claims of the present invention.
Claims (5)
1. a colourful attitude heavy-calibre planar optical elements surface shape detection apparatus is characterized in that, comprises that optical system (1), three-dimensional precision movement platform (2) and face shape are detected control and disposal system (3); Three-dimensional precision movement platform (2) comprises vertical movement guide rail (4), horizontal moving guide rail (5) and the platform that rotatablely moves (6); Three-dimensional precision movement platform (2) is used for realization to the two-dimensional scan campaign of the surface shape measurement process of optical element under the different attitudes; Face shape is detected control and is realized that with disposal system (3) motion control, the attitude adjustment of optical system (1), facula information collection, the reconstruct of face shape, face shape to three-dimensional precision movement platform (2) are drawn function; Optical system (1) comprises optical head (8), wedge mirror group (9) and is fixed on the terminal periscope (10) of optical head (8); Optical head (8) produces a branch of high-quality parallel beam and obtains from the picture of the light beam of detected element reflected back, the a branch of directional light that comes out from optical head (8) is by after the wedge mirror group (9), be divided into 2 * 2 bundle parallel beams, through inciding optical element surface behind the periscope (10), enter CCD camera (16) imaging after the reflection and form 2 * 2 hot spots; Do two-dimensional scan control by high-accuracy motion platform, utilize laser facula in the detected image in the horizontal direction with vertical direction on displacement, the face shape that reconstructs the detected element surface distributes.
2. the described surface shape detection apparatus of claim 1, it is characterized in that, described optical head (8) comprises laser instrument (11), autocollimator (12), spectroscope (13), expand tube (14), lens (15) and CCD camera (16), the pointolite that is produced by laser instrument (11) produces a branch of directional light by autocollimator (12), through spectroscope (13) with after expanding tube (14), directional light after formation expands incides the detected element surface, directional light after the reflection passes through the picture that lens (15) and CCD camera (16) form reflection back light beam again through after expanding tube (14) and spectroscope (13).
3. the described surface shape detection apparatus of claim 1 is characterized in that, described wedge mirror group (9) comprises 2 wedge-shaped lens, and 2 wedge-shaped lens are the L type and place.
4. the described surface shape detection apparatus of claim 1, it is characterized in that, described periscope (10) comprises first catoptron (17), second catoptron (18) and two dimension tilt platform (19) fast, and two dimension is the two-dimentional quick slant function of tilt platform (19) realization second catoptron (18) fast.
5. the arbitrary described surface shape detection apparatus of claim 1 to 4 carries out the method that face shape is detected, and it is characterized in that, comprises following flow process:
(1) described surface shape detection apparatus is relative with tested planar optical elements and put, regulate fine motion machinery adjusting mechanism, make the vertical movement guide rail (4) of tested planar optical elements measured surface and surface shape detection apparatus and the plane parallel that horizontal guide rail (5) is formed; Tested planar optical elements for become angle with the plane that vertical movement guide rail (4) and horizontal guide rail (5) are formed drives rotary optical head (8) by actuating unit and control system thereof, makes tested planar optical elements parallel with surface shape detection apparatus;
(2) power supply of unlatching laser instrument (11), the directional light that optical head (8) produces, to tested planar optical elements, turn back to optical head (8) through wedge mirror group (9), periscope (10) again, enter CCD camera (16) through spectroscope (13) and pool 2x2 laser facula;
(3) motion step-length, the origin coordinates initial point of motion, the automatic correction accuracy of optical head attitude of size, vertical movement guide rail (4) and the horizontal moving guide rail (5) of the tested planar optical elements of setting;
(4) laser instrument (11) preheating is after 30 minutes, and actuating unit drives optical head (8) tested planar optical elements is adopted from left to right, and mode is carried out two-dimensional scan from top to bottom; At each measurement point, by the quick tilt platform of two dimension (19), system judges whether the upper left corner hot spot of reflected back and a last measurement point are in same position, if same position, then the adjustment of optical system attitude finishes;
(5) face shape is detected control and is gathered the hot spot that forms by detected element reflected back CCD camera (16) with disposal system (3), image is handled the centroid position that obtains hot spot, and the face shape that reconstructs tested planar optical elements by conventional face shape restructing algorithm distributes.
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| CN106338524A (en) * | 2016-08-23 | 2017-01-18 | 中国科学院自动化研究所 | Microscopic scanning imaging acquisition device for vertical optical element surface damage and method thereof |
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